CN201993187U - Multifunctional flexible tactile sensor - Google Patents
Multifunctional flexible tactile sensor Download PDFInfo
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- CN201993187U CN201993187U CN2011200570878U CN201120057087U CN201993187U CN 201993187 U CN201993187 U CN 201993187U CN 2011200570878 U CN2011200570878 U CN 2011200570878U CN 201120057087 U CN201120057087 U CN 201120057087U CN 201993187 U CN201993187 U CN 201993187U
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Abstract
The utility model discloses a multifunctional flexible tactile sensor, which is characterized in that a flexible polyimide circuit board serves as a substrate, a three-dimensional force sensing unit array and a temperature sensing unit array are respectively disposed on the substrate, three-dimensional force sensing units in the three-dimensional force sensing unit array and temperature sensing units in the temperature sensing unit array are mutually arranged at intervals, and surface heights of the temperature sensing units are lower than surface heights of the three-dimensional force sensing units, so that an integral distribution form in the shape of a concave-convex face is formed. The multifunctional flexible tactile sensor is fine in surface applicability, high in three-dimensional measurement reliability and small in cross interference of mechanical and temperature information.
Description
Technical field
The utility model belongs to field of sensing technologies, a kind of multifunction flexible touch sensor that is applied to robot of more specifically saying so.
Background technology
Sense of touch is the important sensation of biosome when directly contacting with external object, can know the multiple physical message of target object by sense of touch, as polyesthesia information such as the size of contact force, flexibility, hardness, elasticity, roughness, temperature and humidities.Touch sensor is the important means of the outside various information of intelligent robot perception.Multi-functional touch sensor has multiple sensors and many information processing technologies, so that obtain than the more tactile data of single-sensor.Along with robot begins to enter human daily life, can require it to have and human the same multiple perception, the multi-functional touch sensor of robot of research safety nature just seems particularly important.Particularly concerning the bionical and service robot that active demand is arranged, the multi-functional tactile sensor array that requires robot to be equipped with soft enough high precision, high resolving power and can to distribute arbitrarily, make robot tactile data such as sensed pressure, temperature exactly, realize safety and the mankind of dexterity and the interaction of robot.Sensor with the detection of flexibility and many tactile datas all has wide application prospects as numerous areas such as health, athletic training, rehabilitation medical, biomechanics, amusement and safety in many contact measurement occasions.
The flexible touch sensation sensor of realizing multiple measuring ability is the focus of studying in the world at present.The approach of its realization is to utilize the tactile sensing element of various rigidity mostly, relies on flexible institutional framework and combines, or utilize flexible material as the media that transmits tactile data.The Y.-J.Yang of Taiwan Univ. etc. has provided the method for making and the application of a kind of 32 * 32 temperature/tactile sensor array, temperature sensing unit adopts microelectric technique to make, dissimilar sensing units are arranged in the pros and cons of circuit substrate, and the sensor haptic unit can realize the one-dimensional force measurement.People such as the Jonathan Engel of Illinois, USA university utilize microelectromechanical systems (MEMS) manufacture craft, the standalone sensor spare of material behaviors such as identification material, temperature, power and hardness is distributed in polymkeric substance inside, the flexible multi-functional tactile sensing system of preparation recognizable object performance.
Analyze domestic and international research situation as can be known, remain in certain problem aspect the compatible and information of detection that present research detects in the flexibility of multi-functional touch sensor and many information stable.Utilize sensing units such as silicon pressure drag that microelectric technique makes, silicon temperature to contain very easily broken silicon diaphragm; even be implanted in the protective seam of polymkeric substance; can not guarantee the reliability between robot and operation object; surface adaptability is relatively poor, makes touch sensor be subjected to certain restriction on flexibility and continuous, large-area gaging pressure and temperature information.From domestic and international research situation as can be known, the relevant report of still not having the flexible multi-functional touch sensor of detected temperatures and three-dimensional force at present.
The utility model content
The utility model is for avoiding above-mentioned existing in prior technology weak point, provides that a kind of surperficial adaptability is good, three-dimensional force is measured reliability height, mechanics and the little full flexible multi-functional flexible touch sensation sensor of temperature information cross interference.
The utility model adopts following technical scheme for the technical solution problem:
The design feature of the utility model multifunction flexible touch sensor is to be substrate with the flexible polyimide circuit board, three-dimensional force sensing unit array and temperature sensing unit array are set respectively in described substrate, in the described three-dimensional force sensing unit array in each three-dimensional force sensing unit and the temperature sensing unit array each temperature sensing unit space arrange; And the surface elevation of described each temperature sensing unit is lower than the surface elevation of each three-dimensional force sensing unit, forms the whole distribution form that is male and fomale(M﹠F).
The design feature of the utility model multifunction flexible touch sensor also is:
Described three-dimensional force sensing unit be with carbon black filled silicon rubber as pressure sensitive material, described temperature sensing unit is as temperature-sensitive material with filled with carbon fibers silicon rubber.
Described temperature sensing unit adopts interdigital electrode, described three-dimensional force sensing unit is set to four covering of the fan electrodes, described four covering of the fan electrodes are to be the center with the public electrode, four size covering of the fan electrodes all identical with shape are mutually 90 ° in the periphery of public electrode, and concentric with public electrode, four independent separately signalization extension lines of covering of the fan electrode.
Compared with the prior art, the utility model beneficial effect is embodied in:
1, the utility model is provided with three-dimensional force sensing unit array and temperature sensing unit array jointly on a slice substrate, makes sensor can realize the sensing and the temperature sensing of three-dimensional force simultaneously, realizes the multiple function of touch sensor;
2, the height difference of sensor array different function units in the utility model can reduce the cross interference of temperature and three-dimensional force information significantly, improves thermometric accuracy;
3, the substrate in the utility model, pressure sensitive material and temperature-sensitive material are resilient material, allow sensor array to realize flexural deformation, make whole touch sensor can be applied in the various curved surfaces well;
4, the three-dimensional force sensing unit is set to four covering of the fan electrodes in the utility model, and it has better plane symmetry and more sample resistance component with respect to three covering of the fan electrodes, can effectively improve the measuring accuracy and the stability of three-dimensional force information.
Description of drawings
Fig. 1 is the utility model plane distribution synoptic diagram;
Fig. 2 is the utility model structural representation;
Fig. 3 (a) is the utility model three-dimensional force sensing unit electrode structure synoptic diagram;
Fig. 3 (b) is the utility model three-dimensional force sensing unit equivalent resistance synoptic diagram;
Fig. 4 (a) is the utility model temperature sensing unit electrode structure synoptic diagram;
Fig. 4 (b) is the utility model temperature sensing unit equivalent resistance synoptic diagram.
Embodiment
Referring to Fig. 1, Fig. 2, present embodiment is to be substrate 1 with the flexible polyimide circuit board, three-dimensional force sensing unit array and temperature sensing unit array are set respectively in substrate 1, in the three-dimensional force sensing unit array in each three-dimensional force sensing unit 2 and the temperature sensing unit array each temperature sensing unit 3 space arrange; And the surface elevation of each temperature sensing unit 3 is lower than the surface elevation of each three-dimensional force sensing unit 2, forms the whole distribution form that is male and fomale(M﹠F).
In concrete the enforcement, three-dimensional force sensing unit 2 be with carbon black filled silicon rubber as pressure sensitive material, be set to disk shape flexible pressure-sensitive conductive rubber; Temperature sensing unit 3 be with filled with carbon fibers silicon rubber as temperature-sensitive material, be set to the temperature sensitive conductive rubber of rectangle.These two kinds of materials are in " functional material " second phase in 2010, and " being used for the conducing composite material research of combined type flexible touch sensation sensor " literary composition that the people delivered such as Zhao Xing, Huang Ying has open report.
Shown in Figure 2, structurally, as the flexible polyimide circuit board of substrate 1, form hard-packed integral body as each unit conductive rubber of sensitive material and each cell electrode between substrate and conductive rubber.The surface elevation of three-dimensional force sensing unit is 1.7mm, and the surface elevation of temperature sensing unit is 0.6mm.
Shown in Fig. 4 (a) and Fig. 4 (b), temperature sensing unit adopts interdigital electrode 4, and variation of temperature can be brought the variation of sensing unit resistance R 5, R6, R7 and R8, by changes in resistance is detected and compensates, can obtain required temperature information.
Shown in Fig. 3 (a) and Fig. 3 (b), three-dimensional force sensing unit 2 is set to four covering of the fan electrodes 5, four covering of the fan electrodes are to be the center with public electrode 51, four size covering of the fan electrodes 52 all identical with shape are mutually 90 ° in the periphery of public electrode 51, and it is concentric with public electrode 51, four the independent separately signalization extension line of covering of the fan electrode 52 a, b, c and d, the concrete making is to make four fan-shaped conductive regions and one to be positioned at the central circular conductive region on the flexible polyimide printed circuit board (PCB), flexible pressure-sensitive conductive rubber is adhered on the circuit board, and the resistance between four fan-shaped conductive regions and the middle circular conductive area is respectively R1, R2, R3 and R4.When three-dimensional force acts on the flexible pressure-sensitive conductive rubber surface, because the piezoresistive effect of pressure-sensitive conductive rubber and the surface resistance effect between pressure-sensitive conductive rubber and the flexible circuit plate electrode, the corresponding variation will take place in the resistance of four equivalent resistance R1, R2, R3 and R4, by circuit changes in resistance is detected, handle through matrix operation again, obtain the three-dimensional force F that it comprises
X, F
YAnd F
ZInformation.
The manufacture craft of the utility model multifunction flexible touch sensor is:
At first adopt standard flexible PCB manufacturing technology to make the flexible polyimide circuit board;
Adopt screen printing technique on the flexible polyimide circuit board, to make three-dimensional force sensing unit electrode and responsive to temperature cell electrode again;
At last at room temperature adopt solution blending technology to make the mixed solution of flexible pressure-sensitive conductive rubber and the mixed solution of responsive to temperature conductive rubber respectively; Pour mixed solution into mould, curing molding under the room temperature.
Claims (3)
1. multifunction flexible touch sensor, it is characterized in that with flexible polyimide circuit board (1) be substrate, three-dimensional force sensing unit array and temperature sensing unit array are set respectively in described substrate, in the described three-dimensional force sensing unit array in each three-dimensional force sensing unit (2) and the temperature sensing unit array each temperature sensing unit (3) space arrange; And the surface elevation of described each temperature sensing unit (3) is lower than the surface elevation of each three-dimensional force sensing unit (2), forms the whole distribution form that is male and fomale(M﹠F).
2. multifunction flexible touch sensor according to claim 1, it is characterized in that described three-dimensional force sensing unit (2) be with carbon black filled silicon rubber as pressure sensitive material, described temperature sensing unit (3) is as temperature-sensitive material with filled with carbon fibers silicon rubber.
3. multifunction flexible touch sensor according to claim 1 and 2, it is characterized in that described temperature sensing unit adopts interdigital electrode, described three-dimensional force sensing unit (2) is set to four covering of the fan electrodes, described four covering of the fan electrodes are to be the center with public electrode (51), four size covering of the fan electrodes (52) all identical with shape are mutually 90 ° in the periphery of public electrode (51), and concentric with public electrode (51), the independent separately signalization extension line of four covering of the fan electrodes (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200570878U CN201993187U (en) | 2011-03-07 | 2011-03-07 | Multifunctional flexible tactile sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200570878U CN201993187U (en) | 2011-03-07 | 2011-03-07 | Multifunctional flexible tactile sensor |
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| CN201993187U true CN201993187U (en) | 2011-09-28 |
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| CN2011200570878U Expired - Fee Related CN201993187U (en) | 2011-03-07 | 2011-03-07 | Multifunctional flexible tactile sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104271264A (en) * | 2012-05-01 | 2015-01-07 | 富士胶片戴麦提克斯公司 | Ultra wide bandwidth transducer with dual electrode |
| CN105286814A (en) * | 2015-10-16 | 2016-02-03 | 上海磐启微电子有限公司 | Flexible capacitive pulse sensor array |
| US9647195B2 (en) | 2012-05-01 | 2017-05-09 | Fujifilm Dimatix, Inc. | Multi-frequency ultra wide bandwidth transducer |
| US9660170B2 (en) | 2012-10-26 | 2017-05-23 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer arrays with multiple harmonic modes |
| CN108332794A (en) * | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN110702304A (en) * | 2019-10-17 | 2020-01-17 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin force touch information calibration method based on temperature |
| CN111554756A (en) * | 2020-05-15 | 2020-08-18 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
-
2011
- 2011-03-07 CN CN2011200570878U patent/CN201993187U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104271264A (en) * | 2012-05-01 | 2015-01-07 | 富士胶片戴麦提克斯公司 | Ultra wide bandwidth transducer with dual electrode |
| US9647195B2 (en) | 2012-05-01 | 2017-05-09 | Fujifilm Dimatix, Inc. | Multi-frequency ultra wide bandwidth transducer |
| CN104271264B (en) * | 2012-05-01 | 2017-07-21 | 富士胶片戴麦提克斯公司 | Ultra wide band transducer with bipolar electrode |
| US9660170B2 (en) | 2012-10-26 | 2017-05-23 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer arrays with multiple harmonic modes |
| US10589317B2 (en) | 2012-10-26 | 2020-03-17 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer arrays with multiple harmonic modes |
| CN105286814A (en) * | 2015-10-16 | 2016-02-03 | 上海磐启微电子有限公司 | Flexible capacitive pulse sensor array |
| CN108332794A (en) * | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN110702304A (en) * | 2019-10-17 | 2020-01-17 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin force touch information calibration method based on temperature |
| CN110702304B (en) * | 2019-10-17 | 2021-01-15 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin force touch information calibration method based on temperature |
| CN111554756A (en) * | 2020-05-15 | 2020-08-18 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
| CN111554756B (en) * | 2020-05-15 | 2022-04-15 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110928 Termination date: 20140307 |