CN209627692U - Bone conduction sensor based on MEMS - Google Patents

Bone conduction sensor based on MEMS Download PDF

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Publication number
CN209627692U
CN209627692U CN201920289668.0U CN201920289668U CN209627692U CN 209627692 U CN209627692 U CN 209627692U CN 201920289668 U CN201920289668 U CN 201920289668U CN 209627692 U CN209627692 U CN 209627692U
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China
Prior art keywords
bone conduction
mems
conduction sensor
output end
sensor
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CN201920289668.0U
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叶菁华
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Abstract

The utility model relates to electronic technology fields, and in particular to a kind of microphone structure.Bone conduction sensor based on MEMS, wherein including an airtight cavity, the uniaxially or biaxially acceleration transducer of inside cavity setting one is placed in close to the position of human ear portion bone;One specific integrated circuit handles chip, and uniaxially or biaxially acceleration transducer connects, and specific integrated circuit handles chip and is equipped with vibration signal output end.The utility model has the bone shock sensor of airtight cavity by setting one, by by one, uniaxially or biaxially acceleration transducer and specific integrated circuit processing chip are placed in above-mentioned airtight cavity, production cost is not only reduced, disturbance of the external environment to sensor is also reduced.

Description

Bone conduction sensor based on MEMS
Technical field
The utility model relates to electronic technology fields, and in particular to a kind of microphone structure.
Background technique
MEMS (Micro-Electro-Mechanical System, MEMS) microphone refers to based on MEMS skill The microphone of art manufacture, briefly exactly a capacitor is integrated on micro- silicon wafer, can use Surface Mount technique system It makes, is able to bear very high Reflow Soldering temperature, be easy to be integrated with CMOS technology and other voicefrequency circuits, and there is improved make an uproar Sound eliminates performance and rejection ability.Traditional MEMS microphone can only capture people's sound that vocal cord vibration generates when speaking Wave, propagation medium are air, but sound wave is propagating on the way the often noise jamming by a large amount of external worlds, will make voice Communication effect is had a greatly reduced quality, so this microphone by using acoustics sensing element capture sound wave will realize that high s/n ratio has Certain difficulty.
In order to improve and enhance the performance of microphone, the prior art using G-sensor (Accelerometer-sensor, Acceleration transducer) bone conduction sensor is done, G-sensor is one kind of MEMS sensor, it can perceive the change of acceleration Change, for example, shake, fall, the various mobile variations such as up and down can be converted into electric signal by G-sensor, in G-sensor There is finger sets in portion, the displacement of mass block when generating acceleration for measuring.Suitable two capacitors of each finger set Pole plate, when there is acceleration, mass block can generate relative motion, and the variation being displaced will lead to differential capacitance and change, then Specific differential capacitance detection and calculating acceleration process inside G-sensor by completing and generating an output valve.G-sensor Using the measurement to three axial object of which movement situations under three Cartesian coordinates, detected just in this microphone It is people's vibration that bone generates when speaking.Due to acceleration of gravity sensing more than G-sensor more common acceleration transducer Device often will increase a series of manufacturing cost of products such as hearing aid or bluetooth headset, make with intelligent gravity sensing system It obtains manufacturer and certain difficulty is caused to links such as product demands in reduction production cost and raising product quality and consumer.
Summary of the invention
The purpose of the utility model is to provide a kind of bone conduction sensors based on MEMS, solve the above skill Art problem.
The technical issues of the utility model is solved can be realized using following technical scheme:
Bone conduction sensor based on MEMS is set on ear belt-type apparatus, wherein including a closed chamber Body, the interior setting of the cavity:
One uniaxially or biaxially acceleration transducer, the uniaxially or biaxially acceleration transducer are placed in close to human ear portion bone The position of bone;
One specific integrated circuit handles chip, connect with the Acoustic sensor, and the integrated circuit processing chip is equipped with Vibration signal output end.
A kind of ear belt-type apparatus, wherein including,
One main microphon, for sensing acoustic signals;
One auxiliary microphone is separated by set distance setting with the main microphon;
One audio codec is connect with the main microphon and auxiliary microphone;
One microcontroller is inputted with the signal output end of the bone conduction sensor and the signal of the audio codec End connection.
Preferably, setting air, vacuum or other gases in the closed cavity.
It preferably, include at least one Acoustic sensor, the Acoustic sensor inside the bone conduction sensor Including back pole plate and vibrating diaphragm, the vibrating diaphragm is used for sense shock signal.
Preferably, the ear belt-type apparatus uses hearing aid or bluetooth headset.
Preferably, the ear belt further includes a time multiplexing circuit, the input interface connection of the time multiplexing circuit The output end of the output end of the bone conduction sensor and the main microphon and the auxiliary microphone, the time division multiplexing electricity The output port on road connects the input port of the microcontroller.
Preferably, the audio codec includes a sef-adapting filter, and the sef-adapting filter will be for that will convert And the audio signal come carries out noise cancellation and enhances the audio signal after noise cancellation.
Preferably, the audio codec includes a loudspeaker, is connect with the output end of the audio codec.
The utility model has the advantages that due to using the technology described above, bone of the utility model by setting one with airtight cavity shakes Dynamic sensor, by by one uniaxially or biaxially acceleration transducer and a specific integrated circuit handle chip be placed in it is above-mentioned closed In cavity, production cost is not only reduced, also reduces disturbance of the external environment to sensor.
Detailed description of the invention
Fig. 1 is a kind of circuit connection diagram of specific embodiment of the utility model.
Fig. 2 is a kind of local circuit connection schematic diagram of specific embodiment of the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are in the premise for not making creative work Under every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can To be combined with each other.
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but not as the utility model It limits.
Referring to Fig.1, based on the bone conduction sensor of MEMS, wherein including,
One main microphon 2, for sensing acoustic signals;
One auxiliary microphone 3 is separated by set distance setting with main microphon 1, for sensing acoustic signals;
One audio codec 6, connect with main microphon 2 and auxiliary microphone 3;
One microcontroller connects with the signal output end of airtight cavity 1 and the signal input part of the audio codec 6 It connects;
One closed cavity 1 is arranged in cavity referring to Fig. 2:
One uniaxially or biaxially acceleration transducer 11, uniaxially or biaxially acceleration transducer 11 is placed in close to human ear portion bone The position of bone;One specific integrated circuit handles chip 12, connect with uniaxially or biaxially acceleration transducer 11, specific integrated circuit It handles chip 12 and is equipped with vibration signal output end.
It further include a time-sharing multiplex circuit 4, time multiplexing circuit 4 as a kind of preferred embodiment of the utility model Input terminal connection airtight cavity 1, main microphon 2 and auxiliary microphone 3, output end connects microprocessor 5, for will be uniaxial or double The acoustic signals that the vibration signal and main microphon 2, auxiliary microphone 3 that axle acceleration sensor 11 captures sense are in a channel Upper simultaneous transmission.
Time-sharing multiplex circuit 4 provides individual interface to multiple equipment, reduces the complexity of circuit connection, while right The demand of RAM is lower, and reduces the power consumption on host.
As a kind of preferred embodiment of the utility model, air, vacuum or other gas are set in 1 body of airtight cavity Body, to reduce ambient enviroment to the perturbation of uniaxially or biaxially acceleration transducer 11, so that improving voice quality, airtight cavity 1 composition gets rid of the high-cost problem of prior art G-sensor, reduces the manufacturing cost of manufacturer, allows to a large amount of Production.
As a kind of preferred embodiment of the utility model, uniaxially or biaxially acceleration transducer 11 includes at least one Acoustic sensor 111, Acoustic sensor 111 include back pole plate 1111 and vibrating diaphragm 1112, and vibrating diaphragm 1112 is used for sense shock signal.
As a kind of preferred embodiment of the utility model, audio codec 6 includes a sef-adapting filter 61, from Adaptive filter is used to the audio signal converted carrying out noise cancellation and increases the audio signal after noise cancellation By force.
As a kind of preferred embodiment of the utility model, the signal output end of airtight cavity 1 is equipped with the special time-division Multiplex circuit interface, for being connect with the input terminal of time division circuit.
As a kind of preferred embodiment of the utility model, the ear belt-type apparatus that thus circuit structure is constituted can be used Hearing aid or bluetooth headset.
The foregoing is merely the utility model preferred embodiment, be not intended to limit the embodiments of the present invention and Protection scope should can appreciate that all with description of the invention and diagramatic content institute to those skilled in the art The equivalent replacement made and obviously change obtained scheme, the protection scope of the utility model should all be included in It is interior.

Claims (9)

1. the bone conduction sensor based on MEMS is set on ear belt-type apparatus, which is characterized in that including,
One closed cavity, the interior setting of the cavity:
One uniaxially or biaxially acceleration transducer, the uniaxially or biaxially acceleration transducer are placed in close to human ear portion bone Position;
One specific integrated circuit handles chip, connect with the uniaxially or biaxially acceleration transducer, the specific integrated circuit It handles chip and is equipped with vibration signal output end.
2. the bone conduction sensor according to claim 1 based on MEMS, which is characterized in that set in the cavity Empty gas or vacuum.
3. the bone conduction sensor according to claim 1 based on MEMS, which is characterized in that the osteoacusis passes It include at least one Acoustic sensor inside sensor, the Acoustic sensor includes back pole plate and vibrating diaphragm, and the vibrating diaphragm is for feeling Survey vibration signal.
4. the bone conduction sensor according to claim 1 based on MEMS, which is characterized in that the ear belt is set It is standby to use hearing aid or bluetooth headset.
5. the bone conduction sensor according to claim 1 based on MEMS, which is characterized in that described dedicated integrated Processing of circuit chip is equipped with time multiplexing circuit interface.
6. a kind of ear belt-type apparatus, which is characterized in that including bone conduction sensor described in claim 1-5 any one, also Including,
One main microphon, for sensing acoustic signals;
One auxiliary microphone is separated by set distance setting with the main microphon;
One audio codec is connect with the main microphon and auxiliary microphone;
One microcontroller connects with the signal output end of the bone conduction sensor and the signal input part of the audio codec It connects.
7. ear belt-type apparatus according to claim 6, which is characterized in that further include a time multiplexing circuit, the time-division The output end of the input interface connection of the multiplex circuit bone conduction sensor and the main microphon and the auxiliary microphone Output end, the output port of the time multiplexing circuit connects the input port of the microcontroller.
8. ear belt-type apparatus according to claim 6, which is characterized in that the audio codec includes an adaptive filter Wave device, the input terminal of the sef-adapting filter are connect with the output end of the microcontroller.
9. ear belt-type apparatus according to claim 6, which is characterized in that further include a loudspeaker, compile and solve with the audio The output end connection of code device.
CN201920289668.0U 2019-03-07 2019-03-07 Bone conduction sensor based on MEMS Active CN209627692U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920289668.0U CN209627692U (en) 2019-03-07 2019-03-07 Bone conduction sensor based on MEMS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920289668.0U CN209627692U (en) 2019-03-07 2019-03-07 Bone conduction sensor based on MEMS

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109889966A (en) * 2019-03-07 2019-06-14 钰太芯微电子科技(上海)有限公司 Bone conduction sensor based on MEMS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109889966A (en) * 2019-03-07 2019-06-14 钰太芯微电子科技(上海)有限公司 Bone conduction sensor based on MEMS
CN109889966B (en) * 2019-03-07 2024-06-14 钰太芯微电子科技(上海)有限公司 Bone conduction sensor based on micro-electromechanical system

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