CN113687454A - Micro-lens array processing method - Google Patents
Micro-lens array processing method Download PDFInfo
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- CN113687454A CN113687454A CN202111001139.4A CN202111001139A CN113687454A CN 113687454 A CN113687454 A CN 113687454A CN 202111001139 A CN202111001139 A CN 202111001139A CN 113687454 A CN113687454 A CN 113687454A
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
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Abstract
The invention discloses a method for processing a micro-lens array, which comprises the following steps: step one, processing a template mould, wherein the template mould is provided with a pit capable of fixing microspheres; step two, self-assembling an array formed by microspheres on a template mould; thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern; transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching; and step five, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold. The invention utilizes the pits as the self-assembly guide of the microspheres, and achieves the mode of finally regulating and controlling the micro-lens array by adjusting the aperture of the pits, the distance between the pits, the position and the size of the microspheres, thereby realizing the manufacture of the micro-lens array mould with controllable position and further realizing the controllability of the manufacture of the micro-lens array.
Description
Technical Field
The invention relates to the technical field of micro-lens arrays, in particular to a micro-lens array processing method.
Background
The micro lens array is an array formed by lenses with micron-sized clear aperture and relief depth, not only has the basic functions of focusing, imaging and the like of the traditional lens, but also has the characteristics of small unit size and high integration level, so that the micro lens array can complete the functions which cannot be completed by the traditional optical element and can form a plurality of novel optical systems.
Microlens arrays have unique and excellent properties in terms of light uniformization, diffusion, and the like, and thus there is a great demand for the manufacture of microlens arrays. At present, the method for processing the micro-lens array by utilizing the microsphere self-assembly-etching composite method has certain limitations.
The existing microsphere self-assembly and etching composite processing method is that microspheres are arranged and assembled into a close hexagonal array structure on a gas-liquid interface under the action of capillary force, van der waals force and the like, then, a self-assembled microsphere single-layer film is used as a template, photoresist is directly coated in a spinning mode, and after the photoresist is cured, the microspheres are stripped, so that a concave hemispherical array of the photoresist is obtained (or, the self-assembled microsphere single-layer film is used as the template, a concave hemispherical array is copied by PDMS, then the PDMS is used as the template, and a corresponding array is copied by the photoresist); finally, the array pattern on the photoresist is transferred to the substrate material by an etching process. The regular arrays formed by capillary force, van der waals force and the like can be obtained in the form of close-packed hexagonal arrays, and it is difficult to obtain square-shaped adjacent or microsphere arrays with controllable adjacent spacing.
Therefore, how to change the current situation that the microsphere array is manufactured by adopting the composite processing method of microsphere self-assembly and etching in the prior art, the microsphere arrangement mode is single and the arrangement pitch is uncontrollable, which becomes a problem to be solved by the technical staff in the field.
Disclosure of Invention
The invention aims to provide a method for processing a micro lens array, which aims to solve the problems in the prior art, realize the processing of the micro lens array with controllable position and improve the applicability of the micro lens array.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a micro-lens array processing method, which comprises the following steps:
processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, and a plurality of pits are arranged in an array;
step two, self-assembling an array formed by the microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits;
thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern;
transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching;
and fifthly, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold.
Preferably, in the first step, the pit is cylindrical.
Preferably, in the first step, the pits are in the shape of inverted pyramid columns.
Preferably, in the first step, the template mold is processed by laser processing or mechanical processing.
Preferably, the size of the pits matches the size of the microspheres, and the centers of the microspheres are located at the top of the template mold.
Preferably, in the second step, the microspheres are made of a silica material.
Preferably, the template mold is of a split structure.
Preferably, in step five, the residual photoresist on the substrate mold is removed by cleaning.
Compared with the prior art, the invention has the following technical effects: the microlens array processing method of the invention comprises the following steps: processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, and a plurality of pits are arranged in an array; step two, self-assembling an array formed by microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits; thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern; transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching; and step five, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold.
According to the method for processing the micro-lens array, the pits capable of fixing the microspheres are processed on the template mould, the pits are used for self-assembly guiding of the microspheres, and the mode of finally regulating and controlling the micro-lens array is achieved by adjusting the aperture of the pits, the distance between the pits, the position and the size of the microspheres, so that the manufacturing of the micro-lens array mould with the controllable position is realized, the controllability of manufacturing the micro-lens array is further realized, and the applicability of the micro-lens array is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic diagram of a microlens array processing method according to the present invention;
FIG. 2 is a schematic view of an embodiment of a method for processing a microlens array according to the present invention;
FIG. 3 is a schematic view of a template mold in an embodiment of a microlens array processing method of the present invention;
FIG. 4 is a schematic view of a template mold capable of forming a contiguous square array in an embodiment of a microlens array processing method of the present invention;
FIG. 5 is a schematic diagram of a method of forming a contiguous square array according to an embodiment of the present invention;
FIG. 6 is a schematic view of a template mold capable of forming a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention;
FIG. 7 is a schematic diagram of the formation of a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention;
wherein, 1 is a template mold, 2 is a pit, 3 is a microsphere, 4 is photoresist, 5 is a substrate mold, and 6 is a microlens array mold.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a method for processing a micro lens array, which aims to solve the problems in the prior art, realize the processing of the micro lens array with controllable position and improve the applicability of the micro lens array.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1-7, fig. 1 is a schematic diagram illustrating a method for processing a microlens array according to the present invention, and fig. 2 is a schematic diagram illustrating an embodiment of the method for processing a microlens array according to the present invention; fig. 3 is a schematic view of a template mold in an embodiment of a microlens array processing method of the present invention, fig. 4 is a schematic view of a template mold capable of forming a contiguous square array in an embodiment of a microlens array processing method of the present invention, fig. 5 is a schematic view of a contiguous square array in an embodiment of a microlens array processing method of the present invention, fig. 6 is a schematic view of a template mold capable of forming a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention, and fig. 7 is a schematic view of a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention.
The invention provides a micro-lens array processing method, which comprises the following steps:
firstly, processing a template mould 1, wherein the template mould 1 is provided with pits 2 capable of fixing microspheres 3, and a plurality of pits 2 are arranged in an array;
step two, self-assembling an array formed by microspheres 3 on the template mould 1, wherein the arrangement mode of the array formed by the microspheres 3 is the same as that of the array formed by the pits 2;
thirdly, imprinting the photoresist 4 at a certain temperature by using the array formed by the microspheres 3 obtained in the second step to obtain a microlens array pattern on the surface of the photoresist 4;
transferring the microlens array pattern on the photoresist 4 obtained in the third step to a substrate mold 5 by using plasma etching;
and step five, removing the residual photoresist 4 on the substrate mould 5 to obtain the micro-lens array mould 6.
According to the method for processing the micro-lens array, the pits 2 capable of fixing the microspheres 3 are processed on the template mould 1, the pits 2 are used for self-assembly guiding of the microspheres 3, and the mode of finally regulating and controlling the micro-lens array is achieved by adjusting the aperture of the pits 2, the distance between the pits 2, the position and the size of the microspheres 3, so that the manufacturing of the micro-lens array mould 6 with the controllable position is realized, the manufacturing controllability of the micro-lens array is further realized, and the applicability of the micro-lens array is improved.
In this embodiment, the pits 2 are cylindrical, and the diameter of the pits 2 is smaller than that of the microspheres 3, so that the microspheres 3 are prevented from falling into the pits 2, and the subsequent manufacturing of the microlens array mold 6 is ensured to be smoothly performed.
In other specific embodiments of the present invention, the pits 2 are inverted pyramid-shaped columns, that is, the template mold 1 has pyramid-shaped protrusions, the protrusions are similar to pyramid shapes, and inverted pyramid-shaped pits 2 are formed between adjacent protrusions, so as to provide stable support for the microspheres 3, improve the stress uniformity of the microspheres 3, reduce the processing difficulty of the template mold 1, and facilitate the subsequent microlens array production. It should be noted here that, in actual production, pits 2 of other shapes, such as hemispherical or inverted frustum-shaped pits 2, may also be selected according to the target microlens array, so as to improve the flexibility of microlens array production.
Specifically, the template mold 1 may be machined using a laser, and the laser machined pits 2 provide guidance for the microspheres 3. In practice, it is also possible to manufacture the protruding prism structure by machining and transfer the corresponding template mold 1 with the pits 2 by using PDMS (polydimethylsiloxane).
It is emphasized that the dimensions of the pits 2 are matched with the dimensions of the microspheres 3, so that the pits 2 can provide guidance for the microspheres 3 and fix the microspheres 3 in the production process, and the stability of the microspheres 3 in the production process is improved, and the centers of the microspheres 3 are positioned at the top of the template mold 1.
More specifically, the microspheres 3 are made of a silica material, and the microspheres 3 made of the silica material have stable chemical properties, so that the processing precision of the microlens array can be improved. The mechanism of the template-oriented ordered self-assembled monolayer film is that the microspheres 3 form a two-dimensional ordered monolayer film which is tightly arranged on the template mold 1 by utilizing the difference of the driving force of the bottom-layer microspheres 3 and the upper multi-layer microspheres 3 under the combined action of the acting forces such as adhesion, rolling friction, gravity and the like. The relative humidity of the air in the self-assembled environment is therefore as low as possible, reducing the adhesion of the ball/ball contact pair, thereby increasing the difference in the driving force of the upper and lower microspheres 3.
Further, template mould 1 is split type structure, assembles according to the demand split, can be according to actual production demand, adjusts template mould 1's processing parameter to realize the controllable manufacturing of microlens array interval, angle. In other embodiments of the present invention, the template mold 1 is assembled from adjacent quadrangles, adjacent height-varying quadrangles (with varying aperture sizes and constant self-assembled bead diameters), adjacent hexagons, and spacing-varying adjacent tetrahedrons to complete the image of the regional self-assembly and improve the production flexibility of the microlens array. As shown in fig. 5 to 7 of the accompanying drawings, two forms of the microspheres 3 which are self-assembled and then form an adjacent square array and an adjacent hexagonal array are respectively listed, and two different states of the template mold 1 are also listed, the template mold 1 is manufactured by adopting a cutting processing mode, taking the microspheres 3 which are self-assembled and then form an adjacent hexagonal array as an example, the microlens array is a close-packed hexagon, the template mold 1 is processed by adopting a single-point diamond fly-cutting mode, and the effective regulation and control of the microlens array are finally realized by adjusting the fly-cutting depth, the cutter angle, the cutting staggered angle and the cutting period.
It should be noted that the residual photoresist 4 on the substrate mold 5 can be removed by cleaning to obtain the microlens array mold 6, which is convenient for subsequent production.
According to the method for processing the micro-lens array, the micro-lens array is prepared by self-assembling the guide microspheres 3 through the pits 2 and combining an etching method, the micro-lens array is regulated and controlled by utilizing the aperture spacing, the position and the size of the microspheres 3, the preparation process is simple, the arrangement mode of the micro-lens array is controllable, the obtained micro-lens array mold 6 can be repeatedly used, the mass production is convenient, and the processing of the micro-lens array made of various optical materials (glass, resin and the like) can be realized. Meanwhile, by adopting the method for processing the micro lens array, flexible regional self-assembly can be realized, the application scene of the micro lens array is greatly widened, and a new method is provided for improving the flexibility and efficiency of a lens array mould.
Interpretation of terms:
controllable self-assembly technology: self-assembly is a broad concept, a process that spontaneously forms order from disorder, extending from microscopic to macroscopic scales. The self-assembly process refers to the simultaneous and spontaneous association and aggregation of a large number of tiny particles to form a compact and ordered whole, and the self-assembly is a complex synergistic effect of the whole. Such global complications include the type of force interaction between particles, physical morphology of the template, hydrophobicity between the template material and the particles, electrostatic forces. Functional fabrication requires that the self-assembly process be controllable, and the self-assembly steering be controlled by controlling physical conditions.
Etching processing: etching is the process of selectively removing unwanted material from a target surface by chemical or physical means, with the primary objective being to correctly replicate the mask pattern by removing unprotected portions of the workpiece to be processed. With the development of micro-fabrication technology, etching is a general term for stripping and removing materials by solution, reactive ion or other mechanical means, which is a common name for micro-fabrication.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. A method for processing a micro lens array is characterized by comprising the following steps:
processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, and a plurality of pits are arranged in an array;
step two, self-assembling an array formed by the microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits;
thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern;
transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching;
and fifthly, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold.
2. The method of processing a microlens array as set forth in claim 1, wherein: in the first step, the pits are cylindrical.
3. The method of processing a microlens array as set forth in claim 1, wherein: in the first step, the pits are in inverted pyramid columns.
4. The method of processing a microlens array as set forth in claim 1, wherein: in the first step, the template mould is processed by utilizing a laser processing or mechanical processing mode.
5. The method of processing a microlens array as set forth in claim 1, wherein: the specification of the concave pit is matched with that of the microsphere, and the center of the microsphere is positioned at the top of the template mold.
6. The method of processing a microlens array as set forth in claim 1, wherein: in the second step, the microspheres are made of silicon dioxide.
7. The method of processing a microlens array as set forth in claim 1, wherein: the template mold is of a split structure.
8. The method of processing a microlens array as set forth in claim 1, wherein: and fifthly, removing the residual photoresist on the substrate mould in a cleaning mode.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115185022A (en) * | 2022-06-22 | 2022-10-14 | 北京理工大学 | Micro-lens array mold manufacturing method based on microsphere self-assembly |
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| US6436265B1 (en) * | 1999-03-29 | 2002-08-20 | Canon Kabushiki Kaisha | Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array |
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