EP1466149B1 - Dielectric actuator or sensor structure and method of making it - Google Patents

Dielectric actuator or sensor structure and method of making it Download PDF

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Publication number
EP1466149B1
EP1466149B1 EP02787453A EP02787453A EP1466149B1 EP 1466149 B1 EP1466149 B1 EP 1466149B1 EP 02787453 A EP02787453 A EP 02787453A EP 02787453 A EP02787453 A EP 02787453A EP 1466149 B1 EP1466149 B1 EP 1466149B1
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EP
European Patent Office
Prior art keywords
sheet
sensor structure
elastomeric
dielectric actuator
layer
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Expired - Lifetime
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EP02787453A
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German (de)
French (fr)
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EP1466149A1 (en
Inventor
Mohamed Yahia Benslimane
Peter Gravesen
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Danfoss AS
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Danfoss AS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084—Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Definitions

  • the present invention relates to dielectric actuators of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction.
  • Such actuators may be employed as force sensors by operating the electrodes as the plates of a capacitor. In this mode of operation, compression of the elastomeric body by an external force will reduce the distance between the electrodes, causing an increase in capacitance of the electrode capacitor which can be measured to indicate the magnitude of the force.
  • a document US 4,836,033 describes a capacitive measuring assembly for determining forces and/or pressures that includes at least three plane parallel capacitor surfaces with intercalation of a dielectric therebetween.
  • the capacitor surfaces being movable relative to each other against elastic resetting forces of the dielectric, a main surface being in opposing relation to all remaining surfaces and partly covering them with intercalation of the dielectric therebetween.
  • the main surface being movable both perpendicular and parallel relative to the remaining surfaces so that from the individual capacity values between the main and remaining surfaces, there can be measured or eliminated both the forces that act perpendicularly between the main and remaining surfaces and the forces that act parallel with the capacitor surfaces.
  • a second document EP 0855307 describes a sensor for the seat of a motor vehicle that includes a compressible, preferably foam layer disposed between two conductive sheets.
  • the capacitance between the conductive sheets is measured to determine what and whether an object is disposed on the sensor, while in another application, apertures are formed through the compressible layer to allow the conductive sheets to contact one another through the apertures.
  • Embodiments having relatively low resistivity to produce a short circuit, and an embodiment having higher resistivity in which the magnitude of the change and resistance may be used to determine the nature of an object are described.
  • the figures 1 and 2 shows the basic preferred construction of the sensor is a five-layer laminate although any suitable layered structure may be suitable.
  • the basic construction comprises the following elements: a first layer of conductive fabric 10; a layer of adhesive 12; a layer of compressible foam 14; a layer of adhesive 16; and a second layer of conductive fabric 18.
  • a dielectric actuator/sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface.
  • the sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface fo the first sheet and second electrode on the second surface of the second sheet.
  • a method of making a dielectric actuator/sensor structure comprises the steps of: a) providing a generally planar mould, b) casting a layer of elastomeric material on the mould, c) causing the layer to have a smooth surface and a second surface, d) curing the layer, and e) removing the layer from the mould to provide an elastomeric sheet having a smooth surface and a second surface. These steps are repeated in a step e) to provide a second elastomeric sheet having a smooth surface and a second surface. Electrodes are made on the sheets in a step f) of depositing at least one electrically conductive layer on the seocnd surface of each elastomeric sheet. The sheets are assembled into a finished actuator/sensor structure by g) laminating the elastomeric sheets together with their second surfaces exposed.
  • the laminated structure is a key factor in achieving production "robustness".
  • minor defects such as pinholes, cracks or inclusions in each sheet. Even if cleanliness is observed in producing the sheets, a significant number of such defects may exist, even though it is only a minor number. In a single-sheet dielectric actuator/sensor, such defects may reduce the breakdown voltage between the electrodes by as much as 95% or even cause direct shorting of the electrodes.
  • Laminating two sheets together to form the final structure substantially eliminates this problem.
  • the present invention concerns a dielectric actuator/sensor structure comprising:
  • Fig. 6 illustrates the passivation of defects such as pinholes and inclusions by virtue of the laminated construction of the dielectric actuator/sensor structure.
  • the generally planar mould 1 in Fig. 1 has a micro-corrugated surface 2 with ridges 3 and grooves 4.
  • the ridges and grooves run in parallel along a direction which is transverse to the plane of the paper.
  • the peak-to-peak amplitude of the corrugations 3, 4 is typically between 1 and 10 micrometers whereas the overall size of the mould is in the range of 5-10 centimeters across the corrugated surface or more. It is obvious that the drawing is not to scale and that the corrugations have been exaggerated for illustration.
  • the mould may be manufactured from any suitable material such as metal or silicon, and the corrugation may be produced by conventional photolithographic or holographic processes.
  • a volume of curable elastomeric material 5 has been poured on the mould 1.
  • the material may be a silicone rubber, for example.
  • the elastomeric material 5 has been shaped into a sheet-like layer having a smooth upper surface 6, by spinning the mould as indicated at 7.
  • Such spinning processes are well-known in the art of photolithography.
  • An alternative way of causing the formation of a smooth upper surface 6 on the elastomeric layer 5 would be by pressing it into shape with a smooth die.
  • the elastomeric layer 5 is cured, which may just involve letting it sit on the mould for a certain amount of time, depending on the characteristics of the material.
  • Fig. 4 shows the elastomeric layer 5 removed from the mould to form a sheet 8 and turned upside down. Removing the sheet from the mould has exposed its second surface 9, which is patterned with corrugations 10 and 11 as the surface of the mould. An electrode 12 has been deposited on the surface 9. This may be done by vapor deposition of a metal such as silver, or by electrolytic techniques, for example.
  • the sheet 8 typically has a thickness of about 10-50 micrometers and the electrodes have a thickness of about 20-100 nanometers.
  • Fig. 5 shows a dielectric actuator/sensor structure assembled from two sheets 9 of the kind made and structured as just described.
  • the sheets are laminated together with their smooth surfaces 6 touching each other and their second surfaces 9 exposed. Lamination is preferably done under vacuum to prevent the inclusion of gas bubbles between the sheets.
  • the corrugation of the exposed surfaces makes the laminated assembly highly anisotropic in its elastic behaviour. To this end, it is preferred to laminate the sheets together with the corrugations of both sheets running in parallel. In operation, a high voltage is applied between the electrodes on the corrugated surfaces. Electrostatic attraction between the electrodes will then tend to compress the structure. Facilitated by the corrugations, this compression will cause the structure to extend in length as its volume will tend to remain constant. Substantially no transverse change of dimensions (transverse to the paper plane) will occur because of the presence of the metallic electrodes on the anisotropic corrugations.
  • Fig. 6 illustrates the beneficial effects of the laminated structure with respect to defects and inclusions.
  • Each sheet is shown with a pinhole 13, 14 and an inclusion 15, 16 of a metallic object.
  • the presence of pinholes 13 or 14 would cause a short between the electrodes 12 because electrode deposition runs down into the pinholes as shown at 17.
  • Metallic inclusions 15, 16 reduce the remaining thickness of the elastomeric material 5, which serves as an insulator between the electrodes 12. In a single-layer structure, this may reduce the breakdown voltage between the electrodes severely.
  • the laminated construction may be equally beneficially applied to dielectric actuator/sensor structures having patterned electrodes on smooth exposed surfaces to facilitate longitudinal extension, instead of solid electrodes on corrugated exposed surfaces.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Inorganic Insulating Materials (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Pressure Sensors (AREA)

Abstract

The present invention relates to dielectric actuators or sensors of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction. The dielectric actuator/sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface. The sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface of the first sheet and second electrode on the second surface of the second sheet.

Description

  • The present invention relates to dielectric actuators of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction. Such actuators may be employed as force sensors by operating the electrodes as the plates of a capacitor. In this mode of operation, compression of the elastomeric body by an external force will reduce the distance between the electrodes, causing an increase in capacitance of the electrode capacitor which can be measured to indicate the magnitude of the force.
  • A document US 4,836,033 describes a capacitive measuring assembly for determining forces and/or pressures that includes at least three plane parallel capacitor surfaces with intercalation of a dielectric therebetween. The capacitor surfaces being movable relative to each other against elastic resetting forces of the dielectric, a main surface being in opposing relation to all remaining surfaces and partly covering them with intercalation of the dielectric therebetween. The main surface being movable both perpendicular and parallel relative to the remaining surfaces so that from the individual capacity values between the main and remaining surfaces, there can be measured or eliminated both the forces that act perpendicularly between the main and remaining surfaces and the forces that act parallel with the capacitor surfaces.
  • The document introduces as illustrated in Fig. 5, that the capacitor surfaces 10, 14 and 15 are pressed upon sheets 30 and 31. The sheets 30 and 31 are then each glued to a compressible dielectric (elastomer) 20 or 21, the two dielectrics 20 and 21 being connected one upon the other. The dielectrics 20 and 21 have temperature coefficients opposite each other with regard to their electric properties and are dimensioned in a manner such that temperature has no effect on the capacity of the individual capacitors.
    A second document EP 0855307 describes a sensor for the seat of a motor vehicle that includes a compressible, preferably foam layer disposed between two conductive sheets. In one embodiment, the capacitance between the conductive sheets is measured to determine what and whether an object is disposed on the sensor, while in another application, apertures are formed through the compressible layer to allow the conductive sheets to contact one another through the apertures.
    Embodiments having relatively low resistivity to produce a short circuit, and an embodiment having higher resistivity in which the magnitude of the change and resistance may be used to determine the nature of an object are described.
  • The figures 1 and 2 shows the basic preferred construction of the sensor is a five-layer laminate although any suitable layered structure may be suitable. In the preferred five-layer system the basic construction comprises the following elements: a first layer of conductive fabric 10; a layer of adhesive 12; a layer of compressible foam 14; a layer of adhesive 16; and a second layer of conductive fabric 18.
  • It is an object of the invention to provide a dielectric actuator/sensor structure which is easy to produce and tolerant of production defects such as pinholes, cracks and inclusions in the body thereof. It is a further object of the invention to provide a method of making a dielectric actuator/sensor structure which provides a high yield while having advantages of simplicity and economy.
  • In accordance with one aspect of the invention, a dielectric actuator/sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface. The sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface fo the first sheet and second electrode on the second surface of the second sheet.
  • In accordance with another aspect of the invention, a method of making a dielectric actuator/sensor structure comprises the steps of: a) providing a generally planar mould, b) casting a layer of elastomeric material on the mould, c) causing the layer to have a smooth surface and a second surface, d) curing the layer, and e) removing the layer from the mould to provide an elastomeric sheet having a smooth surface and a second surface. These steps are repeated in a step e) to provide a second elastomeric sheet having a smooth surface and a second surface. Electrodes are made on the sheets in a step f) of depositing at least one electrically conductive layer on the seocnd surface of each elastomeric sheet. The sheets are assembled into a finished actuator/sensor structure by g) laminating the elastomeric sheets together with their second surfaces exposed.
  • The laminated structure is a key factor in achieving production "robustness". Consider, for example, the existence of minor defects such as pinholes, cracks or inclusions in each sheet. Even if cleanliness is observed in producing the sheets, a significant number of such defects may exist, even though it is only a minor number. In a single-sheet dielectric actuator/sensor, such defects may reduce the breakdown voltage between the electrodes by as much as 95% or even cause direct shorting of the electrodes.
  • Laminating two sheets together to form the final structure substantially eliminates this problem. As a starting point It can be typically be assured by proper control of production that only a minor number of defects will exist and be spread randomly across each sheet. This in turn makes it very unlikely that two defects will be co-located in the assembled structure. Therefore, even if one layer of the assembled structure has a defect in a certain location, the other layer of the structure will most likely be defect-free in the same location. As a consequence, the probability of direct shorts is for all practical considerations reduced to zero, and the reduction of breakdown voltage from inclusions is limited to 50% at most.
  • In summary the present invention concerns a dielectric actuator/sensor structure comprising:
    • a first sheet of elastomeric material having at least one smooth surface and a second surface;
    • a second sheet of elastomeric material having at least one smooth surface and a second surface;
    • a first electrode being deposited on the second surface of the first sheet, and
    • a second electrode being deposited on the second surface of the second sheet, characterized by
    • the sheets being laminated together with their second surfaces exposed, and where the volume of the structure remains substantially constant when the structure extends in length.
  • Preferred embodiments of the invention will now be described with reference to the accompanying drawings.
    • Fig. 1 shows a generally planar mould having a micro-corrugated surface.
    • Fig. 2 shows a volume of curable elastomeric material poured on the mould.
    • Fig. 3 shows the effect of spinning the mould to smoothen the free surface of the elastomeric material.
    • Fig. 4 shows the elastomeric material removed from the mould as a sheet and provided with an electrode on its corrugated surface.
    • Fig. 5 shows two sheets laminated together to form a dielectric actuator/sensor structure.
  • Fig. 6 illustrates the passivation of defects such as pinholes and inclusions by virtue of the laminated construction of the dielectric actuator/sensor structure.
  • The generally planar mould 1 in Fig. 1 has a micro-corrugated surface 2 with ridges 3 and grooves 4. The ridges and grooves run in parallel along a direction which is transverse to the plane of the paper. The peak-to-peak amplitude of the corrugations 3, 4 is typically between 1 and 10 micrometers whereas the overall size of the mould is in the range of 5-10 centimeters across the corrugated surface or more. It is obvious that the drawing is not to scale and that the corrugations have been exaggerated for illustration. The mould may be manufactured from any suitable material such as metal or silicon, and the corrugation may be produced by conventional photolithographic or holographic processes.
  • In Fig. 2, a volume of curable elastomeric material 5 has been poured on the mould 1. The material may be a silicone rubber, for example.
  • In Fig. 3, the elastomeric material 5 has been shaped into a sheet-like layer having a smooth upper surface 6, by spinning the mould as indicated at 7. Such spinning processes are well-known in the art of photolithography. An alternative way of causing the formation of a smooth upper surface 6 on the elastomeric layer 5 would be by pressing it into shape with a smooth die. After spinning or press-shaping, the elastomeric layer 5 is cured, which may just involve letting it sit on the mould for a certain amount of time, depending on the characteristics of the material.
  • Fig. 4 shows the elastomeric layer 5 removed from the mould to form a sheet 8 and turned upside down. Removing the sheet from the mould has exposed its second surface 9, which is patterned with corrugations 10 and 11 as the surface of the mould. An electrode 12 has been deposited on the surface 9. This may be done by vapor deposition of a metal such as silver, or by electrolytic techniques, for example.
  • The sheet 8 typically has a thickness of about 10-50 micrometers and the electrodes have a thickness of about 20-100 nanometers.
  • Fig. 5 shows a dielectric actuator/sensor structure assembled from two sheets 9 of the kind made and structured as just described. The sheets are laminated together with their smooth surfaces 6 touching each other and their second surfaces 9 exposed. Lamination is preferably done under vacuum to prevent the inclusion of gas bubbles between the sheets.
  • The corrugation of the exposed surfaces makes the laminated assembly highly anisotropic in its elastic behaviour. To this end, it is preferred to laminate the sheets together with the corrugations of both sheets running in parallel. In operation, a high voltage is applied between the electrodes on the corrugated surfaces. Electrostatic attraction between the electrodes will then tend to compress the structure. Facilitated by the corrugations, this compression will cause the structure to extend in length as its volume will tend to remain constant. Substantially no transverse change of dimensions (transverse to the paper plane) will occur because of the presence of the metallic electrodes on the anisotropic corrugations.
  • Fig. 6 illustrates the beneficial effects of the laminated structure with respect to defects and inclusions. Each sheet is shown with a pinhole 13, 14 and an inclusion 15, 16 of a metallic object. In a single-layer structure, the presence of pinholes 13 or 14 would cause a short between the electrodes 12 because electrode deposition runs down into the pinholes as shown at 17. Metallic inclusions 15, 16 reduce the remaining thickness of the elastomeric material 5, which serves as an insulator between the electrodes 12. In a single-layer structure, this may reduce the breakdown voltage between the electrodes severely. In the laminated structure of Fig. 6, however, there is still a defect-free single layer of elastomeric material between the electrodes 12 at each defect
  • 13, 14, 15, 16. This reduces the occurrence of shorts substantially to zero, and limits the reduction of breakdown voltage to 50% at most. Of course, there is nothing to prevent the accidental co-location of two defects, but with proper cleanliness applied to production generally, the risk of this occuring will be very low indeed and much lower than the risk of defects in a single-layer structure.
  • It deserves to be mentioned that the laminated construction may be equally beneficially applied to dielectric actuator/sensor structures having patterned electrodes on smooth exposed surfaces to facilitate longitudinal extension, instead of solid electrodes on corrugated exposed surfaces.

Claims (10)

  1. A dielectric actuator/sensor structure comprising:
    a first sheet of elastomeric material (8) having at least one smooth surface (6) and a second surface (9);
    a second sheet of elastomeric material (8) having at least one smooth surface (6) and a second surface (9);
    a first electrode (12) being deposited on the second surface (9) of the first sheet (8), and
    a second electrode (12) being deposited on the second surface (9) of the second sheet (8), characterized by
    the sheets (8) being laminated together with their second
    surfaces (9) exposed, and where the volume of the structure remains substantually constant when the structure extends in length.
  2. A dielectric actuator/sensor structure as in claim 1 wherein the second surfaces (9) are corrugated (10, 11).
  3. A dielectric actuator/sensor structure according to claim 1, wherein at least one of the first and second electrode (12) consists essentially of a deposit of metal, such as silver, which has been deposited by vapor deposition or by an electrolytic process.
  4. A dielectric actuator/sensor structure according to claim 1 or 2, wherein at least one of the first and second sheet (8) of elastomeric metal consists essentially of silicone rubber.
  5. A dielectric actuator/sensor structure according to any of the preceding claims, wherein the peak-to-peak amplitude of the corrugations (10, 11) is between 1 and 10 micrometers.
  6. A dielectric actuator/sensor structure according to any of the preceding claims, wherein the electrodes (12) have a thickness of about 20-100 nanometers.
  7. A method of making a dielectric actuator/sensor structure according to any of the preceding claims, comprising the steps of:
    a) providing a generally planar mould (1);
    b) casting a layer of elastomeric material (5) on the mould;
    c) causing the layer to have a smooth surface (6) and a second surface (9);
    d) curing the layer;
    e) removing the layer from the mould to provide an elastomeric sheet (8) having a smooth surface (6) and a second surface (9);
    f) repeating steps a) through e) to provide a second elastomeric (8) sheet having a smooth surface (6) and a second surface (9);
    g) depositing at least one electrically conductive layer (12) on the second surface (9) of each elastomeric sheet (8); and
    h) laminating the elastomeric sheets (8) together with their second surfaces (9) exposed.
  8. A method according to claim 6, wherein step g) comprises depositing by vapor deposition or by an electrolytic process.
  9. A method according to claim 6 or 7, wherein step h) is performed under vacuum.
  10. A dielectric actuator/sensor structure as in any of the preceeding claims, where the first and second sheets (8) and their respective electrodes (12) are substantially identical.
EP02787453A 2001-12-21 2002-12-17 Dielectric actuator or sensor structure and method of making it Expired - Lifetime EP1466149B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200101933 2001-12-21
DK200101933 2001-12-21
PCT/DK2002/000862 WO2003056287A1 (en) 2001-12-21 2002-12-17 Dielectric actuator or sensor structure and method of making it

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EP1466149A1 EP1466149A1 (en) 2004-10-13
EP1466149B1 true EP1466149B1 (en) 2008-01-23

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US (2) US7573064B2 (en)
EP (1) EP1466149B1 (en)
AT (1) ATE384935T1 (en)
AU (1) AU2002351736A1 (en)
DE (1) DE60224844T2 (en)
ES (1) ES2299614T3 (en)
WO (1) WO2003056287A1 (en)

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