CN115437099A - Automatic focusing optical system and focusing method - Google Patents
Automatic focusing optical system and focusing method Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
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Abstract
The invention discloses an automatic focusing optical system and a focusing method. An automatic focusing optical system is characterized by comprising a differential interference optical module, a liquid focusing module, a processing module and a driving module; the differential interference optical module is used for emitting a detection beam to detect an object to be detected and acquiring a detection image; the liquid focusing module is arranged in the light path of the differential interference optical module; the processing module is respectively electrically connected with the differential interference optical module and the driving module and is used for determining the defocusing information of the image to be detected according to the detected image, determining the adjustment information of the liquid focusing module according to the defocusing information and sending the adjustment information to the driving module; the driving module is electrically connected with the liquid focusing module and used for adjusting the diopter of the liquid focusing module according to the adjusting information. The invention utilizes the liquid lens to change the focal length in the automatic focusing optical system, eliminates the abrasion caused by mechanical movement, and has the advantages of low noise, good stability and high response speed.
Description
Technical Field
The invention relates to the technical field of optics, in particular to an automatic focusing optical system and a focusing method.
Background
Due to the structural particularity of the differential interference imaging system, the differential interference imaging system is suitable for detecting the structure and the defects of a transparent object and detecting samples with extremely small height difference, comprises the detection of cells, metallographic structures, liquid crystal screen conductive particles, capacitive touch screen lines and magnetic heads, and is widely applied to the fields of biological medical treatment, liquid crystal panel detection and the like.
In the prior art, differential interference imaging detection systems usually have two modes of manual focusing and automatic focusing, and in the prior art, a motor is usually used to drive the optical system to axially move as a whole, i.e. to adjust the working distance.
However, in the existing automatic focusing technology, the optical system is abraded due to mechanical reciprocating motion, the motor-driven focusing speed is not particularly high, and motor noise is also introduced.
Disclosure of Invention
The invention provides an automatic focusing optical system and a focusing method, which aim to solve the problems of low mechanical focusing speed and introduction of motor noise.
According to an aspect of the present invention, there is provided an auto-focusing optical system, comprising a differential interference optical module, a liquid focusing module, a processing module and a driving module;
the differential interference optical module is used for emitting a detection beam to detect an object to be detected and acquire a detection image;
the liquid focusing module is arranged in the optical path of the differential interference optical module;
the processing module is respectively electrically connected with the differential interference optical module and the driving module and is used for determining the defocusing information of the image to be detected according to the detected image, determining the adjustment information of the liquid state focusing module according to the defocusing information and sending the adjustment information to the driving module;
the driving module is electrically connected with the liquid focusing module and used for adjusting the diopter of the liquid focusing module according to the adjusting information.
Optionally, the differential interference optical module includes a light source unit, a polarizing unit, a differential interference unit, an objective lens unit, an eyepiece lens unit, a filtering unit, an analyzer unit, an imaging position adjusting unit, and an imaging unit;
the liquid focusing module is positioned in a light path between the differential interference unit and the eyepiece;
the light source unit comprises a first light source and a second light source, the first light source is used for emitting a first detection light beam, the second light source is used for emitting a second detection light beam, and the wavelength ranges of the first detection light beam and the second detection light beam are different;
the polarization unit is respectively positioned on the propagation paths of the first detection beam and the second detection beam and is used for modulating the first detection beam to form a first polarized detection beam and modulating the second detection beam to form a second polarized detection beam;
the differential interference unit is respectively positioned on the propagation paths of the first polarized detection beam and the second polarized detection beam and is used for modulating the first polarized detection beam to form a first differential polarized detection beam and modulating the second polarized detection beam to form a second differential polarized detection beam;
the objective lens unit and the object to be detected are sequentially located on a transmission path of the first differential polarization detection beam and the second differential polarization detection beam, the first differential polarization detection beam is reflected by the object to be detected to form a first differential polarization reflected beam, the first differential polarization reflected beam is modulated by the objective lens and the differential interference unit in sequence to form a first imaging beam, and the first imaging beam carries a detection signal of the object to be detected; the second differential polarization detection light beam is reflected by the object to be detected to form a second differential polarization reflected light beam, the second differential polarization reflected light beam is modulated by the objective lens unit and the differential interference unit in sequence to form a second imaging light beam, and the second imaging light beam carries a detection signal of the object to be detected;
the liquid focusing module is respectively positioned on the propagation paths of the first imaging light beam and the second imaging light beam and is used for adjusting the focal lengths of the first imaging light beam and the second imaging light beam;
the filtering unit comprises a first filtering lens and a second filtering lens, and the filtering ranges of the first filtering lens and the second filtering lens are different; the polarization analyzing unit comprises a first polarization analyzing lens and a second polarization analyzing lens; the imaging unit comprises a first imaging unit and a second imaging unit; the first imaging light beam sequentially passes through the ocular unit, the first filter lens, the first polarization analyzing lens and the imaging position adjusting unit and then is imaged at a first position and a second position of the first imaging unit, and the first position and the second position are symmetrical to an imaging plane conjugated with the second imaging unit; and the second imaging light beam sequentially passes through the ocular lens, the second filter lens and the second polarization analyzing lens and then is imaged by the second imaging unit.
Optionally, the differential interference optical module further includes a mask pattern unit;
the mask pattern unit is located on a propagation path of the first probe beam for modulating the first probe beam to form a patterned probe beam.
Optionally, the mask pattern unit includes a grating assembly.
Optionally, the imaging position adjusting unit includes a first transflective lens and a first reflective lens;
the first imaging light beam is transmitted by the first transflective lens and then is incident to the first position, and the first imaging light beam is reflected by the first transflective lens and then is incident to the second position after being reflected by the first reflector.
Optionally, the differential interference optical module further includes a second transflective lens and a third transflective lens;
the second transflective lens is positioned in a light path between the polarization unit and the differential interference unit and a light path between the differential interference unit and the liquid state focusing module, and is used for reflecting the first polarization detection beam and the second polarization detection beam to the differential interference unit and transmitting the first imaging beam and the second imaging beam to the liquid state focusing module;
the third transflective lens is positioned in a light path between the eyepiece unit and the filter unit, and is used for reflecting the first imaging light beam and the second imaging light beam to the first filter lens and transmitting the first imaging light beam and the second imaging light beam to the second filter lens.
Optionally, the differential interference optical module further includes a second reflecting mirror and a fourth transflective mirror;
the second reflecting lens is positioned in an optical path between the first light source and the fourth transflective lens and is used for reflecting the first detection light beam to the fourth transflective lens;
the fourth transflective lens is positioned in a light path between the second reflector and the polarizing unit and a light path between the second light source and the polarizing unit, and is used for transmitting the first detection light beam to the polarizing unit and reflecting the second detection light beam to the polarizing unit.
Optionally, the liquid focus module includes a first housing and a second external side that are disposed opposite to each other;
a first protective layer and a second protective layer disposed within a space defined by the first housing and the second housing, the first protective layer and the second protective layer being disposed opposite to each other;
and the liquid lens is arranged in a space defined by the first protective layer and the second protective layer.
Optionally, the first light source comprises an infrared light source, and the second light source comprises a white light source.
According to another aspect of the present invention, there is provided a focusing method of an autofocus optical system applied to the autofocus optical system of the first aspect of the present invention, comprising:
acquiring a detection image of an object to be detected based on a differential interference optical module;
determining out-of-focus information of the image to be detected according to the detection image;
and determining adjustment information of a liquid focusing module according to the defocusing information and sending the adjustment information to the driving module so that the driving module adjusts the diopter of the liquid focusing module according to the adjustment information.
According to the technical scheme of the embodiment of the invention, the liquid lens is utilized to realize the zooming process of the optical system in the automatic focusing optical system, the diopter response time of the liquid lens is in the millisecond order, the focusing speed of the automatic focusing optical system is greatly improved, the whole optical system does not move mechanically in the focusing process, the focal length is changed through the liquid lens, the abrasion caused by mechanical movement is eliminated, and the whole optical system is small in size, compact in structure, low in noise and good in stability.
It should be understood that the statements in this section are not intended to identify key or critical features of the embodiments of the present invention, nor are they intended to limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic block diagram of an auto-focusing optical system according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an auto-focus optical system according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an image position adjustment unit in an auto-focus optical system according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a liquid focusing module according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of three diopter states of the liquid lens;
fig. 6 is a flowchart of a focusing method of an automatic focusing optical system according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a block diagram of an auto-focusing optical system according to an embodiment of the present invention, as shown in fig. 1, the auto-focusing optical system includes a differential interference optical module 10, a liquid focusing module 20, a processing module 30, and a driving module 40; the differential interference optical module 10 is used for emitting a detection beam to detect an object to be detected and acquire a detection image; the liquid focusing module 20 is disposed in the optical path of the differential interference optical module 10; the processing module 30 is respectively electrically connected to the differential interference optical module 10 and the driving module 40, and is configured to determine, according to the detected image, out-of-focus information of the image to be detected, determine, according to the out-of-focus information, adjustment information of the liquid focus module 20, and send the adjustment information to the driving module 40; the driving module 40 is electrically connected to the liquid focus module 20, and is configured to adjust a diopter of the liquid focus module 20 according to the adjustment information.
The detection beam may be understood as a beam emitted from the differential interference optical module 10 to detect an object to be detected, and may be, for example, an infrared beam or other wavelength beam. The object to be detected can be understood as an object to be detected according to actual needs. Specifically, the differential interference optical module 10 emits a detection beam to detect an object to be detected and acquire a detection image, and then transmits information of the detection image to the processing module 30, the processing module 30 determines defocusing information of the image to be detected according to the detection image, the defocusing information of the image to be detected is converted into adjustment information by an internal algorithm and is transmitted to the driving module 40, and after receiving the adjustment information, the driving module 40 adjusts current or voltage at two ends of the liquid state focusing module 20 according to the information, so as to change curvature of the liquid state focusing module, and thus diopter of the liquid state focusing module is changed.
Since the liquid focusing module 20 is disposed in the optical path of the differential interference optical module 10, when the diopter of the liquid focusing module 20 changes, the adjusting function of the detection image beam reflected by the object to be detected changes, so that the defocus information of the detection image beam can be further adjusted, the detection image beam is ensured not to be defocused, the definition and contrast of the detection image are ensured to be good, and the accuracy of detecting the object to be detected is realized.
It should be noted that the defocus information can be understood as a defocus amount and a defocus direction. The adjustment information may be understood as information on the magnitude of the adjustment current or voltage.
According to the technical scheme of the embodiment of the invention, the liquid lens is utilized to realize the zooming process of the optical system in the automatic focusing optical system, the diopter response time of the liquid lens is in millisecond order, the focusing speed of the automatic focusing optical system is greatly improved, the whole optical system does not have mechanical movement in the focusing process, the focal length is changed through the liquid lens, the abrasion caused by the mechanical movement is eliminated, and the whole optical system is small in size, compact in structure, low in noise and good in stability.
Fig. 2 is a schematic structural diagram of an auto-focus optical system according to an embodiment of the present invention, and fig. 3 is a schematic structural diagram of an image position adjusting unit in an auto-focus optical system according to an embodiment of the present invention, and with reference to fig. 2 and fig. 3, a differential interference optical module 10 may include a light source unit 11, a polarizing unit 12, a differential interference unit 13, an objective lens unit 14, an eyepiece unit 15, a filtering unit 16, an analyzing unit 17, an imaging position adjusting unit 18, and an imaging unit 19; the liquid focusing module 20 is located in the optical path between the differential interference unit 13 and the eyepiece 151; the light source unit 11 includes a first light source 111 and a second light source 112, the first light source 111 is used for emitting a first probe light beam, the second light source 112 is used for emitting a second probe light beam, and the wavelength ranges of the first probe light beam and the second probe light beam are different; the polarization unit 12 is respectively located on the propagation paths of the first probe beam and the second probe beam, and is configured to modulate the first probe beam to form a first polarized probe beam and modulate the second probe beam to form a second polarized probe beam; the differential interference unit 13 is respectively located on the propagation paths of the first polarized probe beam and the second polarized probe beam, and is configured to modulate the first polarized probe beam to form a first differential polarized probe beam, and modulate the second polarized probe beam to form a second differential polarized probe beam; the objective lens unit 14 and the object to be detected are sequentially located on a transmission path of the first differential polarization detection beam and the second differential polarization detection beam, the first differential polarization detection beam forms a first differential polarization reflected beam after being reflected by the object to be detected, the first differential polarization reflected beam forms a first imaging beam after being modulated by the objective lens and the differential interference unit in sequence, and the first imaging beam carries a detection signal of the object to be detected; the second differential polarization detection beam is reflected by the object to be detected to form a second differential polarization reflected beam, the second differential polarization reflected beam is modulated by the objective lens unit 14 and the differential interference unit 13 in sequence to form a second imaging beam, and the second imaging beam carries a detection signal of the object to be detected; the liquid focusing module 20 is respectively located on the propagation paths of the first imaging beam and the second imaging beam and is used for adjusting the focal lengths of the first imaging beam and the second imaging beam; the filter unit 16 includes a first filter lens 161 and a second filter lens 162, and the filter ranges of the first filter lens 161 and the second filter lens 162 are different; the analyzer unit 17 includes a first analyzer lens 171 and a second analyzer lens 172; the imaging unit 19 includes a first imaging unit 191 and a second imaging unit 192; the first imaging light beam sequentially passes through the eyepiece unit 15, the first filter lens 161, the first analyzer lens 171, and the imaging position adjustment unit 18, and then is imaged at a first position a and a second position B of the first imaging unit 191, where the first position a and the second position B are symmetric to an imaging plane conjugate to the second imaging unit 192; the second imaging beam passes through the eyepiece 15, the second filter lens 162, and the second analyzer lens 172 in sequence, and is imaged by the second imaging unit 192.
Wherein the first probe beam and the second probe beam have different wavelength ranges, such that the probe images obtained by the first probe beam and the second probe beam can be imaged in different imaging units, respectively, i.e. the probe image obtained by one of the probe beams can be used as a contrast image of the probe image obtained by the other probe beam, and the defocus information of the probe image is determined based on the contrast between the two probe images. Further, the first light source 111 and the second light source 112 may be disposed on the same side of the autofocus optical system, or may be disposed on both sides of the autofocus optical system, which is not limited in the embodiment of the present invention, and fig. 2 only illustrates that the first light source 111 and the second light source 112 are disposed on the same side of the autofocus optical system.
Further, the first light source 111 includes an infrared light source, and the second light source 112 includes a white light source. Therefore, on one hand, the detection light beams with different wavelengths can be respectively imaged in different imaging units, and the imaging of the detection light beams and the imaging of the imaging units can be conveniently distinguished; on the other hand, the infrared light has long wavelength and low energy, and the optical device cannot be damaged by adopting an infrared light source, so that the normal work of the optical device is ensured; meanwhile, the white light source is a common light source in life, is simple in material selection, and is economical and applicable. Illustratively, when the first light source 111 is an infrared light source, the wavelength range of the emitted first detection light beam is 0.75 μm to 1000 μm, and when the second light source 112 is a white light source, the wavelength range of the emitted second detection light beam is 390nm to 780nm. The first detection beam and the second detection beam have different wavelength ranges, so that the first detection beam and the second detection beam are convenient to detect respectively.
The polarizing unit 12 may be understood as a device for modulating the light source beam into a polarized light beam, and may be, for example, a polarization beam splitter. Specifically, the polarization unit 12 is respectively located on the propagation paths of the first probe beam and the second probe beam, and is configured to modulate the first probe beam to form a first polarized probe beam, and modulate the second probe beam to form a second polarized probe beam, so as to facilitate subsequent detection of the object to be detected by using the polarized beam.
The differential interference optical module in the embodiment of the present invention may further include an analyzing unit 17 corresponding to the polarizing unit 12, and the analyzing unit 17 may also be a polarization beam splitter for transmitting light having the same polarization direction as the polarization axis of the analyzing unit 17. As shown in fig. 2, the polarization analyzing unit 17 may specifically include a first polarization analyzing lens 171 and a second polarization analyzing lens 172 for analyzing and adjusting the probe light beams with different wavelengths, respectively.
Further, the differential interference optical module 11 provided in the embodiment of the present invention may further include a differential interference unit 13, an objective lens unit 14, an eyepiece lens unit 15, a filtering unit 16, a polarization analyzing unit 17, an imaging position adjusting unit 18, and an imaging unit 19, where the first light source 111 emits a first detection light beam, which passes through the polarization forming unit 12 located on a propagation path thereof and is modulated to form a first polarization detection light beam, the first polarization detection light beam propagates along the light path and is modulated into a first differential polarization detection light beam after passing through the differential interference unit 13, the first differential polarization detection light beam is two linearly polarized light beams having a small included angle and vibration directions perpendicular to each other and having equal amplitudes, the first differential polarization detection light beam propagates along the light path and is incident on a surface of an object to be detected, and is reflected by the object to be detected to form a first differential polarization reflected light beam, which continues to propagate along the light path and is modulated by the objective lens 14 and the differential interference unit 13 in sequence to form a first imaging light beam carrying image information of the object to be detected; while the first light source 111 emits the first probe beam, the second light source 112 emits the second probe beam, and the second probe beam is modulated by the same steps to form a second imaging beam carrying image information of the object to be detected. The first imaging beam propagates along the optical path, and is projected to the first position a and the second position B of the first imaging unit 191 after passing through the eyepiece unit 15, the first filter lens 161, the first analyzer lens 171, and the imaging position adjustment unit 18 in succession; the second imaging light sequentially passes through the eyepiece 15, the second filter lens 162, and the second analyzer lens 172, and is imaged in the second imaging unit 192. Such different wavelengths of imaging light beams can be imaged in different imaging units, respectively.
Further, the liquid focusing module 20 is located in the optical path between the differential interference unit 13 and the eyepiece 151, so that the liquid focusing module 20 can adjust the focal length information of the imaging beam before entering the eyepiece, ensure that the imaging unit can obtain a clear detection image, and facilitate the realization of accurate detection of the object to be detected.
Further, the imaging unit 19 may be understood as an electronic device capable of imaging configured in the differential interference optical module 10, which may be, for example, a CCD system or a CMOS system.
Optionally, the differential interference optical module 10 further includes a mask pattern unit 103.
The mask pattern unit 103 is located on a propagation path of the first probe beam for modulating the first probe beam to form a pattern probe beam.
The mask pattern unit 103 can be understood as an optical device capable of changing shape information of an image carried by a light beam, and the mask pattern unit is additionally arranged on a propagation path of the first detection light beam, so that the first detection light beam and the first imaging light beam both carry mask patterns, detection images formed at the first position A and the second position B both carry mask patterns, comparison between the detection image imaged at the first position A and the detection image imaged at the second position B is facilitated, comparison between the detection images at different positions can be simply and clearly ensured, contrast difference can be accurately obtained, accurate adjustment of diopter of the liquid state focusing module is further realized, and accurate detection of a subsequent object to be detected is ensured.
Optionally, the mask pattern unit includes a grating assembly.
Illustratively, when the mask pattern unit is a one-dimensional grating assembly, because the gratings are parallel slits with equal intervals, different brightness levels between the brightest white and the darkest black of the bright and dark areas in the image can be observed more clearly, and then whether the contrast of the two images AB is different or not can be compared more intuitively.
Alternatively, as shown with continued reference to fig. 3, the imaging position adjustment unit 18 includes a first transflective lens 181 and a first mirror plate 182; the first imaging light beam is transmitted by the first transflective lens 181 and then incident to the first position a, and is reflected by the first transflective lens 181 and then reflected by the first reflective lens and then incident to the second position B.
Specifically, the first imaging light beam passes through the first transflective lens 181 and then is split into two parts, half of the light beam directly irradiates the first position a of the first imaging unit 191, and the other half of the light beam is reflected by the first transflective lens 181 and the first reflective lens 182 and then irradiates the second position B of the first imaging unit 191, so that the first imaging light beam can be imaged at both the first position a and the second position B. Since the first position a and the second position B are symmetrical to the image plane conjugate to the second imaging unit 192, the defocus information from the differential interference optical module 11 can be determined by comparing the detected image at the first position a and the detected image at the second position B.
Optionally, with continued reference to fig. 2, the differential interference optical module 10 further includes a second transflective lens 101 and a third transflective lens 102; the second transflective lens 101 is located in a light path between the polarizing unit 12 and the differential interference unit 13 and a light path between the differential interference unit 13 and the liquid focus module 20, and is configured to reflect the first polarized probe beam and the second polarized probe beam to the differential interference unit 13, and transmit the first imaging beam and the second imaging beam to the liquid focus module 20;
the third transflective lens 102 is located in an optical path between the eyepiece unit 15 and the filter unit 16, and is configured to reflect the first and second imaging light beams to the first filter lens 161 and transmit the first and second imaging light beams to the second filter lens 162.
Specifically, a first polarization detection beam formed by modulation of the polarization unit propagates along the optical path, half of the light is reflected downward by the second transflective lens 101 located in the propagation path of the polarization unit to the differential interference unit 13, and is modulated into a first differential polarization detection beam, the first differential polarization detection beam is two linearly polarized light beams with a tiny included angle and mutually perpendicular vibration directions and equal amplitudes, the first differential polarization detection beam propagates along the optical path, is incident on the surface of the object to be detected, is reflected by the object to be detected to form a first differential polarization reflected light beam, continues to propagate along the optical path, and passes through the objective lens 14 and the differential interference unit 13 in sequence, the two linearly polarized light beams with the tiny included angle and mutually perpendicular vibration directions in the first differential polarization detection beam combine into one light beam to form a first imaging beam carrying image information of the object to be detected, the first imaging beam propagates through the focusing module 20 and the eyepiece unit 15 in sequence, propagates to the third transflective lens 102, is divided into two, and half of the first imaging beam propagates to the first filter lens 161, and the second filter lens 162. Meanwhile, the second polarized probe beam also travels to the first filter lens 161 and the second filter lens 162 through the same steps as described above. The second transflective lens and the third transflective lens are arranged to ensure that the detection light beam and the imaging light beam are normally transmitted, and a detection image of an object to be detected can be obtained.
Optionally, with continued reference to fig. 2, the differential interference optical module 10 further comprises a second mirror 104 and a fourth transflective mirror 105;
the second mirror 104 is located in the optical path between the first light source 111 and the fourth transflective mirror 105, and is used for reflecting the first probe beam to the fourth transflective mirror 105;
the fourth transflective lens 105 is located in an optical path between the second reflective mirror 104 and the polarizing unit 12 and an optical path between the second light source 112 and the polarizing unit 12, and is configured to transmit the first probe beam to the polarizing unit 12 and reflect the second probe beam to the polarizing unit 12.
Specifically, the first light source 111 emits a first detection light beam, which passes through the second reflective mirror 104, is reflected to the fourth transflective mirror 105, passes through the fourth transflective mirror 105, and then reaches the polarizing unit 12; the second light source 112 emits a second detection beam, which propagates along the optical path through the fourth transflective lens 105 on the propagation path thereof and is reflected to the polarizing unit 12. Through the arrangement of the second reflector 104 and the fourth transflective reflector 105, the light path propagation direction in the system is changed, so that the arrangement of all components in the whole system is more concentrated, and the volume of system equipment is reduced.
On the basis of the foregoing embodiments, fig. 4 is a schematic structural diagram of a liquid focus module according to an embodiment of the present invention, and as shown in fig. 4, the liquid focus module 20 may include a first housing 201 and a second housing 202 that are oppositely disposed; a first protective layer 203 and a second protective layer 204 disposed in a space defined by the first housing 201 and the second housing 202, the first protective layer 203 and the second protective layer 204 being disposed opposite to each other; and a liquid lens 205 disposed in a space defined by the first protective layer 203 and the second protective layer 204.
Here, the first protective layer 203 and the second protective layer 204 may be understood as optical devices having light transmittance, and may be, for example, flat light-transmitting glass.
Specifically, fig. 5 is a schematic structural diagram of three diopter states of the liquid lens 205, and as shown in fig. 5, the liquid focusing module can change the hydrophilicity of the oil-water intersecting surface film in the liquid lens 205 by adjusting the current or voltage at two ends of the liquid lens 205, so that the film deforms, thereby adjusting the curvature of the liquid lens 205, further changing the diopter thereof, and finally achieving the purpose of adjusting the focal length of the lens, thereby achieving clear imaging of different depths of field with the complex lens group and the eyepiece group. In addition, since the response time of the liquid lens module is short (about 25 ms), fast focusing can be achieved.
Based on the same conception of the invention, an embodiment of the present invention further provides a focusing method for an automatic focusing optical system, and specifically, fig. 6 is a flowchart of a focusing method for an automatic focusing optical system according to an embodiment of the present invention, where the method is implemented based on the automatic focusing optical system, and as shown in fig. 6, the method includes the following steps:
and S110, acquiring a detection image of the object to be detected based on the differential interference optical module.
Specifically, the process of acquiring the detected image will be described with reference to the autofocus optical system in fig. 2 and 3. The first light source 111 emits a first detection beam, the first detection beam enters a mask pattern unit 103 on the optical path of the first detection beam, the first detection beam is modulated according to a mask pattern in the mask pattern unit to form a pattern detection beam to continuously propagate, the pattern detection beam is reflected by a second reflecting mirror 104 and then continuously propagates along the optical path, the pattern detection beam penetrates through a fourth transflective mirror 105 and then enters a polarizing unit 12 on the propagation path of the pattern detection beam to form a first polarized detection beam after being modulated, the first polarized detection beam propagates along the optical path, the second transflective mirror 101 reflects half of the light downwards to a differential interference unit 13 and is modulated into a first differential polarized detection beam, the first differential polarized detection beam is two linearly polarized light beams with a tiny included angle and mutually perpendicular vibration directions and equal in amplitude, the first differential polarized detection beam propagates along the optical path, the first differential polarized detection beam enters the surface of an object to be detected through an objective lens 14 and is reflected by the object to form a first differential polarized detection beam, the first differential polarized detection beam continuously propagates along the optical path and sequentially passes through the objective lens 14 and the differential interference unit 13, the first differential polarization detection beam has two linearly polarized light beams with mutually perpendicular vibration directions and equal amplitude, so as to form a first polarized detection beam carrying image forming a first image of the object to be detected. The first imaging light beam passes through the second transflective lens 101, the liquid focusing module 20 and the eyepiece 15 successively, then is reflected by the third transflective lens 102 to half of the light beam to the first filter lens 161 and the first analyzer lens 171, and is further split into two by the first transflective lens 181, half of the light beam directly irradiates on the first position a of the first imaging unit 191, and the other half of the light beam irradiates on the second position B of the first imaging unit 191 after being reflected by the first transflective lens 181 and the first reflector 182, and at this time, the first imaging unit acquires images of the two points a and B. While the first light source 111 emits the first detection light beam, the second light source 112 emits a second detection light beam with a wavelength range different from that of the first detection light beam, the second detection light beam is reflected by the second reflector 105 and then continuously propagates along the light path, and is incident to the polarizing unit 12 on the propagation path of the second detection light beam, the second polarization detection light beam propagates along the light path, the second transflective lens 101 reflects half of the light beam downward to the differential interference unit 13 and is modulated into a second differential polarization detection light beam, the second differential polarization detection light beam is two linearly polarized light beams with a small included angle and mutually perpendicular vibration directions and equal amplitudes, the second differential polarization detection light beam propagates along the light path, and is incident to the surface of the object to be detected through the objective lens 14, and then forms a second differential polarization reflection light beam after being reflected by the object to be detected, and then continuously propagates along the light path, and is modulated by the objective lens 14 and the differential interference unit 13 in sequence, the second differential polarization detection light beam has a small included angle and mutually perpendicular vibration directions and equal amplitudes, and forms a combined light beam which carries image information of the object to be detected. The second imaging beam passes through the second transflective lens 101, the liquid focus module 20, the eyepiece 15, and then the third transflective lens 102 reflects half of the light to the first filter lens to be blocked, and the other half of the light passes through the third transflective lens 102, passes through the second filter lens 162 and the second analyzer lens 172, and finally is projected on the second imaging unit 191.
And S120, determining the out-of-focus information of the image to be detected according to the detected image.
Specifically, after the detection image of the object to be detected is obtained, at this time, the two points a and B on the first imaging unit have the detection image of the object to be detected, and the processing module compares the difference of the contrast values of the detection images at the positions a and B to obtain the information such as the defocus amount and the defocus direction.
S130, determining the adjusting information of the liquid focusing module according to the defocusing information and sending the adjusting information to the driving module so that the driving module adjusts the diopter of the liquid focusing module according to the adjusting information.
Specifically, after determining information such as defocus amount and defocus direction, the processing module converts the defocus information into adjustment information of the liquid focus module through an internal algorithm, and sends the adjustment information to the driving module, and the driving module adjusts the voltage/current values at two ends of the liquid focus module according to the adjustment information, and then adjusts the curvature of the liquid lens, so as to adjust the diopter of the liquid focus module.
Illustratively, after determining information such as defocus amount and defocus direction, the processing module can select a driving voltage/current matched with the defocus information as a target voltage/current according to the defocus information, and control the driving module to output the target voltage/current to two ends of the liquid lens, so as to change hydrophilicity of the oil-water intersecting surface film in the liquid lens, deform the film, adjust curvature of the liquid lens, change diopter of the liquid lens, and finally achieve the purpose of adjusting focal length of the lens.
According to the technical scheme of the embodiment of the invention, the liquid lens is utilized to realize the zooming process of the optical system in the automatic focusing optical system, the diopter response time of the liquid lens is in the millisecond order, the focusing speed of the automatic focusing optical system is greatly improved, the whole optical system does not move mechanically in the focusing process, the focal length is changed through the liquid lens, the abrasion caused by mechanical movement is eliminated, and the whole optical system is small in size, compact in structure, low in noise and good in stability.
It should be understood that various forms of the flows shown above, reordering, adding or deleting steps, may be used. For example, the steps described in the present invention may be executed in parallel, sequentially, or in different orders, and are not limited herein as long as the desired result of the technical solution of the present invention can be achieved.
The above-described embodiments should not be construed as limiting the scope of the invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may be made in accordance with design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An automatic focusing optical system is characterized by comprising a differential interference optical module, a liquid focusing module, a processing module and a driving module;
the differential interference optical module is used for emitting a detection beam to detect an object to be detected and acquiring a detection image;
the liquid focusing module is arranged in the light path of the differential interference optical module;
the processing module is respectively electrically connected with the differential interference optical module and the driving module and is used for determining out-of-focus information of the image to be detected according to the detected image, determining adjustment information of the liquid state focusing module according to the out-of-focus information and sending the adjustment information to the driving module;
the driving module is electrically connected with the liquid focusing module and used for adjusting the diopter of the liquid focusing module according to the adjusting information.
2. The auto-focus optical system according to claim 1, wherein the differential interference optical module includes a light source unit, a polarizing unit, a differential interference unit, an objective lens unit, an eyepiece lens unit, a filter unit, an analyzing unit, an imaging position adjusting unit, and an imaging unit;
the liquid focusing module is positioned in a light path between the differential interference unit and the eyepiece;
the light source unit comprises a first light source and a second light source, the first light source is used for emitting a first detection light beam, the second light source is used for emitting a second detection light beam, and the wavelength ranges of the first detection light beam and the second detection light beam are different;
the polarization unit is respectively positioned on the propagation paths of the first detection beam and the second detection beam and is used for modulating the first detection beam to form a first polarized detection beam and modulating the second detection beam to form a second polarized detection beam;
the differential interference unit is respectively positioned on the propagation paths of the first polarized detection beam and the second polarized detection beam and is used for modulating the first polarized detection beam to form a first differential polarized detection beam and modulating the second polarized detection beam to form a second differential polarized detection beam;
the objective lens unit and the object to be detected are sequentially located on a transmission path of the first differential polarization detection beam and the second differential polarization detection beam, the first differential polarization detection beam is reflected by the object to be detected to form a first differential polarization reflected beam, the first differential polarization reflected beam is modulated by the objective lens and the differential interference unit in sequence to form a first imaging beam, and the first imaging beam carries a detection signal of the object to be detected; the second differential polarization detection beam is reflected by the object to be detected to form a second differential polarization reflected beam, the second differential polarization reflected beam is modulated by the objective lens unit and the differential interference unit in sequence to form a second imaging beam, and the second imaging beam carries a detection signal of the object to be detected;
the liquid focusing module is respectively positioned on the propagation paths of the first imaging light beam and the second imaging light beam and is used for adjusting the focal lengths of the first imaging light beam and the second imaging light beam;
the filtering unit comprises a first filtering lens and a second filtering lens, and the filtering ranges of the first filtering lens and the second filtering lens are different; the polarization analyzing unit comprises a first polarization analyzing lens and a second polarization analyzing lens; the imaging unit includes a first imaging unit and a second imaging unit; the first imaging light beam sequentially passes through the eyepiece unit, the first filter lens, the first polarization analyzing lens and the imaging position adjusting unit and then is imaged at a first position and a second position of the first imaging unit, and the first position and the second position are symmetrical to an imaging plane conjugated with the second imaging unit; and the second imaging light beam sequentially passes through the ocular lens, the second filter lens and the second polarization analyzing lens and then is imaged in the second imaging unit.
3. The auto-focus optical system according to claim 2, wherein the differential interference optical module further includes a mask pattern unit;
the mask pattern unit is located on a propagation path of the first probe beam for modulating the first probe beam to form a patterned probe beam.
4. The autofocus optical system of claim 3, wherein the mask pattern unit comprises a grating assembly.
5. The autofocus optical system of claim 2, wherein the imaging position adjusting unit includes a first transflective lens and a first reflective lens;
the first imaging light beam is transmitted by the first transflective lens and then is incident to the first position, and the first imaging light beam is reflected by the first transflective lens and then is incident to the second position after being reflected by the first reflector.
6. The autofocus optical system of claim 2, wherein the differential interference optical module further comprises a second transflective lens and a third transflective lens;
the second transflective lens is positioned in a light path between the polarizing unit and the differential interference unit and a light path between the differential interference unit and the liquid state focusing module, and is used for reflecting the first polarized detection light beam and the second polarized detection light beam to the differential interference unit and transmitting the first imaging light beam and the second imaging light beam to the liquid state focusing module;
the third transflective lens is positioned in a light path between the ocular unit and the filter unit, and is used for reflecting the first imaging light beam and the second imaging light beam to the first filter lens and transmitting the first imaging light beam and the second imaging light beam to the second filter lens.
7. The autofocus optical system of claim 2, wherein the differential interference optical module further comprises a second mirror and a fourth transflective mirror;
the second reflecting lens is positioned in an optical path between the first light source and the fourth transflective lens and is used for reflecting the first detection light beam to the fourth transflective lens;
the fourth transflective lens is positioned in a light path between the second reflector and the polarizing unit and a light path between the second light source and the polarizing unit, and is used for transmitting the first detection light beam to the polarizing unit and reflecting the second detection light beam to the polarizing unit.
8. The autofocus optical system of claim 1, wherein the liquid focus module comprises first and second oppositely disposed housings;
a first protective layer and a second protective layer disposed within a space defined by the first housing and the second housing, the first protective layer and the second protective layer being disposed opposite to each other;
and the liquid lens is arranged in a space defined by the first protective layer and the second protective layer.
9. The autofocus optical system of claim 2, wherein the first light source comprises an infrared light source and the second light source comprises a white light source.
10. A focusing method of an automatic focusing optical system applied to the automatic focusing optical system according to any one of claims 1 to 9, comprising:
acquiring a detection image of an object to be detected based on a differential interference optical module;
determining out-of-focus information of the image to be detected according to the detection image;
and determining the adjustment information of a liquid focusing module according to the defocusing information and sending the adjustment information to the driving module so that the driving module adjusts the diopter of the liquid focusing module according to the adjustment information.
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