DK226989A - Fremgangsmaade til plasma-rensning af overflader - Google Patents

Fremgangsmaade til plasma-rensning af overflader Download PDF

Info

Publication number
DK226989A
DK226989A DK226989A DK226989A DK226989A DK 226989 A DK226989 A DK 226989A DK 226989 A DK226989 A DK 226989A DK 226989 A DK226989 A DK 226989A DK 226989 A DK226989 A DK 226989A
Authority
DK
Denmark
Prior art keywords
procedure
plasma cleaning
plasma
cleaning
Prior art date
Application number
DK226989A
Other languages
English (en)
Other versions
DK226989D0 (da
Inventor
Odile Dessaux
Brigitte Mutel
Daniel Szurminski
Original Assignee
Prestations Services Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prestations Services Spa filed Critical Prestations Services Spa
Publication of DK226989D0 publication Critical patent/DK226989D0/da
Publication of DK226989A publication Critical patent/DK226989A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning In General (AREA)
  • Detergent Compositions (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DK226989A 1988-05-10 1989-05-09 Fremgangsmaade til plasma-rensning af overflader DK226989A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8806607A FR2631258B1 (fr) 1988-05-10 1988-05-10 Procede de nettoyage en surface par plasma differe

Publications (2)

Publication Number Publication Date
DK226989D0 DK226989D0 (da) 1989-05-09
DK226989A true DK226989A (da) 1989-11-11

Family

ID=9366376

Family Applications (1)

Application Number Title Priority Date Filing Date
DK226989A DK226989A (da) 1988-05-10 1989-05-09 Fremgangsmaade til plasma-rensning af overflader

Country Status (7)

Country Link
EP (1) EP0343038A1 (da)
JP (1) JPH0252084A (da)
CN (1) CN1038036A (da)
DK (1) DK226989A (da)
FR (1) FR2631258B1 (da)
NO (1) NO173921C (da)
ZA (1) ZA893473B (da)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06285868A (ja) * 1993-03-30 1994-10-11 Bridgestone Corp 加硫金型の清浄方法
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
FR2733437B1 (fr) * 1995-04-27 1997-09-12 Aubert Bruno Procede de separation d'elements chimiques par formation de composes volatils avec un gaz excite dans un plasma froid et dispositif de mise en oeuvre
FR2750348B1 (fr) 1996-06-28 1998-08-21 Conte Procede pour augmenter l'anti-mouillabilite d'un corps, corps ainsi traite et ses applications
US6125859A (en) * 1997-03-05 2000-10-03 Applied Materials, Inc. Method for improved cleaning of substrate processing systems
US6274058B1 (en) 1997-07-11 2001-08-14 Applied Materials, Inc. Remote plasma cleaning method for processing chambers
US6673262B1 (en) 1997-12-18 2004-01-06 Central Glass Company, Limited Gas for removing deposit and removal method using same
CA2377268A1 (en) 1999-06-24 2000-12-28 Wisconsin Alumni Research Foundation Cold-plasma treatment of seeds to remove surface materials
JP2005036250A (ja) * 2003-07-16 2005-02-10 Matsushita Electric Ind Co Ltd スパッタ装置
US20110108058A1 (en) * 2009-11-11 2011-05-12 Axcelis Technologies, Inc. Method and apparatus for cleaning residue from an ion source component
CN101837357B (zh) * 2010-05-04 2011-10-05 宁波大学 一种等离子体清洗装置
JP2012152855A (ja) * 2011-01-26 2012-08-16 Osg Corp ダイヤモンド被膜または硬質炭素被膜の脱膜方法
CN104148334A (zh) * 2014-07-02 2014-11-19 太仓华德石太工业设备有限公司 一种针对工业局部清洁的碳氢化合物/等离子体的清洁方法
CN104353643B (zh) * 2014-12-02 2017-07-25 上海华虹宏力半导体制造有限公司 一种减小超声波清洗器的维护系统及维护方法
DE102020131832A1 (de) 2020-12-01 2022-06-02 Universität Kassel, Körperschaft des öffentlichen Rechts Verfahren zur Herstellung von Gussformen oder Gusskernen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2647088B2 (de) * 1976-10-19 1979-04-05 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Verfahren und Vorrichtung zum Reinigen von Oberflächen
US4555303A (en) * 1984-10-02 1985-11-26 Motorola, Inc. Oxidation of material in high pressure oxygen plasma
EP0250455B1 (en) * 1985-10-29 1991-10-16 Hughes Aircraft Company Method and apparatus for atomic beam irradiation

Also Published As

Publication number Publication date
EP0343038A1 (fr) 1989-11-23
ZA893473B (en) 1990-01-31
NO891827L (no) 1989-11-13
FR2631258B1 (fr) 1991-04-05
FR2631258A1 (fr) 1989-11-17
NO173921B (no) 1993-11-15
NO173921C (no) 1994-02-23
JPH0252084A (ja) 1990-02-21
CN1038036A (zh) 1989-12-20
NO891827D0 (no) 1989-05-03
DK226989D0 (da) 1989-05-09

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Legal Events

Date Code Title Description
AHB Application shelved due to non-payment