CN206015081U - Organic evaporating source for electric resistor heating type evaporation coating machine - Google Patents
Organic evaporating source for electric resistor heating type evaporation coating machine Download PDFInfo
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- CN206015081U CN206015081U CN201621107078.4U CN201621107078U CN206015081U CN 206015081 U CN206015081 U CN 206015081U CN 201621107078 U CN201621107078 U CN 201621107078U CN 206015081 U CN206015081 U CN 206015081U
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- heater
- coating machine
- organic evaporating
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- plate
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Abstract
The utility model provides a kind of organic evaporating source for electric resistor heating type evaporation coating machine, include evaporation source baffle plate from top to bottom successively, heat-preserving cover plate, insulation isolation body of heater, upper supporting plate, lower carrier plate, support column, mounting flange, rotation magnetic fluid, oscillating cylinder, the mounting flange is also associated with threading inclined tube, the threading inclined tube is connected with glass sintering joint, supporting-core and heating ceramic pipe are provided with the insulation isolation body of heater, silica crucible is provided with the heating ceramic pipe, stainless steel catch is provided with around the evaporation source mouth of the insulation isolation body of heater.As can be seen here, new organic evaporating source of the present utility model substantially improves the deficiency in traditional organic evaporating source, especially heating and thermal insulation, adjustable angle, height adjustable, temperature-controllable, compact conformation, high-adaptability, in place of economical and practical grade many merits are bright spot of the present utility model.
Description
Technical field
The utility model is related to a kind of organic evaporating source for being applied to vacuum vapor plating field, more particularly, to a kind of use
Organic evaporating source in electric resistor heating type evaporation coating machine.
Background technology
In vacuum vapor plating industry, resistance-type heating evaporation plated film is most widely used one kind, and for heating
For organic material, organic evaporating device is that one of part of most critical, especially internal structure design are on evaporation equipment
The no key for rationally becoming evaporation coating quality.Traditional organic evaporating source shortcoming has following several respects：
1st, the organic matter that evaporation source oral area does not have Insulation, evaporation is easy in mouth deposition, the material of mouth deposition
Be easy to be taken on evaporation substrate by steam, and the too high generation materials from spattering of local temperature is likely to during heating,
So as to have impact on the performance of film forming.Most representative evaporation source structure, it are the patents that LG Electronics Inc. delivers
200410056013 organic film evaporation sources, its core content are to have installed heat insulation barrier layer, heat-insulation layer etc. additional in evaporation source oral area, with
The temperature for improving oral area prevents crucible mouth deposition.This structure improves the temperature of evaporation source upper oral part to a certain extent, subtracts
Probability of the material in crucible mouth deposition is lacked, but the design oral area of this structure is due to without heat supplement, being whole steaming
The heat that rises scatters and disappears most fast position, in theory it is difficult to ensure that crucible oral temperatures not less than bottom material temperature, therefore without
Method avoids crucible upper oral part material completely in the deposition of oral area, and the structure design of its evaporation source oral area insulation is also relatively
Complicated.
2nd, the evaporation bicker degree in traditional organic evaporating source is non-adjustable.Most of organic evaporating sources are directly solid with screw with cavity
Determine, above the device without adjustment angle, it is impossible to make evaporation mouth just to top-side substrate, the utilization rate of organic material is dropped significantly
Low, and be deposited with efficiency be decreased obviously, even if being fabricated to the vapor deposition source with certain angle, but can not realize arbitrarily angled
Adjustment, not only increase cost, installation and maintenance are also inconvenient.
3rd, traditional organic evaporating source temperature is uncontrollable, and the utility model adopts PID temperature controls, controllable temperature+- 0.5 Celsius
Degree.
4th, mouth baffle plate and evaporation source are Split type structure to traditional organic evaporating in a steady stream, and cavity perforate complexity, installation are inconvenient.
5th, traditional organic evaporating volume source is excessive, and same within the chamber can only fill 3-4 evaporation source, and cham-ber floor utilizes area
Little.
Utility model content
For numerous shortcoming and defect in traditional organic evaporating source, the utility model provides a kind of for electric resistor heating type
The organic evaporating source of evaporation coating machine, its first purpose is to realize the long-time heat preservation of evaporation source mouth, it is ensured that source mouth temperature with
Internal temperature is identical, realizes effectively being deposited with；Second purpose is to realize that all evapn source mouth, just to top-side substrate platform, improves material
Utilization rate and evaporation efficiency；3rd purpose is to realize evaporation temperature real-time monitoring, make evaporating temperature identical with monitoring temperature and
Temperature-controllable；4th purpose is evaporation source is made of one with source mouth baffle plate, and overall volume tries one's best reduction improving coating machine
Well floor utilization rate.
For realizing that first purpose, the silica crucible of evaporation source mouth and the heater with pottery are provided entirely in body of heater
Inside, described body of heater shield shell for the insulation of evaporation source, and silica crucible all sinks to heating ceramic core inner, realizes overall
Heating.Blocked with stainless steel catch around evaporation source mouth, that is, avoid pollution and achieve insulation.
For realizing second purpose, evaporation source Proper Design is into positive and negative 45 degree of regulatory functions.The body of heater is directly installed on
On adjustable support plate, 45 degree of U-shaped holes on adjustable support plate, are provided with, installation are hinged with lower carrier plate, rotate upper supporting plate, you can realize that angle is adjusted
Section, so that evaporation source mouth is just to chip bench.
For realizing that the 3rd purpose, the utility model adopt PID temperature control techniques, temperature sensor directly to connect with crucible bottom
Touch, realize that real time temperature is measured, temperature control is carried out according to temperature level, temperature controlling range+- 0.5 degree Celsius within.
For realizing that the 4th purpose, baffle plate rotation are controlled using SMC oscillating cylinders, damper shaft is directly worn from bottom of furnace body
Go out, body of heater is stretched out on top, axle adopts magnet fluid sealing, lead to adopt glass frit seal device with body of heater installing plate, it is ensured that
Can use under high temperature high vacuum.Can take various forms with coating machine cavity mounting flange, such as KF flanges, CF flanges also may be used
Customization makes installation dimension as little as possible, and evaporation source quantity is installed in increase, and common coating machine can only at most install 4, and this practicality
New more than 10 organic evaporating sources are installed.
Its concrete technical scheme is as described below：
A kind of organic evaporating source for electric resistor heating type evaporation coating machine, include successively from top to bottom evaporation source baffle plate,
Heat-preserving cover plate, insulation isolation body of heater, upper supporting plate, lower carrier plate, support column, mounting flange, rotation magnetic fluid, oscillating cylinder, described
Mounting flange is also associated with threading inclined tube, and the threading inclined tube is connected with glass sintering joint, in the insulation isolation body of heater
Supporting-core and heating ceramic pipe is provided with, silica crucible in the heating ceramic pipe, is provided with, the insulation completely cuts off the steaming of body of heater
Rise stainless steel catch is provided with around mouth.
The insulation isolation body of heater is directly installed on the adjustable support plate of upper supporting plate, is provided with 45 degree of U on the adjustable support plate
Type groove, the U-type groove are hinged installation with lower carrier plate, and the upper supporting plate is used for the angular adjustment for realizing the U-type groove, so that steaming
Mouth rise just to chip bench.
The organic evaporating source adopts PID temperature control techniques, silica crucible bottom to be connected with temperature sensor, realizes temperature in real time
Degree measurement, carries out temperature control according to temperature level, temperature controlling range+- 0.5 degree Celsius within.
The rotation of the evaporation source baffle plate is controlled using oscillating cylinder, and the damper shaft of the evaporation source baffle plate is directly from insulation
The bottom of isolation body of heater passes, and insulation isolation body of heater is stretched out on top, and damper shaft adopts magnetic current with the installing plate of insulation isolation body of heater
Body is sealed, and the lead of the evaporation source baffle plate adopts glass frit seal device.
The mounting flange is connected with coating machine cavity, and is sealed with sealing ring.
3 support columns are provided with above the mounting flange, and the lower carrier plate is directly anchored on 3 support columns, energy
Enough adjustment distances up and down, are provided with two holes on the lower carrier plate, one of hole is used for fixing, and another hole is used for adjusting
Lock after the angle of upper supporting plate.
The heating ceramic pipe is the ceramic body that inside is wound with heater strip, is fixed on insulation isolation body of heater by supporting-core
Interior；The supporting-core is elastic part, and which is contacted with silica crucible immediately above, and the supporting-core can be adjusted up and down
Highly, so that silica crucible is moved up and down, and then the position most beneficial for evaporation is adjusted to.
The temperature sensor adopts thermocouple, the thermocouple contact head through supporting-core top surface directly with quartzy earthenware
Crucible is contacted, and is conducive to real time temperature measurement.
One end of the threading inclined tube is welded with mounting flange, and the other end is provided with glass sintering joint, heater strip and heat
Galvanic couple line is directly passed from threading inclined tube, is connected on glass sintering joint.
The damper shaft is made of one directly through insulation isolation body of heater bottom surface and with bottom surface, is used below the damper shaft
Universal joint is connected to lower carrier plate.
As can be seen here, the new organic evaporating source for electric resistor heating type evaporation coating machine of the present utility model substantially improves
The deficiency in traditional organic evaporating source, especially heating and thermal insulation, adjustable angle, height adjustable, temperature-controllable, compact conformation are high
Adaptability, in place of economical and practical grade many merits are bright spot of the present utility model.
Description of the drawings
Fig. 1 is the front view of a specific embodiment of the present utility model；
Fig. 2 is the sectional view in the organic evaporating source of Fig. 1；
Reference implication in figure：1st, evaporation source baffle plate；2nd, heat-preserving cover plate；3rd, insulation isolation body of heater；4th, upper supporting plate；5th, under
Support plate；6th, support column；7th, mounting flange；8th, threading inclined tube；9th, glass sintering joint；10th, magnetic fluid is rotated；11st, oscillating cylinder；
12nd, supporting-core；13rd, heating ceramic pipe；14th, universal joint；15th, screw is pluged with molten metal in fastening.
Specific embodiment
Specific introduction is done below in conjunction with accompanying drawing to the utility model with example is embodied as.
As depicted in figs. 1 and 2, mounting flange 7 is connected with coating machine cavity, is sealed with sealing ring, and remaining parts all collect
In on mounting flange 7, concentrate face size there was only 20 millimeters, so far, do not have other organic evaporating sources accomplish
So little size, so as to realize that multi-source is installed.
The parts such as insulation isolation body of heater 3, upper supporting plate 4, lower carrier plate 5 are supported with 3 support columns 6 above mounting flange 7.Institute
State the U-type groove that 45 degree are provided with upper supporting plate 4, realize that two-way 45 degree of adjustment, lower carrier plate 5 are directly anchored on 3 support columns 6, and
And distance can be adjusted up and down, and 2 holes are provided with lower carrier plate 5, a hole is used for fixing, and a hole is used for adjusting upper supporting plate 4
Angle after lock.
The insulation isolation body of heater 3 is directly installed on above upper supporting plate 4, and supporting-core 12, heating ceramic pipe 13 and quartz
Crucible is all in insulation isolation body of heater 3.The heating ceramic pipe 13 is the ceramic body that inside is wound with heater strip, and it uses and props up
Support core 12 be fixed on insulation isolation body of heater in, supporting-core 12 is elastic part, above supporting-core 12 directly with quartz
Crucible is contacted, and supporting-core 12, can be adjusted to most beneficial for evaporation so that silica crucible is moved up and down with height up and down
Position, and the thermocouple contact head of temperature sensor can pass through the top surface of supporting-core 12 directly contact with silica crucible, have
It is beneficial to real time temperature measurement.
It is partly the outlet device and evaporation source baffle plate 1 of heater strip and thermocouple wire below the mounting flange 7
Control section.
One end of threading inclined tube 8 is welded with mounting flange 7, and the other end installs glass sintering joint 9, heater strip and thermocouple
Line is directly passed from threading inclined tube 8, is connected on glass sintering joint 9.
The frame for movement of evaporation source baffle plate 1 is described below, the evaporation source baffle plate 1 is the baffle plate of evaporation source mouth, works as substrate
Upper plated part is deposited with to after desired thickness, it is not possible to is further continued for being deposited with, now must be blocked evaporation source mouth at once, prevent organic
Material is risen on substrate, and evaporation source baffle plate 1 just serves this key effect.Two key operations one of evaporation source baffle plate 1
Individual be rotation one be swing, be realize with body of heater while swing, the damper shaft below evaporation source directly through insulation isolation
3 bottom surface of body of heater is simultaneously made of one with bottom surface, is connected with universal joint 14 below.Rotating part oscillating cylinder 11 is rotated, electricity
Magnet valve is controlled, below the sealing of the device such as rotary shaft magnetic fluid, realize using under high vacuum.
Method of operating is described below：Rotation magnetic fluid 10, oscillating cylinder 11, lower of the connection below of universal joint 14 are installed successively
Plate 5.Insulation isolation body of heater 3 is installed with upper supporting plate 4, is installed heating ceramic pipe 13 and its supporting-core 12, silica crucible, is penetrated thermoelectricity
Head is coupled, heating silk thread is passed, then installation upper supporting plate component and lower carrier plate component, heating silk thread is oblique from installing with thermocouple wire
Pipe 8 is passed.Adjustment bushing position, fastens heat-preserving cover plate 2.14 two ends of fastening universal joint, fixed 1 position of evaporation source baffle plate.
By in integral installation to coating machine cavity lower flange, the position of evaporation source mouth and chip bench is adjusted, fastening is tightened
Screw 15.
As can be seen here, new organic evaporating source of the present utility model substantially improves the deficiency in traditional organic evaporating source, especially
Which is heating and thermal insulation, adjustable angle, height adjustable, temperature-controllable, compact conformation, high-adaptability, economical and practical waits many merits
In place of being bright spot of the present utility model.
It should be noted that above-described embodiment does not limit the utility model in any form, all using equivalent or wait
The technical scheme obtained by the mode of effect conversion, all falls within protection domain of the present utility model.
Claims (10)
1. a kind of organic evaporating source for electric resistor heating type evaporation coating machine, it is characterised in that：Include successively from top to bottom steaming
Rise baffle plate, heat-preserving cover plate, insulation isolation body of heater, upper supporting plate, lower carrier plate, support column, mounting flange, rotation magnetic fluid, swing
Cylinder, the mounting flange are also associated with threading inclined tube, and the threading inclined tube is connected with glass sintering joint, the thermal insulation separation
Supporting-core and heating ceramic pipe are provided with body of heater absolutely, in the heating ceramic pipe, silica crucible is provided with, the insulation isolation
Stainless steel catch is provided with around the evaporation source mouth of body of heater.
2. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
Insulation isolation body of heater is directly installed on the adjustable support plate of upper supporting plate, is provided with 45 degree of U-type grooves on the adjustable support plate, described U-shaped
Groove is hinged installation with lower carrier plate, and the upper supporting plate is used for the angular adjustment for realizing the U-type groove, so that evaporation source mouth is just to base
Piece platform.
3. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
Organic evaporating source adopts PID temperature control techniques, silica crucible bottom to be connected with temperature sensor, realizes that real time temperature is measured, according to
Temperature level carries out temperature control, temperature controlling range+- 0.5 degree Celsius within.
4. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
The rotation of evaporation source baffle plate is controlled using oscillating cylinder, and the damper shaft of the evaporation source baffle plate is directly from the bottom of insulation isolation body of heater
Portion passes, and insulation isolation body of heater is stretched out on top, and damper shaft adopts magnet fluid sealing with the installing plate of insulation isolation body of heater, the steaming
Rise baffle plate lead adopt glass frit seal device.
5. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
Mounting flange is connected with coating machine cavity, and is sealed with sealing ring.
6. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
Be provided with 3 support columns above mounting flange, the lower carrier plate is directly anchored on 3 support columns, can adjust up and down away from
From, two holes are provided with the lower carrier plate, one of hole is used for fixing, and another hole is used for the angle for adjusting upper supporting plate
After lock.
7. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 1, it is characterised in that：Described
Heating ceramic pipe is the ceramic body that inside is wound with heater strip, is fixed in insulation isolation body of heater by supporting-core；The supporting-core
Elastic part, which is contacted with silica crucible immediately above, the supporting-core can height up and down so that stone
English crucible is moved up and down, and then is adjusted to the position most beneficial for evaporation.
8. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 3, it is characterised in that：Described
Temperature sensor adopts thermocouple, the thermocouple contact head directly to contact with silica crucible through the top surface of supporting-core, favorably
In real time temperature measurement.
9. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 8, it is characterised in that：Described
One end of threading inclined tube and mounting flange are welded, and the other end is provided with glass sintering joint, heater strip and thermocouple wire directly from
Threading inclined tube is passed, and is connected on glass sintering joint.
10. the organic evaporating source for electric resistor heating type evaporation coating machine according to claim 4, it is characterised in that：Institute
Damper shaft is stated directly through insulation isolation body of heater bottom surface and is made of one with bottom surface, connected with universal joint below the damper shaft
Arrive lower carrier plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621107078.4U CN206015081U (en) | 2016-10-09 | 2016-10-09 | Organic evaporating source for electric resistor heating type evaporation coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621107078.4U CN206015081U (en) | 2016-10-09 | 2016-10-09 | Organic evaporating source for electric resistor heating type evaporation coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206015081U true CN206015081U (en) | 2017-03-15 |
Family
ID=58260780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621107078.4U Withdrawn - After Issue CN206015081U (en) | 2016-10-09 | 2016-10-09 | Organic evaporating source for electric resistor heating type evaporation coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206015081U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191788A (en) * | 2016-10-09 | 2016-12-07 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
-
2016
- 2016-10-09 CN CN201621107078.4U patent/CN206015081U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191788A (en) * | 2016-10-09 | 2016-12-07 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
| CN106191788B (en) * | 2016-10-09 | 2019-03-05 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170315 Effective date of abandoning: 20190305 |