CN202267563U - Compound type temperature pressure transducer - Google Patents
Compound type temperature pressure transducer Download PDFInfo
- Publication number
- CN202267563U CN202267563U CN2011204243432U CN201120424343U CN202267563U CN 202267563 U CN202267563 U CN 202267563U CN 2011204243432 U CN2011204243432 U CN 2011204243432U CN 201120424343 U CN201120424343 U CN 201120424343U CN 202267563 U CN202267563 U CN 202267563U
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- CN
- China
- Prior art keywords
- pedestal
- pressure
- chip
- transducer
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Measuring Fluid Pressure (AREA)
Abstract
A compound type temperature pressure transducer relates to a transducer for utilizing the electric principle to measure temperature and pressure. The transducer comprises a pedestal, the top part of which is provided with a groove, and a convoluted diaphragm fixed on the top part of the pedestal through a clamping ring, silicone oil is filled between the groove of the pedestal and the convoluted diaphragm, and a pressure chip is arranged inside the pedestal. The transducer is characterized in that the pressure chip is connected with a lead wire through a spun gold, the lead wire is extended out after passing through the pedestal, a thermistor is fixed inside the pedestal, and an oil inlet of the pedestal is sealed through a pin. The transducer can be used for measuring pressure and temperature at the same time, isolation of the pressure induction chip can be realized through a stainless steel diaphragm, and the using scope can be enlarged.
Description
Technical field
The utility model relates to a kind of sensor that utilizes electric principle to measure temperature and pressure, specifically a kind of compound temperature and pressure transmitter.
Background technology
Mostly with the pressure of the oil-filled core body sensor measurement of silicon pressure drag measuring point, with thermosensitive resistance measurement measuring point temperature, its work is more numerous and diverse at present; Certain technical difficulty is arranged; Also inconvenient, there is more difficulty, use the pressure measurement of silicon capacitive sensing chip can only be used to measure dry air; If be used to measure soft air or liquid, owing to decreasing insulating lost efficacy silicon capacitive sensing sheet or damage.
The utility model content
The purpose of the utility model is to provide a kind of compound temperature and pressure transmitter, solves the above problems.
The utility model solves the technical scheme that its technical matters adopted: compound temperature and pressure transmitter comprises that the top is provided with the pedestal of groove, is fixed on the convoluted diaphragm at pedestal top through trim ring; Be filled with silicone oil between the groove of pedestal and the convoluted diaphragm, be provided with pressure chip in the pedestal, it is characterized in that; Described pressure chip extremely links to each other with lead-in wire through spun gold; The lead-in wire utmost point passes pedestal and stretches out, and also is fixed with thermistor in the pedestal, and the oil supply hole on the pedestal is through the pin sealing;
Described pressure chip is the silicon capacitive pressure chip;
Described pressure chip is the silicon piezoresistive pressure chip;
Also be provided with a plurality of fillers in the base recess.
The utility model has the advantages that: the thermal resistance temperature sensor and pressure sensor chip combined in a corrugated diaphragm as the pressure inside the body cavity, the use of which is fraught with silicone oil to transfer pressure to the pressure sensor chip to achieve the fluid precision pressure measurement with good dynamic performance, high natural frequency, small size, low power, high impedance Tao and many other excellent performance.Convoluted diaphragm also passes to thermistor to the measuring point temperature of detected fluid through silicone oil when receiving detected fluid pressure, realized the measurement to the measuring point temperature.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Among the figure: 1 pedestal, 2 trim rings, 3 convoluted diaphragms, 4 silicone oil, 5 pressure chips, 6 spun golds, the 7 lead-in wire utmost points, 8 thermistors, 9 pins, 10 fillers
Embodiment
As shown in Figure 1, compound temperature and pressure transmitter comprises that the top is provided with the pedestal 1 of groove; Be fixed on the convoluted diaphragm 3 at pedestal 1 top through trim ring 2, be filled with silicone oil 4 between the groove of pedestal 1 and the convoluted diaphragm 2, be provided with pressure chip 5 in the pedestal 1; It is characterized in that described pressure chip 5 links to each other with the lead-in wire utmost point 7 through spun gold 6, the lead-in wire utmost point 7 passes pedestal 1 and stretches out; Also be fixed with thermistor 8 in the pedestal 1, the oil supply hole on the pedestal 1 is through pin 9 sealings;
Described pressure chip 5 is the silicon capacitive pressure chip;
Described pressure chip 5 is the silicon piezoresistive pressure chip;
Also be provided with a plurality of fillers 10 in pedestal 1 groove, be used to regulate oil-filled amount.
When convoluted diaphragm 3 receives detected fluid pressure; Because the incompressibility of silicone oil 4; The silicone oil 4 of pressurized is passed to pressure chip 5 to the pressure of fluid, and pressure chip 5 is just exported the electric signal that becomes strict proportionate relationship with measuring point pressure, thereby realizes the measurement of measuring point hydrodynamic pressure.Spun gold 6 is the internal lead and the outer lead of output capacitance electric signal with the lead-in wire utmost point 7.Trim ring 2 is reinforcing armatures of clamping convoluted diaphragm 3 and pedestal 1 welding.Convoluted diaphragm 3 directly contacts with the measuring point fluid and is transmitting hydrodynamic pressure in silicone oil 4 to the pressure chip 5, and also the temperature with the measuring point fluid passes to thermistor 8 through silicone oil 4.Measuring point fluid, convoluted diaphragm 3, silicone oil 4, thermistor 8, pedestal 1 are to be in same temperature field, and temperature is the same, so thermistor 8 is just exported the resistance value corresponding with the measuring point fluid temperature (F.T.) (being warm sugarcane value), have realized the measurement to the measuring point temperature.The measurement of its resistance value is to export to external meters through the meticulous enameled wire and the lead-in wire utmost point 7.Pin 9 is to be used for sealing oil hole, makes the silicone oil cavity pressure constant.O type circle and ring washer are to be used for installing compound oil-filled core body to prop up annex admittedly.
Claims (4)
1. compound temperature and pressure transmitter comprises that the top is provided with the pedestal of groove, is fixed on the convoluted diaphragm at pedestal top through trim ring; Be filled with silicone oil between the groove of pedestal and the convoluted diaphragm, be provided with pressure chip in the pedestal, it is characterized in that; Described pressure chip extremely links to each other with lead-in wire through spun gold; The lead-in wire utmost point passes pedestal and stretches out, and also is fixed with thermistor in the pedestal, and the oil supply hole on the pedestal is through the pin sealing.
2. compound temperature and pressure transmitter according to claim 1 is characterized in that, described pressure chip is the silicon capacitive pressure chip.
3. compound temperature and pressure transmitter according to claim 1 is characterized in that, described pressure chip is the silicon piezoresistive pressure chip.
4. according to claim 1 or 2 or 3 described compound temperature and pressure transmitter, it is characterized in that, also be provided with a plurality of fillers in the base recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204243432U CN202267563U (en) | 2011-10-28 | 2011-10-28 | Compound type temperature pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204243432U CN202267563U (en) | 2011-10-28 | 2011-10-28 | Compound type temperature pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202267563U true CN202267563U (en) | 2012-06-06 |
Family
ID=46158354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204243432U Expired - Fee Related CN202267563U (en) | 2011-10-28 | 2011-10-28 | Compound type temperature pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202267563U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435378A (en) * | 2011-10-28 | 2012-05-02 | 山东昌润科技有限公司 | Compound type temperature pressure sensor |
| CN104458065A (en) * | 2014-11-19 | 2015-03-25 | 中国电子科技集团公司第四十八研究所 | Gauge pressure sensitive core |
| CN106768592A (en) * | 2017-02-24 | 2017-05-31 | 中国电子科技集团公司第三十八研究所 | A kind of pressure transmitter oil filling core body of band signal processing function |
| CN113728216A (en) * | 2019-05-31 | 2021-11-30 | 株式会社村田制作所 | Sensor device, and sensor system and article provided with same |
-
2011
- 2011-10-28 CN CN2011204243432U patent/CN202267563U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435378A (en) * | 2011-10-28 | 2012-05-02 | 山东昌润科技有限公司 | Compound type temperature pressure sensor |
| CN104458065A (en) * | 2014-11-19 | 2015-03-25 | 中国电子科技集团公司第四十八研究所 | Gauge pressure sensitive core |
| CN106768592A (en) * | 2017-02-24 | 2017-05-31 | 中国电子科技集团公司第三十八研究所 | A kind of pressure transmitter oil filling core body of band signal processing function |
| CN113728216A (en) * | 2019-05-31 | 2021-11-30 | 株式会社村田制作所 | Sensor device, and sensor system and article provided with same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20151028 |
|
| EXPY | Termination of patent right or utility model |