CN213934652U - High-temperature liquid spraying system - Google Patents
High-temperature liquid spraying system Download PDFInfo
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- CN213934652U CN213934652U CN202120279117.3U CN202120279117U CN213934652U CN 213934652 U CN213934652 U CN 213934652U CN 202120279117 U CN202120279117 U CN 202120279117U CN 213934652 U CN213934652 U CN 213934652U
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Abstract
The utility model provides a high temperature liquid sprinkling system, including hold up tank, output pipeline, cooling line and controller. The storage tank is used for containing liquid. The output pipeline comprises a main pipe body, a pump, a heater and a nozzle switch control valve, wherein two ends of the main pipe body are connected with the storage tank and the nozzle, and the pump, the heater and the nozzle switch control valve are arranged on the main pipe body. The cooling pipeline comprises a branch pipe body and a cooler, wherein two ends of the branch pipe body are connected with the storage tank and an output pipeline between the heater and the nozzle switch control valve, and the cooler is arranged on the branch pipe body. The controller is electrically connected with the output pipeline and the cooling pipeline. Therefore, the utility model discloses a cooling line's structure makes pumping and heater can maintain fixed output and stabilize the function, ensures the temperature stability of liquid when wasing the operation, promotes the clean effect and the holistic processing procedure quality of base plate.
Description
Technical Field
The utility model relates to a sprinkler system, in particular to high temperature liquid sprinkler system.
Background
The high temperature liquid spraying system is a system for forming a cleaning structure, and is widely applied to the traditional semiconductor manufacturing process for cleaning the liquid spraying system such as oil stains, glue or particles on the substrate.
In the conventional semiconductor manufacturing process, since the substrate is usually processed into a plurality of pieces, oil, glue or particles may remain on the substrate in the previous process, and the oil, glue or particles on the semiconductor substrate are cleaned by spraying high temperature liquid to clean the stains on the processing position of the substrate and maintain the product quality. Therefore, the high temperature liquid cleaning is an essential process in the conventional semiconductor manufacturing process, and if the temperature of the liquid is unstable, the process effect of the high temperature cleaning may be directly affected.
FIG. 1 is a circuit diagram of a high temperature liquid spraying system of the prior art. As shown in fig. 1, the high temperature liquid spraying system of the prior art includes a liquid storage tank 93, a pump 94, a heater 95 and a liquid temperature control sensor 92; the storage liquid barrel 93, the pump 94, the heater 95 and the liquid temperature control sensor 92 are connected through a pipeline, the storage liquid barrel 93 is used for containing a liquid 90, and the temperature of the liquid 90 is normal temperature; when the liquid 90 flows to the pump 94 through the pipeline, the pump 94 pressurizes to make the liquid 90 flow to the heater 95, the heater 95 heats the liquid 90 to a designated temperature, the heated liquid 90 senses the temperature through the liquid temperature control sensor 92, if the temperature meets the set temperature, the control switch 96 is turned on to make the heated liquid 90 flow to the nozzle 91 through the pipeline to clean the substrate (not shown), and when the predetermined temperature is not reached or the liquid supply is not performed, the heated liquid 90 is returned to the liquid storage barrel 93 through the return pipeline 97. Wherein, the control device controls the heater 95 to heat or stop heating according to the sensed temperature sensed by the liquid temperature control sensor 92.
Because of the cleaning liquid of the semiconductor process, the temperature of the liquid is very strict, and the ideal temperature fluctuation range is between-3 ℃ and +3 ℃. With the prior art structure, after the nozzle 91 continuously sprays the liquid, when the liquid amount of the liquid storage barrel 93 is lower than the predetermined liquid storage amount, a large amount of liquid is replenished through the liquid replenishing pipe 98, at this time, the temperature in the liquid storage barrel 93 is greatly reduced, the temperature measured by the liquid temperature control sensor 92 is synchronously reduced, and the power of the heater 95 is relatively immediately increased to rapidly increase the temperature, but actually, the difference of the heating time at this stage causes the difference of the temperature of the output liquid of the endmost nozzle 91 to be increased, which affects the quality of the semiconductor manufacturing process. In addition, the continuous start and stop of the pump 94 and the heater 95 can greatly reduce the service life and durability of the heater 95 and the pump 94 under repeated operation.
Moreover, the liquid temperature control sensor 92 is usually installed on a pipeline near the outlet end or inside of the heater 95, however, the heated liquid 90 needs to be transported to the nozzle 91 through the pipeline, and when the pipeline is long, the heated liquid 90 will lose some temperature during transportation, so that the temperature of the liquid 90 actually sprayed on the substrate for cleaning will be lower than the designated temperature, and the process result will be in an unstable state.
SUMMERY OF THE UTILITY MODEL
The present invention provides a high temperature liquid spraying system, which can spray liquid at a specific temperature and make the liquid circulate at a stable temperature.
Another object of the present invention is to provide a high-temperature liquid spraying system, which can maintain the stable operation of the heater and the pump with a fixed output power, and prolong the service life and the durability of the heater and the pump.
In order to achieve the above objective, the present invention provides a high temperature liquid spraying system, which includes a storage tank, an output pipeline, a cooling pipeline and a controller. The storage tank is used for containing a liquid. The output pipeline comprises a main pipe body, a pump, a heater and a nozzle switch control valve, one end of the main pipe body is connected with the storage tank, the pump, the heater and the nozzle switch control valve are arranged on the main pipe body, and the other end of the main pipe body is used for being connected with a nozzle. The cooling pipeline comprises a branch pipe body and a cooler, one end of the branch pipe body is connected with the storage tank, the other end of the branch pipe body is connected with an output pipeline between the heater and the nozzle switch control valve, and the cooler is arranged on the branch pipe body. The controller is electrically connected with the output pipeline and the cooling pipeline. When the nozzle switch control valve is opened, the liquid in the storage tank flows to the nozzle through the main pipe body of the output pipeline, the pump, the heater and the nozzle switch control valve in sequence, and the liquid is sprayed out through the nozzle. When the nozzle switch control valve is closed, the liquid in the storage tank flows to the storage tank through the main pipe body of the output pipeline, the pump, the heater, the nozzle switch control valve, the branch pipe body of the cooling pipeline and the cooler in sequence.
In an embodiment of the present invention, the output pipeline further includes a first temperature sensor, the first temperature sensor is disposed in the main pipe body and located between the heater and the nozzle switch control valve, so as to sense a first temperature of the liquid in the main pipe body and send the first temperature to the controller, and the controller adjusts the heating temperature of the heater according to the first temperature.
The utility model discloses an embodiment, output pipeline still includes a second temperature sensor, and second temperature sensor sets up in being responsible for the body to be located between heater and the first temperature sensor, be used for the second temperature of the liquid that sensing liquid comes out after the heater heating, and send the second temperature of liquid to the controller.
The utility model discloses an in the embodiment, high temperature liquid sprinkler system still includes a fluid infusion pipeline, and a liquid supply device is connected to the one end of fluid infusion pipeline, and the other end is connected with the hold up tank, and the fluid infusion pipeline is used for transmitting the liquid that liquid supply device supplied to the hold up tank in.
The utility model discloses an in the embodiment, fluid infusion pipeline has a fluid infusion governing valve and a fluid infusion on-off control valve, and the fluid infusion governing valve is used for adjusting the volume that liquid flowed through the fluid infusion pipeline, and the fluid infusion on-off control valve is used for opening and closing the fluid infusion pipeline.
The utility model discloses an in the embodiment, high temperature liquid sprinkler system still includes a level sensor, and level sensor sets up in the hold up tank to electric connection controller, level sensor are used for one of the liquid level height of sensing liquid in the hold up tank, and send the liquid level height to the controller.
The utility model discloses an in the embodiment, high temperature liquid sprinkler system still includes a return line, and the hold up tank is connected to return line's one end, and the output pipeline between heater and the first temperature sensor is connected to the other end.
In an embodiment of the present invention, the return line has a return valve, and the return valve is used to adjust the amount of liquid flowing through the return line.
In an embodiment of the present invention, the cooling pipeline further includes a cooling valve, the cooling valve is disposed on the cooling pipeline between the cooler and the first temperature sensor, and the cooling valve is used for allowing the liquid in the cooling pipeline to pass through or be retained in the cooling pipeline.
The utility model discloses an in the embodiment, output pipeline includes an output governing valve, and the output governing valve sets up the output pipeline between first temperature sensor and second temperature sensor, and the output governing valve is used for adjusting the volume that liquid flowed through output pipeline.
The utility model has the advantages that:
the utility model discloses an efficiency lies in the structure through cooling line, makes the utility model discloses a high temperature liquid sprinkler system is when need not spraying high temperature liquid, and pumping and heater still last the function, make liquid can be in the circulation flow under stable temperature, avoid the too big situation of liquid temperature fluctuation, ensure the temperature stability of liquid when wasing the operation, promote the clean effect and the holistic processing procedure quality of base plate.
Furthermore, the utility model discloses a structure through cooling line makes pumping and heater can maintain the stable function of fixed output, avoids the situation that prior art pumping and heater constantly started and closed, prolongs the life and the durability of pumping and heater.
In addition, by sensing of the first temperature sensor and the second temperature sensor, the accidental conditions that the liquid is excessively heated to exceed the temperature which can be born by the heater, a pipeline or the liquid and further explode and the like in order to enable the liquid which is actually sprayed to reach the specified temperature by the heater can be avoided; and the liquid can be controlled to the required heating temperature, so that the problems of boiling gasification, chemical characteristic aging and the like of the liquid are avoided, and even the risk of spontaneous combustion explosion at high chemical temperature is avoided.
Drawings
FIG. 1 is a circuit diagram of a high temperature liquid spraying system pipeline of the prior art;
fig. 2 is a circuit diagram of a high temperature liquid spraying system according to an embodiment of the present invention;
fig. 3 is a liquid ejection circuit diagram of a high temperature liquid spraying system in accordance with an embodiment of the present invention;
fig. 4 is a liquid stop-spraying circuit diagram of the high-temperature liquid spraying system according to the embodiment of the present invention.
Description of reference numerals:
10-a storage tank; 20-an output line; 21-a main tube; 22-pumping; 23-a heater; 24-nozzle on-off control valve; 25-a first temperature sensor; 26-a second temperature sensor; 27-output regulating valve; 30-a cooling line; 31-a branch pipe body; 32-a cooler; 33-branch regulating valve; 40-a controller; 50-a liquid supplementing pipeline; 51-liquid supplement regulating valve; 52-fluid infusion switch control valve; 60-a liquid level sensor; 70-a return line; 71-a reflux valve; 90-liquid; 91-a nozzle; 92-a temperature control sensor; 93-a liquid storage barrel; 94-pumping; 95-a heater; 96-control switch; 97-return line; 98-liquid supplement pipe.
Detailed Description
The embodiments of the present invention will be described in more detail with reference to the drawings and the reference numerals, so that those skilled in the art can read the description to implement the embodiments.
Fig. 2 is a circuit diagram of a high temperature liquid spraying system according to a preferred embodiment of the present invention. As shown in fig. 2, the utility model provides a high temperature liquid sprinkling system, include: a storage tank 10, an output pipeline 20 and a controller 40. The following detailed description is made for each part.
The storage tank 10 is used for containing a liquid 90; specifically, the storage tank 10 has a receiving space for receiving the liquid 90; preferably, the liquid 90 in the storage tank 10 is at a normal temperature.
The output pipeline 20 comprises a main pipe 21, a pump 22, a heater 23 and a nozzle 91 on-off control valve 24; one end of the main pipe 21 is connected to the storage tank 10, the other end of the main pipe 21 is connected to a nozzle 91, and the pump 22, the heater 23 and the nozzle 91 are disposed on the main pipe 21.
Specifically, one end of the main pipe body 21 is connected to the bottom of the storage tank 10, the other end is connected to a nozzle 91, and the pump 22, the heater 23 and the nozzle 91 are respectively disposed on the main pipe body 21; when the storage tank 10 contains the liquid 90, the liquid 90 in the storage tank 10 will flow into the main pipe 21 connected to the bottom of the storage tank 10 due to gravity, and the pump 22 can be pressurized to push the liquid 90. The pump 22 is a common mechanical device, and functions to move the liquid 90 and transport the liquid 90 by increasing the pressure of the liquid 90, so that the liquid 90 generates a larger propelling force than in a normal state.
When the liquid 90 is pressurized and flows to the heater 23 through the main pipe 21, the heater 23 heats the passing liquid 90. Preferably, the heater 23 heats the liquid 90 to a desired high temperature, however, the temperature increased by the heater 23 can be adjusted as desired.
When the liquid 90 is heated, the high temperature liquid 90 flows to the nozzle 91 arranged at the other end of the main pipe body to switch the control valve 24; when the nozzle 91 opens the on-off control valve 24, the high temperature liquid 90 is sprayed from the nozzle 91 to clean the oil, glue, particles, etc. on the substrate (not shown). Preferably, the substrate can be a wafer and a ceramic plate or a metal carrier plate.
The cooling pipeline 30 includes a branch pipe 31 and a cooler 32; one end of the branch pipe body 31 is connected to the storage tank 10, the other end of the branch pipe body 31 is connected to the output line 20 between the heater 23 and the nozzle 91 opening/closing control valve 24, and the cooler 32 is provided in the branch pipe body 31.
Specifically, when the nozzle 91 opening/closing control valve 24 is closed, the high-temperature liquid 90 flows into the branch pipe body 31 through the other end of the branch pipe body 31, and when the liquid 90 flows to the cooler 32 through the branch pipe body 31, the cooler 32 cools the high-temperature liquid 90, and the liquid 90 flows back to the storage tank 10 from one end of the branch pipe body 31; preferably, the cooler 32 reduces the temperature of the liquid 90 to the normal temperature of the liquid 90 in the storage tank 10, but the reduced temperature is not limited thereto and can be adjusted as required.
In the preferred embodiment of the present invention, the cooling line 30 includes a branch regulating valve 33; a manifold regulating valve 33 is provided in the branch line between the connection of the cooler 32 and the output line 20, the manifold regulating valve 33 regulating the amount of the liquid 90 flowing through the branch line.
The controller 40 is electrically connected to the output line 20 and the cooling line 30; the controller 40 is used to control the operation of the pump 22, the heater 23 and the cooler 32, and specifically, the controller 40 is used to control the pump 22 to increase or decrease the pressure, control the heater 23 to heat or stop heating, and control the cooler 32 to cool or stop cooling.
In the preferred embodiment of the present invention, the output line 20 further comprises a first temperature sensor 25; the first temperature sensor 25 is disposed in the main pipe 21 and between the heater 23 and the nozzle 91 on-off control valve 24, for sensing a first temperature of the liquid 90 in the main pipe 21 and transmitting the first temperature to the controller 40, and the controller 40 adjusts the heating temperature of the heater 23 according to the first temperature. The first temperature sensor 25 is arranged at a position close to the nozzle 91, so that the first temperature measured by the first temperature sensor 25 can be the same as the temperature of the actually sprayed liquid 90, the temperature of the output liquid meets the actually required requirement, and the problem that oil stains, glue or particles on the substrate cannot be completely removed and the process effect of high-temperature cleaning is influenced due to the fact that the temperature of the actually sprayed liquid 90 is different from the required temperature is avoided.
In the preferred embodiment of the present invention, the output line 20 further comprises a second temperature sensor 26; the second temperature sensor 26 is disposed in the main tube and between the heater 23 and the first temperature sensor 25, for sensing a second temperature of the liquid 90 heated by the heater 23 and transmitting the second temperature of the liquid 90 to the controller 40. Through the arrangement of the second temperature sensor 26, the heating temperature of the heater 23 is prevented from exceeding the temperature which can be borne by the heater 23, the pipeline or the liquid 90, and further, accidents such as explosion and the like are avoided; wherein, when the second temperature measured by the second temperature sensor 26 exceeds the upper limit of the temperature that can be tolerated by the heater 23, the pipeline or the liquid 90, the controller 40 will stop heating the heater 23 and/or issue an alarm to notify the field worker.
Fig. 3 is a liquid 90 spraying circuit diagram of the high temperature liquid spraying system according to the preferred embodiment of the present invention. As shown in fig. 3, when a substrate (not shown) needs to be cleaned, the nozzle 91 opening/closing control valve 24 is first opened, and the liquid 90 in the storage tank 10 is discharged through the nozzle 91 via the main pipe 21, the pump 22, the heater 23, the nozzle 91 opening/closing control valve 24, the first temperature sensor 25, and the nozzle 91 in this order through the outlet line 20.
Wherein, in the preferred embodiment of the present invention, the high temperature liquid spraying system further comprises a liquid supplementing pipeline 50; the fluid infusion line 50 has one end connected to a fluid 90 supply device (not shown) and the other end connected to the storage tank 10, and the fluid infusion line 50 is used for transferring the fluid 90 supplied by the fluid 90 supply device into the storage tank 10.
Specifically, the fluid infusion pipeline 50 has a fluid infusion regulating valve 51 and a fluid infusion on-off control valve 52; the fluid replacement valve 51 is used to adjust the amount of fluid 90 flowing through the fluid replacement line 50, and the fluid replacement on-off control valve 52 is used to open and close the fluid replacement line 50. The fluid infusion regulating valve 51 and the fluid infusion on-off control valve 52 can be opened or closed through manual operation, or are electrically connected with the controller 40, and the fluid infusion on-off control valve 52 is controlled to be opened or closed through the controller 40.
In the preferred embodiment of the present invention, the output line 20 includes an output regulating valve 27; an output regulating valve 27 is disposed in the main pipe between the first temperature sensor 25 and the second temperature sensor 26, and the output regulating valve 27 is used for regulating the amount of the liquid 90 flowing through the output pipe 20.
In the preferred embodiment of the present invention, the high temperature liquid spraying system further comprises a liquid level sensor 60; the liquid level sensor 60 is disposed in the storage tank 10 and electrically connected to the controller 40, and the liquid level sensor 60 is configured to sense a liquid level height (not shown) of the liquid 90 in the storage tank 10 and transmit the liquid level height to the controller 40. The controller 40 controls the fluid replenishing pipeline 50 to replenish new fluid 90 into the storage tank 10 according to the fluid level height, so as to maintain a certain fluid level height of the fluid 90 in the storage tank 10.
In the preferred embodiment of the present invention, the high temperature liquid spraying system further comprises a return line 70; the return line 70 has one end connected to the storage tank 10 and the other end connected to the output line 20 between the heater 23 and the first temperature sensor 25. Wherein the return line 70 has a return valve 71; the return valve 71 is used to regulate the amount of liquid 90 flowing through the return line 70.
Fig. 4 is a circuit diagram of the liquid 90 stop-spraying circuit of the high-temperature liquid spraying system according to the preferred embodiment of the present invention. As shown in fig. 4, when the nozzle 91 on-off control valve 24 is closed, the liquid 90 in the storage tank 10 sequentially flows to the storage tank 10 through the main pipe body 21 of the outlet line 20, the pump 22, the heater 23, the nozzle 91 on-off control valve 24, the first temperature sensor 25, the branch pipe body 31 of the cooling line 30, and the cooler 32.
Specifically, the cooling line 30 further includes a cooling valve; a cooling valve is provided in the cooling line 30 between the cooler 32 and the first temperature sensor 25, the cooling valve being used for passing or retaining the liquid 90 in the cooling line 30. Preferably, the cooling valve is electrically connected to the controller 40, and the flow of the liquid 90 through the cooling valve is controlled by the controller 40.
As described above, the utility model has the effect of passing through the structure of the cooling pipeline 30, so that the high-temperature liquid spraying system of the present invention allows the flow rate of the cold liquid 90 flowing into the cooling pipeline 30 to be equal to the flow rate output by the nozzle 91 when the high-temperature liquid 90 does not need to be sprayed, and therefore the pump 22 and the heater 23 still operate continuously and stably. When the liquid supplying device is used, after the liquid 90 is outputted from the nozzle 91, the liquid 90 is supplied through the liquid supplying pipe 50, but in this case, as in the case of the liquid 90 flowing through the cooling pipe 30, the temperature in the storage tank 10 does not change greatly, so that the liquid 90 can circulate at a stable temperature, thereby preventing the temperature fluctuation of the liquid 90 from being too large, ensuring the temperature stability of the liquid 90 during the cleaning operation, and improving the cleaning effect of the substrate and the overall process quality.
Furthermore, the structure of the cooling pipeline 30 of the present invention enables the pump 22 and the heater 23 to maintain a stable output power, thereby avoiding the situation of continuous start and close of the pump and the heater in the prior art, and prolonging the service life and durability of the pump 22 and the heater 23.
In addition, by the sensing of the second temperature sensor 26, the heater 23 can avoid the accidental conditions that the liquid 90 is overheated to exceed the temperature that the heater, the pipeline or the liquid can bear so as to cause explosion and the like in order to make the actually sprayed liquid 90 reach the specified temperature; and the liquid 90 can be controlled to the required heating temperature, so that the problems of boiling gasification, chemical characteristic aging and the like of the liquid 90 and even the risk of spontaneous combustion explosion at high chemical temperature are avoided.
The foregoing is illustrative of the preferred embodiment of the present invention and is not intended to limit the invention in any way, and therefore any modifications or variations of the invention, which are within the spirit of the invention, are intended to be included within the scope of the invention.
Claims (10)
1. A high temperature liquid spraying system, comprising:
a storage tank for containing a liquid;
the output pipeline comprises a main pipe body, a pump, a heater and a nozzle switch control valve, wherein one end of the main pipe body is connected with the storage tank, the pump, the heater and the nozzle switch control valve are arranged on the main pipe body, and the other end of the main pipe body is used for connecting a nozzle;
a cooling line including a branch pipe body and a cooler, one end of the branch pipe body being connected to the storage tank, the other end of the branch pipe body being connected to the output line between the heater and the nozzle switch control valve, the cooler being provided in the branch pipe body; and
the controller is electrically connected with the output pipeline and the cooling pipeline;
when the nozzle switch control valve is opened, the liquid in the storage tank sequentially passes through the main pipe body of the output pipeline, the pump, the heater, the nozzle switch control valve and the nozzle, and the liquid is sprayed out through the nozzle;
when the nozzle switch control valve is closed, the liquid in the storage tank sequentially flows through the main pipe body of the output pipeline, the pump, the heater, the nozzle switch control valve, the branch pipe body of the cooling pipeline and the cooler to the storage tank.
2. A high temperature liquid spraying system as claimed in claim 1, wherein the outlet line further includes a first temperature sensor disposed in the main tube between the heater and the nozzle switch control valve for sensing a first temperature of the liquid in the main tube and transmitting the first temperature to the controller, the controller adjusting the heating temperature of the heater according to the first temperature.
3. A high temperature liquid spraying system as claimed in claim 2, wherein said outlet line further includes a second temperature sensor disposed in said main tube between said heater and said first temperature sensor for sensing a second temperature of said liquid heated by said heater and transmitting said second temperature of said liquid to said controller.
4. A high temperature liquid spraying system as claimed in claim 1, further comprising a fluid replacement line, one end of the fluid replacement line is connected to a liquid supply device, and the other end of the fluid replacement line is connected to the storage tank, the fluid replacement line is configured to transfer the liquid supplied by the liquid supply device into the storage tank.
5. The high temperature liquid spraying system of claim 4, wherein the fluid replacement line has a fluid replacement regulating valve for regulating the amount of the liquid flowing through the fluid replacement line and a fluid replacement on-off control valve for opening and closing the fluid replacement line.
6. A high temperature liquid spraying system as claimed in claim 1, further comprising a level sensor disposed in said storage tank and electrically connected to said controller, said level sensor being configured to sense a level of said liquid in said storage tank and to communicate said level to said controller.
7. A high temperature liquid spraying system as claimed in claim 2, further comprising a return line having one end connected to said storage tank and the other end connected to said output line between said heater and said first temperature sensor.
8. A high temperature liquid sprinkler system in accordance with claim 7 wherein said return line has a return valve for regulating the amount of liquid flowing through said return line.
9. The high temperature liquid spraying system of claim 2, wherein the cooling line further comprises a cooling valve disposed in the cooling line between the cooler and the first temperature sensor, the cooling valve configured to allow the liquid in the cooling line to pass through or reside in the cooling line.
10. A high temperature liquid sprinkler system in accordance with claim 3, wherein said output line comprises an output regulator valve disposed in said output line between said first temperature sensor and said second temperature sensor, said output regulator valve configured to regulate the amount of liquid flowing through said output line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120279117.3U CN213934652U (en) | 2021-02-01 | 2021-02-01 | High-temperature liquid spraying system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120279117.3U CN213934652U (en) | 2021-02-01 | 2021-02-01 | High-temperature liquid spraying system |
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| CN213934652U true CN213934652U (en) | 2021-08-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114247684A (en) * | 2021-12-17 | 2022-03-29 | 北京北方华创微电子装备有限公司 | Liquid supply system and semiconductor cleaning system |
| WO2024109094A1 (en) * | 2022-11-24 | 2024-05-30 | 上海至纯洁净系统科技股份有限公司 | Distributed online heating system and online heating method |
-
2021
- 2021-02-01 CN CN202120279117.3U patent/CN213934652U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114247684A (en) * | 2021-12-17 | 2022-03-29 | 北京北方华创微电子装备有限公司 | Liquid supply system and semiconductor cleaning system |
| WO2024109094A1 (en) * | 2022-11-24 | 2024-05-30 | 上海至纯洁净系统科技股份有限公司 | Distributed online heating system and online heating method |
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