CN203773368U - Flow automatic monitoring device - Google Patents
Flow automatic monitoring device Download PDFInfo
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- CN203773368U CN203773368U CN201320749702.0U CN201320749702U CN203773368U CN 203773368 U CN203773368 U CN 203773368U CN 201320749702 U CN201320749702 U CN 201320749702U CN 203773368 U CN203773368 U CN 203773368U
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Abstract
The utility model discloses a flow automatic monitoring device. The flow automatic monitoring device includes a flow sensor, a signal amplifier, a signal collection and processing unit, a solenoid valve and an interlocking and alarm device, wherein the flow sensor is used for sensing the height of a floater in a flowmeter, the signal amplifier is used for amplifying signals of the flow sensor, the solenoid valve is used for providing solution discharge signals for a pneumatic valve and flow detection starting signals for the signal collection and processing unit, the signal collection and processing unit is used for monitoring the signals of the flow sensor and the solenoid valve, and triggering the interlocking and alarm device when detecting that flow is abnormal, and the interlocking and alarm device comprises an alarm lamp and an interlocking switch circuit, and is used for emitting alarm sound after receiving alarm signals and used for stopping wafer processing. According to the flow automatic monitoring device of the utility model, the photoelectric sensor is additionally installed on the flow meter, so that the height of the floater in the flow meter can be monitored, and therefore, automatic monitoring of the flow of the flow meter can be realized; and automatic warning can be performed when the flow is insufficient, and equipment can be forced to stop wafer processing, and therefore, the technical quality of products can be effectively ensured.
Description
Technical field
The utility model relates to integrated circuit and manufactures field, particularly relates to the traffic monitoring of liquid used in photoetching district gluing developing apparatus.
Background technology
At present, in field of semiconductor manufacture, in the gluing developing apparatus in photoetching district, use in a large number photoresist solvent to carry out trimming, Wafer Backside Cleaning to silicon chip and to processing such as silicon chip surface soak.Self has traffic monitoring function for part liquid gluing developing apparatus, but as the traffic monitoring function that will append other liquid, need to revise the software setting of gluing developing apparatus body, expense is more expensive (for example, silicon chip surface is carried out to wettability treatment, owing to being technique newly developed, there is no the configuration of medicinal liquid flow monitoring function).As the flowmeter of fruit part liquid does not carry out in real time effectively monitoring, can affect the technological quality of product.As too little in the flow of trimming, the photoresist of silicon chips periphery cannot be removed completely, and burr can be produced or photoresist is residual etc. bad.And for example silicon chip surface is carried out to wetting flow insufficient, can cause photoresist can not cover silicon chip surface completely, produce bad coating.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of flow quantity automatic monitoring device, and it can monitor the variation of float in medicinal liquid flow meter automatically effectively, realizes the function of automatic monitoring flow.
For solving the problems of the technologies described above, flow quantity automatic monitoring device of the present utility model, comprises flow sensor, signal amplifier, signal collection processing unit, solenoid valve and interlocking alarm device; Wherein:
Flow sensor, is installed on medicinal liquid flow meter, for the height of float in induction flowmeter;
Signal amplifier, is connected with flow sensor, for the signal of amplified flow sensor output;
Solenoid valve, is connected between glue-spreading development equipment main frame and pneumatic valve, and is connected with signal collection processing unit, is used to pneumatic valve that the liquid signal that spues is provided, and provides flux detecting enabling signal for signal collection processing unit;
Signal collection processing unit, is connected between signal amplifier and glue-spreading development equipment main frame, for the signal of monitoring flow quantity sensor and the signal of solenoid valve, and calculate comparison, judge that whether medicinal liquid flow is normal, and in the time Traffic Anomaly being detected, trigger interlocking alarm device;
Interlocking alarm device, is arranged on glue-spreading development equipment main frame, comprises alarm lamp and interlocking switch circuit, and alarm lamp is used for sending chimes of doom, and interlocking switch circuit, for receiving after Traffic Anomaly alerting signal, stops silicon chip processing.
The utility model by installing photoelectric sensor additional on flowmeter, the height change of float in induction flowmeter, realize the automatic effective monitoring to medicinal liquid flow meter flow, simultaneously, automatic alarm in the time of underfed, pressure equipment stops silicon chip processing, has effectively ensured the technological quality of product.
Brief description of the drawings
Fig. 1 is the arrangement plan of flow quantity automatic monitoring device.
Fig. 2 is the internal electric arrangement of components figure of signal collection processing unit.
Fig. 3 is interlocking alarm device appearance figure.
Embodiment
Understand for technology contents of the present utility model, feature and effect being had more specifically, existing in conjunction with illustrated embodiment, details are as follows:
The flow quantity automatic monitoring device of the present embodiment is shown in Figure 1, is external in gluing developing apparatus, includes flow sensor, signal amplifier, signal collection processing unit, solenoid valve and interlocking alarm device.
Described flow sensor is photoelectric sensor, is installed on medicinal liquid flow meter, for the knee-action of float in induction flowmeter.
Described signal amplifier is connected with flow sensor, for the signal of amplified flow sensor output.
Described solenoid valve is connected between glue-spreading development equipment main frame and pneumatic valve, and is connected with signal collection processing unit, is used to pneumatic valve that the liquid signal that spues is provided, and provides flux detecting enabling signal for signal collection processing unit.
Described signal collection processing unit is connected between signal amplifier and glue-spreading development equipment main frame, comprises two monitoring units, control module, direct-current switch power supply, panel display module and alarm output module.Two monitoring units are respectively used to monitor the signal (monitoring unit 1) of solenoid valve and the signal (monitoring unit 2) of flow sensor.Described control module is calculated comparison for solenoid valve that monitoring unit is monitored and the signal of flow sensor, and whether judgement medicinal liquid flow is normal.Described direct-current switch power supply is used to described control module power supply.Described panel display module is for showing that described control module is to the whether normal result of determination of medicinal liquid flow.Described alarm output module is in the time that described control module judges that medicinal liquid flow is abnormal, to glue-spreading development equipment output alarm signal.
Described interlocking alarm device comprises alarm lamp and interlocking switch circuit.Described alarm lamp is used for receiving after the alerting signal of described signal collection processing unit, the warning of sounding a buzzer.Described interlocking switch circuit, for receiving after the alerting signal of described signal collection processing unit, stops silicon chip handling procedure.
Below the working method of above-mentioned flow quantity automatic monitoring device is described in detail:
Start glue-spreading development equipment, device Host is to the solenoid valve output liquid signal that spues, solenoid valve on the one hand provides the liquid signal that spues to pneumatic valve, provide flux detecting enabling signal to signal collection processing unit on the other hand, trigger pip collection and treatment unit starts to monitor the signal of solenoid valve and flowmeter.
Pneumatic valve is received the liquid signal that spues, and starts liquid upstream line, and the liquid flowmeter of flowing through, drives the upper and lower action of float in flowmeter.Be installed at flow sensor on flowmeter and constantly detect the height of float in flowmeter.When spuing in the time at certain liquid, flow sensor detects float in flowmeter and has risen to the height setting in advance, output signal.After the signal of signal amplifier flow sensor output is amplified, be transferred to signal collection processing unit.Signal collection processing unit is received the signal of flow sensor, and flow is judged to be normally.Otherwise, if spue in the time at certain liquid, the float that flow sensor does not detect in flowmeter has risen to the height setting in advance, not output signal of flow sensor, signal collection processing unit is not received the signal of flow sensor, and flow is judged to be extremely, and Traffic Anomaly signal is exported to the interlocking alarm device on glue-spreading development equipment, trigger interlocking switch circuit, make glue-spreading development equipment force to stop silicon chip processing, alarm lamp sends warning buzzer simultaneously.
Claims (3)
1. flow quantity automatic monitoring device, is characterized in that, comprises flow sensor, signal amplifier, signal collection processing unit, solenoid valve and interlocking alarm device; Wherein:
Flow sensor, is installed on medicinal liquid flow meter, for the height of float in induction flowmeter;
Signal amplifier, is connected with flow sensor, for the signal of amplified flow sensor output;
Solenoid valve, is connected between glue-spreading development equipment main frame and pneumatic valve, and is connected with signal collection processing unit, is used to pneumatic valve that the liquid signal that spues is provided, and provides flux detecting enabling signal for signal collection processing unit;
Signal collection processing unit, is connected between signal amplifier and glue-spreading development equipment main frame, for the signal of monitoring flow quantity sensor and the signal of solenoid valve, and calculate comparison, judge that whether medicinal liquid flow is normal, and in the time Traffic Anomaly being detected, trigger interlocking alarm device;
Interlocking alarm device, is arranged on glue-spreading development equipment main frame, comprises alarm lamp and interlocking switch circuit, and alarm lamp is used for sending chimes of doom, and interlocking switch circuit, for receiving after Traffic Anomaly alerting signal, stops silicon chip processing.
2. device according to claim 1, is characterized in that, described flow sensor is photoelectric sensor.
3. device according to claim 1, is characterized in that, described signal collection processing unit comprises two monitoring units, control module, direct-current switch power supply, panel display module and alarm output module; Two monitoring units are respectively used to monitor the signal of solenoid valve and the signal of flow sensor; Control module is calculated comparison for solenoid valve that monitoring unit is monitored and the signal of flow sensor, and whether judgement medicinal liquid flow is normal; Direct-current switch power supply is used to control module power supply; Panel display module is used for display control module to the whether normal result of determination of medicinal liquid flow; Alarm output module is in the time that control module judges that medicinal liquid flow is abnormal, to glue-spreading development equipment output alarm signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320749702.0U CN203773368U (en) | 2013-11-25 | 2013-11-25 | Flow automatic monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320749702.0U CN203773368U (en) | 2013-11-25 | 2013-11-25 | Flow automatic monitoring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203773368U true CN203773368U (en) | 2014-08-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320749702.0U Expired - Fee Related CN203773368U (en) | 2013-11-25 | 2013-11-25 | Flow automatic monitoring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203773368U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878310A (en) * | 2017-05-12 | 2018-11-23 | 无锡华润安盛科技有限公司 | Chip cutting system and its control circuit |
| CN111692516A (en) * | 2020-07-01 | 2020-09-22 | 优普能源技术有限公司 | Intelligent filling control system and control method based on overcurrent protection |
-
2013
- 2013-11-25 CN CN201320749702.0U patent/CN203773368U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878310A (en) * | 2017-05-12 | 2018-11-23 | 无锡华润安盛科技有限公司 | Chip cutting system and its control circuit |
| CN111692516A (en) * | 2020-07-01 | 2020-09-22 | 优普能源技术有限公司 | Intelligent filling control system and control method based on overcurrent protection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20151125 |