CN210690999U - Patterned liquid crystal photo-alignment device with phase compensation function - Google Patents
Patterned liquid crystal photo-alignment device with phase compensation function Download PDFInfo
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Abstract
The utility model discloses a patterning liquid crystal photo-alignment device with phase compensation function, the device includes: illumination subassembly, the pattern contracts the subassembly a little, the focus servo subassembly, the motion control part, the orthogonal circular polarized light interferes the subassembly, light path calibration monitoring subassembly and phase compensation subassembly, the utility model discloses the polarization direction of the linear polarization light that phase difference control circular polarized light that utilizes phase type spatial light modulator to produce interferes formation, combine the sensitive nature of photosensitive material to the linear polarization light polarization direction, can realize patterning liquid crystal photoalignment, this device can be under the single projection condition, accomplish the arbitrary optical orientation of liquid crystal in the arbitrary pixel space in the projection area, through the removal of two-dimensional work piece platform, accomplish the concatenation of a plurality of breadths, can realize big breadth liquid crystal photoalignment.
Description
Technical Field
The utility model relates to a liquid crystal orientation arranges the control field, especially relates to a patterning liquid crystal photo-alignment device with phase compensation function.
Background
Liquid crystals have wide applications in the fields of information display, optics, photonics devices, and the like. Many of these applications require that the liquid crystal be aligned according to the designed alignment to achieve the modulation of the amplitude, phase and polarization of light, so the alignment control of the liquid crystal is a research hotspot in academic and industrial production.
An alignment control method widely used in the industry at present is a rubbing alignment technique which uses nylon, fiber, or the like to rub an alignment film in a specific direction to align liquid crystals, but which is prone to generate defects such as static electricity, dust, and damage to the film surface.
In recent years, with the development of photosensitive materials, the concept of photo-alignment has been proposed and developed, which utilizes the photosensitive materials to generate molecular alignment perpendicular to the direction of linearly polarized light under the irradiation of ultraviolet polarized light, and the alignment of the molecules generates anchoring force similar to that brought by grooves, thereby inducing the alignment of liquid crystal molecules.
The existing optical control orientation modes mainly comprise two types, one type is required to be masked, and the other type is contact type mask exposure, projection type mask exposure and projection type dynamic mask exposure, wherein the contact type mask exposure and the projection type mask exposure are required to manufacture corresponding masks aiming at different patterns, so that the defects of high production cost, low efficiency and the like are overcome, and the currently reported projection type dynamic mask exposure based on a spatial light modulator (DMD) can not realize that different selected areas under single exposure form different liquid crystal orientation patterns, needs multiple exposure, and also has the problems of low efficiency, difficult alignment and the like; and the other type is holographic interference without a mask, which can only generate a liquid crystal alignment pattern with one-dimensional or two-dimensional periodicity and single alignment, and is difficult to prepare a complex pattern.
Specifically, in application numbers: 201210225093.9, the patent names: the utility model discloses a method and device for realizing the control of the random orientation of liquid crystal by the digital controlled micromirror array photoetching, which discloses a light-operated orientation technology based on DMD dynamic mask, the dynamic mask function is realized by controlling the deflection of the micromirror in the DMD, although the method can realize the orientation arrangement of the liquid crystal selection area without changing the mask, but the recording of the random orientation arrangement pattern of the liquid crystal selection area can not be realized in the single light-operated orientation process, the light-operated orientation operation can only realize the recording of the single-direction polarization pattern, if the recording of the polarization patterns in different selection areas and different directions is realized, a plurality of design drawings are required to be drawn and continuously and repeatedly loaded on a DMD control chip to realize the orientation in different selection areas, and the polarization direction of light is required to be controlled once by rotating the polaroid sheet once every loading, thereby causing the low production efficiency and the.
Specifically, in application numbers: 201820881217.1, the patent names: the utility model discloses a light orientation device's that once exposes realization arbitrary distribution utility model patent discloses a light control orientation technique based on LCOS dynamic mask, realize dynamic light control orientation through the phase delay of pixel in the control LCOS, though this method need not to draw many design drawing and constantly repeatedly load to LCOS control chip and realize different selection district orientations and need not just need rotate the polarization piece once and control the polarization direction of light once for every load, only need through exert different voltage for every pixel in the LCOS, make it produce the target phase delay, just can realize that the single load accomplishes different selection district orientations, but this technique has strict restriction to the contained angle between the fast (slow) axle of the polarization direction of the non-ordinary light in the LCOS and phase delay wave plate, if there is certain skew error, will make final emergent light be oval circular polarized light.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem, the present invention provides a patterned liquid crystal photo-alignment device with phase compensation function.
In order to achieve the above purpose, the technical scheme of the utility model is as follows:
a patterned liquid crystal photo-alignment device with phase compensation function, comprising:
the illumination assembly is used for providing a light source and realizing single-polarization collimation uniform surface light spots;
the pattern micro-assembly is used for micro-projecting the modulated light field on the photosensitive material;
the focal length servo assembly comprises a monitoring light source insensitive to light polarization photosensitive materials and a vertical direction correcting assembly and is used for correcting the defocusing phenomenon generated by movement;
the motion control component is used for adjusting the spatial position of the platform loaded with the light polarization photosensitive material so as to realize light field splicing;
the orthogonal circularly polarized light interference component is used for forming two orthogonal circularly polarized lights and interfering the two orthogonal circularly polarized lights to form linearly polarized light meeting the requirement of a polarization orientation angle;
the optical path calibration monitoring component is used for calibrating and monitoring the whole interference optical path of the orthogonal circularly polarized light interference component;
and the phase compensation component is used for performing phase compensation according to the linearly polarized light polarization direction information fed back by the optical path calibration monitoring component.
On the basis of the technical scheme, the following improvements can be made:
preferably, the orthogonal circularly polarized light interference module includes: the spatial light modulator controls the phase modulation of each pixel to control the polarization direction of linearly polarized light formed after interference;
the light field incident on the working surface of the spatial light modulator is subjected to phase modulation by the spatial light modulator and then reflected to the reflecting surface of the second beam splitter, and the modulated first light beam is refracted to pass through a first quarter wave plate, so that linearly polarized light is converted into circularly polarized light;
the second light beam sequentially passes through the phase compensation assembly and the second quarter-wave plate and is changed into circularly polarized light orthogonal to the first light beam;
the first light beam and the second light beam are interfered after passing through the third beam splitter and are converted into linearly polarized light.
Preferably, the phase compensation component is arranged between the first beam splitter and the second quarter-wave plate;
and the phase compensation component performs phase compensation according to the feedback information of the optical path calibration monitoring component, so that the phase difference between the first light beam and the second light beam is 0 under the condition that the spatial light modulator does not perform phase modulation on the incident light field.
Preferably, the phase compensation module includes: the phase compensator comprises a dynamic adjustable phase compensator, piezoelectric ceramics and a precise stepping motor, wherein the piezoelectric ceramics are fixed on a telescopic rod of the precise stepping motor, the telescopic rod is used for roughly adjusting the phase, and the piezoelectric ceramics are used for finely adjusting the phase.
As a preferred scheme, the emergent light of the orthogonal circularly polarized light interference component respectively enters the pattern micro component, the light path calibration monitoring component and the focal length servo component after passing through the fourth beam splitter, one surface of the fourth beam splitter is only reflected to the monitoring light source in the focal length servo component, and the other surface of the fourth beam splitter can reflect and transmit the light beam.
Preferably, the optical path calibration monitoring module includes: the device comprises an analyzer, a first focusing lens and a photoelectric detector;
the first focusing lens is arranged between the analyzer and the photoelectric detector;
incident light of the light path calibration monitoring component passes through the analyzer and the first focusing lens in sequence and is monitored by the photoelectric detector.
Preferably, the focus servo assembly includes: the second focusing lens, the CCD, the monitoring light source and the fifth beam splitter;
the second focusing lens is arranged between the CCD and the fifth beam splitter.
Preferably, the optical path from the fourth beam splitter to the receiving surface of the CCD is equal to the optical path from the fourth beam splitter to the workpiece.
The utility model provides a patterning liquid crystal photo-alignment device with phase compensation function, the polarization direction of the linear polarization light that phase difference control circular polarization light that utilizes phase type spatial light modulator LCOS to produce interferes formation, combine the sensitive nature of photosensitive material to linear polarization light polarization direction, can realize patterning liquid crystal photo-alignment, this device can be under the single projection condition, accomplish the arbitrary orientation of liquid crystal in the arbitrary pixel space in the projection area, through two-dimensional work piece platform's removal, accomplish the concatenation of a plurality of projection breadths, can realize big breadth liquid crystal photo-alignment.
Compared with the prior art, the utility model discloses following beneficial effect has:
firstly, the liquid crystal optical orientation is controlled in parallel, the single-patterning liquid crystal optical orientation can arbitrarily control the liquid crystal optical orientation of an area corresponding to a pixel of the spatial light modulator in a patterning area, the masks do not need to be replaced for many times, a DMD (digital micromirror device) is used for refreshing a dynamic mask, and a polaroid is rotated to change the polarization direction of light, and meanwhile, the technology has no strict limitation on the included angle between the polarization direction of the abnormal light in the reflective phase type spatial light modulator and the fast (slow) axis of the phase delay wave plate, so that linearly polarized light with higher polarization degree can be obtained;
secondly, the combination of the optical path calibration monitoring component and the phase compensation component forms a feedback type optical path calibration, which can carry out automatic cyclic calibration, has high calibration precision and realizes the whole process automatically;
and thirdly, the dynamic adjustable phase compensator is adjusted by adopting a mode of combining a precise stepping motor and piezoelectric ceramics, so that the calibration accuracy of a light path is higher, and the obtained liquid crystal light orientation has smaller error with the target liquid crystal light orientation.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a patterned liquid crystal photo-alignment device with phase compensation function according to an embodiment of the present invention.
Fig. 2 is a flowchart illustrating a patterned liquid crystal photo-alignment device with phase compensation according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a phase compensation module according to an embodiment of the present invention.
Fig. 4 is a calibration flowchart of the optical path calibration monitoring component according to an embodiment of the present invention.
Wherein:
1-an illumination assembly, 11-a light source component, 12-a collimation and beam expansion assembly, and 13-a polarizer;
2-a pattern micro-assembly;
3-focus servo assembly, 31-second focusing lens, 32-CCD, 33-monitoring light source, 34-fifth beam splitter;
4-orthogonal circularly polarized light interference component, 41-first beam splitter, 42-reflector, 43-second beam splitter, 44-spatial light modulator, 45-first quarter wave plate, 46-third beam splitter, 47-second quarter wave plate, 48-fourth beam splitter;
5-optical path alignment monitoring component, 51-analyzer, 52-first focusing lens, 53-photodetector;
6-phase compensation component, 61-Bayouni compensator, 62-piezoelectric ceramic, 63-precision stepping motor, 631-telescopic rod;
7-stage, 8-miniature objective lens, a-first beam, b-second beam.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In order to achieve the objects of the present invention, in some embodiments of a patterned liquid crystal photo-alignment device with phase compensation,
as shown in fig. 1 and 2, the patterned liquid crystal photo-alignment device having a phase compensation function includes:
the illumination assembly 1 is used for providing a light source and realizing single polarization collimation and uniform surface light spots;
the pattern miniature assembly 2 is used for projecting the modulated light field on a photosensitive material in a miniature manner;
a focus servo assembly 3, including a light polarization photosensitive material insensitive monitoring light source 33 and a vertical direction correction assembly, for correcting the defocusing phenomenon generated by the movement;
the motion control component is used for adjusting the spatial position of the platform 7 loaded with the light polarization photosensitive material so as to realize light field splicing;
the orthogonal circularly polarized light interference component 4 is used for forming two orthogonal circularly polarized lights and interfering the two orthogonal circularly polarized lights to form linearly polarized light meeting the requirement of a polarization orientation angle;
the light path calibration monitoring component 5 is used for calibrating and monitoring the whole interference light path of the orthogonal circularly polarized light interference component 4;
and the phase compensation component 6 is used for performing phase compensation according to the linearly polarized light polarization direction information fed back by the optical path calibration monitoring component 5.
In some embodiments of the present invention, the lighting assembly 1 comprises:
a light source section 11 for providing a light source having a wavelength within an absorption wavelength range of the photoalignment material;
a collimation and beam expansion assembly 12 for adjusting the linear light source or point light source emitted from the light source part 11 into a parallel surface light source with uniformly distributed energy and transmitting the parallel surface light source to the orthogonal circularly polarized light interference assembly 4;
the polarizer 13 is used for converting the light source into linearly polarized light with a required polarization direction or improving the polarization degree of the polarized light.
The light source unit 11 is used to provide a light source for projection, the light source wavelength is in the absorption wavelength range of the photoalignment material, and the light source unit 11 has good coherence. The light source part 11 provides a pulse light source, works in a constant temperature and humidity environment, the central wavelength drift amplitude is less than 3nm, the half-wave width of the light source is less than 5nm, and the energy higher than eighty percent is concentrated in the central wavelength half-wave width.
The pulse width of the pulse light source is picosecond to second, the single pulse energy is in the magnitude of nano-focus to milli-focus, the unit area energy is higher than the threshold energy of the photosensitive material and lower than the damage threshold of the phase modulation device LCOS, the wavelength is 340nm to 600nm, the half width is less than 5nm, the pulse light source is selected according to the photosensitive characteristic of the photosensitive material, and the repetition frequency of the pulse light source is matched with the refreshing rate of the phase modulation device LCOS at 1Hz to 10 kHz.
Specifically, in some embodiments, the pulsed light source has a single pulse energy of 0.4mJ, a wavelength of 442nm, is an S-polarized light source, has a half-width of about 5nm, a pulse width of 10ns, and a repetition frequency of 100 Hz. And after beam expansion, the light beam is shaped into a square light spot by using a square diaphragm, the side length of the light spot is 1.3cm, the corresponding single pulse illumination energy density is 0.06mJ/cm2, and an illumination light source can completely cover 1920 x 1080 pixels on the LCOS after collimation and shaping.
The polarizer 13 is configured to convert the light source into linearly polarized light in a required polarization direction, and if the light emitted from the light source component 11 is linearly polarized light in the required polarization direction, the polarizer 13 is configured to improve the polarization degree of the polarized light, specifically, in some embodiments, the polarization direction of the polarizer 13 is selected to be the x direction, so that the incident linearly polarized light is the incident linearly polarized light
The pulse light emitted by the pulse light source forms a collimated uniform light spot with a divergence angle less than 10mrad and light intensity uniformity better than 80% after passing through the collimating and beam expanding component 12 and the polarizer 13. The central wavelength drift and half-width, temperature and wave plate errors of the pulse light source are less than 1% of the polarization degree phase error of the output pattern of the polarization pattern generation component.
A linear light source or a point light source emitted by a pulse light source is adjusted into a collimated linear polarized surface light source through a collimation and beam expansion assembly 12 and a polarizer 13, and after phase modulation, the ratio of the polarization direction to the intensity in the direction perpendicular to the polarization direction needs to be larger than 10 to 1.
In order to further optimize the effect of the present invention, in other embodiments, the rest of the feature technologies are the same, except that the orthogonal circularly polarized light interference component 4 includes: the polarization direction of linearly polarized light formed after interference is controlled by the spatial light modulator 44 through controlling the phase modulation of each pixel;
the incident light of the orthogonal circularly polarized light interference component 4 forms a first light beam a and a second light beam b through the first beam splitter 41, the first light beam a is reflected by the reflector 42 and then vertically incident on the working surface of the spatial light modulator 44 through the second beam splitter 43, the spatial light modulator 44 performs phase modulation on the light field incident on the working surface of the spatial light modulator, and then the light field is reflected to the reflecting surface of the second beam splitter 43, the modulated first light beam a is refracted, so that the first light beam a passes through the first quarter wave plate 45 to convert linearly polarized light into circularly polarized light;
the second light beam b passes through the phase compensation component 6 and the second quarter wave plate 47 in sequence and is changed into circularly polarized light orthogonal to the first light beam a;
the first light beam a and the second light beam b are interfered by the third beam splitter 46 and converted into linearly polarized light.
In some embodiments of the present invention, the spatial light modulator 44 is specifically a pure phase LCOS device, the operating frequency is 1Hz to 10kHz, the operating frequency is 100Hz, the damage threshold of the pulsed light source is greater than 300mJ/cm2, the number of pixels is 1920 × 1080, the size of a single pixel is 8 μm, the size of the whole phase modulation device is 1.54cm × 0.86cm, and the phase modulation precision is greater than 0.03pi for 442nm phase modulation amount.
In order to ensure that the two interfering beams have equal light intensity, specifically, in the present embodiment, the splitting ratio (R: T) of the first beam splitter 41 is 20: 80, the splitting ratio (R: T) of the second beam splitter 43 is 50: 50, and the splitting ratio (R: T) of the third beam splitter 46 is 50: 50, and the working wavelength range of the above beam splitters includes the wavelength of the laser source; the liquid crystal director of the LCOS of the reflective phase type spatial light modulator 44 is parallel to the polarization direction of the incident linearly polarized light, so that the LCOS is in a pure phase modulation working mode, and the incident linearly polarized light is enabled to be in a pure phase modulation working mode
After it is modulated, become
Wherein
The phase modulation introduced for the spatial light modulator 44; the fast axis of the first quarter-wave plate 45 forms +45 degrees with the x axis, and the incident linearly polarized light is converted into the dextrorotatory circularly polarized light
The fast axis of the second quarter-wave plate 47 forms an angle of-45 degrees with the x axis, so that the incident linearly polarized light is formed
Is converted into left-handed circularly polarized light
The right-handed circularly polarized light and the left-handed circularly polarized light interfere with each other after passing through the third beam splitter 46 to form linearly polarized light
Due to the existence of the beam splitter, so that one partThe fractional energy is lost and therefore the exposure time needs to be extended to achieve a higher photo-alignment quality.
As a further improvement of the embodiment of the present invention, the phase compensation assembly 6 is disposed between the first beam splitter 41 and the second quarter wave plate 47;
the phase compensation unit 6 performs phase compensation based on the feedback information of the optical path calibration monitoring unit 5 so that the phase difference between the first light beam a and the second light beam b is 0 without phase-modulating the incident light field by the spatial light modulator 44.
As a further improvement of the embodiment of the present invention, as shown in fig. 3, the phase compensation assembly 6 includes: the phase compensator comprises a dynamic adjustable phase compensator, piezoelectric ceramics 62 and a precision stepping motor 63, wherein the piezoelectric ceramics 62 are fixed on an expansion link 631 of the precision stepping motor 63, the expansion link 631 is used for roughly adjusting the phase, and the piezoelectric ceramics 62 is used for finely adjusting the phase.
In an embodiment, the dynamically adjustable phase compensator can be operated by Bakini compensator 61 or other compensators, and the phase compensation element 6 can also be a liquid crystal phase variable retarder directly, when a liquid crystal phase variable retarder is used, piezoelectric ceramics and a stepping motor are not needed.
As the utility model discloses embodiment's further improvement, the emergent light of quadrature circular polarized light interference subassembly 4 gets into pattern shrink subassembly 2, light path calibration monitoring subassembly 5 and focus servo subassembly 3 respectively behind fourth beam splitter 48, and the one side in the fourth beam splitter 48 only reflects to the surveillance light source 33 among the focus servo subassembly 3, and another can reflect and the perspective again in the face of the light beam.
As a further improvement of the embodiment of the present invention, the optical path calibration monitoring module 5 includes: an analyzer 51, a first focusing lens 52, and a photodetector 53;
the first focusing lens 52 is disposed between the analyzer 51 and the photodetector 53;
the incident light from the optical path alignment monitoring unit 5 passes through the analyzer 51 and the first focusing lens 52 in this order, and is monitored by the photodetector 53.
As shown in fig. 4, the optical path calibration monitoring module 5 is used for calibration monitoring of the entire interference optical path, in the case where the spatial light modulator 44 does not apply phase modulation to the optical field of the first light beam a, the analyzer 51 is driven to rotate by driving the precision stepper motor, the maximum light intensity transmitted through the analyzer 51 is monitored by the optical power meter, the analyzing direction angle 8 of the analyzer 51 at this time is recorded, the phase difference between the first light beam a and the second light beam b is 2 θ obtained from the analyzing direction angle, then the phase compensation is performed by the phase compensation module 6, and the initialization is completed by repeatedly detecting and feeding back signals to the phase compensation module 6 so that the phase difference between the first light beam a and the second light beam b is 0.
As a further improvement of the embodiment of the present invention, the focal length servo assembly 3 includes: a second focusing lens 31, a CCD32, a monitoring light source 33, and a fifth beam splitter 34;
the second focusing lens 31 is disposed between the CCD32 and the fifth beam splitter 34.
As a further improvement of the embodiment of the present invention, the optical path from the fourth beam splitter 48 to the receiving surface of the CCD32 is equal to the optical path from the fourth beam splitter 48 to the workpiece.
In some embodiments of the present invention, the focal length servo assembly 3 is used for real-time monitoring of the focused light spot, and in order to make the movement adjustment through the miniature objective lens 8, the light spot focused on the workpiece can be equivalently imaged on the receiving surface of the CCD32, and it is necessary to ensure that the optical path of the fourth beam splitter 48 reaching the receiving surface of the CCD32 and the optical path of the workpiece are equal.
Meanwhile, the focal length servo assembly 3 is used for judging whether defocusing exists or not, if defocusing exists, the miniature objective lens 8 moves up and down, so that interference light spots are accurately focused on the surface of the photosensitive material, and after accurate focusing, the light source component 11 emits light to perform patterned liquid crystal photo-orientation on the photosensitive material. To maximize the utilization of light energy, the light ratio (R: T) of the fourth beam splitter 48 is 20: 80, and one surface of the fourth beam splitter 48 reflects only the monitoring light source 33 and the other surface reflects and transmits the laser light.
As a further improvement of the embodiment of the present invention, the pattern micro-assembly 2 includes: real-time adjustable miniature objective lens 8 subassembly for the light field after will being modulated by spatial light modulator 44, the miniature projection is on photosensitive material, and according to photosensitive material's surface relief degree, miniature objective lens 8 can remove the focusing for the light spot focus can be changed different miniature times's objective lens on photosensitive material surface according to the demand of difference simultaneously.
On the other hand, the utility model also provides a patterned liquid crystal photoalignment method with phase compensation function, specifically includes following steps:
s1, providing a collimated polarized surface light source by the lighting assembly 1;
s2, initializing and calibrating an interference light path, enabling a polarized light surface source to enter the orthogonal circularly polarized light interference component 4, enabling incident light to form a first light beam a and a second light beam b through the first beam splitter 41, and enabling the spatial light modulator 44 not to apply phase modulation on a light field of the first light beam a;
s3, the optical path calibration monitoring component 5 calibrates and monitors the whole interference optical path of the orthogonal circularly polarized light interference component 4, under the condition that the spatial light modulator 44 does not apply phase modulation to the optical field of the first light beam a, the precision stepper motor is driven to drive the analyzer 51 to rotate, the photoelectric detector 53 monitors the maximum light intensity passing through the analyzer 51, the analyzing direction angle theta of the analyzer 51 at the moment is recorded, the phase difference between the first light beam a and the second light beam b is 2 theta which can be obtained by the analyzing direction angle, and then the phase difference is sent to the phase compensation component 6;
s4, the phase compensation module 6 performs phase compensation according to the polarization direction information of the linearly polarized light fed back by the optical path calibration monitoring module 5, and the phase compensation module 6 performs phase compensation according to the feedback information of the optical path calibration monitoring module 5, so that the phase difference between the first light beam a and the second light beam b is 0 when the spatial light modulator 44 does not perform phase modulation on the incident light field, thereby completing the initialization calibration;
s5, formally starting patterned liquid crystal light orientation work, wherein the light path calibration monitoring assembly does not need to work, the spatial light modulator 44 applies phase modulation to a light field of a first light beam a, the first light beam a is refracted by the reflector 42 and then vertically incident on a working surface of the spatial light modulator 44 through the second beam splitter 43, the spatial light modulator 44 performs phase modulation on the light field incident on the working surface of the first light beam a, then the light field is reflected to a reflecting surface of the second beam splitter 43, the modulated first light beam a is folded, and the first light beam a is converted into circularly polarized light through the first quarter-wave plate 45; the second light beam b passes through the phase compensation component 6 and the second quarter wave plate 47 in sequence and is changed into circularly polarized light orthogonal to the first light beam a; the first light beam a and the second light beam b are interfered by the third beam splitter 46 and are converted into linearly polarized light;
s6, the pattern shrinking component 2 shrinks the polarization pattern output by the orthogonal circularly polarized light interference component 4 and writes the polarization pattern into the light polarization photosensitive material;
s7, the servo focusing assembly adjusts the distance between the imaging objective lens group and the light polarization sensitive material surface, so that the focal plane of the imaging objective lens group is always kept at the light polarization sensitive material surface;
s8, recording the single light control orientation on the light polarization photosensitive material;
s9, moving the platform 7 carrying the light-polarizing photosensitive material to the next designated position for the next pattern light field recording.
As a further improvement of the embodiment of the present invention, after step S9, the method further includes:
and S10, splicing each alignment unit together to form the optical alignment structure with large-area polarization light pattern on the optical polarization photosensitive material.
The utility model provides a patterning liquid crystal photo-alignment device with phase compensation function, the polarization direction of the linear polarization light that phase difference control circular polarization light that utilizes phase type spatial light modulator 44LCOS to produce interferes formation, combine the sensitive nature of photosensitive material to the linear polarization light polarization direction, can realize patterning liquid crystal photo-alignment, this device can be under the single projection condition, accomplish the arbitrary orientation of liquid crystal in the arbitrary pixel space in the projection area, through the removal of two-dimensional workpiece platform 7, accomplish the concatenation of a plurality of projection breadths, can realize big breadth liquid crystal photo-alignment.
Compared with the prior art, the utility model discloses following beneficial effect has:
firstly, the liquid crystal light orientation is controlled in parallel, the liquid crystal light orientation of the area corresponding to the pixels of the spatial light modulator 44 in the patterned area can be controlled at will by single-patterning liquid crystal light orientation, the masks do not need to be replaced for many times, the DMD is used for refreshing the dynamic masks, and the polarizing direction of light is changed by rotating the polarizing plate, meanwhile, the technology has no strict limitation on the included angle between the polarization direction of the non-ordinary light in the reflective phase-type spatial light modulator 44 and the fast (slow) axis of the phase delay wave plate, and the linearly polarized light with higher polarization degree can be obtained.
Second, an orthogonal circularly polarized light interference optical path introduces two circularly polarized lights with orthogonal polarization directions and a certain phase difference by using a Mach-Zehnder interference optical path, so that the two lights interfere to form linearly polarized light, and the phase difference is introduced by a reflective phase spatial light modulator 44
Thereby controlling the polarization direction angle of linearly polarized light formed by the interference of orthogonal circularly polarized light to be
Thirdly, in the optical path calibration monitoring assembly 5, the analyzer 51 is controlled by a stepping motor, and can rotate controllably with high precision, and the polarization direction of linearly polarized light can be accurately judged by combining the light intensity detected by the photoelectric detector 53.
Fourth, the light path calibration monitoring subassembly 5 has constituted the light path calibration of a feedback formula with combination of phase compensation subassembly 6, can circulate the calibration with automizing, and the calibration precision is high, and whole process realizes with automation, wherein light path calibration monitoring subassembly 5 before the utility model discloses patterning light orientation device formally operates, monitor the polarization direction of line polarization through light path calibration monitoring subassembly 5 for judge whether the device is in initialization state (interference light path phase difference is 0), and give phase compensation subassembly 6 with line polarization direction information transfer, phase compensation subassembly 6 carries out phase compensation to whole light path according to the line polarization direction information that light path calibration monitoring subassembly 5 transmitted, make the device be in initialization state.
Fifthly, the Bavini compensator 61 is adjusted by combining the precision stepping motor 63 and the piezoelectric ceramic 62, so that the calibration accuracy of the optical path is higher, and the obtained liquid crystal optical orientation has smaller error with the target liquid crystal optical orientation.
Sixthly, the servo focusing assembly adopts a light source insensitive to photosensitive materials as a focusing light spot monitoring illumination light source, the light spot is received by the CCD32, software judges whether defocusing exists according to the light spot received by the CCD32, if defocusing exists, the miniature objective lens 8 moves up and down, and interference light spots are accurately focused on the surface of the photosensitive materials; the miniature objective lens 8 dynamically moves in real time according to the surface waviness of the photosensitive material, so that light spots are accurately focused on the surface of the photosensitive material, interference patterns are accurately and microscopically projected on the surface of the photosensitive material, defocusing caused by the waviness of the surface of the photosensitive material can be effectively avoided, and the patterned liquid crystal light orientation effect is better. According to different requirements, the objective lenses with different micro-scale factors can be replaced.
Seventh, by means of the movement of the platform 7 and the splicing technology formed by the real-time adjustable miniature objective lens 8, interference patterns can be accurately focused and projected on the surface of the photosensitive material in each area, and high-quality large-area patterned liquid crystal photo-orientation can be achieved.
Above-mentioned all optional technical scheme can adopt arbitrary combination to form the optional embodiment of this utility model, and the repeated description is no longer given here.
It should be noted that: in the patterned liquid crystal photo-alignment device with a phase compensation function provided in the above embodiments, when performing a patterned liquid crystal photo-alignment method with a phase compensation function, only the division of the above functional modules is illustrated, and in practical applications, the above function distribution may be completed by different functional modules according to needs, that is, the internal structure of the device may be divided into different functional modules to complete all or part of the above described functions. In addition, the patterned liquid crystal photo-alignment device with the phase compensation function and the patterned liquid crystal photo-alignment method with the phase compensation function provided by the embodiments belong to the same concept, and specific implementation processes thereof are described in the method embodiments and are not described herein again.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention. With regard to the preferred embodiments of the present invention, it should be noted that, for those skilled in the art, many variations and modifications can be made without departing from the inventive concept, and these are within the scope of the present invention.
Claims (8)
1. A patterned liquid crystal photo-alignment device with phase compensation function, comprising:
the illumination assembly is used for providing a light source and realizing single-polarization collimation uniform surface light spots;
the pattern micro-assembly is used for micro-projecting the modulated light field on the photosensitive material;
the focal length servo assembly comprises a monitoring light source insensitive to light polarization photosensitive materials and a vertical direction correcting assembly and is used for correcting the defocusing phenomenon generated by movement;
the motion control component is used for adjusting the spatial position of the platform loaded with the light polarization photosensitive material so as to realize light field splicing;
it is characterized by also comprising:
the orthogonal circularly polarized light interference component is used for forming two orthogonal circularly polarized lights and interfering the two orthogonal circularly polarized lights to form linearly polarized light meeting the requirement of a polarization orientation angle;
the optical path calibration monitoring component is used for calibrating and monitoring the whole interference optical path of the orthogonal circularly polarized light interference component;
and the phase compensation component is used for performing phase compensation according to the linearly polarized light polarization direction information fed back by the light path calibration monitoring component.
2. The patterned liquid crystal photo-alignment device with phase compensation function of claim 1, wherein the orthogonal circularly polarized light interference component comprises: the device comprises a first beam splitter, a reflector, a second beam splitter, a reflective phase type spatial light modulator, a first quarter wave plate, a third beam splitter and a second quarter wave plate, wherein the spatial light modulator controls the phase modulation of each pixel to control the polarization direction of linearly polarized light formed after interference;
the incident light of the orthogonal circularly polarized light interference component forms a first light beam and a second light beam through the first beam splitter, the first light beam is reflected by the reflector and then vertically incident on the working surface of the spatial light modulator through the second beam splitter, the spatial light modulator performs phase modulation on a light field incident on the working surface of the spatial light modulator, then the light field is reflected to the reflecting surface of the second beam splitter, the modulated first light beam is refracted, and the first light beam passes through the first quarter-wave plate to convert linearly polarized light into circularly polarized light;
the second light beam sequentially passes through the phase compensation assembly and the second quarter-wave plate and is changed into circularly polarized light orthogonal to the first light beam;
the first light beam and the second light beam are interfered after passing through the third beam splitter and are converted into linearly polarized light.
3. The patterned liquid crystal photo-alignment device with phase compensation function of claim 2, wherein the phase compensation component is disposed between the first beam splitter and the second quarter wave plate;
and the phase compensation component performs phase compensation according to the feedback information of the optical path calibration monitoring component, so that the phase difference between the first light beam and the second light beam is 0 under the condition that the spatial light modulator does not perform phase modulation on an incident light field.
4. The patterned liquid crystal photo-alignment device with phase compensation function of claim 3, wherein the phase compensation component comprises: the phase compensator comprises a dynamic adjustable phase compensator, piezoelectric ceramics and a precise stepping motor, wherein the piezoelectric ceramics are fixed on a telescopic rod of the precise stepping motor, the telescopic rod is used for roughly adjusting the phase, and the piezoelectric ceramics are used for finely adjusting the phase.
5. The patterned liquid crystal photo-alignment device with phase compensation function according to any one of claims 1 to 4, wherein the emergent light of the orthogonal circularly polarized light interference component passes through a fourth beam splitter and then enters the pattern shrinking component, the optical path calibration monitoring component and the focus servo component, respectively, and one surface of the fourth beam splitter is only reflected to the monitoring light source in the focus servo component, and the other surface of the fourth beam splitter is both reflected and transmitted to the light beam.
6. The patterned liquid crystal photo-alignment device with phase compensation function of claim 5, wherein the optical path calibration monitoring component comprises: the device comprises an analyzer, a first focusing lens and a photoelectric detector;
the first focusing lens is arranged between the analyzer and the photoelectric detector;
and incident light of the optical path calibration monitoring component passes through the analyzer and the first focusing lens in sequence and is monitored by the photoelectric detector.
7. The patterned liquid crystal photo-alignment device with phase compensation function of claim 6, wherein the focus servo assembly comprises: the second focusing lens, the CCD, the monitoring light source and the fifth beam splitter;
the second focusing lens is arranged between the CCD and the fifth beam splitter.
8. The patterned liquid crystal photo-alignment device with phase compensation function of claim 7, wherein the optical path from the fourth beam splitter to the CCD receiving surface is equal to the optical path from the fourth beam splitter to the workpiece.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111999902A (en) * | 2020-09-10 | 2020-11-27 | 上海交通大学 | Femtosecond laser two-photon processing device |
| CN114690457A (en) * | 2020-12-26 | 2022-07-01 | 昆山暨扬光电科技有限公司 | Point scanning patterning liquid crystal photo-alignment system and method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111999902A (en) * | 2020-09-10 | 2020-11-27 | 上海交通大学 | Femtosecond laser two-photon processing device |
| CN111999902B (en) * | 2020-09-10 | 2021-11-16 | 上海交通大学 | Femtosecond laser two-photon processing device |
| CN114690457A (en) * | 2020-12-26 | 2022-07-01 | 昆山暨扬光电科技有限公司 | Point scanning patterning liquid crystal photo-alignment system and method |
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