CN1632463A - Triangle method range error compensation device based on angular measurement - Google Patents
Triangle method range error compensation device based on angular measurement Download PDFInfo
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- CN1632463A CN1632463A CN 200410094056 CN200410094056A CN1632463A CN 1632463 A CN1632463 A CN 1632463A CN 200410094056 CN200410094056 CN 200410094056 CN 200410094056 A CN200410094056 A CN 200410094056A CN 1632463 A CN1632463 A CN 1632463A
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Abstract
This invention discloses a triangulation distance measurement compensation device based on angle measurement, which belongs to error compensation technique of triangulation distance measurement. The device comprises calibration light source, convex of the vertical incidence distance measurement device, reflection lens of the object surface to be measured or object surface and the reflection lens behind the convex and photoelectricity receiver. It is characterized by comprising optics angel measurement device. The said angel measurement device comprises a quarter wavelet, deflection light splitting lens, light splitting lens, two threshold angle prisms and two photoelectricity diodes.
Description
Technical field
The present invention relates to a kind of triangle method range error compensation device, belong to the Error Compensation Technology of triangle measurement method based on measurement of angle.
Background technology
At present, microdisplacement measurement method commonly used mainly contains laser interferance method, laser triangulation, light probe method etc., and triangulation since have noncontact, simple in structure, measuring distance is big, anti-interference, measurement point is little, accuracy of measurement is high, can be used for fast characteristics such as measurement of real-time online, in the geometric measurement field, be widely used.In the method, the error that the corner variation of testee is introduced under the common accuracy requirement can be ignored.But when Measurement Uncertainty is had relatively high expectations,, the testee corner must compensate because changing the error component of introducing.Given this, the present invention utilizes angle measurement method to measure inclination angle, testee surface in real time and changes on laser triangulation range measurement principle basis, changes the measuring error of introducing with offset angle, thereby improves the precision of displacement measurement.
Summary of the invention
The object of the present invention is to provide a kind of triangle method range error compensation device based on measurement of angle, this device is on the basis of traditional laser triangulation device, compensation testee angle changes the measuring error of introducing, thereby improves the precision of displacement measurement.
The objective of the invention is to be achieved through the following technical solutions: vertical incidence triangle measurement method device comprises the catoptron of collimated light source, convex lens, testee surface or body surface, and the catoptron of convex lens back, photelectric receiver, it is characterized in that having increased the optical profile type angle measurement unit, described angle measurement unit comprises quarter wave plate, polarisation spectroscope, spectroscope, two critical angle prisms, two photodiodes.
The circular hole of 2-5mm is offered at above-mentioned convex lens 8 centers, at Z to only keeping centrosymmetric 20mm.
The invention has the advantages that and can realize triangle measurement method energy measurement angle variation again, compensation testee angle changes the measuring error of introducing, thereby improves the precision of displacement measurement.
Description of drawings
Fig. 1 is the synoptic diagram of apparatus of the present invention structure.
Among the figure: 1,14 is photodiode, and 2,13 is critical angle prism, and 3,5 is spectroscope, and 4 is laser instrument and collimating mirror, 6 is the polarisation spectroscope, and 7 is quarter wave plate, and 8 is convex lens, and 9 is catoptron, 10 is corner cube mirror, and 11 is concavees lens, and 12 is position sensitive detector PSD.
Embodiment
The triangle measurement method method is divided into two kinds of vertical incidence and oblique incidences, the present invention is directed to vertical incidence range of triangle method.Incident light is divided into two bundles, a part of vertical incidence testee surface, its catoptrical deflection angle detects through the critical angle angle measurement unit; A branch of gloss is with vertical incidence light triangle measurement method.Then, deduct because inclination angle, testee surface changes the measuring error of introducing the purpose that then can realize to find range and can the angle measurement degree change among the result in range finding.
Range error compensation detailed process is:
1) adopt initiatively illuminated light source, the visible light that the laser instrument of being controlled by the power stabilize circuit 4 sends adopts spectroscope 5 that illuminating ray is divided into measurement of angle light and displacement measurement light two parts behind collimation.
2) distance measuring light beam mirror convex lens 8 incide testee surface or catoptron 9, the corner that the laser that is reflected carries object change and change in displacement information again planoconvex lens 8 backs by corner cube mirror 10 reflections after, incide on the PSD12 through concavees lens 11.
3) behind measurement of angle light beam polarisation spectroscope 6 and the quarter wave plate 7, incide testee surface or catoptron 9 by the perforate at convex lens 8 centers.After passing polarisation spectroscope 6 and spectroscope 3 after the former road of its reflected light is returned, be divided into two-way light, enter into critical angle prism 2,13 respectively, its emergent light is received by photodiode 1,14.
4) displacement measurement adopts laser triangulation vertical incidence method, and the incident ray behind the planoconvex lens 8 focuses on testee surface or catoptron 9, and the reflection ray light spot position that the out of focus change in displacement of object causes changes, and detects through position sensitive detector PSD12.For improving the resolving power of PSD, add concavees lens 11 at the rear of convex lens, to amplify the change in location of luminous point.
5) adopt the optical profile type angle measurement unit, angle measurement unit adopts optical differences dynamic formula measuring method: when initially surveying setting value, output signal is zero; When the testee attitude changed in the measuring process, the incident angle of angular transducer changed, and this variable quantity is detected and converts to by angle measurement unit and the proportional electric signal of angle changing value.
6) angle signal and displacement signal all after amplifying again through signal analysis and processing, the measuring error that angular signal is introduced is revised from distance measuring signal at last, obtains the distance signal through over-compensation.Signals collecting, filtering and analysis process system are based on Single-chip Controlling.
Claims (2)
1. triangle method range error compensation device based on measurement of angle, this device comprises the catoptron of collimated light source, convex lens, testee surface or the body surface of vertical incidence triangle measurement method device, and the catoptron of convex lens back, photelectric receiver, its feature also comprises the optical profile type angle measurement unit, and described angle measurement unit comprises quarter wave plate, polarisation spectroscope, spectroscope, two critical angle prisms, two photodiodes;
2. by the described triangle method range error compensation device of claim 1 based on measurement of angle, it is characterized in that convex lens (8) center offers the circular hole of 2-5mm, these lens at Z to only keeping centrosymmetric 20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410094056 CN1632463A (en) | 2004-12-28 | 2004-12-28 | Triangle method range error compensation device based on angular measurement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410094056 CN1632463A (en) | 2004-12-28 | 2004-12-28 | Triangle method range error compensation device based on angular measurement |
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| CN1632463A true CN1632463A (en) | 2005-06-29 |
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| CN 200410094056 Pending CN1632463A (en) | 2004-12-28 | 2004-12-28 | Triangle method range error compensation device based on angular measurement |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101351684B (en) * | 2005-12-02 | 2013-03-06 | 特里伯有限公司 | Surveying instrument and surveying method |
| CN106959587A (en) * | 2016-01-11 | 2017-07-18 | 中芯国际集成电路制造(上海)有限公司 | Alignment measurement markers, alignment measuring method and measurement apparatus based on diffraction |
| CN108844466A (en) * | 2018-03-14 | 2018-11-20 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
| CN109729721A (en) * | 2017-08-29 | 2019-05-07 | 深圳市汇顶科技股份有限公司 | Optical ranging method and optical distance measurement apparatus |
-
2004
- 2004-12-28 CN CN 200410094056 patent/CN1632463A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101351684B (en) * | 2005-12-02 | 2013-03-06 | 特里伯有限公司 | Surveying instrument and surveying method |
| CN106959587A (en) * | 2016-01-11 | 2017-07-18 | 中芯国际集成电路制造(上海)有限公司 | Alignment measurement markers, alignment measuring method and measurement apparatus based on diffraction |
| CN106959587B (en) * | 2016-01-11 | 2019-07-02 | 中芯国际集成电路制造(上海)有限公司 | Alignment measurement markers, alignment measurement method and measuring device based on diffraction |
| CN109729721A (en) * | 2017-08-29 | 2019-05-07 | 深圳市汇顶科技股份有限公司 | Optical ranging method and optical distance measurement apparatus |
| US10908290B2 (en) | 2017-08-29 | 2021-02-02 | Shenzhen GOODIX Technology Co., Ltd. | Optical distance measuring method and optical distance measuring device |
| CN109729721B (en) * | 2017-08-29 | 2021-04-16 | 深圳市汇顶科技股份有限公司 | Optical distance measuring method and optical distance measuring device |
| CN108844466A (en) * | 2018-03-14 | 2018-11-20 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
| CN108844466B (en) * | 2018-03-14 | 2019-11-08 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
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