CN87209178U - High temp.-resistant and vibration-proof capacitance pressure transducer - Google Patents
High temp.-resistant and vibration-proof capacitance pressure transducer Download PDFInfo
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- CN87209178U CN87209178U CN 87209178 CN87209178U CN87209178U CN 87209178 U CN87209178 U CN 87209178U CN 87209178 CN87209178 CN 87209178 CN 87209178 U CN87209178 U CN 87209178U CN 87209178 U CN87209178 U CN 87209178U
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Abstract
The utility model discloses a high temperature resistant and vibration-proof capacitance pressure transducer made of alumina ceramic material. A sensitive electrode and a reference electrode are simultaneously coated on a base and a public electrode is coated on an inducting film, which forms a reference capacitance pressure transducer, wherein, sensitive capacitance varies following the variation of pressure while reference capacitance which is arranged at the edge does not vary following the variation of pressure, which can have a temperature compensated function.
Description
Belong to the pressure detection technical field.
It is several to be used for tonometric sensor at present both at home and abroad and mainly to be strain-type, piezoelectric type, condenser type.Strain-type is unsuitable for high temperature measurement, and Yin Qiwen floats very big; Though piezoelectric type can be used for the higher temperature occasion, the signal Processing complexity costs an arm and a leg, and is unsuitable for widespread use; Developed capacitance pressure transducer, in the past and generally constitute with metal and nonmetallic materials, vibration resistance is poor, is not suitable for the high temperature occasion and measures.
The utility model has adopted exotic material-aluminium oxide ceramics to make capacitance pressure transducer, in order to solve high temperature resistant and the vibration resistance problem, as shown in Figure 1, it is characterized in that Sensitive Apparatus is made up of pressure-sensitive diaphragm (1) and base (2) two parts.On pressure-sensitive diaphragm, be coated with a garden shape public electrode (3), on base, be coated with garden shape sensitive electrode (4) and annular contrast electrode (5).The garden electrode and the public electrode (3) that are positioned at the center constitute pressure-sensitive capacitance, and the ring electrode (5) that is positioned at the edge constitutes reference electric capacity with public electrode.The position because ring electrode keeps to the side, its electric capacity changes with pressure hardly.Thereby electric capacity with pressure-sensitive capacitance equitemperature coefficient is provided, be convenient to realize Temperature Compensation.
For making high temperature resistant antivibration sensor.Advantages such as it is crucial selecting desirable diaphragm material, and aluminium oxide ceramics is that stable performance under fusing point height, the high temperature is arranged, and processability is good.Therefore the diaphragm of Sensitive Apparatus is to adopt the 95A1203 pottery, makes with rolling the sheet method, and through de-waxing, sintering aftershaping, the diaphragm behind the sintering be through slightly, smooth grinding, nonparallelism is less than 10 μ, highly polished in
6.Pedestal adopts the 75A1203 pottery, and through hot die-casting molding, the de-waxing sintering also through thick, mates with diaphragm behind the smooth grinding.On diaphragm of making and base ceramics, with printing process the silver slurry is carried out roasting on ceramics, temperature is grasped and is advisable at 400-900 ℃, is incubated after 15-20 minute the cooling of can lowering the temperature.Mica sheet with 25-40 μ on pedestal guarantees capacitance gap, adopt flux (6) that diaphragm and base are sealed then, the device of considering sealing-in can bear higher temperature, so flux has been selected the TF01 lead glass, can be 95, the matched seal well of 75A1203 pottery, sealing temperature 500-700 ℃.
This new ceramics capacitive pressure transducer can be worked under higher temperature, and stable performance it can be used for the engine intake pressure survey, realize that air-fuel ratio regulates to reach energy-saving effect.Also can be used for aircraft, the measurement of wind-tunnel equal pressure, also can be used for vacuum measurement.
This sensor construction is simple, and low price is suitable for producing in enormous quantities.
Claims (4)
1, a kind of capacitive pressure transducer by the ceramic material Sensitive Apparatus, it is characterized in that Sensitive Apparatus is made up of pressure-sensitive diaphragm (1) and support plinth (2) two parts, on flat diaphragm, be coated with circular public electrode (3), on plane on the other side on the base, be coated with circular electrode (4) and ring electrode (5), between diaphragm and base, use the flux sealing-in.
2, sensor according to claim 1 is characterized in that described diaphragm is to adopt the 95A1203 porcelain, and the material of base is to adopt the 75A1203 porcelain.
3,, it is characterized in that forming on the base of metallic silver layer electrode mica sheet with 25-40 μ with diaphragm is spaced apart, the assurance capacitance gap according to the described sensor of claim 1.
4, sensor according to claim 1 is characterized in that described flux (6) is to select the TF01 lead glass for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87209178 CN87209178U (en) | 1987-06-17 | 1987-06-17 | High temp.-resistant and vibration-proof capacitance pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87209178 CN87209178U (en) | 1987-06-17 | 1987-06-17 | High temp.-resistant and vibration-proof capacitance pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN87209178U true CN87209178U (en) | 1987-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87209178 Ceased CN87209178U (en) | 1987-06-17 | 1987-06-17 | High temp.-resistant and vibration-proof capacitance pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN87209178U (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100353153C (en) * | 2002-07-31 | 2007-12-05 | 恩德莱斯和豪瑟尔两合公司 | Capacitive pressure sensor |
| CN102564682A (en) * | 2010-12-07 | 2012-07-11 | Vega格里沙贝两合公司 | Pressure measuring cell |
| CN105067179A (en) * | 2015-07-30 | 2015-11-18 | 湖北美标中芯电子科技有限公司 | Ceramic capacitive pressure sensor and manufacturing method thereof |
| CN105074407A (en) * | 2013-03-27 | 2015-11-18 | Vega格里沙贝两合公司 | Capacitive pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell |
| CN105917204A (en) * | 2013-12-20 | 2016-08-31 | 恩德莱斯和豪瑟尔两合公司 | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method |
| CN106038202A (en) * | 2016-06-17 | 2016-10-26 | 洪明 | Multifunctional massaging comb |
| CN108200774A (en) * | 2016-09-14 | 2018-06-22 | 深圳市汇顶科技股份有限公司 | Pressure-detecting device, pressure detection method and electric terminal |
| CN108593198A (en) * | 2018-04-23 | 2018-09-28 | 武汉华星光电技术有限公司 | Capacitance diaphragm gauge and dry etching apparatus chamber pressure test system |
| CN110319971A (en) * | 2019-08-02 | 2019-10-11 | 上海振太仪表有限公司 | A kind of bipolar condenser type vacuum meter and its corresponding measuring circuit |
| CN115127701A (en) * | 2022-01-11 | 2022-09-30 | 成都蕊感微电子有限公司 | Pressure sensor, pressure measurement method, and bolt pressure detection system |
-
1987
- 1987-06-17 CN CN 87209178 patent/CN87209178U/en not_active Ceased
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100353153C (en) * | 2002-07-31 | 2007-12-05 | 恩德莱斯和豪瑟尔两合公司 | Capacitive pressure sensor |
| CN102564682A (en) * | 2010-12-07 | 2012-07-11 | Vega格里沙贝两合公司 | Pressure measuring cell |
| US9638598B2 (en) | 2013-03-27 | 2017-05-02 | Vega Grieshaber Kg | Capacitive pressure transducer for measuring the pressure of a medium adjacent to the measuring cell |
| CN105074407A (en) * | 2013-03-27 | 2015-11-18 | Vega格里沙贝两合公司 | Capacitive pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell |
| CN105074407B (en) * | 2013-03-27 | 2018-07-06 | Vega格里沙贝两合公司 | For measuring the capacitive pressure measuring cell of surrounding medium pressure |
| CN105917204A (en) * | 2013-12-20 | 2016-08-31 | 恩德莱斯和豪瑟尔两合公司 | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method |
| CN105917204B (en) * | 2013-12-20 | 2019-08-27 | 恩德莱斯和豪瑟尔欧洲两合公司 | Capacitive pressure measuring unit at least one temperature sensor |
| CN105067179A (en) * | 2015-07-30 | 2015-11-18 | 湖北美标中芯电子科技有限公司 | Ceramic capacitive pressure sensor and manufacturing method thereof |
| CN106038202A (en) * | 2016-06-17 | 2016-10-26 | 洪明 | Multifunctional massaging comb |
| CN108200774A (en) * | 2016-09-14 | 2018-06-22 | 深圳市汇顶科技股份有限公司 | Pressure-detecting device, pressure detection method and electric terminal |
| CN108200774B (en) * | 2016-09-14 | 2020-12-29 | 深圳市汇顶科技股份有限公司 | Pressure detection device, pressure detection method and electronic terminal |
| CN108593198A (en) * | 2018-04-23 | 2018-09-28 | 武汉华星光电技术有限公司 | Capacitance diaphragm gauge and dry etching apparatus chamber pressure test system |
| CN110319971A (en) * | 2019-08-02 | 2019-10-11 | 上海振太仪表有限公司 | A kind of bipolar condenser type vacuum meter and its corresponding measuring circuit |
| CN110319971B (en) * | 2019-08-02 | 2024-04-23 | 上海振太仪表有限公司 | Measuring circuit for measuring pressure in bipolar capacitance type vacuum gauge |
| CN115127701A (en) * | 2022-01-11 | 2022-09-30 | 成都蕊感微电子有限公司 | Pressure sensor, pressure measurement method, and bolt pressure detection system |
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