CN207423124U - Self-reference collimation light path system based on polarized light beam and photoelectric autocollimator - Google Patents
Self-reference collimation light path system based on polarized light beam and photoelectric autocollimator Download PDFInfo
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- CN207423124U CN207423124U CN201721270566.1U CN201721270566U CN207423124U CN 207423124 U CN207423124 U CN 207423124U CN 201721270566 U CN201721270566 U CN 201721270566U CN 207423124 U CN207423124 U CN 207423124U
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- 230000005622 photoelectricity Effects 0.000 claims abstract description 7
- 238000005259 measurement Methods 0.000 abstract description 21
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Abstract
The utility model relates to a self-reference collimation optical path system and photoelectricity autocollimator based on polarization beam. Collimating light emitted by a light source into parallel beams and irradiating the cross reticle; the polarization beam splitter prism divides the light beam irradiated on the cross reticle into two linearly polarized light beams with polarization states vertical to each other, the linearly polarized light with the polarization direction being horizontal passes through the 1/4 wave plate and the plane reflector, then is reflected by the reference reflection surface and returns to the polarization beam splitter prism along the original path, and then is reflected by the polarization beam splitter prism to enter the receiving optical path system for imaging; linearly polarized light with the vertical polarization direction passes through the 1/4 wave plate, the window glass and the measured reflecting surface, is reflected by the measured reflecting surface, returns to the polarization beam splitter prism in the original path, and is transmitted by the polarization beam splitter prism to enter the receiving optical path system for imaging. The measured angle is calculated by using the position difference between the reflection imaging of the measured surface and the reflection imaging of the reference surface, so that the influence of the pointing change of the laser beam on the measurement result is effectively inhibited.
Description
Technical field
The utility model belongs to accurate technical field of electro-optical measurement more particularly to a kind of self-reference based on light beam is accurate
Straight light path system and photoelectric auto-collimator.
Background technology
Photoelectric auto-collimator is a kind of instrument using the measurement minute angle variation of optical autocollimating principle, can be divided into autocollimatic
Straight light path system, photoelectric receiving system and signal processing system three parts.Wherein, auto-collimation light path system is used to send and receive
Collimated light, photoelectric receiving system are used to implement the conversion of photosignal, and signal processing system is used to complete pretreatment, the mesh of signal
Demarcate the calculating of position and deflection angle.
The basic principle of optical autocollimating angle measurement is：The light that monochromatic point light source is sent after collimating optical system parallel to
Primary optical axis projects, and emergent light returns to optical system after testee reflects, and is imaged on the photosurface of photoelectric receiving system.
If the reflecting surface of testee presses backtracking perpendicular to the primary optical axis of collimating optical system, light, return light is in photoelectricity at this time
Formed image patch center is demarcated as system zero-bit on sensor；As the reflecting surface normal direction of testee and the master of optical system
When optical axis has an angle, then reflected light image patch center and system zero-bit are there are certain deviation amount, according to the substantially former of geometric optics
Reason can calculate the angle between the reflecting surface normal direction of testee and optical system primary optical axis by this offset.
Since semiconductor laser has, monochromaticjty is good, energy is strong, is easily obtained high resolution, the optics of telemeasurement
The advantages that system, therefore, monochromatic source generally uses semiconductor laser in high-precision auto-collimation system.However at present using half
Conductor laser is difficult to further improve as the angle measurement accuracy of the optical autocollimating system of light source, indeterminacy phenomenon occurs.
The major reason for causing this phenomenon is exactly that semiconductor laser beam is directed toward with jitter, and this direction jitter is by half
The luminescence mechanism of conductor laser causes.Light beam is directed toward shake and directly results in collimation image space shake, is that auto-collimation system is surveyed
The major obstacle that accuracy of measurement further improves.Therefore, how to reduce this light beam and be directed toward jitter to auto-collimation systematic survey essence
The influence of degree is the key that further improve the auto-collimation system performance based on semiconductor laser.
In addition, in auto-collimation system reflected face and distance etc. factors influence, the luminous energy that photoelectric sensor receives
Amount excursion is larger, and the dynamic range for improving photoelectric sensor therefore is the key that solve the problems, such as this.
Utility model content
The purpose of this utility model is to provide a kind of has the function of the autocollimatic straight light path system of self-reference based on light beam
System can effectively inhibit semiconductor laser beam and be directed toward influence of the shake to auto-collimating optical system, improve auto-collimation system
Angle measurement accuracy.
The technical solution of the utility model is to provide a kind of self-reference collimated light path system based on light beam,
It is characterized in that：Including light source 9, the first collimating optical system, cross-graduation plate 11, polarization splitting prism 12, tested light path
System, reference path system and receiving light path system；
Above-mentioned first collimating optical system is used for the light for sending light source 9 collimation to irradiate cross-graduation plate after collimated light beam
11；
Above-mentioned polarization splitting prism 12 mutually hangs down for the light beam after irradiation cross-graduation plate 11 to be divided into two beam polarization states
Straight linearly polarized light, wherein a branch of linearly polarized light is transmitted through becoming polarization direction after polarization splitting prism 12 as horizontal linear polarization
Light, as the directional light of the second collimating optical system in receiving light path system, another bunch polarised light is through polarization splitting prism 12
Become vertical linearly polarized light after reflection；
Above-mentioned reference path system is located in the emitting light path that polarization direction is horizontal linearly polarized light, above-mentioned tested light path
System is located in the emitting light path that polarization direction is vertical linearly polarized light；
Above-mentioned reference path system includes the quarter wave plate 4 set gradually along light path, plane mirror 3 and with reference to reflecting surface
2, polarization direction is returned for horizontal linearly polarized light after quarter wave plate 4, plane mirror 3 through being reflected with reference to reflecting surface 2 along former road
Be back to polarization splitting prism 12, between due to twice pass through quarter wave plate 4, so polarization state change 90 degree, eventually pass through polarization divide
Light prism 12 is reflected into receiving light path system imaging；
Above-mentioned tested light path system includes the quarter wave plate 4, window glass 7 and the tested reflecting surface 1 that are set gradually along light path,
Quarter wave plate 4, window glass 7 and tested reflecting surface 1 are passed through in polarization direction for vertical linearly polarized light, are reflected through tested reflecting surface 1
Backtracking polarization splitting prism 12 afterwards, between also due to twice by quarter wave plate 4, so polarization state changes 90 degree, finally
Receiving light path system imaging is transmitted by polarization splitting prism 12.
What is utilized in two-way optical system is same graticle, and after two-way optical system, final graticle exists
Two images can be obtained in photo electric imaging system, the alternate position spike of two images is calculated using image procossing and Image segmentation scheduling algorithm
Not, and using the difference tested angle is calculated.
Preferably, above-mentioned receiving light path system includes the second collimating optic lens 5 set gradually along light path and photoelectricity turns
Parallel operation part 6, above-mentioned 6 photosurface of electrooptical device are located on the focal plane of the second collimating optic lens 5, electrooptical device 6
Photosurface is located at perpendicular to optical axis, photosurface center on optical axis.
Preferably, because the collimating optical system involved in the utility model is two-dimentional system, the utility model
Electrooptical device 6 uses highly sensitive face array photoelectric sensor, such as：EMCCD or SCMOS, meanwhile, utilize highly sensitive face battle array light
Electric transducer can improve the dynamic range of measurement, can still maintain higher measurement accuracy when reflective light intensity is weaker.
Preferably, which further includes aperture 10, and above-mentioned aperture 10 is located at 9 and first collimating optics system of light source
Between system.
Preferably, the first collimating optical system includes the first collimating optic lens, and light source 9 is located at the first collimating optic lens
Focal plane on.
Preferably, light source 9 is monochromatic source 9.
The utility model, which also provides, a kind of utilizes a kind of above-mentioned self-reference collimated light path system meter based on light beam
The method for calculating tested angle, comprises the following steps：
Step 1：Adjustment makes reference image be located at the centre bit of receiving light path system photosurface with reference to the direction of reflecting surface 2
It puts；
Step 2：Cross-graduation plate 11 is irradiated after 9 emergent light of light source is collimated；
Step 3：Using polarization splitting prism 12, by the light beam after irradiating cross-graduation plate 11, to be divided into two beam polarization states mutual
Vertical linearly polarized light, wherein a branch of linearly polarized light is reflected by polarization splitting prism 12, another bunch polarised light is by polarization spectro
Prism 12 transmits；
Step 4：Adjustment is irradiated quilt after the polarization state for the linearly polarized light that polarization splitting prism 12 reflects through window glass 7
Reflecting surface 1 is surveyed, backtracking is to polarization splitting prism 12 after being reflected by tested reflecting surface 1, after being transmitted by polarization splitting prism 12,
It is collimated to be imaged in photoelectric sensor；
Make its irradiation with reference to reflecting surface 2 after adjusting the polarization state of the linearly polarized light transmitted by polarization splitting prism 12, by joining
It is collimated in photoelectricity after being reflected by polarization splitting prism 12 to polarization splitting prism 12 to examine backtracking after reflecting surface 2 reflects
Sensor is imaged；
Step 5：Utilize the alternate position spike of two images obtained in image procossing and Image segmentation algorithm calculation procedure four
Not, and using the difference tested angle is calculated.
In measurement process, if the difference in brightness of tested picture and reference image is larger, highly sensitive face battle array photoelectric sensing is utilized
The tested picture of high gain mode acquisition of device, reference image is gathered using its low gain mode.
The utility model also provides a kind of photoelectric auto-collimator, is characterized in that：Including above-mentioned based on polarised light
The self-reference collimated light path system of beam.
Before measurement angle, tested reflecting surface can be adjusted with reference to reflecting surface to parallel, specific method is adjustment ginseng
Reflecting surface is examined, until through being overlapped with reference to reflecting surface and tested reflecting surface imaging.It will be with reference to reflecting surface if failed before measurement
It is adjusted with tested reflecting surface to parallel, then records the position through referring to reflecting surface and tested reflecting surface imaging before measurement first
Difference records the two alternate position spike again after measurement, final to calculate measurement angle using alternate position spike twice.
The beneficial effects of the utility model are：
1st, the utility model calculates tested angle using the alternate position spike of tested surface catoptric imaging and plane of reference catoptric imaging, swashs
When light light beam direction changes, tested surface catoptric imaging and plane of reference catoptric imaging are mobile simultaneously, and moving direction is identical, this
Laser beam is just effectively inhibited to be directed toward influence of the variation to measurement result；
2nd, the utility model improves the letter of reception system by the use of highly sensitive face array photoelectric sensor part 6 as device is received
It makes an uproar and compares, improve the dynamic range of detection, the final use scope for improving measuring system when reflective light intensity is weaker, still maintains
Higher measurement accuracy.
Description of the drawings
Fig. 1 is the light path schematic diagram of the utility model；
Reference numeral is in figure：1- is tested reflecting surface, and 2- refers to reflecting surface, 3- plane mirrors, 4-1/4 wave plates, 5- the
Two collimating optic lens, 6- electrooptical devices, 7- window glass, the first collimating optic lens of 8-, 9- light sources, 10- aperture light
Door screen, 11- cross-graduation plates, 12- polarization splitting prisms.
Specific embodiment
The utility model is further described with specific embodiment below in conjunction with attached drawing.
It will be seen from figure 1 that the utility model has the function of the high-precision of self-reference, the autocollimatic straight light path system of high s/n ratio
System, including light source 9, aperture 10, the first collimating optic lens 8, cross-graduation plate 11, polarization splitting prism 12, tested light
Road system, reference path system and receiving light path system；This light path system can be used for photoelectric auto-collimator.
Receiving light path system includes the second collimating optic lens 5 set gradually along light path and electrooptical device 6, photoelectricity
The photosurface of switching device 6 is arranged on the focal plane of the second collimating optic lens 5, and the photosurface of electrooptical device 6 is perpendicular to light
The optical axis of system, photosurface center are located on optical axis.Wherein electrooptical device 6 uses highly sensitive face array photoelectric sensor,
Such as EMCCD or SCMOS.
Tested light path system includes the quarter wave plate 4, window glass 7 and the tested reflecting surface 1 that are set gradually along light path；With reference to
Light path system includes the quarter wave plate 4 set gradually along light path, plane mirror 3 and refers to reflecting surface 2.
Light source 9 is monochromatic source, refers to the laser etc. of semiconductor laser generation, the point light source 9 being emitted through aperture 10
In light source optical path, and on the focal plane of the first collimating optic lens 8.
The system includes the two-way collimation imaging system based on same light source 9, and the wherein first via is used to measure tested reflection
Face 1 is collimated into picture, and light path process is as follows：Point light source 9- apertures 10- the first collimating optic lens 8- cross-graduation plates
11- polarization splitting prism 12-1/4 wave plate 4- window glass 7- is tested reflecting surface 1- window glass 7-1/4 wave plate 4- polarization spectros
Prism 12- the second collimating optic lens 5- photoelectric receiving systems；Second tunnel is used to be collimated into picture, light path mistake with reference to reflecting surface 2
Journey is as follows：Point light source 9- apertures 10- the first collimating optic lens 8- cross-graduation plate 11- polarization splitting prism 12-1/4 ripples
Piece 4- plane mirrors 3- refers to reflecting surface 2- plane mirror 3-1/4 wave plate 4- polarization splitting prisms the second collimating optics of 12-
Lens 5- photoelectric receiving systems.
Measurement process is as follows：Light source 9 sends light and forms point light source after aperture 10, by the first collimating optic lens 8
It collimates as collimated light beam, irradiates cross-graduation plate 11 afterwards, then after polarization splitting prism 12, collimated light beam is divided into two
Bunch polarised light, wherein become polarization direction after a branch of transmission (corresponds to the e of birefringece crystal outgoing for horizontal linearly polarized light
Light).Another beam is to be reflected the linearly polarized light (the o light for corresponding to birefringece crystal outgoing) for becoming vertical.
Wherein, by the horizontal linear polarization light (i.e. e light) of 12 transmissive of polarization splitting prism by quarter wave plate 4, then by putting down
Backtracking after face speculum 3 and reference reflecting surface 2 reflect, again passes by quarter wave plate 4 and becomes vertical linearly polarized light afterwards
(the o light for corresponding to birefringece crystal outgoing), perpendicular linear polarization light (i.e. o light) are reflected into the second standard by polarization splitting prism 12
Directional light is imaged on the photoelectric converter photosurface of optical receiver system (ginseng by straight optical lens 5, the second collimating optic lens 5
Examine picture)；Another way, the perpendicular linear polarization light reflected by polarization splitting prism 12 (i.e. o light) after quarter wave plate 4, penetrate
Device window glass 7 is returned by tested reflecting surface 1, again passes by window glass 7 and quarter wave plate 4, become e light, transmitted afterwards
By being imaged on after polarization splitting prism 12 by the second collimating optic lens 5 on photoelectric sensor photosurface (tested picture).
Before measurement, adjustment makes reference image be located at the center of photosurface with reference to the direction of reflecting surface 2.Measurement process
In, if the difference in brightness of tested picture and reference image is larger, adopted using the high gain mode of highly sensitive face array photoelectric sensor
The tested picture of collection, reference image is gathered using its low gain mode.Pass through tested alternate position spike and light between picture and reference image during measurement
Systematic parameter is learned, tested angle is calculated.
Claims (8)
1. a kind of self-reference collimated light path system based on light beam, it is characterised in that：Including light source (9), the first collimated light
System, cross-graduation plate (11), polarization splitting prism (12), tested light path system, reference path system and receiving light path system
System；
First collimating optical system is used for the light for sending light source (9) collimation to irradiate cross-graduation plate after collimated light beam
(11)；
The polarization splitting prism (12) is mutually hung down for the light beam after irradiation cross-graduation plate (11) to be divided into two beam polarization states
Straight linearly polarized light, wherein a branch of linearly polarized light is inclined for horizontal line transmitted through polarization direction is become after polarization splitting prism (12)
Shake light, and another bunch polarised light becomes vertical linearly polarized light after polarization splitting prism (12) reflection；
The reference path system is located in the emitting light path that polarization direction is horizontal linearly polarized light, the tested light path system
Positioned at polarization direction in the emitting light path of vertical linearly polarized light；
The reference path system includes the quarter wave plate (4) set gradually along light path, plane mirror (3) and with reference to reflecting surface
(2), polarization direction is reflected for horizontal linearly polarized light by quarter wave plate (4), plane mirror (3) by with reference to reflecting surface (2)
Along backtracking to polarization splitting prism (12), receiving light path system imaging is reflected into using polarization splitting prism (12)；
The tested light path system includes the quarter wave plate (4), window glass (7) and the tested reflecting surface that are set gradually along light path
(1), quarter wave plate (4), window glass (7) and tested reflecting surface (1) are passed through in polarization direction for vertical linearly polarized light, through tested
Backtracking polarization splitting prism (12) after reflecting surface (1) reflection, reception light is transmitted into using polarization splitting prism (12)
Road system imaging.
2. a kind of self-reference collimated light path system based on light beam according to claim 1, it is characterised in that：It is described
Receiving light path system includes the second collimating optic lens (5) set gradually along light path and electrooptical device (6), the photoelectricity
Switching device (6) photosurface is located on the focal plane of the second collimating optic lens (5), and the photosurface of electrooptical device (6) is vertical
In optical axis, photosurface center is located on optical axis.
3. a kind of self-reference collimated light path system based on light beam according to claim 2, it is characterised in that：Photoelectricity
Switching device (6) uses highly sensitive face array photoelectric sensor.
4. a kind of self-reference collimated light path system based on light beam according to claim 3, it is characterised in that：It is described
Highly sensitive face array photoelectric sensor is EMCCD or SCMOS.
5. a kind of self-reference collimated light path system based on light beam according to claim 4, it is characterised in that：Also wrap
Aperture (10) is included, the aperture (10) is located between light source (9) and the first collimating optical system.
6. a kind of self-reference collimated light path system based on light beam according to claim 5, it is characterised in that：First
Collimating optical system includes the first collimating optic lens (8), and light source (9) is located on the focal plane of the first collimating optic lens (8).
7. according to a kind of any self-reference collimated light path systems based on light beam of claim 1-6, feature exists
In：Light source (9) is monochromatic source.
8. a kind of photoelectric auto-collimator, it is characterised in that：Including any the joining certainly based on light beam of claim 1-7
Examine collimated light path system.
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| CN201721270566.1U CN207423124U (en) | 2017-09-29 | 2017-09-29 | Self-reference collimation light path system based on polarized light beam and photoelectric autocollimator |
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| CN201721270566.1U CN207423124U (en) | 2017-09-29 | 2017-09-29 | Self-reference collimation light path system based on polarized light beam and photoelectric autocollimator |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643055A (en) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | Self-reference collimation light path system based on polarized light beam and method for calculating measured angle |
| CN112083578A (en) * | 2020-08-26 | 2020-12-15 | 中国科学院西安光学精密机械研究所 | Target simulator for image surface docking of photoelectric equipment, debugging system and method |
| CN112285939A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Auto-collimation installation and adjustment system and method of infrared optical-mechanical system |
| WO2024178890A1 (en) * | 2023-02-28 | 2024-09-06 | 董仕 | Non-closed optical path wavefront-division interferometer based on planar lightwave circuit design |
-
2017
- 2017-09-29 CN CN201721270566.1U patent/CN207423124U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643055A (en) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | Self-reference collimation light path system based on polarized light beam and method for calculating measured angle |
| CN112083578A (en) * | 2020-08-26 | 2020-12-15 | 中国科学院西安光学精密机械研究所 | Target simulator for image surface docking of photoelectric equipment, debugging system and method |
| CN112083578B (en) * | 2020-08-26 | 2021-06-22 | 中国科学院西安光学精密机械研究所 | Target simulator for image surface docking of photoelectric equipment, debugging system and method |
| CN112285939A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Auto-collimation installation and adjustment system and method of infrared optical-mechanical system |
| WO2024178890A1 (en) * | 2023-02-28 | 2024-09-06 | 董仕 | Non-closed optical path wavefront-division interferometer based on planar lightwave circuit design |
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