DE1104066B - Process for the production of metal coatings on insulating strips for MP capacitors - Google Patents

Process for the production of metal coatings on insulating strips for MP capacitors

Info

Publication number
DE1104066B
DE1104066B DER14588A DER0014588A DE1104066B DE 1104066 B DE1104066 B DE 1104066B DE R14588 A DER14588 A DE R14588A DE R0014588 A DER0014588 A DE R0014588A DE 1104066 B DE1104066 B DE 1104066B
Authority
DE
Germany
Prior art keywords
metallization
production
capacitors
insulating
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DER14588A
Other languages
German (de)
Inventor
Dr-Ing Heinz Borchers
Dipl-Ing Guenther Drewes
Dipl-Chem Kurt Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ROEDERSTEIN KONDENSATOREN
Ernst Roederstein Spezialfabrik fuer Kondensatoren GmbH
Original Assignee
ROEDERSTEIN KONDENSATOREN
Ernst Roederstein Spezialfabrik fuer Kondensatoren GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ROEDERSTEIN KONDENSATOREN, Ernst Roederstein Spezialfabrik fuer Kondensatoren GmbH filed Critical ROEDERSTEIN KONDENSATOREN
Priority to DER14588A priority Critical patent/DE1104066B/en
Publication of DE1104066B publication Critical patent/DE1104066B/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

Verfahren zur Herstellung von Metallbelägen auf Isolierstoffbändern für MP-Kondensatoren Zur Herstellung von MP-Kondensatorenwickeln benutzt man als das den Metallbelag tragende Dielektrikum ein Isolierstoffband, auf das eine sehr dünne Metallschicht aus z. B. Zink oder Aluminium im Vakuum festhaftend durch Kondensation aus der Dampfphase niedergeschlagen wird. Diese Metallbeläge müssen bekanntlich sehr dünn sein, um überhaupt eine elektrische Ausheilung von Fehlstellen zu ermöglichen.Process for the production of metal coverings on insulating strips for MP capacitors For the production of MP capacitor windings one uses as the dielectric carrying the metal covering is an insulating tape on which a very thin metal layer made of z. B. zinc or aluminum adheres firmly in a vacuum through condensation is precipitated from the vapor phase. As is well known, these metal coverings must be very thin in order to allow electrical healing of defects at all.

Bei Zink hat sich nun als nachteilig herausgestellt, daß z. B. auf Papierbänder aufgetragene Zinkschichten derart geringer Stärke gegen Feuchtigkeit sehr empfindlich sind und daher leicht zu Korrosion neigen, sofern nicht durch ganz besondere Fertigungsmaßnahmen bei der Lagerung und Verarbeitung dieser zinkmetallisierten Papiere diese Korrosionsbildung gehemmt wird, welche die Lebensdauer des Kondensators stark verkürzen kann.In zinc has now been found to be disadvantageous that z. B. on Paper tapes applied zinc layers of such low thickness against moisture are very sensitive and are therefore easily prone to corrosion, if not completely special manufacturing measures for the storage and processing of these zinc-plated Papers this corrosion formation is inhibited, which extends the life of the capacitor can greatly shorten.

Bei Aluminium dagegen liegen die Fertigungsschwierigkeiten vor allem darin, daß das Aufdampfen dieses Metalls auf dünne Isolierstoffbänder zum Zwecke einer MP-Kondensatorenherstellung ein relativ hohes Vakuum sowie sehr hohe Verdampferöfentemperaturen in der Aufdampfanlage erfordrt. Beide Forderungen bedingen in ihrer Gesamtauswirkung einen erheblichen technischen Aufwand, um überhaupt solche, hinsichtlich ihrer Temperatur- und mechanischen Festigkeit sehr empfindlichen organischen Werkstoffe, wie Papier oder Kunststoffolie, metallisieren zu können.In the case of aluminum, on the other hand, the main manufacturing difficulties are in that the vapor deposition of this metal on thin strips of insulating material for the purpose MP capacitor production requires a relatively high vacuum and very high evaporator furnace temperatures required in the evaporation system. Both demands are conditional in their overall effect a considerable technical effort in order to even such, with regard to their temperature and mechanical strength of very sensitive organic materials such as paper or plastic film to be able to metallize.

Außerdem ist als nachteilig bei der Verwendungvon Zink und Aluminium als Belagmittel für MP-Kondensatoren anzusehen, daß beide Metalle nur im Vakuum auf Isolierstoffbänder aufgedampft werden können, so daß in einer Massenfertigung durchaus vorkommende Betriebsstörungen, wie z. B. Abreißen des zu metallisierenden Papierbandes in der Vakuumglocke oder nicht genügend gleichmäßiges Aufwickeln der Isolierstoffbahn nach dem Metallisieren, zwangläufig zu erheblichen Minderleistungen an metallisiertem Isolierstoffband führen können.It is also disadvantageous to use zinc and aluminum to be seen as a coating agent for MP capacitors that both metals only in a vacuum can be vapor-deposited on insulating strips, so that in a mass production operational disruptions that do occur, such as B. Tearing off the to be metallized Paper tape in the bell jar or not winding the Insulation sheet after metallization, inevitably to considerable underperformance can lead to metallized insulating tape.

Unter anderem zur Vermeidung vorgenannter Nachteile ist auch bereits versucht worden, Metallbeläge durch thermische Zersetzung von Metallkarbonylen, wie etwa nickeltetrakarbonyl, zu erzeugen. Dieses Material hat aber unter anderem drei Eigenschaften, die seine technische Anwendung sehr erschweren können. Einmal ist das der relativ hohe Preis des Nickelkarbonyls und dann die gesundheitlich unangenehme Auswirkung beim Einatmen nickelkarbonylhaltiger Luft sowie die Verpuffungs- bzw. Explosionsneigung mit Sauerstoff angereicherter höherprozentiger Nickelkarbonyldämpfe.Among other things, to avoid the aforementioned disadvantages is also already attempts have been made to remove metal coverings by thermal decomposition of metal carbonyls, such as nickel tetracarbonyl. But this material has, among other things three properties that can make its technical application very difficult. Once is that the relatively high price of nickel carbonyl and then the unpleasant one from a health point of view Effects of inhaling air containing nickel carbonyl as well as the deflagration or Tendency to explode with higher percentage nickel carbonyl vapors enriched with oxygen.

Erfindungsgemäß wird daher zur Vermeidung vorgenannter Nachteile bei der Verwendung von Nickeltetrakarbonyl das Entweichen in Dampfform aus der Metallisierungsapparatur dadurch praktisch hundertprozentig vermieden, daß der bei dem an sich bekannten Metallisierungsprozeß irgendwelcher Isolierstoffbänder in der Metallisierungszone nicht aufgebrauchte und daher unzersetzte Nickelkarbonyldampf durch starke Abkühlung kondensiert und in einem Kreislauf dem Verdampfer wieder zugeführt wird. Dabei wird das Trägergas von dem bei der Zersetzung entstehenden Kohlenoxyd dadurch befreit, daß die Gasmischung in bekannter Weise über erhitztes Nickel geleitet wird. Das in flüssiger Form zurückgewonnene und von Fremdgasen gereinigte Nickelkarbonyl wird also laufend wieder dem Verdampfer zugeführt, aus dem es über eine Großflächenverdampfung, die nahezu bei Raumtemperatur erfolgt, erneut der eigentlichen Metallisierungszone zugeführt wird.According to the invention, therefore, to avoid the aforementioned disadvantages the use of nickel tetracarbonyl, the escape in vapor form from the metallization equipment thereby practically one hundred percent avoided that of the known per se Metallization process of any insulating strips in the metallization zone unused and therefore undecomposed nickel carbonyl vapor due to strong cooling condensed and fed back to the evaporator in a circuit. It will the carrier gas is freed from the carbon oxide formed during the decomposition, that the gas mixture is passed in a known manner over heated nickel. That Nickel carbonyl recovered in liquid form and purified from foreign gases becomes so continuously fed back to the evaporator, from which it is via a large area evaporation, which takes place almost at room temperature, again the actual metallization zone is fed.

Auf diese Weise ist es gelungen, ein optimal wirtschaftliches und betriebssicheres Fertigungsverfahren für die thermische Zersetzung von Nickelkarbonyl und die damit ermöglichte Metallisierung von Isolierstoffbändern zu erzielen.In this way it has been possible to achieve an optimally economical and Reliable manufacturing process for the thermal decomposition of nickel carbonyl and to achieve the metallization of insulating tapes made possible by this.

An technischen, für die Metallisierung selbst wichtigen Einzelheiten ist unter anderem folgendes zu erwähnen Um zu vermeiden, daß das in der Metallisierungszone auf 80° C und mehr aufgeheizte Isolierstoffband in stärkerem Maße Feuchtigkeit abgibt - vor allem bei Papierbändern wird das der Fall sein -, werden die Isolierstoffbahnen vor dem Eintreten in die Metallisierungszone vorgetrocknet und außerdem ein-oder beidseitig mit einer möglichst wasserdampfundurchlässiaen Schutzschicht versehen. Es hat sich gezeigt, daß letztere Maßnahme das Aufbringen einer einwandfreien Metallschicht wesentlich erleichtert.In terms of technical details that are important for the metallization itself Among other things, the following should be mentioned in order to avoid that in the metallization zone Insulating tape heated to 80 ° C and more releases moisture to a greater extent - this will be the case with paper tapes in particular - the insulation strips will be predried before entering the metallization zone and also in or Provided on both sides with a protective layer that is as impermeable to water vapor as possible. It has shown that the latter measure the application of a flawless metal layer is made much easier.

Die Konzentration des noch nicht thermisch zersetzten Nickelkarbonyldampfes in der Metallisierungszone, die Temperatur des jeweils zu metallisierenden Isolierstoffbandes sowie dieDurchlaufgeschwindigkeit dieses Bandes und die Länge der Metallisierungszone in Laufrichtung des Bandes werden so aufeinander abgestimmt, daß in der Zeiteinheit eine möglichst große Länge einwandfrei metallisierten Isolierstoffbandes hergestellt werden kann. Wichtig ist dabei, daß der aufmetallisierte Belag praktisch frei von unerwünschten Fremdstoffen ist, also ausschließlich aus Nickel besteht, und fest auf der jeweiligen Isolierstoffunterlage haftet.The concentration of the not yet thermally decomposed nickel carbonyl vapor in the metallization zone, the temperature of the insulating strip to be metallized as well as the speed of passage of this strip and the length of the metallization zone in the running direction of the tape are coordinated so that in the unit of time produced the greatest possible length of perfectly metallized insulating tape can be. It is important that the metallized covering is practically free of is unwanted foreign matter, i.e. it consists exclusively of nickel, and is solid adheres to the respective insulating material.

Claims (3)

PATENTANSYRUCHE: 1. Verfahren zur Herstellung von Metallbelägen auf Isolierstoffbändern für MP-Kondensatoren durch thermische Zersetzung von Metallverbindungen, vorzugsweise von Nickeltetrakarbonyl, aus der Dampfphase in Anwesenheit eines Trägergases, dadurch gekennzeichnet, daß der in der Metallisierungszone nicht zersetzte Nickelkarbonyldampf durch Tiefkühlung am Entweichen an die Außenluft gehindert und im Kreislauf wieder dem Verdampfer zugeführt wird. PATENT ANSYRUCHE: 1. Process for the production of metal coverings Insulating tapes for MP capacitors through thermal decomposition of metal compounds, preferably from nickel tetracarbonyl, from the vapor phase in the presence of a carrier gas, characterized in that the nickel carbonyl vapor which is not decomposed in the metallization zone prevented by freezing from escaping to the outside air and recirculated is fed to the evaporator. 2. Verfahren nach Anspruch 1," dadurch gekennzeichnet, daß das Trägergas, vorzugsweise Stickstoff, ebenfalls in einem Kreislauf innerhalb der Metallisierungsapparatur verwendet wird. 2. The method according to claim 1, "characterized in that that the carrier gas, preferably nitrogen, also in a circuit within the metallization equipment is used. 3. Verfahren nach den Ansprüchen 1 und 2, dadurch gekennzeichnet, daß die gesamte Metallisierungsapparatur einschließlich der Isolierstofffbandrollen gegenüber der Außenatmosphäre mit einem geringen Überdruck abgeschlossen ist. In Betracht gezogene Druckschriften: Deutsche Patentschriften Nr. 755 073, 900 971, 918 882; französische Patentschrift Nr. 881146; britische Patentschrift Nr. 620 405.3. The method according to claims 1 and 2, characterized in that the entire metallization apparatus including the insulating tape rolls is sealed against the outside atmosphere with a slight overpressure. Considered publications: German Patent Nos. 755 073, 900 971, 918 882; French Patent No. 881 146; British Patent No. 620 405.
DER14588A 1954-07-09 1954-07-09 Process for the production of metal coatings on insulating strips for MP capacitors Pending DE1104066B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DER14588A DE1104066B (en) 1954-07-09 1954-07-09 Process for the production of metal coatings on insulating strips for MP capacitors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DER14588A DE1104066B (en) 1954-07-09 1954-07-09 Process for the production of metal coatings on insulating strips for MP capacitors

Publications (1)

Publication Number Publication Date
DE1104066B true DE1104066B (en) 1961-04-06

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Family Applications (1)

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DER14588A Pending DE1104066B (en) 1954-07-09 1954-07-09 Process for the production of metal coatings on insulating strips for MP capacitors

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3338852A1 (en) * 1982-12-11 1984-06-14 Maschf Augsburg Nuernberg Ag METHOD AND DEVICE FOR COATING WORKPIECES BY MEANS OF CHEMICAL, HETEROGENIC GAS PHASE REACTION
US6048578A (en) * 1998-11-03 2000-04-11 Chemical Vapour Deposition Systems, Inc. Closed loop carbon monoxide self-contained nickel carbonyl deposition process
WO2000026432A1 (en) * 1998-11-03 2000-05-11 Chemical Vapour Deposition Systems Inc. Nickel carbonyl vapour deposition apparatus and process
US6132518A (en) * 1998-11-04 2000-10-17 Chemical Vapour Deposition Systems, Inc. Nickel carbonyl vapour deposition apparatus and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR881146A (en) * 1942-04-11 1943-04-15 Fides Gmbh Method and device for manufacturing insulators, in particular paper, metallized, for electrical capacitors
GB620405A (en) * 1946-04-23 1949-03-24 Alexander Frederic Fekete Improvements in or relating to compact electric condensers
DE755073C (en) * 1937-09-15 1953-03-09 Siemens & Halske A G Process for the production of electrical capacitors
DE900971C (en) * 1944-03-24 1954-01-04 Bosch Gmbh Robert Electrical capacitor made of metallized dielectric strips
DE918882C (en) * 1950-01-30 1954-10-07 British Insulated Callenders Method and device for manufacturing electrical capacitors

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE755073C (en) * 1937-09-15 1953-03-09 Siemens & Halske A G Process for the production of electrical capacitors
FR881146A (en) * 1942-04-11 1943-04-15 Fides Gmbh Method and device for manufacturing insulators, in particular paper, metallized, for electrical capacitors
DE900971C (en) * 1944-03-24 1954-01-04 Bosch Gmbh Robert Electrical capacitor made of metallized dielectric strips
GB620405A (en) * 1946-04-23 1949-03-24 Alexander Frederic Fekete Improvements in or relating to compact electric condensers
DE918882C (en) * 1950-01-30 1954-10-07 British Insulated Callenders Method and device for manufacturing electrical capacitors

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3338852A1 (en) * 1982-12-11 1984-06-14 Maschf Augsburg Nuernberg Ag METHOD AND DEVICE FOR COATING WORKPIECES BY MEANS OF CHEMICAL, HETEROGENIC GAS PHASE REACTION
US6048578A (en) * 1998-11-03 2000-04-11 Chemical Vapour Deposition Systems, Inc. Closed loop carbon monoxide self-contained nickel carbonyl deposition process
WO2000026432A1 (en) * 1998-11-03 2000-05-11 Chemical Vapour Deposition Systems Inc. Nickel carbonyl vapour deposition apparatus and process
US6132518A (en) * 1998-11-04 2000-10-17 Chemical Vapour Deposition Systems, Inc. Nickel carbonyl vapour deposition apparatus and method

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