CN113252163B - Self-mixing interference multichannel vibration measuring instrument and measuring method based on frequency division multiplexing - Google Patents
Self-mixing interference multichannel vibration measuring instrument and measuring method based on frequency division multiplexing Download PDFInfo
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Abstract
A self-mixing interference multichannel vibration measuring instrument and a measuring method based on frequency division multiplexing. Light output by the semiconductor laser is vertically incident to the transmission type diffraction grating to form diffracted light of each level, and each diffracted light of each level forms a vibration measuring channel. Each path of measurement channel is provided with an electro-optical modulator for carrying out phase modulation of different frequencies on the order diffraction light beams, each target surface to be measured is arranged behind the electro-optical modulator, so that the order diffraction light passes through the electro-optical modulator and vertically enters the target surface to be measured and returns along the original light path, and enters the diffraction grating again for secondary diffraction; the secondary diffraction light carries vibration information of each target surface, returns to the laser cavity along the opposite direction of the emergent light of the laser, and generates self-mixing interference with the light in the cavity. And processing the self-mixing interference signals by utilizing a frequency division multiplexing technology, and reconstructing the target surface vibration waveforms of all channels in real time. The system has simple and compact structure, can detect the vibration of the multi-channel and multi-objective target surface in real time, and has high measurement resolution.
Description
Technical Field
The invention relates to the technical field of precision measurement, in particular to a self-mixing interference multichannel vibration measuring instrument and a measuring method based on frequency division multiplexing.
Background
Although the traditional interference test structure such as an Agilent company 5529A dual-frequency interferometer can achieve higher vibration measurement precision, the traditional interference test structure is large in general structure, complex in light path, sensitive to collimation and high in price. The laser self-mixing interference technology is a novel interference measurement technology with high application value in recent years, and when the laser output light is reflected or scattered by an external object, part of the light returns to the laser resonant cavity to be mixed with the light beam in the cavity to cause the change of the output light intensity of the laser, so that the precision measurement of physical quantities such as speed, displacement, vibration, distance and the like is realized. The system has the advantages of simple and compact structure, auto-collimation and obvious advantages of being capable of working on a rough scattering surface, solves the problems of complex system, sensitivity to collimation and the like of the traditional interferometry technology, and can replace the traditional laser interferometer in many occasions. The reported laser self-mixing interferometry device is mostly based on a single-channel measurement structure, and for the application of the self-mixing effect in a multi-channel measurement system, the research in a frequency division multiplexing system is almost blank at home and abroad.
Disclosure of Invention
In order to solve the problems, the invention provides a self-mixing interference multichannel vibration measuring instrument and a measuring method based on frequency division multiplexing, which are vibration measuring devices with simple and compact structures, high resolution and capability of detecting multi-target vibration in real time. The method provides a basic basis for realizing the multiplexing sensor network technology based on laser self-mixing interference.
The invention provides a self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing, which comprises: the laser comprises a semiconductor laser, a semiconductor laser driver, a transmission type diffraction grating, a first measuring channel, a second measuring channel, a third measuring channel and a signal processing module, wherein the semiconductor laser is driven by the semiconductor laser driver to emit laser, the transmission type diffraction grating is arranged on an output light path of the laser, the laser emitted by the semiconductor laser is vertically incident to the transmission type diffraction grating to form diffraction light of all levels, wherein +1 diffraction light forms the first measuring channel, 0 diffraction light forms the second measuring channel, and-1 diffraction light forms the third measuring channel. The 0-level, +1-level and-1-level diffraction light returns along an original light path after passing through each measuring channel, and is incident to the diffraction grating again to generate secondary diffraction, the secondary diffraction light carries target surface vibration information to be measured of each channel, returns to the laser cavity along the opposite direction of the emergent light of the laser to generate laser self-mixing interference with the light in the cavity, the self-mixing interference signal is received by a photoelectric detector integrated in the semiconductor laser and is output to a data processing module, and the signal processing module recovers the target surface vibration waveforms of each channel in real time by utilizing a frequency division multiplexing technology.
As a further improvement of the measuring instrument, the first measuring channel comprises a first plane reflecting mirror, a first electro-optic crystal modulator driver and a first target surface to be measured; the second measuring channel comprises a second electro-optic crystal modulator, a second electro-optic crystal modulator driver and a second target surface to be measured; the third measuring channel comprises a second plane reflector, a third electro-optic crystal modulator driver and a third target surface to be measured, and in each measuring channel, diffracted light vertically enters the target surface to be measured after passing through the electro-optic crystal and returns along an original light path, and enters the diffraction grating to generate secondary diffraction after passing through the electro-optic crystal modulator again.
As a further improvement of the measuring instrument, the semiconductor laser is internally integrated with a photoelectric detector to output single longitudinal mode linear polarized laser, and a precise current source and a temperature controller are integrated in a semiconductor laser driver and work in a constant current mode.
As a further improvement of the measuring instrument, the transmission type diffraction grating is a one-dimensional grating of a visible light wave band, and baffles are arranged at the front and rear sides of the transmission type diffraction grating to stop the diffraction beams of the unnecessary orders.
As a further improvement of the measuring instrument, the first plane reflecting mirror and the second plane reflecting mirror are placed at angles so that the light paths of the three measuring channels are parallel.
As a further improvement of the measuring instrument, the main axis direction of the electro-optic crystal modulator is consistent with the polarization direction of the laser output by the semiconductor laser.
As a further improvement of the measuring instrument, the phase modulation amplitude is 1.23rad; the modulation frequencies f m1、fm2、fm3 of the three electro-optic crystal modulators satisfy f m1:fm2:fm3 =3:5:7.
As a further improvement of the measuring instrument of the invention, the relation between the modulation frequency f mi of the electro-optic crystal modulator of each measuring channel, i=1, 2,3 and the i-th target surface maximum movement speed v imax to be measured and the wavelength lambda of the semiconductor laser is continuously satisfied: f mi>4vimax/lambda.
As a further improvement of the measuring instrument of the invention, the electro-optic crystal modulator adopts a waveguide-shaped electro-optic crystal.
The invention relates to a measuring method of a self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing, phase demodulation adopts a Fourier analysis demodulation technology, and the signal processing process is as follows:
(1) Performing Fourier transform on the self-mixing interference signal;
(2) Filtering out a first harmonic wave, a center frequency f m1 and a second harmonic wave corresponding to a modulation signal of the first electro-optic crystal modulator by utilizing a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m1 and the second harmonic wave and the center frequency 2f m1, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by utilizing an arctangent operation, and reconstructing a target surface vibration waveform of the first measurement channel in real time according to the relation between the phase change and the target surface vibration;
(3) Filtering out a first harmonic wave, a center frequency f m2 and a second harmonic wave corresponding to a modulation signal of the second electro-optic crystal modulator by utilizing a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m2 and the second harmonic wave and the center frequency 2f m2, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by utilizing an arctangent operation, and reconstructing a target surface vibration waveform of the second measurement channel in real time according to the relation between the phase change and the target surface vibration;
(4) And filtering out a first harmonic wave, a center frequency f m3 and a second harmonic wave corresponding to the modulation signal of the third electro-optic crystal modulator by using a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m3, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by using an arctangent operation, and reconstructing the target surface vibration waveform of the third measurement channel in real time according to the relation between the phase change and the target surface vibration.
Compared with the prior art, the invention has the advantages that:
1) Based on the semiconductor laser self-mixing interference principle, compared with the traditional double-beam interference light path, the invention has the characteristics of simple and compact structure, no need of an external detector, easy collimation, convenient light path adjustment and the like;
2) According to the invention, the transmission type diffraction grating is introduced into the semiconductor laser self-mixing interference light path, so that the expansion of the measuring channel is realized, and each diffraction order light can form one path of measuring channel. Meanwhile, due to the limitation of diffraction efficiency of the grating, an attenuator is not required to be added in a light path to control the optical feedback intensity;
3) The invention provides a frequency division multiplexing technology for demodulating the phase of a self-mixing interference signal, an electro-optical modulator is adopted for carrying out phase modulation of different frequencies on diffraction order light of each measuring channel, the phase demodulation is realized by the frequency division multiplexing technology, and the vibration measurement of multiple channels is realized by one light source at the same time;
4) The invention forms a novel vibration measuring device with simple and compact structure, high resolution, multiple channels and multiple target surfaces, and has important practical significance for further promoting the development of advanced manufacturing technology.
Drawings
Fig. 1 is a schematic diagram of a self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing.
Fig. 2 is a software processing flow chart of the self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing for multichannel vibration measurement.
Description of the drawings
1. A first measurement channel; 2. a second measurement channel; 3. a third measurement channel; 4. a transmissive diffraction grating; 5. a semiconductor laser driver; 6. a semiconductor laser; 7. a signal processing module; 10. a first planar mirror; 11. a first electro-optic crystal modulator driver; 12. a first electro-optic crystal modulator; 13. a first target surface to be measured; 21. a second electro-optic crystal modulator driver; 22. a second electro-optic crystal modulator; 23. a second target surface to be measured; 30. a second planar mirror; 31. a third electro-optic crystal modulator driver; 32. a third electro-optic crystal modulator; 33. and a third target surface to be measured.
Detailed Description
The invention is described in further detail below with reference to the attached drawings and detailed description:
The invention provides a self-mixing interference multichannel vibration measuring instrument and a measuring method based on frequency division multiplexing, which are vibration measuring devices with simple and compact structures, high resolution and capability of detecting multi-target vibration in real time. The method provides a basic basis for realizing the multiplexing sensor network technology based on laser self-mixing interference.
The working principle of the self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing is described with reference to fig. 1. As shown in fig. 1, linearly polarized light output from the semiconductor laser 6 is vertically incident on the transmission diffraction grating 4 to form diffracted light of each order. Wherein +1 order diffracted light constitutes the first measuring channel 1,0 order diffracted light constitutes the second measuring channel 2, and-1 order diffracted light constitutes the third measuring channel 3. The first plane mirror 10 and the second plane mirror 30 are placed at angles so that the three measuring channels are parallel.
In the first measurement channel, after being reflected by the first plane mirror 10, the +1 diffraction light is incident to the first electro-optical crystal modulator 12, passes through the first electro-optical crystal modulator 12, vertically enters the first target surface 13 to be measured, returns along the original light path, and enters the transmission diffraction grating 4 again to generate secondary diffraction. The secondary +1 diffraction light carries vibration information of the first target surface 13 to be detected, returns to the cavity of the semiconductor laser 6 along the opposite direction of the emergent light of the laser, and generates self-mixing interference with the light in the cavity. When the first target surface 13 to be measured moves in the x direction in the figure to x 1 (t), the +1 order diffracted light phase is changed to: the first electro-optic crystal modulator 12 phase modulates the +1 order diffracted light with a modulation function of: a 1sin(2πfm1 t), where a 1 is the modulation amplitude and f m1 is the modulation frequency. Since the +1 order diffracted beam passes through the electro-optic crystal modulator 12 twice in the external cavity, the +1 order diffracted feedback optical phase change caused by the electro-optic modulator 12 is: and psi 1(t)＝2a1sin(2πfm1 t), the total amount of phase change of the +1-order diffraction feedback light is as follows: /(I)
In the second measurement channel, the 0-order diffraction light is incident to the second electro-optical crystal modulator 22, passes through the second electro-optical crystal modulator 22, vertically enters the second target surface 23 to be measured, returns along the original light path, and enters the transmission type diffraction grating 4 again to generate secondary diffraction. The second 0-order diffraction light carries vibration information of the second target surface 23 to be detected, returns to the cavity of the semiconductor laser 6 along the opposite direction of the emergent light of the laser, and generates self-mixing interference with the light in the cavity. When the second target surface 23 to be measured moves in the x direction in the figure as x 2 (t), the 0 th order diffracted light phase is caused to change to: The second electro-optic crystal modulator 22 phase modulates the 0 th order diffracted light with a modulation function of: a 2sin(2πfm2 t), where a 2 is the modulation amplitude and f m2 is the modulation frequency. Since the 0 th order diffracted beam passes through the electro-optic crystal modulator 22 twice in the external cavity, the 0 th order diffracted feedback optical phase variation caused by the electro-optic modulator 22 is: psi 2(t)＝2a2sin(2πfm2 t), the total amount of phase change of the 0-order diffraction feedback light is: /(I)
In the third measuring channel, the-1-order diffraction light is reflected by the second plane mirror 30, then enters the third electro-optical crystal modulator 32, passes through the third electro-optical crystal modulator 32, then vertically enters the third target surface 33 to be measured, returns along the original light path, and enters the transmission type diffraction grating 4 again to generate secondary diffraction. The second-1 order diffraction light carries vibration information of the third target surface 33 to be detected, returns to the cavity of the semiconductor laser 6 along the opposite direction of the emergent light of the laser, and generates self-mixing interference with the light in the cavity. When the third target surface 33 to be measured moves in the x direction in the figure to x 3 (t), the-1 st order diffracted light phase is caused to change to: the third electro-optic crystal modulator 32 phase modulates the-1 order diffracted light with a modulation function of: a 3sin(2πfm3 t), where a 3 is the modulation amplitude and f m3 is the modulation frequency. Since the-1 st order diffracted beam passes through the electro-optic crystal modulator 32 twice in the external cavity, the-1 st order diffracted feedback optical phase change caused by the electro-optic modulator 32 is: phi 3(t)＝2a3sin(2πfm3 t), the total amount of phase change of the 1 st-order diffraction feedback light is: /(I)
The laser self-mixing interference signal P (t) caused by the three-way feedback light can be expressed as
The unfolding modes are as follows:
Where J n(2ai) is a bessel function of order n, and m i (i=1, 2, 3) is a coefficient related to the feedback intensity of the measurement channel. The first harmonic and the second harmonic corresponding to the modulation frequency f mi (i=1, 2, 3) in equation (2) can be expressed as:
After removing the high frequency carrier, the phases of the three measurement channels can be demodulated from the envelope signals A 1i (t) and A 2i (t) of the first harmonic P (f mi, t) and the second harmonic P (2 f mi, t) corresponding to the respective modulation frequencies f mi
The working principle of the signal processing module of the self-mixing interference multi-channel vibration measuring instrument based on frequency division multiplexing is described below with reference to fig. 2.
(1) Fourier transforming the self-mixing interference signal P (t);
(2) Filtering out first harmonic (center frequency f m1) and second harmonic (center frequency 2f m1) corresponding to the modulation signal of the first electro-optic crystal modulator by using a rectangular window filter function, performing Fourier inverse transformation, and removing the carrier wave to obtain sine component of the phase change of the measurement channel And cosine component/>Calculating the phase change/>, of the first measurement channel by using an arctangent operationBased on the relation between the phase change and the target vibration/>The first measurement channel target surface vibration waveform x 1 (t) is reconstructed in real time.
(3) Filtering out first harmonic (center frequency f m2) and second harmonic (center frequency 2f m2) corresponding to the modulated signal of the second electro-optic crystal modulator by using a rectangular window filter function, performing Fourier inverse transformation, and removing the carrier wave to obtain sinusoidal components of the phase change of the measuring channelAnd cosine component/>Calculating the phase change/>, of the second measurement channel by using an arctangent operationBased on the relation between the phase change and the target vibration/>Reconstructing the target surface vibration waveform x 2 (t) of the second measurement channel in real time.
(4) Filtering out first harmonic (center frequency f m3) and second harmonic (center frequency 2f m3) corresponding to the modulated signal of the third electro-optic crystal modulator by using a rectangular window filter function, performing Fourier inverse transformation, and removing the carrier wave to obtain sinusoidal components of the phase change of the measuring channelAnd cosine component/>Calculating the phase change/>, of the second measurement channel by using an arctangent operationBased on the relation between the phase change and the target vibration/>Reconstructing the target surface vibration waveform x 3 (t) of the second measurement channel in real time.
The above description is only one of the preferred embodiments of the present invention, and is not intended to limit the present invention in any other way, but any modifications or equivalent variations according to the technical spirit of the present invention are still within the scope of the present invention as claimed.
Claims (2)
1. A self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing, comprising: semiconductor laser, semiconductor laser driver, transmission diffraction grating, first measurement channel, second measurement channel, third measurement and signal processing module, its characterized in that: the semiconductor laser is driven by a semiconductor laser driver to emit laser, the transmission type diffraction grating is arranged on a laser output optical path, the laser emitted by the semiconductor laser is vertically incident to the transmission type diffraction grating to form diffraction light of each level, wherein +1 diffraction light forms a first measuring channel, 0 diffraction light forms a second measuring channel, -1 diffraction light forms a third measuring channel, 0 diffraction light, +1 diffraction light and 1 diffraction light return along an original optical path after passing through the respective measuring channels, the diffraction light is again incident to the diffraction grating to generate secondary diffraction, the secondary diffraction light carries target surface vibration information to be detected of each channel and returns to a laser cavity along the opposite direction of the laser emergent light to generate laser self-mixing interference, self-mixing interference signals are received by a photoelectric detector integrated in the semiconductor laser and output to a data processing module, and the signal processing module recovers target surface vibration waveforms of each channel in real time by utilizing a frequency division multiplexing technology;
The first measuring channel comprises a first plane reflecting mirror, a first electro-optic crystal modulator driver and a first target surface to be measured; the second measuring channel comprises a second electro-optic crystal modulator, a second electro-optic crystal modulator driver and a second target surface to be measured; the third measuring channel comprises a second plane reflector, a third electro-optic crystal modulator driver and a third target surface to be measured, and in each measuring channel, diffracted light vertically enters the target surface to be measured after passing through the electro-optic crystal and returns along an original light path, and enters the diffraction grating to generate secondary diffraction after passing through the electro-optic crystal modulator again;
The semiconductor laser is internally integrated with a photoelectric detector to output single longitudinal mode linear polarized laser, and a semiconductor laser driver is integrated with a precision current source and a temperature controller and works in a constant current mode;
The transmission type diffraction grating is a one-dimensional grating of a visible light wave band, and baffles are arranged at the front and rear sides of the transmission type diffraction grating to block out unwanted orders of diffraction beams;
The first plane reflector and the second plane reflector are placed at angles so that the light paths of the three measuring channels are parallel;
The main axis direction of the electro-optic crystal modulator is consistent with the polarization direction of the laser output by the semiconductor laser;
The phase modulation amplitudes are 1.23rad; the modulation frequencies f m1、fm2、fm3 of the three electro-optic crystal modulators satisfy f m1:fm2:fm3 =3:5:7;
the relation between the modulation frequency f mi, i=1, 2,3 of the electro-optic crystal modulator of each measuring channel and the i-th target surface maximum movement velocity v imax to be measured and the semiconductor laser wavelength lambda is continuously satisfied: f mi>4vimax/lambda;
the electro-optic crystal modulator adopts a waveguide-shaped electro-optic crystal.
2. The measurement method of the self-mixing interference multichannel vibration measuring instrument based on frequency division multiplexing according to claim 1, wherein the measurement method comprises the following steps: the phase demodulation adopts a Fourier analysis demodulation technology, and the signal processing process is as follows:
(1) Performing Fourier transform on the self-mixing interference signal;
(2) Filtering out a first harmonic wave, a center frequency f m1 and a second harmonic wave corresponding to a modulation signal of the first electro-optic crystal modulator by utilizing a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m1 and the second harmonic wave and the center frequency 2f m1, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by utilizing an arctangent operation, and reconstructing a target surface vibration waveform of the first measurement channel in real time according to the relation between the phase change and the target surface vibration;
(3) Filtering out a first harmonic wave, a center frequency f m2 and a second harmonic wave corresponding to a modulation signal of the second electro-optic crystal modulator by utilizing a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m2 and the second harmonic wave and the center frequency 2f m2, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by utilizing an arctangent operation, and reconstructing a target surface vibration waveform of the second measurement channel in real time according to the relation between the phase change and the target surface vibration;
(4) And filtering out a first harmonic wave, a center frequency f m3 and a second harmonic wave corresponding to the modulation signal of the third electro-optic crystal modulator by using a rectangular window filter function, performing Fourier inverse transformation on the center frequency f m3, removing the carrier wave to obtain a sine component and a cosine component of the phase change of the measurement channel, calculating the phase change by using an arctangent operation, and reconstructing the target surface vibration waveform of the third measurement channel in real time according to the relation between the phase change and the target surface vibration.
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