CN205538736U - Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography - Google Patents
Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography Download PDFInfo
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- 230000007547 defect Effects 0.000 title abstract description 42
- 238000013519 translation Methods 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims description 44
- 238000007689 inspection Methods 0.000 claims description 20
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- 230000000149 penetrating effect Effects 0.000 claims 1
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- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000001052 transient effect Effects 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 42
- 230000003796 beauty Effects 0.000 description 17
- 230000000007 visual effect Effects 0.000 description 7
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- 239000000243 solution Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Abstract
The utility model discloses an optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography belongs to the optical element surface defect's in the optical detection technology field detection device, but its aim at provides a measured surface defect degree of depth jumps transient range and reach the optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography of lambda wavelength magnitude. Its technical scheme does: including first laser instrument, second laser instrument, a beam splitting Prism, first speculum, first microcobjective, pinhole, first lens, the second mirror, the 2nd beam splitting Prism, third speculum, the 3rd beam splitting Prism, second microcobjective, attenuator, computer, CCD camera, third microcobjective and two -dimensional translation table. The utility model is suitable for a surperficial defect to the great optical element of high depth of field surface defect and surperficial defect transverse dimension detects.
Description
Technical field
This utility model belongs to technical field of optical detection, relates to the detection device of a kind of optical element surface defect.
Background technology
Optical element surface defect is that it shows as owing to element surface grinds uneven produced in polishing process
There is a series of cut or pit on element surface, it can affect the image quality of optical imaging system and endanger high power laser light
The safety of system is properly functioning.The testing result of optical element surface defect is to judge the important indicator that whether qualified optical element is
One of.At present, in engineering detecting task, main employing scatters the equipment and instrument of imaging method development for optics unit based on details in a play not acted out on stage, but told through dialogues
Part beauty defects carries out detection by quantitative, relevant device instrument can to the lateral dimension of beauty defects (width of cut, length,
And the diameter of pit) carry out quantitative measurement, but the pattern letter such as it can not obtain longitudinal degree of depth of beauty defects, cross sectional shape
Breath, it is achieved for the D surface contouring of optical element surface defect, this is unfavorable for more in depth understanding and analyze surface defect
The sick impact on Optical devices performance.Therefore, in the detection by quantitative of optical element surface defect, beauty defects three-dimensional appearance
Accurately measure significant.
According to existing detection technique, it is possible to use white light interference (WFL) optical profilometer or atomic force microscope (AFM)
Detecting the appearance structure of optical element surface defect, but both approaches all exists measuring speed slowly, measurement regards
Less shortcoming, it is impossible to be applicable to element surface defect real-time, the detection of whole audience quantification.Surface profiler has
Higher accuracy of detection, it is possible to obtain the lateral resolution of 200nm magnitude and the axial resolution of nm magnitude, but measure visual field relatively
Little, usually millimeter magnitude, and measuring speed is relatively slower, it needs to use piezoelectric ceramics (PZT) to carry out during measuring
Multistep machinery phase shift record multiple image；The resolution of atomic force microscope can reach nm magnitude, but its measurement visual field is general
Can only in micron dimension, and need element surface is carried out point by point scanning during measuring, on the one hand this make measuring speed
Slowly, on the other hand probe is likely touched element surface during measuring and is caused element damage.Prior art profit
With directional light, testing sample is irradiated, through testing sample reflection (or transmission) after reflected parallel light and after Amici prism
Transmissive parallel light shine directly in CCD camera formation interference figure.Owing to the defect of partial optical element surface is less, instead
Penetrate the flexural distortion of PHASE DISTRIBUTION that directional light produces after testing sample reflection (or transmission) more weak, thus reflected parallel light and
The interference figure that transmissive parallel light is formed in CCD camera is inconspicuous, thus cannot be by the interference figure formed in CCD camera
And be distributed or by the interference figure meter formed in CCD camera by a series of three-dimensional appearance calculating testing sample
The error calculating the three-dimensional appearance distribution drawing testing sample is bigger so that existing optical element surface flaw inspection device is to be measured
Precision and the accuracy of the three-dimensional appearance distribution of sample are relatively low.
Based on above-mentioned technical problem, the application have submitted four for optical element surface defect on August 26th, 2015
The utility application of detection, these four utility application are all to use single wavelength laser as light source, profit
With Amici prism, laser is divided into reflected parallel light and transmissive parallel light, forms two light paths that light path is different, be finally irradiated to
Reflection (or transmission) directional light of testing sample is after testing sample reflection (or transmission) and shines directly in CCD camera
Transmissive parallel light forms interference figure, accurately measures the carrying out of the three-dimensional appearance distribution of testing sample.
Summary of the invention
In prior art, owing to using single wavelength laser to measure, thus the height that fractional phase distorts when measuring
Frequently information will be lost in communication process, from being unable to be interfered record, thus directly affects sample topography reconstructed results
Lateral resolution；Additionally, when there is the step-like structure that the degree of depth is more than wavelength magnitude in sample, corresponding phase place is abnormal
Change can produce the phase jump point more than 2 π, it is impossible to obtain correct phase distortion by phase unwrapping algorithm and be distributed to obtain
Obtain beauty defects appearance structure, which has limited the beauty defects field depth that can measure.
Goal of the invention of the present utility model is: the problem existed for prior art, it is provided that one can measure surface defect
Sick degree of depth transition scope reaches the optical element surface flaw inspection dress of the transmission dual wavelength synthetic aperture holography of λ wavelength magnitude
Put.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of optical element surface flaw inspection device of transmission dual wavelength synthetic aperture holography, it is characterised in that: bag
Include the first laser instrument, second laser, the first Amici prism, the first reflecting mirror, the first microcobjective, pin hole, the first lens,
Two-mirror, the second Amici prism, the 3rd reflecting mirror, the 3rd Amici prism, the second microcobjective, attenuator, computer, CCD
Camera, the 3rd microcobjective and two-dimension translational platform；
The narrow laser beam that described first laser instrument sends is incident to the first Amici prism, and it is thin that described second laser sends
Laser beam is incident to the first Amici prism after the first reflecting mirror reflection, and two bundle narrow laser beams are incident to weight after the first Amici prism
Be combined into a branch of thick laser beam and penetrate the first Amici prism, described thick laser beam sequentially pass through the first microcobjective, pin hole, first
It is incident to the second Amici prism after lens and is divided into the thick laser beam of reflection and the thick laser beam of transmission through the second Amici prism；Described instead
Penetrate thick laser beam the second reflecting mirror successively, the 3rd reflecting mirror, testing sample, the second microcobjective, the 3rd Amici prism
Three Amici prisms produce reflection, and the thick laser beam after the 3rd Amici prism reflection is incident to CCD camera；The thick laser of described transmission
Bundle is incident to CCD camera after sequentially passing through attenuator, the 3rd microcobjective, the 3rd Amici prism；Described testing sample is connected to
On two-dimension translational platform, described CCD camera electrically connects with computer.
Wherein, described first laser instrument produces wavelength is λANarrow laser beam, described second laser produce wavelength be λB's
Narrow laser beam, and λA、λBMeet formula λAλB/|λA-λB|≥λAAnd/or λAλB/|λA-λB|≥λB。
Wherein, described pin hole is positioned in the focus of the first microcobjective, described thick laser beam successively through the first microcobjective,
Expand after pin hole as umbilical point light source.
Wherein, described pin hole is positioned in the focus of the first lens.
Wherein, described second microcobjective and the 3rd microcobjective are that enlargement ratio, numerical aperture, operating distance are identical
Distance between microcobjective, and the second microcobjective and the 3rd Amici prism is equal to the 3rd microcobjective and the 3rd Amici prism
Between distance.
Wherein, described first lens are achromat.
Wherein, described first microcobjective, the second microcobjective and the 3rd microcobjective are achromatic micro objective.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
In this utility model, divided by the phase place of CCD camera and computer recording optical element to be measured digitalized intervention pattern
Cloth, calculates the three-dimensional appearance profile Δ L of optical element surface defect to be checked, it is achieved beauty defects three-dimensional appearance the most complete
Field detection by quantitative, test speed is rapid, measures visual field big, and accuracy of detection is high；By arranging microcobjective in detection light path, profit
With microcobjective, the high-frequency information risen and fallen in the Wave-front phase distortion caused due to beauty defects is collected, size is small
Optical element surface defect amplify be imaged on the target surface of CCD camera, efficiently solve fractional phase distortion high-frequency information
The problem of loss in communication process, improves the accuracy of detection of the beauty defects for test sample；By arranging two groups of laser
Device, two groups of laser instrument can produce the laser that two bundle wavelength are closer to, by using two bundle wavelength to be closer to (respectively λAWith
λB) laser carry out the record of interference figure respectively as light source, it is equivalent to use composite wavelength is λ=λAλB/|λA-λB|
Laser carries out the record of interference pattern, due to wavelength XAAnd λBIt is closer to so that composite wavelength λ is much larger than single wavelength λA(or
λB), thus by beauty defects degree of depth transition scope (step-like structure height) that can measure by single wavelength λA(or λB) magnitude
It is extended to composite wavelength λ magnitude, adds the beauty defects field depth that can measure.Additionally, employing synthetic aperture technique, logical
Cross and during measuring, testing sample is placed on the automatically controlled precise 2-D translation stage that can carry out high-precision two-dimensional translation, often complete
The measurement of CCD single width visual field size, carries out two-dimension translational to realize whole large scale beauty defects to testing sample
Scanning survey, thus add the beauty defects lateral dimension scope that can measure.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Wherein, reference is: 1 first laser instrument, 2 second lasers, 3 first Amici prisms, 4 first anti-
Penetrate mirror, 5 first microcobjectives, 6 pin holes, 7 first lens, 8 second reflecting mirrors, 9 second Amici prisms, 10
Three reflecting mirrors, 12 the 3rd Amici prisms, 13 second microcobjectives, 14 attenuators, 15 computers, 16 CCD camera,
17 testing samples, 18 the 3rd microcobjectives, 19 two-dimension translational platforms.
Detailed description of the invention
Below in conjunction with the accompanying drawings, this utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing and enforcement
Example, is further elaborated to this utility model.Should be appreciated that specific embodiment described herein is only in order to explain this
Utility model, is not used to limit this utility model.
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, it includes the first laser
Device 1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second
Reflecting mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, meter
Calculation machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19.
Utilize double-wavelength holographic art detect optical element high depth of field beauty defects:
It is λ that first laser instrument 1 can produce wavelengthANarrow laser beam, it is λ that second laser 2 can produce wavelengthBThin laser
Bundle, wherein wavelength XAWith wavelength XBIt is closer to, and λA、λBMeet formula λAλB/|λA-λB|≥λAAnd/or λAλB/|λA-λB|≥
λB.The narrow laser beam that first laser instrument 1 produces is directly transmitted to the first Amici prism 3, the narrow laser beam that second laser 2 produces
It is incident to the first reflecting mirror 4 and is incident to the first Amici prism 3 after the first reflecting mirror 4 produces reflection；Two bundle narrow laser beams enter
It is incident upon the first Amici prism 3 and accurately overlaps on the first Amici prism 3 as a branch of thick laser beam, this thick laser beam injection first
Being incident to the second Amici prism 9 after sequentially passing through the first microcobjective 5, pin hole the 6, first lens 7 after Amici prism 3, this slightly swashs
Light beam produces on the second Amici prism 9 and reflects to form the thick laser beam of reflection, produces the transmission formation thick laser beam of transmission；This reflection
Thick laser beam produces reflection successively on the second reflecting mirror 8, produces reflection on the 3rd reflecting mirror 10, transmitted through testing sample
17, it is incident to the 3rd Amici prism 12 transmitted through the second microcobjective 13, reflects thick laser beam and produce on the 3rd Amici prism 12
Raw reflection, the thick laser beam of reflection after the 3rd Amici prism 12 reflection is incident to CCD camera 16, and at the target of CCD camera 16
Imaging on face, forms digitalized intervention pattern A；The thick laser beam of transmission is successively transmitted through attenuator the 14, the 3rd microcobjective the 18, the 3rd
It is incident to CCD camera 16, and imaging on the target surface of CCD camera 16 after Amici prism 12, forms digitalized intervention pattern B；This CCD
Camera 16 electrically connects with computer 15, and the digitalized intervention pattern that CCD camera 16 is collected transmits to computer 15.
Double-wavelength holographic art testing process is: (1) select optical element to be detected as test sample, by test sample
Being placed in microcobjective visual field, CCD camera 16 records and Single wavelength λ respectivelyACorresponding digitalized intervention pattern A and Single wavelength λBPhase
The digitalized intervention pattern B answered；(2) digitalized intervention pattern A and the PHASE DISTRIBUTION of numeral interference pattern B are calculated respectivelyWith(3) the three-dimensional appearance profile Δ L of optical element surface defect to be checked is calculated,Wherein λ is by Single wavelength λ A and λ B
The composite wavelength obtained, λ=λAλB/|λA-λB|。
When utilizing the beauty defects detection that synthetic aperture holography carries out the bigger testing sample of lateral dimension:
Testing sample 17 is connected on two-dimension translational platform 19, by testing sample 17 being placed in and can be carried out during measuring
On the automatically controlled precise 2-D translation stage 19 of high-precision two-dimensional translation, often complete the measurement of a CCD single width visual field size, to be measured
Sample 17 carries out two-dimension translational to realize the scanning survey to whole large scale beauty defects.
The testing process of synthetic aperture holography is: (1) selects optical element to be detected as test sample, will test
Certain part edge region of sample is placed in microcobjective visual field, as scan start point, is then put down by automatically controlled precise 2-D
Moving stage controls element and carries out two-dimension translational, and to realize the horizontal two-dimensional scan to whole surface defect, the corresponding numeral of record is dry
Relate to pattern A0, A1……An；(2) each width digitalized intervention pattern A is calculated0, A1……AnPHASE DISTRIBUTION (3)
By PHASE DISTRIBUTIONCarry out splicing synthesis according to its corresponding defect area position coordinates, obtain with whole
The PHASE DISTRIBUTION that large scale beauty defects is corresponding(4) the three-dimensional appearance profile Δ L of optical element surface defect to be checked is calculated,Wherein λ is the wavelength of laser instrument.
Additionally, described pin hole 6 is positioned in the focus of the first microcobjective 5, described thick laser beam is successively through the first micro-thing
Expand as umbilical point light source after mirror 5, pin hole 6.
Additionally, described pin hole 6 is positioned in the focus of the first lens 7.The sphere light beam sent by pin hole 6 is through the first lens 7
Rear collimation is collimated light beam.
Additionally, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, numerical aperture, operating distance phase
With microcobjective, and the distance between the second microcobjective 13 and the 3rd Amici prism 12 is equal to the 3rd microcobjective 18 and the
Distance between three Amici prisms 12.
Additionally, described first lens 7 are achromat.
Additionally, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective 18 are the micro-thing of achromatism
Mirror.
Embodiment 1
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Embodiment 2
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described first laser instrument 1 produces wavelength is λANarrow laser beam, it is λ that described second laser 2 produces wavelengthB
Narrow laser beam, and λA、λBMeet formula λAλB/|λA-λB|≥λAAnd/or λAλB/|λA-λB|≥λB。
Embodiment 3
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described pin hole 6 is positioned in the focus of the first microcobjective 5, and described thick laser beam is successively through the first micro-thing
Expand as umbilical point light source after mirror 5, pin hole 6.
Embodiment 4
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described pin hole 6 is positioned in the focus of the first lens 7.
Embodiment 5
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, numerical aperture, operating distance phase
With microcobjective, and the distance between the second microcobjective 13 and the 3rd Amici prism 12 is equal to the 3rd microcobjective 18 and the
Distance between three Amici prisms 12.
Embodiment 6
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described first lens 7 are achromat.
Embodiment 7
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective 18 are the micro-thing of achromatism
Mirror.
Embodiment 8
The optical element surface flaw inspection device of a kind of transmission dual wavelength synthetic aperture holography, including the first laser instrument
1, second laser the 2, first Amici prism the 3, first reflecting mirror the 4, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd reflecting mirror the 10, the 3rd Amici prism the 12, second microcobjective 13, attenuator 14, calculate
Machine 15, CCD camera the 16, the 3rd microcobjective 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends is incident to the first Amici prism 3, and described second laser 2 sends
Narrow laser beam after the first reflecting mirror 4 reflection, be incident to the first Amici prism 3, two bundle narrow laser beams are incident to the first light splitting rib
Overlap as a branch of thick laser beam penetrate the first Amici prism 3 after mirror 3, described thick laser beam sequentially pass through the first microcobjective 5,
It is incident to the second Amici prism 9 after pin hole the 6, first lens 7 and is divided into the thick laser beam of reflection and transmission thick through the second Amici prism 9
Laser beam；The thick laser beam of described reflection sequentially passes through the second reflecting mirror the 8, the 3rd reflecting mirror 10, testing sample the 17, second micro-thing
Mirror the 13, the 3rd Amici prism 12 also produces reflection at the 3rd Amici prism 12, the thick laser after the 3rd Amici prism 12 reflection
Bundle is incident to CCD camera 16；The thick laser beam of described transmission sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd light splitting rib
CCD camera 16 it is incident to after mirror 12；Testing sample 17 is connected on two-dimension translational platform 19, described CCD camera 16 and computer 15
Electrical connection.
Wherein, described first laser instrument 1 produces wavelength is λANarrow laser beam, it is λ that described second laser 2 produces wavelengthB
Narrow laser beam, and λA、λBMeet formula λAλB/|λA-λB|≥λAAnd/or λAλB/|λA-λB|≥λB。
Wherein, described pin hole 6 is positioned in the focus of the first microcobjective 5, and described thick laser beam is successively through the first micro-thing
Expand as umbilical point light source after mirror 5, pin hole 6.
Wherein, described pin hole 6 is positioned in the focus of the first lens 7.
Wherein, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, numerical aperture, operating distance phase
With microcobjective, and the distance between the second microcobjective 13 and the 3rd Amici prism 12 is equal to the 3rd microcobjective 18 and the
Distance between three Amici prisms 12.
Wherein, described first lens 7 are achromat.
Wherein, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective 18 are the micro-thing of achromatism
Mirror.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all at this
Any amendment, equivalent and the improvement etc. made within the spirit of utility model and principle, should be included in this utility model
Protection domain within.
Claims (7)
1. the optical element surface flaw inspection device of a transmission dual wavelength synthetic aperture holography, it is characterised in that: include
First laser instrument (1), second laser (2), the first Amici prism (3), the first reflecting mirror (4), the first microcobjective (5), pin
Hole (6), the first lens (7), the second reflecting mirror (8), the second Amici prism (9), the 3rd reflecting mirror (10), the 3rd Amici prism
(12), the second microcobjective (13), attenuator (14), computer (15), CCD camera (16), the 3rd microcobjective (18) and two
Dimension translation stage (19)；
The narrow laser beam that described first laser instrument (1) sends is incident to the first Amici prism (3), and described second laser (2) is sent out
The narrow laser beam gone out is incident to the first Amici prism (3) after the first reflecting mirror (4) reflects, and two bundle narrow laser beams are incident to first
Amici prism (3) overlaps afterwards as a branch of thick laser beam and penetrates the first Amici prism (3), and described thick laser beam sequentially passes through first
It is incident to the second Amici prism (9) after microcobjective (5), pin hole (6), the first lens (7) and is divided into through the second Amici prism (9)
Reflect thick laser beam and the thick laser beam of transmission；The thick laser beam of described reflection sequentially passes through the second reflecting mirror (8), the 3rd reflecting mirror
(10), testing sample (17), the second microcobjective (13), the 3rd Amici prism (12) produce anti-at the 3rd Amici prism (12)
Penetrating, the thick laser beam after the 3rd Amici prism (12) reflection is incident to CCD camera (16)；Described transmission thick laser beam warp successively
It is incident to CCD camera (16) after overdamping device (14), the 3rd microcobjective (18), the 3rd Amici prism (12)；Described treat test sample
Product (17) are connected on two-dimension translational platform (19), and described CCD camera (16) electrically connects with computer (15).
2. the optical element surface flaw inspection device of transmission dual wavelength synthetic aperture holography as claimed in claim 1, its
It is characterised by: it is λ that described first laser instrument (1) produces wavelengthANarrow laser beam, described second laser (2) produce wavelength be λB
Narrow laser beam, and λA、λBMeet formula λAλB/|λA-λB|≥λAAnd/or λAλB/|λA-λB|≥λB。
3. the optical element surface flaw inspection device of transmission dual wavelength synthetic aperture holography as claimed in claim 1, its
Being characterised by: described pin hole (6) is positioned in the focus of the first microcobjective (5), described thick laser beam is successively through the first micro-thing
Expand as umbilical point light source after mirror (5), pin hole (6).
4. the optical element surface flaw inspection device of transmission dual wavelength synthetic aperture holography as claimed in claim 1, its
It is characterised by: described pin hole (6) is positioned in the focus of the first lens (7).
5. the optical element surface flaw inspection device of transmission dual wavelength synthetic aperture holography as claimed in claim 1, its
It is characterised by: described second microcobjective (13) and the 3rd microcobjective (18) are enlargement ratio, numerical aperture, operating distance phase
Same microcobjective, and the distance between the second microcobjective (13) and the 3rd Amici prism (12) is equal to the 3rd microcobjective
(18) distance and between the 3rd Amici prism (12).
6. the optical element surface flaw inspection of the transmission dual wavelength synthetic aperture holography as described in arbitrary in claim 1-5
Device, it is characterised in that: described first lens (7) are achromat.
7. the optical element surface flaw inspection of the transmission dual wavelength synthetic aperture holography as described in arbitrary in claim 1-5
Device, it is characterised in that: described first microcobjective (5), the second microcobjective (13) and the 3rd microcobjective (18) are and disappear
Aberration microcobjective.
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| CN201521130020.7U CN205538736U (en) | 2015-12-30 | 2015-12-30 | Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography |
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| CN201521130020.7U CN205538736U (en) | 2015-12-30 | 2015-12-30 | Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107833511A (en) * | 2017-11-15 | 2018-03-23 | 中国工程物理研究院电子工程研究所 | One kind optimization integrated form double light path laser ionisation effect simulation system |
| CN107886820A (en) * | 2017-11-15 | 2018-04-06 | 中国工程物理研究院电子工程研究所 | A kind of integrated form double light path laser ionisation effect simulation system |
| CN110487221A (en) * | 2019-08-20 | 2019-11-22 | 大连海事大学 | Hologram fringe central bright spot area and the micro- plastics detection device of dimension ratio and method |
| CN111220624A (en) * | 2020-01-18 | 2020-06-02 | 哈尔滨工业大学 | Surface and sub-surface integrated confocal microscopic measurement device and method |
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- 2015-12-30 CN CN201521130020.7U patent/CN205538736U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107833511A (en) * | 2017-11-15 | 2018-03-23 | 中国工程物理研究院电子工程研究所 | One kind optimization integrated form double light path laser ionisation effect simulation system |
| CN107886820A (en) * | 2017-11-15 | 2018-04-06 | 中国工程物理研究院电子工程研究所 | A kind of integrated form double light path laser ionisation effect simulation system |
| CN107833511B (en) * | 2017-11-15 | 2023-11-24 | 中国工程物理研究院电子工程研究所 | Optimization integrated double-light-path laser ionization effect simulation system |
| CN107886820B (en) * | 2017-11-15 | 2023-11-24 | 中国工程物理研究院电子工程研究所 | Integrated double-light-path laser ionization effect simulation system |
| CN110487221A (en) * | 2019-08-20 | 2019-11-22 | 大连海事大学 | Hologram fringe central bright spot area and the micro- plastics detection device of dimension ratio and method |
| CN110487221B (en) * | 2019-08-20 | 2021-05-25 | 大连海事大学 | Micro-plastic detection device and method for area-to-size ratio of central bright spot of holographic stripe |
| CN111220624A (en) * | 2020-01-18 | 2020-06-02 | 哈尔滨工业大学 | Surface and sub-surface integrated confocal microscopic measurement device and method |
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