CN114300601B - Preparation method of quantum dot color conversion layer based on microfluidic technology - Google Patents
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Abstract
A preparation method of a quantum dot color conversion layer based on a microfluidic technology relates to the technical field of display, solves the problems of quantum dot waste and low photoluminescence efficiency in the existing quantum dot and photoresist bonding technology and the problem that the size and shape of the quantum dot are difficult to control in the inkjet printing technology, and comprises the following steps: bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet; the micro-channel substrate is arranged below the upper pixel array substrate, and the oily quantum dot solutions of primary colors I and II are injected into the bonding sheet and are filled with the liquid quantum dot solutions; injecting deionized water solution into the bonding sheet from the micro-channel substrate through the liquid inlet so that oily quantum dot solution in the quantum dot micro-channel is flushed away by the deionized water solution; injecting gas into the bonding sheet from the micro-channel substrate, discharging deionized water solution from the bonding sheet, and performing ultraviolet curing. The invention can effectively reduce the waste of the quantum dots, the prepared quantum dot pixel has small size and high precision, the optical crosstalk effect is effectively reduced, and the degradation of the quantum dots is slowed down.
Description
Technical Field
The invention relates to the technical field of MicroLED display, in particular to a preparation method of a quantum dot color conversion layer based on a microfluidic technology.
Background
Micro LEDs are receiving a lot of attention because of their high brightness, high luminous efficiency, long lifetime, wide color gamut, etc. Micro LED displays have greater potential due to their self-luminescence, good outdoor visibility, extremely strong environmental tolerance, compact optical structure, compared to Liquid Crystal Displays (LCDs) and Organic Light Emitting Diode (OLED) displays.
Due to incompatibility of the material systems, it is difficult to achieve monolithic integration of RGB Micro LED substrates on a single wafer by efficient epitaxial techniques. Therefore, blue light or Ultraviolet (UV) Micro LEDs are used as an excitation light source and are combined with a quantum dot color conversion layer to realize full-color display, so that the method is a very simple and effective method. At present, two main schemes for realizing the pixel array of the quantum dot color conversion layer are provided: one is to spray quantum dots onto an LED or transparent substrate by inkjet printing techniques; the other is to mix the quantum dots and the photoresist in a certain proportion and adopt various photoetching methods to carry out pixel patterning. However, the ink jet printing method depends on the nozzle precision, is more suitable for quantum dot pixels with the size larger than 30 micrometers, and if the size is smaller, the size and the shape of the quantum dots are difficult to control. The photoetching technology can well control the uniformity of the quantum dot pixels, but the quantum dot pixels are required to be mixed with a photoresist and other composite materials for photoetching and developing, so that the waste of the quantum dots is caused, the doped photoresist easily degrades the performance of the quantum dots, and the photoluminescence efficiency is reduced.
Disclosure of Invention
In view of the above, the invention provides a preparation method of a quantum dot color conversion layer based on a microfluidic technology.
The technical scheme adopted by the invention for solving the technical problems is as follows:
A preparation method of a quantum dot color conversion layer based on a microfluidic technology comprises the following steps:
Firstly, taking a micro-channel substrate and a pixel array substrate, wherein the micro-channel substrate is made of a hydrophilic and oleophobic material, the pixel array substrate is made of an oleophilic and hydrophobic material, and the micro-channel substrate and the pixel array substrate are made of transparent materials; the micro-channel substrate comprises a primary color one-quantum dot micro-channel, a primary color two-quantum dot micro-channel and a primary color three-transmission area, wherein the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are grooves arranged on the micro-channel substrate, liquid inlets and liquid outlets of the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are arranged on the micro-channel substrate, and the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are not intersected with each other; the pixel array substrate comprises at least two pixel points, each pixel point comprises a primary color first quantum point, a primary color second quantum point and a primary color third-pixel null point, and the primary color first quantum point and the primary color second quantum point are grooves arranged on the pixel array substrate;
Aligning and bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet, wherein the primary color first quantum dot is aligned with the primary color first quantum dot micro-channel, the primary color second quantum dot is aligned with the primary color second quantum dot micro-channel, and the primary color three-transmission area is aligned with the primary color three-pixel empty dot;
Step three, injecting the oily quantum dot solution of the primary color I and the oily quantum dot solution of the primary color II into the bonding sheet from the micro-channel substrate under the upper pixel array substrate so that the oily quantum dot solution of the primary color I fills the micro-channel of the primary color I quantum dot and the primary color I quantum dot, and the oily quantum dot solution of the primary color II fills the micro-channel of the primary color II quantum dot and the primary color II quantum dot;
injecting deionized water solution into the bonding sheet from the micro-channel substrate through the liquid inlet, so that the oil quantum dot solution of primary color I in the micro-channel of primary color one quantum dot and the oil quantum dot solution of primary color II in the micro-channel of primary color two quantum dot are flushed away by the deionized water solution;
And fifthly, injecting gas into the bonding sheet from the micro-channel substrate, discharging deionized water solution from the bonding sheet, and performing ultraviolet light curing on the oily quantum dot solution of primary color I in the primary color first quantum dot and the oily quantum dot solution of primary color II in the primary color second quantum dot to complete preparation of the quantum dot color conversion layer.
The quantum dot color conversion layer prepared by the preparation method of the quantum dot color conversion layer based on the microfluidic technology is adopted.
The beneficial effects of the invention are as follows:
1. according to the preparation method of the quantum dot color conversion layer based on the microfluidic technology, disclosed by the invention, the consumed quantum dot materials are few, so that the material waste can be effectively reduced, and the cost is saved;
2. The quantum dot pixel prepared by the preparation method has small size and high preparation precision;
3. Each pixel of the quantum dot color conversion layer prepared by the method is separated, so that the optical crosstalk effect can be effectively reduced;
4. The quantum dots are not doped with photoresist, so that the degradation of the quantum dots can be effectively slowed down, and the photoluminescence efficiency of the quantum dot material can not be reduced;
5. the micro-flow channel combined with the pixel array structure is relatively closed, so that the influence of the external environment on the quantum dot material can be reduced, and the large-area packaging is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a glass micro-fluidic channel substrate with a quantum dot color conversion layer according to the present invention.
Fig. 2 is a schematic diagram of a micro flow channel on a glass substrate of a quantum dot color conversion layer according to the present invention.
Fig. 3 is a schematic diagram of a PDMS substrate structure of a quantum dot color conversion layer according to the present invention.
Fig. 4 is a schematic diagram of a pixel array pattern of a pixel array substrate with a quantum dot color conversion layer according to the present invention.
Fig. 5 is a flow chart of a method for preparing a quantum dot color conversion layer based on a microfluidic technology.
Fig. 6 is a dynamic diagram of bonding and solution injection of a preparation method of a quantum dot color conversion layer based on a microfluidic technology.
FIG. 7 is a schematic diagram of the integration of a quantum dot color conversion layer of the present invention with a blue light Micro-LED backlight array.
Fig. 8 is a schematic diagram of the dynamic preparation of a PDMS pixel array substrate according to the preparation method of a quantum dot color conversion layer based on the microfluidic technology of the present invention.
Fig. 9 is a schematic diagram of the dynamic preparation of a glass micro-channel substrate by a preparation method of a quantum dot color conversion layer based on a micro-fluidic technology.
In the figure: 1. the glass substrate, 11, red light Micro-channel quantum dots, 12, green light Micro-channel quantum dots, 13, a channel transmission area, 14, a first liquid inlet, 15, a first liquid outlet, 16, a second liquid inlet, 17, a second liquid outlet, 18, a first auxiliary Micro-channel, 19, a second auxiliary Micro-channel, 2, a PDMS substrate, 21, red light sub-pixel quantum dots, 22, green light sub-pixel quantum dots, 23, a sub-pixel transmission area, 3, a quantum dot color conversion layer structure, 31, a red oil quantum dot solution, 32, a green oil quantum dot solution, 33, a deionized water solution, 34, a gas, 4, a blue light Micro-LED array backlight layer, 41, a blue light Micro-LED array substrate, 42, a blue light Micro-LED array, 43, a black isolation gate, 5, a photoresist one, 6, a silicon wafer, 7 and a photoresist two.
Detailed Description
The invention will be described in further detail with reference to the drawings and examples.
The invention relates to a preparation method of a quantum dot color conversion layer based on a microfluidic technology, which is used for preparing the quantum dot color conversion layer. Materials used for the microchannel substrate include, but are not limited to, glass, quartz, and the like. Materials used for the pixel array substrate include, but are not limited to, PDMS, PMMA, PI (polyimide), PVA, etc. The micro-channel substrate is bonded with the pixel array substrate.
The micro-channel substrate comprises two quantum dot micro-channels, the two micro-channels are not intersected with each other, the two micro-channels are grooves formed in the micro-channel substrate, one quantum dot micro-channel is used for circulation of the red oily quantum dot solution 31 and is called as a red quantum dot micro-channel, and the other quantum dot micro-channel is used for circulation of the green oily quantum dot solution 32 and is called as a green quantum dot micro-channel. Each quantum dot micro-channel is: one port is a liquid inlet for injecting the solution, and the other port is a liquid outlet for allowing the solution to flow out. And a vacancy is reserved on the Micro-channel substrate and used for blue light Micro-LED backlight transmission.
The pixel array substrate at least comprises one pixel point, and each pixel point comprises two sub-pixel points according to the principle of three primary colors, wherein one sub-pixel point is a red light quantum point, and the other sub-pixel point is a green light quantum point. The red quantum dots and the green quantum dots are of groove structures, the red quantum dots and the red quantum dots are aligned, bonded and communicated with each other, and the green quantum dots are aligned, bonded and communicated with each other. The red light quantum dots are cured in the red light quantum dots to form the red light quantum dots, and the red light quantum dots can emit red light when the blue light is irradiated; and curing the green light quantum dots to form green light quantum dots, wherein the green light quantum dots emit green light under the irradiation of blue light. When the number of the pixel points is more than or equal to 2, the sub-pixel points with the same color are communicated through a micro-channel structure communicated with the sub-pixel points. In one pixel, except for red light quantum dots and green light quantum dots, a sub-pixel empty dot is reserved for each pixel on the pixel array substrate, namely a vacancy, namely a blank sub-pixel, is a blue light quantum dot, is aligned and bonded with the vacancy of the Micro-channel substrate, is used for blue light Micro-LEDs to be transmitted as backlight, allows the blue light Micro-LEDs to be directly transmitted as backlight, and blue light can be directly transmitted through the sub-pixel empty dots reserved in the pixel.
The adjacent red light quantum dots are not connected with each other, and the adjacent green light quantum dots are not connected with each other, namely, the red light quantum dots in the adjacent red light quantum dots are not connected with each other, and the red light quantum dots in the adjacent green light quantum dots are not connected with each other.
The structure of the quantum dot color conversion layer prepared by the invention is described in detail below.
Fig. 1 shows a schematic structural view of a glass microchannel substrate according to an example of the invention. As shown in fig. 1, in the structure of the glass micro-fluidic channel substrate according to the embodiment of the present invention, the glass micro-fluidic channel substrate includes: the glass substrate 1, the red light micro-channel quantum dots 11, the green light micro-channel quantum dots 12 and the channel transmission area 13. The channel transmission area 13 is reserved with a vacancy on the micro-channel substrate for directly transmitting the blue light without changing the color of the blue light.
Fig. 2 shows a schematic diagram of a micro-channel on a glass substrate 1, where the micro-channel includes a red light micro-channel quantum dot 11, a green light micro-channel quantum dot 12, a first liquid inlet 14, a first liquid outlet 15, a second liquid inlet 16, a second liquid outlet 17, a first auxiliary micro-channel 18, and a second auxiliary micro-channel 19. The red light micro-channel quantum dot 11, the green light micro-channel quantum dot 12, the first auxiliary micro-channel 18 and the second auxiliary micro-channel 19 are grooves formed in the glass substrate 1. The first liquid inlet 14, the first liquid outlet 15, the second liquid inlet 16 and the second liquid outlet 17 are arranged on the glass substrate 1. The red light micro-channel quantum dots 11 are communicated through a first auxiliary micro-channel 18, the red light micro-channel quantum dots 11 and the first auxiliary micro-channel 18 form a red light quantum dot micro-channel, the red light quantum dot micro-channel is used for circulation of red oil quantum dot solution 31, the first liquid inlet 14 is used as a liquid inlet of the red light quantum dot micro-channel, the first liquid outlet 15 is used as a liquid outlet of the red light quantum dot micro-channel, the positions of the first liquid inlet 14 and the first liquid outlet 15 can be mutually exchanged, and the first auxiliary micro-channel 18 is communicated. The green light micro-channel quantum dots 12 are communicated through a second auxiliary micro-channel 19, the green light micro-channel quantum dots 12 and the second auxiliary micro-channel 19 form a green light quantum dot micro-channel, the green light quantum dot micro-channel is used for circulating green oil quantum dot solution 32, the second liquid inlet 16 is used as a liquid inlet of the green light quantum dot micro-channel, the second liquid outlet 17 is used as a liquid outlet of the green light quantum dot micro-channel, the positions of the second liquid inlet 16 and the second liquid outlet 17 can be mutually exchanged, and the second auxiliary micro-channel 19 is communicated. The first liquid inlet 14 and the first liquid outlet 15 are communicated with the red light quantum dot micro-channel, the second liquid inlet 16 and the second liquid outlet 17 are communicated with the green light quantum dot micro-channel, the glass substrate 1 is provided with a liquid inlet hole and a liquid outlet hole, the liquid inlet hole is communicated with the liquid inlet hole, the liquid inlet hole is connected with the quantum dot micro-channel corresponding to the liquid inlet hole, the liquid outlet hole is communicated with the liquid outlet hole, and the liquid outlet hole is connected with the quantum dot micro-channel corresponding to the liquid outlet hole. The glass substrate 1 is reserved with a runner transmission area 13, namely the runner transmission area 13 is only a reserved vacancy, and is still glass, and the runner transmission area 13 is used for blue light Micro-LED backlight transmission.
Fig. 3 shows a schematic structural diagram of a PDMS substrate 2 according to an embodiment of the present invention. PDMS is selected as a material of the pixel array substrate, and the pixel array substrate comprises: PDMS substrate 2, red subpixel quantum dot 21, green subpixel quantum dot 22, subpixel transmissive region 23. According to the principle of three primary colors, the red sub-pixel quantum dot 21, the green sub-pixel quantum dot 22 and the sub-pixel empty dot 23 form a complete pixel, the red sub-pixel quantum dot 21 and the green sub-pixel quantum dot 22 are of groove structures, and sub-pixel quantum dots with the same conversion color in each row of pixels are aligned, bonded and communicated with micro-channel quantum dots with the corresponding colors of the glass substrate 1 respectively. The red sub-pixel quantum dots 21 are internally solidified to form red quantum dots, and can emit red light when being irradiated by blue light; similarly, the green light sub-pixel quantum dots 22 are cured to form green light quantum dots, and green light is emitted under the irradiation of blue light; blue light may be directly transmitted through the subpixel transmissive region 23. One red sub-pixel quantum dot 21, one green sub-pixel quantum dot 22 and one sub-pixel null dot 23 constitute one pixel. When at least two pixel points exist on the PDMS substrate 2, the sub-pixel quantum dots with the same color in each pixel point are communicated through the quantum dot micro-channel communicated with the sub-pixel quantum dots.
Fig. 4 shows a schematic diagram of a pixel array pattern on a PDMS substrate 2 according to the present invention, comprising two RGB pixel arrangements, a first RGB pixel 24 and a second RGB pixel 25, respectively. After bonding the pixel array substrate and the glass micro-channel substrate, aligning and bonding the red micro-channel quantum dots 11 and the red sub-pixel quantum dots 21, aligning and bonding the green micro-channel quantum dots 12 and the green sub-pixel quantum dots 22, and aligning and bonding the channel transmission region 13 and the sub-pixel transmission region 23. All red light sub-pixel quantum dots 21 on the pixel array substrate are mutually connected and communicated through red light quantum dot micro-channels, and all green light sub-pixel quantum dots 22 on the pixel array substrate are mutually connected and communicated through green light quantum dot micro-channels.
The three primary colors are primary color one, primary color two and primary color three, the three primary colors are red, green and blue, the primary color one, the primary color two and the primary color three are different, the primary color one quantum dot potential of the quantum dot color conversion layer can emit light with the primary color one under the primary color three irradiation, and the primary color two quantum dot potential of the quantum dot color conversion layer can emit light with the primary color two under the primary color three irradiation. The primary color I, the primary color II and the primary color III can be respectively in one-to-one correspondence with red, green and blue, so that the primary color I micro-channel quantum dot is a red light micro-channel quantum dot 11, the primary color II micro-channel quantum dot is a green light micro-channel quantum dot 12, the primary color III transmission area is the vacancy, namely a channel transmission area 13, for transmitting blue light, the primary color I quantum dot micro-channel is a red light quantum dot micro-channel, and the primary color II quantum dot micro-channel is a green light quantum dot micro-channel; the primary color one sub-pixel quantum dot is a red light sub-pixel quantum dot 21, the primary color two sub-pixel quantum dot is a green light sub-pixel quantum dot 22, and the primary color three sub-pixel null dot is a sub-pixel null dot 23, corresponding to the blue light sub-pixel null dot, for transmitting blue light.
The depth of the micro flow channel of the primary color one-quantum dot micro flow channel ranges from 2 microns to 100 microns, the depth of the micro flow channel of the primary color two-quantum dot micro flow channel ranges from 2 microns to 100 microns, the depth of the groove body of the primary color one-quantum dot is 5 microns to 500 microns, and the depth of the groove body of the primary color two-quantum dot is 5 microns to 500 microns.
Fig. 5 shows a flow chart of the preparation of a quantum dot color conversion layer according to an embodiment of the present invention. As shown in fig. 5, the preparation method of the quantum dot color conversion layer according to the embodiment of the invention includes the following steps:
S1, preparing a red light quantum dot micro-channel, a green light quantum dot micro-channel and a liquid inlet and a liquid outlet (a first liquid inlet 14, a first liquid outlet 15, a second liquid inlet 16 and a second liquid outlet 17) of the quantum dot micro-channel on a glass substrate 1 by utilizing a wet etching technology, then penetrating the glass substrate 1 at the liquid inlet and the liquid outlet by utilizing an ultrasonic drilling machine, and processing a liquid inlet through hole and a liquid outlet through hole for injecting a solution to prepare the glass micro-channel substrate. In particular, the wet etching solution is BOE solution, the width of the micro-channel is 50 micrometers, and the depth is 5 micrometers.
S2, preparing a photoresist substrate containing a raised pixel array pattern by utilizing a photoetching process according to the arrangement of the pixel points, and taking the photoresist substrate as a template for PDMS (polydimethylsiloxane) reverse mould. In particular, the photoresist pixel height may be determined by the spin-on photoresist spin speed, with the spin speed being faster the thinner the photoresist.
S3, pouring, bubble exhausting, curing and mould reversing are carried out on the PDMS on the photoresist substrate, and the PDMS groove pixel array substrate is prepared, so that the PDMS pixel array substrate is obtained. Preferably, the prepared photoresist pixel grooves are 150 microns long, 50 microns wide and 50 microns high.
S4, performing alignment bonding on the prepared glass micro-channel substrate and the PDMS pixel array substrate to form a quantum dot color conversion layer structure 3, namely a bonding sheet. In particular, the micro flow channel in the glass substrate 1 is aligned with, bonded to and penetrated by the corresponding sub-pixel point in the PDMS so as to inject the quantum dot solution of the same color. Namely, the red light micro-channel quantum dot 11 injected with the red quantum dot corresponds to the red light sub-pixel quantum dot 21, and the green light micro-channel quantum dot 12 injected with the green quantum dot corresponds to the green light sub-pixel quantum dot 22; while the voids are aligned with sub-pixel void sites 23.
S5, placing the glass micro-channel substrate of the bonding sheet on the upper side and the PDMS pixel array substrate on the lower side, injecting the red oil quantum dot solution 31 (the oil quantum dot solution of the primary color I) into the bonding sheet from the first liquid inlet 14, filling all primary color one quantum dot micro-channels and all primary color one quantum dots, and then flowing out from the first liquid outlet 15. The green oily quantum dot solution 32 (oily quantum dot solution of primary color II) is injected into the bonding sheet from the second liquid inlet 16, fills all primary color two-quantum dot micro-channels and all primary color two-quantum dots, and then flows out from the second liquid outlet 17. Particularly, the oily quantum dot solution of primary color I and the oily quantum dot solution of secondary color II are oily substances and can be solidified by ultraviolet irradiation.
S6, a glass micro-channel substrate of a bonding sheet is kept on the upper side, a PDMS pixel array substrate is placed under the upper side, deionized water solution 33 is injected into a red light quantum dot micro-channel and a green light quantum dot micro-channel through liquid inlets, and as the glass has poor affinity to an oily quantum dot solution and strong affinity to an aqueous solution, the oily quantum dot solution in the micro-channel can be washed away by the aqueous solution and cannot adhere to the wall of the channel to generate residues, on the contrary, the PDMS has stronger affinity to the oily solution than the aqueous solution, and due to the capillary effect and microgravity, the quantum dot solution in a groove pixel array cannot be removed or destroyed, the oily quantum dot solution of primary color I is still filled with the quantum dot of primary color I, and the oily quantum dot solution of primary color II is still filled with the quantum dot of primary color II. In particular, the deionized water is doped with 0.5% by mass of SDS (sodium dodecyl sulfate) surfactant for reducing the affinity with PDMS.
S7, keeping a glass micro-channel substrate of a bonding sheet on the top, placing a PDMS pixel array substrate under the PDMS pixel array substrate, slowly introducing gas 34 through two liquid inlets to enable deionized water solution 33 in a red light quantum dot micro-channel and a green light quantum dot micro-channel to be discharged, wherein at the moment, an oily quantum dot solution of a primary color I is still filled with the quantum dot of the primary color I, an oily quantum dot solution of the primary color II is still filled with the quantum dot of the primary color II, then blocking a liquid inlet hole, and carrying out ultraviolet curing on the quantum dot solution in the pixel array substrate to obtain the red light quantum dot and the green light quantum dot, so as to form a quantum dot color conversion layer; in particular, the gas 34 that is introduced into the bonding sheet includes, but is not limited to, air, nitrogen, argon, and the like. The primary color first quantum dots of the quantum dot color conversion layer are not connected with each other, and the primary color second quantum dots are not connected with each other, namely, the primary color first quantum dots are not connected with each other, and the primary color second quantum dots are not connected with each other.
Fig. 6 shows quantum dot color conversion layer bonding and solution injection dynamic diagrams, corresponding to S4 to S6.
Fig. 7 shows a schematic diagram of quantum dot color conversion layer integration with a blue light Micro-LED backlight array. As shown in fig. 7, the blue Micro-LED array backlight layer 4 includes: the blue light Micro-LED array substrate 41, the blue light Micro-LED array 42 and the black isolation grid 43, wherein the blue light Micro-LED array 42 comprises a plurality of blue light Micro-LED core particles, and the black isolation grid 43 is positioned between the adjacent blue light Micro-LEDs. The black isolation grating is mainly used for reducing the optical crosstalk effect of the blue light LED, including but not limited to black photoresist, black printing material, chrome plating and the like. The MicroLED display device comprises a blue light Micro-LED array backlight layer 4 and a quantum dot color conversion layer, wherein a Micro-channel substrate of the blue light Micro-LED array backlight layer 4, a Micro-channel substrate of the quantum dot color conversion layer and a pixel array substrate of the quantum dot color conversion layer are sequentially arranged from top to bottom, the luminous points of the blue light Micro-LED array backlight layer 4 are opposite to the red light quantum dots 21, the green light quantum dots 22 and the sub-pixel empty dots 23, and the blue light Micro-LED array 42 is aligned with the sub-pixel dots on the PDMS pixel array substrate one by one.
Fig. 8 shows a dynamic diagram of the preparation of the PDMS pixel array substrate according to the present invention. As shown in fig. 8, a layer of photoresist (photoresist one 5) is first spin-coated on a silicon wafer 6, and then exposed and developed by using a mask pattern to prepare a photoresist convex array pattern, wherein the photoresist convex array pattern corresponds to primary color one quantum dot and primary color two quantum dot; then, applying PDMS colloid (colloid of a pixel array substrate preparation material) on the prepared photoresist bulge array pattern, discharging bubbles and heating to cure the PDMS; and finally, the PDMS is subjected to reverse molding to form a pixel array, wherein the reverse molding groove is a primary color one quantum dot and a primary color two quantum dot, and the pixel array substrate is obtained. In particular, the thickness of the photoresist is affected by the spin-on spin speed, which is the faster the photoresist is thinner. In particular, the thickness of the photoresist affects the depth of the pixel array grooves formed, the thicker the photoresist, the greater the groove depth. Preferably, the reverse grooves have a depth of 50 microns, a width of 50 microns and a length of 150 microns. In particular, the photoresist may be a negative photoresist or a positive photoresist, including but not limited to SU8 photoresist, 7133 photoresist, PI photoresist, and the like.
Fig. 9 shows a dynamic view of the preparation of a glass microchannel substrate of the invention. As shown in fig. 9, a photoresist layer (photoresist two 7) is first spin-coated on a glass substrate 1 (material substrate), then exposed and developed through a mask plate to prepare a photoresist groove micro-channel pattern, then wet etching is performed by using a BOE solution, micro-channel structures (primary color one-quantum dot micro-channel and primary color two-quantum dot micro-channel) are etched on the glass surface of the glass substrate 1 which is not protected by the photoresist two 7, and then the photoresist two 7 on the surface of the glass substrate 1 is removed. Finally, the glass substrate 1 is penetrated at the liquid inlet and the liquid outlet by an ultrasonic drilling machine, a liquid inlet and a liquid outlet for injecting solution are respectively processed, the liquid inlet is communicated with the liquid inlet corresponding to the liquid inlet, and the liquid outlet is communicated with the liquid outlet corresponding to the liquid outlet. One end of the liquid inlet of the primary color one-quantum dot micro-channel is communicated with the other end of the primary color one-quantum dot micro-channel to serve as a liquid outlet of the micro-channel, and one end of the liquid outlet of the primary color two-quantum dot micro-channel is communicated with the other end of the primary color two-quantum dot micro-channel to serve as a liquid outlet of the micro-channel. Preferably, the etch depth is about 5 microns and the width is 50 microns. In particular, drilling means include, but are not limited to, femtosecond laser etching, dry etching, gas etching, and the like.
The invention provides a method for preparing a quantum dot color conversion layer by utilizing a microfluidic technology, which consumes less quantum dot materials, can effectively reduce material waste and saves cost; the quantum dot prepared by the method has small pixel size and high preparation precision; because each pixel is separated, the optical crosstalk effect can be effectively reduced; the quantum dots are not doped with photoresist, so that the degradation of the quantum dots can be effectively slowed down, and the photoluminescence efficiency of the quantum dot material can not be reduced; the micro-flow channel combined with the pixel array structure is relatively closed, so that the influence of the external environment on the quantum dot material can be reduced, and the large-area packaging is avoided.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (10)
1. The preparation method of the quantum dot color conversion layer based on the microfluidic technology is characterized by comprising the following steps of:
Firstly, taking a micro-channel substrate and a pixel array substrate, wherein the micro-channel substrate is made of a hydrophilic and oleophobic material, the pixel array substrate is made of an oleophilic and hydrophobic material, and the micro-channel substrate and the pixel array substrate are made of transparent materials; the micro-channel substrate comprises a primary color one-quantum dot micro-channel, a primary color two-quantum dot micro-channel and a primary color three-transmission area, wherein the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are grooves arranged on the micro-channel substrate, liquid inlets and liquid outlets of the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are arranged on the micro-channel substrate, and the primary color one-quantum dot micro-channel and the primary color two-quantum dot micro-channel are not intersected with each other; the pixel array substrate comprises at least two pixel points, each pixel point comprises a primary color first quantum point, a primary color second quantum point and a primary color third-pixel null point, and the primary color first quantum point and the primary color second quantum point are grooves arranged on the pixel array substrate;
Aligning and bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet, wherein the primary color first quantum dot is aligned with the primary color first quantum dot micro-channel, the primary color second quantum dot is aligned with the primary color second quantum dot micro-channel, and the primary color three-transmission area is aligned with the primary color three-pixel empty dot;
Step three, injecting the oily quantum dot solution of the primary color I and the oily quantum dot solution of the primary color II into the bonding sheet from the micro-channel substrate under the upper pixel array substrate so that the oily quantum dot solution of the primary color I fills the micro-channel of the primary color I quantum dot and the primary color I quantum dot, and the oily quantum dot solution of the primary color II fills the micro-channel of the primary color II quantum dot and the primary color II quantum dot;
injecting deionized water solution into the bonding sheet from the micro-channel substrate through the liquid inlet, so that the oil quantum dot solution of primary color I in the micro-channel of primary color one quantum dot and the oil quantum dot solution of primary color II in the micro-channel of primary color two quantum dot are flushed away by the deionized water solution;
And fifthly, injecting gas into the bonding sheet from the micro-channel substrate, discharging deionized water solution from the bonding sheet, and performing ultraviolet light curing on the oily quantum dot solution of primary color I in the primary color first quantum dot and the oily quantum dot solution of primary color II in the primary color second quantum dot to complete preparation of the quantum dot color conversion layer.
2. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the depth ranges of the micro-channel of the primary color first quantum dot micro-channel and the micro-channel of the primary color second quantum dot micro-channel are 2-100 micrometers, and the depth ranges of the primary color first quantum dot and the primary color second quantum dot are 5-500 micrometers.
3. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein primary color first quantum dots of the bonding sheet are communicated through primary color first quantum dot micro-channels, and primary color second quantum dots of the bonding sheet are communicated through primary color second quantum dot micro-channels.
4. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the micro-channel substrate comprises a primary color first micro-channel quantum dot, a primary color second micro-channel quantum dot, a first auxiliary micro-channel and a second auxiliary micro-channel, the primary color first micro-channel quantum dot corresponds to the primary color first quantum dot, the primary color second micro-channel quantum dot corresponds to the primary color second quantum dot, the primary color first micro-channel quantum dot is connected with the first auxiliary micro-channel to form a primary color first quantum dot micro-channel, the primary color second micro-channel quantum dot is connected with the second auxiliary micro-channel to form a primary color second quantum dot micro-channel, both a liquid inlet and a liquid outlet of the primary color first quantum dot micro-channel are communicated with the first auxiliary micro-channel, and both a liquid inlet and a liquid outlet of the primary color second quantum dot micro-channel are communicated with the second auxiliary micro-channel.
5. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the oily quantum dot solution, the deionized water solution and the air of the primary color I in the quantum dot micro-channel of the primary color I enter from the liquid inlet of the quantum dot micro-channel of the primary color I and are discharged from the liquid outlet of the quantum dot micro-channel of the primary color I, and the oily quantum dot solution, the deionized water solution and the air of the primary color II in the quantum dot micro-channel of the primary color II enter from the liquid inlet of the quantum dot micro-channel of the primary color II and are discharged from the liquid outlet of the quantum dot micro-channel of the primary color II.
6. The method for preparing the quantum dot color conversion layer based on the micro-fluidic technology as claimed in claim 1, wherein the preparation process of the pixel array substrate is as follows: and spin-coating a layer of photoresist on the silicon wafer, exposing and developing by using a mask pattern to prepare a photoresist convex array pattern, wherein the photoresist convex array pattern corresponds to primary color first quantum dots and primary color second quantum dots, coating colloid of a pixel array substrate preparation material on the prepared photoresist convex array pattern, discharging bubbles, heating and baking to enable the colloid of the pixel array substrate preparation material to be solidified, and reversing the mold to obtain the pixel array substrate.
7. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the preparation process of the micro-channel substrate is as follows: spin coating a layer of photoresist on a material substrate, exposing and developing through a mask plate to prepare a photoresist groove micro-channel pattern, then carrying out wet etching by using a BOE solution, etching a primary color first quantum dot micro-channel and a primary color second quantum dot micro-channel on the surface of glass of the material substrate which is not protected by the photoresist, and removing the photoresist on the surface of the material substrate; finally, preparing respective liquid inlets and liquid outlets of the primary color first quantum dot micro-channel and the primary color second quantum dot micro-channel in a manner of penetrating the material substrate.
8. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the material adopted by the micro-channel substrate is glass or quartz, and the material adopted by the pixel array substrate is PDMS, PMMA, PI or PVA.
9. The method for preparing a quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the primary color one quantum dot potential of the quantum dot color conversion layer in the fifth step emits light with a primary color one under the primary color three irradiation, and the primary color two quantum dot potential of the quantum dot color conversion layer in the fifth step emits light with a primary color two under the primary color three irradiation.
10. A quantum dot color conversion layer prepared by a microfluidic technology-based quantum dot color conversion layer preparation method according to any one of claims 1 to 9.
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