CN113180727B - Ultrasonic transducer with freely selectable joint filling material and preparation method thereof - Google Patents
Ultrasonic transducer with freely selectable joint filling material and preparation method thereof Download PDFInfo
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- CN113180727B CN113180727B CN202110332739.2A CN202110332739A CN113180727B CN 113180727 B CN113180727 B CN 113180727B CN 202110332739 A CN202110332739 A CN 202110332739A CN 113180727 B CN113180727 B CN 113180727B
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- 239000000463 material Substances 0.000 title claims abstract description 108
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 238000005520 cutting process Methods 0.000 claims abstract description 30
- 238000003475 lamination Methods 0.000 claims abstract description 16
- 239000000499 gel Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 229920006335 epoxy glue Polymers 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 9
- 239000012188 paraffin wax Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000741 silica gel Substances 0.000 claims description 7
- 229910002027 silica gel Inorganic materials 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 229920002379 silicone rubber Polymers 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 4
- 239000003921 oil Substances 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 description 5
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000011499 joint compound Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- Life Sciences & Earth Sciences (AREA)
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- Medical Informatics (AREA)
- Gynecology & Obstetrics (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Mechanical Engineering (AREA)
- Heart & Thoracic Surgery (AREA)
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Abstract
The invention discloses an ultrasonic transducer with freely selectable gap filling materials, which comprises a sound head assembly, a cable assembly and a handle shell, wherein the sound head assembly comprises a sound lens, a matching layer, a piezoelectric element, a back lining sheet and a back lining block, the back lining sheet, the piezoelectric element and the matching layer are stacked to form a lamination, a cutting seam which is not completely cut through is formed by cutting from the back lining sheet to the direction of the matching layer, the gap filling materials are filled in the cutting seam, the back lining block is arranged on one surface of the lamination and connected with the lamination, and the sound lens is coated outside the lamination in a pouring mode. The transducer has high reliability, can effectively ensure the service life and the use effect of the transducer, and reduces the use cost. The preparation method can simplify the preparation process of the transducer and flexibly control the gap filling material in the laminated kerf on the basis of ensuring the reliability of the transducer, thereby preparing the ultrasonic transducer with excellent performance and meeting the market demand.
Description
Technical Field
The invention relates to the technical field of ultrasonic equipment, in particular to an ultrasonic transducer with joint filling materials capable of being freely selected and a preparation method thereof.
Background
Ultrasonic diagnostic equipment is receiving more and more attention in modern medical detection means due to its advantages of no radiation, wide application range, high use flexibility and the like, especially in departments of gynaecology and obstetrics, heart, abdomen and the like. However, with the development of science and technology, the image quality requirement and the functional requirement of the ultrasonic diagnostic equipment become higher and higher for clinicians, and as a key component of the ultrasonic diagnostic equipment, the performance of the ultrasonic transducer itself becomes a key factor for improving the performance of the ultrasonic diagnostic equipment.
The conventional ultrasonic transducer is mainly composed of a backing material, a piezoelectric element (generally, a piezoelectric ceramic material, PZT), a flexible circuit board (hereinafter, referred to as FPC), a matching layer, a lens, a cable assembly, and the like. The preparation process generally comprises the steps of firstly superposing a backing material, a piezoelectric element, an FPC and a matching layer together through epoxy glue, cutting into (64-256) array elements which work independently, pouring a lens material, and filling joints by using the lens material or other specially-made joint filling materials in advance to obtain the sound head. As shown in fig. 1, where 101 is an acoustic lens; 102 is a matching layer; 103 is a piezoelectric element; 104, cutting seams are formed, and acoustic lens 101 materials are poured inside the cutting seams; 105 is a backing material and 106 is a support material, which may be an aluminum block, bakelite material, or the like. And then the sound head and the cable wire assembly are assembled by using a connector and then packaged in a handle shell to obtain a finished product probe.
In the preparation process, the selection of the gap filling material has a large influence on the final performance of the product, on one hand, the gap filling material is required not to influence the physical position and the basic performance of the array elements in the curing process, and on the other hand, the difference between the acoustic impedance of the gap filling material and each layer is required to be large enough, so that the transverse crosstalk between the array elements is effectively blocked.
Through theoretical analysis, joint filling materials which can better meet the requirements are generally gas, special rubber (such as joint filling after glass beads are mixed with silicon rubber) and some liquids with low resistance (including non-solidified colloidal liquids or liquids which form gel through certain conditions and the like). At present, the conventional method for filling joints by air is generally to bond and protect the periphery of a laminated joint by using a film and then pour a lens, on one hand, the method has high requirement on process difficulty, not only ensures that the thickness and the self performance (acoustic impedance, adhesiveness and the like) of the film meet the requirement, but also ensures that the film is firmly bonded on the premise of not damaging array elements when being bonded with the laminated joint, and glue cannot permeate into the joint; on the other hand reliability is lower, and array element itself is comparatively fragile after the cutting, if pressurization bonding was difficult to guarantee this moment that array element itself does not receive the damage, generally need some special tool equipment to accomplish the bonding of film and array element, and the operation degree of difficulty is big.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and the first invention aims to provide the ultrasonic transducer with the freely-selectable gap filling material, which has high reliability, can effectively ensure the service life and the use effect of the transducer, reduces the use cost, and is beneficial to popularization and application of the ultrasonic transducer with the freely-selectable gap filling material in the technical field of ultrasonic inspection. The second invention of the present invention is to provide a method for manufacturing an ultrasonic transducer with freely selectable gap filling material, which can simplify the manufacturing process of the transducer and flexibly control the gap filling material in the laminated kerf on the basis of ensuring the reliability of the transducer, so as to manufacture the ultrasonic transducer with excellent performance and meet the market demand.
The ultrasonic transducer with the freely selectable joint filling material and the preparation method of the ultrasonic transducer with the freely selectable joint filling material are technically related to each other, and belong to the same inventive concept.
In order to achieve the first object, the ultrasonic transducer with the freely selectable joint filling material comprises a sound head assembly, a cable assembly and a handle shell, wherein the sound head assembly comprises a sound lens, a matching layer, a piezoelectric element, a back lining sheet and a back lining block, the back lining sheet, the piezoelectric element and the matching layer are stacked to form a laminated layer, a cut which is not completely cut through is formed in the direction from the back lining sheet to the matching layer, the joint filling material is filled in the cut, the back lining block is arranged on one surface of the laminated layer and connected with the laminated layer, and the sound lens is wrapped outside the laminated layer in a pouring mode.
In a preferable embodiment of the present invention, the slit is left without being cut through by 50 to 100 um.
In a preferred embodiment of the present invention, the backing block is provided with a support member on one side.
In a preferred embodiment of the present invention, the caulking material is at least one of low-temperature paraffin, a silica gel liquid containing no curing agent, and a gel material.
Compared with the prior art, the invention has the beneficial effects that: the ultrasonic transducer with the freely selectable gap filling material has high reliability, can effectively ensure the service life and the use effect of the transducer, reduces the use cost, and is beneficial to the popularization and the application of the ultrasonic transducer with the freely selectable gap filling material in the technical field of ultrasonic inspection.
In order to realize the second invention purpose, the invention adopts the following technical scheme that the preparation method of the ultrasonic transducer with freely selectable gap filling material comprises the following steps: step 1, bonding and fixing a backing sheet, a piezoelectric element and a matching layer to form a lamination; step 2, cutting from the backing sheet to the direction of the matching layer to form a cutting seam; step 3, filling the joint seams with joint filling materials; step 4, wiping the joint filling material on the surface of the backing sheet, and adhering the lamination layer with the backing block and the supporting piece through epoxy glue; step 5, after bonding, soaking the materials into a dissolving solvent to completely dissolve the joint filling materials; step 6, coating a layer of protective material layer at two ends of the cutting seam; and 7, pouring the acoustic lens to finish the preparation of the acoustic head assembly, and finishing the preparation of the probe after the acoustic head assembly, the cable assembly and the handle shell are packaged.
As a preferable aspect of the present invention, in step 1, the piezoelectric element and the matching layer are fixed by bonding with epoxy glue.
In a preferable scheme of the invention, in the step 2, 50-100 um of the cutting seams are kept and are not cut through.
In a preferred embodiment of the present invention, in step 3, the joint sealing material is at least one of low-temperature paraffin, a silica gel liquid containing no curing agent, and a gel material.
In a preferred embodiment of the present invention, after step 5, a layer of the target joint sealing material is coated around the joint.
In a preferred embodiment of the present invention, the target caulking material is at least one of silicone rubber, gel, and oil.
Compared with the prior art, the invention has the beneficial effects that: the preparation method of the ultrasonic transducer with the freely selectable joint filling material can simplify the preparation process of the transducer, flexibly control the joint filling material in the laminated kerf on the basis of ensuring the reliability of the transducer, thereby preparing the ultrasonic transducer with excellent performance and meeting the market demand.
Drawings
FIG. 1 is a schematic diagram of a prior art finished probe;
FIG. 2 is a schematic view showing a structure of cutting a laminate to form slits in step 2 of example 1;
FIG. 3 is a schematic view showing the connection of the laminate with the backing block and the support member in step 4 of embodiment 1;
FIG. 4 is a schematic view showing the structure of step 5 of example 1 after the underfill material is completely dissolved;
FIG. 5 is a schematic view showing the structure of step 6 of applying a protective material layer to both ends of a cut;
FIG. 6 is a schematic view of the seam of example 2 with a layer of the target joint compound applied around the seam.
Reference numerals are as follows: 101. an acoustic lens; 102. a matching layer; 103. a piezoelectric element; 104. cutting a seam; 105. a backing material; 106. a support material; 201. a backing sheet; 301. a caulking material; 302. a backing block; 303. a support member; 502. a layer of protective material; 601. the target caulking material.
Detailed Description
The following describes embodiments of the present invention in detail with reference to the accompanying drawings.
Example 1: as shown in fig. 2 to 5, an ultrasonic transducer with a freely selectable gap filling material comprises a sound head assembly, a cable assembly and a handle case, wherein the sound head assembly comprises a sound lens 101, a matching layer 102, a piezoelectric element 103, a backing sheet 201 and a backing block 302, the backing sheet 201, the piezoelectric element 103 and the matching layer 102 are stacked to form a laminated layer, a gap 104 which is not completely cut through is formed by cutting the backing sheet 201 towards the matching layer 102, the gap 104 is filled with a gap filling material 301, the backing block 302 is arranged on one surface of the laminated layer and connected with the laminated layer, and the sound lens 101 is covered outside the laminated layer in a pouring mode. The cutting slits 104 are left with 50-100 um without cutting through. The backing mass 302 is provided with a support member 303 on one side. The caulking material 301 is at least one of low-temperature paraffin, a silicone fluid containing no curing agent, and a gel material.
A preparation method of an ultrasonic transducer with joint filling materials capable of being freely selected adopts an air joint filling mode, and comprises the following specific steps:
step 1, adhering and fixing a backing sheet 201, a piezoelectric element 103 and a matching layer 102 together through epoxy glue to form a lamination; wherein, the thickness of the backing sheet 201 is (0.5-1) mm, and the size of the backing sheet 201 is matched with the size of the piezoelectric element 103, namely the size of the backing sheet 201 is the same as or approximately the same as the size of the piezoelectric element 103, so that the integral aesthetic degree of the lamination is ensured and the installation is convenient;
step 2, cutting from the backing sheet 201 to the direction of the matching layer 102 to form a cutting seam 104, and keeping (50-100) um not to cut through, as shown in fig. 2;
step 3, filling the joint seams 104 with the joint filling material 301, wherein the joint filling material 301 needs to have certain viscosity and fluidity, a vacuum pumping device can be used if necessary, and meanwhile, the joint filling material 301 is required to be soluble in a specific solvent, the joint filling material 301 and the specific solvent have good compatibility with each component material of the laminated layer, and the joint filling material 301 can be selected from low-temperature paraffin, silica gel liquid without a curing agent, gel materials and the like;
step 4, wiping the gap-filling material 301 on the surface of the backing sheet 201, and adhering the lamination layer with the backing block 302 and the support member 303 through epoxy glue, wherein the gap-filling material 301 has the function of ensuring that the epoxy glue cannot penetrate into the kerf 104, as shown in fig. 3;
step 5, soaking the manufactured product into a dissolving solvent so as to completely dissolve the joint filling material 301, wherein the dissolving solvent can be paraffin, silica gel liquid or gel, further, the paraffin can be acetone or isopropanol, the silica gel liquid can be specific silicone oil, the gel can be warm water or a corresponding solvent, and if necessary, ultrasonic cleaning can be performed by an ultrasonic cleaning machine so as to ensure that the joint filling material 301 in the joint seam 104 is cleaned, as shown in fig. 4;
step 6, coating a layer of protective material layer 502 at two ends of the kerf 104, wherein the protective material is required to have higher viscosity and adhesiveness, namely, the kerf 104 is sealed on the premise of ensuring that the protective material does not penetrate into the kerf 104, the acoustic lens 101 material which is subsequently poured is ensured not to penetrate into the kerf 104, and the protective material can generally be silicon rubber, UV (ultraviolet) glue, epoxy glue and the like with higher viscosity;
step 7, casting the acoustic lens 101 to obtain the acoustic head assembly, and finishing the preparation of the acoustic head assembly; and then the sound head assembly, the cable assembly and the handle shell are packaged to obtain the ultrasonic transducer, wherein air is filled in the cutting seam 104.
Example 2: as shown in fig. 6, the present embodiment adopts a specific material for caulking, and compared with embodiment 1, the different features are that: a caulking step was added after step 5 in example 1, specifically as follows: after the initial joint filling material 301 is completely dissolved and removed, a layer of target joint filling material 601 is coated around the lamination joint seam 104, the target joint filling material 601 is required to have certain viscosity and fluidity, silicon rubber, gel or oil can be selected, and the step can be omitted if air joint filling is adopted; then putting the product into a vacuumizing device for vacuumizing, ensuring the pressure in the device to be below-101 KPa, and maintaining the pressure for a period of time to ensure that the target joint filling material 601 can smoothly fill the joint seam 104; then wiping off the redundant target joint filling material 601 at the edge of the kerf 104, if the target joint filling material 601 needs to be cured, removing the redundant material at the edge after the target joint filling material 601 is cured, and obtaining the filling effect of the target joint filling material 601 in the kerf 104; the remaining steps were performed as described in relation to example 1.
The ultrasonic transducer with the freely selectable gap filling material in the embodiment has high reliability, can effectively ensure the service life and the use effect of the transducer, reduces the use cost, and is beneficial to popularization and application of the ultrasonic transducer with the freely selectable gap filling material in the technical field of ultrasonic inspection. A preparation method of an ultrasonic transducer with freely selectable gap filling materials can simplify the preparation process of the transducer and flexibly control the gap filling materials in laminated cutting seams on the basis of ensuring the reliability of the transducer, thereby preparing the ultrasonic transducer with excellent performance and meeting the market demand.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention; thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Although the reference numerals in the figures are used more here: 101. an acoustic lens; 102. a matching layer; 103. a piezoelectric element; 104. cutting a seam; 105. a backing material; 106. a support material; 201. a backing sheet; 301. a caulking material; 302. a backing block; 303. a support member; 502. a layer of protective material; 601. target joint compound, etc., but does not exclude the possibility of using other terms. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.
Claims (9)
1. An ultrasonic transducer with freely selectable gap filling materials, which is characterized in that: the acoustic head comprises an acoustic head assembly, a cable assembly and a handle shell, wherein the acoustic head assembly comprises an acoustic lens (101), a matching layer (102), a piezoelectric element (103), a backing sheet (201) and a backing block (302), the backing sheet (201), the piezoelectric element (103) and the matching layer (102) are stacked to form a lamination, a cutting seam (104) which is not completely cut through is formed by cutting the backing sheet (201) towards the matching layer (102), the cutting seam (104) is filled with a filling material (301), the backing block (302) is arranged on one surface of the lamination and connected with the lamination, and the acoustic lens (101) is wrapped outside the lamination in a pouring mode;
the preparation method of the ultrasonic transducer with the freely selected joint filling material comprises the following steps: step 1, bonding and fixing a backing sheet (201), a piezoelectric element (103) and a matching layer (102) to form a lamination; step 2, cutting from the backing sheet (201) to the direction of the matching layer (102) to form a cutting seam (104); step 3, filling the cut seams (104) with a gap filling material (301); step 4, wiping the gap filling material (301) on the surface of the backing sheet (201), and bonding the lamination layer with the backing block (302) and the support (303) through epoxy glue; step 5, after bonding, soaking the materials into a dissolving solvent to completely dissolve the joint filling materials (301); step 6, coating a layer of protective material layer (502) at two ends of the cutting seam (104); and 7, pouring the acoustic lens (101), completing the preparation of the acoustic head assembly, and completing the preparation of the probe after the acoustic head assembly, the cable assembly and the handle shell are packaged.
2. The freely selectable ultrasonic transducer of a caulking material according to claim 1, wherein: the incision (104) is not cut through after 50-100 um is left.
3. The ultrasonic transducer with freely selectable gap filling material as claimed in claim 2, wherein: the backing block (302) is provided with a support member (303) on one side.
4. The freely selectable ultrasonic transducer of a caulking material according to claim 3, wherein: the joint filling material (301) is at least one of low-temperature paraffin, silica gel liquid without curing agent and gel material.
5. The freely selectable ultrasonic transducer of a caulking material according to claim 1, wherein: in the step 1, the piezoelectric element (103) and the matching layer (102) are bonded and fixed through epoxy glue.
6. The freely selectable ultrasonic transducer of a caulking material according to claim 1, wherein: in the step 2, 50-100 um of the cutting seam (104) is kept without cutting through.
7. The ultrasonic transducer of claim 1, wherein: in the step 3, the gap filling material (301) is at least one of low-temperature paraffin, silica gel liquid without curing agent and gel material.
8. The freely selectable ultrasonic transducer of a caulking material according to claim 1, wherein: and 5, coating a layer of target joint filling material (601) on the periphery of the cutting seam (104) after the step 5 is completed.
9. The freely selectable ultrasonic transducer of a caulking material of claim 8, wherein: the target joint filling material (601) is at least one of silicon rubber, gel and oil.
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CN115138547A (en) * | 2022-06-30 | 2022-10-04 | 中国工程物理研究院电子工程研究所 | Piezoelectric micromechanical ultrasonic transducer back lining material, preparation method and filling method |
CN116714341A (en) * | 2023-06-26 | 2023-09-08 | 海底鹰深海科技股份有限公司 | Method for manufacturing backing of underwater acoustic transducer |
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CN111465455A (en) * | 2017-12-29 | 2020-07-28 | 富士胶片索诺声公司 | High frequency ultrasonic transducer |
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US7022081B2 (en) * | 2003-08-20 | 2006-04-04 | Siemens Medical Solutions Usa, Inc. | Heat sealable transducer shield and method of application |
JP6641723B2 (en) * | 2015-05-08 | 2020-02-05 | コニカミノルタ株式会社 | Ultrasonic transducer and manufacturing method thereof, ultrasonic probe, and ultrasonic imaging apparatus |
CN105411623A (en) * | 2015-12-25 | 2016-03-23 | 中国科学院深圳先进技术研究院 | Two-dimensional area array ultrasonic transducer and manufacturing method thereof |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5815156A (en) * | 1981-07-22 | 1983-01-28 | Hitachi Medical Corp | Ultrasonic probe |
CN107920797A (en) * | 2015-09-03 | 2018-04-17 | 富士胶片索诺声公司 | ultrasonic transducer assembly |
CN109569999A (en) * | 2017-09-29 | 2019-04-05 | 奥林巴斯科技美国公司 | Use aeroge as the ultrasonic transducer of packing material |
CN111465455A (en) * | 2017-12-29 | 2020-07-28 | 富士胶片索诺声公司 | High frequency ultrasonic transducer |
CN110448331A (en) * | 2019-09-12 | 2019-11-15 | 深圳市索诺瑞科技有限公司 | A kind of ultrasonic transducer of air filling |
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