DE102012107966A1 - Vaporizer device, used in coating plant for coating plate-like/band-shaped substrates e.g. glass panes, comprises vapor sources that is adapted for evaporation of coating material and connected vapor outlet and comprises vapor outlet tube - Google Patents

Abstract

The vaporizer device comprise vapor sources (1) for evaporation of a coating material. The vapor source is connected to a vapor outlet (5), and comprises a vapor outlet tube (5) with vapor exhaust openings space apart from each other. A vapor manifold is arranged between the vapor sources and vapor outlet tube, which is connected to vapor outlet tube by a vapor inlet (2) of vapor sources and a vapor communication port with vapor exhaust openings. A conductance of vapor manifold is greater than a conductance of the vapor outlet tube. The vaporizer device further comprises a vacuum chamber. The vaporizer device comprise vapor sources (1) for evaporation of a coating material. The vapor source is connected to a vapor outlet (5), and comprises a vapor outlet tube (5) with vapor exhaust openings space apart from each other. A vapor manifold is arranged between the vapor sources and vapor outlet tube, which is connected to vapor outlet tube by a vapor inlet (2) of vapor sources and a vapor communication port with vapor exhaust openings. A conductance of vapor manifold is greater than a conductance of the vapor outlet tube. The vaporizer device further comprises a vacuum chamber arranged in a coating plant for coating substrates (7). The vacuum chamber includes a transportation unit for transport of the substrates in a direction. A center axis of the vapor manifold and a central axis the vapor outlet tube are arranged such that the center axis of vapor outlet tube has a length greater than the center axis of the at vapor manifold and is offset in the substrate transport direction. A sum of a conductance (CA1) of the vapor communication port, conductance (CA2) of vapor exhaust openings and a sum of the conductance (CD1) of the vapor manifold and the conductance (CD2) of the vapor outlet tube in the direction are expressed as 1/(1/CA1 + 1/CA2) less than (CD1 + CD2)/20. A number of (NA1) of the vapor communication ports and the sum of the conductance CA2 of vapor exhaust openings and the conductance CD2 of the vapor outlet tube are expressed as CA2 greater than (NA1x NA1x CD2)/20. The vapor outlet tube is connected to vapor manifold by the vapor communication port. An independent claim is included for a cover evaporator system for producing mixtures of two materials.

Description

The invention relates to an evaporator device and a Koverdampfersystem for a coating system, in particular a linear evaporator device for depositing, for example, organic substances on large-area, such as plate-shaped substrates such as glass or the like.

Thermal linear evaporators for dynamic coating of moving components in a vacuum (in particular for evaporating temperature-sensitive organic substances) are known. An important goal in the design of such evaporators is to achieve a high vapor yield by adjusting a small evaporator-substrate spacing, especially in co-vapor deposition arrangements, i. Evaporator assemblies in which two or more different materials are vaporized separately and conducted in close proximity to each other on the substrate to produce mixed layers of the different materials.

General state of the art of jet tube evaporators are evaporator devices for coating substrates in vacuum by thermal evaporation with a steam distributor in the form of a nozzle tube. In this case, the steam generation takes place in a steam generating assembly, which is heated to a steam generation temperature in order to evaporate the material contained. The steam generator module communicates vapor-conducting with the steam distributor (for example a nozzle tube). The steam distributor is heatable and is heated during operation to a temperature above the condensation temperature of the generated steam.

Such evaporation devices are described inter alia in EP 1 443 127 B1 (SDT1), JM Grace, DR Freeman, and NP Redden, Eastman Kodak Company, Rochester, NY; and J. Klug, Deutsche Bank AG, New York, NY: Scale-up of Thermal Evaporation Processes for Large-Area Coatings of "Small Molecule" Organic Light-Emitting Diode Materials, 2006 Society of Vacuum Coaters 505 / 856-7188, 49th Annual Technical Conference Proceedings (2006) ISSN 0737-5921 (SDT2) and DE 10 2010 041 376 A1 (SDT3), which describes an evaporator with a non-circular nozzle tube and a Koverdampferanordnung with low evaporator-substrate spacing. The arrangement described there has the disadvantage that nozzle tubes are devoid of a deviating from the circular cylindrical shape basic shape, especially if they are to consist of non-metallic materials such as quartz glass, glass, ceramics, etc.

• a) Bei der geometrischen Auslegung von Dampfverteilern müssen, wie z.B. in SDT1 und SDT2 dargelegt, bestimmte Relationen zwischen Dampfleitwerten beachtet werden. So ist das Verhältnis des Leitwertes CB des Verteilervolumens (Düsenrohres) in dessen Längsrichtung zum Summenleitwert CA aller Düsenöffnungen d.h. der Quotient CA/CB, möglichst klein zu wählen, z.B. kleiner als 1/20, um den Druckabfall im Düsenrohr in Längsrichtung möglichst klein, z.B. unter ca. 5%, zu halten. Ein geringer Druckabfall in der Düsenrohrlängsrichtung ist wichtig, um eine hohe Homogenität der Beschichtungsrate in der Düsenrohrlängsausdehnung (d.h. in der Richtung quer zur Substrattransportrichtung) einzuhalten. Hier gilt in erster Näherung, dass die relative Rateschwankung entlang der Düsenrohrrichtung etwa dem Quotienten CA/CB entspricht. Das Patent SDT1 beansprucht für den Quotienten CA/CB den Bereich CA/CB < = 0,5. SDT1 und SDT2 beschäftigen sich nicht mit Implikationen eines möglichst kleinen Leitwertquotienten auf sonstige Eigenschaften des Verdampfers oder auf die Ausgestaltung einer Koverdampferanordnung.
• b) Die Summe der Düsenöffnungsleitwerte CA bestimmt andererseits den der Verdampfung entgegenstehenden Widerstand und limitiert dadurch die bei einer bestimmten Verdampfungstemperatur und dem der Temperatur korrespondierendem Dampfdruck die Bedampfungsrate. Um bei möglichst geringen Verdampfungstemperaturen eine möglichst hohe Beschichtungsrate zu erreichen, ist dieser Düsensummenleitwert CA möglichst hoch zu wählen.
• c) Bei Koverdampfern in Form von zwei parallel angeordneten Düsenrohren ist weiterhin ein möglichst geringer Abstand zwischen den Düsenreihen der beiden Einzelverdampfer vorteilhaft, da dadurch eine homogene Durchmischung der Dampfwolken am Ort des Substrates erreicht werden kann. Insbesondere kann der Verdampfer-Substrat-Abstand nicht wesentlich kleiner als der Abstand der Düsenreihen gewählt werden, wenn eine effektive Durchmischung der beiden Dampfkeulen am Substratort erreicht werden soll. Ein geringer Verdampfer-Substrat-Abstand ist jedoch seinerseits vorteilhaft, da dadurch eine höhere Dampfausnutzung erreicht wird (Dampfausnutzung = vom Substrat absorbierte Dampfmenge in Relation zur verdampften Menge).

The following known boundary conditions must be considered when designing steam distributors:

• a) In the geometrical design of steam distributors, as shown for example in SDT1 and SDT2, certain relations between vapor conductance values must be taken into account. Thus, the ratio of the conductance CB of the distribution volume (nozzle tube) in the longitudinal direction to the sum CA of all nozzle openings ie the quotient CA / CB, to choose as small as possible, for example less than 1/20 to the pressure drop in the nozzle tube in the longitudinal direction as small as possible, eg less than 5%. A small pressure drop in the nozzle tube longitudinal direction is important in order to maintain a high homogeneity of the coating rate in the nozzle tube longitudinal extent (ie in the direction transverse to the substrate transport direction). Here, in a first approximation, the relative rate fluctuation along the nozzle tube direction approximately corresponds to the quotient CA / CB. The patent SDT1 claims the range CA / CB <= 0.5 for the quotient CA / CB. SDT1 and SDT2 are not concerned with the implications of the smallest possible conductance quotient on other properties of the evaporator or on the design of a co-evaporator arrangement.
• b) On the other hand, the sum of the nozzle opening conductances CA determines the resistance to evaporation and thereby limits the vapor pressure corresponding to the vaporization temperature and temperature. In order to achieve the highest possible coating rate at the lowest possible evaporation temperatures, this nozzle sum conductance CA should be as high as possible.
• c) In Koverdampfern in the form of two parallel nozzle tubes is still the smallest possible distance between the rows of nozzles of the two single evaporator advantageous because a homogeneous mixing of the vapor clouds at the site of the substrate can be achieved. In particular, the evaporator-substrate distance can not be chosen substantially smaller than the distance of the nozzle rows, if an effective mixing of the two vapor lobes is to be achieved at the substrate location. However, a low evaporator-substrate distance is in turn advantageous, since thereby a higher steam utilization is achieved (steam utilization = absorbed by the substrate amount of steam in relation to the evaporated amount).

The three objectives a), b) and c) are not readily met simultaneously, since a selected according to b) high nozzle sum conductance according to a) requires a large longitudinal conductance of the steam distributor, which in turn has a high geometric cross-section of the steam distributor and thus large geometric dimensions of the same requires what precludes a close neighbor relationship of the nozzle rows of individual evaporators arranged adjacent to the co-evaporator, in particular if each of the steam distributors has the easy-to-manufacture form of a cylindrical tube. SDT3 tries to optimize the mentioned conditions a) to c) at the same time and therefore relies on a design of the steam distributor deviating from the circular cylinder shape. This solution has the disadvantage that non-cylindrical hollow components, in particular those made of inert chemical materials, which are advantageously used for the hot components in contact with reactive organic vapors, are very difficult and expensive to manufacture.

The aim of the present invention is the design of a steam distribution system (nozzle tube) of a nozzle tube linear evaporator with simultaneous optimization of the evaporator geometry according to the above criteria a) to c), which can be produced even with the exclusive use of easy to produce, essentially circular cylindrical basic forms.

This is first proposed in a per se known evaporator device for a coating system for coating plate-shaped or strip-shaped substrates, comprising a vapor source for evaporation of a coating material and connected to the steam source steam outlet having at least one steam outlet pipe with a plurality of mutually spaced vapor outlet openings proposed in that at least one steam distribution pipe is arranged between the steam source and the at least one steam outlet pipe and is connected to the steam source through at least one steam inlet opening and to the at least one steam outlet pipe through at least one steam connection opening.

For example, it can be provided that at least one steam distribution pipe is arranged between the steam source and the at least one steam outlet pipe, which has at least two steam connection openings through at least one steam inlet opening and is connected to at least one steam outlet pipe through each of the at least two steam connection openings.

In other words, between the steam source and the steam outlet pipe, according to the proposal, a steam distribution pipe is inserted, which communicates with both the steam source and the steam outlet pipe vapor-conducting. The coating material vapor generated by the vapor source first enters and distributes into the vapor manifold through at least one vapor inlet port. The steam thus distributed over the entire length of the steam distribution pipe then enters the at least one steam outlet pipe through at least one steam connection opening and is subsequently released by an arrangement of steam outlet openings. Since such evaporator devices are expediently arranged below a substrate surface to be coated, the coating material vapor subsequently settles on the substrate surface to be coated.

The terms "steam distribution pipe" and "steam outlet pipe" used here are to be interpreted broadly and not limited to cylindrical components. Although the described cascaded construction of the evaporation device allows the use of simple and inexpensive manufacturable cylindrical tubes, because it is possible to position several steam outlet pipes very close to each other. However, it goes without saying that the described evaporator device also using differently shaped components, for example as in DE 10 2010 041 376 A1 described, is still applicable with advantage, which is why such embodiments of the claimed subject matter should be included.

In the simplest case, a steam distribution pipe and a steam outlet pipe are present, which are suitably the same length and each at least as long as the substrate is wide. In this case, it is expedient that the steam distribution pipe and the steam outlet pipe are connected to one another via a plurality of, thus at least two, steam connection openings in order to make the best possible use of the effect of distributing the steam over the entire length of the steam distribution pipe. The vapor connection openings may, as well as the steam inlet opening from the steam source to the steam distribution pipe, for example, be designed as a short, the two respective components connecting pipe sections.

The proposed evaporator device can be arranged in a coating system for coating plate-shaped or strip-shaped substrates comprising a vacuum chamber with a transport device for horizontal transport plate-shaped substrates in a transport direction below the transport device, wherein the evaporator device is advantageously arranged so that the at least one steam distribution pipe and the at least one steam outlet pipe in the vicinity of the transported substrates is arranged so that the at least one steam distribution pipe and the at least one steam outlet pipe with its longitudinal axis in each case approximately parallel to the substrate surface and approximately transversely to the transport direction are aligned and the steam outlet openings facing the side to be coated of the substrate.

A concrete embodiment in a coating system, in which substrates are transported horizontally, may consist in that the at least one steam distribution pipe and the at least one steam outlet pipe are each aligned horizontally and transversely to the transport direction and the steam outlet openings facing the underside of the substrate.

The coating of plate-shaped substrates is to be understood by way of example, the proposed solution is equally suitable for the surface coating of other substrates, for example of tapes or of flatly arranged in a carrier cargo.

The information given here for the horizontal orientation of the substrates with the lower side to be coated are also only exemplary, analogous solutions can also be applied to substrates of any spatial orientation by the at least one steam distribution tube is arranged in its longitudinal extent approximately parallel to the substrate surface and transversely to the substrate transport direction ,

The arrangement of vapor outlet openings thus extending over the entire width of the substrate thereby ensures a uniform coating of the entire substrate surface when the substrate is moved past the evaporator device in the transport direction. It goes without saying that also several of the described arrangements of steam source, steam distribution pipe (s) and steam outlet pipe (s) can be combined to form an evaporator device, for example to produce mixed layers. In the same way, a plurality of such evaporator devices can be arranged one behind the other with a greater distance in one and the same system, in order for example to produce a layer system of different coating materials on the substrate.

In one embodiment, it is provided that the central axis of the at least one steam distribution pipe and the center axis of the at least one steam outlet pipe are arranged such that the central axis of the at least one steam distribution pipe has a greater distance from the substrate and a lateral offset in the substrate transport direction relative to the central axis of the at least one steam outlet pipe ,

A concrete embodiment in a coating system in which substrates are transported horizontally may consist in that the at least one steam distribution pipe is arranged vertically above the steam source and the at least one steam outlet pipe is arranged offset relative to the arrangement of steam source and steam distribution pipe.

Due to the mutually perpendicular arrangement of steam source and steam distribution pipe seen in the transport direction of the substrates short construction of the evaporator device is achieved while the spatially close arrangement of two viewed in the transport direction successively arranged Dampfauslassrohre can be achieved by the relatively staggered arrangement of the Dampfauslassrohrs.

For the highest possible uniformity of the steam distribution on the way from the steam source to the steam outlet openings, the evaporator device is advantageously designed so that the relative CD1 of the steam distributor tube D1 and the guide value CD2 of the steam outlet tube D2 in the direction of their respective greatest extent 2 · CD2 applies: CD ₁ > 2 · CD ₂

The same purpose is served by an embodiment in which the relation 1 / (for the total conductance CA1 of the steam connection openings A1 and the sum master value CA2 of the steam outlet openings A2 and for the conductance CD1 of the steam distribution pipe D1 and for the conductance CD2 of the steam outlet pipe D2 in the direction of their respectively greatest extent. 1 / CA1 + 1 / CA2) <(CD1 + CD2) / 20 applies:

Further advantageously, the evaporator device can be configured such that the ratio CA2 <(NA1 · NA1 · CD2) / for the number NA1 of the steam connection openings A1 and the mean conductivity CA2 of the steam outlet openings A2 and for the conductance CD2 of the steam outlet pipe D2 in the direction of its greatest expansion / 20 applies:

According to a further embodiment, the evaporator device is designed such that the relationship CA1> 2 * CA2 applies to the sum-conductance CA1 of the steam connection openings A1 and the sum-value conductance CA2 of the steam outlet openings A2: CA ₁ > 2 · CA ₂

According to a further embodiment, it is provided that at least two steam outlet pipes D2 are connected by at least one steam connection opening to the at least one steam distribution pipe D1. In this embodiment, for example, a steam distribution pipe, two or more steam outlet pipes, which are then each shorter than the steam distribution pipe, be assigned and connected to this steam distribution pipe through at least one vapor connection opening vapor-conducting. In other words, in this embodiment of the proposed evaporator device it is provided that the steam outlet pipe D2 is subdivided into a plurality of individual sections which communicate with the steam distribution pipe D1 via at least one connection opening, whereby adjacent sections of the steam outlet pipe D2 are either completely separated from each other, ie not vapor conducting with each other communicate, or communicate with each other via adjacent faces vapor-conducting.

In a further embodiment, it is provided that the at least one steam distribution pipe and / or the at least one steam outlet pipe can be heated to temperatures above the condensation point of the coating material vapor. The heating can be effected by heating elements attached to the steam distribution pipe and / or the steam outlet pipe, by heating elements embedded in the steam distribution pipe and / or the steam outlet pipe, or by direct flow of current through the steam distribution pipe and / or the steam outlet pipe. Advantageously, the steam distribution systems D1 and D2 are heated during operation to temperatures above the condensation point of the steam in order to effectively prevent the deposition of layers in the interior.

As already indicated above, the described evaporator device can be used to form a co-vaporiser system for producing mixed layers of at least two materials, which comprises at least two evaporator devices arranged adjacent to each other, each having at least one steam source and at least one steam outlet pipe, wherein at least one evaporator device next to a steam source and at least a steam outlet pipe additionally has a steam distribution pipe arranged therebetween and optionally has further of the features described above.

In one embodiment of such a Koverdampfersystems can further be provided that the substrate width to be coated is greater than 400mm, the distance of the Dampfauslassöffnungen from the substrate is less than 100mm and the distance between two adjacent arrangements of steam outlet openings of the at least two evaporator devices is less than 100mm.

Finally, it may be provided in such a Koverdampfersystem that between the at least two evaporator devices with each other and between the evaporator means and the substrate screens are arranged, which can act as thermal shields of the individual components with each other and / or can absorb defined parts of the emitted vapor streams.

For the production of the described steam distribution system advantageously inexpensive tubes can be used with a circular cross section, so that the steam distribution systems D1 and D2 each have substantially the outer shape of a circular cylinder.

Further advantageously, the steam distribution systems D1 and D2 can be produced from chemically inert, in particular glassy or ceramic materials. Preferably, materials are used for the steam distribution systems D1 and D2, which have a thermal conductivity greater than 50 W / mK.

The invention will be explained in more detail with reference to embodiments and accompanying drawings. Show

1 the basic structure of an evaporator device with cascaded steam distribution system,

2 a cascaded evaporator device with divided into several individual sections steam outlet pipe,

3 a cross section of a Koverdampferanordnung with two cascaded evaporator devices, with a small distance of the steam outlet openings between the left and right evaporator and thereby allowed low evaporator-substrate distance, and

4 a cross section of a Koverdampferanordnung with a cascaded evaporator device in combination with a vaporizer device according to the prior art.

In 1 an evaporator device for a coating system for coating plate-shaped substrates is shown, which is a vapor source 1 for evaporation of a coating material and one with the vapor source 1 connected steam outlet, which includes a steam outlet pipe 5 with a plurality of spaced apart vapor outlet openings 6 includes, being between the steam source 1 and the steam outlet pipe 5 a steam distribution pipe 3 is arranged, which through a steam inlet opening 2 with the steam source 1 and through six steam connection openings 4 with the steam outlet pipe 5 connected is.

In 2 an evaporator device for a coating system for coating plate-shaped substrates is shown, which is a vapor source 1 for evaporation of a coating material and one with the vapor source 1 connected steam outlet, the four steam outlet pipes 5 each having a plurality of spaced apart vapor outlet openings 6 includes, wherein between the vapor source 1 and the steam outlet pipes 5 a steam distribution pipe 3 is arranged, which through a steam inlet opening 2 with the steam source 1 and each with a steam connection opening 4 with each steam outlet pipe 5 connected is. The evaporator devices of the embodiments according to 1 and 2 may be advantageous in a coating system for coating plate-shaped substrates 7 comprising a vacuum chamber with a transport device for the horizontal transport of plate-shaped substrates 7 in a transport direction, be arranged below the transport device so that the at least one steam distribution pipe 3 and the one or more steam outlet pipes 5 are aligned horizontally and transversely to the transport direction and the Dampfauslassöffnungen 6 the bottom of the substrate 7 are facing, as in 1 and 2 indicated schematically.

3 and 4 each show a cross section of a Koverdampferanordnung with two evaporator devices, their Dampfauslassöffnungen 6 are arranged close to each other, so that the emerging from the two evaporator clouds of steam 9 Mix as best as possible, before applying to the surface of the substrate to be coated 7 incident.

How out 3 It can be seen that the two evaporator units are two cascaded evaporator units as defined in the preceding description and the claims, ie evaporator units in which the steam source 1 and the steam outlet pipe 5 a steam distribution pipe 3 is arranged, which passes through at least one steam inlet opening 2 with the steam source 1 and through at least one steam connection opening 4 with the steam outlet pipe 5 connected is.

In both illustrated evaporator devices that is at least one steam distribution pipe 3 vertically above the vapor source 1 arranged while the at least one steam outlet pipe 5 relative to the arrangement of vapor source 1 and steam distribution pipe 3 is arranged offset laterally.

This allows the two steam distribution pipes 3 the two side by side, ie in the transport direction 8th the substrates 7 seen consecutively, arranged evaporator devices are arranged very close to each other. In this case, the two steam distribution pipes 3 each having a circular cross-section and also have a smaller diameter than the steam distribution pipes 3 which also have a circular cross-section.

How out 4 It can be seen that the vaporizer device shown on the left is a cascaded vaporizer device in the sense of the preceding description and the claims, ie an evaporator device in which between the vapor source 1 and the steam outlet pipe 5 a steam distribution pipe 3 is arranged, which passes through at least one steam inlet opening 2 with the steam source 1 and through at least one steam connection opening 4 with the steam outlet pipe 5 is connected, while it is in the evaporator device shown on the right is an evaporator known from the prior art, ie an evaporator device in which the steam outlet pipe 5 is connected by at least one steam outlet directly to the steam source.

In the case of the cascaded evaporator device shown on the left, this is at least one steam distributor tube 3 vertically above the vapor source 1 arranged while the at least one steam outlet pipe 5 relative to the arrangement of vapor source 1 and steam distribution pipe 3 is arranged offset laterally.

This allows the two steam distribution pipes 3 the two side by side, ie in the transport direction 8th the substrates 7 seen consecutively, arranged evaporator devices are arranged very close to each other.

LIST OF REFERENCE NUMBERS

1

 steam source

2

 Steam inlet port

3

 Steam distribution pipe

4

 Steam connection port

5

 steam outlet pipe

6

 steam outlet

7

 substratum

8th

 transport direction

9

 exiting steam

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• EP 1443127 B1 [0004]
• DE 102010041376 A1 [0004, 0011]

Cited non-patent literature

• J. Klug, Deutsche Bank AG, New York, NY: Scale-up of Thermal Evaporation Processes for Large-Area Coatings of "Small Molecule" Organic Light-Emitting Diode Materials, 2006 Society of Vacuum Coaters 505 / 856-7188, 49th Annual Technical Conference Proceedings (2006) ISSN 0737-5921 (SDT2) [0004]

Claims (13)

An evaporator device for a coating system for coating plate-shaped or strip-shaped substrates, comprising a steam source for evaporating a coating material and a steam outlet connected to the steam source, comprising at least one steam outlet pipe with a plurality of spaced apart steam outlet openings, characterized in that between the steam source and the at least a steam outlet pipe is arranged at least one steam distribution pipe which is connected to the steam source through at least one steam inlet opening and to the at least one steam outlet pipe through at least one steam connection opening. Vaporizer device according to claim 1, characterized in that between the steam source and the at least one steam outlet pipe at least one steam distribution pipe is arranged, which is connected by at least one steam inlet opening to the steam source, at least two steam connection openings and connected by at least two steam connection openings with at least one steam outlet pipe is. Evaporator device according to claim 1 or 2, characterized in that it is arranged in a coating installation for coating plate-shaped or strip-shaped substrates, comprising a vacuum chamber with a transport device for transporting the substrates in a transport direction in the vicinity of the transported substrates so that the at least one Steam distributor tube and the at least one steam outlet tube are aligned with their longitudinal axis approximately parallel to the substrate surface and approximately transversely to the transport direction and the steam outlet openings facing the side of the substrate to be coated. Vaporizer device according to claim 1 or 2, characterized in that the central axis of the at least one steam distribution pipe and the central axis of the at least one steam outlet pipe are arranged so that the central axis of the at least one steam distribution pipe a greater distance from the substrate and a lateral offset in the substrate transport relative to the center axis of the has at least one steam outlet pipe. Evaporator device according to claim 1 or 2, characterized in that for the conductance CD1 of the steam distribution pipe D1 and for the conductance CD2 of the steam outlet pipe D2 in the direction of their respective largest extent the relation CD1> 2 · CD2 applies. Evaporator device according to one of the preceding claims, characterized in that for the sum of conductance CA1 of the steam connection openings A1 and the cumulative conductivity CA2 of the steam outlet A2 and for the conductance CD1 of the steam manifold D1 and the conductance CD2 of the Dampfauslassrohrs D2 in the direction of their respective largest extent the relation 1 / (1 / CA1 + 1 / CA2) <(CD1 + CD2) / 20. Evaporator device according to one of the preceding claims, characterized in that for the number NA1 of the steam connection openings A1 and the cumulative conductivity CA2 of the steam outlet openings A2 and for the conductance CD2 of the steam outlet pipe D2 in the direction of its greatest extent, the relation CA2 <(NA1 · NA1 · CD2) / 20 applies. Evaporator device according to one of the preceding claims, characterized in that the relation CA1> 2 · CA2 applies to the sum conductance CA1 of the steam connection openings A1 and the sum conductance CA2 of the steam outlet openings A2. Evaporator device according to one of the preceding claims, characterized in that at least two steam outlet pipes D2 are connected by at least one steam connection opening with the at least one steam distribution pipe D1. Evaporator device according to one of the preceding claims, characterized in that the at least one steam distribution pipe and / or the at least one steam outlet pipe can be heated to temperatures above the condensation point of the coating material vapor. Co-evaporator system for producing mixed layers of at least two materials, comprising at least two evaporator devices arranged adjacently to each other, each having at least one vapor source and at least one steam outlet tube, characterized in that at least one evaporator device according to one of the preceding claims is formed. Koverdampfersystem according to claim 11, characterized in that the substrate width to be coated is greater than 400mm, the distance of the Dampfauslassöffnungen from the substrate is less than 100mm and the distance between two adjacent arrangements of steam outlet openings of the at least two evaporator devices is less than 100mm. Koverdampfersystem according to claim 11 or 12, characterized in that between the at least two evaporator means are arranged with each other and between the evaporator means and the substrate diaphragms which act as thermal shields of the individual components with each other or / and absorb defined parts of the emitted vapor streams.

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