EP1868269A1 - Electrode assembly - Google Patents

Electrode assembly Download PDF

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Publication number
EP1868269A1
EP1868269A1 EP06012197A EP06012197A EP1868269A1 EP 1868269 A1 EP1868269 A1 EP 1868269A1 EP 06012197 A EP06012197 A EP 06012197A EP 06012197 A EP06012197 A EP 06012197A EP 1868269 A1 EP1868269 A1 EP 1868269A1
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EP
European Patent Office
Prior art keywords
electrode
electrodes
distances
electrode assembly
blade
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06012197A
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German (de)
French (fr)
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EP1868269B1 (en
Inventor
Eckhard Prinz
Peter Palm
Frank FÖRSTER
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Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
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Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
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Application filed by Softal Elektronik GmbH, Softal Electronic Erik Blumenfeld GmbH and Co KG filed Critical Softal Elektronik GmbH
Priority to AT06012197T priority Critical patent/ATE407468T1/en
Priority to EP06012197A priority patent/EP1868269B1/en
Priority to DE502006001508T priority patent/DE502006001508D1/en
Priority to DK06012197T priority patent/DK1868269T3/en
Priority to PCT/EP2007/004851 priority patent/WO2007144075A1/en
Priority to US12/303,454 priority patent/US7859180B2/en
Publication of EP1868269A1 publication Critical patent/EP1868269A1/en
Application granted granted Critical
Publication of EP1868269B1 publication Critical patent/EP1868269B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge

Definitions

  • the invention relates to an electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of sheet material having a plurality of transverse to a transport direction of the web material arranged substantially parallel to each other knife electrodes.
  • Such electrode arrangements are known and are widely used in the plasma treatment or plasma coating of usually electrically non-conductive sheet material, e.g. Plastic film or the like., Used. These electrodes are typically used as high-voltage electrodes with a transport roller opposite the free ends of the blade electrodes and designed as a counterelectrode.
  • the plasma discharge between knife electrodes in the gas gap to the counter electrode is ignited, and the material plasma-treated or -coated.
  • a plasma treatment is typically carried out without the use of precursors, in which case due to the ignited plasma only a change in the surface states of the treated material takes place in order to improve, for example, the adhesion of a later applied coating material or the like.
  • a plasma coating can be carried out with such electrodes, in which case precursors are introduced into the gap or space formed between the electrodes and the web material, which supply the starting materials for the coating.
  • knife electrodes are elongated, blade-like electrodes, which are generally fixed with one of their longitudinal edges in a high-voltage arrangement and form the actual discharge surface with their other longitudinal edge.
  • the blade electrodes are arranged at the same distance between adjacent electrodes, that is, equidistant.
  • the distances between adjacent blade electrodes at the edge of the electrode assembly are greater than in the center thereof.
  • those regions are meant which, viewed in a transport direction of the web material, lie at the front or rear end of the electrode arrangement (cf claim 2).
  • the blade electrodes are preferably arranged according to the specifications of claim 6.
  • the subject of the invention is a device for the continuous plasma treatment or plasma coating of web material with the features of claim 7. It is essential here that the device contains an electrode arrangement as described above.
  • FIG. 1 shows a plasma treatment or coating device 10 provided with an electrode arrangement 1 according to the invention, in excerpts and schematically.
  • the electrode assembly 1 is connected via a separate high voltage supply with insulators 11 relative to the rest of the device 10.
  • a treatment section 12 Opposite a treatment section 12, not shown here in detail, is a transport roller designed as a counterelectrode, with which the web material to be treated or to be coated is guided through the intermediate space between this transport roller and the electrode arrangement 1.
  • the plasma - not shown in FIG. 1 - is ignited between plasma treatment or plasma coating apparatus 10 and transport roller.
  • the electrode assembly 1 is shown enlarged again. It contains an electrode holder 2 and a plurality, in this embodiment a total of 14, knife electrodes 3. These knife electrodes are constructed in bones in cross section with integrally formed on both longitudinal edges, in cross-section substantially circular or part-circular thickening.
  • the second, formed on the free-standing edge of the blade electrode thickening forms a discharge bar 5. This discharge bar 5 is thicker or thicker in cross-section than the adjoining blade 6 of the blade electrode 3.
  • the diameter of the discharge strip 5 does not have to be the same in the electrode arrangement, as a result of which strong sliding discharges at the edge and thus at the front or rear end of the electrode arrangement 1 are minimized.
  • the individual, adjacent blade electrodes 3 are arranged at variable distances from one another, wherein the distances between adjacent blade electrodes 3 at the outer edges of the electrode assembly 1 are greater than the spacings of adjacent blade electrodes 3 in the center of the assembly 1.
  • the inventive structure of the electrode assembly 1 with substantially parallel to each other, in the transport direction of the web material to be treated or coated successively arranged knife electrodes 3 at different distances creates improved homogeneity and quality of the performed with this plasma treatment or plasma coating under this electrode assembly. 1 on the formed as a counter electrode transport roller guided through web material. This could be confirmed experimentally.
  • the formation of the discharge strips 5 with the circular or partial circular shape in cross section also resulted in improved quality of the plasma coating or treatment compared to known discharge edge shapes.
  • the shape of the electrode assembly 1 shown in the embodiment and the distances a to e indicated therein are not limiting, various different shapes and spacing distributions may instead be adhered to.
  • the features essential to the invention are given in the claims, which are intended to define the scope of the invention or of the protection.

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  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Ceramic Capacitors (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Surgical Instruments (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Electron Tubes For Measurement (AREA)
  • Secondary Cells (AREA)
  • Coating Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The arrangement has multiple blade electrodes (3) arranged at an angle to a direction of transport of the strip material and placed parallel to one another. The distances (a-e) between adjacent blade electrodes are different. The distances between adjacent blade electrodes on the edge of the electrode arrangement (1) are greater than the distances of adjacent blade electrodes in its centre. An independent claim is also included for a device for continuous plasma treatment or plasma coating of strip material.

Description

Die Erfindung betrifft eine Elektrodenanordnung als Hochspannungselektrode für die kontinuierliche Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit einer Mehrzahl von quer zu einer Transportrichtung des Bahnmaterials angeordneten, im wesentlichen parallel zueinander stehenden Messerelektroden.The invention relates to an electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of sheet material having a plurality of transverse to a transport direction of the web material arranged substantially parallel to each other knife electrodes.

Derartige Elektrodenanordnungen sind bekannt und werden vielfältig in der Plasmabehandlung oder Plasmabeschichtung von in der Regel elektrisch nicht leitendem Bahnmaterial, z.B. Kunststofffolie oder dgl., eingesetzt. Diese Elektroden werden typischerweise als Hochspannungselektroden verwendet mit einer den freien Enden der Messerelektroden gegenüberliegenden, als Gegenelektrode ausgebildeten Transportwalze.Such electrode arrangements are known and are widely used in the plasma treatment or plasma coating of usually electrically non-conductive sheet material, e.g. Plastic film or the like., Used. These electrodes are typically used as high-voltage electrodes with a transport roller opposite the free ends of the blade electrodes and designed as a counterelectrode.

Durch die Spannungsdifferenz wird die Plasmaentladung zwischen Messerelektroden im Gasspalt zur Gegenelektrode gezündet, und das Material plasmabehandelt bzw. -beschichtet.Due to the voltage difference, the plasma discharge between knife electrodes in the gas gap to the counter electrode is ignited, and the material plasma-treated or -coated.

Eine Plasmabehandlung erfolgt dabei typischerweise ohne den Einsatz von Precursoren, wobei hier aufgrund des gezündeten Plasmas lediglich eine Veränderung der Oberflächenzustände des behandelten Materials erfolgt, um beispielsweise die Adhäsion eines später aufgebrachten Beschichtungsmaterials oder dgl. zu verbessern. In gleicher Art und Weise kann auch eine Plasmabeschichtung mit solchen Elektroden durchgeführt werden, wobei hier Precursoren in den zwischen den Elektroden und dem Bahnmaterial gebildeten Spalt bzw. Raum eingebracht werden, die die Ausgangsstoffe für die Beschichtung liefern.A plasma treatment is typically carried out without the use of precursors, in which case due to the ignited plasma only a change in the surface states of the treated material takes place in order to improve, for example, the adhesion of a later applied coating material or the like. In the same way, a plasma coating can be carried out with such electrodes, in which case precursors are introduced into the gap or space formed between the electrodes and the web material, which supply the starting materials for the coating.

Bei den sogenannten Messerelektroden handelt es sich um langgestreckte, klingenähnliche Elektroden, die in der Regel mit einer ihrer Längskanten in einer Hochspannungsanordnung festgelegt sind und mit ihrer anderen Längskante die eigentliche Entladungsfläche bilden.The so-called knife electrodes are elongated, blade-like electrodes, which are generally fixed with one of their longitudinal edges in a high-voltage arrangement and form the actual discharge surface with their other longitudinal edge.

Bei den bisher bekannten vergleichbaren Elektrodenanordnungen werden die Messerelektroden in gleichem Abstand zwischen benachbarten Elektroden, also äquidistant, angeordnet.In the previously known comparable electrode arrangements, the blade electrodes are arranged at the same distance between adjacent electrodes, that is, equidistant.

In von der Anmelderin durchgeführten Versuchen hat sich gezeigt, dass mit solchen Elektrodenanordnungen erzielte Plasmabehandlungs- bzw. Plasmabeschichtungsergebnisse hinsichtlich der Homogenität noch verbesserungswürdig sind. Insbesondere stellen Gleitentladungen entlang der Materialoberfläche vielfach eine starke, inhomogene, thermische Belastung des Materials dar, die den Einsatz eines Elektrodensystems oft gegrenzt. Entsprechend stellte sich den Erfindern die Aufgabe, die bekannten Elektrodenanordnungen zu verbessern, um ein verbessertes Behandlungs- bzw. Beschichtungsergebnis auf dem plasmabehandelten bzw. plasmabeschichteten Bahnmaterial zu erzielen.In tests carried out by the Applicant, it has been found that plasma treatment or plasma coating results achieved with such electrode arrangements are in need of improvement in terms of homogeneity. In particular, sliding discharges along the material surface often represent a strong, inhomogeneous, thermal load on the material, which often limits the use of an electrode system. Accordingly, the inventors had the task of improving the known electrode arrangements in order to achieve an improved treatment or coating result on the plasma-treated or plasma-coated web material.

Am Ende einer langen und ausgedehnten Versuchsreihe hat sich überraschend herausgestellt, dass sich eine solchermaßen angestrebte Verbesserung dann erzielen lässt, wenn wie im kennzeichnenden Teil des Anspruches 1 angegeben die Abstände benachbarter Messerelektroden anders als im bekannten Stand der Technik unterschiedlich sind. Die physikalische Ursache für die beobachtete Verbesserung ist bisher nicht vollständig geklärt und noch Gegenstand weitergehender Untersuchungen. Entscheidend für die Verbesserung scheint jedoch zu sein, dass die neue Anordnung der Messerelektroden die Vorteile eines großen Messerabstandes hinsichtlich der Problematik der Gleitentladungen mit den Vorteilen eines geringeren Messerabstandes hinsichtlich der spezifischen elektrischen Belastbarkeit kombiniert.At the end of a long and extensive series of experiments, it has surprisingly been found that such an improvement can be achieved if, as indicated in the characterizing part of claim 1, the distances of adjacent blade electrodes are different than in the known prior art. The physical cause of the observed improvement is not yet fully understood and is still the subject of further investigations. Decisive for the improvement, however, seems to be that the new arrangement of the blade electrodes combines the advantages of a large blade spacing with regard to the problem of sliding discharges with the advantages of a smaller blade spacing with respect to the specific electrical load capacity.

Bevorzugt sind die Abstände benachbarter Messerelektroden am Rand der Elektrodenanordnung größer als in deren Zentrum. Mit Rand der Elektrodenanordnung sind dabei diejenigen Bereiche gemeint, die in einer Transportrichtung der Bahnmaterials gesehen am vorderen bzw. hinteren Ende der Elektrodenanordnung liegen (vgl. Anspruch 2).Preferably, the distances between adjacent blade electrodes at the edge of the electrode assembly are greater than in the center thereof. With the edge of the electrode arrangement, those regions are meant which, viewed in a transport direction of the web material, lie at the front or rear end of the electrode arrangement (cf claim 2).

Als geeignete Abstände zwischen den benachbarten Messerelektroden haben sich am Rand der Elektrodenanordnung Abstände zwischen 8 und 12 mm, im Zentrum der Elektrodenanordnung zwischen 2 und 6 mm erwiesen (Anspruch 3).Distances between 8 and 12 mm, at the center of the electrode arrangement between 2 and 6 mm, have proven to be suitable spacings between the adjacent measuring electrodes at the edge of the electrode arrangement (claim 3).

Eine weitere Verbesserung des Entladungsbildes der Elektrodenanordnung bzw. der mit dieser zu erzielenden Plasmabehandlungs- bzw. Plasmabeschichtungsergebnisse ließ sich erzielen, wenn die freistehenden Kanten der Messerelektroden entsprechend der in Anspruch 4 genannten vorteilhaften Weiterbildung mit im Querschnitt im wesentlichen kreis- bzw. teilkreisförmigen Entladungsleisten versehen waren. Diese Ausbildung der Entladungsleisten bei Messerelektroden, so hat sich herausgestellt, ergibt nicht nur bei der erfindungsgemäß mit Messerelektroden mit divergierenden Abständen versehenen Elektrodenanordnung, sondern auch bei solchen Elektrodenanordnungen mit Messerelektroden in äquidistanter Anordnung ein verbessertes Ergebnis. Die Ausbildung der Entladungskanten stellt insoweit und für sich genommen eine eigenständige Erfindung dar. Dabei müssen die Krümmungsradien der Entladungskanten nicht durchgehend gleich sein, sondern können im Gegenteil mit Vorteil innerhalb der Elektrodenanordnung differieren (vgl. Anspruch 5). So werden starke Gleitentladungen am Rand und somit am vorderen bzw. hinteren Ende der Elektrodenanordnung 1 minimiert.A further improvement of the discharge pattern of the electrode assembly or the plasma treatment or plasma coating results to be achieved with this could be achieved if the freestanding edges of the blade electrodes were provided in accordance with the advantageous development mentioned in claim 4 with substantially circular or part-circular discharge strips in cross-section , This training of the discharge strips at Messerelektroden, so has been found, not only results in the inventively provided with knife electrodes with diverging intervals electrode assembly, but also in such electrode assemblies with knife electrodes in equidistant arrangement an improved result. The formation of the discharge edges in this respect and taken by itself is an independent invention. The radii of curvature of the discharge edges need not be the same throughout, but on the contrary can advantageously differ within the electrode arrangement (see claim 5). Thus, strong sliding discharges are minimized at the edge and thus at the front or rear end of the electrode assembly 1.

Um einen gleich bleibenden Abstand zwischen den Entladungskanten der Messerelektroden und der Oberfläche der Plasma zu behandelnden bzw. Plasma zu beschichtenden Materialbahn beizubehalten, sind die Messerelektroden vorzugsweise entsprechend den Vorgaben des Anspruchs 6 angeordnet.In order to maintain a constant distance between the discharge edges of the blade electrodes and the surface of the plasma to be treated or plasma-coated material web, the blade electrodes are preferably arranged according to the specifications of claim 6.

Gegenstand der Erfindung ist schließlich noch eine Vorrichtung zur kontinuierlichen Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit den Merkmalen des Anspruches 7. Hier ist wesentlich, dass die Vorrichtung eine wie oben beschriebene Elektrodenanordnung enthält.Finally, the subject of the invention is a device for the continuous plasma treatment or plasma coating of web material with the features of claim 7. It is essential here that the device contains an electrode arrangement as described above.

Weitere Vorteile und Merkmale der Erfindung ergeben sich aus der nachfolgenden Beschreibung eines Ausführungsbeispiels anhand der beigefügten Figuren. Dabei zeigen:

Fig. 1
eine schematische Ansicht einer erfindungsgemäßen Elektrodenanordnung der kontinuierlichen Plasmabehandlung bzw. -beschichtung von Bahnmaterial; und
Fig. 2
eine vergrößerte Darstellung der erfindungsgemäßen Elektrodenanordnung.
Further advantages and features of the invention will become apparent from the following description of an embodiment with reference to the accompanying figures. Showing:
Fig. 1
a schematic view of an electrode assembly according to the invention of the continuous plasma treatment or coating of sheet material; and
Fig. 2
an enlarged view of the electrode assembly according to the invention.

In Fig. 1 ist eine mit einer erfindungsgemäßen Elektrodenanordnung 1 versehene Plasmabehandlungs- bzw. -beschichtungsvorrichtung 10 in Ausschnitten und schematisch gezeigt. In dieser Vorrichtung ist in einem im wesentlichen geschlossenen Raum die Elektrodenanordnung 1 über eine mit Isolatoren 11 gegenüber der restlichen Vorrichtung 10 getrennte Hochspannungsversorgung angeschlossen. Gegenüber einer Behandlungsstrecke 12 liegt, hier nicht näher dargestellt, eine als Gegenelektrode ausgebildete Transportwalze, mit der das zu behandelnde bzw. zu beschichtende Bahnmaterial durch den Zwischenraum zwischen dieser Transportwalze und der Elektrodenanordnung 1 geführt wird. Das Plasma - in Fig. 1 nicht dargestellt - wird zwischen Plasmabehandlungs- bzw. Plasmabeschichtungsvorrichtung 10 und Transportwalze gezündet.1 shows a plasma treatment or coating device 10 provided with an electrode arrangement 1 according to the invention, in excerpts and schematically. In this device, in a substantially closed space, the electrode assembly 1 is connected via a separate high voltage supply with insulators 11 relative to the rest of the device 10. Opposite a treatment section 12, not shown here in detail, is a transport roller designed as a counterelectrode, with which the web material to be treated or to be coated is guided through the intermediate space between this transport roller and the electrode arrangement 1. The plasma - not shown in FIG. 1 - is ignited between plasma treatment or plasma coating apparatus 10 and transport roller.

In Fig. 2 ist die Elektrodenanordnung 1 noch einmal vergrößert dargestellt. Sie enthält einen Elektrodenhalter 2 und eine Mehrzahl, in diesem Ausführungsbeispiel insgesamt 14, Messerelektroden 3. Diese Messerelektroden sind im Querschnitt knochenartig aufgebaut mit an beiden Längskanten angeformten, im Querschnitt im wesentlichen kreis- bzw. teilkreisförmigen Verdickungen. Die erste dieser Verdickungen 4, die an der in dem Elektrodenhalter 2 angeordneten Kante der Messerelektrode 3 ausgebildet ist, dient dem Halt der Messerelektrode 3 in dem Elektrodenhalter 2. Die zweite, an der freistehenden Kante der Messerelektrode ausgebildete Verdickung bildet eine Entladungsleiste 5. Diese Entladungsleiste 5 ist im Querschnitt dicker bzw. stärker ausgebildet als die sich daran anschließende Klinge 6 der Messerelektrode 3.In Fig. 2, the electrode assembly 1 is shown enlarged again. It contains an electrode holder 2 and a plurality, in this embodiment a total of 14, knife electrodes 3. These knife electrodes are constructed in bones in cross section with integrally formed on both longitudinal edges, in cross-section substantially circular or part-circular thickening. The first of these thickenings 4, which is formed on the arranged in the electrode holder 2 edge of the blade electrode 3, serves to hold the blade electrode 3 in the electrode holder 2. The second, formed on the free-standing edge of the blade electrode thickening forms a discharge bar 5. This discharge bar 5 is thicker or thicker in cross-section than the adjoining blade 6 of the blade electrode 3.

Der Durchmesser der Entladungsleiste 5 muss in der Elektrodenanordnung nicht gleich sein, wodurch starke Gleitentladungen am Rand und somit am vorderen bzw. hinteren Ende der Elektrodenanordnung 1 minimiert werden.The diameter of the discharge strip 5 does not have to be the same in the electrode arrangement, as a result of which strong sliding discharges at the edge and thus at the front or rear end of the electrode arrangement 1 are minimized.

Die einzelnen, benachbarten Messerelektroden 3 sind mit variablen Abständen zueinander angeordnet, wobei die Abstände zwischen benachbarten Messerelektroden 3 an den äußeren Rändern der Elektrodenanordnung 1 größer sind als die Abstände benachbarter Messerelektroden 3 im Zentrum der Anordnung 1.The individual, adjacent blade electrodes 3 are arranged at variable distances from one another, wherein the distances between adjacent blade electrodes 3 at the outer edges of the electrode assembly 1 are greater than the spacings of adjacent blade electrodes 3 in the center of the assembly 1.

In diesem Beispiel sind insgesamt fünf verschiedene Abstände vorgesehen und in der Figur mit den Ziffern a bis e bezeichnet, wobei die Abstände von a bis e jeweils kleiner werden. In einem Ausführungsbeispiel können die Abstände a bis e z.B. wie folgt gebildet sein:

  • a = 10 mm
  • b = 9 mm
  • c = 8 mm
  • d = 7 mm
  • e = 6 mm
In this example, a total of five different distances are provided and indicated in the figure with the numbers a to e, wherein the distances from a to e are each smaller. In one embodiment, the distances a to e may be formed, for example, as follows:
  • a = 10 mm
  • b = 9 mm
  • c = 8 mm
  • d = 7 mm
  • e = 6 mm

Der erfindungsgemäße Aufbau der Elektrodenanordnung 1 mit sich im wesentlichen parallel zueinander erstreckenden, in Transportrichtung des zu behandelnden bzw. zu beschichtenden Bahnmaterials hintereinander angeordneten Messerelektroden 3 in unterschiedlichem Abstand schafft eine verbesserte Homogenität und Qualität der mit dieser durchgeführten Plasmabehandlung bzw. Plasmabeschichtung des unter dieser Elektrodenanordnung 1 auf der als Gegenelektrode ausgebildeten Transportwalze hindurch geführten Bahnmaterials. Dies konnte experimentell bestätigt werden. Auch die Ausbildung der Entladungsleisten 5 mit der Kreis- bzw. Teilkreisform im Querschnitt ergab eine gegenüber bekannter Entladungskantenformen verbesserte Qualität der Plasmabeschichtung bzw. -behandlung.The inventive structure of the electrode assembly 1 with substantially parallel to each other, in the transport direction of the web material to be treated or coated successively arranged knife electrodes 3 at different distances creates improved homogeneity and quality of the performed with this plasma treatment or plasma coating under this electrode assembly. 1 on the formed as a counter electrode transport roller guided through web material. This could be confirmed experimentally. The formation of the discharge strips 5 with the circular or partial circular shape in cross section also resulted in improved quality of the plasma coating or treatment compared to known discharge edge shapes.

Die in dem Ausführungsbeispiel gezeigte Form der Elektrodenanordnung 1 und die dort angegebenen Abstände a bis e sind nicht beschränkend, es können stattdessen diverse unterschiedliche Formen und Abstandsverteilungen eingehalten werden. Die erfindungswesentlichen Merkmale sind in den Ansprüchen wiedergegeben, welche den Umfang der Erfindung bzw. des Schutzes definieren sollen.The shape of the electrode assembly 1 shown in the embodiment and the distances a to e indicated therein are not limiting, various different shapes and spacing distributions may instead be adhered to. The features essential to the invention are given in the claims, which are intended to define the scope of the invention or of the protection.

BezgugszeichenlisteBezgugszeichenliste

11
Elektrodenanordnungelectrode assembly
22
Elektrodenhalterelectrode holder
33
Messerelektrodediameter electrode
44
Verdickungthickening
55
Entladungsleistedischarge strip
66
Klingeblade
1010
Plasmabehandlungs- bzw. beschichtungsvorrichtungPlasma treatment or coating device
1111
Isolatorinsulator
1212
Behandlungsstrecketreatment section
aa
Abstanddistance
bb
Abstanddistance
cc
Abstanddistance
dd
Abstanddistance
ee
Abstanddistance

Claims (7)

Elektrodenanordnung als Hochspannungselektrode für die kontinuierliche Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit einer Mehrzahl von quer zu einer Transportrichtung des Bahnmaterials angeordneten, im wesentlichen parallel zueinander stehenden Messerelektroden (3), dadurch gekennzeichnet, dass die Abstände (a-e) benachbarter Messerelektroden (3) unterschiedlich sind.Electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of web material having a plurality of substantially parallel to each other arranged knife electrodes (3) arranged transversely to a transport direction of the web material, characterized in that the distances (ae) of adjacent blade electrodes (3) are different. Elektrodenanordnung nach Anspruch 1, dadurch gekennzeichnet, dass die Abstände (a) benachbarter Messerelektroden (3) am Rand der Elektrodenanordnung (1) größer sind als die Abstände (e) benachbarter Messerelektroden (3) in deren Zentrum.An electrode assembly according to claim 1, characterized in that the distances (a) of adjacent blade electrodes (3) at the edge of the electrode assembly (1) are greater than the distances (e) of adjacent blade electrodes (3) in the center thereof. Elektrodenanordnung nach Anspruch 2, dadurch gekennzeichnet, dass die größten Abstände (a) zwischen benachbarten Messerelektroden (3) am Rand der Elektrodenanordnung (1) zwischen 8 und 12 mm und die kleinsten Abstände (e) zwischen benachbarten Messelektroden (3) im Zentrum der Elektrodenanordnung (1) zwischen 2 und 6 mm betragen.An electrode assembly according to claim 2, characterized in that the largest distances (a) between adjacent blade electrodes (3) at the edge of the electrode assembly (1) between 8 and 12 mm and the smallest distances (e) between adjacent measuring electrodes (3) in the center of the electrode assembly (1) be between 2 and 6 mm. Elektrodenanordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die frei stehenden Kanten der Messerelektroden (3) eine im Querschnitt im wesentlichen kreis- bzw. teilkreisförmige, gegenüber der sich an diese anschließenden Klinge (6) vorzugsweise verdickt ausgebildete, Entladungsleiste (5) aufweisen.Electrode arrangement according to one of the preceding claims, characterized in that the free-standing edges of the blade electrodes (3) have a discharge strip (5) which is substantially circular or partially circular in cross section and preferably thickened with respect to the blade (6) adjacent thereto , Elektrodenanordnung nach Anspruch 4, dadurch gekennzeichnet, dass die kreis- bzw. teilkreisförmigen Kanten der Messerelektroden innerhalb einer Elektrodenanordnung unterschiedliche Krümmungsradien aufweisen.Electrode arrangement according to Claim 4, characterized in that the circular or part-circular edges of the blade electrodes have different radii of curvature within an electrode arrangement. Elektrodenanordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Verbindungslinie entlang der frei stehenden Kanten der Messerelektroden (3) in der Transportrichtung gekrümmt verläuft entsprechend der Außenkontur einer zur Anordnung an der Elektrodenanordnung (1) vorgesehenen, eine Gegenelektrode bildenden Transportwalze.Electrode arrangement according to one of the preceding claims, characterized in that a connecting line along the free edges of the blade electrodes (3) in the transport direction is curved in accordance with the outer contour of a provided for assembly on the electrode assembly (1), forming a counter electrode transport roller. Vorrichtung zur kontinuierlichen Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit einer Elektrodenanordnung (1) nach einem der Ansprüche 1 bis 6 und mit einer dieser gegenüberliegenden, eine Gegenelektrode bildenden Transportwalze.Apparatus for the continuous plasma treatment or plasma coating of web material with an electrode arrangement (1) according to one of claims 1 to 6 and with a transporting roller opposite thereto, forming a counterelectrode.
EP06012197A 2006-06-13 2006-06-13 Electrode assembly Active EP1868269B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT06012197T ATE407468T1 (en) 2006-06-13 2006-06-13 ELECTRODE ARRANGEMENT
EP06012197A EP1868269B1 (en) 2006-06-13 2006-06-13 Electrode assembly
DE502006001508T DE502006001508D1 (en) 2006-06-13 2006-06-13 electrode assembly
DK06012197T DK1868269T3 (en) 2006-06-13 2006-06-13 Electrode arrangement
PCT/EP2007/004851 WO2007144075A1 (en) 2006-06-13 2007-06-01 Electrode arrangement
US12/303,454 US7859180B2 (en) 2006-06-13 2007-06-01 Electrode arrangement

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EP06012197A EP1868269B1 (en) 2006-06-13 2006-06-13 Electrode assembly

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EP1868269A1 true EP1868269A1 (en) 2007-12-19
EP1868269B1 EP1868269B1 (en) 2008-09-03

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EP (1) EP1868269B1 (en)
AT (1) ATE407468T1 (en)
DE (1) DE502006001508D1 (en)
DK (1) DK1868269T3 (en)
WO (1) WO2007144075A1 (en)

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US9831070B1 (en) 2017-06-15 2017-11-28 Enercon Industries Corporation Surface treater with expansion electrode arrangement

Citations (2)

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EP0095051A1 (en) * 1982-05-25 1983-11-30 SOFTAL electronic GmbH Device for the electric preliminary treatment of non-conductive foils
US4946568A (en) * 1986-07-05 1990-08-07 Klaus Kalwar Method of an arrangement for corona treatment

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Publication number Priority date Publication date Assignee Title
US3133193A (en) * 1962-01-22 1964-05-12 Du Pont Corona discharge apparatus for the surface treatment of plastic resins
CA1042605A (en) 1977-06-07 1978-11-21 Evin Industries Ltd. Outerwear
DE9102438U1 (en) * 1991-03-01 1992-06-25 Röhm GmbH, 6100 Darmstadt Low pressure plasma generator
WO2001075188A2 (en) * 2000-03-30 2001-10-11 Tokyo Electron Limited Method of and apparatus for gas injection

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
EP0095051A1 (en) * 1982-05-25 1983-11-30 SOFTAL electronic GmbH Device for the electric preliminary treatment of non-conductive foils
US4946568A (en) * 1986-07-05 1990-08-07 Klaus Kalwar Method of an arrangement for corona treatment

Also Published As

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EP1868269B1 (en) 2008-09-03
WO2007144075A1 (en) 2007-12-21
US20090200911A1 (en) 2009-08-13
ATE407468T1 (en) 2008-09-15
US7859180B2 (en) 2010-12-28
DE502006001508D1 (en) 2008-10-16
DK1868269T3 (en) 2009-01-12

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