ES2164525A1 - Procedure for manufacturing a piezoelectric-ferromagnetic hybrid magnetic sensor - Google Patents
Procedure for manufacturing a piezoelectric-ferromagnetic hybrid magnetic sensorInfo
- Publication number
- ES2164525A1 ES2164525A1 ES009900814A ES9900814A ES2164525A1 ES 2164525 A1 ES2164525 A1 ES 2164525A1 ES 009900814 A ES009900814 A ES 009900814A ES 9900814 A ES9900814 A ES 9900814A ES 2164525 A1 ES2164525 A1 ES 2164525A1
- Authority
- ES
- Spain
- Prior art keywords
- ferromagnetic
- procedure
- piezoelectric
- sensor
- magnetic sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Procedure for manufacturing a piezoelectric-ferromagnetic hybrid magnetic sensor.It refers to a complete manufacturing process of a hybrid sensor of ferromagnetic and piezoelectric material. This procedure is characterised in that it uses two different techniques: electrolytic growth of an interface of non-magnetic material, such as copper, on the piezoelectric material and then polishing using the same method, and growth by cathodic deposition of the ferromagnetic material over the piezoelectric material. This procedure allows eliminating the viscose interface used currently in this type of magnetic sensor and thus improve the mechanical coupling between the ferromagnetic and piezoelectric material that constitutes the sensor. This procedure allows increasing the sensitivity and stability over time, reducing the hysteresis of the sensor through the vibration itself, and facilitating the repetitive manufacturing process for its industrial development.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9900814A ES2164525B2 (en) | 1999-04-20 | 1999-04-20 | MANUFACTURING PROCEDURE OF A PIEZOELECTRICO-FERROMAGNETICO HYBRID MAGNETIC SENSOR. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9900814A ES2164525B2 (en) | 1999-04-20 | 1999-04-20 | MANUFACTURING PROCEDURE OF A PIEZOELECTRICO-FERROMAGNETICO HYBRID MAGNETIC SENSOR. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2164525A1 true ES2164525A1 (en) | 2002-02-16 |
ES2164525B2 ES2164525B2 (en) | 2002-10-16 |
Family
ID=8308089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9900814A Expired - Fee Related ES2164525B2 (en) | 1999-04-20 | 1999-04-20 | MANUFACTURING PROCEDURE OF A PIEZOELECTRICO-FERROMAGNETICO HYBRID MAGNETIC SENSOR. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2164525B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109060519A (en) * | 2018-05-27 | 2018-12-21 | 中南大学 | A kind of test method of ultra-thin laminated-metal composite bond strength |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES8705642A1 (en) * | 1984-12-24 | 1987-05-16 | Standard Electrica Sa | Magnetic-field sensor. |
EP0460291A2 (en) * | 1990-06-06 | 1991-12-11 | Siemens Aktiengesellschaft | Magnetic field sensitive apparatus with several magnetic field sensors |
EP0511434A1 (en) * | 1991-04-26 | 1992-11-04 | Mars, Incorporated | Device for measuring a low-flux magnetic field |
US5648721A (en) * | 1993-10-12 | 1997-07-15 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Rotating flux-focusing eddy current probe for flaw detection |
-
1999
- 1999-04-20 ES ES9900814A patent/ES2164525B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES8705642A1 (en) * | 1984-12-24 | 1987-05-16 | Standard Electrica Sa | Magnetic-field sensor. |
EP0460291A2 (en) * | 1990-06-06 | 1991-12-11 | Siemens Aktiengesellschaft | Magnetic field sensitive apparatus with several magnetic field sensors |
EP0511434A1 (en) * | 1991-04-26 | 1992-11-04 | Mars, Incorporated | Device for measuring a low-flux magnetic field |
US5648721A (en) * | 1993-10-12 | 1997-07-15 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Rotating flux-focusing eddy current probe for flaw detection |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109060519A (en) * | 2018-05-27 | 2018-12-21 | 中南大学 | A kind of test method of ultra-thin laminated-metal composite bond strength |
Also Published As
Publication number | Publication date |
---|---|
ES2164525B2 (en) | 2002-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EC2A | Search report published |
Date of ref document: 20020216 Kind code of ref document: A1 Effective date: 20020216 |
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FD2A | Announcement of lapse in spain |
Effective date: 20190726 |