CN214357225U - Crystal disc rotating and translating device - Google Patents
Crystal disc rotating and translating device Download PDFInfo
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- CN214357225U CN214357225U CN202023224080.9U CN202023224080U CN214357225U CN 214357225 U CN214357225 U CN 214357225U CN 202023224080 U CN202023224080 U CN 202023224080U CN 214357225 U CN214357225 U CN 214357225U
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- translation device
- revolving stage
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Abstract
The utility model relates to the field of semiconductor technology, a brilliant disc rotary translation device is disclosed, it includes the base and is used for the drive the sliding component of base at the horizontal direction translation, the upper surface of base is equipped with the revolving stage that is used for bearing brilliant disc at the horizontal direction, the revolving stage with the base rotates to be connected, still be equipped with on the base and be used for the drive the revolving stage is around the first driving piece of rotation axis pivoted of vertical direction. The utility model discloses a wafer dish rotation translation device simple structure, can remove the wafer dish to make the adaptation of wafer dish paste the mark process, and then reduce the cost of subsides mark equipment.
Description
Technical Field
The utility model relates to the field of semiconductor technology, especially, relate to a crystal disc rotary translation device.
Background
The wafer disc is used as a carrier of the wafer, and after the wafer is mounted on the wafer disc, a label corresponding to the wafer needs to be pasted on the wafer disc, and the precision of the pasting position of the label needs to be ensured so as to ensure that the wafer can be used correctly later. At present, in the automatic labeling operation of a wafer disc, a camera is required to detect and identify character marks on the wafer disc and then labeling is carried out according to the detected characters, a transmission structure is generally required to be arranged to drive labeling equipment in the mode so that the labeling equipment can label labeling positions of different position coordinates, the equipment is required to be high in precision and complex in structure, and the equipment is high in cost.
SUMMERY OF THE UTILITY MODEL
The utility model aims at: the device is simple in structure and capable of moving the wafer disc, so that the wafer disc is suitable for a labeling process, and the cost of labeling equipment is reduced.
In order to achieve the above object, the utility model provides a crystal plate disc rotary translation device, it includes the base and is used for the drive the sliding component of base at the horizontal direction translation, the upper surface of base is equipped with the revolving stage that is used for bearing crystal plate disc at the horizontal direction, the revolving stage with the base rotates to be connected, still be equipped with on the base and be used for the drive the revolving stage is around the first driving piece of vertical direction's rotation axis rotation.
Furthermore, the sliding assembly comprises a second driving piece, a screw rod, a first sliding block and a first sliding rail which are sequentially connected, the screw rod is in threaded connection with the first sliding block, and the base is connected with the first sliding block.
Furthermore, the device also comprises a second slide rail and a second slide block connected with the second slide rail, one end of the base is connected with the sliding assembly, and the other end of the base is connected with the second slide block.
Further, the base is of a flat plate structure and is connected with the second sliding block through a connecting block.
Further, the first driving member is a motor, and the first driving member drives the rotating table to rotate through a first synchronous wheel assembly.
Further, the second driving part is a motor, and the second driving part drives the screw rod to rotate through a second synchronous wheel component.
Furthermore, the upper surface of revolving stage is equipped with and is used for preventing the gliding slipmat of wafer dish.
The embodiment of the utility model provides a crystal disc rotary translation device compares with prior art, and its beneficial effect lies in:
the sliding assembly drives the base to move in the horizontal direction, the base drives the rotating table to move, the rotating table supports the crystal disc in the horizontal direction so that the wafer disc can complete the detection and labeling process, the rotating table can drive the crystal disc to rotate, the crystal disc moves in the horizontal direction and rotates so that the labeling area on the wafer disc can move to the detection area and the labeling station, the activity of detection equipment and labeling equipment is reduced, the structure of the crystal disc is simplified, and the equipment cost is reduced.
Drawings
Fig. 1 is a schematic structural diagram of a wafer tray rotating and translating apparatus according to an embodiment of the present invention.
In the figure, 1-base, 2-sliding component, 21-second driving component, 22-first sliding block, 23-first sliding rail, 24-second synchronous wheel component, 3-rotating platform, 4-first driving component, 5-second sliding rail, 6-second sliding block, 7-connecting block and 8-first synchronous wheel component.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, which indicate the orientation or positional relationship, are used in the present invention as being based on the orientation or positional relationship shown in the drawings, and are used only for convenience of description and simplification of the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1, an embodiment of the present invention provides a crystal wafer rotating and translating device, which includes a base 1 and a sliding component 2 for driving the base 1 to translate in the horizontal direction, wherein the upper surface of the base 1 is provided with a rotating platform 3 for supporting the crystal wafer in the horizontal direction, the rotating platform 3 is rotatably connected to the base 1, and the base 1 is further provided with a first driving component 4 for driving the rotating platform 3 to rotate around the rotating shaft in the vertical direction.
Based on the scheme, the sliding assembly 2 drives the base 1 to move in the horizontal direction, the base 1 drives the rotary table 3 to move, the rotary table 3 supports the wafer disc in the horizontal direction so as to enable the wafer disc to complete the detection and labeling process, the rotary table 3 can support various wafer discs of different types, and the rotary table 3 can drive the wafer disc to rotate; the wafer disc is moved and rotated in the horizontal direction, so that a labeling area on the wafer disc can be moved to a detection area and a labeling station, the activity of detection equipment and labeling equipment is reduced, the structure of the detection equipment and the structure of the labeling equipment are simplified, and the equipment cost is reduced.
Please continue to participate in fig. 1, the sliding assembly 2 includes a second driving member 21, a lead screw, a first sliding block 22 and a first sliding rail 23, which are connected in sequence, the lead screw is connected with the first sliding block 22 by a thread, and the base 1 is connected with the first sliding block 22. The second driving member 21 drives the screw rod to rotate, and the screw rod rotates to drive the first sliding block 22 to slide on the first sliding rail 23, so as to drive the base 1 to move.
In this embodiment, as shown in fig. 1, the wafer disk rotating and translating device further includes a second slide rail 5 and a second slide block 6 connected to the second slide rail 5, one end of the base 1 is connected to the sliding assembly 2, and the other end of the base 1 is connected to the second slide block 6. Two slide rails are respectively located the both ends of base 1, guarantee the stability that base 1 removed.
As an alternative embodiment, as shown in fig. 1, the base 1 is a flat plate structure, and the base 1 is connected with the second sliding block 6 through a connecting block 7, so that the structure is simple and the cost is low.
In the present embodiment, as shown in fig. 1, the first driving member 4 is a motor, and the first driving member 4 drives the rotating platform 3 to rotate through the first synchronizing wheel assembly 8. The rotation angle of the rotary table 3 is controlled by controlling the rotation amount of the motor.
In the present embodiment, as shown in fig. 1, the second driving member 21 is a motor, and the second driving member 21 drives the screw rod to rotate through the second synchronizing wheel assembly 24. The amount of movement of the base 1 in the horizontal direction is controlled by controlling the amount of rotation of the motor.
As an alternative embodiment, the upper surface of the turntable 3 is provided with a non-slip pad for preventing the wafer tray from slipping, and the non-slip pad may be made of a material with certain softness, such as rubber.
The utility model discloses a working process does: after the wafer disc is placed on the upper surface of the rotating table 3, the base 1 moves and the rotating table 3 rotates to enable the identification position on the wafer disc to be placed below the detection camera for identification, and then the base 1 moves and the rotating table 3 rotates to enable the labeling area on the wafer disc to be placed at the labeling and pasting station for labeling.
To sum up, the embodiment of the utility model provides a rotatory translation device of brilliant disc, it moves at the horizontal direction through 2 drive bases 1 of sliding component, base 1 drives revolving stage 3 and removes, but revolving stage 3 accomplishes the detection and pastes the mark process at the brilliant disc of the different models of bearing of horizontal direction so that the wafer dish, and revolving stage 3 can drive brilliant disc rotatory, horizontal direction removes and rotatory brilliant disc so that the region of labelling on the wafer dish can move detection area and paste the mark station, in order to reduce the activity of check out test set and mark equipment, simplify its structure, and then reduced equipment cost.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.
Claims (7)
1. The utility model provides a brilliant disc rotary translation device, its characterized in that includes the base and is used for the drive the sliding component of base at the horizontal direction translation, the upper surface of base is equipped with the revolving stage that is used for bearing brilliant disc at the horizontal direction, the revolving stage with the base rotates to be connected, still be equipped with on the base and be used for the drive the revolving stage is around the first driving piece of vertical direction's rotation axis pivoted.
2. The wafer disk rotating and translating device of claim 1, wherein the sliding assembly comprises a second driving member, a lead screw, a first sliding block and a first sliding rail which are connected in sequence, the lead screw is connected with the first sliding block in a threaded manner, and the base is connected with the first sliding block.
3. The wafer disk rotational translation device of claim 1 further comprising a second slide rail and a second slider coupled to the second slide rail, one end of the base being coupled to the slide assembly and the other end of the base being coupled to the second slider.
4. The wafer disk rotational translation device of claim 3 wherein the base is a flat plate structure, the base being connected to the second slider by a connection block.
5. The wafer disk rotational translation device of claim 1 wherein the first drive member is a motor, the first drive member driving the rotational stage to rotate via a first synchronized wheel assembly.
6. The wafer disk rotational translation device of claim 2 wherein the second drive member is a motor, the second drive member driving the lead screw to rotate via a second synchronizing wheel assembly.
7. The wafer tray rotational translation device of claim 1, wherein an upper surface of the rotational stage is provided with a non-slip pad for preventing the wafer tray from slipping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023224080.9U CN214357225U (en) | 2020-12-28 | 2020-12-28 | Crystal disc rotating and translating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023224080.9U CN214357225U (en) | 2020-12-28 | 2020-12-28 | Crystal disc rotating and translating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214357225U true CN214357225U (en) | 2021-10-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023224080.9U Active CN214357225U (en) | 2020-12-28 | 2020-12-28 | Crystal disc rotating and translating device |
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| CN (1) | CN214357225U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115638757A (en) * | 2022-11-11 | 2023-01-24 | 法博思(宁波)半导体设备有限公司 | Device and method for limiting silicon wafer measurement range |
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2020
- 2020-12-28 CN CN202023224080.9U patent/CN214357225U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115638757A (en) * | 2022-11-11 | 2023-01-24 | 法博思(宁波)半导体设备有限公司 | Device and method for limiting silicon wafer measurement range |
| CN115638757B (en) * | 2022-11-11 | 2023-11-28 | 法博思(宁波)半导体设备有限公司 | Device and method for limiting silicon wafer measurement range |
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