CN221528997U - Variable-magnification beam expander lens group of infrared laser and beam expander with variable-magnification beam expander group - Google Patents

Variable-magnification beam expander lens group of infrared laser and beam expander with variable-magnification beam expander group Download PDF

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CN221528997U
CN221528997U CN202323654336.3U CN202323654336U CN221528997U CN 221528997 U CN221528997 U CN 221528997U CN 202323654336 U CN202323654336 U CN 202323654336U CN 221528997 U CN221528997 U CN 221528997U
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lens
mirror surface
beam expander
mirror
infrared laser
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颜永振
杨子星
刘备
申泽
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Suzhou Zhonghui Laser Technology Co ltd
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Suzhou Zhonghui Laser Technology Co ltd
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Abstract

The utility model discloses a variable-magnification beam expander lens group and a beam expander of infrared laser. The variable-magnification beam expander group comprises a first lens L1, a second lens L2 and a third lens L3 which are coaxially arranged in sequence along the transmission direction of incident light; the first lens L1 and the third lens L3 are plano-concave negative lenses, and the second lens L2 is a plano-convex positive lens; the first lens L1 includes a first mirror S1 and a second mirror S2, the second lens L2 includes a third mirror S3 and a fourth mirror S4, and the third lens L3 includes a fifth mirror S5 and a sixth mirror S6; the distance between the second mirror surface and the third mirror surface is 50-160 mm, and the distance between the fourth mirror surface and the fifth mirror surface is 10-120 mm. The variable-magnification beam expander group and the beam expander have the advantages of small volume, compact structure and large beam expansion multiple, and improve the laser processing efficiency.

Description

Variable-magnification beam expander lens group of infrared laser and beam expander with variable-magnification beam expander group
Technical Field
The utility model belongs to the field of optical instruments, and particularly relates to a variable-magnification beam expander group of infrared laser and a beam expander with the variable-magnification beam expander group.
Background
In the laser processing field, the diameter of an outgoing spot of a laser beam is small (about 1 mm), after passing through a focusing lens, the rayleigh spot of the laser beam is large, and the energy of a focusing point is weaker, so that the processing precision of the system is greatly reduced. Therefore, a lens group capable of changing optical parameters such as beam diameter, roundness, divergence angle and the like is required to amplify light spots, and a variable magnification beam expander capable of continuously converting the input beam diameter and being compatible with different processing technologies and application scenes is generated.
But the laser beam expander commonly used in the market at present adopts integral type tubular structure design, internally mounted multiunit lens, realizes multiplying power regulation through the screw thread regulation, its simple structure, it is convenient to adjust. Because the structure is too single, and there is very big mechanical clearance, lens axiality is difficult to guarantee, can not adjust compensation mechanical clearance through adjusting other dimensions, parameters such as light beam output quality can not reach actual demand.
The multi-dimensional beam expanding device is extremely complex and heavy in structure, poor in heat radiation effect, low in debugging efficiency and small in variable-magnification value, can not well meet the requirement of laser processing, and can not realize the beam expanding requirement of multiple magnifications through one beam expander only by using a fixed-magnification beam expander when the beam expander is required to expand the beam at a large magnification, so that inconvenience is brought to the laser processing, and the laser processing efficiency is affected.
Disclosure of utility model
Aiming at the technical problems, the utility model provides a zoom beam expander group for improving infrared laser and a beam expander with the same.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
The variable-magnification beam expander lens group of the infrared laser comprises a first lens L1, a second lens L2 and a third lens L3 which are coaxially arranged in sequence along the transmission direction of incident light; the first lens L1 and the third lens L3 are plano-concave negative lenses, and the second lens L2 is a plano-convex positive lens;
The first lens L1 includes a first mirror S1 and a second mirror S2 arranged along a transmission direction of an incident light ray, the second lens L2 includes a third mirror S3 and a fourth mirror S4 arranged along the transmission direction of the incident light ray, and the third lens L3 includes a fifth mirror S5 and a sixth mirror S6 arranged along the transmission direction of the incident light ray;
The distance between the second mirror surface and the third mirror surface is 40-170 mm, and the distance between the fourth mirror surface and the fifth mirror surface is 5-130 mm.
Preferably, the distance between the second mirror surface and the third mirror surface is 50 mm-160 mm, and the distance between the fourth mirror surface and the fifth mirror surface is 10 mm-120 mm.
Preferably, the distance between the second mirror surface and the third mirror surface is 53.8 mm-157.6 mm, and the distance between the fourth mirror surface and the fifth mirror surface is 10.3 mm-111.4 mm.
Preferably, the first mirror S1 is a concave surface, and the second mirror S2 is a plane; the curvature radius of the first mirror surface S1 is-21 mm to-19 mm.
Further, the third mirror surface S3 is a convex surface, and the fourth mirror surface S4 is a plane; the radius of curvature of the third mirror surface S3 is 28.5 mm-31.5 mm.
Further, the fifth mirror surface S5 is a concave surface, and the sixth mirror surface S6 is a plane; the curvature radius of the fifth mirror surface S5 is-41.9 mm to-37.9 mm.
Preferably, the center thickness of the first lens L1 is 2.4mm to 2.5mm, the center thickness of the second lens L2 is 2.6mm to 2.7mm, and the center thickness of the third lens L3 is 4.4mm to 4.5mm.
Preferably, the first lens L1, the second lens L2, and the third lens L3 satisfy the following conditional expressions: Wherein Nd1 is the refractive index of the first lens L1, vd1 is the abbe number of the first lens L1, nd2 is the refractive index of the second lens L2, vd2 is the abbe number of the second lens L2, nd3 is the refractive index of the third lens L3, and Vd3 is the abbe number of the third lens L3.
Preferably, the outer diameter of the first lens L1, the outer diameter of the second lens L2, and the outer diameter of the third lens L3 are 12mm to 13mm.
The beam expander comprises the variable-magnification beam expander group, a base and a diaphragm arranged between the first lens L1 and the second lens L2, wherein the first lens L1, the second lens L2 and the diaphragm are slidably arranged on the base.
Compared with the prior art, the utility model has the following advantages:
The variable-magnification beam expander group and the beam expander are small in size and compact in structure, the types and the distances of the first lens, the second lens and the third lens are reasonably set, the beam expansion multiple is large, the adaptability is high, the laser processing efficiency is improved, the beam expansion shaping of multiple multiplying powers is realized, and the variable-magnification beam expander is suitable for lasers with more emission diameters and more divergence angles.
Drawings
In order to more clearly illustrate the technical solutions of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a variable magnification beam expander lens assembly according to an embodiment of the present utility model;
FIG. 2 is another schematic diagram of a variable magnification beam expander lens system according to an embodiment of the present utility model;
FIG. 3 is a schematic perspective view of a beam expander according to an embodiment of the present utility model;
Fig. 4 is a schematic perspective view of another beam expander according to an embodiment of the present utility model.
Detailed Description
Preferred embodiments of the present utility model will be described in detail below with reference to the attached drawings so that the advantages and features of the present utility model can be more easily understood by those skilled in the art. The description of these embodiments is provided to assist understanding of the present utility model, but is not intended to limit the present utility model. In addition, technical features of the embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
As shown in fig. 1 to 2, the present embodiment includes a variable magnification beam expander set of an infrared laser, including a first lens L1, a second lens L2, and a third lens L3 coaxially disposed along a transmission direction of an incident light. The first lens L1 is a plano-concave negative lens, the second lens L2 is a plano-convex positive lens, and the third lens L3 is a plano-concave negative lens. The first lens L1 includes a first mirror S1 and a second mirror S2 arranged along a transmission direction of an incident light, that is, the first mirror S1 and the second mirror S2 serve as a light incident surface and a light exit surface, respectively. The second lens L2 includes a third mirror S3 and a fourth mirror S4, and the third lens L3 includes a fifth mirror S5 and a sixth mirror S6. The incident light is transmitted along the first mirror surface S1 to the sixth mirror surface S6, and is expanded and amplified after passing through the whole beam expanding system.
Specifically, the first mirror surface S1 of the first lens L1 is a concave surface, and has a radius of curvature ranging from-21 mm to-19 mm, preferably-19.95 mm, wherein a negative sign indicates that the center of a curved surface is located in the object space of the curved surface, and a positive sign (i.e., positive without a negative sign in this embodiment) indicates that the center of the curved surface is located in the image space of the curved surface, and the following is the same. The second mirror surface S2 is a plane, and the radius of curvature is ≡. The center thickness D1 of the first lens L1 (i.e., the thickness of the first lens L1 on the optical axis) is 2.4mm to 2.5mm, preferably 2.44mm, and the outer diameter D1 is 12mm to 13mm, preferably 12.7mm. The ratio of the refractive index Nd1 of the first lens L1 to the abbe number Vd1 is 1.45:67.8. the parameters mentioned above are not the only choices, and there is a tolerance range of 5%, i.e. each parameter is allowed to vary within + -5%.
The third mirror surface S3 of the second lens L2 is convex toward the object side, and has a radius of curvature of 28.5mm to 31.5mm, preferably 30mm. The fourth mirror surface S4 is a plane, and the radius of curvature is ≡. The ratio of the refractive index Nd3 of the second lens L2 to the abbe number Vd3 is 1.45:67.8, and the center thickness D3 of the second lens L2 is 2.6mm to 2.7mm, preferably 2.69mm, and the outer diameter D2 is 12mm to 13mm, preferably 12.7mm. The tolerance range of the parameters of the second lens L2 is still 5%.
The fifth mirror surface S5 of the third lens L3 is concave, and has a radius of curvature of-41.9 mm to-37.9 mm, preferably-39.88 mm. The sixth mirror surface S6 is a plane, and the radius of curvature is ≡infinity. The ratio of the refractive index Nd5 of the third lens L3 to the abbe number Vd5 is 1.45:67.8, the central thickness D5 is 4.4mm to 4.5mm, preferably 4.45mm, and the outer diameter D3 is 12mm to 13mm, preferably 12.7mm. The tolerance ranges of the parameters of the third lens L3 are 5% as well.
In the present embodiment, the distance between the first lens L1 and the second lens L2 and the distance between the second lens L2 and the third lens L3 are defined, specifically, the distance d2 between the exit surface of the first lens L1 (second mirror surface S2) and the entrance surface of the second lens L2 (third mirror surface S3) on the optical axis is 50 to 160mm, the tolerance is 5%, and the distance d4 between the exit surface of the second lens L2 (fourth mirror surface S4) and the entrance surface of the third lens L3 (fifth mirror surface S5) on the optical axis is 10 to 120mm, the tolerance is 5%.
The following is a specific description given by table 1:
TABLE 1 structural parameters of near infrared laser zoom beam expanding system
After the above design is carried out on each lens, the beam expanding device can expand the incident infrared laser beam to 1-5 times of the original beam expanding device, and the large beam expanding range can be suitable for lasers with different emergent diameters and divergent angles, so that the application range of the beam expanding system is enlarged, and the laser processing efficiency is improved. And according to the fixed quantity of the pulling type invariant, after the light beam is expanded, the divergence angle of the light beam is reduced, the maximum beam expansion multiple of the system is higher than that of the traditional beam expander, so that the reduction degree of the beam divergence angle is better than the contraction effect of the traditional beam expander on the light beam, the parallelism of the emergent light beam is better, the focusing effect is good, further, the follow-up shaping and focusing are more facilitated in the laser processing process, and the processing precision is improved.
Further, different beam expansion multiples β can be obtained by designing the distance d2 on the optical axis between the second mirror S2 and the third mirror S3 and the distance d4 on the optical axis between the fourth mirror S4 and the fifth mirror S5 differently. Several specific preferred embodiments are provided below.
1. The distance d2 between the second mirror S2 and the third mirror S3 on the optical axis may be set to 53.8mm, and the distance d4 between the fourth mirror S4 and the fifth mirror S5 on the optical axis may be set to 111.4mm, which also has a tolerance range of 5%. At this time, the beam expansion magnification β of the system is 1.
2. The distance d2 between the second mirror S2 and the third mirror S3 on the optical axis may be 78.2mm, and the distance d4 between the fourth mirror S4 and the fifth mirror S5 on the optical axis may be 49.2mm, with a tolerance of 5%. At this time, the beam expansion magnification β of the system is 2 times.
3. The distance d2 between the second mirror surface S2 and the third mirror surface S3 on the optical axis may be set to 109.1mm, and the distance d4 between the fourth mirror surface S4 and the fifth mirror surface S5 on the optical axis may be set to 25.1mm with a tolerance of 5%. At this time, the beam expansion magnification β of the system is 3 times.
4. The distance d2 between the second mirror surface S2 and the third mirror surface S3 on the optical axis may be set to 135.6mm, and the distance d4 between the fourth mirror surface S4 and the fifth mirror surface S5 on the optical axis may be set to 15.2mm with a tolerance of 5%. At this time, the beam expansion magnification β of the system is 4 times.
5. The distance d2 between the second mirror surface S2 and the third mirror surface S3 on the optical axis may be 157.6mm, and the distance d4 between the fourth mirror surface S4 and the fifth mirror surface S5 on the optical axis may be 10.3mm, with a tolerance of 5%. At this time, the beam expansion magnification β of the system is 5 times.
The preferred embodiment described above is more clearly described below by means of table 2:
TABLE 2 comparison of lens surface spacing and expansion times
d2(mm) d4(mm) β
53.8 111.4 1
78.2 49.2 2
109.1 25.1 3
135.6 15.2 4
157.6 10.3 5
With reference to fig. 2, based on the parameters in table 2, a beam expansion effect of 1-5 times can be obtained, and in the laser marking process, the relative distance between the three lenses can be adjusted according to the exit pupil diameter and the divergence angle of the actual laser and the specific condition of the focusing lens, namely, the curved surface intervals d2 and d4 are adjusted, so that the laser beam is properly expanded, the expanded laser beam can meet the requirement of laser processing precision and can be matched with different laser processing focusing lenses to achieve ideal coupling, and the quality and efficiency of laser processing are improved.
As shown in fig. 3 and 4, the present embodiment further includes a beam expanding device including a first lens 1, an adjusting wrench 2, a diaphragm 3, a second lens 4, a third lens 5, a base 6, an adjusting wheel 7, and a stopper wheel 8. The diaphragm 3 is arranged between the first lens 1 and the second lens 4, and the first lens 1, the second lens 4 and the diaphragm 3 are slidably arranged on the base 6. The base 6 can be a dovetail sliding table, and the corresponding device can slide on the base 6 through the corresponding adjusting wheel by unlocking the corresponding stop wheel 8. By adjusting the relative positions, concentricity and deflection angle of the first lens 1, the second lens 4 and the third lens 5, beam expansion and shaping with various multiplying powers can be realized. The beam expander is mainly suitable for near infrared light, especially near infrared light of 1030 nm.
In summary, the variable-magnification beam expander group and the beam expander for the infrared laser have the following advantages:
1. By reasonably setting the types and the intervals of the first lens, the second lens and the third lens, the beam expansion multiple is large, the adaptability is strong, the laser processing efficiency is improved, the beam expansion shaping of multiple magnifications is realized, the method is suitable for lasers with more emission diameters and more divergence angles, and the application range is wide;
2. The laser beam expander has the advantages of small volume, compact structure and less lenses, is suitable for various infrared laser processing devices, expands the beam of light emitted by a laser by using the beam expander as a beam expanding system of the device, and focuses the expanded beam onto a workpiece to be processed through a focusing lens of the laser processing device.
As used in this specification and in the claims, the terms "comprises" and "comprising" merely indicate that the steps and elements are explicitly identified, and do not constitute an exclusive list, as other steps or elements may be included in a method or apparatus. The term "and/or" as used herein includes any combination of one or more of the associated listed items.
It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly or indirectly fixed or connected to the other feature. Further, the descriptions of the upper, lower, left, right, etc. used in the present utility model are merely with respect to the mutual positional relationship of the constituent elements of the present utility model in the drawings.
The above-described embodiments are provided for illustrating the technical concept and features of the present utility model, and are intended to be preferred embodiments for those skilled in the art to understand the present utility model and implement the same according to the present utility model, not to limit the scope of the present utility model. All equivalent changes or modifications made according to the principles of the present utility model should be construed to be included within the scope of the present utility model.

Claims (10)

1. The variable-magnification beam expander lens group of the infrared laser is characterized by comprising a first lens L1, a second lens L2 and a third lens L3 which are coaxially arranged in sequence along the transmission direction of incident light rays; the first lens L1 and the third lens L3 are plano-concave negative lenses, and the second lens L2 is a plano-convex positive lens;
The first lens L1 includes a first mirror S1 and a second mirror S2 arranged along a transmission direction of an incident light ray, the second lens L2 includes a third mirror S3 and a fourth mirror S4 arranged along the transmission direction of the incident light ray, and the third lens L3 includes a fifth mirror S5 and a sixth mirror S6 arranged along the transmission direction of the incident light ray;
The distance between the second mirror surface and the third mirror surface is 40-170 mm, and the distance between the fourth mirror surface and the fifth mirror surface is 5-130 mm.
2. The variable magnification beam expander lens group of infrared laser light according to claim 1, wherein a distance between the second mirror surface and the third mirror surface is 50mm to 160mm, and a distance between the fourth mirror surface and the fifth mirror surface is 10mm to 120mm.
3. The variable magnification beam expander lens group of infrared laser light according to claim 1, wherein a distance between the second mirror surface and the third mirror surface is 53.8 mm-157.6 mm, and a distance between the fourth mirror surface and the fifth mirror surface is 10.3 mm-111.4 mm.
4. The variable magnification beam expander lens group of the infrared laser according to claim 1, wherein the first mirror surface S1 is a concave surface, and the second mirror surface S2 is a plane; the curvature radius of the first mirror surface S1 is-21 mm to-19 mm.
5. The variable magnification beam expander lens group of infrared laser light according to claim 4, wherein the third mirror surface S3 is a convex surface, and the fourth mirror surface S4 is a plane; the radius of curvature of the third mirror surface S3 is 28.5 mm-31.5 mm.
6. The variable magnification beam expander lens group of infrared laser light according to claim 5, wherein the fifth mirror surface S5 is a concave surface, and the sixth mirror surface S6 is a plane; the curvature radius of the fifth mirror surface S5 is-41.9 mm to-37.9 mm.
7. The variable magnification beam expander lens group of the infrared laser according to claim 1, wherein the center thickness of the first lens L1 is 2.4mm to 2.5mm, the center thickness of the second lens L2 is 2.6mm to 2.7mm, and the center thickness of the third lens L3 is 4.4mm to 4.5mm.
8. The variable magnification beam expander lens group of an infrared laser according to claim 1, wherein the first lens L1, the second lens L2, and the third lens L3 satisfy the following conditional expression: Wherein Nd1 is the refractive index of the first lens L1, vd1 is the abbe number of the first lens L1, nd2 is the refractive index of the second lens L2, vd2 is the abbe number of the second lens L2, nd3 is the refractive index of the third lens L3, and Vd3 is the abbe number of the third lens L3.
9. The variable magnification beam expander lens group of an infrared laser according to claim 1, wherein an outer diameter of the first lens L1, an outer diameter of the second lens L2, and an outer diameter of the third lens L3 are 12mm to 13mm.
10. A beam expander device, wherein the beam expander device comprises a zoom beam expander lens set according to any one of claims 1 to 9, the beam expander device further comprising a base and a diaphragm disposed between the first lens L1 and the second lens L2, the first lens L1, the second lens L2 and the diaphragm being slidably disposed on the base.
CN202323654336.3U 2023-12-31 2023-12-31 Variable-magnification beam expander lens group of infrared laser and beam expander with variable-magnification beam expander group Active CN221528997U (en)

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