EP2772650A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2772650A3
EP2772650A3 EP14153982.5A EP14153982A EP2772650A3 EP 2772650 A3 EP2772650 A3 EP 2772650A3 EP 14153982 A EP14153982 A EP 14153982A EP 2772650 A3 EP2772650 A3 EP 2772650A3
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum pump
inlet
gas
cooling gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14153982.5A
Other languages
German (de)
French (fr)
Other versions
EP2772650A2 (en
EP2772650B1 (en
Inventor
Michael Schill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2772650A2 publication Critical patent/EP2772650A2/en
Publication of EP2772650A3 publication Critical patent/EP2772650A3/en
Application granted granted Critical
Publication of EP2772650B1 publication Critical patent/EP2772650B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit einem Pumpeneinlass (10), einem Pumpenauslass (14) und einem zwischen dem Pumpeneinlass (10) und dem Pumpenauslass (14) angeordneten Pumpenraum (18) für ein zu pumpendes Gas, sowie mit zumindest einem Kühlgaseinlass (48) für ein Kühlgas zur Kühlung der Vakuumpumpe und mit einem oder mehreren mit dem Kühlgaseinlass (48) gasleitend verbundenen und außerhalb des Pumpenraums (18) angeordneten Hohlbereichen (50, 52, 54) für das Kühlgas, wobei der oder jeder Hohlbereich (50, 52, 54) durch wenigstens eine Komponente (22, 58, 74) der Vakuumpumpe begrenzt ist.

Figure imgaf001
The invention relates to a vacuum pump, in particular a turbomolecular pump, having a pump inlet (10), a pump outlet (14) and a pump chamber (18) arranged between the pump inlet (10) and the pump outlet (14) for a gas to be pumped, and with at least one A cooling gas inlet (48) for a cooling gas for cooling the vacuum pump and having one or more hollow regions (50, 52, 54) for the cooling gas which are gas-conductively connected to the cooling gas inlet (48) and arranged outside the pump chamber (18), the or each hollow region ( 50, 52, 54) is limited by at least one component (22, 58, 74) of the vacuum pump.
Figure imgaf001
EP14153982.5A 2013-02-28 2014-02-05 Vacuum pump Active EP2772650B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013203421.0A DE102013203421A1 (en) 2013-02-28 2013-02-28 vacuum pump

Publications (3)

Publication Number Publication Date
EP2772650A2 EP2772650A2 (en) 2014-09-03
EP2772650A3 true EP2772650A3 (en) 2015-12-16
EP2772650B1 EP2772650B1 (en) 2017-04-05

Family

ID=50031259

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14153982.5A Active EP2772650B1 (en) 2013-02-28 2014-02-05 Vacuum pump

Country Status (5)

Country Link
US (1) US9964121B2 (en)
EP (1) EP2772650B1 (en)
JP (1) JP5859041B2 (en)
CN (1) CN104019041B (en)
DE (1) DE102013203421A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6386737B2 (en) * 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump
JP6390478B2 (en) * 2015-03-18 2018-09-19 株式会社島津製作所 Vacuum pump
JP6666696B2 (en) * 2015-11-16 2020-03-18 エドワーズ株式会社 Vacuum pump
GB2569648A (en) * 2017-12-22 2019-06-26 Edwards Ltd Magnetic shield for a vacuum pump
GB2600476B (en) * 2020-11-02 2023-02-08 Edwards Korea Ltd Thermal management system
JP2022134773A (en) * 2021-03-04 2022-09-15 エドワーズ株式会社 Vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8608801U1 (en) * 1985-04-04 1986-05-15 Leybold-Heraeus GmbH, 5000 Köln Turbomolecular vacuum pump with a rotor and at least one roller bearing
WO1989006319A1 (en) * 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
JP2002039092A (en) * 2000-07-25 2002-02-06 Shimadzu Corp Turbo type dry pump
DE10393602T5 (en) * 2003-08-27 2005-09-29 Taiko Kikai Industries Co., Ltd. Air-cooled, dry vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4438812A1 (en) * 1994-10-31 1996-05-02 Leybold Ag Friction vacuum pump with cooling
DE19508566A1 (en) 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molecular vacuum pump with cooling gas device and method for its operation
JP3396726B2 (en) 2000-07-26 2003-04-14 アリオス株式会社 Ionization gauge
DE10048695A1 (en) * 2000-09-30 2002-04-11 Leybold Vakuum Gmbh Side channel pump for conveying fluid gas mixtures has pump channel running in a spiral coil round rotor
DE10305038A1 (en) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vacuum pumping arrangement
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP
JP2005083271A (en) * 2003-09-09 2005-03-31 Boc Edwards Kk Vacuum pump
DE102006043327A1 (en) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh vacuum pump
JP2009203906A (en) * 2008-02-28 2009-09-10 Ebara Corp Turbo vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8608801U1 (en) * 1985-04-04 1986-05-15 Leybold-Heraeus GmbH, 5000 Köln Turbomolecular vacuum pump with a rotor and at least one roller bearing
WO1989006319A1 (en) * 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
DE3791053T1 (en) * 1987-12-25 1989-12-21 Valerij Borisovic Solochov VACUUM MOLECULAR PUMP
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
JP2002039092A (en) * 2000-07-25 2002-02-06 Shimadzu Corp Turbo type dry pump
DE10393602T5 (en) * 2003-08-27 2005-09-29 Taiko Kikai Industries Co., Ltd. Air-cooled, dry vacuum pump

Also Published As

Publication number Publication date
US20140241853A1 (en) 2014-08-28
EP2772650A2 (en) 2014-09-03
EP2772650B1 (en) 2017-04-05
CN104019041A (en) 2014-09-03
JP5859041B2 (en) 2016-02-10
DE102013203421A1 (en) 2014-08-28
JP2014169697A (en) 2014-09-18
CN104019041B (en) 2017-09-12
US9964121B2 (en) 2018-05-08

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