CN113945738A

CN113945738A - Interface device, circuit board unit, semiconductor test method and apparatus

Info

Publication number: CN113945738A
Application number: CN202111309397.9A
Authority: CN
Inventors: 张文; 居宁; 庄书勤
Original assignee: Beijing Huafeng Test & Control Technology Co ltd
Current assignee: Beijing Huafeng Test & Control Technology Co ltd
Priority date: 2021-11-06
Filing date: 2021-11-06
Publication date: 2022-01-18

Abstract

The invention relates to an interface device for semiconductor testing, a circuit board unit, a semiconductor testing method and equipment, wherein the interface device comprises a base body, a connector and a limiting piece, the connector is elastically assembled on the base body and is configured to generate an elastic trend of being far away from the base body due to stress, a through limiting port is formed in the connector, the limiting piece is provided with a connecting part and a limiting part, the connecting part is connected with the base body, the limiting part is in limiting insertion fit with the limiting port, the limiting port is configured to limit the farthest movement range of the connector, which can move relative to the base body, through the limiting fit with the limiting part, and the connector can incline in any direction relative to the limiting piece. The interface device can realize flexible matching in the alignment connection process, is automatically and accurately aligned, is convenient and reliable, can reduce the processing precision of a structural member and the assembly requirement of a testing machine, has the characteristic of self-alignment, and meets the requirement of effective connection with external equipment.

Description

Interface device, circuit board unit, semiconductor test method and apparatus

Technical Field

The present invention relates to the field of semiconductor device technology, and in particular, to an interface device for semiconductor testing, a circuit board unit, a semiconductor testing method and a semiconductor testing device.

Background

The semiconductor tester is usually provided with a plurality of groups of circuit board units and an interface test board, the interface test board is arranged on the semiconductor tester and is aligned with a plurality of groups of relatively independent circuit board units in the semiconductor tester, and when the plurality of groups of circuit board units and the interface test board realize the transmission of electric signals through a connector, the test of a device to be tested on the interface test board can be realized.

In the prior art, the interface test board and the multiple groups of circuit board units are usually aligned in a mechanical hard connection mode, and the requirements on manufacturing tolerance of structural components, guiding precision in a semiconductor tester and assembly are high. With the increase of the number of circuit board units and the improvement of the signal density of the connector, alignment deviation is easily caused, the connection is unreliable, and the existing development requirements cannot be met.

Disclosure of Invention

In view of the above, it is necessary to provide an interface device, a circuit board unit, a semiconductor testing method and an apparatus for semiconductor testing, which are directed to the problem of misalignment between an interface test board and a plurality of sets of circuit board units.

The invention provides an interface device for semiconductor test, comprising:

a base body;

the connector is elastically assembled on the seat body and configured to generate an elastic trend of being far away from the seat body due to stress, and a through limiting opening is formed in the connector;

the limiting part is provided with a connecting part and a limiting part, the connecting part is connected with the base body, the limiting part is in limiting insertion fit with the limiting port, the limiting port is configured to limit the farthest movement range of the connector, which can move relative to the base body, through the limiting insertion fit with the limiting part, and the connector can incline relative to the limiting part.

In one embodiment, the connector comprises:

the connector circuit board is provided with a first opening;

a high-density connector mounted on the connector circuit board in a stacked manner;

wherein the high-density connector avoids the first opening, and the first opening alone forms the limiting opening; or the high-density connector is provided with a second opening, at least partial areas of the first opening and the second opening are overlapped, and the first opening and the second opening jointly form the limiting opening.

In one embodiment, the cross-sectional area of the position-limiting part is larger than the opening area of the first opening and smaller than the opening area of the second opening, and the position-limiting part is configured to be in position-limiting fit with the first opening and is not limited by the second opening.

In one embodiment, the interface device further includes:

a positioning member disposed on the connector, the positioning member configured for positioning engagement with an external device having an interface end.

In one embodiment, a movable gap is formed between the limiting piece and the inner wall of the limiting opening.

In one embodiment, the limiting opening is a through hole formed in the connector, or the limiting opening is a notch formed in the edge of the connector.

In one embodiment, the connecting portion has an adjusting structure, the connecting portion is movably connected to the base body through the adjusting structure, and the adjusting structure is configured to adjust the farthest moving range limited by the limiting member.

In one embodiment, the base has a front end, a rear end and a connecting channel passing through the front end and the rear end, the connector is elastically connected with the front end of the base, the connector is electrically connected with a conductive component, the conductive component extends out of the connecting channel, and the conductive component is configured to be electrically connected with a circuit board.

In one embodiment, the conductive part is a conductive cable electrically connected to the connector through a cable connector, or the conductive part is a flexible printed board electrically connected to the connector.

In one embodiment, the connector is elastically assembled with the seat body by a plurality of elastic pieces around;

and/or at least two positioning pieces are arranged at the edge position of the connector;

and/or at least two limiting ports are formed in the edge position of the connector.

The present invention provides a circuit board unit including:

the socket body is configured to be used for directly mounting a circuit board or indirectly mounting the circuit board through a circuit board fixing frame, and the connector is electrically connected with the circuit board.

The invention provides a semiconductor test method, which comprises the following steps according to a circuit board unit:

installing at least one circuit board in the circuit board fixing frame, wherein each circuit board is electrically connected with at least one interface device, or installing the circuit board on the seat body, and the circuit board is electrically connected with at least one interface device;

and simultaneously electrically connecting a plurality of interface devices with a plurality of interface ends of the external equipment.

The invention provides a semiconductor test device which comprises the circuit board unit.

Above-mentioned interface arrangement, utilize the elasticity assembly mode to assemble the connector on the pedestal, and the cooperation through locating part and spacing mouth carries out effectual injecing to the elasticity assembly of connector, can realize the connector and remove for the flexibility of pedestal, can form elasticity counterpoint matching according to external equipment's actual angle or position when counterpointing the connection, this can realize nimble matching at counterpoint connection in-process, thereby automatic accurate counterpoint, it is more convenient and more reliable, and can reduce the machining precision of structure and the assembly requirement of test machine, have the characteristics from the centering, allow circuit board unit to realize blind plugging, satisfy circuit board unit and external equipment's effective connection.

Drawings

FIG. 1 is a perspective view of an interface device provided in accordance with one embodiment of the present invention;

FIG. 2 is a cross-sectional view of the interface device shown in FIG. 1;

FIG. 3 is a perspective view of a connector 1 provided in accordance with one embodiment of the present invention;

FIG. 4 is a perspective view of a connector provided in accordance with one embodiment of the present invention, FIG. 2;

fig. 5 is a perspective view of a position limiting member according to an embodiment of the present invention;

FIG. 6 is a diagram illustrating an operational state of an interface device according to an embodiment of the present invention;

FIG. 7 is a diagram illustrating an ideal state of the interface device shown in FIG. 1 according to an embodiment of the present invention;

FIG. 8 is a diagram of the operation of the interface device in an ideal state according to one embodiment of the present invention shown in FIG. 2;

FIG. 9 is a diagram illustrating an operation state of the interface device in an XY plane offset state according to an embodiment of the present invention shown in FIG. 1;

FIG. 10 is a diagram illustrating an operation state of the interface device in an XY plane offset state according to an embodiment of the present invention, shown in FIG. 2;

FIG. 11 is a diagram illustrating the operation of the interface device in a Z-axis offset state according to an embodiment of the present invention in FIG. 1;

FIG. 12 is a diagram illustrating the operation of the interface device in a Z-axis offset state according to an embodiment of the present invention shown in FIG. 2;

fig. 13 is a schematic structural diagram of an interface device having an avoidance recess and an avoidance curve according to an embodiment of the present invention.

Reference numerals:

001. a circuit board fixing frame; 002. an interface device; 003. an external device; 004. an interface end; 005. positioning holes;

100. a base body; 200. a connector; 300. a limiting member; 400. a positioning member; 500. a conductive member; 600. a cable connector; 700. an elastic member;

110. a connecting channel;

210. a limiting port; 220. a connector circuit board; 230. a high-density connector; 240. avoiding the recess;

211. a first opening; 212. a second opening;

310. a connecting portion; 320. a limiting part; 330. avoiding the arc surface.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1 to 6, an embodiment of the present invention provides an interface device 002 for semiconductor testing, where the interface device 002 includes a base 100, a connector 200, and a limiting member 300, the base 100 is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board through other additional structures, for example, a circuit board fixing frame 001 may be disposed on the base 100, and the circuit board fixing frame 001 is used as an additional structure for mounting a circuit board in a semiconductor testing apparatus, where the number of circuit boards is not limited to one or more, the connector 200 is elastically mounted on the base 100 and configured to be capable of generating an elastic tendency of moving away from the base 100 due to a force, the elastic mounting means indicates that the connector 200 is mounted on the base 100 in a manner having an elastic effect, and is capable of elastically moving away from the base 100 and elastically resetting relative to the base 100, even other forms of elastic effects, such as various elastic movements, such as deflection, may occur, the connector 200 is provided with a through-going limiting opening 210, the limiting member 300 has a connecting portion 310 and a limiting portion 320, the connecting portion 310 is connected with the housing 100, the limiting portion 320 is in limiting insertion fit with the limiting opening 210, the limiting opening 210 is configured to limit a farthest movement range in which the connector 200 can move relative to the housing 100 through the limiting insertion fit with the limiting portion 320, and the connector 200 can tilt in any direction relative to the limiting member 300.

The seat body 100 is used for providing an assembly foundation for the assembly of the connector 200, the seat body 100 can be assembled with the circuit board fixing frame 001, and after the circuit board is arranged on the circuit board fixing frame 001, a relative fixing structure between the seat body 100 and the circuit board fixing frame 001 can provide a stable structural foundation for the electrical connection between the connector 200 and the circuit board, so that the connector 200 can be electrically connected with the circuit board. The base 100 can be directly assembled with the circuit board besides being assembled with the circuit board fixing frame 001, so that the assembly is simpler. Of course, the seat body 100 can also be assembled with other structures to form various assembling forms not limited to the above two ways, and in these forms, the seat body 100 can satisfy the conditions for providing the assembling base.

The interface device 002 can be applied to a scene where one or more groups of circuit board units are connected with 004 external equipment 003 with an interface end in a contraposition mode, so that the two can be accurately contraposition and connected, the circuit board units can be of a structure comprising the interface device 002 and other corresponding matching devices or parts, the interface device 002 is applied to the circuit board units to realize a connection function, and the external equipment 005 with the interface end can be equipment such as an interface test board. Compared with the existing hard connection, in the interface device 002, the connector 200 is assembled on the seat 100 by using an elastic assembly manner, for example, an elastic member 700 such as a spring is used to realize elastic assembly, and the elastic assembly of the connector is effectively limited by the cooperation of the limiting member and the limiting opening, so that the connector 200 can flexibly move relative to the seat 100, for example, the connector can have a tendency of moving away from the seat 100, and can also tilt and swing relative to the seat 100 after being stressed, specifically, the connector can tilt in any direction relative to the seat 100 or the limiting member 300 (the seat 100 and the limiting member 300 are relatively fixed, and therefore, the connector can tilt in any direction relative to the seat 100 or the limiting member 300 without any difference), and elastic alignment matching can be formed according to the actual angle or position of the external device 003 during alignment connection, which can realize flexible matching in the alignment connection process, thereby realizing automatic accurate alignment, the test machine is more convenient and reliable, can reduce the machining precision of the structural part and the assembly requirement of the test machine, has the characteristic of self-centering, and meets the effective connection between the circuit board unit and the external equipment 003.

The matching of the limiting opening 210 and the limiting member 300 actually provides a movable range for the relative movement between the connector 200 and the housing 100, that is, the farthest movement range defined by the limiting matching of the limiting opening 210 and the limiting portion 320, and the limiting opening 210 and the limiting member 300 also realize the movable assembly between the connector 200 and the housing 100, so that the connector 200 and the housing 100 have not only an elastic assembly connection, but also a hard contact in a limiting manner. The connecting portion 310 has an adjusting structure, and the connecting portion 310 is movably connected to the seat 100 through the adjusting structure, and the adjusting structure is configured to adjust the farthest moving range limited by the limiting member 300.

It should be noted that the farthest moving range defines the extreme position of the connector 200 that can move relative to the housing 100, and the extreme position can be in all directions relative to the housing 100, for example, the farthest moving range limits not only the moving range of the connector 200 along the Z-axis direction when it is far away from the housing 100, but also the moving range of the connector 200 in the direction deviating from the Z-axis direction relative to the housing 100, that is, the farthest moving range includes the curved range that is not limited to the moving range in the Z-axis direction and the moving range deviating from the Z-axis direction.

The term "force generated by force" refers to force generated by force, and includes not only external force such as pushing force and pulling force, but also force generated by field such as applied magnetic field, or other types of force, and is not limited herein.

The limiting port 210 can be a through hole formed in the connector 200, the limiting port 210 is of a complete hole structure, or the limiting port 210 can also be a notch formed in the edge of the connector 200, the limiting port 210 is of an incomplete hole structure at the moment, the limiting matching between the limiting port 210 and the limiting portion 320 is not affected, the limiting port 210 is of a through opening structure, the initial position can be kept stable in the z-axis direction, the limiting member 300 can penetrate through the limiting port 210, the thickness of the connector 200 is allowed to be small, the possibility of arranging the high-density connector 230 is achieved, the structural design is ingenious, and the effects of reasonable wiring space and high-density connection are achieved. The position limiting element 300 may be provided with a specific structural form according to the structures of the connector 200 and the housing 100, and the position limiting element 300 may be rod-shaped or block-shaped, for example, the position limiting element 300 may adopt a structure similar to a screw, a nut of the screw is used as the position limiting portion 320, a thread portion of the screw is used as the connecting portion 310 to be in threaded connection with the housing 100, meanwhile, the thread portion may also form an adjusting structure for adjusting the farthest movement range, when the thread portion is screwed with the housing 100, the depth of connection between the screw and the housing 100 may be adjusted according to the screwed depth, and then the distance of the nut relative to the housing 100 is adjusted, that is, the farthest movement range is formed. The nut is used for limiting the initial position of the connector 200, the outer diameter of the nut is smaller than the size of the limiting opening 210, and this can satisfy that a movable gap is formed between the limiting member 300 and the inner wall of the limiting opening 210, so that the limiting member 300 is allowed to cooperate with the structure of elastic assembly, certain elastic deviation is satisfied in the XY plane, and elastic deviation is formed in the Z direction when the stress is unequal. The specific structural form of the limiting member 300 may be selected according to the specific choice of a person skilled in the art, and is not limited herein.

Based on the solution that the limiting member 300 adopts a screw, a method for adjusting the farthest movement range may also be formed, and the method specifically may be: applying an acting force to the limiting portion 320 of the limiting member 300, adjusting the connection between the limiting member 300 and the seat body 100 by an adjusting structure, so that the distance between the seat body 100 and the connector 200 and the length of the elastic member 700 disposed between the seat body 100 and the connector 200 are adjusted, and stopping applying the acting force until the obtained length of the elastic member 700 is a target length, wherein the target length is used for determining the farthest movement range. In addition, the limiting portion 320 of the limiting member 300 may be adjustable in length, and the length of the elastic member 700 may be adjusted by adjusting the length of the limiting portion 320. In the initial position of the unmated joint, the elastic member 700 may have a certain pre-tightening force, and be compressed by a small amount, so as to adjust the elastic supporting force range of the elastic member 700.

When the interface device 002 is in an unused state, that is, the interface device 002 is in a free state of not being butted with the external device 003, the connector 200 may have a + Z-direction movement tendency (i.e., a direction away from the housing 100) under the elastic action of the elastic assembly, at this time, based on the limit fit between the limit port 210 and the limit piece 300, the limit portion 320 of the limit piece 300 may limit the movement distance of the connector 200 in the + Z direction, that is, move to the maximum value of the farthest movement range, at this time, the connector 200 has a relatively stable initial position, which is convenient for initial coarse centering.

For example, with the positioning member 400 disposed on the connector 200, the positioning member 400 is configured for positioning engagement with an external device 003 having an interface end 004, and as the interface 002 is brought closer to the external device 003, the positioning member 400 is initially positioned with the external device 003 in advance, such that the interface 002 is roughly centered with respect to the external device 003. The positioning element 400 may be a positioning column, a positioning pin, or the like, which has a positioning function, and the external device 003 is correspondingly provided with a positioning hole 005 or a positioning groove. Besides, the positioning member 400 may be disposed on the external device 003, not on the connector 200, and as for the specific arrangement of the positioning member 400, a person skilled in the art can select it according to the requirement, which is not limited herein.

In semiconductor testing using the interface device 002, the connector 200 of the interface device 002 may be mated with the external device 003, and the specific mating position may be an interface end 004 on the external device 003, the interface end 004 may be one or more, and the interface device 002 may also have a corresponding mating number. Once the connector 200 is in contact with the external device 003, the connector 200 is in an elastic compression state, and at this time, the connector 200, together with the housing 100 and the like, is entirely separated from the limitation of the limiting member 300 under the compression action of the external device 003, and moves substantially along the-Z direction (i.e., the direction close to the housing 100), and in the process of continuously approaching the housing 100, floating connection can be realized according to the stress fit between the connector 200 and the external device 003, besides floating in the-Z direction, multi-degree-of-freedom floating in a three-dimensional space can be realized, accurate alignment relative to the external device 003 is realized, the angle of the external device 003 is not standard, and the floatable structure has the advantage of small occupied space, and accurate alignment can be formed for the high-density connector 230.

The connector 200 includes a connector circuit board 220, and a high-density connector 230, wherein the connector circuit board 220 has a first opening 211, and the high-density connector 230 is stacked on the connector circuit board 220. The high-density connector 230 avoids the first opening 211, the first opening 211 forms the stopper opening 210, or the high-density connector 230 forms a second opening 212, at least a part of the first opening 211 and the second opening 212 are overlapped, and the first opening 211 and the second opening 212 together form the stopper opening 210. The high-density connector 230 has a large number of embedded reeds or pogo pins to form a structure for butting with the interface end 004 of the external device 003, and the reeds or pogo pins have elasticity, so that when the high-density connector is matched with the elastic member 700, the elastic coefficient of the elastic member 700 needs to be limited to be lower than that of the reeds or pogo pins, and when the interface device 002 is butted with the external device 003, the elastic member 700 can drive the connector 200 to generate flexible displacement. The connector 200 may be other types of electrical connectors 200, optical communication connectors 200, fluid connectors 200, etc., and is not limited thereto.

In the above two schemes, when the first opening 211 alone forms the position-limiting opening 210, the area of the high-density connector 230 needs to be slightly smaller than the area of the connector circuit board 220, and it is at least ensured that the high-density connector 230 cannot block the first opening 211 (avoid the first opening 211), so that the position-limiting portion 320 of the position-limiting member 300 can smoothly shuttle to the first opening 211 without forming structural interference with the high-density connector 230.

When the first opening 211 and the second opening 212 together form the limiting opening 210, the area of the high-density connector 230 may be equal to the area of the connector circuit board 220, but when the high-density connector 230 and the connector 200 are stacked, attention needs to be paid to the mutual alignment of the first opening 211 and the second opening 212, usually the opening area of the second opening 212 is larger than the opening area of the first opening 211, and the cross-sectional area of the limiting portion 320 is ensured to be larger than the opening area of the first opening 211 and smaller than the opening area of the second opening 212, at this time, the limiting portion 320 is in limiting fit with the first opening 211 and is not limited by the second opening 212, for example, the cross-sectional shapes of the first opening 211 and the second opening 212 are similar to a T shape, and when the limiting portion 320 forms a limiting abutment with the first opening 211, the second opening 212 may allow the limiting portion 320 to move flexibly therein, this will allow the retainer 300 to allow the connector 200 to meet a certain elastic deflection in the XY plane and to form an elastic deflection in the Z direction when the forces are not of equal magnitude.

The structural shapes of the high-density connector 230 and the connector circuit board 220 can be determined as required, for example, the high-density connector 230 and the connector circuit board 220 are square plates or circular plates, the positioning member 400 is used as a component for positioning and matching with the external device 003, and needs to be connected to the high-density connector 230, or simultaneously forms a connection with the high-density connector 230 and the connector circuit board 220, one end of the positioning member 400, which is far away from the connector 200, can be provided with a conical tip, and initial self-centering when the external device 003 is aligned and connected with the interface device 002 can be realized through the conical surface of the conical tip.

The socket body 100 has a front end, a rear end and a connecting channel 110 penetrating the front end and the rear end, the connector 200 is elastically connected with the front end of the socket body 100, the connector 200 is electrically connected with a conductive member 500, the conductive member 500 protrudes from the connecting channel 110, and the conductive member 500 is configured to be electrically connected with a circuit board. This connecting channel 110 can be realized through seting up the inner chamber in pedestal 100, sets up the opening that communicates with connecting channel 110 on the pedestal 100 surface simultaneously, allows the connector 200 of front end can be with electrically conductive part 500 along connecting channel 110 along to the rear end, and this kind of mode arranges ingeniously, is changeed in the line and saves space. Conductive member 500 may be any type of conductive structure, and in order to satisfy stable electrical conduction, conductive member 500 may be a conductive cable electrically connected to connector 200 via cable connector 600, or conductive member 500 may be a flexible printed board electrically connected to connector 200.

The periphery of the connector 200 is elastically assembled with the seat 100 through a plurality of elastic members 700, the elastic members 700 may be springs, steel cables, or other structures having elastic deformability, and the connection positions, the number, and the arrangement manner of the elastic members 700 may be determined according to the specific structure of the connector 200, for example, when the connector 200 is a square board, the elastic members 700 may be selected to set one elastic member 700 at each of the four corners of the connector 200. The locating piece 400 is at least two, and sets up the border position of connector 200, the locating piece 400 also can be magnetic material such as magnet, be furnished with corresponding metal or attractable magnetic material on external equipment 003, realize the butt joint through magnetic force after connector 200 is close to with external equipment 003, locating piece 400 can confirm the hookup location according to the concrete structure of connector 200, quantity and arrangement mode, for example when connector 200 is square board, locating piece 400 can select to set up a mode such as locating piece 400 that corresponds each other respectively in two opposite angle positions of connector 200, be favorable to setting up high density connector 230 like this, make things convenient for high density connector 230 to walk the line in connector 200 central point position. Wherein, the positioning member 400 and the elastic member 700 have an arrangement at the corner of the connector 200, so the positioning member 400 can also form a mating connection with the elastic member 700, for example, the positioning member 400 can penetrate the connector 200 to form an extension which can be used to connect one end of the elastic member 700. The number of the limiting openings 210 is at least two, and the limiting openings are formed in the edge positions of the connector 200, and the positioning members 400 can determine the connection positions, the number and the arrangement mode according to the specific structure of the connector 200, for example, when the connector 200 is a square plate, the positioning members 400 can select the mode that one positioning member 400 is arranged at each of two opposite side positions of the connector 200, and the like. As for the specific arrangement structure of the elastic member 700, the positioning member 400 and the limiting opening 210, those skilled in the art can select the arrangement structure according to the requirement, and the arrangement structure is not limited herein.

The invention further provides a circuit board unit, which includes the interface device 002, the housing 100 is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board through a circuit board fixing frame 001, the circuit board fixing frame 001 is configured to be used for mounting at least one circuit board, the number of the specifically mountable circuit boards may be one or more, and the connector 200 is electrically connected with the circuit board. Since the detailed structure, functional principle and technical effect of the interface device 002 are described in detail in the foregoing, detailed description is omitted here, and any technical content related to the interface device 002 can refer to the above descriptions.

Referring to fig. 7 and 8, in an ideal state, the interface device 002 and the external device 003 are precisely butted by moving horizontally, at this time, the positioning element 400 and the corresponding positioning hole 005 or positioning slot of the external device 003 are substantially aligned, the positioning element 400 can directly enter the positioning hole 005 or positioning slot of the external device 003 after translating along the + Z-axis direction, the elastic element 700 generates a certain compression after being butted, and at this time, the limiting element 300 moves toward the butting side relative to the connector 200.

Referring to fig. 9 and 10, when the external device 003 has an offset in any direction of the XY plane, if the external device 003 is shifted in the Y direction, the position of the position-limiting member 300 is shifted in the-Y direction, and the positioning hole 005 of the external device 003 is shifted in the Y-axis direction, when the positioning member 400 is inserted into the positioning hole 005, the positioning member 400 performs a coarse positioning function, which can satisfy the blind insertion operation during the use, the precise alignment can still be realized under the condition of larger deviation, during the alignment and engagement process, the connector 200 can generate displacement in the + Y axis direction relative to the limiting member 300, the distance between the sidewall of the limiting member 300 along the-Y direction and the inner wall of the limiting opening 210 is reduced from the gap α to the gap b, and the distance between the sidewall of the limiting member 300 along the + Y direction and the inner wall of the limiting opening 210 is increased, thereby completing the accurate alignment.

Referring to fig. 11 and 12, when the axial direction of the positioning element 400 is not parallel to the vertical direction of the external device 003, that is, the external device 003 has an offset in the Z-axis direction, the positioning element 400 can perform a coarse positioning function, and during the process of inserting the positioning element 400 into the positioning hole 005, the elastic element 700 and the connector 200 are integrally inclined at the same angle in the inclined direction of the external device 003, so as to ensure that the positioning element 400 is accurately aligned and connected with the positioning hole 005 of the external device 003.

Moreover, in order to allow a larger-angle relative offset to be formed between the connector 200 and the limiting member 300, the connector 200 and the limiting member 300 may be further prevented from interfering with each other after being relatively offset in terms of structural improvement, for example, the connector 200 may be provided with a corresponding avoiding recess 240, the limiting member 300 may also be provided with a corresponding avoiding arc surface 330, and as for specific structural forms and positions of the avoiding recess 240 and the avoiding arc surface 330, the specific structural forms and positions may be completely determined according to the relative offset relationship between the connector 200 and the limiting member 300, for example, the avoiding recess 240 may be an annular recess, a spherical recess, or the like, and the avoiding arc surface 330 may also be a matched annular arc surface, a spherical arc surface, or the like, which is not limited herein.

The invention also provides a semiconductor test method, which comprises the following steps according to the circuit board unit: at least one circuit board is installed in the circuit board fixing frame 001, the number of the installed circuit boards can be one or more, that is, one circuit board can be installed in one circuit board fixing frame, and a plurality of laminated circuit boards can also be installed in the circuit board fixing frame, and each circuit board is electrically connected with at least one interface device 002; alternatively, one or more circuit boards are respectively mounted on the base body, each circuit board being electrically connected to at least one interface device 002; by electrically connecting a plurality of interface devices 002 to a plurality of interface ports 004 of the external device 003 at the same time, a structure for synchronous mass testing can be realized, and the testing efficiency can be effectively improved.

The invention also provides semiconductor test equipment which comprises the circuit board unit. Since the specific structure, functional principle and technical effects of the interface device 002 and the circuit board unit are described in detail in the foregoing, detailed descriptions thereof are omitted, and any technical contents related to the interface device 002 can be referred to the above descriptions.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An interface apparatus for semiconductor testing, the interface apparatus comprising:

a base body (100);

the connector (200) is elastically assembled on the seat body (100) and configured to generate an elastic trend of being far away from the seat body (100) due to stress, and a through limiting opening (210) is formed in the connector (200);

the limiting part (300), the limiting part (300) has connecting portion (310) and spacing portion (320), connecting portion (310) with pedestal (100) is connected, spacing portion (320) with spacing grafting cooperation of spacing mouth (210), spacing mouth (210) are configured to be used for making the furthest motion range that connector (200) can move for pedestal (100) through the spacing grafting cooperation with spacing portion (320), and connector (200) can slope for limiting part (300).

2. Interface device according to claim 1, characterized in that said connector (200) comprises:

the connector circuit board (220), wherein a first opening (211) is formed on the connector circuit board (220);

a high-density connector (230) stack-mounted on the connector circuit board (220);

wherein the high-density connector (230) avoids the first opening (211), and the first opening (211) solely constitutes the limiting opening (210); or, the high-density connector (230) is provided with a second opening (212), at least partial areas of the first opening (211) and the second opening (212) are overlapped, and the first opening (211) and the second opening (212) jointly form the limiting opening (210).

3. Interface device according to claim 2, wherein the cross-sectional area of the stopper portion (320) is larger than the opening area of the first opening (211) and smaller than the opening area of the second opening (212), the stopper portion (320) being configured for stopper cooperation with the first opening (211) and not being restricted from movement by the second opening (212).

4. The interface device of claim 1, further comprising:

a positioning member (400) disposed on the connector (200), the positioning member (400) configured for positioning mating with an external device (003) having an interface end (004).

5. The interface device according to claim 1, wherein the retaining member (300) has a clearance to the inner wall of the retaining opening (210).

6. The interface device according to claim 1, wherein the limiting opening (210) is a through hole provided on the connector (200), or the limiting opening (210) is a notch provided on an edge of the connector (200).

7. The interface device according to claim 1, wherein the connecting portion (310) has an adjusting structure, and the connecting portion (310) is movably connected to the housing (100) through the adjusting structure, and the adjusting structure is configured to adjust the farthest moving range limited by the limiting member (300).

8. Interface device according to any one of claims 1 to 7, wherein the housing (100) has a front end, a rear end and a connection channel (110) passing through the front end and the rear end, the connector (200) is elastically connected to the front end of the housing (100), the connector (200) is electrically connected to a conductive member (500), the conductive member (500) protrudes from the connection channel (110), the conductive member (500) is configured for electrically connecting to a circuit board.

9. Interface device according to claim 8, characterized in that said conductive part (500) is a conductive cable electrically connected to said connector (200) by a cable connector (600), or said conductive part (500) is a flexible printed board electrically connected to said connector (200).

10. The interface device of claim 8, wherein the connector (200) is resiliently fitted around the housing (100) by a plurality of resilient members (700);

and/or, the number of the positioning pieces (400) is at least two, and the positioning pieces are arranged at the edge position of the connector (200);

and/or at least two limiting openings (210) are formed in the edge position of the connector (200).

11. A circuit board unit, comprising:

the interface device (002) according to any one of claims 1-10, wherein the housing (100) is configured for mounting a circuit board directly or indirectly via a circuit board mount (001).

12. A semiconductor test method, characterized by the steps of, according to the circuit board unit of claim 11:

mounting at least one circuit board in said circuit board holder (001), each of said circuit boards being electrically connected to at least one of said interface devices (002), or mounting a circuit board on said housing (100), said circuit board being electrically connected to at least one of said interface devices (002);

and simultaneously electrically connecting a plurality of the interface devices (002) to a plurality of interface terminals (004) of an external device (003).

13. A semiconductor test apparatus characterized by comprising the circuit board unit according to claim 11.