CN113739918B - Polarization-preserving reflective near-infrared Fourier transform polarization spectrometer - Google Patents
Polarization-preserving reflective near-infrared Fourier transform polarization spectrometer Download PDFInfo
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- 230000010287 polarization Effects 0.000 title claims abstract description 51
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000001228 spectrum Methods 0.000 claims abstract description 6
- 230000008859 change Effects 0.000 claims description 11
- 238000005305 interferometry Methods 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims description 3
- 238000002329 infrared spectrum Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 2
- 230000004075 alteration Effects 0.000 abstract description 4
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- 229910052739 hydrogen Inorganic materials 0.000 description 2
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- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000004497 NIR spectroscopy Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
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Abstract
A polarization-preserving reflective near-infrared fourier transform polarization spectrometer, comprising: the system comprises a laser interference subsystem and a detection unit thereof, a white light interference subsystem and a detection unit thereof; the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-maintaining reflection focusing module, a beam splitter and a laser detector; the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-preserving reflection focusing module, a detector and a lock-in amplifier. The curved surface reflecting element adopted by the invention has optical power, does not generate chromatic aberration, and can ensure high reflectivity in a wider spectrum range.
Description
Technical Field
The invention relates to the technical field of near infrared spectroscopy, in particular to a near infrared Fourier transform spectrometer which adopts a polarization-preserving reflection focusing module comprising at least two reflecting elements to maintain polarization characteristics.
Background
Infrared spectroscopy is a powerful tool for determining molecular composition and structure, wherein near infrared regions are mainly absorption bands generated by frequency multiplication and combined frequency absorption of stretching vibration of hydrogen-containing groups (such as O-H, N-H, C-H). At present, the traditional near infrared Fourier transform spectrometer can detect weak signals after adding a lock-in amplifier, but still measures the radiation intensity of a sample, and cannot distinguish samples with the same radiation intensity but different polarizations. For anisotropic feature samples, the orientation of the vibrating groups in space cannot be obtained, and the spatial conformation of the molecules in the sample cannot be deduced.
In a conventional optical path, a lens is typically used for beam expansion and focusing. However, when the light source is not light of a single wavelength, chromatic aberration occurs when the lens is used for beam expansion or focusing, and the measurement accuracy is reduced. Although this problem can be solved by replacing the lens with a single off-axis parabolic mirror, the polarization state of the light beam after passing through the single off-axis parabolic mirror can change, which can also reduce the accuracy of the measurement results.
Disclosure of Invention
Accordingly, it is a primary object of the present invention to provide a reflective near-infrared fourier transform spectrometer that can maintain polarization characteristics, so as to partially solve at least one of the above problems.
To achieve the above object, as one aspect of the present invention, there is provided a polarization-maintaining reflective near infrared fourier transform spectrometer comprising: the system comprises a laser interference subsystem and a detection unit thereof, a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-maintaining reflection focusing module, a beam splitter and a laser detector, wherein:
the laser generated by the laser is divided into two paths through the beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected light returns to the beam splitter through the movable mirror, the transmitted light is reflected and focused on a sample through the polarization maintaining reflection focusing module, then returns to the beam splitter along the original path through the reflection of the surface of the sample, the beam splitter collects the two paths of light into one path of light, the position of the movable mirror is adjusted to change the optical path difference of the two light beams, the interference pattern of the two laser beams is obtained through the laser detector, the inclined position information of the movable mirror in the moving process is obtained, the movable mirror is subjected to real-time motion feedback adjustment through the position information of the movable mirror, and the plane of the movable mirror is kept in a vertical state with the optical axis, so that the aim of better white light interference is achieved;
the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-preserving reflection focusing module, a detector and a lock-in amplifier, wherein:
the detection light emitted by the white light source is filtered by a filter to be near infrared light, then the near infrared light is modulated to be high frequency by a chopper, then the light passes through a first focusing element to emit parallel light, the polarization state of the parallel light is changed by a first polarizer, and the modulated polarized light is transmitted; at this time, polarized light is divided into two paths by the beam splitter, one path is reflected light, the other path is transmitted light, the reflected light returns to the beam splitter through the movable mirror, the transmitted light is reflected and focused on the sample through the polarization-preserving reflection focusing module, after the transmitted light acts with the sample, the spectrum and the polarization state of the detected light change, the light carrying the information of the sample returns to the beam splitter along the original path, the beam splitter collects the two paths of light into one path of light, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; the polarization state of the interference light is adjusted through a second polarizer, the adjusted parallel light is transmitted, the light is concentrated on a focus by a second focusing element, and a detector is placed at the focused position; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier; the phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, and performs inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and the structure and optical properties of the anisotropic characteristic sample are obtained through calculation.
Wherein the laser in the laser interference subsystem is a helium-neon laser, a carbon dioxide laser, a solid state laser or a semiconductor laser.
The laser detector in the laser interference subsystem is a photoelectric detector capable of reflecting the change of the central position of the light spot, and is preferably a four-quadrant detector or a CCD detector.
The beam splitter is an element capable of splitting one beam of light into two beams of light perpendicular to each other, and is preferably a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter or a flat plate beam splitter.
The light source in the white light interference subsystem is a light source with a wave band comprising a near infrared part, preferably a tungsten lamp, a halogen lamp or a laser driven white light source.
The polarizer in the white light interference subsystem is an element capable of converting light into linearly polarized light, and is preferably a Wollaston prism polarizer or a Rochon prism polarizer.
The white light interference subsystem further comprises at least two compensators for changing the polarization state of light, preferably a wave plate or photoelastic phase compensation element.
The polarization-maintaining reflective focusing module in the white light interference subsystem comprises at least two reflecting elements, preferably a plane reflecting mirror and an off-axis parabolic mirror.
The polarization maintaining reflection focusing module further comprises a curved reflector, and the curved reflector is an off-axis parabolic reflector or a toroidal reflecting element.
Wherein the detector in the white light interferometry subsystem is a PbSe detector, a Ge detector, an InSb detector or an InGaAs detector.
Based on the technical scheme, the spectrometer has at least one of the following beneficial effects compared with the prior art:
1. according to the invention, polarized light measurement is introduced into a traditional near infrared Fourier transform spectrometer, near infrared light interference, fourier transform and polarized light measurement technology are combined, and more optical constants (such as thickness, refractive index, extinction coefficient and the like) of a sample to be measured can be obtained by measuring the polarization parameter of the probe light on the basis of acquiring the spectrum information of the sample to be measured by the traditional near infrared Fourier transform spectrometer.
2. The traditional lens is used for beam expansion and focusing to generate chromatic aberration, so that measurement accuracy is reduced, and the curved surface reflecting element adopted by the invention has optical power, does not generate chromatic aberration, and can ensure high reflectivity in a wider spectrum range. In addition, since the polarization state of the light is changed after the light is reflected by a single reflecting mirror, a polarization maintaining reflection focusing module including at least two reflecting elements is also used in the present invention to maintain the polarization characteristic of polarized light.
Drawings
FIG. 1 is a schematic diagram of a polarization-preserving reflective near infrared Fourier transform polarization spectrometer system.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
FIG. 1 is a schematic diagram of a polarization-preserving reflective near-infrared Fourier transform polarization spectrometer system according to an embodiment of the invention, and the invention is further described with reference to the schematic diagram.
Firstly, laser generated by a laser is divided into two paths through a beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected light returns to the beam splitter through the reflecting mirror, the transmitted light is reflected and focused on a sample through a polarization maintaining reflection focusing module, then returns to the beam splitter along the original path through the reflecting of the surface of the sample, the two paths of light are converged into one path of light through the beam splitter, the position of a movable mirror is adjusted to change the optical path difference of the two beams, an interference pattern of the two laser beams is obtained through a laser detector, the inclined position information of the movable mirror in the moving process is obtained, and the movable mirror is subjected to real-time motion feedback adjustment through the position information of the movable mirror, so that the plane of the movable mirror is kept in a vertical state with an optical axis, and the aim of better white light interference is achieved.
The detection light emitted by the laser-driven white light source is filtered into near infrared light through a filter, then the near infrared light is modulated into high frequency through a chopper, then the light passes through a focusing element 1 to emit parallel light, the polarization state of the parallel light is changed through a polarizer 1 and a wave plate 1, and the modulated polarized light is transmitted; at this time, polarized light is divided into two paths by the beam splitter, one path is reflected light, the other path is transmitted light, the reflected light returns to the beam splitter through the movable mirror, the transmitted light is reflected and focused on the sample through the polarization-preserving reflection focusing module, after the transmitted light acts with the sample, the spectrum and the polarization state of the detected light change, the light carrying the information of the sample returns to the beam splitter along the original path, the beam splitter collects the two paths of light into one path of light, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; the polarization state of the interference light is regulated through the wave plate 2 and the polarizer 2, the regulated parallel light is transmitted, the light is collected on a focus by the focusing element 2, and a photoelectric detector is placed at the focusing position; the output interface of the photoelectric detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier. At this time, the input signal is modulated by the chopper and has the same frequency as the reference signal, so that the low-frequency noise can be greatly suppressed by the phase-locked amplifier, and the detection signal-to-noise ratio is improved. The phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, and performs inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and the structure and optical properties (n, k or dielectric constant) of the anisotropic characteristic sample are obtained through calculation.
The laser in the laser interference subsystem may be a helium-neon laser, a carbon dioxide laser, a solid state laser, a semiconductor laser, or the like. The laser detector in the laser interference subsystem can be a four-quadrant detector, a CCD detector and the like which can reflect the change of the central position of the light spot. The beam splitter may be a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter, a plate beam splitter, or the like, which can split one light beam into two light beams perpendicular to each other.
The light source in the white light interference subsystem can be a tungsten lamp, a halogen lamp, a laser driven white light source and other light sources with wave bands comprising near infrared parts. The polarizer in the white light interference subsystem can be a Wollaston prism polarizer, a Rochon prism polarizer and other elements capable of converting light into linearly polarized light. The compensator in the white light interference subsystem can be a wave plate, a photoelastic phase compensation element and the like which can change the polarization state of light. The polarization-maintaining reflective focusing module in the white light interference subsystem comprises at least two reflecting elements, which can be a plane reflecting mirror and an off-axis parabolic mirror. The curved reflector in the polarization maintaining reflective focusing module can be an off-axis parabolic reflector, a toroidal reflecting element and the like. The photodetectors in the white light interferometry subsystem may be PbSe detectors, ge detectors, inSb detectors, inGaAs detectors, or the like.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the invention thereto, but to limit the invention thereto, and any modifications, equivalents, improvements and equivalents thereof may be made without departing from the spirit and principles of the invention.
Claims (12)
1. A polarization-preserving reflective near-infrared fourier transform polarization spectrometer, comprising: the system comprises a laser interference subsystem and a detection unit thereof, a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-maintaining reflection focusing module, a beam splitter and a laser detector, wherein:
the laser generated by the laser is divided into two paths through the beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected light returns to the beam splitter through the movable mirror, the transmitted light is reflected and focused on a sample through the polarization maintaining reflection focusing module, then returns to the beam splitter along the original path through the reflection of the surface of the sample, the beam splitter collects the two paths of light into one path of light, the position of the movable mirror is adjusted to change the optical path difference of the two light beams, the interference pattern of the two laser beams is obtained through the laser detector, the inclined position information of the movable mirror in the moving process is obtained, the movable mirror is subjected to real-time motion feedback adjustment through the position information of the movable mirror, and the plane of the movable mirror is kept in a vertical state with the optical axis, so that the aim of better white light interference is achieved;
the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-preserving reflection focusing module, a detector and a lock-in amplifier, wherein:
the detection light emitted by the white light source is filtered by a filter to be near infrared light, then the near infrared light is modulated to be high frequency by a chopper, then the light passes through a first focusing element to emit parallel light, the polarization state of the parallel light is changed by a first polarizer, and the modulated polarized light is transmitted; at this time, polarized light is divided into two paths by the beam splitter, one path is reflected light, the other path is transmitted light, the reflected light returns to the beam splitter through the movable mirror, the transmitted light is reflected and focused on the sample through the polarization-preserving reflection focusing module, after the transmitted light acts with the sample, the spectrum and the polarization state of the detected light change, the light carrying the information of the sample returns to the beam splitter along the original path, the beam splitter collects the two paths of light into one path of light, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; the polarization state of the interference light is adjusted through a second polarizer, the adjusted parallel light is transmitted, the light is concentrated on a focus by a second focusing element, and a detector is placed at the focused position; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier; the phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, and performs inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and the structure and optical properties of the anisotropic characteristic sample are obtained through calculation.
2. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the laser in the laser interference subsystem is a helium neon laser, a carbon dioxide laser, a solid state laser, or a semiconductor laser.
3. The polarization-maintaining reflective near-infrared fourier transform polarization spectrometer of claim 1, wherein the laser detector in the laser interference subsystem is a photo detector capable of reflecting a change in the center position of a light spot, and the photo detector is a four-quadrant detector or a CCD detector.
4. The polarization maintaining reflective near infrared fourier transform polarization spectrometer as recited in claim 1, wherein the beam splitter is a component capable of splitting a beam of light into two beams of light perpendicular to each other, and the beam splitter is a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter, or a plate beam splitter.
5. The polarization maintaining reflective near infrared fourier transform polarization spectrometer as recited in claim 1, wherein the light source in the white light interferometry subsystem is a light source having a wavelength band comprising a near infrared portion, and the light source is a tungsten lamp, a halogen lamp, or a laser driven white light source.
6. The polarization-preserving reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the polarizer in the white light interferometry subsystem is an element capable of converting light into linearly polarized light, and the polarizer is a wollaston prism polarizer or a rochon prism polarizer.
7. The polarization-preserving reflective near infrared fourier transform polarization spectrometer of claim 1, further comprising at least two compensators in the white light interferometry subsystem for changing the polarization state of light.
8. The polarization-preserving reflective near infrared fourier transform polarization spectrometer of claim 7, wherein the compensator is a wave plate or photoelastic phase compensation element.
9. The polarization maintaining reflective near infrared fourier transform polarization spectrometer as recited in claim 1, wherein the polarization maintaining reflective focusing module in the white light interferometry subsystem comprises at least two reflective elements.
10. The polarization maintaining reflective near infrared fourier transform polarization spectrometer as recited in claim 9, wherein the two reflective elements are a planar mirror and an off-axis parabolic mirror.
11. The polarization maintaining reflective near infrared fourier transform polarization spectrometer as recited in claim 9, further comprising a curved mirror in the polarization maintaining reflective focusing module, the curved mirror being an off-axis parabolic mirror or a toroidal reflecting element.
12. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the detector in the white light interferometry subsystem is a PbSe detector, a Ge detector, an InSb detector, or an InGaAs detector.
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| WO2020049620A1 (en) * | 2018-09-03 | 2020-03-12 | 株式会社島津製作所 | Interferometer moving-mirror position measurement device, and fourier transform infrared spectrophotometer |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10176952A (en) * | 1996-12-17 | 1998-06-30 | Yokogawa Electric Corp | Fourier spectrometer |
| EP1519168A1 (en) * | 2003-09-24 | 2005-03-30 | Abb Research Ltd. | High resolution Fourier-transform spectrometer |
| CN102135449A (en) * | 2010-01-21 | 2011-07-27 | 中国科学院西安光学精密机械研究所 | Fourier transform spectrum polarization detection method and system for high-speed rotating mirror |
| CN203572578U (en) * | 2013-11-15 | 2014-04-30 | 四川威斯派克科技有限公司 | Portable Fourier near-infrared spectroscopy |
| CN103900694A (en) * | 2013-12-17 | 2014-07-02 | 中国科学院西安光学精密机械研究所 | Near-infrared polarization interference spectrometer |
| WO2020049620A1 (en) * | 2018-09-03 | 2020-03-12 | 株式会社島津製作所 | Interferometer moving-mirror position measurement device, and fourier transform infrared spectrophotometer |
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