CN115019995A - Reflector surface shape control module, synchrotron radiation device and free electron laser device - Google Patents
Reflector surface shape control module, synchrotron radiation device and free electron laser device Download PDFInfo
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- CN115019995A CN115019995A CN202210605546.4A CN202210605546A CN115019995A CN 115019995 A CN115019995 A CN 115019995A CN 202210605546 A CN202210605546 A CN 202210605546A CN 115019995 A CN115019995 A CN 115019995A
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- 239000003574 free electron Substances 0.000 title claims abstract description 27
- 230000005469 synchrotron radiation Effects 0.000 title claims abstract description 23
- 238000001816 cooling Methods 0.000 claims abstract description 131
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 239000000110 cooling liquid Substances 0.000 claims abstract description 21
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
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- 238000009413 insulation Methods 0.000 description 1
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- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/067—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators using surface reflection, e.g. grazing incidence mirrors, gratings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S4/00—Devices using stimulated emission of electromagnetic radiation in wave ranges other than those covered by groups H01S1/00, H01S3/00 or H01S5/00, e.g. phonon masers, X-ray lasers or gamma-ray lasers
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Abstract
The application provides a reflector surface shape control module, a synchrotron radiation device and a free electron laser device, and relates to the technical field of synchrotron radiation and free electron laser. The reflector surface shape control module comprises a reflector body and a cooling structure; the mirror body is provided with a reflecting surface, a first groove is formed in the mirror body along the length direction, the opening of the first groove faces upwards, and cooling liquid is arranged in the first groove; the cooling structure comprises a driving mechanism, a cooling pipe and cooling fins connected with the cooling pipe, the cooling pipe is used for being externally connected with a cooling system, the cooling fins are inserted into cooling liquid and are not in contact with the first groove, and the driving mechanism is connected with the cooling pipe and is used for driving the cooling pipe to drive the cooling fins to move along the length direction of the first groove. The application provides a speculum face shape control module group has solved the speculum face shape control problem when current speculum face shape cooling scheme is not applicable to the facula and removes to make the high error and the slope error of speculum face shape satisfy and predetermine the requirement.
Description
Technical Field
The application relates to the technical field of synchrotron radiation and free electron laser, in particular to a reflector profile control module, a synchrotron radiation device and a free electron laser device.
Background
For both synchrotron radiation and free electron laser devices, the X-rays generated by the light source contain some thermal load. When the reflector receives light from an upstream source, a portion of the X-rays will be reflected and a certain amount of thermal power will be absorbed. After the reflector absorbs the heat power of the light source, a temperature gradient is generated on the reflector, so that the thermal deformation of the mirror surface is caused, and finally the transmission efficiency and the transmission quality of the X-ray are adversely affected.
The new generation of free electron laser device has high average power (kW), ultrashort pulse (fs), ultrastrong instantaneous power (GW), high repetition frequency (MHz), and stable transmission of full coherent X-rays in a beam line, and puts a very high requirement on surface shape control of an optical element, and generally requires that a height error PV (Peak to valley) is several nm and a slope error RMS value is less than 100nrad (nanoradian) magnitude. At present, the cooling scheme of the beam line reflector of the free electron laser is mostly used for reference from a synchrotron radiation device. In addition to the side contact cooling that is generally used, side grooving designs have been employed in the prior art to minimize surface thermal deformation under a given thermal load by optimizing grooving location, depth, and width. In the prior art, a scheme for locally cooling the side surface is also provided, and under the condition of keeping the appearance of the reflector complete, the length and the width of a contact area between a cooling copper block and the side surface of the reflector are optimized, so that a small surface shape error can be obtained for a certain load. In addition to side contact cooling, there are also solutions for short-sized optical elements that utilize internal channel cooling. These solutions have in common that they are effective only when the spot centre and the mirror surface centre are substantially coincident. These solutions are not applicable when the spot center is shifted on the reflecting surface.
Disclosure of Invention
An object of the present application is to provide a mirror surface shape control module, a synchrotron radiation device and a free electron laser device, which are used to solve the deficiencies existing in the prior art.
In order to achieve the above object, in a first aspect, the present application provides a mirror surface shape control module applied to a synchrotron radiation device and a free electron laser device, the mirror surface shape control module comprising a mirror body and a cooling structure;
the mirror body is provided with a reflecting surface for reflecting light beams, a first groove is formed in the mirror body along the length direction, the opening of the first groove faces upwards, and cooling liquid is arranged in the first groove;
the cooling structure comprises a driving mechanism, a cooling pipe and cooling fins connected with the cooling pipe, the cooling pipe is used for being externally connected with a cooling system, the cooling fins are inserted into cooling liquid and are not in contact with the first groove, the driving mechanism is connected with the cooling pipe and is used for driving the cooling pipe to drive the cooling fins to move along the length direction of the first groove so as to cool a preset position on the reflecting surface.
With reference to the first aspect, in a possible implementation manner, two side surfaces of the mirror body adjacent to the reflection surface are respectively provided with a second groove, and the second grooves penetrate through the mirror body along the length direction of the mirror body.
With reference to the first aspect, in one possible implementation manner, the mirror body has an upper surface and two side surfaces, and the two side surfaces are respectively located on two sides of the upper surface in the width direction;
the reflecting surface and the first groove are arranged on the upper surface of the mirror body, and the first groove is positioned on one side of the reflecting surface.
With reference to the first aspect, in a possible implementation manner, two first grooves are provided, the two first grooves are parallel to each other and are respectively located on two sides of the reflection surface in the width direction, and each first groove is provided with the cooling structure.
With reference to the first aspect, in one possible implementation manner, the mirror body has an upper surface and two side surfaces, and the two side surfaces are respectively located on two sides of the upper surface in the width direction;
the reflecting surface is arranged on one of the two side surfaces, and the first groove is arranged on the upper surface.
With reference to the first aspect, in one possible implementation manner, the mirror body has an upper surface, a lower surface opposite to the upper surface, and two side surfaces, which are respectively located on two sides of the upper surface in the width direction;
the reflecting surface is arranged on the lower surface, at least one of the two side surfaces is provided with a second groove, and the groove wall of the second groove close to the lower surface is provided with the first groove.
With reference to the first aspect, in one possible implementation manner, the second groove is disposed to penetrate along a length direction of the mirror body.
With reference to the first aspect, in one possible implementation manner, the length of the cooling fin is smaller than the length of a light spot formed by the light beam on the reflecting surface.
With reference to the first aspect, in one possible embodiment, the cooling liquid is an indium gallium solution.
In a second aspect, the present application further provides a synchrotron radiation device, including the device body and the reflector shape control module as provided in the above-mentioned first aspect, the device body be used for to the plane of reflection luminous beam, the beam is in the plane of reflection forms the facula, cooling fin is in following under actuating mechanism's the drive the facula removes.
In a third aspect, the present application further provides a free electron laser device, including a device body and the mirror surface shape control module as provided in the first aspect, where the device body is configured to emit a light beam to the reflection surface, the light beam forms a light spot on the reflection surface, and the cooling fin moves with the light spot under the driving of the driving mechanism.
Compare in prior art, the beneficial effect of this application:
the application provides a speculum face shape control module group, synchrotron radiation device and free electron laser device, wherein, speculum face shape control module group is applied to synchrotron radiation device and free electron laser device, and speculum face shape control module group includes the mirror body and cooling structure. The application provides a speculum face shape control module group is used for external cooling system through the cooling tube among the cooling structure, by external cooling system input cold source, the rethread cooling fin and cooling liquid give the mirror body with the cold source with cooling off to the plane of reflection. The cooling fins further move along the length direction of the first groove under the driving of the driving mechanism, and then the preset area on the reflecting surface is cooled. Therefore, the cooling fin is applied to a synchrotron radiation device and a free electron laser device, the cooling fin moves along with the light spot formed by the light beam on the reflecting surface under the driving of the driving mechanism, so that the light spot can be effectively controlled in the surface shape when moving to any position on the reflecting surface, the problem of surface shape control of the reflecting mirror when the current reflecting mirror surface shape cooling scheme is not suitable for the light spot moving is solved, and the height error and the slope error of the surface shape of the reflecting surface meet the preset requirements.
In addition, among the speculum face shape control module group that this application provided, cooling fin inserts and locates in the cooling liquid, and not contact with first recess, and its purpose is to avoid the vibration that cooling fin produced in the work directly to transmit to the mirror body, in order to ensure the normal stable work of mirror body.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic perspective view illustrating a first mirror surface shape control module provided in an embodiment of the present application;
fig. 2 is a front view showing a first mirror surface shape control module shown in fig. 1;
FIG. 3 is a sectional view taken along A-A of the first mirror profile control module shown in FIG. 1;
FIG. 4 is a plan view of a mirror body in the first mirror surface shape control module shown in FIG. 1;
FIG. 5 shows a strain distribution graph (a) in the normal direction of the meridian and a slope error distribution graph (b) in the normal direction of the meridian, which are obtained by irradiating the reflection surface with the X-ray having the wavelength 1;
FIG. 6 shows a deformation graph (a) and a slope error graph (b) in the normal direction of a meridian line obtained by irradiating the reflection surface with the wavelength 2 of the X-ray;
FIG. 7 shows a deformation graph (a) and a slope error graph (b) in the normal direction of a meridian line obtained by irradiating the reflection surface with the wavelength 3 of the X-ray;
fig. 8 is a schematic perspective view illustrating a second mirror surface shape control module provided in an embodiment of the present application;
fig. 9 is a schematic perspective view illustrating a third mirror surface shape control module provided in an embodiment of the present application.
Description of the main element symbols:
10-meridian; 20-light spot;
100-a mirror body; 100 a-a reflective surface; 101-upper surface; 102-lower surface; 103-side surface; 110-a first groove; 120-a second groove; 200-a cooling structure; 210-a drive mechanism; 211-a drive member; 212-a controller; 220-a cooling tube; 230-cooling fins; 300-cooling liquid.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
In the description of the present application, it is to be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, a first feature is "on" or "under" a second feature such that the first and second features are in direct contact, or the first and second features are in indirect contact via an intermediary. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Example one
Referring to fig. 1, the present embodiment provides a mirror surface shape control module, and more particularly, to a beam line mirror surface shape control module applied to a synchrotron radiation device and a free electron laser device.
The mirror surface shape control module comprises a mirror body 100 and a cooling structure 200.
The mirror body 100 is provided with a reflecting surface 100a for reflecting light beams, the mirror body 100 is provided with a first groove 110 along the length direction, the opening of the first groove 110 faces upwards, and the first groove 110 is provided with cooling liquid 300.
The mirror body 100 is in a long strip shape, and the reflecting surface 100a is disposed on one side surface of the mirror body 100 along the length direction of the mirror body 100. The light beam is an X-ray, the light beam irradiated on the reflection surface 100a forms a spot 20, and the spot 20 is located on a meridian 10 of the reflection surface 100a (the meridian 10 is a symmetric center line in the extension direction of the reflection surface 100 a).
Referring to fig. 2 and 3, the cooling structure 200 includes a driving mechanism 210, a cooling tube 220, and a cooling fin 230 connected to the cooling tube 220. The cooling pipe 220 is used for externally connecting a cooling system (not shown), and the externally connected cooling system is used for providing circulating cooling water as a cooling source.
The cooling fins 230 are inserted in the cooling liquid 300 and do not contact the first grooves 110. Therefore, the cold source provided by the cold supply system is sequentially transmitted to the mirror body 100 through the cooling tube 220, the cooling fin 230 and the cooling liquid 300, so as to cool the reflecting surface 100a on the mirror body 100, and achieve the purpose of controlling the surface shape of the reflecting surface 100 a.
In some embodiments, cooling fins 230 are integrally cast with cooling tubes 220.
In some embodiments, the cooling fins 230 are integral with the cooling tubes 220 by welding.
In some embodiments, the cooling fins 230 and the cooling tubes 220 are both thermally conductive. Alternatively, the heat conducting material may be copper material, aluminum material, or the like.
Further, the length of the cooling fin 230 is smaller than the length of the first groove 110.
In some embodiments, the length of the cooling fin 230 is smaller than the length of the light spot 20 formed on the reflecting surface 100a by the light beam, so as to effectively reduce the temperature gradient of the light spot 20 in the length direction.
The driving mechanism 210 is disposed on a frame of the free electron laser device, and the driving mechanism 210 is connected to the cooling tube 220 for driving the cooling tube 220 to move along the length direction of the first groove 110, so as to cool the preset position on the reflection surface 100a, which is more precise in cooling and reduces energy consumption.
In some embodiments, the drive mechanism 210 and the cooling tube 220 are coupled by insulation. The heat insulating member is made of a heat insulating material such as glass fiber, asbestos, rock wool, aerogel blanket, or vacuum panel.
Further, the driving mechanism 210 includes a driving member 211 and a controller 212, wherein the driving member 211 is connected to the cooling tube 220 and is used for driving the cooling tube 220 to drive the cooling fin 230 to extend along the length direction of the first groove 110. The controller 212 is connected to the driving member 211, and the controller 212 is connected to a control system of the free electron laser device to control the operation of the driving member 211.
In some embodiments, the drive 211 may be selected to be a linear motor, an electric push rod, a motor + lead screw nut mechanism, or a motor + rack and pinion configuration. The above structure can convert the rotary motion into the linear motion.
In some embodiments, the temperature range of the circulating cooling provided by the cooling system is 15 ℃ to 25 ℃.
In other embodiments, the temperature of the circulating cooling provided by the cooling system is in the range of 18 ℃ to 25 ℃.
Alternatively, the temperature of the circulating cooling provided by the cooling system may be selected to be 18.5 ℃, 18.9 ℃, 19 ℃, 19.4 ℃, 20.2 ℃, 20.6 ℃, 21 ℃, 21.8 ℃, 22.1 ℃, 22.5 ℃, 23 ℃, 23.5 ℃, 24 ℃, 24.2 ℃, 24.6 ℃ or 24.9 ℃. It should be understood that the foregoing is illustrative only and is not intended to limit the scope of the invention.
In some embodiments, the cooling liquid 300 is a liquid metal. Further, indium gallium solution can be selected, and the indium gallium solution can be suitable for a high vacuum environment where a synchrotron radiation device and a free electron laser device work.
In some embodiments, the two side surfaces of the mirror body 100 adjacent to the reflection surface 100a are both provided with second grooves 120, and the second grooves 120 are disposed through the mirror body 100 along the length direction thereof.
It will be appreciated that the X-rays generated by the light source include some thermal loading due to the beam impinging on the reflective surface 100 a. When the mirror 100 receives a beam from upstream, it will reflect a portion of the X-rays and absorb a certain amount of thermal power. When the mirror body 100 absorbs thermal power, the reflecting surface 100a is thermally deformed. The two second grooves 120 can release internal stress generated after the mirror body 100 absorbs heat, and further reduce the change of the surface shape of the reflecting surface 100a during heat absorption, so that the surface shape of the reflecting surface 100a maintains stability.
The present embodiment also provides a synchrotron radiation device, which includes a device body (not shown) and the reflector surface shape control module provided above, the device body is used for emitting a light beam to the reflector surface 100a, the light beam forms the light spot 20 on the reflector surface 100a, and the cooling fin 230 moves with the light spot 20 under the driving of the driving mechanism 210.
The present embodiment also provides a free electron laser device, which includes a device body (not shown) and the mirror surface shape control module provided above, wherein the device body is configured to emit a light beam to the reflecting surface 100a, the light beam forms a light spot 20 on the reflecting surface 100a, and the cooling fin 230 moves with the light spot 20 under the driving of the driving mechanism 210.
In the synchrotron radiation device or the free electron laser device provided by this embodiment, the method for controlling the mirror surface shape includes the following steps:
s100: acquiring displacement information of the light spot 20 moving on the reflecting surface 100 a;
specifically, the laser generator can move the emitted light beam along the length direction of the mirror body 100, and the light spot 20 can move on the reflecting surface 100a, and the controller 212 can obtain the displacement information of the light spot 20.
S200: the cooling fin 230 is controlled to move according to the displacement information so that the cooling fin 230 corresponds to the middle of the spot 20.
Specifically, the controller 212 controls the driving member 211 to drive the cooling fin 230 to move along the first groove 110 according to the obtained displacement information, so as to move the cooling fin 230 to a preset position, so that the cooling fin 230 corresponds to the middle of the light spot 20.
It can be understood that, since the mirrors will be operated in the high vacuum mirror box at a later stage, the positions and lengths of the spots 20 formed on the reflecting surface 100a by the different X-ray wavelengths are different, and in order to make the cooling structure 200 cool the corresponding spots 20 better, a table corresponding to the positions of the spots 20 on the reflecting surface 100a according to the different X-ray wavelengths needs to be established in advance in the system.
When the light spot 20 moves to a certain position of the reflection surface 100a, the controller 212 can control the driving element 211 to drive the cooling fin 230 to move to a predetermined position by looking up the data in the position correspondence table, so that the cooling fin 230 controls the surface shape of the reflection surface 100 a.
After the step S200 is completed, the surface shape of the reflecting surface 100a may be further controlled by changing the flow rate of the circulating cooling water supplied from the cooling system.
Of course, in some embodiments, the surface shape of the reflecting surface 100a can be further controlled by changing the depth of the cooling fins 230 inserted into the cooling liquid 300.
The mirror surface shape control module provided in this embodiment is externally connected to a cooling system through the cooling pipe 220 in the cooling structure 200, and a cold source is input from the externally connected cooling system, and then is transmitted to the mirror body 100 through the cooling fin 230 and the cooling liquid 300 to cool the reflecting surface 100 a. The cooling fin 230 is driven by the driving mechanism 210 to move along the length direction of the first groove 110, so as to cool the predetermined area on the reflecting surface 100 a. Therefore, when the cooling fin 230 is applied to the free electron laser device, the cooling fin moves along with the light spot 20 formed by the light beam on the reflecting surface 100a under the driving of the driving mechanism 210, so that any position where the light spot 20 moves on the reflecting surface 100a can be effectively controlled in the surface shape, the problem that the existing cooling scheme for the surface shape of the reflecting mirror is not suitable for controlling the surface shape of the reflecting mirror when the light spot 20 moves is solved, and the height error and the slope error of the surface shape of the reflecting surface 100a meet preset requirements. Specifically, in this embodiment, the height error PV can be on the order of nm and the slope error RMS can be on the order of nrad.
Further, the cooling fins 230 of the mirror surface shape control module provided in this embodiment are inserted into the cooling liquid 300 and do not contact with the first grooves 110, so as to prevent the vibration generated during the operation of the cooling fins 230 from being directly transmitted to the mirror body 100, thereby ensuring the normal and stable operation of the mirror body 100.
Example two
Referring to fig. 1, 2 and 3, the present embodiment provides a mirror surface shape control module for a synchrotron radiation device and a free electron laser device. The second embodiment is an improvement made on the basis of the first embodiment, and compared with the first embodiment, the second embodiment is characterized in that:
in the present embodiment, the mirror body 100 is designed to be a square bar shape, wherein the mirror body 100 has an upper surface 101, a lower surface 102 opposite to the upper surface 101, and two side surfaces 103, and the two side surfaces 103 are respectively located on two sides of the upper surface 101 along the width direction and located between the upper surface 101 and the lower surface 102.
Further, the reflecting surface 100a and the first groove 110 are both disposed on the upper surface 101 of the mirror body 100, that is, the reflecting surface 100a faces upward in the vertical direction, the opening of the first groove 110 also faces upward, and the first groove 110 is located on one side of the reflecting surface 100 a. The cooling fins 230 are inserted in the cooling liquid 300 of the first groove 110, and do not contact the first groove 110.
In this embodiment, there are two first grooves 110, two first grooves 110 are parallel to each other and located on two sides of the reflection surface 100a along the width direction, and each first groove 110 is correspondingly provided with one cooling structure 200, that is, there are two cooling structures 200, wherein the driving members 211 in the two cooling structures 200 keep synchronous in motion.
It can be understood that, in the present embodiment, by providing two first grooves 110 and two cooling structures 200, and the driving members 211 in the two cooling structures 200 are kept synchronized in motion, so as to better control the surface shape of the reflecting surface 100a, so that the height error and the slope error of the surface shape of the reflecting surface 100a meet the preset requirements.
Further, a second groove 120 is disposed on each of the two side surfaces 103, and the second groove 120 is disposed through the lens body 100 along the length direction thereof to balance the internal stress of the lens body 100.
Referring to fig. 5, fig. 6 and fig. 7, in the present embodiment, in order to describe the technical solution of the present application more clearly, the following examples are illustrated:
the length, width and height dimensions of the lens body 100 are respectively as follows: 700mm, 60mm, plane of reflection 100a is located the upper surface 101 of mirror body 100, and upper surface 101 is equipped with two first recesses 110, and the cooling liquid 300 that pours into in first recess 110 is indium gallium solution, and the liquid level of indium gallium solution is less than optical element's upper surface 101, and the depth and the width of first recess 110 are respectively: 12mm, 6mm, the two side surfaces 103 of the mirror body 100 are both provided with second grooves 120. The depth and height of the second groove 120 are both 10 mm. The depth of the cooling fin 230 inserted into the indium gallium solution is 8mm, and the distances between the side and bottom surfaces of the cooling fin 230 and the side and bottom surfaces of the first groove 110 are both 2 mm.
Referring to fig. 4, during the movement of the spot 20, three different positions are considered, and coordinates are established in the direction of the meridian 10 (parallel to the length direction of the mirror body 100) passing through the center of the reflecting surface 100a, wherein the positions of the centers of the spots 20 of the three X-ray wavelengths on the reflecting surface 100a are determined in advance by taking the center of the reflecting surface 100a as the origin of coordinates, and a table corresponding to the positions of the spots 20 on the reflecting surface 100a according to the different X-ray wavelengths is established in advance in the system, as shown in the following table:
| wavelength of X-ray | Position of the center of the light spot |
| Wavelength 1 | -235 |
| Wavelength 2 | 0 |
| Wavelength 3 | 205 |
Since the thermal power absorbed by the reflector is less than 2W, the deformation curve and the slope error curve in the normal direction of the meridian 10 at the three positions are obtained by the technical solution provided by the present embodiment, as shown in fig. 5, fig. 6 and fig. 7, respectively, it can be seen from fig. 5 to fig. 7 that the height error PV value of the surface shape of the reflective surface 100a is less than 1.5nm, and the slope error RMS value is less than 20nrad, which meets the requirement of the surface shape.
EXAMPLE III
Referring to fig. 8, the present embodiment provides a mirror surface shape control module for a synchrotron radiation device and a free electron laser device. The third embodiment is an improvement on the technology of the first embodiment, and compared with the first embodiment, the third embodiment is characterized in that:
referring to fig. 1, in the present embodiment, the mirror body 100 is designed to be a square bar shape, wherein the mirror body 100 has an upper surface 101, a lower surface 102 opposite to the upper surface 101, and two side surfaces 103, and the two side surfaces 103 are respectively located on two sides of the upper surface 101 along a width direction and located between the upper surface 101 and the lower surface 102.
Further, the reflecting surface 100a is provided on one of the two side surfaces 103, that is, as shown in fig. 8, the reflecting surface 100a faces left (or right). The first groove 110 is provided on the upper surface 101. The cooling fins 230 are inserted in the cooling liquid 300 of the first groove 110, and do not contact the first groove 110.
The upper surface 101 and the lower surface 102 are both provided with a second groove 120, and the second groove 120 is arranged to penetrate along the length direction of the mirror body 100. And the first groove 110 is closer to the reflecting surface 100a than the second groove 120 is to the upper surface 101.
Example four
Referring to fig. 9, the present embodiment provides a mirror surface shape control module for a synchrotron radiation device and a free electron laser device. The fourth embodiment is an improvement made on the basis of the first embodiment, and compared with the first embodiment, the differences are that:
referring to fig. 1, in the present embodiment, the mirror body 100 is designed to be a square bar shape, wherein the mirror body 100 has an upper surface 101, a lower surface 102 opposite to the upper surface 101, and two side surfaces 103, and the two side surfaces 103 are respectively located on two sides of the upper surface 101 along a width direction and located between the upper surface 101 and the lower surface 102.
Further, the reflecting surface 100a is provided on the lower surface 102, that is, as shown in fig. 9, the reflecting surface 100a faces downward. At least one of the two side surfaces 103 is provided with a second groove 120. In this embodiment, two side surfaces 103 are respectively provided with a second groove 120, and the second grooves 120 are disposed through the lens body 100 along the length direction thereof. And a groove wall of each second groove 120 close to the lower surface 102 is provided with a first groove 110, each first groove 110 is correspondingly provided with a cooling structure 200, and the cooling fins 230 are inserted in the cooling liquid 300 of the first groove 110 and are not in contact with the first groove 110.
In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (10)
1. A reflector surface shape control module is applied to a synchrotron radiation and free electron laser device and is characterized by comprising a mirror body and a cooling structure;
the mirror body is provided with a reflecting surface for reflecting light beams, a first groove is formed in the mirror body along the length direction, the opening of the first groove faces upwards, and cooling liquid is arranged in the first groove;
the cooling structure comprises a driving mechanism, a cooling pipe and cooling fins connected with the cooling pipe, the cooling pipe is used for being externally connected with a cooling system, the cooling fins are inserted into cooling liquid and are not in contact with the first groove, the driving mechanism is connected with the cooling pipe and is used for driving the cooling pipe to drive the cooling fins to move along the length direction of the first groove so as to cool a preset position on the reflecting surface.
2. The mirror surface shape control module according to claim 1, wherein a second groove is formed on each of two adjacent side surfaces of the mirror body and the reflecting surface, and the second grooves are arranged to penetrate along a length direction of the mirror body.
3. The mirror shape control module according to claim 1, wherein the mirror body has an upper surface and two side surfaces which are respectively located on both sides of the upper surface in a width direction;
the reflecting surface and the first groove are arranged on the upper surface of the mirror body, and the first groove is located on one side of the reflecting surface.
4. The mirror surface shape control module according to claim 3, wherein there are two first grooves, the two first grooves are parallel to each other and are respectively located on both sides of the reflecting surface in the width direction, and each of the first grooves is provided with the cooling structure.
5. The mirror surface shape control module according to claim 1, wherein the mirror body has an upper surface and two side surfaces which are respectively located on both sides of the upper surface in a width direction;
wherein, the reflecting surface is arranged on one of the two side surfaces, and the first groove is arranged on the upper surface.
6. The mirror shape control module according to claim 1, wherein the mirror body has an upper surface, a lower surface opposite to the upper surface, and two side surfaces respectively located on both sides of the upper surface in a width direction;
the reflecting surface is arranged on the lower surface, at least one of the two side surfaces is provided with a second groove, and the groove wall of the second groove close to the lower surface is provided with the first groove.
7. The mirror surface shape control module according to claim 6, wherein the second groove is provided through along a length direction of the mirror body.
8. The mirror surface shape control module according to any one of claims 1 to 7, wherein a length of the cooling fin is smaller than a length of a spot of the light beam formed on the reflecting surface.
9. A synchrotron radiation device comprising a device body for emitting a light beam toward a reflecting surface, the light beam forming a spot on the reflecting surface, and the mirror surface shape control module according to any one of claims 1 to 8, the cooling fin being moved with the spot by the driving mechanism.
10. A free electron laser device comprising a device body for emitting a light beam toward a reflecting surface, the light beam forming a spot on the reflecting surface, and the cooling fin moving with the spot by the driving of the driving mechanism, and the mirror surface shape control module according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210605546.4A CN115019995A (en) | 2022-05-30 | 2022-05-30 | Reflector surface shape control module, synchrotron radiation device and free electron laser device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210605546.4A CN115019995A (en) | 2022-05-30 | 2022-05-30 | Reflector surface shape control module, synchrotron radiation device and free electron laser device |
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| CN202210605546.4A Pending CN115019995A (en) | 2022-05-30 | 2022-05-30 | Reflector surface shape control module, synchrotron radiation device and free electron laser device |
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|---|---|---|---|---|
| JP2004039851A (en) * | 2002-07-03 | 2004-02-05 | Nikon Corp | Mirror cooling device and aligner |
| JP2004309688A (en) * | 2003-04-04 | 2004-11-04 | Nikon Corp | Optical element holding/cooling unit and exposing device |
| CN211694799U (en) * | 2020-02-24 | 2020-10-16 | 中国科学院高能物理研究所 | Vertical reflection white light mirror cooling structure for synchrotron radiation beam line |
| CN113917650A (en) * | 2021-10-19 | 2022-01-11 | 中国科学院高能物理研究所 | Cooling structure and method for improving thermal deformation and vibration stability of reflector |
| CN113936840A (en) * | 2021-10-22 | 2022-01-14 | 中国科学院上海高等研究院 | Temperature control X-ray deformable mirror |
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- 2022-05-30 CN CN202210605546.4A patent/CN115019995A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004039851A (en) * | 2002-07-03 | 2004-02-05 | Nikon Corp | Mirror cooling device and aligner |
| JP2004309688A (en) * | 2003-04-04 | 2004-11-04 | Nikon Corp | Optical element holding/cooling unit and exposing device |
| CN211694799U (en) * | 2020-02-24 | 2020-10-16 | 中国科学院高能物理研究所 | Vertical reflection white light mirror cooling structure for synchrotron radiation beam line |
| CN113917650A (en) * | 2021-10-19 | 2022-01-11 | 中国科学院高能物理研究所 | Cooling structure and method for improving thermal deformation and vibration stability of reflector |
| CN113936840A (en) * | 2021-10-22 | 2022-01-14 | 中国科学院上海高等研究院 | Temperature control X-ray deformable mirror |
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