CN206960658U - A kind of two-dimension scanning laser radar of solid-state - Google Patents

A kind of two-dimension scanning laser radar of solid-state Download PDF

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Publication number
CN206960658U
CN206960658U CN201720971468.4U CN201720971468U CN206960658U CN 206960658 U CN206960658 U CN 206960658U CN 201720971468 U CN201720971468 U CN 201720971468U CN 206960658 U CN206960658 U CN 206960658U
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laser
galvanometer
speculum
module
solid
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张莉均
洪晓彬
苏伟兴
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Guangzhou dug Technology Co., Ltd.
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Guangzhou Cnc Equipment Co Ltd
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Abstract

The utility model discloses a kind of two-dimension scanning laser radar of solid-state, including control process module and connected laser emitting module and laser pick-off module;Laser emitting module includes laser, collimating mirror and galvanometer, and the exploring laser light beam that laser is launched is collimated on galvanometer by the collimating mirror, and exploring laser light beam is launched by galvanometer with different angle;Laser pick-off module includes the first speculum, galvanometer, receiving telescope and photo-detector, and from the return laser beam reflected by target object surface, after the first speculum reflexes to galvanometer, return laser beam incides receiving telescope with fixed-direction;Control process module, is controlled and perceives to the working condition of the laser, galvanometer and photo-detector and the analysis that is for data processing.The utility model had not only been used as scanning device using MEMS galvanometers but also had been used as receiving device, is simplified structure, cost is reduced, without being synchronized to the posture of scanning device and receiving device.

Description

A kind of two-dimension scanning laser radar of solid-state
Technical field
It the utility model is related to laser radar field, the two-dimension scanning laser radar of particularly a kind of solid-state.
Background technology
Laser radar is a kind of to carry out the characteristic quantities such as the position of detecting objects body, speed, Angle Position to launch laser beam Radar system, its operation principle are to launch laser beam to target object, then receive the laser reflected from target object and return Ripple and after being compared and handle with transmitting information, obtains target object for information about, as target object range information with And target object angle information, so as to being detected, being tracked and being identified to target object.
In the scan mode of laser radar, existing laser radar is required for sweeping to realize using mechanical gyro unit Retouch, due to factors such as structure, technique limitations, larger using the laser radar volume of mechanical gyro unit, sweep speed is relatively low, right Laser radar displacement state is also more sensitive.
Utility model content
The laser radar volume that existing machinery rotates is big, sweep speed is low, to displacement in order to overcome for the utility model A kind of the problems such as sensitive, there is provided new laser radar.
Realize that above-mentioned purpose the technical solution of the utility model is, a kind of two-dimension scanning laser radar of solid-state, including control Processing module processed and connected laser emitting module and laser pick-off module;Laser emitting module includes laser, collimation The exploring laser light beam that laser is launched is collimated on galvanometer by mirror and galvanometer, the collimating mirror, and exploring laser light beam is by galvanometer with not Gone out with angular emission;Laser pick-off module includes the first speculum, galvanometer, receiving telescope and photo-detector, from by target The return laser beam that body surface reflects, after the first speculum reflexes to galvanometer, return laser beam is incided with fixed-direction Receiving telescope;Control process module, the working condition of the laser, galvanometer and photo-detector is controlled and perceived simultaneously Be for data processing analysis.
Preferably, the receiving telescope is one kind of Kepler telescope, Cassegrain telescope or other telescopes; The photo-detector is avalanche photodide, photomultiplier, semiconductor photo diode, photoelectric coupled device, complementary gold Belong to one kind of oxide semiconductor or electric charge injector.
Preferably, the laser pick-off module further comprises the second speculum, is reflected from by target object surface Return laser beam, after the first speculum reflexes to galvanometer, through in vibration mirror reflected to the second speculum, will be swashed by the second speculum Optical echo incides receiving telescope with fixed-direction.
Preferably, first speculum and the second speculum are divided into the both sides of galvanometer.
Preferably, the face type of first speculum and the second speculum be free form surface, sphere, aspherical, plane or Quadric one kind;First speculum causes the return laser beam warp that different angle is returned on target object reflection scanning direction After MEMS vibration mirror reflecteds, the second speculum or receiving telescope are entered with same direction.
Preferably, the collimating mirror includes the first collimating mirror and the second collimating mirror, and exploring laser light Shu Yici is accurate by first Galvanometer is incided after straight mirror and the second collimating mirror collimation and enters horizontal deflection, realizes that exploring laser light beam scans to target object;Described One collimating mirror is used to collimate the laser beam fast axle or carries out pre-collimated to laser beam;Second collimating mirror be used for pair The laser beam slow axis is collimated or laser beam is collimated.
Preferably, first collimating mirror and the second collimating mirror are cylindrical mirror or collimation lens.
Preferably, the laser emission element and laser pick-off unit share the galvanometer, are shaken described in exploring laser light Shu Jing Mirror reflection scanning target object, return laser beam return receiving telescope through the vibration mirror reflected;To be multiplexed the MEMS galvanometers, collimation Later exploring laser light beam is incided on MEMS galvanometers, and the outgoing exploring laser light beam after the deflection of MEMS galvanometers incides target On object, incided by the return laser beam that target object reflection or diffusing reflection are returned on the first speculum, the first speculum will swash Optical echo reflexes to MEMS galvanometers, is reflected into receiving telescope through the second speculum and converges on photo-detector.
Preferably, sent by the incident direction of the return laser beam after the receiving lens of laser pick-off module with laser The exit direction of exploring laser light beam is parallel to each other.
Preferably, the two-dimension scanning laser radar of solid-state also includes filter plate, and it is arranged at the receiving telescope and light Between detector, for being filtered processing to the return laser beam, the return laser beam passes through receiving telescope and filter successively The convergence of mating plate, after filtering, received by photo-detector, the electric signal after photo-detector conversion is by control process resume module.
Preferably, the two-dimension scanning laser radar of solid-state also includes the output module being connected with control process module, works as control After processing module processing integration measurement data processed and transmit to the output module, by output module output data.
Preferably, the control process module can control the power of laser, go out light frequency, pulsewidth and MEMS galvanometers Vibration angle and vibration frequency etc.;The simultaneously responsible scan data integrated processing photo-detector and gathered of control process module is simultaneously right Scan data is calculated, and calculates the states such as target object location, speed, posture and rotation, calculates target object letter Transmit after breath to output module and shown data output by output module.
Preferably, the galvanometer is MEMS galvanometers, for entering horizontal deflection to the exploring laser light beam by collimation, realizes laser Beam scanning, its range of scanned frequencies are 1kHz-20kHz;In order to make full use of the reflecting surface effective aperture of MEMS galvanometers, initial shape Exploring laser light beam is not before when ensureing that galvanometer deflects into maximum deflection angle, reflection laser beam is blocked in itself by laser radar during state Put, incided with small incident on MEMS galvanometers;Incoming laser beam on galvanometer is more than or waited with shoot laser beam angle It is optimal selection in 10 degree.
Preferably, when the control process module calculates the transmitting of the exploring laser light beam by time-of-flight method principle Between the information such as position of target object can be obtained with time difference of the reception time of the return laser beam;Set exploring laser light beam Launch time is T0, and the return laser beam reception time is T1, light velocity C, the distance between target object and laser radar D, is then controlled Processing module processed gets T0 and T1, can be obtained according to formula D=0.5 × C × (T1-T0), target object and laser radar it Between distance;Scanning angle information is aided with according to the distance, can obtain the information such as surface configuration, the posture of target object.
The utility model not only as scanning device but also had been used as receiving device using MEMS galvanometers, and simple in construction, cost is cheap, Without being synchronized to the posture of scanning device and receiving device, technical difficulty is low;Laser radar is without mechanical gyro unit, body Product is small, and scanning stabilization is high;Laser radar can be controlled by control process module, fast response time, will not be revolved by machinery The limitation of rotation member speed, sweep speed are quicker;Rotary speed of the scanning resolution independent of rotational structure, therefore can Freely to control the angular resolution of scanning direction, accuracy is improved.
Brief description of the drawings
Fig. 1 is preferred embodiment modular structure block diagram of the present utility model;
Fig. 2 is preferred embodiment general structure block diagram of the present utility model;
Fig. 3 is that preferred embodiment multiplexing MEMS galvanometer light paths of the present utility model move towards schematic diagram;
Fig. 4 is another embodiment general structure block diagram of the present utility model.
In figure, control process module 100, laser emitting module 200, laser 201, the first collimating mirror 202, the second collimation Mirror 203, MEMS galvanometers 300, laser pick-off module 400, the first speculum 401, the second speculum 402, receiving telescope 403, Photo-detector 404, output module 500, filter plate 600.
Embodiment
In the present embodiment, reference picture 1, Fig. 2 and Fig. 3, a kind of two-dimension scanning laser radar of solid-state, including control process mould Block 100 and connected laser emitting module 200 and laser pick-off module 400;Laser emitting module 200 includes laser The exploring laser light beam that laser 201 is launched is collimated on galvanometer by the 201st, collimating mirror and galvanometer, the collimating mirror, exploring laser light beam Launched by galvanometer with different angle;Laser pick-off module 400 includes the first speculum 401, galvanometer, receiving telescope 403 With photo-detector 404, from the return laser beam reflected by target object surface, after the first speculum 401 reflexes to galvanometer, Return laser beam incides receiving telescope 403 with fixed-direction;Control process module 100, to the laser 201, galvanometer and The working condition of photo-detector 404 is controlled and perceived and the analysis that is for data processing.
In the preferred embodiment, receiving telescope 403 uses Kepler telescope, and laser 201 is used as outgoing light source, For laser diode, launch exploring laser light beam and incide the first collimating mirror 202 and the second collimating mirror 203, exploring laser light immediately Beam incides galvanometer after passing sequentially through the first collimating mirror 202 and the second collimating mirror 203 collimation and deflects into different directions through galvanometer, Realize that exploring laser light beam is scanned to target object, the first collimating mirror and the second collimating mirror are cylindrical mirror, the first collimating mirror The fast axle of 202 pairs of exploring laser light beams collimates, and the second collimating mirror 203 collimates to the slow axis of exploring laser light beam;In order to fill Point using the reflecting surface of MEMS galvanometers 300 bore, exploring laser light beam is with less angle during original state, in order to ensure through cross to shake Exploring laser light beam after mirror 300 deflects is not blocked by laser radar itself, and this preferred embodiment uses galvanometer mechanical deflection angle For ± 20 °, therefore, optimized incidence of the exploring laser light beam on galvanometer is about 25 °~30 ° during original state;Wherein, it is above-mentioned first Beginning state refers to the inactive state that galvanometer deflection angle is 0 °.
Scanning probe laser beam forms return laser beam after being reflected by target object and is incident to the first speculum 401, and first is anti- Penetrate mirror 401 and return laser beam is reflexed into MEMS galvanometers 300, the laser that MEMS galvanometers 300 then reflect to the first speculum 401 Echo enters horizontal deflection, and the return laser beam after deflection is with incident second speculum in fixed direction, and after the reflection of the second speculum Into Kepler telescope, exploring laser light beam is parallel with return laser beam and relative position is constant.
In the preferred embodiment, reference picture 3, double reflection mirror, the first speculum 401 and the second speculum 402 are set It is used in conjunction with each other with galvanometer 300, enabling the return laser beam and exploring laser light beam for inciding photo-detector 404 are parallel to each other But mutually stagger certain spacing, interference of the exploring laser light beam with return laser beam generation locus is avoided both to be reduced with overlapping The vertical installation difficulty of laser radar group, and rationally solve the space layout conflict inside laser radar, improve photo-detector 404 Anti- light disturbance ability.
Laser emitting module 200 and laser pick-off module 400, which are realized, shares MEMS galvanometers 300, improves MEMS galvanometers 300 Utilization rate, production cost is reduced, its volume is reduced, because the first speculum 401 and the second speculum are static in the present embodiment It is motionless, so laser radar need not synchronize in working condition to laser emitting module 200 and laser pick-off module 400, Greatly reduce technical difficulty.
It is arranged at the filter plate 600 between receiving telescope 403 and photo-detector 404, for being hoped by Kepler Return laser beam after remote mirror convergence is filtered processing, and after return laser beam filtering, photo-detector 404 receives laser echo signal simultaneously Electric signal is converted into, the electric signal after photo-detector 404 converts is handled by control process module 100;Control process module 100 are responsible for integrating the scan data that processing photo-detector 404 is gathered and scan data are calculated, and calculate target object The states such as position, speed, posture and rotation, transmitted after calculating information on target object to output module 500 by output module 500 show data output;Simultaneously control process module 100 control laser 201 power, go out light frequency, pulsewidth and The vibration angle of MEMS galvanometers 300 and vibration frequency etc..
As another simplified embodiment, reference picture 1 and Fig. 4, laser emitting module 200 include laser 201, collimating mirror and The exploring laser light beam that laser 201 is launched is collimated on galvanometer by galvanometer, the collimating mirror, and exploring laser light beam is by galvanometer with difference Angular emission is gone out;Laser pick-off module 400 includes the first speculum 401, galvanometer, Kepler telescope and photo-detector 404, From the return laser beam reflected by target object surface, after the first speculum 401 reflexes to galvanometer, return laser beam is with fixation Incide Kepler telescope in direction;Control process module 100, to the work of the laser 201, galvanometer and photo-detector 404 It is controlled and perceives as state and the analysis that is for data processing.
As embodiment is simplified, set according to the space layout of solid-state laser radar and remove the second speculum, scanning probe Laser beam forms return laser beam after being reflected by target object and is incident to the first speculum 401, and the first speculum 401 is by return laser beam MEMS galvanometers 300 are reflexed to, the return laser beam that MEMS galvanometers 300 then reflect to the first speculum 401 enters horizontal deflection, deflection Return laser beam afterwards enters Kepler telescope so that fixed direction is incident;It is arranged at receiving telescope 403 and photo-detector 404 Between filter plate 600, be filtered processing to the return laser beam after Kepler telescope converges, return laser beam filtering Afterwards, photo-detector 404 receives laser echo signal and is converted into electric signal, photo-detector 404 convert after electric signal by Control process module 100 is handled;The scan data that the responsible integration processing photo-detector 404 of control process module 100 is gathered is simultaneously Scan data is calculated, the states such as target object location, speed, posture and rotation is calculated, calculates target object Transmit after information to output module 500 and shown data output by output module;Control process module 100 controls laser simultaneously 201 power, go out light frequency, the vibration angle of pulsewidth and MEMS galvanometers 300 and vibration frequency etc..
The utility model is described in detail above, it is described above, only the preferred embodiment of the utility model and , it is when the utility model practical range can not be limited, i.e., all to make equivalent changes and modifications according to the application scope, it all should still belong to this In utility model covering scope.

Claims (10)

1. a kind of two-dimension scanning laser radar of solid-state, including control process module and connected laser emitting module and swash Optical Receivers;Characterized in that,
Laser emitting module includes laser, collimating mirror and galvanometer, the exploring laser light Shu Zhun that the collimating mirror launches laser Until on galvanometer, exploring laser light beam is launched by galvanometer with different angle;
Laser pick-off module includes the first speculum, galvanometer, receiving telescope and photo-detector, is reflected from by target object surface The return laser beam returned, after the first speculum reflexes to galvanometer, return laser beam incides receiving telescope with fixed-direction;
Control process module, the working condition of the laser, galvanometer and photo-detector is controlled and perceived and makees data Treatment Analysis.
A kind of 2. two-dimension scanning laser radar of solid-state according to claim 1, it is characterised in that the laser pick-off mould Block further comprises the second speculum, from the return laser beam reflected by target object surface, is reflexed to through the first speculum After galvanometer, through in vibration mirror reflected to the second speculum, return laser beam being incided into reception with fixed-direction by the second speculum and hoped Remote mirror.
A kind of 3. two-dimension scanning laser radar of solid-state according to claim 2, it is characterised in that first speculum The both sides of galvanometer are divided into the second speculum.
4. the two-dimension scanning laser radar of a kind of solid-state according to claim 1, it is characterised in that the collimating mirror includes First collimating mirror and the second collimating mirror, exploring laser light Shu Yici is incided after the first collimating mirror and the second collimating mirror collimation to shake Mirror enters horizontal deflection, realizes that exploring laser light beam scans to target object.
A kind of 5. two-dimension scanning laser radar of solid-state according to claim 4, it is characterised in that first collimating mirror It is cylindrical mirror or collimation lens with the second collimating mirror.
A kind of 6. two-dimension scanning laser radar of solid-state according to claim 1, it is characterised in that the Laser emission list Member and laser pick-off unit share the galvanometer, and vibration mirror reflected described in exploring laser light Shu Jing scans target object, return laser beam warp The vibration mirror reflected returns receiving telescope.
7. the two-dimension scanning laser radar of a kind of solid-state according to claim 1, it is characterised in that pass through laser pick-off mould The exit direction for the exploring laser light beam that the incident direction of return laser beam after the receiving lens of block is sent with laser is parallel to each other.
A kind of 8. two-dimension scanning laser radar of solid-state according to claim 1, it is characterised in that also including filter plate, It is arranged between the receiving telescope and photo-detector, and the return laser beam is successively by receiving telescope and optical filter Assemble, after filtering, received by photo-detector, the electric signal after photo-detector conversion is by control process resume module.
A kind of 9. two-dimension scanning laser radar of solid-state according to claim 1, it is characterised in that also include with control The output module of module connection is managed, after control process resume module integrates measurement data and is transmitted to the output module, by Output module output data.
A kind of 10. two-dimension scanning laser radar of solid-state according to any one of claim 1-9, it is characterised in that institute It is MEMS galvanometers to state galvanometer.
CN201720971468.4U 2017-08-05 2017-08-05 A kind of two-dimension scanning laser radar of solid-state Active CN206960658U (en)

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Cited By (12)

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CN107272014A (en) * 2017-08-05 2017-10-20 广州市杜格数控设备有限公司 The two-dimension scanning laser radar and its scan method of a kind of solid-state
CN108627813A (en) * 2018-08-13 2018-10-09 北京经纬恒润科技有限公司 A kind of laser radar
CN108710118A (en) * 2018-08-08 2018-10-26 北京大汉正源科技有限公司 A kind of laser radar
CN109100733A (en) * 2018-07-05 2018-12-28 南京先进激光技术研究院 Laser radar apparatus error detecting facility, method and device
CN109270515A (en) * 2018-11-29 2019-01-25 北京理工大学 Coaxially receive and dispatch scanning laser radar in variable sweep region
CN109490908A (en) * 2018-11-07 2019-03-19 深圳市微觉未来科技有限公司 A kind of Novel wire scanning laser radar and scan method
CN110068831A (en) * 2019-04-02 2019-07-30 深圳市速腾聚创科技有限公司 Glisten radar and its emitter and detection method
CN110333511A (en) * 2019-07-22 2019-10-15 西安知微传感技术有限公司 A kind of transmitting-receiving synchronization laser radar optical system
CN110927730A (en) * 2018-09-04 2020-03-27 现代摩比斯株式会社 Laser radar sensing device
CN111562587A (en) * 2019-02-14 2020-08-21 宁波舜宇车载光学技术有限公司 Radar device and transmitting terminal thereof
CN112034486A (en) * 2019-05-17 2020-12-04 华为技术有限公司 Laser radar and control method of laser radar
CN113567962A (en) * 2020-04-10 2021-10-29 上海禾赛科技有限公司 Fault monitoring method for resonant device and laser radar

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107272014B (en) * 2017-08-05 2023-12-12 广州市杜格科技有限公司 Solid two-dimensional scanning laser radar and scanning method thereof
CN107272014A (en) * 2017-08-05 2017-10-20 广州市杜格数控设备有限公司 The two-dimension scanning laser radar and its scan method of a kind of solid-state
CN109100733A (en) * 2018-07-05 2018-12-28 南京先进激光技术研究院 Laser radar apparatus error detecting facility, method and device
CN108710118A (en) * 2018-08-08 2018-10-26 北京大汉正源科技有限公司 A kind of laser radar
CN108627813A (en) * 2018-08-13 2018-10-09 北京经纬恒润科技有限公司 A kind of laser radar
CN113702984A (en) * 2018-09-04 2021-11-26 现代摩比斯株式会社 Laser radar sensing device
US12130385B2 (en) 2018-09-04 2024-10-29 Hyundai Mobis Co., Ltd. Lidar sensing device including a scanner reflector
CN110927730A (en) * 2018-09-04 2020-03-27 现代摩比斯株式会社 Laser radar sensing device
US11835654B2 (en) 2018-09-04 2023-12-05 Hyundai Mobis Co., Ltd. Lidar sensing device including a light source device integrated with a scanner reflector as a single optical module
CN109490908A (en) * 2018-11-07 2019-03-19 深圳市微觉未来科技有限公司 A kind of Novel wire scanning laser radar and scan method
CN109270515A (en) * 2018-11-29 2019-01-25 北京理工大学 Coaxially receive and dispatch scanning laser radar in variable sweep region
CN109270515B (en) * 2018-11-29 2020-06-16 北京理工大学 Variable scanning area coaxial receiving and transmitting scanning laser radar
CN111562587A (en) * 2019-02-14 2020-08-21 宁波舜宇车载光学技术有限公司 Radar device and transmitting terminal thereof
CN111562587B (en) * 2019-02-14 2023-12-05 宁波舜宇车载光学技术有限公司 Radar device and transmitting end thereof
CN110068831A (en) * 2019-04-02 2019-07-30 深圳市速腾聚创科技有限公司 Glisten radar and its emitter and detection method
CN112034486B (en) * 2019-05-17 2022-08-26 华为技术有限公司 Laser radar and control method of laser radar
CN112034486A (en) * 2019-05-17 2020-12-04 华为技术有限公司 Laser radar and control method of laser radar
CN110333511B (en) * 2019-07-22 2021-10-22 西安知微传感技术有限公司 Transmit-receive synchronous laser radar optical system
CN110333511A (en) * 2019-07-22 2019-10-15 西安知微传感技术有限公司 A kind of transmitting-receiving synchronization laser radar optical system
CN113567962A (en) * 2020-04-10 2021-10-29 上海禾赛科技有限公司 Fault monitoring method for resonant device and laser radar

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