DE60238498D1 - Sensor mit flüssigkeits-isolations-barriere - Google Patents

Sensor mit flüssigkeits-isolations-barriere

Info

Publication number
DE60238498D1
DE60238498D1 DE60238498T DE60238498T DE60238498D1 DE 60238498 D1 DE60238498 D1 DE 60238498D1 DE 60238498 T DE60238498 T DE 60238498T DE 60238498 T DE60238498 T DE 60238498T DE 60238498 D1 DE60238498 D1 DE 60238498D1
Authority
DE
Germany
Prior art keywords
sensor
insulation barrier
liquid insulation
liquid
barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60238498T
Other languages
English (en)
Inventor
James L Gravel
Fred C Sittler
David A Broden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE60238498D1 publication Critical patent/DE60238498D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE60238498T 2001-10-15 2002-09-24 Sensor mit flüssigkeits-isolations-barriere Expired - Lifetime DE60238498D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/978,311 US6561038B2 (en) 2000-01-06 2001-10-15 Sensor with fluid isolation barrier
PCT/US2002/030206 WO2003034018A1 (en) 2001-10-15 2002-09-24 Sensor with fluid isolation barrier

Publications (1)

Publication Number Publication Date
DE60238498D1 true DE60238498D1 (de) 2011-01-13

Family

ID=25525960

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60238498T Expired - Lifetime DE60238498D1 (de) 2001-10-15 2002-09-24 Sensor mit flüssigkeits-isolations-barriere

Country Status (7)

Country Link
US (1) US6561038B2 (de)
EP (1) EP1436583B1 (de)
JP (1) JP4159991B2 (de)
CN (1) CN1311228C (de)
DE (1) DE60238498D1 (de)
RU (1) RU2292019C2 (de)
WO (1) WO2003034018A1 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8290721B2 (en) 1996-03-28 2012-10-16 Rosemount Inc. Flow measurement diagnostics
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US6883380B2 (en) * 2003-05-16 2005-04-26 Rosemount Inc Pressure sensor capsule
US6722927B1 (en) * 2003-05-28 2004-04-20 Rosemount Inc. Electrical connector for a pressure sensor stem
US7464721B2 (en) * 2004-06-14 2008-12-16 Rosemount Inc. Process equipment validation
US7373831B2 (en) 2004-06-25 2008-05-20 Rosemount Inc. High temperature pressure transmitter assembly
US7258021B2 (en) * 2004-06-25 2007-08-21 Rosemount Inc. Process transmitter isolation assembly
US20070068225A1 (en) 2005-09-29 2007-03-29 Brown Gregory C Leak detector for process valve
US20070244503A1 (en) * 2006-04-14 2007-10-18 Salviac Limited Method for filtering embolic material
US8788070B2 (en) 2006-09-26 2014-07-22 Rosemount Inc. Automatic field device service adviser
EP2122784B1 (de) * 2007-03-19 2014-01-15 Conti Temic Microelectronic GmbH Sensoranordnung
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7497123B1 (en) 2007-12-18 2009-03-03 Rosemount Inc. Direct mount for pressure transmitter with thermal management
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US9207670B2 (en) 2011-03-21 2015-12-08 Rosemount Inc. Degrading sensor detection implemented within a transmitter
US8671766B2 (en) * 2011-05-19 2014-03-18 Infineon Technologies Ag Integrated pressure sensor seal
US9010191B2 (en) 2011-12-22 2015-04-21 Rosemount Inc. Pressure sensor module for sub-sea applications
EP3489649B8 (de) 2012-03-06 2021-06-23 Rosemount Inc. System zur entfernten dichtungsdruckmessung und verwendung unter wasser
US9052240B2 (en) 2012-06-29 2015-06-09 Rosemount Inc. Industrial process temperature transmitter with sensor stress diagnostics
US9568387B2 (en) * 2012-08-08 2017-02-14 Rosemount Inc. Thermal diagnostic for single-crystal process fluid pressure sensor
US9602122B2 (en) 2012-09-28 2017-03-21 Rosemount Inc. Process variable measurement noise diagnostic
EP2927656B1 (de) * 2012-11-30 2019-01-16 Fuji Electric Co., Ltd. Drucksensorvorrichtung und drucksensorvorrichtungherstellungsverfahren
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
US9689769B2 (en) * 2013-07-19 2017-06-27 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug
US9459170B2 (en) * 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
US9234776B2 (en) 2013-09-26 2016-01-12 Rosemount Inc. Multivariable process fluid transmitter for high pressure applications
US10260980B2 (en) 2013-09-27 2019-04-16 Rosemount Inc. Pressure sensor with mineral insulated cable
US9222815B2 (en) 2013-12-30 2015-12-29 Rosemount Inc. Wafer style insertable magnetic flowmeter with collapsible petals
US10107700B2 (en) 2014-03-24 2018-10-23 Rosemount Inc. Process variable transmitter with process variable sensor carried by process gasket
CN104089639B (zh) * 2014-06-24 2016-08-31 珠海格力电器股份有限公司 传感器电器盒
DE102014212259A1 (de) * 2014-06-26 2016-01-14 Robert Bosch Gmbh Drucksensor zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
RU2017119006A (ru) 2014-12-03 2019-01-09 Грундфос Холдинг А/С Узел датчика
JP6895289B2 (ja) * 2017-03-29 2021-06-30 株式会社堀場エステック 圧力センサ
US10598559B2 (en) 2017-06-29 2020-03-24 Rosemount Inc. Pressure sensor assembly

Family Cites Families (221)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648764U (de) 1952-10-06 1952-12-31 Agnes Speer Schnelleinfaedler fuer naehmaschinen-, naeh- und stopfnadeln.
US3239827A (en) 1960-01-12 1966-03-08 Rosemount Eng Co Ltd High precision pressure standard
US3079576A (en) 1961-02-01 1963-02-26 Rosemount Eng Co Ltd Integral strain transducer
US3147085A (en) 1961-09-14 1964-09-01 Gen Electric Apparatus for growing whiskers
NL281412A (de) 1962-07-25
GB1069435A (en) 1963-05-21 1967-05-17 G V Planer Ltd Electromechanical transducer device
NL6411121A (de) 1964-09-24 1966-03-25
US3356963A (en) 1966-06-23 1967-12-05 Willard E Buck Fused quartz motion sensitive transducer
US3405559A (en) 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3440873A (en) 1967-05-23 1969-04-29 Corning Glass Works Miniature pressure transducer
US3750476A (en) 1967-09-25 1973-08-07 Bissett Berman Corp Pressure transducer
US3589965A (en) 1968-11-27 1971-06-29 Mallory & Co Inc P R Bonding an insulator to an insulator
USRE28798E (en) 1969-12-31 1976-05-04 Western Electric Co., Inc. Methods of and apparatus for aligning and bonding workpieces
US3696985A (en) 1969-12-31 1972-10-10 Western Electric Co Methods of and apparatus for aligning and bonding workpieces
US3743552A (en) 1970-01-30 1973-07-03 North American Rockwell Process for coplanar semiconductor structure
US4050956A (en) 1970-02-20 1977-09-27 Commonwealth Scientific And Industrial Research Organization Chemical bonding of metals to ceramic materials
US3645137A (en) 1970-04-16 1972-02-29 Bendix Corp Quartz pressure sensor
DE2021479A1 (de) 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
IL38468A (en) 1971-02-02 1974-11-29 Hughes Aircraft Co Electrical resistance device and its production
CS153132B1 (de) 1971-02-12 1974-02-25
US3715638A (en) 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3962921A (en) 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
US3744120A (en) 1972-04-20 1973-07-10 Gen Electric Direct bonding of metals with a metal-gas eutectic
US3854892A (en) 1972-04-20 1974-12-17 Gen Electric Direct bonding of metals with a metal-gas eutectic
US3766634A (en) 1972-04-20 1973-10-23 Gen Electric Method of direct bonding metals to non-metallic substrates
US3899878A (en) 1972-07-19 1975-08-19 Int Harvester Co Apparatus for indicating gas temperatures
US3834604A (en) 1972-10-03 1974-09-10 Western Electric Co Apparatus for solid-phase bonding mating members through an interposed pre-shaped compliant medium
US3939559A (en) 1972-10-03 1976-02-24 Western Electric Company, Inc. Methods of solid-phase bonding mating members through an interposed pre-shaped compliant medium
SU463643A1 (ru) 1973-01-03 1975-03-15 Ордена Ленина Предприятие П/Я А-1705 Способ изготовлени изделий
FR2246506A1 (en) 1973-10-09 1975-05-02 Podvigalkina Galina Joining of silicate glass lenses - by formation of silicate film on lens surface(s) then sintering together by IR radiation
US3858097A (en) 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
US3994430A (en) 1975-07-30 1976-11-30 General Electric Company Direct bonding of metals to ceramics and metals
US4177496A (en) 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4426673A (en) 1976-03-12 1984-01-17 Kavlico Corporation Capacitive pressure transducer and method of making same
US4084438A (en) 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4018374A (en) 1976-06-01 1977-04-19 Ford Aerospace & Communications Corporation Method for forming a bond between sapphire and glass
US4064549A (en) 1976-08-31 1977-12-20 Metrolology General Corporation Cylindrical capacitive quartz transducer
US4158217A (en) 1976-12-02 1979-06-12 Kaylico Corporation Capacitive pressure transducer with improved electrode
US4128006A (en) 1976-12-13 1978-12-05 Bunker Ramo Corporation Packaging of pressure sensor cells
US4127840A (en) 1977-02-22 1978-11-28 Conrac Corporation Solid state force transducer
US4078711A (en) 1977-04-14 1978-03-14 Rockwell International Corporation Metallurgical method for die attaching silicon on sapphire devices to obtain heat resistant bond
US4202217A (en) 1977-12-12 1980-05-13 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flat bondable surfaces with buried contact areas
US4208782A (en) 1977-12-12 1980-06-24 Kulite Semiconductor Products, Inc. Methods of fabricating transducers employing flat bondable surfaces with buried contact areas
SU736216A1 (ru) 1978-02-22 1980-05-25 Предприятие П/Я А-3695 Способ изготовлени газоразр дной лампы
JPS5516228A (en) 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4196632A (en) 1978-08-14 1980-04-08 The Boeing Company Dual capacitance type bonded pressure transducer
GB2034478B (en) 1978-11-07 1983-03-02 Vaisala Oy Pressure gauge having an aneroid capsule
US4278195A (en) 1978-12-01 1981-07-14 Honeywell Inc. Method for low temperature bonding of silicon and silicon on sapphire and spinel to nickel and nickel steel and apparatus using such _a bonding technique
US4274125A (en) 1979-01-23 1981-06-16 The Bendix Corporation Temperature compensated capacitance pressure transducer
JPS5937716Y2 (ja) 1979-01-31 1984-10-19 日産自動車株式会社 半導体差圧センサ
JPS5817421B2 (ja) 1979-02-02 1983-04-07 日産自動車株式会社 半導体圧力センサ
US4236137A (en) 1979-03-19 1980-11-25 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flexure frames
US4216404A (en) 1979-04-12 1980-08-05 Kulite Semiconductor Products Inc. Housing and lead arrangements for electromechanical transducers
FR2455733A1 (fr) 1979-04-19 1980-11-28 Motorola Inc Capteur de pression a effet capacitif et procede de fabrication
US4222277A (en) 1979-08-13 1980-09-16 Kulite Semiconductor Products, Inc. Media compatible pressure transducer
CA1154502A (en) 1979-09-04 1983-09-27 Joseph W. Crow Semiconductor variable capacitance pressure transducer
US4301492A (en) 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4382247A (en) 1980-03-06 1983-05-03 Robert Bosch Gmbh Pressure sensor
JPS56129831A (en) 1980-03-17 1981-10-12 Yokogawa Hokushin Electric Corp Pressure converter
DE3015356A1 (de) 1980-04-22 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen
DE3030765C2 (de) 1980-08-14 1985-09-26 Friedrich Grohe Armaturenfabrik Gmbh & Co, 5870 Hemer Elektronisch geregeltes Mischventil
US4419142A (en) 1980-10-24 1983-12-06 Tokyo Shibaura Denki Kabushiki Kaisha Method of forming dielectric isolation of device regions
SE436936B (sv) 1981-01-29 1985-01-28 Asea Ab Integrerad kapacitiv givare
US4422335A (en) 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
US4359498A (en) 1981-04-20 1982-11-16 Kulite Semiconductor Products, Inc. Transducer structure employing vertically walled diaphragms with quasi rectangular active areas
US4443293A (en) 1981-04-20 1984-04-17 Kulite Semiconductor Products, Inc. Method of fabricating transducer structure employing vertically walled diaphragms with quasi rectangular active areas
WO1982003914A1 (en) 1981-05-07 1982-11-11 Taniuchi Tetsuo A temperature detector
US4389895A (en) 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4456901A (en) 1981-08-31 1984-06-26 Kulite Semiconductor Products, Inc. Dielectrically isolated transducer employing single crystal strain gages
US4412203A (en) 1981-09-10 1983-10-25 Kulite Semiconductor Products, Inc. Housing and interconnection assembly for a pressure transducer
JPS5855732A (ja) 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
US4454765A (en) 1981-11-03 1984-06-19 Lodge Arthur S Extended range pressure transducers
GB2109099B (en) 1981-11-05 1985-07-24 Glaverbel Composite refractory articles and method of manufacturing them
US4416156A (en) 1981-12-23 1983-11-22 Honeywell Inc. High pressure electrical feedthru
NL8201222A (nl) 1982-03-24 1983-10-17 Philips Nv Verstembare fabry-perot interferometer en roentgenbeeldweergeefinrichting voorzien van een dergelijke interferometer.
US4422125A (en) 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
US4424713A (en) 1982-06-11 1984-01-10 General Signal Corporation Silicon diaphragm capacitive pressure transducer
US4535219A (en) 1982-10-12 1985-08-13 Xerox Corporation Interfacial blister bonding for microinterconnections
DE3404262A1 (de) 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Kapazitiver messfuehler
US5007841A (en) 1983-05-31 1991-04-16 Trw Inc. Integrated-circuit chip interconnection system
US4479070A (en) 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
DE3324661A1 (de) 1983-07-08 1985-01-17 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren zum direkten verbinden von metall mit keramik
US4517622A (en) 1983-08-29 1985-05-14 United Technologies Corporation Capacitive pressure transducer signal conditioning circuit
US4507973A (en) 1983-08-31 1985-04-02 Borg-Warner Corporation Housing for capacitive pressure sensor
JPS6051700A (ja) 1983-08-31 1985-03-23 Toshiba Corp シリコン結晶体の接合方法
US4539061A (en) 1983-09-07 1985-09-03 Yeda Research And Development Co., Ltd. Process for the production of built-up films by the stepwise adsorption of individual monolayers
NL8303109A (nl) 1983-09-08 1985-04-01 Philips Nv Werkwijze voor het aan elkaar bevestigen van twee delen.
US4572000A (en) 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
GB8401848D0 (en) 1984-01-24 1984-02-29 Carter R E Pressure transducer
US4525766A (en) 1984-01-25 1985-06-25 Transensory Devices, Inc. Method and apparatus for forming hermetically sealed electrical feedthrough conductors
FI74350C (fi) 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
US4542436A (en) 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
EP0161740B1 (de) 1984-05-09 1991-06-12 Kabushiki Kaisha Toshiba Verfahren zur Herstellung eines Halbleitersubstrates
US4649627A (en) 1984-06-28 1987-03-17 International Business Machines Corporation Method of fabricating silicon-on-insulator transistors with a shared element
JPS6173345A (ja) 1984-09-19 1986-04-15 Toshiba Corp 半導体装置
FI75426C (fi) 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4625561A (en) 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
JPS61142759A (ja) 1984-12-14 1986-06-30 Ngk Spark Plug Co Ltd Ｉｃパツケ−ジ用基板
JPH0770474B2 (ja) 1985-02-08 1995-07-31 株式会社東芝 化合物半導体装置の製造方法
US4780572A (en) 1985-03-04 1988-10-25 Ngk Spark Plug Co., Ltd. Device for mounting semiconductors
US4586109A (en) 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4764747A (en) 1985-06-19 1988-08-16 Kulite Semiconductor Products, Inc. Glass header structure for a semiconductor pressure transducer
NL8501773A (nl) 1985-06-20 1987-01-16 Philips Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen.
JPH0783050B2 (ja) 1985-06-21 1995-09-06 株式会社東芝 半導体素子の製造方法
US4601779A (en) 1985-06-24 1986-07-22 International Business Machines Corporation Method of producing a thin silicon-on-insulator layer
US4689999A (en) 1985-07-26 1987-09-01 The Garrett Corporation Temperature compensated pressure transducer
SU1398825A1 (ru) 1985-09-25 1988-05-30 Северо-Западный Заочный Политехнический Институт Датчик дл измерени давлени прикуса зубов
NL8600216A (nl) 1986-01-30 1987-08-17 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.
US4716492A (en) 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
DE3616308C2 (de) 1986-05-14 1995-09-21 Bosch Gmbh Robert Sensor
US4703658A (en) 1986-06-18 1987-11-03 Motorola, Inc. Pressure sensor assembly
US4800758A (en) 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
DE3670178D1 (de) 1986-08-13 1990-05-10 Toshiba Kawasaki Kk Apparat zum zusammenfuegen von halbleiterscheiben.
US4769882A (en) 1986-10-22 1988-09-13 The Singer Company Method for making piezoelectric sensing elements with gold-germanium bonding layers
US4773972A (en) 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
NL8700033A (nl) 1987-01-09 1988-08-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting van het type halfgeleider op isolator.
US5113868A (en) 1987-06-01 1992-05-19 The Regents Of The University Of Michigan Ultraminiature pressure sensor with addressable read-out circuit
US4754365A (en) 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
SU1597627A1 (ru) 1987-06-26 1990-10-07 Институт физики Земли им.О.Ю.Шмидта Датчик давлени
GB8718639D0 (en) 1987-08-06 1987-09-09 Spectrol Reliance Ltd Capacitive pressure sensors
GB8718637D0 (en) 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
US4774196A (en) 1987-08-25 1988-09-27 Siliconix Incorporated Method of bonding semiconductor wafers
US4852408A (en) 1987-09-03 1989-08-01 Scott Fetzer Company Stop for integrated circuit diaphragm
US4875368A (en) 1987-09-08 1989-10-24 Panex Corporation Pressure sensor system
US4929893A (en) 1987-10-06 1990-05-29 Canon Kabushiki Kaisha Wafer prober
US4857130A (en) 1987-12-03 1989-08-15 Hughes Aircraft Company Temperature stable optical bonding method and apparatus obtained thereby
DE8802411U1 (de) * 1988-02-24 1989-06-29 Keller AG für Druckmeßtechnik, Winterthur Druckmeßvorrichtung
US4806783A (en) 1988-02-25 1989-02-21 Transducer Technologies Inc. Transducer circuit
US5068712A (en) 1988-09-20 1991-11-26 Hitachi, Ltd. Semiconductor device
DE3811047A1 (de) 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
DE3811311C1 (de) 1988-04-02 1989-03-09 Robert Bosch Gmbh, 7000 Stuttgart, De
US4994781A (en) 1988-04-07 1991-02-19 Sahagen Armen N Pressure sensing transducer employing piezoresistive elements on sapphire
US5174926A (en) 1988-04-07 1992-12-29 Sahagen Armen N Compositions for piezoresistive and superconductive application
NL8800953A (nl) 1988-04-13 1989-11-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderlichaam.
US5197892A (en) 1988-05-31 1993-03-30 Canon Kabushiki Kaisha Electric circuit device having an electric connecting member and electric circuit components
JPH02124800A (ja) 1988-07-04 1990-05-14 Hiroaki Aoshima 一体同化した合成コランダムの単結晶構造体の製造方法
EP0355340A1 (de) 1988-07-04 1990-02-28 Hiroaki Aoshima Verfahren zur Herstellung von Gefügen durch Zusammenfügen synthetischer Einkristalle aus Korund
DE3822966C2 (de) 1988-07-07 1993-09-30 Degussa Verwendung einer Silberlegierung als Lot zum direkten Verbinden von Keramikteilen
DE3901492A1 (de) 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
US4879903A (en) 1988-09-02 1989-11-14 Nova Sensor Three part low cost sensor housing
FR2638524B1 (fr) 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
US4883215A (en) 1988-12-19 1989-11-28 Duke University Method for bubble-free bonding of silicon wafers
US4954925A (en) 1988-12-30 1990-09-04 United Technologies Corporation Capacitive sensor with minimized dielectric drift
SU1629763A1 (ru) 1989-02-12 1991-02-23 Предприятие П/Я А-1891 Способ изготовлени емкостного датчика давлени
NL8900388A (nl) 1989-02-17 1990-09-17 Philips Nv Werkwijze voor het verbinden van twee voorwerpen.
DE3909185A1 (de) 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
US5087124A (en) 1989-05-09 1992-02-11 Smith Rosemary L Interferometric pressure sensor capable of high temperature operation and method of fabrication
JPH0355822A (ja) 1989-07-25 1991-03-11 Shin Etsu Handotai Co Ltd 半導体素子形成用基板の製造方法
US5201977A (en) 1989-08-09 1993-04-13 Hiroaki Aoshima Process for producing structures from synthetic single-crystal pieces
JPH0636414B2 (ja) 1989-08-17 1994-05-11 信越半導体株式会社 半導体素子形成用基板の製造方法
US5044202A (en) 1989-09-18 1991-09-03 Texas Instruments Incorporated Pressure transducer apparatus
US4972717A (en) 1989-09-18 1990-11-27 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
JPH03170826A (ja) 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
US5001934A (en) 1990-01-02 1991-03-26 Walbro Corporation Solid state pressure sensor
US5050034A (en) 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
JPH0719737B2 (ja) 1990-02-28 1995-03-06 信越半導体株式会社 Ｓ０１基板の製造方法
DE69126153T2 (de) 1990-02-28 1998-01-08 Shinetsu Handotai Kk Verfahren zur Herstellung von verbundenen Halbleiterplättchen
JPH0636413B2 (ja) 1990-03-29 1994-05-11 信越半導体株式会社 半導体素子形成用基板の製造方法
DE4011901A1 (de) 1990-04-12 1991-10-17 Vdo Schindling Kapazitiver drucksensor
DE69112900T2 (de) 1990-04-27 1996-05-23 Hiroaki Aoshima Verfahren zum Verbinden synthetischer Einkristalle.
US5088329A (en) * 1990-05-07 1992-02-18 Sahagen Armen N Piezoresistive pressure transducer
CN1018844B (zh) 1990-06-02 1992-10-28 中国科学院兰州化学物理研究所 防锈干膜润滑剂
NL9001301A (nl) 1990-06-08 1992-01-02 Philips Nv Werkwijze voor het vervaardigen van een supergeleiderinrichting.
US5084123A (en) 1990-07-02 1992-01-28 Hughes Aircraft Company Temperature stable optical bonding method and apparatus
US5326726A (en) 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5189916A (en) 1990-08-24 1993-03-02 Ngk Spark Plug Co., Ltd. Pressure sensor
JP2724419B2 (ja) 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
JP2718563B2 (ja) 1990-08-28 1998-02-25 日本特殊陶業株式会社 圧力検出器
JPH0719739B2 (ja) 1990-09-10 1995-03-06 信越半導体株式会社 接合ウェーハの製造方法
DE4031791A1 (de) 1990-10-08 1992-04-09 Leybold Ag Sensor fuer ein kapazitaetsmanometer
US5123849A (en) 1990-11-15 1992-06-23 Amp Incorporated Conductive gel area array connector
US5094109A (en) 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
US5261999A (en) 1991-05-08 1993-11-16 North American Philips Corporation Process for making strain-compensated bonded silicon-on-insulator material free of dislocations
US5155061A (en) 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
US5133215A (en) 1991-06-19 1992-07-28 Honeywell Inc. Pressure transmitter assembly having sensor isolation mounting
US5178015A (en) 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
FR2679651B1 (fr) 1991-07-26 1993-11-12 Schlumberger Services Petroliers Couche mince extensometrique en cermet a base de tantale et de nitrate de tantale, son procede de preparation et son utilisation dans un capteur de pression.
US5231301A (en) 1991-10-02 1993-07-27 Lucas Novasensor Semiconductor sensor with piezoresistors and improved electrostatic structures
US5319324A (en) 1991-10-02 1994-06-07 Matsushita Electric Industrial Co., Ltd. Method of direct bonding of crystals and crystal devices
US5227068A (en) 1991-10-25 1993-07-13 Eco-Soil Systems, Inc. Closed apparatus system for improving irrigation and method for its use
EP0547684A3 (en) 1991-12-18 1996-11-06 Koninkl Philips Electronics Nv Method of manufacturing a semiconductor body comprising a carrier wafer and a monocrystalline semiconducting top layer
US5271277A (en) 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
JP2896725B2 (ja) 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
US5214563A (en) 1991-12-31 1993-05-25 Compaq Computer Corporation Thermally reactive lead assembly and method for making same
US6140143A (en) 1992-02-10 2000-10-31 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon
FR2687777B1 (fr) 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur capacitif a faible capacite parasite et procede de fabrication.
US5287746A (en) 1992-04-14 1994-02-22 Rosemount Inc. Modular transmitter with flame arresting header
JP2601128B2 (ja) 1992-05-06 1997-04-16 松下電器産業株式会社 回路形成用基板の製造方法および回路形成用基板
US5236118A (en) 1992-05-12 1993-08-17 The Regents Of The University Of California Aligned wafer bonding
US5242864A (en) 1992-06-05 1993-09-07 Intel Corporation Polyimide process for protecting integrated circuits
US5189591A (en) 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer
EP0579298B1 (de) 1992-06-15 1997-09-03 Koninklijke Philips Electronics N.V. Verfahren zum Herstellen einer Platte mit einer ebenen Hauptoberfläche, Verfahren zum Herstellen einer Platte mit parallelen Hauptoberflächen sowie Vorrichtung zum Durchführen der Verfahren
US5294760A (en) 1992-06-23 1994-03-15 The Regents Of The University Of California Digital pressure switch and method of fabrication
ES2133149T3 (es) 1992-08-10 1999-09-01 Dow Deutschland Inc Adaptador para montar un sensor de presion a una carcasa de turbina de gas.
US5228862A (en) 1992-08-31 1993-07-20 International Business Machines Corporation Fluid pressure actuated connector
JP3057924B2 (ja) 1992-09-22 2000-07-04 松下電器産業株式会社 両面プリント基板およびその製造方法
US5332469A (en) 1992-11-12 1994-07-26 Ford Motor Company Capacitive surface micromachined differential pressure sensor
US5314107A (en) 1992-12-31 1994-05-24 Motorola, Inc. Automated method for joining wafers
JP2852593B2 (ja) 1993-03-11 1999-02-03 株式会社山武 静電容量式圧力センサ
US5369544A (en) 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
JP3087152B2 (ja) 1993-09-08 2000-09-11 富士通株式会社 樹脂フィルム多層回路基板の製造方法
US5483834A (en) 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
US5424650A (en) 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
JP3111816B2 (ja) 1993-10-08 2000-11-27 株式会社日立製作所 プロセス状態検出装置
DE4342890A1 (de) 1993-12-16 1995-06-22 Mannesmann Kienzle Gmbh Verfahren zum Abdichten herstellprozeßbedingter Öffnungen an mikromechanischen Beschleunigungssensoren
US5466630A (en) 1994-03-21 1995-11-14 United Microelectronics Corp. Silicon-on-insulator technique with buried gap
US5437189A (en) 1994-05-03 1995-08-01 Motorola, Inc. Dual absolute pressure sensor and method thereof
US5471884A (en) 1994-07-05 1995-12-05 Motorola, Inc. Gain-adjusting circuitry for combining two sensors to form a media isolated differential pressure sensor
DE69534748T2 (de) 1994-09-02 2006-11-02 Volcano Corp. (n.d, Ges.d.Staates Delaware), Rancho Cordova Ultraminiatur-druckfühler und leitdraht hierfür
US5479827A (en) 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
US5528452A (en) 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5731522A (en) 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
JP3239940B2 (ja) 1997-09-10 2001-12-17 日本電気株式会社 半導体装置及びその製造方法
US5982608A (en) 1998-01-13 1999-11-09 Stmicroelectronics, Inc. Semiconductor variable capacitor
US6126889A (en) 1998-02-11 2000-10-03 General Electric Company Process of preparing monolithic seal for sapphire CMH lamp
JP3339565B2 (ja) 1998-09-29 2002-10-28 株式会社山武 圧力センサ
US6131462A (en) 1998-12-18 2000-10-17 Delaware Capital Formation, Inc. Pressure/temperature transducer with improved thermal coupling and enhanced transient response
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6520020B1 (en) * 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor

Also Published As

Publication number Publication date
RU2004114873A (ru) 2005-04-10
EP1436583B1 (de) 2010-12-01
JP4159991B2 (ja) 2008-10-01
CN1311228C (zh) 2007-04-18
WO2003034018A1 (en) 2003-04-24
JP2005526232A (ja) 2005-09-02
RU2292019C2 (ru) 2007-01-20
EP1436583A1 (de) 2004-07-14
US20020100333A1 (en) 2002-08-01
CN1633588A (zh) 2005-06-29
US6561038B2 (en) 2003-05-13

Similar Documents

Publication Publication Date Title
DE60238498D1 (de) Sensor mit flüssigkeits-isolations-barriere
DE60233429D1 (de) Barriere mit äusserer verstärkungsstruktur
DE60213391D1 (de) Persönlicher Firewall mit Positionsdetektion
DE60031005D1 (de) Isoliereinheit
DE50214737D1 (de) Sensor-anordnung
DE60138063D1 (de) Markenunabhängiger Ausrichtungssensor
DE60229427D1 (de) Stromsensor
DE60139958D1 (de) Infrarotsensor
DK1296829T3 (da) Film med höj fugtbarriere
DE60227210D1 (de) Auslösevorrichtung mit Wahlfunktion
DE50205133D1 (de) Mikromechanischer wärmeleitfähigkeitssensor mit poröser abdeckung
DE50106762D1 (de) Ionische Flüssigkeiten
DE10217601B4 (de) Winkelsensor
DE60217457D1 (de) Positionssensor
DE10329811B4 (de) Flüssigkeitsstandssensor
DE50108998D1 (de) Bildsensoreinrichtung mit zentralverschluss
DE50300780D1 (de) Kontraktionseinheit mit Positionssensoreinrichtung
DE50205967D1 (de) Sensoranordnung
DE60138036D1 (de) Stentzuführvorrichtung mit verbesserter führung
DE60206313D1 (de) Zentrifuge mit Sensor
DE60143148D1 (de) En mit honigwaben
DE60105264D1 (de) Flansch mit sperrschicht
DE60217882D1 (de) Verbindungsvorrichtung mit sicherer befestigung
DE50114300D1 (de) Elektrochemisches sensorelement
DE50214164D1 (de) Spaltrohrpumpe mit Temperatursensor