CN1757445B - Composition for preparing low dielectric material containing solvent - Google Patents

Abstract

Silica-based materials and films having a dielectric constant of 3.7 or below and compositions and methods for making and using same are disclosed herein. In one aspect, there is provided a composition for preparing a silica-based material comprising an at least one silica source, a solvent, an at least one porogen, optionally a catalyst, and optionally a flow additive wherein the solvent boils at a temperature ranging from 90 DEG C. to 170 DEG C. and is selected from the group of compounds represented by the following formulas: HO-CHR<SUP>8</SUP>-CHR<SUP>9</SUP>-CH<SUB>2</SUB>-CHR<SUP>10</SUP>R<SUP>11 </SUP>where R<SUP>8</SUP>, R<SUP>9</SUP>, R<SUP>10 </SUP>and R<SUP>11 </SUP>can independently be an alkyl group ranging from 1 to 4 carbon atoms or a hydrogen atom; and R<SUP>12</SUP>-CO-R<SUP>13 </SUP>where R<SUP>12 </SUP>is a hydrocarbon group having from 3 to 6 carbon atoms; R<SUP>13 </SUP>is a hydrocarbon group having from 1 to 3 carbon atoms; and mixtures thereof.

Description

Be used to prepare the composition of solvent-laden dielectric materials

The cross reference of related application

The application requires the U.S. Provisional Application No.60/549 of submission on March 2nd, 2004,251 priority.

Background technology

Present invention relates in general to be applicable to for example material of electronic device.

In microelectronics industry, the current densities that improves in multilevel integration device such as memory and the logic chip is existed lasting requirement to improve the speed of service and to reduce power consumption.In order to continue to reduce the device size on the integrated circuit, the existing necessary insulator with low-k of using is with capacitance-resistance (" the RC ") time delay that reduces interconnect metallization and prevent capacitive cross-talk between the different layers metallization.Such dielectric materials is desirable for metal precursor (premetal) dielectric layer and interlayer dielectric layer.

The typical dielectric material that is used to have the device of 180nm live width is the material that dielectric constant is about 3.8-4.2.Along with live width reduces, dielectric constant also should reduce.For example, the device with 130nm live width needs dielectric constant to be about the material of 2.5-3.0.Utmost point low-k (" ELK ") material has the dielectric constant of about 2.0-2.5 usually.Device with 90nm live width needs dielectric constant less than 2.4 material.

Made and prepared low dielectric constant films in many ways.Usually use chemical vapor deposition (CVD) and spinning dielectric (SOD) method to prepare the film of insulating barrier.The low κ material of many kinds by these deposition techniques generally is divided into many types, as pure inorganic material, ceramic material, silica-based materials, pure organic materials or inorganic-organic mixed material.Similarly, made and solidified these materials in many ways, decomposing and/or to remove volatile ingredient and crosslinked subsequently these films for example heat these materials, and with these materials of plasma, electron beam or ultraviolet radiation treatment.

Because the dielectric constant of air is generally 1.0, thereby a kind of method of reduction material dielectric constant can be to introduce pore.In dielectric materials, introduce air hole structure by many different measure.Compare with the film of densification, when making the dielectric film porous, dielectric film may show lower dielectric constant, and still, the elastic modelling quantity of film generally can be along with porosity improves and reduces.Therefore, for the balance of dielectric constant and elastic modelling quantity, it may be unpractical using these low dielectric combinations.

Generally can not reduce the dielectric constant (K) of material and do not have the corresponding reduction of material mechanical performance, be i.e. the modulus of material, hardness etc.For subsequently procedure of processing such as etching, CMP (" chemical-mechanical planarization ") and deposition of additional layer for example copper, the diffusion impervious layer of copper metal (" Cu ") and the cover layer on product, all need mechanical strength.These processes certain some in, the temperature cycles of multilayer may ftracture or leafing thereby produce owing to the coefficient of thermal expansion mismatch between different materials is brought out stress.Surface plane also needs, and can keep by the control technological parameter, the technological parameter in film forming procedure for example, and keep by CMP.Mechanics uniformity or toughness, compression and shear strength may particular importances for standing CMP.

Another problem in the production of dielectric materials and respective films is the content of the metal impurities that exist in the material.In order to make low dielectric film be fit to integrated circuit (IC) manufacturing, wish that film has controlled impurity content.In other words, this film should use the one-tenth with minimum content non-volatile impurities to assign to deposit, and these impurity may have infringement to the silica-based insulator film in the microelectronic component.In IC industry, well-known, alkali metal ion for example sodium and potassium should be removed from the silica membrane as metal-oxide semiconductor (MOS) (" MOS ") transistor insulation body and multilayer interconnection insulator.

The commercially available chemical reagent of some that use in low dielectric film production contains alkali metal impurity.These impurity may derive from used relict catalyst in chemical precursor body reagent manufacture process.NaOH, KOH or NaOCH in the base catalysis ethoxylation process of fatty alcohol, alkyl phenol and aliphatic acid ₃Be generally 0.005-0.05 with the ratio of alcohol: 1 mole.Referring to as people such as Lynn, " Surfactants ", Kirk-OthmerEncyclopedia of Chemical Technology, John Wiley ﹠amp; Sons, Inc. (1997).For example, at TRITON ^TMIn the production of X-114, promptly a kind of every mol of alcohol has in the production of alkylphenol ethoxylate of average 7.5 mole ethoxylates, and the use that every mol of alcohol contains 0.005 moles of NaOH may cause having the sodium of 214ppm in final product.Such remainder catalyst impurity content consequence in the common application of these chemical substances is very little, because often use surfactant by low like this consumption, makes the catalyst impurities content that is brought by surfactant become inessential in final prescription.According to the molecular weight of expection, can use the different polymer of catalyst system preparation such as polyethylene glycol (PEG).For less than 20,000 molecular weight, use the Na of alkali or methyl alcohol or butanols ⁺Or K ⁺Alkoxide is as catalyst.Referring to as Glass, J.E. " Water-Soluble Polymers ", Kirk-Othmer Encyclopedia ofChemical Technology, John Wiley ﹠amp; Sons, Inc. (1988).The same with surfactant, solvent also may contain remaining catalyst impurities.For example, when hope is higher than secondary ether to the selectivity of primary alkyl ether, form as propylene glycol propyl ether (PGPE) by the reaction of expoxy propane with alcohol, normally base catalysis, this may cause the impurity of remnants.Referring to people such as for example Brown, " Glycols:Ethylene Glycol andProptlene Glycol ", Kirk-Othmer Encyclopedia of Chemical Technology, 3rd ed, JohnWiley ﹠amp; Sons, N.Y. (1980), Vol.11, p953.Another impurity source may come from the carelessness to details, for example in the outdoor packing or the operation of clean room, because do not need strict like this purity requirement for conventional application.

It is that every type of alkali-metal maximum is about 20ppb and total amount less than 50ppb that the alkali metal impurity regulation that is used for the chemical precursor liquid solution of integrated circuit purposes is set the impurity content that allows usually.Limit the material supplier of the IC industry reagent of can purifying in order to satisfy these.Transfer the possession of the list of references EP1 in present assignee, how 142,832 purifications that the surfactant that is used as pore source (porogen) in the film forming mixture has been discussed influence the dielectric and the mechanical property of gained film unfriendly.U.S. Patent No. 6,472, even 079 surfactant has been discussed is not existed, how the purification of reagent influences the dielectric properties of gained film unfriendly.

Below with reference to document, U.S. Patent No. 6,406,794,6,329,017,6,495,479,6,126,733, U.S. Patent application No.2002/0189495, EP1123753 and Chem.Master.2001 13,2762 and 1848, the various compositions that are used to form dielectric film are provided, and it comprises the chemical reagent such as at least a silicon source, pore source and solvent.These lists of references are not disclosed in and join purify before the composition chemical reagent, particularly pore source, in order to remove alkali metal impurity.Some list of references such as U.S. Patent No. 6,376,634 and 6,126,733 have discussed the reagent of purifying before joining composition.But as previously mentioned, purification process may influence the dielectric constant and/or the mechanical property of material unfriendly in some cases.

As mentioned above, solvent is a kind of typical component that is used for spinning dielectric film prescription.In these prescriptions, be used to make thin film deposition should in reasonable time, volatilize at suprabasil solvent, for example＜5 minute, and should provide highly uniform, flawless film.

It is necessary that production ability highly even, the zero defect film successfully is integrated into the IC structure for the SOD film.The SOD film can use closed, semi-enclosed or open rotation bowl bodies to form.In enclosed rotation bowl bodies, a lid is arranged in the rotating room, is sprawling, is keeping sealing in thinning and the dry film process this rotating room.This structure allows the environment control to wafer top atmosphere, thus when film forms and reduce varied in thickness on film defects such as striped or the wafer evaporation process of easier control solvent.The same with closed rotation bowl bodies, semi-enclosed rotation bowl bodies has a lid or platen, and it can be adjusted in film formation process, but allows film to be exposed under the environmental condition in the process of distribution and film forming really.Its turbulent flow and evaporation process are controlled in being adjusted at of lid or platen when solvent leaves film, thereby obtain the excellence control to film forming procedure.In open rotation bowl bodies, there is not lid on the process equipment.Therefore, distribute, sprawl, thinning and drying steps more depend on employed solvent in the mixture, because there is not the selectable physical method that can change the solvent evaporation characteristic.

In semi-enclosed and open rotation bowl bodies, film-forming composition and wafer are more responsive to environmental condition; Thereby the evaporation rate of restive bowl internal solvent.The performance of solvent in this film-forming composition that need use in semi-enclosed or open bowl bodies, promptly solvent boiling temperature, surface tension, viscosity and evaporation rate are suitable for reducing the uniformity on defective and the maintenance wafer.If solvent nature is improper, so for example film defects such as striped, hole, whirlpool, uneven thickness can produce, and they can cause component failure in subsequent process.

Also having the association attributes of a film-forming composition is room temperature storage stability.The definition of stability of film forming solution can be kept thickness, refractive index, dielectric constant and the mechanical performance of the film that is made by film-forming composition for when composition stores under environmental condition.Room temperature storage stability can reduce expense that is used to refrigerate and the process equipment downtime that unexpected device interrupt causes, and prepares manageable stock's control and described interruption needs draining, wash, refill and check again chemical pipeline to add.In the responseless reaction system of one or more film-forming composition components, its storage stability is usually than containing the composition weak point of the polymer of complete reaction therein.

Summary of the invention

Described herein is that dielectric constant is 3.7 or following silica-based materials and film and composition and the method that is used to prepare them.

On the one hand, provide and be used to produce that to have dielectric constant be about 3.7 or the composition of lower silica-based materials, it comprises: at least a silica source, solvent, at least a pore source, optional catalyst and optional flowing additive, wherein solvent seethes with excitement in 90 ℃-170 ℃ temperature range, and it is selected from the compound that is expressed from the next: HO-CHR ⁸-CHR ⁹-CH ₂-CHR ¹⁰R ¹¹, R wherein ⁸, R ⁹, R ¹⁰And R ¹¹Be the alkyl group or the hydrogen atom of 1-4 carbon atom independently; And R ¹²-CO-R ¹³, R wherein ¹²Be alkyl with 3-6 carbon atom, R ¹³It is alkyl with 1-3 carbon atom; And their mixture.

On the other hand, provide that to be used to generate dielectric constant be about 3.7 or the composition of lower silica-based thin film, comprised: at least a silica source, solvent, optional at least a pore source, optional catalyst and flowing additive.

Again on the one hand, provide that to be used to generate dielectric constant be 3.7 or the method for lower silica-based thin film, comprise: a kind of composition is provided, comprise at least a silica source, solvent, optional at least a pore source, optional at least a catalyst and optional flowing additive, wherein solvent seethes with excitement in 90 ℃-170 ℃ temperature range; The bowl bodies that utilization is selected from open rotation bowl bodies and semi-enclosed rotation bowl bodies is deposited in the substrate to generate the coated substrate composition; And the cured coated substrate is to form silica-based thin film.

Darker one side, provide that to be used to generate dielectric constant be 3.7 or the method for lower silica-based thin film, comprise: a kind of composition is provided, said composition comprises at least a silica source, at least a solvent, water and catalyst, and wherein at least a silica source partial hydrolysis is to provide a kind of low boiling point solvent; Removing about 20-about 75% low boiling point solvent of total moles and total moles from composition is the water of 20-80%, so that concentrated composition to be provided; The bowl bodies that utilization is selected from open rotation bowl bodies and semi-enclosed rotation bowl bodies is deposited in the substrate to generate the coated substrate concentrated composition; And under one or more temperature, solidify the enough time of this coated substrate to form silica-based thin film.

Further on the one hand, provide that to be used to generate dielectric constant be 3.7 or the method for lower silica-based thin film, comprise: a kind of composition is provided, and said composition comprises at least a silica source, a kind of solvent, optional at least a pore source, optional a kind of catalyst and a kind of flowing additive; 3ml or composition still less are deposited in the substrate to form coated substrate, wherein deposit with Continuous Flow and carry out; And under one or more temperature, solidify the enough time of this coated substrate to form silica-based thin film.

Describe in detail

Described hereinly be silicon-dioxide-substrate dielectric materials, film and composition and be used to prepare their composition and method and the method for using them.Compare with the other materials of prior art, this material has relative low tenor with film and makes easily.Term " silica-based " and " silicon-dioxide-substrate " can be replaced use in specification.Though material described herein is very suitable for preparing film and its product mainly is described as film herein, is not limited to this.Material described herein can provide by the form of spin-on deposition or other technologies deposition with any, for example, coating, the assembling of multi-disc layer and nonessential flat or thin other types of articles and the nonessential multiple articles that is used for integrated circuit, but be not limited to this.Material described herein or film can be used for, for example electronic device.

Film described herein is forming as the composition of film-forming composition of mentioning of place thus.Can before forming film, prepare this composition, maybe can be chosen in and form this composition at least a portion film formation process.According to film build method, composition can be used as a kind of fluid and deposits in substrate.Liquid phase, gas phase and their mixture (as steam) of term used herein " fluid " expression composition.Term used herein " substrate " is any suitable composition, its described thin film cladding in and/or be formed at said composition before form.Operable suitable substrate includes but not limited to that semi-conducting material such as GaAs (" GaAs "), silicon and siliceous composition are as silicon metal, polysilicon, amorphous silicon, epitaxial silicon, silica (" SiO ₂"), silex glass, silicon nitride, vitreous silica, glass, quartz, Pyrex and their mixture.Other suitable substrate comprises the metal that is generally used for semiconductor, flat-panel monitor and flexible display.

Film-forming composition can deposit in substrate by several different methods, includes but not limited to dipping, roll extrusion, brushing, injection, extruding, spin-on deposition, printing and their hybrid mode.More typical deposition process comprises spreading force, the spreading force that gravity causes, the wetting spreading force that causes, die head extrusion molding and their combination that the non-contact type vibration causes.

In a specific embodiments, use the spin-on deposition method to be carried out to the deposition of film composition.Briefly, be distributed in film-forming composition in the substrate and evaporate the solvent that wherein comprises and form coated substrate.Further, use centrifugal force to be deposited in the substrate equably to guarantee film-forming composition.In these embodiments, the rotation bowl bodies can be closed, semi-enclosed or open rotation bowl bodies.In certain embodiments, solvent disclosed herein is used for open or semienclosed rotation bowl bodies advantageous particularly, because it may be difficult to change surrounding environment relatively between film forming stage.

Material of the present invention preferably comprises silica." silica " used herein, " silicon-dioxide-substrate " or " containing silica " are a kind of materials that contains silicon (Si) and oxygen (O) atom, and may contain other substituting group, such as but not limited to other element such as H, B, C, P, or halogen atom or organic group, as alkyl or aryl.In some preferred embodiments, this material can further comprise silicon-carbon bond, and the ratio of Si-C key sum and Si total atom number is about 20-about 80 moles of % or about 40-about 60 moles of %.

Said composition comprises at least a silica source and a kind of solvent usually.Said composition can further comprise other component, such as but not limited to water, at least a pore source, catalyst, flowing additive and/or ionic additive.In some embodiments, wherein composition comprises at least a pore source, pore source and pore source and SiO ₂The weight ratio of gross weight, promptly voidage is 0.9-0.1.This scope can change according to the dielectric constant of the expection of the material of being produced by said composition, because the dielectric constant of this material is inversely proportional to the weight ratio in pore source or is directly proportional with the voidage of composition/film.In aforesaid ratio, SiO ₂Weight calculate by the total mole number of the silicon of introducing by the silica source in the composition.But this must not mean it is that silica source is transformed into SiO fully ₂Contain in the embodiment of ionic additive at composition, the weight ratio in ionic additive and pore source is 0.5-0.In further embodiment, organic principle or R base are 0.2-3 with the mol ratio of Si, or 0.2-2, or 0.2-1.In embodiment further, the mol ratio of water and OR base (one or more) is 40-0.1, and wherein OR is bonded to organic group on the silicon by oxygen atom.

In certain embodiments, said composition adopts and satisfies the chemical substance that electronics industry requires, because they do not contain the pollutant that reduces the integrated circuit preparation efficiency.In said composition, avoid as halogen-containing inorganic acid, have the cationic surfactant of halogen counter ion and have the component of the anion surfactant of alkali metal counter ion, because they may bring undesirable ion for material of the present invention.In these embodiments, it is 1,000,000/(" ppm ") or still less that composition of the present invention contains content, 200/1000000000ths (" ppb ") or still less, or 50ppb or foreign metal still less.Therefore, material of the present invention can contain content be 1ppm or still less, 200ppb or still less or 50ppb or foreign metal still less.It is 1ppm or still less that the material of this paper preferably contains content, 750ppb or still less, or 500ppb or impurity halide still less.It is 1ppm or still less that chemical reagent in the composition contains content, 200ppb or still less, or 50ppb or foreign metal still less.In certain embodiments, if chemical reagent contains the foreign metal greater than 1ppm, this chemical reagent is purified before can be in adding composition.The U.S. of awaiting the reply applies for that openly 2004-0048960 provides the example of suitable chemical reagent and can be used in their method of purifying of film-forming composition, and the disclosure application is incorporated herein by reference and transfers the possession of the assignee in the application herein.

As previously mentioned, described composition comprises at least a silica source." silica source " used herein is a kind of compound that contains silicon (Si) and oxygen (O), and may contain other substituting group, and for example (but being not limited to) other element such as H, B, C, P or halogen atom or organic group are as alkyl or aryl.Term used herein " alkyl " comprises straight chain, side chain or cyclic alkyl, and it contains 1-24 carbon atom, or 1-12 carbon atom, or 1-5 carbon atom.This term also is used to contain moieties such as haloalkyl, alkaryl or the aralkyl of other group.Term " alkyl " also is used for substituted moieties, for example the moieties that replaces with the carbonyl functional group.Term used herein " aryl " is the 6-12 unit carbocyclic ring with aromatic character.Term " aryl " also is used for substituted aryl moiety.Silica source can comprise the material with high Si-O bond number amount, but can also comprise Si-O-Si bridge, Si-R-Si bridge, Si-C key, Si-H key, Si-F key or c h bond.In certain embodiments, described at least a silica source is given Si-OH key minimum in the dielectric material.

It below is the limiting examples that is applicable to the silica source of the present composition.In following chemical molecular formula and in presents all chemical molecular formulas in full, term " independently " is construed as and is meant that theme R group not only has the different target R groups of going up with respect to other and selects independently, and selects independently with respect to any other material of identical R group.For example, at R _aSi (OR ¹) _4-aAmong the Si, when " a " is 2, two R groups needn't be mutually the same or needn't with R ¹Identical.In addition, in the molecular formula below, it is that Si-C key or O-C key are bonded to the organic group on interested element such as Si or the O that term " any monovalent organic radical group " relates to by single C key.The example of any monovalent organic radical group comprises the unsaturated alkyl that alkyl, aryl, unsaturated alkyl and/or alkoxy, ester, acid, carbonyl or alkyl-carbonyl functional group replace.Alkyl can be straight chain, side chain or the cyclic alkyl that contains 1-5 carbon atom, for example methyl, ethyl, propyl group, butyl or amyl group.Be suitable for comprising phenyl, aminomethyl phenyl, ethylphenyl and fluorophenyl as the example of the aryl of any monovalent organic radical group.In certain embodiments, the one or more hydrogen in the alkyl can replace with other atom, and as halogen atom (being fluorine), or oxygen atom replaces to obtain carbonyl or ether functional group.

In certain embodiments, silica source can be expressed from the next: R _aSi (OR ¹) _4-a, wherein, R represents hydrogen atom, fluorine atom or any monovalent organic radical group independently; R ¹Represent any monovalent organic radical group independently; A is the integer of 1-2.By R _aSi (OR ¹) _4-aThe instantiation of the compound of expression comprises: MTMS, MTES, methyl three positive propoxy silane, methyl three isopropoxy silane, methyl three n-butoxy silane, methyl three sec-butoxy silane, methyl three tert-butoxy silane, methyl triple phenoxyl silane, ethyl trimethoxy silane, ethyl triethoxysilane, ethyl three positive propoxy silane, ethyl three isopropoxy silane, ethyl three n-butoxy silane, ethyl three sec-butoxy silane, ethyl three tert-butoxy silane, ethyl triple phenoxyl silane, the n-pro-pyl trimethoxy silane, the n-pro-pyl triethoxysilane, n-pro-pyl three positive propoxy silane, n-pro-pyl three isopropoxy silane, n-pro-pyl three n-butoxy silane, n-pro-pyl three sec-butoxy silane, n-pro-pyl three tert-butoxy silane, n-pro-pyl triple phenoxyl silane, the isopropyl trimethoxy silane, the isopropyl triethoxysilane, isopropyl three positive propoxy silane, isopropyl three isopropoxy silane, isopropyl three n-butoxy silane, isopropyl three sec-butoxy silane, isopropyl three tert-butoxy silane, isopropyl triple phenoxyl silane, the normal-butyl trimethoxy silane, ne-butyltriethoxysilaneand, normal-butyl three positive propoxy silane, normal-butyl three isopropoxy silane, normal-butyl three n-butoxy silane, normal-butyl three sec-butoxy silane, normal-butyl three tert-butoxy silane, normal-butyl triple phenoxyl silane, the sec-butyl trimethoxy silane, the sec-butyl triethoxysilane, sec-butyl three positive propoxy silane, sec-butyl three isopropoxy silane, sec-butyl three n-butoxy silane, sec-butyl three sec-butoxy silane, sec-butyl three tert-butoxy silane, sec-butyl triple phenoxyl silane, tert-butyl trimethoxy silane, tert-butyl group triethoxysilane, the tert-butyl group three positive propoxy silane, the tert-butyl group three isopropoxy silane, the tert-butyl group three n-butoxy silane, the tert-butyl group three sec-butoxy silane, the tert-butyl group three tert-butoxy silane, tert-butyl group triple phenoxyl silane, the isobutyl group trimethoxy silane, the isobutyl group triethoxysilane, isobutyl group three positive propoxy silane, isobutyl group three isopropoxy silane, isobutyl group three n-butoxy silane, isobutyl group three sec-butoxy silane, isobutyl group three tert-butoxy silane, isobutyl group triple phenoxyl silane, the n-pentyl trimethoxy silane, the n-pentyl triethoxysilane, n-pentyl three positive propoxy silane, n-pentyl three isopropoxy silane, n-pentyl three n-butoxy silane, n-pentyl three sec-butoxy silane, n-pentyl three tert-butoxy silane, n-pentyl triple phenoxyl silane, the sec-amyl trimethoxy silane, the sec-amyl triethoxysilane, sec-amyl three positive propoxy silane, sec-amyl three isopropoxy silane, sec-amyl three n-butoxy silane, sec-amyl three sec-butoxy silane, sec-amyl three tert-butoxy silane, sec-amyl triple phenoxyl silane, the tertiary pentyl trimethoxy silane, the tertiary pentyl triethoxysilane, tertiary pentyl three positive propoxy silane, tertiary pentyl three isopropoxy silane, tertiary pentyl three n-butoxy silane, tertiary pentyl three sec-butoxy silane, tertiary pentyl three tert-butoxy silane, tertiary pentyl triple phenoxyl silane, the isopentyl trimethoxy silane, the isopentyl triethoxysilane, isopentyl three positive propoxy silane, isopentyl three isopropoxy silane, isopentyl three n-butoxy silane, isopentyl three sec-butoxy silane, isopentyl three tert-butoxy silane, isopentyl triple phenoxyl silane, the neopentyl trimethoxy silane, the neopentyl triethoxysilane, neopentyl three positive propoxy silane, neopentyl three isopropoxy silane, neopentyl three n-butoxy silane, neopentyl three sec-butoxy silane, neopentyl three tert-butoxy silane, neopentyl triple phenoxyl silane, phenyltrimethoxysila,e, phenyl triethoxysilane, phenyl three positive propoxy silane, phenyl three isopropoxy silane, phenyl three n-butoxy silane, phenyl three sec-butoxy silane, phenyl three tert-butoxy silane, phenyl triple phenoxyl silane, δ-trifluoro propyl trimethoxy silane, δ-trifluoro propyl triethoxysilane, dimethyldimethoxysil,ne, dimethyldiethoxysilane, dimethyl two positive propoxy silane, dimethyl diisopropoxy silane, dimethyl two n-butoxy silane, dimethyl di-secondary butoxy silane, dimethyl two tert-butoxy silane, dimethyl hexichol TMOS, diethyl dimethoxy silane, the diethyl diethoxy silane, diethyl two positive propoxy silane, diethyl diisopropoxy silane, diethyl two n-butoxy silane, diethyl di-secondary butoxy silane, diethyl two tert-butoxy silane, diethyl hexichol TMOS, di dimethoxy silane, the di diethoxy silane, di two positive propoxy silane, di diisopropoxy silane, di two n-butoxy silane, di di-secondary butoxy silane, di two tert-butoxy silane, di hexichol TMOS, diisopropyl dimethoxy silane, the diisopropyl diethoxy silane, diisopropyl two positive propoxy silane, diisopropyl diisopropoxy silane, diisopropyl two n-butoxy silane, diisopropyl di-secondary butoxy silane, diisopropyl two tert-butoxy silane, diisopropyl hexichol TMOS, di-n-butyl dimethoxy silane, the di-n-butyl diethoxy silane, di-n-butyl two positive propoxy silane, di-n-butyl diisopropoxy silane, di-n-butyl two n-butoxy silane, di-n-butyl di-secondary butoxy silane, di-n-butyl two tert-butoxy silane, di-n-butyl hexichol TMOS, two sec-butyl dimethoxy silane, two sec-butyl diethoxy silanes, two sec-butyls, two positive propoxy silane, two sec-butyl diisopropoxy silane, two sec-butyls, two n-butoxy silane, two sec-butyl di-secondary butoxy silanes, two sec-butyls, two tert-butoxy silane, two sec-butyl hexichol TMOSs, di-t-butyl dimethoxy silane, the di-t-butyl diethoxy silane, di-t-butyl two positive propoxy silane, di-t-butyl diisopropoxy silane, di-t-butyl two n-butoxy silane, di-t-butyl di-secondary butoxy silane, di-t-butyl two tert-butoxy silane, di-t-butyl hexichol TMOS, dimethoxydiphenylsilane, the diphenyl diethoxy silane, diphenyl two positive propoxy silane, diphenyl diisopropoxy silane, diphenyl two n-butoxy silane, diphenyl di-secondary butoxy silane, diphenyl two tert-butoxy silane, diphenyl hexichol TMOS, methyl neopentyl dimethoxy silane, methyl neopentyl diethoxy silane, methyl dimethoxysilane, ethyl dimethoxy silane, n-pro-pyl dimethoxy silane, isopropyl dimethoxy silane, normal-butyl dimethoxy silane, sec-butyl dimethoxy silane, tert-butyl group dimethoxy silane, isobutyl group dimethoxy silane, n-pentyl dimethoxy silane, sec-amyl dimethoxy silane, tertiary pentyl dimethoxy silane, isopentyl dimethoxy silane, neopentyl dimethoxy silane, new hexyl dimethoxy silane, cyclohexyl dimethoxy silane, phenyl dimethoxy silane, methyldiethoxysilane, the ethyl diethoxy silane, the n-pro-pyl diethoxy silane, the isopropyl diethoxy silane, the normal-butyl diethoxy silane, the sec-butyl diethoxy silane, tert-butyl group diethoxy silane, the isobutyl group diethoxy silane, the n-pentyl diethoxy silane, the sec-amyl diethoxy silane, the tertiary pentyl diethoxy silane, the isopentyl diethoxy silane, the neopentyl diethoxy silane, new hexyl diethoxy silane, the cyclohexyl diethoxy silane, the diethylamino phenyl TMOS, trimethoxy silane, triethoxysilane, three positive propoxy silane, three isopropoxy silane, three n-butoxy silane, three sec-butoxy silane, three tert-butoxy silane, triple phenoxyl silane, allyltrimethoxysilanis, allyltriethoxysilane, vinyltrimethoxy silane, VTES, (3-acryloxy propyl group) trimethoxy silane, allyltrimethoxysilanis, allyltriethoxysilane, vinyltrimethoxy silane, VTES and (3-acryloxy propyl group) trimethoxy silane.In above-claimed cpd, preferred compound is MTMS, MTES, methyl three positive propoxy silane, methyl three isopropoxy silane, ethyl trimethoxy silane, ethyl triethoxysilane, dimethyldimethoxysil,ne, dimethyldiethoxysilane, diethyl dimethoxy silane and diethyl diethoxy silane.

Silica source can be formula Si (OR ²) ₄Shown compound, wherein, R ²Represent any monovalent organic radical group independently.By Si (OR ²) ₄The instantiation of the compound of expression comprises tetramethoxy-silicane, tetraethoxysilane, four positive propoxy silane, tetraisopropoxysilan, four n-butoxy silane, four sec-butoxy silane, four tert-butoxy silane, tetrem acyloxy silane and tetraphenoxy-silicane alkane.More than in preferred compound be tetramethoxy-silicane, tetraethoxysilane, four positive propoxy silane, tetraisopropoxysilan or tetraphenoxy-silicane alkane.

Silica source can be formula R ³ _b(R ⁴O) _3-bSi-(R ⁷)-Si (OR ⁵) _3-cR ⁶ _cShown compound, wherein, R ³And R ⁶Be hydrogen atom, fluorine atom or any monovalent organic radical group independently; R ⁴And R ⁵Be any monovalent organic radical group independently; B and c can be identical or different and each number of 0-2 naturally; R ⁷Be oxygen atom, phenylene, xenyl, naphthyl or by-(CH ₂) _nThe group of-expression, wherein n is the integer of 1-6; Perhaps their combination.R wherein ₇The instantiation that is these compounds of oxygen atom comprises: the hexa methoxy disiloxane, six ethyoxyl disiloxane, six phenoxy group disiloxane, 1,1,1,3,3-pentamethoxyl-3-methyl disiloxane, 1,1,1,3,3-five ethyoxyls-3-methyl disiloxane, 1,1,1,3,3-pentamethoxyl-3-phenyl disiloxane, 1,1,1,3,3-five ethyoxyls-3-phenyl disiloxane, 1,1,3,3-tetramethoxy-1,3-dimethyl disiloxane, 1,1,3,3-tetraethoxy-1,3-dimethyl disiloxane, 1,1,3,3-tetramethoxy-1,3-diphenyl disiloxane, 1,1,3,3-tetraethoxy-1,3-diphenyl disiloxane, 1,1,3-trimethoxy-1,3,3-trimethyl disiloxane, 1,1,3-triethoxy-1,3,3-trimethyl disiloxane, 1,1,3-trimethoxy-1,3,3-triphenyl disiloxane, 1,1,3-triethoxy-1,3,3-triphenyl disiloxane, 1,3-dimethoxy-1,1,3, the 3-tetramethyl disiloxane, 1,3-diethoxy-1,1,3, the 3-tetramethyl disiloxane, 1,3-dimethoxy-1,1,3,3-tetraphenyl disiloxane and 1,3-diethoxy-1,1,3,3-tetraphenyl disiloxane.Wherein, preferred compound is hexa methoxy disiloxane, six ethyoxyl disiloxane, six phenoxy group disiloxane, 1,1,3,3-tetramethoxy-1,3-dimethyl disiloxane, 1,1,3,3-tetraethoxy-1,3-dimethyl disiloxane, 1,1,3,3-tetramethoxy-1,3-diphenyl disiloxane, 1,3-dimethoxy-1,1,3,3-tetramethyl disiloxane, 1,3-diethoxy-1,1,3,3-tetramethyl disiloxane, 1,3-dimethoxy-1,1,3,3-tetraphenyl disiloxane and 1,3-diethoxy-1,1,3,3-tetraphenyl disiloxane.R wherein ⁷Be-(CH ₂) _n-shown in the instantiation of these compounds of group comprise: two (trimethoxysilyl) methane, two (triethoxysilyl) methane, two (triple phenoxyl silicyl) methane, two (dimethoxy-methyl silicyl) methane, two (diethoxymethyl silicyl) methane, two (Dimethoxyphenyl silicyl) methane, two (diethoxy phenyl silicyl) methane, two (methoxyl group dimetylsilyl) methane, two (ethyoxyl dimetylsilyl) methane, two (methoxyl group diphenylmethyl silylation) methane, two (ethoxy diphenyl base silicyl) methane, 1,2-two (trimethoxysilyl) ethane, 1,2-two (triethoxysilyl) ethane, 1,2-two (triple phenoxyl silicyl) ethane, 1,2-two (dimethoxy-methyl silicyl) ethane, 1,2-two (diethoxymethyl silicyl) ethane, 1,2-two (Dimethoxyphenyl silicyl) ethane, 1,2-two (diethoxy phenyl silicyl) ethane, 1,2-two (methoxyl group dimetylsilyl) ethane, 1,2-two (ethyoxyl dimetylsilyl) ethane, 1,2-two (methoxyl group diphenylmethyl silylation) ethane, 1,2-two (ethoxy diphenyl base silicyl) ethane, 1,3-two (trimethoxysilyl) propane, 1,3-two (triethoxysilyl) propane, 1,3-two (triple phenoxyl silicyl) propane, 1,3-two (dimethoxy-methyl silicyl) propane, 1,3-two (diethoxymethyl silicyl) propane, 1,3-two (Dimethoxyphenyl silicyl) propane, 1,3-two (diethoxy phenyl silicyl) propane, 1,3-two (methoxyl group dimetylsilyl) propane, 1,3-two (ethyoxyl dimetylsilyl) propane, 1,3-two (methoxyl group diphenylmethyl silylation) propane, with 1,3-two (ethoxy diphenyl base silicyl) propane.Wherein, preferred compound is two (trimethoxysilyl) methane, two (triethoxysilyl) methane, two (dimethoxy-methyl silicyl) methane, two (diethoxymethyl silicyl) methane, two (Dimethoxyphenyl silicyl) methane, two (diethoxy phenyl silicyl) methane, two (methoxyl group dimetylsilyl) methane, two (ethyoxyl dimetylsilyl) methane, two (methoxyl group diphenylmethyl silylation) methane and two (ethoxy diphenyl base silicyl) methane.

In certain embodiments of the invention, formula R _aSi (OR ¹) _4-aR ¹Formula Si (OR ²) ₄R ²Formula R ³ _b(R ⁴O) _3-bSi-(R ₇)-Si (OR ⁵) _3-cR ⁶ _cR ⁴And/or R ⁵Be any monovalent organic radical group of following formula independently of one another:

Wherein, n is the integer of 0-4.The instantiation of these compounds comprises: the tetrem acyloxy silane, methyl triacetoxysilane, the ethyl triacetoxysilane, the n-pro-pyl triacetoxysilane, the isopropyl triacetoxysilane, the normal-butyl triacetoxysilane, the sec-butyl triacetoxysilane, tert-butyl group triacetoxysilane, the isobutyl group triacetoxysilane, the n-pentyl triacetoxysilane, the sec-amyl triacetoxysilane, the tertiary pentyl triacetoxysilane, the isopentyl triacetoxysilane, the neopentyl triacetoxysilane, the phenyl triacetoxysilane, dimethyl diacetoxy silane, diethyl diacetoxy silane, di diacetoxy silane, diisopropyl diacetoxy silane, di-n-butyl diacetoxy silane, two sec-butyl diacetoxy silane, di-t-butyl diacetoxy silane, diphenyl diacetoxy silane, triacetoxysilane.In these compounds, tetrem acyloxy silane and methyl triacetoxysilane are preferred.

Other example of at least a silica source can comprise fluorinated silane or fluorinated siloxane, as at United States Patent (USP) 6,258, and those that are provided in 407.

When being included in cancellation, another example of at least a silica source produces those compounds of Si-H key.

Other example of at least a silica source can be found in non-hydrolysis chemical method, for example people such as list of references Hay, " Synthesis of Organic-Inorganic Hybrids via the Non-HydrolyticSol-Gel Process ", Chem.Mater., 13, people such as 3396-3403 (2001) or Hay, " A VersatileRoute to Organically-Modified Silicas and Porous Silicas via the Non-Hydrolytic Sol-Gel Process ", J.Mater.Chem., 10, described in the 1811-1818 (2000).

Other example of silica source comprises silsesquioxane such as hydrogen silsesquioxane (HSQ, HSiO _1.5) and methyl silsesquioxane (MSQ, RSiO _1.5, wherein R is a methyl).

In certain embodiments, at least a silica source can preferably have at least a carboxylate that is bonded on the Si atom.The example of these silica source comprises tetrem acyloxy silane, methyl triacetoxysilane, ethyl triacetoxysilane and phenyl triacetoxysilane.Except silica source wherein had at least a silica source of at least one Si atom that is connected with the carboxylate group, described composition can also comprise nonessential other silica source that contains the carboxylate that is connected on the Si atom.

In some embodiments, in composition, use the combination in hydrophilic and hydrophobic silica source.Term used herein " hydrophilic " is meant that wherein silicon atom can pass through at least four compounds that key is crosslinked.In these embodiments, the ratio of hydrophobic silica source and silica source total amount is greater than about 0.2 mol ratio, or is the 0.2-0.8 mol ratio.Some examples in hydrophilic source comprise the alkoxy silane with alkoxy-functional, and at least can be partial cross-linked, being that groups such as Si atom and four methoxyl groups, ethyoxyl, propoxyl group, acetoxyl group are crosslinked, is materials of alkoxyl in that carbon or oxygen key and all other functional groups on the Si atom are arranged between the Si atom perhaps.If the Si atom is not exclusively crosslinked, remaining Si-OH base may exist as the suction end group.Term " hydrophobic " is meant in the compound that at least one alkoxy-functional is replaced by end Si-C or Si-F key, i.e. Si-methyl, Si-ethyl, Si-phenyl, Si-cyclohexyl etc., and it can not produce hydroxyl after hydrolysis.In these sources, if end group remains unchanged, even since the hydrolysis of Si-OH group and condensation and crosslinked fully, silicon also can be to come crosslinked less than four bridges.In certain embodiments, the methyl that is connected on the silicon is contained in the hydrophobic silica source.

At least a silica source can join in the described composition with hydrolysis and condensation product form.By in solvent, adding entry and optional catalyst, and disposable, intermittently or add silica source continuously, implement hydrolysis and setting-up point scope to be generally-30-100 ℃, or 20-100 ℃, make silica source generation hydrolysis and condensation reaction.When contact water and optional catalyst, at least a portion hydrolysis and the condensation of at least a silica source.The accessory substance of hydrolysis and condensation reaction is the low boiling point solvent that generates.Term used herein " low boiling point solvent " is meant the solvent that is different from water 90 ℃ of following temperature boilings.

The hydrolysis of silica source and condensation can be in film forming procedure generation whenever, promptly in joining composition before, in joining composition after, before deposition and/or in the solidification process or the like.For example, at least a silica source and solvent, water and surfactant are made up in first container, optional ionic additive and optional catalyst make up in second container, and join the content of second container in first container and mixing gradually.Be envisioned that the various different addition sequences that add composition can use.

Said composition can comprise carboxylate.In these embodiments, the carboxylate that joins in the composition can be selected from carboxylic acid, carboxylate anion, carboxylate or its combination.The example of carboxylic acid comprises formic acid, acetate, propionic acid, maleic acid, oxalic acid, glycolic, glyoxalic acid or their mixture.The example of carbonate comprises the aliphatic acid of ethyl acetate, acetic anhydride and ethoxylation.Carboxylate can be used as independent composition and adds, and forms in composition when the chemical reagent in the said composition dissociates; And/or be the part of at least a silica source, wherein at least a carboxylate is bonded on the Si atom, for example tetrem acyloxy silane, methyl triacetoxysilane etc.Carboxylate can react in the presence of water and/or catalyst to produce carboxylic acid.In some cases, carboxylate can be used for described at least a silica source hydrolysis and condensation as catalyst in composition.

In the embodiment that adds catalyst, catalyst comprises can be at the substituting group hydrolysis of catalysis silica source in the presence of the water and/or any organic or inorganic acid or the alkali of two kinds of silica source condensation formation Si-O-Si bridges.This catalyst can be an organic base, such as but not limited to quaternary ammonium salt and hydroxide, as ammonium or tetramethyl-ammonium, amine as primary, the second month in a season and tertiary amine, and the oxide of amine.This catalyst also can be acid, such as but not limited to nitric acid, maleic acid, oxalic acid, acetate, formic acid, glycolic, glyoxalic acid or their mixture.In certain embodiments, this catalyst comprises not halogen-containing acid, as nitric acid.

Film-forming composition disclosed in this invention and method comprise their solvent or mixture.Term used herein " solvent " is meant provides following at least a any liquid or supercritical fluid: to the dissolubility of reagent, can regulate the quantity of film thickness, enough optical clarities are provided and/or can discharge substantially in solidification process for subsequent step such as photoetching.At least a typical solvent that is applicable to film-forming composition can be alcoholic solvent, ketone solvent, amide solvent or ester solvent.This solvent also can have hydroxyl, carbonyl and/or ester functional group.In certain embodiments, solvent has one or more hydroxyls or ester functional group, and for example solvent comprises following formula: HO-CHR ⁸-CHR ⁹-CH ₂-CHR ¹⁰R ¹¹, R wherein ⁸, R ⁹, R ¹⁰And R ¹¹Be the alkyl group or the hydrogen atom of 1-4 carbon atom independently; And R ¹²-CO-R ¹³, R wherein ¹²Be alkyl with 3-6 carbon atom, R ¹³It is alkyl with 1-3 carbon atom; And their mixture.More typical solvent comprises that the pure isomers with 4-6 carbon atom, ketone isomers, the alkyl with 4-8 carbon atom contain straight or branched alkyl acetic acid esters, glycol ether or the propylene glycol of 4-6 carbon atom or the acetic acid esters of glycol ether or propylene glycol.Other operable solvent comprises the 1-amylalcohol, the 2-amylalcohol, 2-methyl-1-butene alcohol, 2-methyl-1-pentene alcohol, cellosolvo, 2-propoxyl group ethanol, 1-propoxyl group-2-propyl alcohol, 2-methyl cellosolve, 1-methoxyl group-2-propyl alcohol, the 2-heptanone, the 4-heptanone, uncle 1--butoxy-2-Ethoxyethane, 2-methoxy ethyl acetic acid esters, propylene glycol methyl ether acetate, pentyl acetate, uncle 1--butoxy-2-propyl alcohol, 2,3-dimethyl-3-amylalcohol, 1-methoxyl group-2-butanols, 4-methyl-2-amylalcohol, uncle 1--butoxy-2-Ethyl Methyl Ether, 3-methyl isophthalic acid-butanols, 2-methyl-1-butene alcohol, 3-methyl-2-amylalcohol, 1, the 2-diethoxyethane, the 1-butanols, 3-methyl-2-butanols or 5-methyl-2-hexanol.Typical more solvent comprises lactate, pyruvate and dihydroxylic alcohols.The solvent of more than enumerating can use separately or two or more solvents are used in combination.

The solvent that is suitable for film-forming composition described in the invention can comprise the dissolubility that for example shows reagent, influence composition viscosity and/or influence composition the capillary any solvent when being deposited in the substrate.Table I provides the tabulation of typical solvent and various character relevant with them.If not whole, other film that exists in zero defect and/or film adhesion substrate or the equipment in the substrate that some performance in these character is even as composition to guarantee for regulating, dispensed volume is minimum, the film covering is whole, the film may be important.

Table I: typical solvent

Solvent	Molecular weight	Boiling point (℃)	Flash-point (℉)	Surface tension (dynes per centimeter)	Viscosity (centipoise)	Density (g/cc)	Total solubility parameter ((J/m 3) 1/2)
								4-methyl-1-pentene alcohol	102.18	163	125	22.6	4.1	0.821	19.3
2-propoxyl group ethanol	104.15	151	120	27..3	2.7	0.913	20.8
								1-propoxyl group-2-propyl alcohol (PGPE)	118.18	150	119	25.4	2.4	0.885	19.9
5-methyl 2-hexanol	116.2	149	115	25.1	5.9	0.819	20.2
								2-methyl-1-pentene alcohol	102.18	148	123	24.9	55	0.824	20.8
Propylene glycol methyl ether acetate	132.16	145	110	289	1.1	0.968	18.4
								The 1-amylalcohol	88.15	137	120	25.6	3.6	0.811	21.6

The boiling point of solvent may be relevant with rate of volatilization.For example, 200 and the wafer substrates of 300mm on, the rate of volatilization of solvent should be controlled by strictness.In this connection, if boiling point is too high, the slow and film of solvent evaporates can bone dry, if instead boiling point is too low, just has high fringe density on the product film.For the embodiment of the spin-on deposition of implementing in open or semi-enclosed rotation bowl bodies, the solvent in the film-forming composition is about 90-about 170 ℃ or about 120 boilings-about 170 ℃ the time in temperature range.

In certain embodiments, the surface tension of solvent and viscosity is for providing the continuous film that does not have edge effect such as post-tensioning, extrudes flange, and guarantee liquid in spinning process distribution and initial level during to flow through wafer reposefully may be important.In these embodiments, the viscosity of composition may demonstrate the Newtonian behavior, does not show substantially under shearing condition that promptly thickening or attenuation so that film sprawl inhomogeneously in substrate.For the homogeneous film of spin coating free of optical defects, the combination of surface tension and viscosity is very important.In these embodiments, the surface tension scope of at least a solvent of measuring by platinum plate method (Wilhelmy slide method) is the 20-50 dynes per centimeter.In addition, the range of viscosities of at least a solvent of measuring by parallel plate method (Parallel platemethod) is the 0.5-7 centipoise.

In other embodiments, the total solubility parameter of at least a solvent may be important for a kind of film-forming composition that does not have visible precipitate and/or be separated is provided.The total solubility parameter of solvent can be described by following equation: δ _t ²=δ _d ²+ δ _p ²+ δ _h ²δ wherein _d ²Be the key element relevant with dispersion force, δ _p ²Be the key element relevant with polarity, and δ _h ²Be the key element relevant with hydrogen bond force.In these embodiments, the total solubility parameter scope is 15-25 (J/m ³) ^1/2This total solubility parameter can illustrate the water that produced by the pore source of containing in the organic silicate polymer of hydrolyzed silicate and condensation, growth and/or the composition and the solubility of low boiling point solvent.If solvent can not be dissolved into all these components in the film composition, then can occur precipitating or being separated, and the film that forms like this may contain striped, hole and particle.

In certain embodiments, the solvent that at least a following benefit can be provided is preferred: avoid the expansion of pore, this may cause the covering performance of other film in bad barrier and the IC heap (IC stack) potentially; Aspect thickness and composition, produce uniform film; Help moistening substrate or other film, it can influence the bonding of other film of using in film and the integrated circuit, for example silica, diamond dust, silicon oxide carbide, silicon nitride, silicon oxynitride, tantalum oxide, tantalum nitride, nitrogen tantalum oxide, titanium oxide, titanium nitride, titanium oxynitrides, aluminium and the copper of silica, the carbon that mixed sharply; And/or avoid introducing can in and the impurity or the functional group of acid moieties in the photoresist, can reduce their activity like this, photoresist is poisoned.

In certain embodiments, composition can further comprise at least a pore source." pore source " used herein is the reagent that is used for producing pore volume in the film of gained.The suitable pore source that is used for this comprises unsettled organic group, solvent, decomposable polymer, surfactant, dendrimer (dendrimer), highly branched polymer, polyoxyalkylene compounds, organic macromolecule or their combination.

In certain embodiments of the invention, the pore source can comprise unsettled organic group.When some unsettled organic groups were present in the composition, these unsettled organic groups can comprise enough oxygen so that change gaseous products into during curing schedule.Some examples that contain the compound of unstable organic group are included in United States Patent (USP) 6,171, disclosed compound in 945, and this patent integral body is incorporated this paper into as a reference.

In some embodiments of the present invention, at least a pore source can be a kind of high boiling solvent.In this respect, this solvent at least a portion of generally being present in host material takes place in the crosslinked process.Typical have relative higher boiling point with helping the solvent that pore forms, and promptly is higher than 170 ℃ or be higher than 200 ℃.The solvent that is adapted at being used as in the present composition pore source for example comprises at United States Patent (USP) 6,231, those solvents that provide in 989.

In certain embodiments, at least a pore source can be little molecule, for example at list of references Zheng, et al. " Synthsis of Mesoporous Silica Materials with Hydroxyacetic AcidDerivatives as Templates via a Sol-Gel Process ", J.Inorg.Organomet.Polymers, 10, those described in the 103-113 (2000) or quaternary ammonium salt, for example nitric acid tetrabutylammonium.

At least a pore source also can be decomposable polymer.Decomposable polymer can be radiation-curable decomposition, and is perhaps more preferably heat decomposable.Unless opposite clearly statement is arranged, term " polymer " used herein " also comprise term oligomer and/or copolymer.The polymer of radiation-curable decomposition is the polymer that decomposes when being exposed to for example radiation such as ultraviolet ray, X-ray, electron beam.Heat decomposable polymer carries out thermal decomposition under near the temperature of silica source material condensation temp and takes place to exist in the crosslinked process at least a portion.Such polymer is the template that can cultivate glass solidification reaction, can controls and definite pore size, and/or those polymer that can decompose and diffuse out from matrix at the appropriate time of process.The example of these polymer includes but not limited to, block copolymer, i.e. diblock, three blocks and segmented copolymer; Star block copolymer; Radial diblock copolymer; The grafting diblock copolymer; The cograft copolymer; Branch shape graft copolymer; Tapered block copolymer; Combination with these structures.Other example of decomposable polymer sees United States Patent (USP) 6,204, and in 202, this patent integral body is incorporated this paper into as a reference.

At least a pore source can be the polymer of highly branched or dendritic polymerization.Highly branched and polymer dendritic polymerization has low solution and melt viscosity usually, owing to surface functional group has high chemical reactivity, even and the solubility of raising arranged also at higher molecular weight.Some limiting examples of suitable decomposed highly-branched polymers and dendritic polymer are provided at " Comprehensive Polymer Science ", 2ndSupplement, Aggarwal, among the pp.71-132 (1996), its integral body is incorporated this paper into as a reference.

At least a pore source in the film-forming composition also can be a polyoxyalkylene compounds, as polyoxyalkylene non-ionic surface active agent, polyoxyalkylene polymers, polyoxyalkylene copolymers, polyoxyalkylene oligomer or their combination.An one example is to comprise C ₂-C ₆The polyoxyalkylene of moieties is as polyethylene glycol oxide, PPOX and their copolymer.

At least a pore source can also comprise surfactant.For introducing the silica-based thin film of pore by adding surfactant, described surfactant is discharged from subsequently, and the amount that changes surfactant can change the porosity.Exemplary surfactants shows amphipathic characteristic, means that they are hydrophilic and hydrophobic simultaneously.Amphiphilic surfactant has hydrophilic head base (one or more) and the long hydrophobic tail that water is had strong affinity, and this hydrophobic tail is close organic matter and repels water.Surfactant can be anion, cation, nonionic or both sexes.The further classification of surfactant comprises silicone surfactant, poly-(oxyalkylene) surfactant and fluorine chemical surfactant.But for the formation of the dielectric layer of IC purposes, non-ionic surface active agent generally is preferred.Being used in suitable surfactant in the composition comprises but is not limited to octyl group and nonyl phenol ethoxylate such as TRITON

X-114, X-102, X-45, X-15; The ethoxylate such as the BRIJ of alcohol

56 (C ₁₆H ₃₃(OCH ₂CH ₂) ₁₀OH) (ICI), BRIJ

58 (C ₁₆H ₃₃(OCH ₂CH ₂) ₂₀OH) (ICI) and acetylenic glycol such as SURFYNOLS 465 and 485 (AirProducts and Chemicals, Inc.).Other surfactant comprises that polymerizable compound is as three block EO-PO-EO copolymer p LURONIC

L121, L123, L31, L81, L101 and P123 (BASF, Inc.).Further the typical surface activating agent comprises the ethoxylate, glucoside, glucamide (glucamide), polyethylene glycol of ethoxylate, the amine of alcohol (primary and secondary), poly-(ethylene glycol-altogether-propane diols) or at Manufacturers Confectioners Publishing Co.of Glen Rock, N.J. list of references McCutcheon ' the sEmulsifiers and Detergents of publication and printing, other surfactant that provided in the version of North America in 2000.

As previously mentioned, preferably described composition has the tenor that is lower than 1ppm.In order to guarantee that composition has the tenor that is lower than 1ppm, preferably every kind of chemical reagent has the tenor that is lower than 1ppm.Though can use commercially available surfactant of not purifying, final film has the impurity content far above acceptable level, so surfactant should be purified.These surfactants of not purifying can have the alkali metal ion concentration of about 100-1000ppm usually.Some solvent also may have the metals content impurity far above acceptable level.The purpose that chemical reagent is purified is that the alkali metal ion impurity content is reduced to less than 50ppb.

Except mentioned component, film-forming composition can further comprise ionic additive.If for example metals content impurity is about 500ppm or littler, then ionic additive can be joined in the composition.Usually, ionic additive is to be selected from general formula to consist of [(NR ₄)] ⁺] _nA ^N-Cationic additive, wherein R is the mixture of hydrogen atom or any monovalent organic radical group of containing 1-24 carbon atom or hydrogen atom and/or any monovalent organic radical group, comprises tetramethyl-ammonium and cetyltrimethyl ammonium, and A ^N-Be anion, n is anionic valence state.Preferably, A ^N-Can be selected from formate, nitrate anion, oxalate, acetate, phosphate radical, carbonate and hydroxyl and combination thereof.Tetramethyl ammonium in acid medium or more general tetraalkylammonium salt or four organic group ammonium salts or organic amine are joined in the porous oxide presoma prescription of surfactant templatesization, to improve ion concentration, be substituted in the alkali metal ion impurity of removing in the purification process of pore source (sodium and potassium).The amount that joins the ionic additive in the composition is 0.1-5000ppm, is preferably 0.1-1000ppm, more preferably 0.1-250ppm.

In addition, ionic additive can be amine or the amine oxide additive that forms ion ammonium type salt in acid precursor composition.Suitable amine additive is selected from: triethylenediamine (TEDA); Diethanol amine (DELA); Triethanolamine (TELA); Aminopropyl diethanol amine (APDEA); Bis(p-aminocyclohexyl)methane (PACM); Quinuclidine (QUIN); The 3-quinine cyclol; Trimethylamine (TMA); Tetramethylethylened (TMEDA); Tetramethyl-1,3-propane diamine (TMPDA); TMAO (TMAO); PC-9, N, N, N-three (N ', N '-dimethyl-3-aminopropyl) amine; PC-77,3,3 '-two (dimethylamino)-N-methyl-di-n-propylamines; CB, bursine; DMAP, 4-dimethylaminopyridine; DPA, diphenylamine; Or TEPA, TEPN.

In certain embodiments, composition can contain one or more flowing additives, compares with the composition that does not contain flowing additive, and it can change surface tension, viscosity and/or the solution greasy property of composition." flowing additive " used herein refers to a kind of component of film-forming composition except that silica source, solvent, water, pore source, catalyst or ionic additive, if compare the surface tension that it can change composition with the surface tension of the analogous composition that does not contain flowing additive.In these embodiments, flowing additive can be used for, and for example, prevents that the substrate of many defectives such as non-the best is wetting, is recessed to form, Benard cell formation, overflow, non-optimal flow and/or air-flow susceptibility.Many such generation of defects are owing to rheological property (gelation process medium viscosity and capillary change), solvent evaporates speed, thermograde and concentration gradient after surface tension difference, substrate surface roughness, film thickness, the application.When having two or more in the composition can cause unsettled solvent in film forming procedure the time, described defective will be introduced into or expand.Flowing additive in the composition usually can very fast volatilization, promptly flowing additive should be present in spinning process distribution, sprawl, complanation and drying nest, in low-temperature decomposition, and/or can not stay carbonaceous residue.It is wetting to obtain better substrate that the use of a small amount of these flowing additives can reduce the surface tension of filling a prescription a little, can reduce and in assigning process, come from spraying and cratering, and/or can reduce the susceptibility of film, for example dust, moisture or film self crosslinked or when solidifying to external action.Typical flowing additive can include but not limited to have the compound of fluorinated groups such as perfluoroalkyl; Silicones and dimethyl silicone polymer are as polyether-modified dimethyl silicone polymer; Commercially available flowing additive is as BYKCHEMIE ^TM307,331 and 333; Silicones; Polyacrylate; With the paraffin distillation.In certain embodiments as containing YKCHEMIE ^TMDuring 307 additives, the adding of flowing additive can cause reducing of surface tension 0.001-50%, or 0.001-20%, or the reducing of 0.001-15%.

In certain embodiments, provide a kind of composition method of environment storage stability around that is used for improving.When composition is processed into film, wish that it can demonstrate height repeatability, particularly thickness, structure and dielectric constant.The storage stability of prescription can be subjected to the influence of film performance, i.e. dielectric constant, film thickness and modulus as the function in following storage time of ambient environmental conditions.Compare with the initial value that no any variation on the film appearance also is striped, hole or dewetting, stability be less than 3% or to be less than the change of 1.5% thickness relevant, and be less than 2% or to be less than 1% change in dielectric constant relevant.In one embodiment, comprise the storage stability of the film-forming composition of at least a silica source, solvent, at least a pore source, catalyst and optional flowing additive, can improve by using a kind of acid catalyst at least a silica source of prehydrolysis in 30-100 ℃ temperature range.As previously mentioned, the accessory substance of silica source hydrolysis and condensation is a low boiling point solvent.Silicate is in a single day partially polymerized, the low boiling point solvent accessory substance, and low boiling point solvent of Jia Ruing and/or water are removed to reach a kind of concentrated composition levels can be provided in addition.In certain embodiments, the water of about 20-about 75% low boiling point solvent of total mole number and total mole number 20-80% is removed from initial composition so that concentrated composition to be provided.This composition that concentrates causes composition ambient storage stability to improve 10 days or longer.Low boiling point solvent and/or water can be removed by flash distillation or other method that for example vacuum distillation, use rotary evaporator carry out.In other embodiment, water and low boiling point solvent can be removed by heating under vacuum in 25-100 ℃ of temperature range.In case water and low boiling point solvent are removed from composition, can add as disclosed in the present invention be higher than 90 ℃ the solvent of temperature boiling to the composition that concentrates with control thickness and whole composition properties.

In certain embodiments, in the film-forming composition the range of turn radius of the silicate material of hydrolysis and condensation be 5nm or lower or be 3nm or lower, it detects in conjunction with online differential viscosity by the low quality gel permeation chromatography and measures.When the radius of gyration of the silicate of hydrolysis and condensation is 5nm or lower and water and low boiling point solvent when being removed, composition can store the longer time under environmental condition.Foregoing can produce have outstanding uniformity, dielectric constant, modulus and in IC heap and silicon base to the film of the adhesion of film.

In passing through the film forming embodiment of spinning method, composition is particularly including at least a silica source and solvent.Composition further comprises at least a pore source, optional catalyst, optional ionic additive and water.In certain embodiments, composition further contains flowing additive.In brief, be dispensed to composition in the substrate and solvent evaporated and water can form film.Pore source, residual solvent and water are removed by the time of solidifying coated substrate and continuing to be enough to produce low dielectric film under one or more temperature usually.

Composition can be deposited in the substrate to form the substrate that applies.By spin-on deposition method deposition composition, it uses open or semienclosed rotation bowl bodies in certain embodiments.As previously mentioned, when the water content of the degree of saturation of solvent and substrate top atmosphere has passed through surrounding environment, when normally 45% relative humidity and environment temperature were come regulation, the zero defect film was very important highly uniformly for preparation for the performance of solvent, evaporation rate, boiling point, surface tension and viscosity in the composition.In certain embodiments, film-forming composition contains one or more solvents, and this solvent seethes with excitement in 90-170 ℃ or 120-170 ℃ of temperature range, and the surface tension scope is the 20-50 dynes per centimeter, range of viscosities is 0.5-7cP, and the total solubility parameter scope is 15-25 (J/m ³) ^1/2Composition can further contain catalyst, at least a pore source, ionic additive and/or flowing additive.

In order to reduce the content that is distributed in suprabasil material, the performance that contains the film-forming composition of silica source, solvent and optional flowing additive should be enough to cover whole surface area fully and can not introduce any defective on Waffer edge, for example breaks, layering, peels off and/or film shrinks.Deposition is to operate by the Continuous Flow of using the liquid-based composition.The minimizing of film-forming composition sendout for the proprietorial expense of control tool, cut the waste, dwindle that need to use the content of the material that the bowl bodies cleaning solvent removes from bowl bodies be very important.Important solvent nature is included in 90-170 ℃ the interior boiling of temperature range, and the surface tension scope is the 20-50 dynes per centimeter, and range of viscosities is 0.5-7cP, and the total solubility parameter scope is 15-25 (J/m ³) ^1/2When shearing can help to be reduced to the sendout of film composition, composition had the Newtonian behavior.Composition can further contain catalyst, pore source and ionic additive.The alternate manner that reduces the film-forming composition consumption of preparation homogeneous film comprises to be extruded and spray deposition technique.

The substrate of heating or cured coated can form dielectric film.Actual temp and time will change according to the pore volume of the composition in the composition, substrate and hope.In certain embodiments, curing schedule carries out under two or more temperature, rather than control heats up or insulation.First temperature is usually less than 300 ℃, can be from composition removes to anhydrate and/or solvent step of going forward side by side is carried out cross-linking reaction.Second temperature can be removed pore source and basic, but nonessential complete, crosslinked described material.In embodiment preferred more of the present invention, the substrate that applies is heated to about 250-450 ℃ interior one or more temperature of temperature range, more preferably from about 400 ℃ or lower.Heating or curing schedule carry out about 30 minutes or shorter, or about 15 minutes or shorter, or about 6 minutes or shorter time.Silica source can further comprise the nubbin from process, as forming the organic matter of not removing behind the porous material.

Curing schedule is preferably undertaken by by the use of thermal means, as electric hot plate, baking oven, stove etc.For by the use of thermal means, the curing of coated substrate can be carried out under controlled condition, as using nitrogen, inert gas, air or other N ₂/ O ₂Composition (0-21%O ₂) atmospheric pressure under, vacuum or have under the decompression of controlled oxygen concentration.In addition, curing schedule can be undertaken by electron beam, ozone, plasma, X-ray, ultraviolet radiation or other method.Condition of cure such as time, temperature and atmosphere can change according to method selected.In preferred embodiments, curing schedule is under vacuum or has 10% or more under the decompression of low oxygen concentration, by in air, nitrogen or inert atmosphere by the use of thermal means carry out.

Material described herein and film can be further through step of curing later, electron beam, ultraviolet ray, X-ray or other processing of solidifying as the back.With such as U.S. Patent No. 6,239, the chemical after-treatment of those described in 017 reason is different, these are handled the mechanics uniformity that for example can improve material or reduce dielectric constant by reducing hydroxyl, reduce hydroxyl then reduce the position that may absorb water again.

Material described herein and film can be mesoporosity.Term used herein " mesoporosity " is described in about 10

To about 500

, or about 10

To about 100 , or about 10

To about 50

Pore-size in the scope.Hole and these porous nickel that preferably described film has the narrow dimension scope are distributed in the whole film.Film of the present invention preferably has the porosity of about 10%-about 90%.The hole of film can be a pore that remain silent or opening.

In certain embodiments of the invention, the diffracting spectrum of film diffraction maximum do not occur at the d-spacing place greater than 10 dusts.The diffracting spectrum of film can obtain in many ways, such as but not limited to neutron, X-ray, Xiao Jiao, grazing incidence and reflectance analysis technology.For example, can use conventional diffractometer on sample thin film, to collect conventional X-ray diffraction data as using the alpha-emitting Siemens D5000 θ of CuK-θ diffractometer.Sample thin film also can be analyzed by using x-ray reflection rate (XRR) data for example have from the Rigaku ATX-G high-resolution diffraction system of the Cu radiation of rotating anode x-ray tube.Sample thin film also can be analyzed by small-angle neutron scattering (SANS), for example uses such as the system at 30 meters NG7 SANS instruments of NISTCenter for Neutron Reseach and analyzes.In some other embodiments, the diffracting spectrum of film does not show diffraction maximum at the d-spacing place greater than 10 dusts.

Material described herein has showed and has made this material resist cracking when being shaped as film and make the mechanical performance that it can the chemical/mechanical complanation.In addition, film shows low-shrinkage.Film has 0.05-about 2 microns thickness usually.Film can show about 0.5-about 10GPa and be generally the elastic modelling quantity of 1.2-6GPa; About 0.1-about 2.0GPa and be generally the hardness number of about 0.4-about 1.2GPa, and be the refractive index of 1.1-1.5 at 633nm.Dielectric constant is about 3.7 or littler.

As previously mentioned, film described herein and material are suitable for as electronic device.Film provides excellent insulating properties and relative high elastic modelling quantity.This film also provide useful uniformity, dielectric constant stability, splitting resistance, with following substrate and/or the adhesion of other film, controlled pore-size and/or nanoaperture size and case hardness.Usually being defined as standard deviation herein as the uniformity of film of the measured substrate of Percentage Criterion deviation removes average film thickness and multiply by 100% again.Uniformity of film is 5% or lower in certain embodiments, or 2% or lower, wherein percentage is represented the % standard deviation.The suitable purposes of film of the present invention comprises the interlayer dielectric that is used for semiconductor devices such as large scale integrated circuit (LSI), system LSI s, DRAM (DRAM), static DRAM (SDRAM), RDRAMs and D-RDRAMs; diaphragm is as being used for the face coat film of semiconductor devices; be used for the interlayer dielectric of multilayer board, and the protection or the dielectric film that are used for liquid crystal display device.Other purposes comprises photonic propulsion, nanoscale machinery or nanoscale electrical part, gas separation, fluid separation applications or chemical sensor.

Embodiment

In following examples, unless otherwise indicated, the sample thin film obtained performance is (0.01 Ω cm) silicon single crystal wafer substrate and be heated to 400 ℃ from spinning to low resistance.The thickness of each film, film refractive index and porosity value are measured by the beam split ellipsometry, use the variable-angle beam split elliptical polarized light meter Model SE 800 that is made by Sentech Instruments GmbH and use SpectraRay software to calculate.Refractive index, film thickness and air percent value obtain by using various models such as Bruggemann analogue measurement in the wave-length coverage of 400-800nm, and mean square deviation is about 1 or littler.For one-tenth-value thickness 1/10, be generally less than 2% in simulated thickness and by the error between the actual film one-tenth-value thickness 1/10 of surperficial photometric measurement.200 and the 300mm wafer on the uniformity use 49 wafer map of standard on Rudolph Model#Focus Fe IV-D beam split elliptical polarized light meter instrument, to finish.

According to ASTM Standard D150-98, measure the dielectric constant of each sample thin film.Contact capacitance-voltage that mercury probe obtain each film with Solartron Model SI 1260 frequency analyzers with MSI Electronics Model Hg 401 lists at 1MHz.The error of electric capacity mensuration and mercury electrode area (A) is less than 1%.Substrate (wafer) electric capacity (C _Si), background capacitance (C _b) and total capacitance (C _T) between+20 to-20 volts, measure, and calculate film sample electric capacity (C by equation (1) _s):

C _s=C _Si(C _T-C _b)/[C _Si-(C _T-C _b)] equation (1)

The dielectric constant of each film calculates by equation (2), and wherein d is a film thickness, and A is the mercury electrode area, ε ₀Be the dielectric constant in the vacuum:

$\mathrm{\&epsiv;}=\begin{array}{c}{\underset{\&OverBar;}{\text{C}}}_{\text{s}}\underset{\&OverBar;}{\text{d}}\\ {\mathrm{\&epsiv;}}_{0}A\end{array}$ Equation (2)

The overall error expection of the dielectric constant of film is less than 6%.

The elastic modelling quantity of each film is taken from from center wafer and is rived and use low melting glass glue CRYSTALBOND

Be installed in 1 * 0.4cm on the aluminium matter short column ²Sample, CRYSTALBOND By Valley Cottage, the Armco Products Inc. of N.Y. makes.Use is at list of references Oliver etal., " An improved technique for Determining Hardness and ElasticModulus Using Loadand Displacement Sensing Indentation Experiments ", J.Material Research, 1992,7[6], continuous rigidity described in the pp.1564-1583 (its integral body is incorporated herein by reference) is measured (" CSM ") method, the ACCUTIP that has that is being made by MTS Systems Corporation ^TMThe NANOINDENTER of Berkovich diamond conehead

Carry out indentation test on the Dynamic Contact Module (DCM).To the little vibration of initial load signal stack, and pass through the system responses that the CF amplifier is analyzed gained.In whole test, make stimulating frequency be held constant at 75Hz (DCM) and control excitation amplitudes so that the displacement amplitude of gained is held constant at 1nm (DCM).

Each indentation test can continuous measurement contact stiffness S.Each independent indentation test produces Young's modulus and the hardness as the continuous function of surperficial pile penetration, use the kinetic measurement of S and for Young's modulus and hardness (for silica, Poisson's ratio=0.18 is for low κ film, Poisson's ratio=0.25) set up formula.On each sample, carry out the arrangement of 5-10 impression, and continuous impression separates the distance of about 20-25 micron.Investigation is from each impression result of experiment and get rid of any " outlier ".Use the discrete displacement scope (discrete displacement windows) of about 5nm to average for the Young's modulus of the indentation test of each sample and the relational result of hardness and pile penetration.The data of use in this scope are calculated average deviation, standard deviation and the confidential interval of each sample then.For the remainder of discrete range, calculate identical statistics similarly.Obtain hardness result in the same way and average.Hardness and Young's modulus are reported as measurement hardness number that the minimum of a value (at about 30-50nm) at hardness curve locates and the measurement mode value of locating in the minimum of a value (at about 30-50nm) of modulus curve.The modulus of film and the expection of the error of hardness are less than 10%.

Use low quality gel permeation chromatography (GPC) to measure the molecular weight distribution of film-forming composition.Use the THF analytic sample of 35 ℃ of following 1ml/min flow rates of Water Corporation Alliance2690 HPLC and the mobile phase of conduct; Before separating in new system THF dilute sample to approximate 0.2wt%.Sample result and scope are 194-70, and 000 daltonian polystyrene calibration curve is relevant.

Use the low quality gel permeation chromatography to add online differential viscosity and detect the measurement radius of gyration (Rg), the radius of gyration is defined as the square root that leaves molecule center of gravity mean square distance.The calculating of Rg is based on the molecular weight measurement method of utilizing the universal calibration notion, and it is the direct result of online viscosity measurements.Light-scattering measurement is not suitable for the polymeric material of Rg value＜10nm usually and can not be used for these film-forming compositions.Following condition is used to measure the Rg:Low Mass GPC system of film-forming composition: Water Corporation Alliance2690; Differential refractometer detector: Water Model 410; Differential viscosity detector: Viscotek ModelT60A; Solvent: by the stable THF of BHT; Flow velocity: 1.0ml/min; Temperature: 35 ℃; Sample concentration :～1 percentage by weight; Calibration standard: (styrene), 162-70,000 quality are gathered in the polymer laboratory; The internal standard thing: toluene is 0.1 weight % in flowing mutually.By using the online intrinsic viscosity of differential viscosity detector measurement GPC calibration criterion and sample, can use the universal calibration notion to calculate molecular weight and Rg.

On Kruss Digital Tensiometer#K10ST, use platinum plate method (Wilhelmy slide method) to measure the surface tension of film-forming composition.Platinum plate method is that a kind of being particularly suitable for detected capillary universal method through long-time interval.The vertical panel of known circumferential length is especially made by platinum, is connected on the balance, and when flat board is reduced in the film forming liquid, uses digital tensometer to measure wetting power.

Use derives from Rheometric Scientific and carries out the measurement of viscosity by the stress rheometer of SR5 control.All measurements are all carried out under 25 ℃; Use Peltier heater control temperature.Use the parallel-plate fixture of a 40mm.Use disposable pipette that sample is added on the base plate; Dull and stereotyped gap is the 0.3mm nominal.Apply shear stress to obtain 5 uniform spatial point 100-1000sec on log scale ^-1Between shearing rate.On each point, use 45 seconds Time Created and 15 seconds Measuring Time altogether.

The surface roughness of film is the sign of striped or other defective such as hole on the film surface, dust.Surface roughness and edge shape are measured on Tencor P-2 talysurf.In order to measure surface roughness, wafer is placed on the sample holder, and it is about 10mm with the area that is scanned from the edge.Sweep length is 1mm and per 40 microns samplings.During the scanning beginning, apply power to the 5 micron end of 2mg.

The general process of preparation composition

Obtain solution and prepare composition by in solvent, adding one or more hydrophobic and hydrophilic silicon dioxide sources.In esters of silicon acis, add the blowhole source.With following reagent, catalyst, water (if reagent does not provide whole water) and ionic additive add to esters of silicon acis in proper order or add to silicate in independent containers by interpolation continuously.If an independent container is used to mixed catalyst and ionic additive, then this solution should add in the esters of silicon acis solution to obtain composition.After catalyst and ionic additive adding, stir this composition and be no more than 5 minutes, and at room temperature ageing 1-72 hour.Every kind of chemical reagent in the composition comprises the metal impurities that are less than 1ppm.In this prescription used whole reagent use U.S. openly apply for the method described among the 2004-0048960 by packed bed ion exchange resin or distillation purifying to the alkali metal that is less than 200ppb.

Embodiment 1

22.5g tetraethyl orthosilicate ester (TEOS) and 22.5g MTES (MTES) are added 100g1-amylalcohol and mixing fully.The Triton X-114 of 9.67g purifying is added in the esters of silicon acis solution, stir and obtain homogeneous solution.In an independent bottle, the tetramethylammonium hydroxide aqueous solution (TMAH) of 1g2.4wt% is added to 24g0.1M nitric acid (HNO ₃) in.With this HNO ₃Solution directly adds in the esters of silicon acis solution.Stir whole composition to reach～30 minutes.

After making composition be under the surrounding environment 12-24 hour, the Teflon filter of composition by 0.2 micron filtered.In open rotation bowl bodies,, make the composition of about 1.2 milliliters (mls) be distributed in 4 with 500rpm rotation 7 seconds " on the silicon wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Under 90 ℃, wafer is placed air calcining 90 seconds then, calcined 90 seconds down for 180 ℃, and calcine the low dielectric organosilicate film that was fully solidified in 180 seconds down at 400 ℃.The thin-film dielectric constant of calcining is 2.07, and refractive index is 1.1785, and film thickness is 4676

Embodiment 2-13

Repeat employed identical process among the embodiment 1, the 100g solvent or the 50/50 molar percentage mixed solvent that have boiling point, surface tension, viscosity and the suitable combination of solubility parameter except use replace the 1-amylalcohol.Embodiment 2-5 and 12-13 are to use physicochemical property to drop on the Comparative composition of one or more solvents outside the preferable range.Table II provides the performance by the film of composition 1 to 13 preparation.

Table II

Embodiment #

Solvent

Dielectric constant

Homogeneous

Striped

Dewetting

Uniformity

2 (comparisons)

DPG

n/t

Be

Have

Have

Do not have

3 (comparisons)

Propane diols

n/t

Not (emulsion)

Have

Have

Do not have

4 (comparisons)

Diacetone alcohol

n/t

Not (two-phase)

Have

Have

Do not have

5 (comparisons)

Cyclohexanone

n/t

Be

(particle) arranged

Do not have

Do not have

12 (comparisons)

Ethanol

2.05

Be

Have

Do not have

Have

13 (comparisons)

Ethyl acetate

2.06

Be

Have

Do not have

Have

6

Propylene glycol propyl ether

2.06

Be

Do not have

Do not have

Have

7

2-methyl-1-pentene alcohol

2.07

Be

Do not have

Do not have

Have

1

The 1-amylalcohol

2.07

Be

Do not have

Do not have

Have

8

Propylene glycol methyl ether acetate

1.99

Be

Do not have

Do not have

Have

9

2-methyl-1-pentene alcohol/4-heptanone

2.13

Be

Do not have

Do not have

Have

10

2-hexanol/2-methyl-1-butene alcohol

2.13

Be

Do not have

Do not have

Have

11

5-methyl-2-hexanol/propylene glycol methyl ether acetate

208

Be

Do not have

Do not have

Have

Storage stability under the surrounding environment

Table III provides the comparison of the multiple parameter relevant with the environment storage life of film-forming composition 1 and 14-24.In Table III, thickness stability is defined as thickness and changes 1.5% from initial value; Dielectric constant stability or κ definition of stability are that dielectric constant changes 1% from initial value; And (for example, low boiling point solvent, solvent and water) the % total moles that is based on every kind of component in the concentrated composition is removed with total moles initially available or that do not reduce composition, multiply by 100 again to be removed component.The environment storage stability described as Table III, that typical composition 14,17,18,19,21 and 23 had greater than 10 days.Remaining embodiment is that composition drops on the comparative example outside the desired extent.

Embodiment 14

With 97.3gTEOS, 97.3gMTES, 497.3gl-amylalcohol and the 108.1g catalyst solution (HNO of 103.7g0.1M ₃, and 4.3g2.4wt%TMAH) combine and up to mixing.60 ℃ of following agitating solutions 2 hours.Under 60 ℃ through 2 hours after, use rotary evaporator at 60 ℃ of following concentrated solutions, from mixture, remove～20% volatile component (removing 160g ethanol, water and amylalcohol).Cooling solution is to room temperature.In batching, add the 160g1-amylalcohol and stir until evenly.In solution, add 69.9gTriton X-114 then, mix and guarantee the uniformity of composition.

After at room temperature ageing 16-24 hour, filter composition with 0.2 micron Teflon filter.Use in the process of open rotation bowl bodies, make the composition after 4ml filters be distributed in 8 with 500rpm rotation " on the silicon base (distribution time～8 second), accelerate to 1800rpm rotation 25 seconds then with dry film.After the rotary sample, 140 ℃ down calcining films 60 seconds removing residual solvent, and 400 ℃ down calcining 180 seconds to remove the pore source.Prescription as above-mentioned process can be stablized〉30 days.Initial film thickness is 0.4587 micron, and refractive index is 1.1748, and average dielectric constant is 2.45, and modulus is 1.24Gpa.

Embodiment 15

With 109.2gTEOS, 109.4gMTES, 557.4gPGPE charge in the round-bottomed flask, the fully mixed settled solution that gets.Then, in flask, add 116.4g0.1M HNO ₃With the TMAH of 4.9g2.4wt%, and mix fully.Flask is placed on the rotary evaporator, and heated 2 hours down at 60 ℃ in the rotary course.When hydrolyzable moiety finished, slowly distillation ethanol, water and PGPE were removed until the initial soln of 5wt% under vacuum.At this moment remove vacuum, and after still-process begins, make solution descend total coreactions 2 hours at 60 ℃.After the heated solution, add upper cover and be cooled to room temperature to flask.45gPGPE and 103.6gTriton X-114 are added in the esters of silicon acis solution.Mix this composition until solution clarification and even.

After at room temperature ageing 16-24 hour, filter composition with 0.2 micron Teflon filter.Use in the process of open rotation bowl bodies, make composition after 1.2ml filters be distributed on the 4-inch silicon base (distribution time～7 second), accelerate to 1800rpm rotation 40 seconds then with dry film with 500rpm rotation.After the rotary sample, at 90 ℃ of following calcining films 90 seconds, 180 ℃ of calcinings 90 seconds down, removing residual solvent, and 400 ℃ down calcining 180 seconds to remove the pore source.

Embodiment 16-20:

Use as the identical process of embodiment 15, except the percentage by weight of the initial soln that in distillation, is removed, typical low boiling point solvent, water and solvent change as shown in Table V.Add the low boiling point solvent that equals in distillation, to remove to the weight of solvent of composition, the weight of water and solvent.

Embodiment 21:

Following reagent, 109.1gTEOS, 109.4gMTES, 557.3gPGPE, 105.4gTriton X-114 and 195.3g water are charged in the round-bottomed flask.Seal flask and make it be in room temperature following 1 hour.In an independent container,, and fully mix in conjunction with the TMAH of 116.5g0.1M HNO3 and 5.0g2.4wt%.Then with HNO ₃/ TMAH solution adds in the solution that contains esters of silicon acis and fully and mixes.Flask is placed on the rotary evaporator, is heated to 60 ℃ under 2 hours in continuous stirring.After the initial heating, under 60 ℃, remove 347.4g ethanol, water and PGPE (the initial batching of～30wt%) near vacuum distillation in 90 minutes.Cooling solution is to room temperature.In order to keep total solution weight constant, in batching, add 347.1gPGPE.Shaking flasks guarantees that composition is even.

After at room temperature ageing 16-24 hour, filter composition with 0.2 micron Teflon filter.Use in the process of open rotation bowl bodies, make composition after 1.2ml filters be distributed on the 4-inch silicon base (distribution time～7 second), accelerate to 1800rpm rotation 4 seconds then with dry film with 500rpm rotation.After the rotary sample, at 90 ℃ of following calcining films 90 seconds, 180 ℃ of calcinings 90 seconds down, removing residual solvent, and 400 ℃ down calcining 180 seconds to remove the pore source.

Embodiment 22:

Following reagent, 3.82gTEOS, 3.82gMTES, 33.2gPGPE, 1.86gL101 are mixed together up to solution and clarify.Then, in the solution that contains esters of silicon acis, add 3.51g water and simple the mixing.In an independent container, with 3.54g0.025M HNO ₃Mix with the TMAH of 0.27g1.2wt%.In the solution that contains esters of silicon acis, add HNO ₃/ TMAH solution also stirs up to composition change clarification.

After the composition clarification, before being filtered, its Teflon filter with 0.2 micron makes this composition individual hour of ageing 12-24 under the condition of environment around earlier.Use in the process of open rotation bowl bodies,, make the composition of about 1.2ml be distributed in 4 with 500rpm rotation 7 seconds " on the wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Under 90 ℃, wafer is placed air calcining 90 seconds, calcined 90 seconds down for 180 ℃, and calcine 180 seconds down to remove the pore source at 400 ℃.

Embodiment 23:

In a round-bottomed flask with 112.5gTEOS, 112.55gMTES, 575.2gPGPE mixes.In an independent container, with 120.5g0.1M HNO ₃Add to together and stir until the dissipation of heat of acid-base neutralization generation with the TMAH of 5.4g2.4wt%.Add catalyst solution to esters of silicon acis solution, and stir until obtaining clear solutions.Heated solution to 60 ℃ and kept 2 hours down under continuous stirring at 60 ℃.After the esters of silicon acis hydrolysis, product is removed～20wt% ethanol water and PGPE (187.2g solution) 60 ℃ of following vacuum distillations.Distillation was finished in about 45 minutes consuming time under 60 ℃.In about 1 hour, solution is cooled back room temperature.Then, in composition, add 187.2g PGPE and 54.9g Pluronic L101, and the stirring said composition becomes even until it.

Embodiment 24:

With 101.3g TEOS, 101.32g MTES, 540.9g1-amylalcohol and three sections copolymers of 52.48g Pluronic L-31EO-PO-EO charge in the round-bottomed flask.After surfactant and esters of silicon acis are mixed, add 93.34g water and strong agitation 3-4 minute.In an independent container, with 93.13g0.025M HNO ₃Mix with the TMAH of 7.51g1.2wt%.In esters of silicon acis solution, add HNO ₃/ TMAH solution.Heated solution to 60 ℃ under continuous stirring.And under 60 ℃, solution was kept 2 hours.After 2 hours, with solution 60 ℃ of following vacuum distillations with remove～30wt% contains the solution (228.2g solution) of ethanol, water and amylalcohol.Cooling solution is to room temperature, and the Teflon filter that passes through 0.2 micron then filters.Then, adding 288.2g1-amylalcohol and stirring are clarified until solution becomes in composition.

Table III: storage life under the environmental condition

Embodiment #	Solvent	Surfactant	The solvent Wt% that removes in the distillation	Thickness stability	K stability	Striped	The % low boiling point solvent	The water that % removes	The solvent that % removes
										1	Amylalcohol	Triton TMX-114	0	15	6	Do not have	0	0	0
14	Amylalcohol	Triton TMX-114	20	>30	>30	Do not have	597	38.9	4.4
										15	PGPE	Triton TMX-114	0	8	4	Have	0	0	0
16	PGPE	Triton TMX-114	5	>>30	3	Have	15.5	9.6	1
										17	PGPE	Triton TMX-114	10	>>30	>>30	Do not have	30.8	24.7	2.6
18	PGPE	Triton TMX-114	20	>>30	>>30	Do not have	55.8	44.6	6.5
										19	PGPE	Triton TMX-114	30	33	10	Do not have	73.6	58.4	8
20	PGPE	Triton TMX-114	50	10	6	Do not have	99.7	69.7	31.9
										21	PGPE	Triton TMThe water that X-114/ is extra	30	>30	20	Do not have	64.9	72.4	11.8
22	PGPE	L101	0	5	3	Do not have	0	0	0
										23	PGPE	L101	20	15	14	Do not have	72.3	52.7	11.9
24	Amylalcohol	L31	30	24	8	Do not have	75.5	60.2	9.9

Embodiment 25-49: the influence of flowing additive in the composition

Table IV has been summarized the surface tension and the viscosity data of some composition that contains flowing additive.Table V has been summarized the surface roughness of different-thickness film, and described film uses the film-forming composition preparation that contains flowing additive, and Table V also with its with do not use the comparing embodiment of flowing additive to contrast.The surface roughness of being measured by profilometer is the indication of tolerance mode He other defective of striped height in the film.

Embodiment 25:

Add following reagent: 22.5gTEOS successively, 22.5gMTES, 130.5gPGPE, 40g0.1MHNO ₃, 8.3g water, 7.4g2.4wt%TMAH, 11.8gTriton X-114.After all components in the prescription all adds, fully mixed solution 2-3 minute.In batching, add 2.45g Byk354 and fully mixing in the dropping mode.Before by 0.2 micron Teflon filter filtration, made the composition ageing 12-24 hour.

Use in the process of open rotation bowl bodies,, make the composition after about 1.2ml filtration be distributed in 4 with 500rpm rotation 7 seconds " on the wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Under 90 ℃, wafer is placed air calcining 90 seconds, calcined 90 seconds down for 180 ℃, and calcine 180 seconds down to remove residual solvent and pore source at 400 ℃.Have on the film run through on it～225 High striped.

Embodiment 26-35:

Charging sequence and reagent dosage that embodiment 26 to 35 and embodiment 25 are identical are except the type and the consumption of flowing additive in the prescription changes as shown in Table VI.

Embodiment 36:

In the Teflon bottle, add following reagent: 15.2gTEOS, 15.3gMTES, 40.5gPGPE, 16g0.1M HNO successively ₃And 0.7g2.4wt%TMAH solution.Shake composition to obtain settled solution.In esters of silicon acis solution, add the blowhole source, 6.5gTriton X-114, and mixed 2-3 minute.After composition fully mixed, taking-up 20.96g aliquot also joined in another container.In stir silicon acid ester composite process, in the aliquot that contains pore source/esters of silicon acis composition, add 0.05g ISOPAR ^TMG and mixing 4-5 minute.

After composition ageing 12-24 hour, its Teflon filter with 0.2 micron is filtered.Use in the process of open rotation bowl bodies,, make the composition after about 1.2ml filtration be distributed in 4 with 500rpm rotation 7 seconds " on the wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Under 90 ℃, wafer is placed air calcining 90 seconds, calcined 90 seconds down for 180 ℃, and calcine 180 seconds down to remove residual solvent and pore source at 400 ℃.Have on the film by profilometer measure～304 High striped.

Embodiment 37-43:

These embodiment finish in the mode identical with embodiment 36, except the 0.2wt% with solution adds the BYK additive in PGPE.Table VI has illustrated the flowing additive in the solution, i.e. Byk331, and 307,333, make the striped in the film reduce to minimum, wherein said flowing additive moderately or has widely reduced surface tension.It should further be appreciated that flowing additive in the composition is used to produce the purposes than thick film, i.e. solvent still less may be more effective than reducing surface roughness.

Embodiment 44:

In the Teflon bottle in conjunction with 22.5gTEOS, 22.5gMTES, 115gPGPE, 16.1gTriton X-114 and do not add flowing additive obtains solution A.In another container, in conjunction with 24g0.1M HNO ₃Obtain solution B with 1g2.4wt%TMAH solution.Along with agitating solution A, add solution B in the solution A lentamente and mix and made solution even in 15 minutes.Ageing composition 12-24 hour.

After the ageing, filter composition by 0.2 micron Teflon filter.Use in the process of open rotation bowl bodies,, make composition mechanical distribution after the filtration 8 with 500rpm rotation 8 seconds " on the wafer.The acceleration wafer is to 2000rpm and rotate 6 seconds with the expansion film, and rotates 25 seconds with drying crystal wafer under 1800rpm.Under 140 ℃, film was calcined 90 seconds, and 400 ℃ are calcined 180 seconds down to remove the pore source in the film.Has the 100-200 that measures by profilometer on the film

High striped.

Embodiment 45-49:

Embodiment 45-49 follows hybrid plan same among the embodiment 44 and deposition process, and is except adding the flowing additive of appropriate amount, pointed as Table V.Data according to Table V, when containing in the composition〉during the surperficial flowing additive of 17ppm, do not detect striped again or no longer include visual striped when amplifying by profilometer, wherein said flowing additive can be described as the surface tension that can reduce composition.

Table IV: surface tension and viscosity data

Embodiment #	Comprise solvent and the flowing additive film-forming composition of (if adding)	Surface tension (dyne/cm)	Viscosity (cP)
				1	The 1-amylalcohol	25.4	47
7	2-methyl-1-pentene alcohol	25.2	6.2
				8	PGMEA	289	2.6
12 (comparisons)	Ethanol	25.5	2.5
				26	Ethanol/BYKCHEMIE TM361	26	2.7
27	Ethanol/MODAFLOW TMAQ-3000	26.1	2.7

28	Ethanol/ISOPAR TM?G	25.7	2.6
				31	Ethanol/BYKCHEMIE TM331	22.6	2.8
32	Ethanol/BYKCHEMIE TM307	23	2.8
				33	Ethanol/BYKCHEMIE TM333	22..3	27
34	Ethanol/BYKCHEMIE TM346	25.7	2.6
				36	Ethanol/ISOPAR TM?G	26.7	5.9
39	Ethanol/BYKCHEMIE TM302	25.1	5.9
				40	Ethanol/BYKCHEMIE TM331	26.4	6
41	Ethanol/BYKCHEMIE TM307	25.1	5.9
				42	Ethanol/BYKCHEMIE TM333	25.3	5.9

Table V

Embodiment 57

Join 12.5g water and 22.5g tetraacethyl base silane (TAS) in the 40.1gl-amylalcohol and agitation of solutions 1 hour.Around under the condition of environment with TAS ageing of solution 1-24 hour.With 23.1g methyl triacetoxysilane (MTAS) and 7.2g0.025M HNO ₃Solution join in the TAS solution and will in conjunction with after about 1 hour of ageing of solution.Join the 1-amyl alcohol solution of 10.2g50wt% purifying Tergitol15-S-5 in the esters of silicon acis solution and stir to obtain uniform solution.The aqueous solution (TMAH) of 1.4g1.2wt% tetramethylammonium hydroxide is joined in the solution.Stirred the about 1-15 of whole composition minute.

After making composition be under the surrounding environment 12-24 hour, the Teflon filter of composition by 0.2 micron filtered.In open rotation bowl bodies,, make about 1.2 milliliters of said compositions be distributed in 4 with 500rpm rotation 7 seconds " on the silicon wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.Under 90 ℃, wafer is placed air calcining 90 seconds then, calcined 90 seconds down for 180 ℃, and calcine 180 seconds down to remove residual solvent and pore source at 400 ℃.The thin-film dielectric constant of calcining is 2.06, and refractive index is 1.20, and film thickness is 5600

Embodiment 58

22.5g tetraethyl orthosilicate ester (TEOS) and 22.5g MTES (MTES) are added among the 100g PGPE.Solution is mixed fully.The Triton X-114 of 9.67g purifying is added in the esters of silicon acis solution, stir and obtain uniform solution.In an independent bottle, the tetramethylammonium hydroxide aqueous solution (TMAH) of 1g2.4wt% is added to 24g0.1M nitric acid (HNO ₃) in.With this HNO ₃Solution directly adds in the esters of silicon acis solution.Stir whole composition～30 minute.

After making composition be in environment temperature, in using the process of open rotation bowl bodies,, make the 10ml said composition be distributed in 8 with 500rpm rotation 8 seconds " on the wafer.When allocation step finishes, quicken wafer to 2000rpm and rotated 6 seconds, be decelerated to 1200rpm rotation 15 seconds, accelerate to 1800rpm rotation 10 seconds again to finish the drying of initial film.Interior during this period EBR solvent, ethyl acetoacetic ester is dispensed on the edge of wafer.After the EBR solvent was assigned with, the acceleration wafer was to 2000rpm and rotate 10 seconds to finish the drying of film.In case film drying promptly begins particulate or the residue of isopropyl alcohol back cleaning to remove the wafer back.When whole coating procedure is finished, clean bowl bodies with isopropyl alcohol and be deposited on bowl-shape body wall of rotation or the material at the end to remove.Bowl bodies is cleaned can be after each wafer, or carries out continuously after the wafer of predetermined number.

Embodiment 59

Be used in the open bowl bodies with thin film deposition 200 and the 300mm wafer on the rotation painting method as follows: 2000rpm rotates 15 seconds (rate of acceleration of 5000rpm/sec), 500rpm rotates 8 seconds (rates of acceleration of 1000rpm/sec, distribute solution), 2000rpm rotates 6 seconds (rates of acceleration of 30000rpm/sec, sprawl), 1200rpm rotates 15 seconds (rates of acceleration of 3000rpm/sec, dry 1), 1800rpm rotates 10 seconds (rates of acceleration of 30000rpm/sec, dry 2), 1200rpm rotation 15 seconds (rate of acceleration of 3000rpm/sec, the top crimping is removed (TSEBR)), with 2000rpm rotation 10 seconds (rate of acceleration of 1000rpm/sec, final dry).Wafer can be naked silicon (containing native oxide or 150A thermal oxide) or the silicon wafer that is coated with traditional C VD film, as is used for the BLACK DIAMOND of semiconductor production ^TM(" BD "), AURORA ^TM, BLOK ^TM, CORAL ^TM, silica, the carbon that mixed silica, diamond dust, silicon nitride, silicon oxynitride, silicon oxide carbide.Use the sendout that provides as Table VI, whole 200 or the 300mm wafer can evenly be applied and without any defective.

Table VI: sendout

Embodiment 60A to 60E

Prepare five kinds and comprise the exemplary composition of 22.5g tetraethyl orthosilicate ester (TEOS), 22.5g MTES (MTES) and variable quantity PGPE and fully mixing.In the following example, the amount that is present in the PGPE in the given thickness composition provides in Table VII.Then, in the every part of esters of silicon acis solution of TritonX-114 adding with the 9.67g purifying, stir and obtain homogeneous solution.In an independent bottle, the tetramethylammonium hydroxide aqueous solution (TMAH) of 1g2.4wt% is added to 24g0.1M nitric acid (HNO ₃) in.With this HNO ₃Solution directly adds in the esters of silicon acis solution.Stir whole composition～30 minute.

After making composition be under the ambient environmental conditions 12-24 hour, the Teflon filter of every kind of composition by 0.2 micron filtered.In using the process of open rotation bowl bodies,, make about 1.2 milliliters composition be distributed in 4 with 500rpm rotation 7 seconds " on the silicon wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Table VII

Embodiment 61A to 61E

Prepare five kinds and comprise the exemplary composition of 22.5g tetraethyl orthosilicate ester (TEOS), 22.5g MTES (MTES) and variable quantity PGPE and fully mixing.In the following example, the amount that is present in the PGPE in the given thickness composition provides in Table VIII.Then, in the every part of esters of silicon acis solution of TritonX-114 adding with the 16.1g purifying, stir and obtain homogeneous solution.In an independent bottle, the tetramethylammonium hydroxide aqueous solution (TMAH) of 1g2.4wt% is added to 24g0.1M nitric acid (HNO ₃) in.With this HNO ₃Solution directly adds in every part of esters of silicon acis solution.Stir whole composition～30 minute.

After making composition be under the ambient environmental conditions 12-24 hour, the Teflon filter of composition solution by 0.2 micron filtered.In using the process of open rotation bowl bodies,, make about 1.2 milliliters composition be distributed in 4 with 500rpm rotation 7 seconds " on the silicon wafer.When allocation step was finished, the acceleration wafer was to 1800rpm and rotate 40 seconds to finish evaporation process.

Table VII

The radius of gyration

As three kinds of typical compositions of preparation described here, embodiment 60C, 61C and 18, it uses PGPE as solvent, and obtains the radius of gyration (Rg) result among each embodiment, and it provides in Table I X.Combine and use THF to obtain radius of gyration result by low quality gel permeation chromatography (GPC) with online differential viscosity detection down at 35 ℃.Before the laboratory sample radius of gyration of measuring us, use several standards to verify this technology and equipment, comprise polystyrene standards 20,650 quality, polyethylene glycol (PEG) 2,500 quality (supplier), PEG4,885 quality (supplier), polymethyl methacrylate (PMMA) 4,000 quality (supplier).Table I X also provides the result of polysilicates polymer, it measures every kind of the same mensuration of composition (if having surfactant in the prescription, then using GRAMS AI software kit installation data and analysis to obtain the Rg of esters of silicon acis kind) with using GPC/ viscosimetry combination technology.Table I X further illustrates the variation of exemplary composition 18 at different processing stages Rg.

Table I X

Embodiment #	Composition	Rg(nm)
			60C	2.2k，5000A，PGPE，X-114	1.30
61C	1.9k，5000A，PGPE，X-114	1.26
			18	Processing formula (1.9k, 5000A, PGPE, X-114)	1.26
18	At 60 ℃ after following 2 hours	1.39
			18	The mid point of 60 ℃ of distillations	141
18	60 ℃ of distillations finish	1.46
			18	Add after the PGPE/ surfactant	1.59

The uniformity data

Prepare typical film-forming composition 1,14,18,60B and 61C, and so the place describe such analysed film 200 and the 300mm wafer on uniformity.For the 200mm wafer, use 49-point wafer map; For the 300mm wafer, use 85-point wafer map.This analysis result provides in Table X.

Table X

Embodiment #	Mean value	Maximum	Minimum of a value	Difference	Standard deviation	The % standard deviation	Wafer (mm)
								Embodiment 1-wafer #2	3511.5	3594.9	3460.2	134.7	31.19	0.89	200
Embodiment 1-wafer #1	3476.8	35944	3405.8	188.6	49.33	1.42	200
								Embodiment 14-wafer #2	3018.6	3052.6	2897.6	155	24.91	0.83	200
Embodiment 14-wafer #1	4315.4	4375.8	4263.3	112.5	22.53	0.52	200
								Embodiment 60B-wafer #2	4308.1	4337	4263.6	73.4	15.62	0.36	200
Embodiment 60B-wafer #1	4322.8	4364.7	4264.8	99.9	21.76	0.50	200
								Embodiment 18-wafer #2	3755.7	3804.5	3676.2	128..3	25.08	0.67	200
Embodiment 18-wafer #1	3729	3804	3647.2	156.8	3789	1.02	200
								Embodiment 14-wafer #2	3041.5	3071.7	3013.7	58	12.48	0.41	300
Embodiment 14-wafer #1	3035.3	3063.2	3008.1	55.1	12.08	0.40	300
								Embodiment 61C-wafer #2	4711.5	4755.5	4661.1	944	22.19	0.47	300
Embodiment 61C-wafer #1	4725.5	4790	4662.7	127.3	29.9	0.63	300

Embodiment 60B-wafer #2	41432	41955	4089.8	1057	19.32	0.47	300
								Embodiment 60B-wafer #1	4160.1	4267.2	4130.1	137.1	20.1	0.48	300

Claims (50)

1. composition that is used to produce dielectric constant 3.7 or lower silica-based materials, said composition contains: at least a silica source, solvent, at least a pore source, optional catalyst and optional flowing additive, wherein solvent seethes with excitement in 90 ℃-170 ℃ temperature range, and is selected from the compound that is expressed from the next:

A.HO-CHR ⁸-CHR ⁹-CH ₂-CHR ¹⁰R ¹¹, R wherein ⁸, R ⁹, R ¹⁰And R ¹¹Be the alkyl group or the hydrogen atom of 1-4 carbon atom independently; With

B.R ¹²-CO-R ¹³, R wherein ¹²Be alkyl with 3-6 carbon atom, R ¹³It is alkyl with 1-3 carbon atom; And their mixture.

2. the composition of claim 1 further comprises ionic additive.

3. the composition of claim 1, wherein at least a silica source is selected from the compound that is expressed from the next:

A.R _aSi (OR ¹) _4-a, wherein R represents hydrogen atom, fluorine atom or any monovalent organic radical group independently; R ¹Expression any monovalent organic radical group; A is selected from 1 and 2 integer;

B.Si (OR ²) ₄, R wherein ²Expression any monovalent organic radical group;

C.R ³ _b(R ⁴O) _3-bSi-R ⁷Si (OR ⁵) _3-cR ⁶ _c, R wherein ⁴And R ⁵Can represent any monovalent organic radical group identical or different and separately; R ³And R ⁶Be hydrogen atom, fluorine atom or any monovalent organic radical group independently; B and c can be respectively the number of 0-3 identical or different and separately; R ⁷Expression oxygen atom, phenylene or by-(CH ₂) _nThe group of-expression, wherein n is the integer of 1-6; And their mixture.

4. the composition of claim 1, wherein composition contains the Si-C key of 20-80 mole % for Si total atom number in the composition.

5. the composition of claim 1, wherein solvent is selected from the pure isomers with 4-6 carbon atom, the ketone isomers with 4-8 carbon atom, and their mixture.

6. the composition of claim 5, wherein solvent is selected from 1-amylalcohol, 2-amylalcohol, 2-methyl-1-butene alcohol, 2-methyl-1-pentene alcohol, 2-heptanone, 4-heptanone, uncle 1--butoxy-2-Ethoxyethane, 2-methoxy ethyl acetic acid esters, 2,3-dimethyl-3-amylalcohol, 1-methoxyl group-2-butanols, 4-methyl-2-amylalcohol, uncle 1--butoxy-2-Ethyl Methyl Ether, 3-methyl isophthalic acid-butanols, 2-methyl-1-butene alcohol, 3-methyl-2-amylalcohol, 1,2-diethoxyethane, 1-butanols, 3-methyl-2-butanols, 5-methyl-2-hexanol, and their mixture.

7. the composition of claim 1, wherein solvent has the total metal contents in soil that is lower than 1ppm.

8. the composition of claim 1, wherein solvent has 15-25 (J/m ³) ^1/2Total solubility parameter.

9. the composition of claim 1, wherein solvent has the surface tension of 20-50 dynes per centimeter.

10. the composition of claim 1, wherein solvent has the viscosity of 0.5-7 centipoise, and it is measured by the parallel-plate method.

11. the composition of claim 1, wherein composition has the total metal contents in soil that is lower than 1ppm.

12. the composition of claim 1, wherein pore source weight is 0.9-0.1 to the weight ratio of pore source weight in the composition and silica source weight.

13. the composition of claim 1, it contains catalyst, and wherein catalyst is an acid catalyst.

14. the composition of claim 1, it demonstrates Newtonian behavior.

15. the composition of claim 1, it contains flowing additive.

16. the composition of claim 15, wherein the amount of flowing additive is 1 weight % or lower in the composition.

17. the composition of claim 15, wherein flowing additive is 100 ℃ or higher temperature boiling.

18. the composition of claim 15, wherein flowing additive comprises dimethyl silicone polymer.

19. the composition of claim 15, wherein flowing additive comprises polyether-modified dimethyl siloxane.

20. the composition of claim 1, wherein at least a silica source hydrolysis and condensation, and the product of hydrolysis and condensation has 5 nanometers or the lower radius of gyration.

21. one kind forms dielectric constant is 3.7 or the method for lower silica-based thin film, this method comprises:

A kind of composition is provided, it contains: at least a silica source, solvent, optional at least a pore source, optional at least a catalyst and optional flowing additive, wherein solvent seethes with excitement in 90 ℃-170 ℃ temperature range, and is selected from the compound that is expressed from the next:

A.HO-CHR ⁸-CHR ⁹-CH ₂-CHR ¹⁰R ¹¹, R wherein ⁸, R ⁹, R ¹⁰And R ¹¹Be the alkyl group or the hydrogen atom of 1-4 carbon atom independently; With

B.R ¹²-CO-R ¹³, R wherein ¹²It is alkyl with 3-6 carbon atom; R ¹³It is alkyl with 1-3 carbon atom; And their mixture;

The bowl bodies that use is selected from open rotation bowl bodies and semi-enclosed rotation bowl bodies is deposited in the substrate composition to form coated substrate; And

Solidify this coated substrate and form silica-based thin film.

22. the method for claim 21 wherein uses open rotation bowl bodies to deposit.

23. the method for claim 21 wherein uses semi-enclosed rotation bowl bodies to deposit.

24. the method for claim 21, wherein solvent contains one or more degrees of functionality that is selected from hydroxyl, carbonyl, ester and their combination.

25. the method for claim 21, wherein solvent seethes with excitement in 120-170 ℃ temperature range.

26. the method for claim 21, wherein solvent has 15-25 (J/m ³) ^1/2Total solubility parameter.

27. the method for claim 21, wherein solvent has the surface tension of 20-50 dynes per centimeter.

28. the method for claim 21, wherein solvent has the viscosity of 0.5-7 centipoise, and it is measured by the parallel-plate method.

29. the method for claim 21, wherein solvent is selected from the pure isomers with 4-6 carbon atom, the ketone isomers with 4-8 carbon atom, wherein alkyl has straight or branched alkyl acetic acid esters, glycol ether, propylene glycol, glycol ether acetate, the propylene glycol acetic acid esters of 4-6 carbon atom, and their mixture.

30. the method for claim 29, wherein solvent is selected from the 1-amylalcohol, the 2-amylalcohol, 2-methyl-1-butene alcohol, 2-methyl-1-pentene alcohol, cellosolvo, 2-propoxyl group ethanol, 1-propoxyl group-2-propyl alcohol, the 2-heptanone, the 4-heptanone, uncle 1--butoxy-2-Ethoxyethane, 2-methoxy ethyl acetic acid esters, propylene glycol methyl ether acetate, pentyl acetate, uncle 1--butoxy-2-propyl alcohol, 2,3-dimethyl-3-amylalcohol, 1-methoxyl group-2-butanols, 4-methyl-2-amylalcohol, uncle 1--butoxy-2-Ethyl Methyl Ether, 3-methyl isophthalic acid-butanols, 2-methyl-1-butene alcohol, 2-methyl cellosolve, 3-methyl-2-amylalcohol, 1, the 2-diethoxyethane, 1-methoxyl group-2-propyl alcohol, the 1-butanols, 3-methyl-2-butanols, 5-methyl-2-hexanol, and their mixture.

31. the method for claim 29, wherein solvent is selected from glycol ether, propylene glycol, glycol ether acetate, propylene glycol acetic acid esters, and their mixture.

32. the method for claim 21, wherein at least a silica source hydrolysis and condensation, and the product of hydrolysis and condensation has 5 nanometers or the lower radius of gyration.

33. the silica-based thin film that forms by the method for claim 21.

34. the silica-based thin film of claim 33, it contains the Si-C key of the 20-80 mole % of Si total atom number.

35. the silica-based thin film of claim 33, it contains 500ppm or lower amine or hydroxide.

36. the silica-based thin film of claim 33, it contains porose.

37. the silica-based thin film of claim 33, wherein film demonstrates 5% or lower uniformity of film.

38. one kind forms dielectric constant is 3.7 or the method for lower silica-based thin film, this method comprises:

A kind of composition is provided, it contains: at least a silica source, at least a solvent, water and catalyst, wherein at least a silica source partial hydrolysis is to provide low boiling point solvent, wherein said at least a solvent seethes with excitement in 90 ℃-170 ℃ temperature range, and is selected from the compound that is expressed from the next:

A.HO-CHR ⁸-CHR ⁹-CH ₂-CHR ¹⁰R ¹¹, R wherein ⁸, R ⁹, R ¹⁰And R ¹¹Be the alkyl group or the hydrogen atom of 1-4 carbon atom independently; With

B.R ¹²-CO-R ¹³, R wherein ¹²It is alkyl with 3-6 carbon atom; R ¹³It is alkyl with 1-3 carbon atom; And their mixture;

The water of removing the low boiling point solvent of total mole number 20-75% and total mole number 20-80% from composition is to provide concentrated composition;

The bowl bodies that use is selected from open rotation bowl bodies and semi-enclosed rotation bowl bodies is deposited in the substrate composition that concentrates to form coated substrate; And

Solidify this coated substrate and form silica-based thin film.

39. the method for claim 38, it adds solvent to the composition that concentrates before further being included in deposition.

40. the method for claim 38, wherein removing is that temperature by composition being heated to 30-100 ℃ is carried out.

41. the method for claim 38 is wherein removed by vacuum distillation and is undertaken.

42. the method for claim 38, wherein composition further contains at least a pore source.

43. the method for claim 38 wherein uses open rotation bowl bodies to deposit.

44. the method for claim 38 wherein uses semi-enclosed rotation bowl bodies to deposit.

45. the method for claim 38, wherein composition contains 1ppm or lower metal.

46. the method for claim 38, wherein composition further contains ionic additive.

47. the method for claim 38, wherein the composition of Nong Suoing had 10 days or longer environment temperature storage stability.

48. the method for claim 38, wherein at least a silica source hydrolysis and condensation, and the product of hydrolysis and condensation has 5 nanometers or the lower radius of gyration.

49. the silica-based thin film that forms by the method for claim 38.

50. the silica-based thin film of claim 49, wherein film demonstrates 5% or lower uniformity of film.