CN201508161U - Space wave filtering hologram-interferometer - Google Patents
Space wave filtering hologram-interferometer Download PDFInfo
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- CN201508161U CN201508161U CN2009201122566U CN200920112256U CN201508161U CN 201508161 U CN201508161 U CN 201508161U CN 2009201122566 U CN2009201122566 U CN 2009201122566U CN 200920112256 U CN200920112256 U CN 200920112256U CN 201508161 U CN201508161 U CN 201508161U
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Abstract
The utility model relates to a space wave filtering hologram-interferometer, which belongs to the filed of an instrument with the characteristic of adopting an optical measuring method. The space wave filtering hologram-interferometer comprises a coherent light source, a half wave plate, a calcspar sheet, a second half wave plate, a phase object, a phase compensator, a slit plate, a holographic plate, a lens, a space wave filter, a second lens, an area array photoelectric sensor and a display, wherein the half wave plate, the calcspar sheet, the second half wave plate, the phase object, the phase compensator, the slit plate, the holographic plate, the lens, the space wave filter, the second lens, the area array photoelectric sensor and the display are sequentially arranged in the light ray direction of the light source, the second half wave plate is in the arrangement parallel to the phase object and the phase compensator, after the light beams go through the calcspar sheet, two beams of parallel light beams are reflected out, and interference fringes are respectively formed through a slit S1 and a slit S2 to be recorded by the holographic plate. The movable slit is regulated to S3, the interference fringes of the light beams formed by passing through the slit S3 and the slit S2 are recorded on the same holographic plate, and the diffraction light passing through the slit S2 is used as reappearance light to be irradiated on the holographic plate for rebuilding the diffracted wave front of the slit S1 and the slit S3 and forming the three-wave surface diffracted wave front with the diffracted waves thereof. The utility model is suitable for being used for measuring the tiny optical length change in the optical path, and has the characteristics of reasonable design, high stability, high precision and the like.
Description
Technical field:
The utility model relates to the field for adopting the instrument of measuring method for its feature, particularly a kind of spatial filtering hologram-interferometer.This interferometer is mainly used in the small change in optical path length of measuring in the light path.
Background technology:
Classical interferometer generally can be divided into double beam interferometer and multiple-beam interferometer, uniform thickness or equal inclination interferometer, their advantage is simple in structure, easy to use, but they are high and need carry out restriction to some extent in manufacture process and practical application in stable operating environment to the accuracy requirement of element.Because hologram-interferometer is low to the precision requirement of optical component.Can write down and can measure in real time surface deformation.Therefore some hologram-interferometers are suggested.Holography three seam interferometers and modulation centre joint position holography three seam interferometers mutually comprising a side seam position phase of modulation.Although constitute the technology formerly of these interferometers certain advantage is arranged, still comes with some shortcomings:
(1), these two kinds of methods are to reproducing the requirement height of illumination light, with respect to former reference light a small skew is arranged if reproduce illumination light, the optical field distribution of playback light will have than big difference with former two-slit diffraction light field, at this moment no longer conform to before the diffracted wave of the two side seam wavefront of Zai Xianing and the centre joint, both can not form interferogram.Can think that interferogram disappears this moment, device can not be worked.
(2), precision is not high, fails to get rid of stray light.
The utility model content
Problem to be solved in the utility model has been to overcome the deficiency of above-mentioned technology formerly, a kind of hologram-interferometer based on spatial filtering is provided, and it has guaranteed the phase assignments of reconstruct wavefront and has not been excited the influence of drift of the less direction of light beam and trickle exterior vibration.And have good operating stability, simple in structure, the measuring accuracy advantages of higher.
Basic design of the present utility model is:
The utility model provides a kind of interferometer that utilizes spatial filtering and holographic technique.It comprises light source and constitutes along half-wave plate, calcite plate, second half-wave plate, phase object, phase compensator, slit plate, holographic dry plate, lens, spatial filter, second lens, face array photoelectric sensor, display that the radiation direction of the light source that produces linearly polarized light sets gradually; Second half-wave plate is parallel to phase object and phase compensator is placed; Slit plate has adjustable slit and fixed slit; The spatial filter aperture is adjustable.From the adjacent directional light of two bundles of calcite plate outgoing, a branch of light is through arriving seam S by phase compensator behind the phase object
1, the fixing seam of second half-wave plate arrival S that another Shu Guang places through being parallel to phase object and phase compensator
2By seam S
1With seam S
2The light of diffraction forms a series of interference fringes and is recorded on the holographic dry plate.Adjust the removable S that is sewn to
3The position, and keep seam S
3To seam S
2Distance and the seam S
1To seam S
2Distance equate.Make by seam S
3With seam S
2Diffraction light form a series of interference fringe and be recorded on the same holographic dry plate, behind the treated and holographic dry plate that resets, by fixing seam S
2Diffraction light shine holographic dry plate as playback light, reconstruct the seam S
1With seam S
3Diffracted wave before.Simultaneously through fixing seam S
2Diffraction light direct irradiation holographic dry plate, with other two the seam diffracted wave constitute three corrugated diffracted waves before, on the lens back focal plane, form three corrugated diffraction spectrums, utilize spatial filter elimination stray light, convergence entering surface array photoelectric sensor through second lens demonstrates the result by display at last.
Technical solution of the present utility model is as follows:
The utility model provides a kind of interferometer that utilizes spatial filtering and holographic technique.It comprises that coherent source, half-wave plate, calcite plate, second half-wave plate, phase object, phase compensator, slit plate, holographic dry plate, lens, spatial filter, lens, face array photoelectric sensor, display constitute; Half-wave plate is parallel to phase object and phase compensator is placed; Slit plate has adjustable slit and fixed slit; Spatial filter is the aperture adjustable filter.Be equipped with half-wave plate, calcite plate, half-wave plate, phase object, phase compensator, slit plate, holographic dry plate, lens, spatial filter, lens, face array photoelectric sensor, display successively on the coherent source outgoing beam direction.
The calcite plate of above-mentioned implementation space filtering hologram-interferometer is parallel its surperficial optics of optical axis.
A kind of implementation space filtering hologram-interferometer that the utility model provides is structure as mentioned above, the course of work is: the coherent light beam of coherent source outgoing is through half-wave plate, half-wave plate can be modulated the intensity from two adjacent directional lights of calcite plate outgoing, two directional lights of outgoing are a branch of through phase object, arrive removable seam S through phase compensator again
1, and another Shu Guang is through arriving fixing seam S behind the half-wave plate
2, half-wave plate does not change the polarization direction of elementary beam.By seam S
1With seam S
2Two diffraction lights through interference to form a series of interference fringes and be recorded on the holographic dry plate, adjust the removable S that is sewn to
3The position, and keep seam S
3To seam S
2Distance and the seam S
1To seam S
2Distance equates.Make by seam S
3With seam S
2Diffraction light interfere again and form a series of interference fringe and be recorded on the same holographic dry plate, behind the treated and holographic dry plate that resets, allow by fixing seam S
2Diffraction light shine holographic dry plate as playback light, reconstruct the seam S
1With seam S
3Diffracted wave before.Simultaneously through fixing seam S
2Diffraction light direct irradiation holographic dry plate, with other two the seam diffracted wave constitute three corrugated diffracted waves before.Form three corrugated diffraction spectrums on the back focal plane of lens, utilize spatial filter elimination stray light, the convergence entering surface array photoelectric sensor through lens demonstrates the result by display at last.
Compare advantage of the present utility model with technology formerly:
1) simple in structure, easy to operate and have good stability and than high measurement accuracy.
2) determine target light field, reference light and the relative position that reproduces illumination light with two adjacent seams, and filter the stray light that causes by design by wave filter.The light of playback light and record is consistent, and interferogram is easier to observe.
Description of drawings:
Fig. 1 is the system architecture synoptic diagram of the utility model embodiment.
Embodiment
Below in conjunction with description of drawings embodiment of the present utility model is described in further detail, but present embodiment has more than and be used to limit the utility model, every employing analog structure of the present utility model and similar variation thereof all should be listed protection domain of the present utility model in.
A kind of implementation space filtering hologram-interferometer that the utility model embodiment is provided, Fig. 1 are the utility model embodiment synoptic diagram.A kind of spatial filtering hologram-interferometer is characterized in that system is made of coherent source 1, half-wave plate 2, calcite plate 3, half-wave plate 4, phase object 5, phase compensator 6, slit plate 7, holographic dry plate 8, lens 9, spatial filter 10, lens 11, face array photoelectric sensor 12, display 13; Half-wave plate 4 is parallel to phase object 5 and phase compensator 6 is placed; Slit plate 7 has adjustable slit and fixed slit; Spatial filter 10 is the aperture adjustable filter.Be equipped with half-wave plate 2, calcite plate 3, half-wave plate 4, phase object 5, phase compensator 6, slit plate 7, holographic dry plate 8, lens 9, spatial filter 10, lens 11, face array photoelectric sensor 12, display 13 successively on the coherent source emission element 1 outgoing beam direction.4 of half-wave plates are parallel to phase object 5 and phase compensator 6 is placed.Half-wave plate 2 can be modulated the intensity from two adjacent directional lights of calcite plate 3 outgoing, and two directional lights of outgoing are a branch of through phase object 5, arrives removable seam S through phase compensator 6 again
1, and another Shu Guang arrives fixing seam S through half-wave plate 4 backs
2, half-wave plate 4 does not change the polarization direction of elementary beam.By seam S
1With seam S
2Two diffraction lights form a series of interference fringes and be recorded on the holographic dry plate 8, adjust the removable S that is sewn to
3The position, and keep seam S
3To seam S
2Distance and the seam S
1To seam S
2Distance equates.By seam S
3With seam S
2Diffraction light form a series of interference fringe and be recorded on the same holographic dry plate 8, behind the treated and holographic dry plate 8 that resets, allow by fixing seam S
2Diffraction light as playback light irradiation holographic dry plate 8, reconstruct seam S
1With seam S
3Diffracted wave before.Simultaneously through fixing seam S
2Diffraction light direct irradiation holographic dry plate 8, with other two the seam diffracted wave constitute three corrugated diffracted waves before.Form three corrugated diffraction spectrums on the back focal plane of lens 9, utilize spatial filter 10 elimination stray lights, the convergence entering surface array photoelectric sensor 12 of process lens 11 is scanned reception, demonstrates the result by display at last.
Adopt said method, we have detected the electrooptical effect of lithium columbate crystal.Sample is rectangle, and its size is for 5mm*5mm*40mm and correspond respectively to X, Y, Z direction.Optical axis is parallel to X-axis.The laser beam irradiation centre joint also passes through crystal along the Z axle.The electric vector of light field is parallel to Y-axis.The external static electrification field is added on the crystal along Y-axis.Can observe light intensity changes along with the variation of external static voltage.The refractive index of this explanation crystal changes along with the variation of external voltage.We have measured the refractive index change delta n value of crystal.
Claims (2)
1. spatial filtering hologram-interferometer, it is characterized in that: system is made of coherent source (1), half-wave plate (2), calcite plate (3), half-wave plate (4), phase object (5), phase compensator (6), slit plate (7), holographic dry plate (8), lens (9), spatial filter (10), lens (11), face array photoelectric sensor (12), display (13); Half-wave plate (4) is parallel to phase object (5) and phase compensator (6) is placed; Slit plate (7) has adjustable slit and fixed slit; Spatial filter (10) is the aperture adjustable filter.
2. spatial filtering hologram-interferometer according to claim 1, it is characterized in that: calcite plate (3) is the optics of optical axis parallel surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201122566U CN201508161U (en) | 2009-01-08 | 2009-01-08 | Space wave filtering hologram-interferometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201122566U CN201508161U (en) | 2009-01-08 | 2009-01-08 | Space wave filtering hologram-interferometer |
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| CN201508161U true CN201508161U (en) | 2010-06-16 |
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| CN2009201122566U Expired - Fee Related CN201508161U (en) | 2009-01-08 | 2009-01-08 | Space wave filtering hologram-interferometer |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097857A (en) * | 2010-09-07 | 2013-05-08 | 大日本印刷株式会社 | Scanner device and device for measuring three-dimensional shape of object |
| CN107305289A (en) * | 2016-04-20 | 2017-10-31 | 中国科学院化学研究所 | A kind of optical system and its method of work for microcell spatial coherence pattern |
| CN108231094A (en) * | 2013-01-07 | 2018-06-29 | 阿森蒂亚影像有限公司 | Use the optical guidance system and method for the signal correction sensor being distinguished from each other |
| CN111900597A (en) * | 2020-08-17 | 2020-11-06 | 武汉金顿激光科技有限公司 | Planar multi-beam laser parameter regulation and control method and system |
| CN112969899A (en) * | 2018-10-30 | 2021-06-15 | Rd 辛纳基有限公司 | System and method for holographic interferometry |
| US11092662B2 (en) | 2012-01-03 | 2021-08-17 | Ascentia Imaging, Inc. | Optical guidance systems and methods using mutually distinct signal-modifying sensors |
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
-
2009
- 2009-01-08 CN CN2009201122566U patent/CN201508161U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097857A (en) * | 2010-09-07 | 2013-05-08 | 大日本印刷株式会社 | Scanner device and device for measuring three-dimensional shape of object |
| CN103097857B (en) * | 2010-09-07 | 2014-12-24 | 大日本印刷株式会社 | Scanner device and device for measuring three-dimensional shape of object |
| US11092662B2 (en) | 2012-01-03 | 2021-08-17 | Ascentia Imaging, Inc. | Optical guidance systems and methods using mutually distinct signal-modifying sensors |
| US12130642B2 (en) | 2012-01-03 | 2024-10-29 | Ascentia Imaging, Inc. | Optical guidance systems and methods using mutually distinct signal-modifying sensors |
| CN108231094A (en) * | 2013-01-07 | 2018-06-29 | 阿森蒂亚影像有限公司 | Use the optical guidance system and method for the signal correction sensor being distinguished from each other |
| CN107305289A (en) * | 2016-04-20 | 2017-10-31 | 中国科学院化学研究所 | A kind of optical system and its method of work for microcell spatial coherence pattern |
| CN107305289B (en) * | 2016-04-20 | 2019-10-01 | 中国科学院化学研究所 | A kind of optical system and its working method for microcell spatial coherence pattern |
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| CN112969899A (en) * | 2018-10-30 | 2021-06-15 | Rd 辛纳基有限公司 | System and method for holographic interferometry |
| CN112969899B (en) * | 2018-10-30 | 2023-03-10 | Rd 辛纳基有限公司 | System and method for holographic interferometry |
| US11719531B2 (en) | 2018-10-30 | 2023-08-08 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| CN111900597A (en) * | 2020-08-17 | 2020-11-06 | 武汉金顿激光科技有限公司 | Planar multi-beam laser parameter regulation and control method and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100616 Termination date: 20110108 |