CN113176455A - Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field - Google Patents
Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field Download PDFInfo
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Abstract
The invention provides a device and a method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, which are characterized by comprising an external electric field unit, a test fixture and a non-contact laser position finder, wherein the polarized ferroelectric crystal to be tested is arranged on the test fixture; the external electric field unit is electrically connected with the polarized ferroelectric single crystal to be tested through the test fixture and is used for applying alternating current with set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested; the non-contact laser position finder is used for measuring the strain capacity of the polarized ferroelectric single crystal to be measured and transmitting the collected strain capacity to the PC processor; the PC processor is used for calculating the piezoelectric constant of the polarized ferroelectric single crystal to be tested according to the received strain quantity; the device is convenient to operate and easy to control, and has high safety.
Description
Technical Field
The invention relates to the technical field of representing a ferroelectric crystal strong electric field, in particular to a device and a method for measuring piezoelectric performance parameters of a ferroelectric crystal under the conditions of the ferroelectric crystal strong electric field and the dynamic state.
Background
Ferroelectric crystals, such as lead magnesium niobate-lead titanate (PMN-PT) and lead indium niobate-lead magnesium niobate-lead titanate (PIN-PMN-PT), have been widely regarded by ferroelectric researchers around the world and have been widely used in the fields of ultrasonic transducers, piezoelectric sensors, hydrophones, ferroelectric memories, electro-optical modulators, and the like, because they have very excellent piezoelectric and electromechanical, optical, acoustical and ferroelectric properties and can achieve interconversion between various functional characteristics.
The performance parameter of the ferroelectric material under a strong electric field refers to the change of the performance parameter of the ferroelectric material when the ferroelectric is under a strong alternating current electric field, and the characteristics of the crystal can be changed when the ferroelectric material device is under a strong alternating current electric field, so that the material fails to work and the device cannot work, therefore, the performance parameter d of the ferroelectric material is measured under a strong electric field condition33、d31Is very important.
At present, a transmission line method and a quasi-static method are mainly used for calculating in a test method of a ferroelectric crystal, and a traditional test method can only measure performance parameters of a material of the ferroelectric crystal under low electric field strength and small signals, but cannot accurately obtain the performance parameters under high power in a dynamic strong electric field environment.
Disclosure of Invention
The invention aims to provide a device and a method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, and the device and the method solve the defects in the prior art.
In order to achieve the purpose, the invention adopts the technical scheme that:
the invention provides a device for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, which is characterized by comprising an external electric field unit, a test fixture and a non-contact laser position finder, wherein the polarized ferroelectric crystal to be measured is arranged on the test fixture; the external electric field unit is electrically connected with the polarized ferroelectric single crystal to be tested through the test fixture and is used for applying alternating current with set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested; the non-contact laser position finder is used for measuring the strain capacity of the polarized ferroelectric single crystal to be measured and transmitting the collected strain capacity to the PC processor; and the PC processor is used for calculating the piezoelectric constant of the polarized ferroelectric single crystal to be tested according to the received strain quantity.
Preferably, the external electric field unit comprises a signal generator, and the output end of the signal generator is connected with two ends of the electrode of the ferroelectric single crystal to be tested.
Preferably, the output end of the signal generator is connected with the input end of the power amplifier; the output end of the power amplifier is connected with two ends of the electrode of the ferroelectric single crystal to be tested.
Preferably, the power amplifier is further connected with an oscilloscope.
Preferably, the ferroelectric single crystal to be tested is fixed on a test fixture; the test fixture comprises a conductive base, a conductive thimble and an insulating support, wherein one end of the insulating support is fixed on the side wall of the conductive base, the other end of the insulating support is fixed with the conductive thimble, and the free end of the conductive thimble is electrically connected with an electrode surface on one side of the polarized ferroelectric single crystal to be tested; and the other side electrode surface of the polarized ferroelectric single crystal to be detected is fixed on the upper surface of the conductive base through solid conductive silver adhesive.
Preferably, the polarized ferroelectric single crystal to be tested is arranged on an air-suspension optical platform.
A method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field comprises the following steps:
installing the polarized ferroelectric single crystal to be tested on a test fixture;
applying alternating voltages with different electric field intensities and different frequencies to the polarized ferroelectric single crystal to be tested through the external electric field unit to enable the polarized ferroelectric single crystal to be tested to generate mechanical deformation vibration;
and measuring the mechanical deformation under variable frequency and variable electric field strength, and further calculating to obtain the piezoelectric performance parameters of the polarized ferroelectric single crystal to be measured under variable frequency and variable electric field strength.
Preferably, the method comprises the following steps:
step 1, applying alternating current with set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested through an external electric field unit to obtain the deformation quantity of the polarized ferroelectric single crystal to be tested under the frequency and voltage amplitude;
Step 4, increasing the amplitude and frequency of the alternating voltage applied to the polarized ferroelectric single crystal to be tested, and obtaining the deformation quantity of the polarized ferroelectric single crystal to be tested under the frequency and the voltage amplitude;
Compared with the prior art, the invention has the beneficial effects that:
according to the device for measuring the piezoelectric performance parameters of the ferroelectric crystal under the strong electric field, the piezoelectric property of the ferroelectric crystal can deform when voltage is applied, vertical mechanical vibration can be generated when alternating current voltage is applied, the polarized ferroelectric crystal to be measured can deform in two directions when the voltage is applied, so that the deformation quantity cannot be measured or the measurement is inaccurate, in order to overcome the difficulty, the polarized ferroelectric crystal to be measured is arranged on the test fixture, so that the deformation of the polarized ferroelectric crystal to be measured faces one direction, the measurement of the deformation quantity is convenient, and the measurement accuracy is improved; measuring the deformation quantity of the polarized ferroelectric single crystal to be measured by a non-contact laser position finder, and further ensuring the accuracy of deformation quantity measurement; further, the piezoelectric performance parameters of the polarized ferroelectric single crystal to be tested under variable frequency and variable electric field strength can be more accurately obtained; meanwhile, the device is convenient and easy to operate and high in safety, and the piezoelectric constant of the polarized ferroelectric single crystal to be tested under the strong electric field and dynamic conditions before the turning frequency can be measured by preparing the polarized ferroelectric single crystals to be tested with different physical sizes and determining the strain turning frequency point applied to the polarized ferroelectric single crystal to be tested in the test.
The invention provides a method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, which utilizes the inverse piezoelectric effect of a polarized ferroelectric crystal to be measured to apply an electric field with certain intensity to the polarization direction of the crystal so as to generate certain deformation quantity, and meanwhile, the polarized ferroelectric crystal to be measured is arranged on a test fixture, so that the deformation of the polarized ferroelectric crystal to be measured faces to one direction; the deformation quantity of the polarized ferroelectric single crystal to be tested is easier to obtain, and the accuracy is higher; and then the piezoelectric performance parameters of the crystal are obtained more accurately through the deformation amount calculation, and the piezoelectric performance test of the polarized ferroelectric single crystal to be tested under the variable frequency and variable electric field strength before the turning frequency can be completed through the determination of the turning frequency of the test sample.
Drawings
FIG. 1 is a schematic view of a measuring device according to the present invention;
FIG. 2 is a schematic structural view of a test fixture;
FIG. 3 is a flow chart of a measurement method to which the present invention relates;
FIG. 4 shows a ferroelectric crystal d according to example 133A variation graph;
FIG. 5 shows a ferroelectric crystal d according to example 131A variation graph;
FIG. 6 shows a ferroelectric crystal d according to example 233A variation graph;
FIG. 7 shows a ferroelectric crystal d according to example 231A variation graph;
FIG. 8 is a schematic illustration of the mechanical deformation of a crystal not mounted on the test fixture and mounted on the test fixture.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the device for measuring piezoelectric performance parameters of a ferroelectric crystal under strong electric field and dynamic conditions, provided by the invention, comprises a signal generator 1, a power amplifier 2, a PC processor 3, an oscilloscope 4, a non-contact laser position finder 5, a polarized ferroelectric single crystal to be tested 6, a test fixture 7 and an air-suspending optical platform 8, wherein the test fixture 7 is used for fixing the polarized ferroelectric single crystal to be tested 6; the output end of the power amplifier 2 is connected with the two ends of the electrode of the polarized ferroelectric single crystal 6 to be tested; the input end of the power amplifier 2 is connected with the output end of the signal generator 1.
The oscilloscope 4 is connected with the current and voltage monitoring output end of the power amplifier 2 and is used for detecting the voltage and current applied to two ends of the electrode of the polarized ferroelectric single crystal 6 to be detected.
The signal generator 1 is a device for providing a sinusoidal pulse signal of a certain frequency and amplitude to the power amplifier 2.
The power amplifier 2 is used for amplifying the electric signal generated by the signal generator 1 and providing alternating voltage for the polarized ferroelectric single crystal 7 to be tested.
The test jig 7 is used for connecting the polarized ferroelectric single crystal 6 to be tested with other experimental equipment to apply voltage.
As shown in fig. 2, the test fixture 7 includes a conductive base 703, a conductive thimble 701 and an insulating support 702, wherein one end of the insulating support 702 is fixed on the sidewall of the conductive base 703, the other end of the insulating support 702 is fixed with the conductive thimble 701, and the free end of the conductive thimble 701 is electrically connected with an electrode surface on one side of the polarized ferroelectric single crystal 6 to be tested; the other side electrode surface of the polarized ferroelectric single crystal 6 to be tested is fixed on the upper surface of the conductive base 703 through solid conductive silver adhesive; the conductive mount 703 is mounted on the air-bearing optical platform 8.
Because the piezoelectric property of the polarized ferroelectric single crystal to be measured can generate deformation when voltage is applied, and vertical mechanical vibration can be generated when alternating current voltage is applied, the polarized ferroelectric single crystal to be measured can generate deformation in two directions when voltage is applied, as shown in figure 8, so that the deformation quantity can not be measured or the measurement is inaccurate.
The conductive thimble 701 and the conductive base 703 are both connected to the power amplifier 2 through a wire.
As shown in FIG. 3, the method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field according to the present invention comprises the following steps;
step 1, obtaining a polarized non-pressurized ferroelectric crystal;
step 4, applying alternating voltage with smaller amplitude and frequency to the test fixture related to the step 3 to obtain the deformation amount of the test fixture under the alternating voltage; the alternating voltage of smaller amplitude and frequency is consistent with the minimum rated voltage value of the power amplifier 2;
And 6, keeping the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be tested unchanged in the step 3, increasing the frequency, and recording the frequency as the turning frequency when the deformation amount of the polarized ferroelectric single crystal 6 to be tested is increased in the process of increasing the frequency, so that the tested data is an effective value when the frequency of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be tested is less than the frequency, and the tested data is an invalid value when the frequency is more than or equal to the frequency.
The use method of the device for measuring the piezoelectric performance parameters of the ferroelectric crystal under strong electric field and dynamic conditions comprises the following steps:
s1, testing the wiring of the device according to the figure 1;
s2, cutting the ferroelectric crystal bar into test samples with proper physical size by using a dicing saw to obtain a polarized ferroelectric single crystal 6 to be tested;
s3, placing the polarized ferroelectric single crystal 6 to be tested in the test fixture 7, so that the polarized ferroelectric single crystal 6 to be tested is connected and fixed with the test fixture 7;
s4, placing the test fixture 7 with the polarized ferroelectric single crystal 6 to be tested on the air suspension optical platform 8;
s5, turning on the signal generator 1, the power amplifier 2, the PC processor 3, the oscilloscope 4 and the non-contact laser position finder;
s6, applying a certain frequency and a smaller amplitude alternating voltage to the polarized ferroelectric single crystal 6 to be tested by the signal generator 1 according to the test requirements, observing the magnitude of the voltage amplitude applied to the polarized ferroelectric single crystal 6 to be tested on the oscilloscope 4, recording the deformation quantity of the polarized ferroelectric single crystal 6 to be tested under the frequency and the voltage amplitude by the non-contact laser position finder 5, and using the formula: obtaining the electric field intensity (E) which is the amplitude (V) of the electric signal/the thickness (m) of the ferroelectric crystal, and obtaining the intensity of the electric field applied to the polarized ferroelectric single crystal 6 to be tested;
s7, calculating the changes of d33 and d31 of the ferroelectric crystal under the electric field intensity by using the formula d33 as the deformation amount/applied voltage and d31 as 0.5d 33;
s8, keeping the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be tested unchanged, increasing the frequency, recording the frequency as the turning frequency when the deformation of the ferroelectric single crystal is increased in the process of increasing the frequency, and showing that the data tested when the frequency of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be tested is less than the frequency is an effective value and is not less than the frequency is an invalid value.
S9, changing the amplitude and frequency of the voltage applied to the polarized ferroelectric single crystal 6 to be tested, and the applied voltage frequency does not exceed the turning frequency recorded in S8, and obtaining the deformation amount of the polarized ferroelectric single crystal 6 to be tested under different voltages and frequencies, thereby calculating the piezoelectric constant d of the polarized ferroelectric single crystal 6 to be tested under different electric field strengths and frequencies33、d31(ii) a change in condition;
the invention has convenient and easy control of sample measurement operation and high safety, and can complete the piezoelectric performance parameter d of the ferroelectric crystal under strong electric field and dynamic condition33、d31The measuring device applies voltage to the ferroelectric crystal through the external electric field applying device, measures the strain quantity of the ferroelectric crystal through the non-contact laser position finder, and calculates the piezoelectric constant d of the ferroelectric crystal under the electric field intensity of the frequency33，d31Keeping the electric field intensity unchanged, changing the test frequency, recording data, changing the electric field intensity, repeating the test to obtain the piezoelectric constant d of the polarized ferroelectric single crystal 6 to be tested under different frequencies and different electric field intensities33、d31. The device is convenient and easy to operate and control, has high safety, can mainly complete the test of the piezoelectric performance parameters of the polarized ferroelectric single crystal 6 to be tested under the strong electric field, and can test the polarized ferroelectric single crystal 6 to be tested as long as the test frequency is far lower than the resonance.
The PIN-PMN-PT relaxor ferroelectric single crystal sample is polarized in the [001] direction for testing.
Example 1
Piezoelectric performance parameter d of ferroelectric crystal under strong electric field and dynamic condition33、d31The method of (2), the method comprising:
step one, performing crystallographic orientation on a PIN-PMN-PT relaxation ferroelectric single crystal by using X-ray diffraction, then cutting according to the crystallographic direction to obtain [001] oriented crystals with the crystal size of 2.5mm 1mm, wherein the thickness direction of 1mm is the direction of applying an alternating electric field to the polarized ferroelectric single crystal to be tested, after the crystals are subjected to electrode treatment, polarizing the crystals along the thickness direction by using a direct-current electric field of 1kV/mm to obtain a polarized ferroelectric single crystal to be tested 6;
step two, the signal generator 1 controls the output frequency of alternating voltage to be 100Hz, the power amplifier 2 applies alternating voltage to the polarized ferroelectric single crystal to be tested 6, and the output of the power amplifier is adjusted, so that the amplitude of the voltage applied to the two ends of the polarized ferroelectric single crystal to be tested 6 is displayed on the oscilloscope 4 to be 30V;
measuring the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a non-contact laser position finder 5 while applying the alternating voltage, and recording the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a PC (personal computer) processor 3;
step four, using a formula d33Deformation amount/applied voltage, d31＝0.5d33Calculating d of the polarized ferroelectric single crystal to be tested under the electric field intensity33、d31(ii) a change in condition;
step five, keeping the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal to be tested 6 unchanged, increasing the frequency of the voltage applied to the polarized ferroelectric single crystal to be tested 6, detecting the deformation quantity of the polarized ferroelectric single crystal to be tested 6 by using a non-contact laser position finder 5, and recording the frequency of the alternating voltage applied to the polarized ferroelectric single crystal to be tested 6 at the moment as the turning frequency when the deformation quantity of the polarized ferroelectric single crystal to be tested 6 is increased; (ii) a
Step six, changing the amplitude and frequency of the voltage applied to the polarized ferroelectric single crystal 6 to be tested, and obtaining the deformation quantity of the polarized ferroelectric single crystal 6 to be tested under different voltages and frequencies, so as to calculate the piezoelectric constant d of the polarized ferroelectric single crystal 6 to be tested under different electric field strengths and frequencies33、d31(ii) a change in condition;
as shown in fig. 4 and 5.
In this case, rectangular samples of 2.5mm by 1mm in size were tested, and alternating-current electric field strengths of 30, 60, 90, 120, 150, 200V/mm were applied to the ferroelectric single crystals. The transition frequency of the test sample was 80 Khz.
Example 2
Polarized ferroelectric to be testedPiezoelectric performance parameter d of monocrystal 6 under strong electric field and dynamic condition33、d31The method of (2), the method comprising:
step one, performing crystallographic orientation on a PIN-PMN-PT relaxation ferroelectric single crystal by using X-ray diffraction, then cutting according to the crystallographic direction to obtain [001] oriented crystals with the crystal size of 2.5mm 1mm, wherein the thickness direction of 1mm is the direction of applying an alternating electric field to a polarized ferroelectric single crystal 6 to be tested, after the crystals are subjected to electrode treatment, polarizing the crystals along the thickness direction by using a 1kV/mm direct current electric field to obtain the polarized ferroelectric single crystal 6 to be tested;
step two, the signal generator 1 controls the output frequency of alternating voltage to be 100Hz, the power amplifier 2 applies alternating voltage to the polarized ferroelectric single crystal to be tested 6, and the output of the power amplifier is adjusted, so that the amplitude of the voltage applied to the two ends of the polarized ferroelectric single crystal to be tested 6 is displayed on the oscilloscope 4 to be 30V;
measuring the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a non-contact laser position finder 5 while applying the alternating voltage, and recording the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a PC (personal computer) processor 3;
step four, using a formula d33Deformation amount/applied voltage, d31＝0.5d33Calculating the polarized ferroelectric single crystal to be tested under the electric field intensityd33、d31(ii) a change in condition;
step five, keeping the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal to be tested 6 unchanged, increasing the frequency of the voltage applied to the polarized ferroelectric single crystal to be tested 6, detecting the deformation quantity of the polarized ferroelectric single crystal to be tested 6 by using a non-contact laser position finder 5, and recording the frequency of the alternating voltage applied to the polarized ferroelectric single crystal to be tested 6 at the moment as the turning frequency when the deformation quantity of the polarized ferroelectric single crystal to be tested 6 is increased;
step six, changing the amplitude and frequency of the voltage applied to the polarized ferroelectric single crystal 6 to be tested, and obtaining the deformation quantity of the polarized ferroelectric single crystal 6 to be tested under different voltages and frequencies, wherein the frequency of the applied voltage does not exceed the turning frequency recorded in the step four, thereby calculating the deformation quantity of the polarized ferroelectric single crystal 6 to be testedPiezoelectric constant d under different electric field intensity and frequency33、d31A change in situation.
As shown in fig. 6 and 7.
In this case, rectangular samples of 2mm by 1mm in size were tested, and alternating-current electric field strengths of 30, 60, 90, 120, 150, 200V/mm were applied to the ferroelectric single crystals. The transition frequency of the test sample was 150 Khz.
Claims (8)
1. The device for measuring the piezoelectric performance parameters of the ferroelectric crystal under the strong electric field is characterized by comprising an external electric field unit, a test fixture (7) and a non-contact laser position finder (5), wherein a polarized ferroelectric single crystal (6) to be tested is installed on the test fixture (7); the external electric field unit is electrically connected with the polarized ferroelectric single crystal to be tested (6) through a test fixture (7) and is used for applying alternating current with set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested (6); the non-contact laser position finder (5) is used for measuring the strain quantity of the polarized ferroelectric single crystal (6) to be measured and transmitting the collected strain quantity to the PC processor (3); the PC processor (3) is used for calculating the piezoelectric constant of the polarized ferroelectric single crystal (6) to be tested according to the received strain quantity.
2. A device for measuring the piezoelectric performance parameters of ferroelectric crystals under strong electric fields as claimed in claim 1, characterized in that the applied electric field unit comprises a signal generator (1), the output terminal of the signal generator (1) is connected to the two terminals of the electrode of the ferroelectric single crystal (6) to be measured.
3. A device for measuring piezoelectric performance parameters of ferroelectric crystals under strong electric fields as claimed in claim 2, wherein the output terminal of said signal generator (1) is connected to the input terminal of the power amplifier (2); the output end of the power amplifier (2) is connected with two ends of an electrode of the ferroelectric single crystal (6) to be tested.
4. A device for measuring the piezoelectric performance parameters of a ferroelectric crystal under a strong electric field as claimed in claim 3, wherein said power amplifier (2) is further connected with an oscilloscope (5).
5. The device for measuring the piezoelectric performance parameters of the ferroelectric crystal under the strong electric field according to claim 1, wherein the test fixture (7) comprises a conductive base (703), a conductive thimble (701) and an insulating support (702), wherein one end of the insulating support (702) is fixed on the sidewall of the conductive base (703), the other end of the insulating support (702) is fixed with the conductive thimble (701), and the free end of the conductive thimble (701) is electrically connected with an electrode surface on one side of the polarized ferroelectric single crystal to be measured (6); and the other side electrode surface of the polarized ferroelectric single crystal (6) to be tested is fixed on the upper surface of the conductive base (703) through solid conductive silver adhesive.
6. A device for measuring parameters of piezoelectric properties of ferroelectric crystals under strong electric field as in claim 1, wherein said polarized ferroelectric single crystal (6) to be measured is disposed on an air-bearing optical platform (8).
7. A method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field is characterized by comprising the following steps:
installing the polarized ferroelectric single crystal (6) to be tested on a test fixture (7);
applying alternating voltages with different electric field intensities and different frequencies to the polarized ferroelectric single crystal (6) to be tested through an external electric field unit to enable the polarized ferroelectric single crystal (6) to be tested to generate mechanical deformation vibration;
and measuring the mechanical deformation under variable frequency and variable electric field strength, and further calculating to obtain the piezoelectric performance parameters of the polarized ferroelectric single crystal (6) to be measured under variable frequency and variable electric field strength.
8. A method as claimed in claim 7, wherein the method comprises the steps of:
step 1, applying a set frequency and an alternating voltage amplitude to a polarized ferroelectric single crystal (6) to be tested through an external electric field unit to obtain the deformation quantity of the polarized ferroelectric single crystal (6) to be tested under the frequency and the alternating voltage amplitude;
step 2, keeping the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal (6) to be tested unchanged, increasing the frequency, and obtaining the deformation quantity of the polarized ferroelectric single crystal (6) to be tested corresponding to the unchanged electric field intensity and different frequencies; until the amount of deformation of the polarized ferroelectric single crystal (6) to be measured increases as the frequency increases; recording the frequency as the turning frequency of the polarized ferroelectric crystal (6) to be tested;
step 3, calculating the piezoelectric constant d of the polarized ferroelectric single crystal (6) to be tested corresponding to different frequencies under the electric field intensity according to the obtained multiple deformation quantities corresponding to different frequencies33And d31；
Step 4, changing the amplitude and frequency of the alternating voltage applied to the polarized ferroelectric single crystal (6) to be tested, and obtaining the deformation quantity of the polarized ferroelectric single crystal (6) to be tested under the frequency and the voltage amplitude;
step 5, repeating the steps 2 to 4 until the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal to be tested (6) reaches the maximum rated voltage amplitude of the external electric field unit, and the frequency applied to the polarized ferroelectric single crystal to be tested (6) is less than the turning frequency; and further obtaining the piezoelectric performance parameters of the polarized ferroelectric single crystal (6) to be tested under the conditions of variable frequency and variable electric field strength.
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