CN118348053B - Thermal conductivity type hydrogen sensor structure and chip - Google Patents
Thermal conductivity type hydrogen sensor structure and chip Download PDFInfo
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- CN118348053B CN118348053B CN202410766278.3A CN202410766278A CN118348053B CN 118348053 B CN118348053 B CN 118348053B CN 202410766278 A CN202410766278 A CN 202410766278A CN 118348053 B CN118348053 B CN 118348053B
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 136
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 136
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title 1
- 238000001514 detection method Methods 0.000 claims abstract description 136
- 239000007789 gas Substances 0.000 claims abstract description 124
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 72
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 63
- 239000003570 air Substances 0.000 claims description 107
- 238000010438 heat treatment Methods 0.000 claims description 29
- 230000009471 action Effects 0.000 claims description 16
- 239000012080 ambient air Substances 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000005755 formation reaction Methods 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000004044 response Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
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- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The invention relates to the technical field of hydrogen sensors and provides a heat conduction type hydrogen sensor structure and a chip, wherein the heat conduction type hydrogen sensor is designed to be a double temperature detection structure with a temperature detection chamber and a temperature compensation chamber, the influence of the ambient temperature is represented by a second temperature value detected by the sealed temperature compensation chamber, so that a first temperature value detected by the temperature detection chamber communicated with an external area to be detected is corrected, and the difference value between the first temperature value and the second temperature value is used as a representation parameter for measuring the hydrogen concentration value, thereby realizing the accurate measurement of the hydrogen concentration value of the external area to be detected; in addition, the non-detection gas which does not belong to the external to-be-detected area in the temperature detection chamber is rapidly discharged through the air pump, so that the response speed and the measurement accuracy of the thermal conductivity type hydrogen sensor are improved, and the problems that the hydrogen sensor provided by the prior art is greatly influenced by the ambient temperature and the detection result is inaccurate are solved.
Description
Technical Field
The invention relates to the technical field of hydrogen sensors, in particular to a heat conduction type hydrogen sensor structure and a chip.
Background
Hydrogen is used as a clean energy source and is widely applied to the industries of chemical industry, oil refining, electric power, traffic and the like. With the development of hydrogen energy technology, the storage, transportation and use safety of hydrogen are particularly important. Hydrogen has the characteristics of high flammability and high explosiveness, and trace leakage can cause serious safety accidents. Therefore, developing efficient and sensitive hydrogen monitoring technology is critical to ensure the safety of hydrogen energy applications.
Existing hydrogen sensors include catalytic, thermally conductive, electrochemical, metal Oxide Semiconductor (MOS) sensors, and the like. Heat conduction is most widely used because of its cost, interference resistance, and comprehensive consideration of applicable environments. Because the detected value of the thermally conductive hydrogen sensor is related to the temperature value (the thermal resistance sensor needs to be maintained in a stable temperature environment during detection), the measurement accuracy of the thermally conductive hydrogen sensor is affected when the temperature of the operating environment of the thermally conductive hydrogen sensor changes greatly. On the other hand, because the thermal conductivity type hydrogen sensor comprises a chamber, the gas (hydrogen) to be detected in the chamber is fully contacted with the sensitive element, so that detection is realized, and when the thermal conductivity type hydrogen sensor is not fixed but is applied to handheld equipment, the gas (not the gas to be detected in the environment) in the chamber is not discharged timely, so that the detection result can not completely reflect the hydrogen concentration corresponding to the current environment, namely the detection result is influenced.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a heat conduction type hydrogen sensor structure and a chip, and aims to solve the problems that the hydrogen sensor provided in the prior art is greatly influenced by the ambient temperature and has inaccurate detection results.
The invention provides a thermal conductivity type hydrogen sensor structure, comprising:
the detection main body structure is provided with a temperature detection chamber communicated with an external area to be detected and a sealed temperature compensation chamber;
The air pump is connected with the temperature detection chamber and is configured to perform pumping action so as to enable non-detection gas in the temperature detection chamber to be discharged and in a negative pressure state, and drive ambient gas in an external area to be detected to be sucked into the temperature detection chamber;
The heating component and the temperature detection component comprise a first heating element and a temperature detection element which are arranged in the temperature detection cavity, and a second heating element and a reference temperature detection element which are arranged in the temperature compensation cavity;
wherein the first heating element and the second heating element are configured to perform the same heating action within a temperature detection chamber and a temperature compensation chamber, respectively, the temperature detection element and the reference temperature detection element being configured to perform a temperature detection action, respectively, obtaining a first temperature value in the temperature detection chamber that is affected by the inhaled ambient gas heat conduction and a second temperature value in the temperature compensation chamber that is not affected by the ambient gas heat conduction;
the first temperature value and the second temperature value are configured to calculate and obtain a hydrogen concentration value of an external region to be detected according to the first temperature value and the second temperature value when the first temperature value and the second temperature value are received by the hydrogen concentration calculation module.
Optionally, the thermally conductive hydrogen sensor structure further comprises: an air extracting pump;
Wherein the air pump is connected with the temperature detection chamber;
The air pump is configured to perform a pumping action so as to enable the temperature detection chamber to be in a negative pressure state, and drive ambient air of an external area to be detected to be sucked into the temperature detection chamber to perform a detection action.
Optionally, the detecting main body structure further includes:
a plurality of air inlet holes arranged on the surface of the detection main body structure;
the air inlet hole is configured to communicate an external area to be detected with the temperature detection chamber, so that when the temperature detection chamber is in a negative pressure state, ambient air in the external area to be detected is sucked into the temperature detection chamber.
Optionally, the detecting main body structure further includes:
A gas suction passage;
an airflow guiding surface group;
wherein the gas suction channel is configured as an ambient gas suction channel constituted by a gas flow channel between a gas suction constituting surface and a gas guiding constituting surface group;
The gas suction structure surface is configured to face to an external area to be detected, and a plurality of gas inlet holes on the surface of the detection main body structure are formed in the gas suction structure surface;
wherein the air flow guiding surface group is configured to guide the ambient air of the external area to be detected into the temperature detection chamber from the air inlet hole.
Optionally, the airflow guiding surface group includes:
the first air flow guiding structure surface and the second air flow guiding structure surface;
wherein the first and second air flow directing formations are configured to form a temperature detection chamber and a temperature compensation chamber within the detection body structure with a housing of the detection body structure, respectively;
wherein the first air flow guiding surface and the second air flow guiding surface comprise a horizontal guiding plate which is parallel to the air suction surface and a vertical guiding plate which is perpendicular to the air suction surface.
Optionally, the gas inhalation channel comprises:
the horizontal guide plates of the first air flow guiding structural surface and the second air flow guiding structural surface and the air suction structural surface form an air flow concentration channel in the air suction channel, and the vertical guide plates of the first air flow guiding structural surface and the second air flow guiding structural surface form an air flow outlet channel;
The vertical guide plate of the first airflow guiding structure face is provided with a plurality of air outlet holes, and the air outlet holes are configured to guide the ambient air in the airflow air outlet channel to the temperature detection chamber.
Optionally, the thermally conductive hydrogen sensor structure further comprises:
a gas preheating element disposed in the gas suction passage;
The gas preheating element is configured to heat the ambient gas sucked by the air inlet hole to a preset temperature, and discharge the heated ambient gas to the temperature detection chamber through the air outlet hole.
Optionally, the thermally conductive hydrogen sensor structure further comprises: an air perturbation chamber provided with a perturbation fan;
Wherein the disturbing fan is configured to disturb the ambient gas of the external area to be detected so that the disturbed ambient gas enters the air disturbing chamber;
The air disturbance chamber is communicated with the gas suction channel and is configured to suck the ambient gas of the air disturbance chamber into the gas suction channel through a plurality of air inlet holes arranged on the surface of the detection main body structure.
The invention also provides a thermal conductivity type hydrogen sensor chip, comprising:
a thermally conductive hydrogen sensor structure as claimed in any preceding claim;
a hydrogen concentration calculation module;
The hydrogen concentration calculating module is configured to calculate a hydrogen concentration value of an external region to be detected according to the first temperature value and the second temperature value transmitted by the thermal conductivity type hydrogen sensor structure.
Optionally, the hydrogen concentration calculation module specifically includes:
a temperature influence difference calculation unit configured to calculate and obtain a temperature influence difference due to heat conduction of the ambient gas inhaled under the same heating action, based on the first temperature value and the second temperature value;
and a hydrogen concentration value calculation unit configured to calculate a hydrogen concentration value in the ambient gas based on the temperature influence difference value.
Optionally, the hydrogen concentration value calculating unit specifically includes:
A relationship determination subunit configured to obtain a relationship of a pre-stored hydrogen concentration value and a temperature influence difference value;
And a hydrogen concentration value calculation subunit configured to match a corresponding hydrogen concentration value in a relationship curve of a hydrogen concentration value and a temperature influence difference value based on the temperature influence difference value.
The invention has the beneficial effects that: the heat conduction type hydrogen sensor structure comprises a sealed temperature compensation chamber, wherein the sealed temperature compensation chamber is used for detecting a second temperature value, the temperature compensation chamber is used for detecting a first temperature value, the first temperature value is used for detecting a temperature detection chamber communicated with an external area to be detected, and the difference value between the first temperature value and the second temperature value is used as a characterization parameter for measuring the hydrogen concentration value, so that accurate measurement of the hydrogen concentration value of the external area to be detected is realized; in addition, the non-detection gas which does not belong to the external to-be-detected area in the temperature detection chamber is rapidly discharged through the air pump, so that the response speed and the measurement accuracy of the thermal conductivity type hydrogen sensor are improved, and the problems that the hydrogen sensor provided by the prior art is greatly influenced by the ambient temperature and the detection result is inaccurate are solved.
Drawings
FIG. 1 is a schematic perspective view of a thermal conductivity type hydrogen sensor according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a thermally conductive hydrogen sensor structure according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing the internal structure of a thermal conductivity type hydrogen sensor according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a thermally conductive hydrogen sensor structure according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a thermal conductivity type hydrogen sensor chip according to an embodiment of the present invention.
Reference numerals:
1-a thermally conductive hydrogen sensor structure; 10-detecting a main body structure; 101-a temperature detection chamber; 102-a temperature compensation chamber; 103-an air inlet hole; 104-a gas inhalation passage; 105-gas inhalation profile; 106-a first air flow guiding structural surface; 107-a second air flow directing feature; 108-an air outlet hole; 20-a heating assembly; 201-a first heating element; 202-a second heating element; 30-a temperature detection assembly; 301-a temperature detecting element; 302-a reference temperature detection element; 40-an air extracting pump; 50-perturbing the fan; 60-an air perturbation chamber; 2-hydrogen concentration calculation module.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1:
As shown in fig. 1-4, a thermally conductive hydrogen sensor structure comprising: a detection body structure 10, the detection body structure 10 having a temperature detection chamber 101 and a sealed temperature compensation chamber 102 communicating with an external area to be detected; a suction pump 40, the suction pump 40 is connected to the temperature detection chamber 101, and is configured to perform a pumping action, so that non-detection gas in the temperature detection chamber 101 is discharged and is in a negative pressure state, and ambient gas in an external area to be detected is driven to be sucked into the temperature detection chamber 101; the heating assembly 20 and the temperature detection assembly 30 comprise a first heating element 201 and a temperature detection element 301 arranged in the temperature detection chamber 101 and a second heating element 202 and a reference temperature detection element 302 arranged in the temperature compensation chamber 102.
Still further, the first heating element 201 and the second heating element 202 are configured to perform the same heating action within the temperature detection chamber 101 and the temperature compensation chamber 102, respectively, the temperature detection element 301 and the reference temperature detection element 302 are configured to perform a temperature detection action, respectively, obtaining a first temperature value in the temperature detection chamber 101 affected by the inhaled ambient gas heat conduction and a second temperature value in the temperature compensation chamber 102 unaffected by the ambient gas heat conduction;
the first temperature value and the second temperature value are configured to calculate and obtain a hydrogen concentration value of an external region to be detected according to the first temperature value and the second temperature value when the first temperature value and the second temperature value are received by the hydrogen concentration calculation module.
On this basis, the detection main body structure 10 further includes: a plurality of air inlet holes 103 arranged on the surface of the detection main body structure 10; wherein the air inlet 103 is configured to communicate the external area to be detected with the temperature detection chamber 101, so that when the temperature detection chamber 101 is in a negative pressure state, the ambient air of the external area to be detected is sucked into the temperature detection chamber 101.
It should be noted that, the hydrogen sensor provided in the prior art has the problems of being greatly affected by the ambient temperature and inaccurate detection results. In order to solve the above-mentioned problems, in this embodiment, by designing the thermal conductivity type hydrogen sensor to have a dual temperature detection structure of the temperature detection chamber 101 and the temperature compensation chamber 102, arranging the first heating element 201 and the temperature detection element 301 in the temperature detection chamber 101, arranging the second heating element 202 and the reference temperature detection element 302 in the temperature compensation chamber 102, and using the second temperature value detected by the sealed temperature compensation chamber 102 to characterize the influence of the ambient temperature, the first temperature value detected by the temperature detection chamber 101 communicating with the external area to be detected is corrected, at this time, the difference between the first temperature value and the second temperature value is the temperature difference actually caused by the hydrogen gas inhaling into the detection chamber, the influence of the ambient temperature is eliminated, after that, the first temperature value and the second temperature value are sent to the hydrogen concentration calculation module, and the real hydrogen concentration value is calculated by the hydrogen concentration calculation module according to the corresponding relation between the temperature influence difference and the hydrogen concentration value under the current real ambient temperature, so as to realize the accurate measurement of the hydrogen concentration value in the external area to be detected.
In addition, the thermal conductivity type hydrogen sensor structure is further provided with an air pump 40, the air pump 40 is connected with the temperature detection chamber 101 and is used for executing pumping action, so that the temperature detection chamber 101 is in a negative pressure state, air belonging to non-detection gas in the temperature detection chamber 101 can be rapidly pumped out, and the ambient gas in an external to-be-detected area is rapidly sucked into the temperature compensation chamber 102 through the air inlet 103 arranged on the surface of the detection main body structure 10, so that the response speed of the thermal conductivity type hydrogen sensor is improved on one hand, and on the other hand, the thermal conductivity type hydrogen sensor structure is applied to a hand-held thermal conductivity type hydrogen sensor, and the problem that the detection is inaccurate caused by interference of the gas in the non-target detection environment can be eliminated when the hydrogen concentration value from the non-target detection environment to the target detection environment is detected is solved.
In a preferred embodiment, the detection body structure 10 further comprises: a gas suction passage 104; an airflow guiding surface group; wherein the gas suction channel 104 is configured as an ambient gas suction channel 104 formed by a gas flow channel between the gas suction formation 105 and the gas guiding formation group; wherein the gas suction surface 105 is configured to face the external area to be detected, and the plurality of gas inlets 103 on the surface of the detection main body structure 10 are disposed on the gas suction surface 105; wherein the air flow guiding surface group is configured to guide the ambient air of the external area to be detected from the air inlet hole 103 into the temperature detecting chamber 101.
Still further, the airflow directing face set includes: a first air flow directing formation 106 and a second air flow directing formation 107; wherein the first air flow guiding surface 106 and the second air flow guiding surface 107 are configured to form a temperature detection chamber 101 and a temperature compensation chamber 102 within the detection body structure 10 with a housing of the detection body structure 10, respectively; wherein the first air flow guiding surface 106 and the second air flow guiding surface 107 comprise a horizontal guiding plate arranged parallel to the air suction surface and a vertical guiding plate arranged perpendicular to the air suction surface.
Still further, the gas suction passage includes: the horizontal guide plates of the first air flow guiding structural surface 106 and the second air flow guiding structural surface 107 and the air suction structural surface form an air flow concentration channel in the air suction channel, and the vertical guide plates of the first air flow guiding structural surface 106 and the second air flow guiding structural surface 107 form an air flow outlet channel; wherein the vertical guide plate of the first airflow guiding structure 106 is provided with a plurality of air outlet holes 108, and the air outlet holes 108 are configured to guide the ambient air in the airflow outlet channel to the temperature detection chamber 101.
In this embodiment, besides the temperature detection chamber 101 and the temperature compensation chamber 102, the detection main structure 10 is further provided with a gas suction channel 104 for guiding the ambient gas of the external area to be detected into the temperature detection chamber 101, the gas suction channel 104 is formed by a gas suction structural surface 105 provided with a plurality of gas inlets 103 and a gas flow channel between a gas flow guiding structural surface group formed by a first gas flow guiding structural surface 106 and a second gas flow guiding structural surface 107, the ambient gas enters from the plurality of gas inlets 103 of the gas suction structural surface 105 and is collected in a gas flow concentration channel, and is then guided to the temperature detection chamber 101 through a gas flow outlet channel, thereby, the ambient gas detection range of the thermal conductivity type hydrogen sensor structure is increased through the plurality of gas inlets 103 arranged on the gas suction structural surface 105, under the condition that negative pressure is provided, the ambient gas of the whole gas suction structural surface 105 faces the area to be detected can be sucked into the inside of the detection main body, and then the ambient gas is guided into the temperature detection chamber 101 through the gas suction channel 104 formed by the gas flow concentration channel and the gas outlet channel, so that the ambient gas to realize a larger range, a faster ambient gas suction area to be detected, and further improved driving speed and hydrogen concentration and accuracy.
In a preferred embodiment, the thermally conductive hydrogen sensor structure further comprises: a gas preheating element disposed in the gas suction passage; wherein the gas preheating element is configured to heat the ambient gas sucked into the gas inlet 103 to a preset temperature, and to discharge the heated ambient gas to the temperature detection chamber 101 through the gas outlet 108.
In this embodiment, the detection main structure 10 is further provided with a preheating channel, where the preheating channel is a gas suction channel provided with a gas preheating element, and the preheating channel is used for providing a longer gas introduction path, and heating the sucked ambient gas in the gas introduction path through the gas preheating element to reach a preset temperature value, so that the influence on the temperature stability of the chamber when the external ambient gas enters the temperature detection chamber 101 is avoided, and further, the heat conduction hydrogen sensor cannot determine whether the factor influencing the temperature of the heating element is the hydrogen concentration in the ambient gas or the temperature of the ambient gas, thereby improving the environmental adaptability of the heat conduction hydrogen sensor and improving the detection accuracy. In addition, through setting up the preheating channel that has longer gaseous introduction route, can also dehumidify the ambient gas of inhaling, avoid ambient gas's vapor to get into temperature detection cavity 101 and influence heating element's temperature variation value, and then influence the condition that detects the accuracy to appear.
In a preferred embodiment, the thermally conductive hydrogen sensor structure further comprises: an air perturbation chamber 60 provided with a perturbation fan 50; wherein the disturbing fan 50 is configured to disturb the ambient air of the external area to be detected such that the disturbed ambient air enters the air disturbing chamber 60; wherein the air perturbation chamber 60 is communicated with the gas suction channel 104, and is configured to suck the ambient gas of the air perturbation chamber 60 into the gas suction channel 104 through a plurality of air inlet holes 103 arranged on the surface of the detection main body structure 10.
In this embodiment, the thermal conductivity type hydrogen sensor is further provided with an air disturbance chamber 60 and a disturbance fan 50, the air disturbance chamber 60 is communicated with an air inlet 103 on the surface of the detection main body structure 10, and the disturbance fan 50 is used for disturbing external ambient air to accelerate the air exchange process in the external ambient air pre-detection main body structure 10, so as to solve the problem that the measurement range is small due to the limited number of air inlets 103 and limited range of the action area of the thermal conductivity type hydrogen sensor structure.
Example 2:
Referring to fig. 5, fig. 5 is a schematic structural diagram of a thermal conductivity type hydrogen sensor chip according to an embodiment of the present invention.
As shown in fig. 5, a thermal conductivity type hydrogen sensor chip includes: the thermally conductive hydrogen sensor structure 1 provided in any one of the embodiments described above; a hydrogen concentration calculation module 2; wherein the hydrogen concentration calculating module 2 is configured to calculate a hydrogen concentration value of the external region to be detected according to the first temperature value and the second temperature value transmitted by the thermal conductivity type hydrogen sensor structure 1.
Further, the hydrogen concentration calculation module 2 specifically includes: a temperature influence difference calculation unit configured to calculate and obtain a temperature influence difference due to heat conduction of the ambient gas inhaled under the same heating action, based on the first temperature value and the second temperature value; and a hydrogen concentration value calculation unit configured to calculate a hydrogen concentration value in the ambient gas based on the temperature influence difference value. Wherein, the hydrogen concentration value calculation unit specifically includes: a relationship determination subunit configured to obtain a relationship of a pre-stored hydrogen concentration value and a temperature influence difference value; and a hydrogen concentration value calculation subunit configured to match a corresponding hydrogen concentration value in a relationship curve of a hydrogen concentration value and a temperature influence difference value based on the temperature influence difference value.
In this embodiment, the thermal conductivity type hydrogen sensor chip includes a thermal conductivity type hydrogen sensor and a hydrogen concentration calculating module, the thermal conductivity type hydrogen sensor transmits a first temperature value and a second temperature value to the hydrogen concentration calculating module after collecting the first temperature value and the second temperature value, the hydrogen concentration calculating module corrects the first temperature value (i.e. the temperature value of the temperature detecting chamber having the hydrogen inhalation) by using the second temperature value (i.e. the temperature value detected by the sealed temperature compensating chamber having no hydrogen inhalation) as an influence factor representing the ambient temperature, at this time, the difference between the first temperature value and the second temperature value is the temperature difference truly caused by the hydrogen inhalation detecting chamber, thereby eliminating the influence of the ambient temperature, calculating the real hydrogen concentration value according to the corresponding relation between the temperature influence difference and the hydrogen concentration value under the current real ambient temperature, and realizing the accurate measurement of the hydrogen concentration value in the external region to be detected; it should be noted that, the relation curve of the pre-stored hydrogen concentration value and the temperature influence difference value can be obtained by executing the test process by presetting the test condition and fitting according to the test result, so that the accurate measurement of the hydrogen concentration value of the external region to be detected is realized by executing the calculation of the hydrogen concentration value of the external region to be detected according to the difference value of the first temperature value and the second temperature value, and the problems that the hydrogen sensor provided by the prior art is greatly influenced by the environmental temperature and the detection result is inaccurate are solved.
The specific embodiments of the thermal conductivity type hydrogen sensor chip of the present application are substantially the same as the above-described embodiments of the thermal conductivity type hydrogen sensor structure, and will not be described herein.
In describing embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "center", "top", "bottom", "inner", "outer", "inside", "outside", etc. indicate orientations or positional relationships based on the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Wherein "inside" refers to an interior or enclosed area or space. "peripheral" refers to the area surrounding a particular component or region.
In the description of embodiments of the present invention, the terms "first," "second," "third," "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", "a third" and a fourth "may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In describing embodiments of the present invention, it should be noted that the terms "mounted," "connected," and "assembled" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, unless otherwise specifically indicated and defined; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the description of embodiments of the invention, a particular feature, structure, material, or characteristic may be combined in any suitable manner in one or more embodiments or examples.
In describing embodiments of the present invention, it will be understood that the terms "-" and "-" refer to ranges between two values, and that the ranges include endpoints. For example, "A-B" means a range greater than or equal to A and less than or equal to B. "A-B" means a range of greater than or equal to A and less than or equal to B.
In the description of embodiments of the present invention, the term "and/or" is merely an association relationship describing an association object, meaning that three relationships may exist, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A thermally conductive hydrogen sensor structure comprising:
the detection main body structure is provided with a temperature detection chamber communicated with an external area to be detected and a sealed temperature compensation chamber;
Wherein, detect major structure, still include: a plurality of air inlet holes arranged on the surface of the detection main body structure; the air inlet hole is configured to communicate an external area to be detected with the temperature detection chamber, so that when the temperature detection chamber is in a negative pressure state, the ambient air of the external area to be detected is sucked into the temperature detection chamber;
Wherein, detect major structure, still include: a gas suction passage; an airflow guiding surface group; wherein the gas suction channel is configured as an ambient gas suction channel constituted by a gas flow channel between a gas suction constituting surface and a gas guiding constituting surface group; the gas suction structure surface is configured to face to an external area to be detected, and a plurality of gas inlet holes on the surface of the detection main body structure are formed in the gas suction structure surface; wherein the air flow guiding surface group is configured to guide the ambient air of the external area to be detected into the temperature detection cavity from the air inlet hole;
Wherein, the air current direction constructs face group includes: the first air flow guiding structure surface and the second air flow guiding structure surface; wherein the first and second air flow directing formations are configured to form a temperature detection chamber and a temperature compensation chamber within the detection body structure with a housing of the detection body structure, respectively; wherein the first air flow guiding surface and the second air flow guiding surface comprise a horizontal guiding plate which is parallel to the air suction surface and a vertical guiding plate which is perpendicular to the air suction surface;
Wherein, the gas inhalation channel comprises: the horizontal guide plates of the first air flow guiding structural surface and the second air flow guiding structural surface and the air suction structural surface form an air flow concentration channel in the air suction channel, and the vertical guide plates of the first air flow guiding structural surface and the second air flow guiding structural surface form an air flow outlet channel; the vertical guide plate of the first airflow guide structure surface is provided with a plurality of air outlet holes, and the air outlet holes are configured to guide the ambient air in the airflow air outlet channel to the temperature detection chamber;
The air pump is connected with the temperature detection chamber and is configured to perform pumping action so as to enable non-detection gas in the temperature detection chamber to be discharged and in a negative pressure state, and drive ambient gas in an external area to be detected to be sucked into the temperature detection chamber;
The heating component and the temperature detection component comprise a first heating element and a temperature detection element which are arranged in the temperature detection cavity, and a second heating element and a reference temperature detection element which are arranged in the temperature compensation cavity;
wherein the first heating element and the second heating element are configured to perform the same heating action within a temperature detection chamber and a temperature compensation chamber, respectively, the temperature detection element and the reference temperature detection element being configured to perform a temperature detection action, respectively, obtaining a first temperature value in the temperature detection chamber that is affected by the inhaled ambient gas heat conduction and a second temperature value in the temperature compensation chamber that is not affected by the ambient gas heat conduction;
The first temperature value and the second temperature value are configured to calculate and obtain a hydrogen concentration value of an external region to be detected according to the first temperature value and the second temperature value when being received by the hydrogen concentration calculation module;
a gas preheating element disposed in the gas suction passage;
The gas preheating element is configured to heat the ambient gas sucked by the air inlet hole to a preset temperature, and discharge the heated ambient gas to the temperature detection chamber through the air outlet hole.
2. The thermally conductive hydrogen sensor structure of claim 1, further comprising: an air perturbation chamber provided with a perturbation fan;
Wherein the disturbing fan is configured to disturb the ambient gas of the external area to be detected so that the disturbed ambient gas enters the air disturbing chamber;
The air disturbance chamber is communicated with the gas suction channel and is configured to suck the ambient gas of the air disturbance chamber into the gas suction channel through a plurality of air inlet holes arranged on the surface of the detection main body structure.
3. A thermally conductive hydrogen sensor chip, comprising:
A thermally conductive hydrogen sensor structure as claimed in any of claims 1-2;
a hydrogen concentration calculation module;
The hydrogen concentration calculating module is configured to calculate a hydrogen concentration value of an external region to be detected according to the first temperature value and the second temperature value transmitted by the thermal conductivity type hydrogen sensor structure.
4. The thermally conductive hydrogen sensor chip of claim 3, wherein the hydrogen concentration calculation module specifically comprises:
a temperature influence difference calculation unit configured to calculate and obtain a temperature influence difference due to heat conduction of the ambient gas inhaled under the same heating action, based on the first temperature value and the second temperature value;
and a hydrogen concentration value calculation unit configured to calculate a hydrogen concentration value in the ambient gas based on the temperature influence difference value.
5. The thermally conductive hydrogen sensor chip of claim 4, wherein the hydrogen concentration value calculation unit specifically comprises:
A relationship determination subunit configured to obtain a relationship of a pre-stored hydrogen concentration value and a temperature influence difference value;
And a hydrogen concentration value calculation subunit configured to match a corresponding hydrogen concentration value in a relationship curve of a hydrogen concentration value and a temperature influence difference value based on the temperature influence difference value.
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