CN113173564A - High-flow NF for purification3High concentration N in electrolytic gas2F2Method (2) - Google Patents

High-flow NF for purification3High concentration N in electrolytic gas2F2Method (2) Download PDF

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CN113173564A
CN113173564A CN202110364069.2A CN202110364069A CN113173564A CN 113173564 A CN113173564 A CN 113173564A CN 202110364069 A CN202110364069 A CN 202110364069A CN 113173564 A CN113173564 A CN 113173564A
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tower
electrolytic gas
electrolytic
gas
cracking tower
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冀延治
宋富财
武建鹏
郝春辉
陈宝健
李海军
郑秋艳
申文超
张旭
罗文键
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Peric Special Gases Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens

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Abstract

The invention relates to a high-flow NF for purification3High concentration N in electrolytic gas2F2Method of (2) is NF3The technical field of purification. NF3The electrolytic gas enters the cracking tower with the diameter of 500-1500 mm and the height of 5000-15000 mm from the bottom of the tower, NF3In the process of flowing the electrolytic gas from the bottom to the top of the tower, N2F2Completely decomposing and removing at 150-350 deg.C to remove N2F2NF of3The electrolytic gas is discharged from the top of the tower, the residence time of the electrolytic gas in the cracking tower is not less than 0.5min by selecting the reasonable size of the cracking tower and the gas inflow, and the gas inflow of 100-650 kg/h and N can be realized2F2NF with content below 8 vol%3The electrolytic gas is effectively treated, and the application prospect is very wide.

Description

High-flow NF for purification3High concentration N in electrolytic gas2F2Method (2)
Technical Field
The invention relates to a high-flow NF for purification3High concentration N in electrolytic gas2F2Method of (2) is NF3The technical field of purification.
Background
NF3The gas is widely applied to the fields of high-energy laser, semiconductor technology, chemical vapor deposition and the like, and has good application prospect. Current NF3The preparation method mainly comprises the following two methods: (1) direct synthesis method: gas-gas reaction: using fluorine gas (F)2) With ammonia (NH)3) Direct chemical combination reaction to NF3(ii) a ② gas-liquid reaction: by using F2With liquid ammonia (or liquid ammonium bifluoride (NH)4HF2) Reaction, F)2With urea (NH)2CONH2) Reaction to NF3(ii) a ③ gas-solid reaction: f2React with solid ammonium aluminum fluoride to generate NF3(ii) a (2) An electrolytic method: electrolytic melting of NH4HF2HF, electrolytic NH3And HF. The direct synthesis method has the advantages that the synthesis process is not easy to control, the impurity content is high, and the chemical reaction process is complex; electrolysis of NH3The disadvantage of the HF method is NH3Is toxic gas, and easily burns skin, eyes and respiratory mucosa when contacting; electrolytic melting of NH4HF2HF only needs one step to prepare NF3And the used equipment has low production cost and high product yield, so industrial production of NF is realized3This method is often used.
Preparation of NF by electrolysis3NF in gas flowing out from gas chamber of electrolytic cell3The content is 30 vol% -70 vol%, and the rest is impuritiesA prime gas. And N is2F2Is NF3A dangerous gaseous impurity in the electrolysis gas, which is readily decomposed into nitrogen and F2，F2Easily react with reducing substances and metals, if the reducing substances and the metals are not effectively removed, explosion can be caused, and the production safety is threatened, so that N is required to be subjected to purification2F2Removal is performed.
In patent US4933158, N will be contained2F2NF of impurities3The gas passes through the zeolite filler layer at the temperature of minus 125-50 ℃, and N can be effectively removed through adsorption2F2However, the adsorption method requires repeated adsorption and desorption, consumes much energy, and N is2Large dosage and low adsorption efficiency. NF obtained by heating in patent ZL 200510085395.03N in gas2F2Cracking impurities, wherein the diameter of the pyrolyzer is 100-200 mm, the height of the tower is 1000-3000 mm, the operating pressure is 0.2-0.7 MPa, and the size of the pyrolyzer is small, so that NF (nitrogen fluoride) is obtained3The treated amount of the electrolytic gas is small, and the treated NF3N in electrolytic gas2F2The impurity concentration is (0.1-1) vol%, and the high concentration N cannot be realized2F2And effectively removing impurities.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a high-flow NF purification method3High concentration N in electrolytic gas2F2The method can completely remove NF by optimizing the size of the cracking tower and the process conditions of cracking3N content in electrolytic gas is not more than 8 vol%2F2Impurity gases, but also to NF3The treatment capacity of the electrolytic gas reaches (100-650) kg/h.
The purpose of the invention is realized by the following technical scheme.
High-flow NF for purification3High concentration N in electrolytic gas2F2The purification method comprises the following steps:
NF3the electrolytic gas enters the cracking tower with the diameter of 500-1500 mm and the height of 5000-15000 mm from the bottom of the tower, NF3The electrolysis gas flows from the bottom of the towerIn the course of being fed to the top of the column, NF3N in electrolytic gas2F2Completely decomposing and removing at 150-350 deg.C to remove N2F2NF of3Discharging electrolytic gas from the top of the tower;
the NF3The inlet flow rate of the electrolytic gas is 100-650 kg/h, NF3N in electrolytic gas2F2Is less than or equal to 8% by volume, and NF3The residence time of the electrolytic gas in the cracking tower is not less than 0.5 min.
Further, the cracking tower can be directly connected with an external electrolytic tank, or can not be directly connected with the external electrolytic tank; when the cracking tower is directly connected with an external electrolytic cell, the working pressure inside the cracking tower is (-0.05-0.01) MPa, and preferably more than or equal to-0.03 MPa and less than 0 MPa; when the cracking tower is not directly connected with an external electrolytic cell, the working pressure inside the cracking tower is (0-0.25) MPa.
Further, NF3The residence time of the electrolytic gas in the cracking tower is preferably (0.5-5) min.
Further, the diameter of the cracking tower is preferably (800-1200) mm, the height is preferably (8000-13000) mm, and correspondingly NF3The inlet flow rate of the electrolytic gas is preferably (300-500) kg/h.
Furthermore, the packing in the cracking tower is selected from conventional stainless steel, copper, nickel, Monel and other metal packing; the filler structure is not limited, and the specific surface area of the filler is preferably (100-400) m2/m3(ii) a The packing form is not limited, the packing can be regular packing or random packing, the regular packing can be in any size, and the specification or nominal size of the random packing is preferably (16-50) mm.
Further, the preferred electromagnetic heating equipment that adopts of pyrolysis tower heats, and the preferred 2 ~ 6 of number of electromagnetic heating equipment, electromagnetic heating equipment evenly distributed realizes the even heating to the pyrolysis tower in the axial of pyrolysis tower.
Furthermore, the electromagnetic heating equipment comprises an alternating current power supply, an electromagnetic heater, a heating body and a heat insulation layer;
the electromagnetic heater is located between the heating body and the heat preservation layer, the inner molded surface of the heating body is conformal with the outer molded surface of the cracking tower, the inner molded surface of the heating body is attached to the outer molded surface of the cracking tower, the outermost layer is wrapped with the heat preservation material to avoid heat loss, and the alternating current power supply supplies power to the electromagnetic heater.
Has the advantages that:
(1) the size of the cracking tower is optimized, the retention time of the nitrogen trifluoride electrolysis gas in the cracking tower is prolonged, reasonable flow is selected, and the large-flow NF can be realized at the temperature of 150-350 DEG C3High concentration N in electrolytic gas2F2Effective decomposition and removal.
(2)NF3N in electrolytic gas2F2The impurity gas is easily decomposed into nitrogen and F2，F2Easily react with reducing substances and metals, if the reducing substances and the metals are not effectively removed, explosion can be caused, and the production safety is threatened. In the invention, the cracking tower and the NF are prepared3The electrolytic cells of the electrolytic gas are directly connected or not connected, and can timely crack N in the electrolytic gas2F2Impurities, which reduce the safety risk in the downstream production link. In addition, when the reactor is directly connected with an electrolytic bath, the working pressure in the cracking tower is micro-negative pressure, so that NF (nitrogen fluoride) can be realized3The electrolytic gas normally flows between the electrolytic cell and the cracking tower.
(3) Select the electromagnetic heating mode to the heating of cracking tower, this is because electromagnetic heating produces alternating magnetic field through electric current, and the inside electron motion friction of lorentz force effect metal generates heat, and traditional resistance wire heating then relies on the electric current to pass through and makes resistance wire self generate heat, the same heating effect, and electromagnetic heating consumes the electric energy still less.
Detailed Description
The present invention is further illustrated by the following detailed description, wherein the processes are conventional unless otherwise specified, and the starting materials are commercially available from a public source without further specification.
The electromagnetic heating equipment related in the following embodiment comprises an alternating current power supply, an electromagnetic heater (containing a magnetizer), a heating body and an insulating layer;
the magnetizer can be silicon steel sheet or ferrite, and the magnetizer in the following embodiment is ferrite;
the heating element can be selected from carbon steel, stainless steel, nickel and other metals, and the heating element is selected from a carbon steel plate in the following embodiment;
the heat insulation material of the heat insulation layer is rock wool;
the electromagnetic heater is positioned between the heating body and the heat-insulating layer, the inner molded surface of the heating body is conformal with the outer molded surface of the cracking tower, the inner molded surface of the heating body is attached to the outer molded surface of the cracking tower, and the alternating current power supply supplies power to the electromagnetic heater.
Example 1
Selecting a cracking tower with the diameter of 800mm and the height of 9000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as packing in cracking tower, packing filling height is 7000mm, packing specific surface area is 300m2/m3(ii) a 4 electromagnetic heating devices are selected to heat the cracking tower, and the 4 electromagnetic heating devices are uniformly distributed on the axial direction of the cracking tower.
The cracking tower is directly connected with the electrolytic cell to output NF to the electrolytic cell3The content is 50 vol% and N2F2NF content of 5.5 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the interior of the cracking tower from the tower bottom at the gas inlet flow rates of 200kg/h, 300kg/h, 350kg/h, 400kg/h, 550kg/h and 650kg/h respectively, and NF is added3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing under-0.02 MPa and (240 +/-15) deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolytic gas were analyzed, and the results are detailed in table 1. As can be seen from the analysis results in Table 1, NF could be achieved at an intake air flow rate of (200 to 650) kg/h3N in electrolytic gas2F2Is completely decomposed, and NF3The amount of decomposition is relatively low.
TABLE 1
Figure BDA0003006702070000041
Example 2
Selecting a cracking tower with the diameter of 1000mm and the height of 10000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as packing in cracking tower, packing height is 8000mm, packing specific surface area is 300m2/m3(ii) a 4 electromagnetic heating devices are selected to heat the cracking tower, and the 4 electromagnetic heating devices are uniformly distributed on the axial direction of the cracking tower.
The cracking tower is directly connected with the electrolytic cell to output NF to the electrolytic cell3The content is 50 vol% and N2F2NF content of 5.5 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the interior of the cracking tower from the tower bottom at the gas inlet flow rates of 200kg/h, 300kg/h, 350kg/h, 400kg/h, 550kg/h and 650kg/h respectively, and NF is added3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing under-0.02 MPa and (240 +/-15) deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolytic gas were analyzed, and the results are detailed in table 2. As can be seen from the analysis results in Table 2, NF could be achieved at an intake air flow rate of (200 to 650) kg/h3N in electrolytic gas2F2Is completely decomposed, and NF3The amount of decomposition is relatively low.
TABLE 2
Figure BDA0003006702070000051
Example 3
Selecting a cracking tower with the diameter of 1200mm and the height of 13000 mm; nickel pall rings with a specification or nominal size of 25mm (purity of nickel 99.5 wt%)) As the packing inside the cracking tower, the packing filling height is 10000mm, and the packing specific surface area is 300m2/m3(ii) a 4 electromagnetic heating devices are selected to heat the cracking tower, and the 4 electromagnetic heating devices are uniformly distributed on the axial direction of the cracking tower.
The cracking tower is directly connected with the electrolytic cell to output NF to the electrolytic cell3The content is 50 vol% and N2F2NF content of 5.5 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the interior of the cracking tower from the tower bottom at the gas inlet flow rates of 200kg/h, 300kg/h, 350kg/h, 400kg/h, 550kg/h and 650kg/h respectively, and NF is added3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing under-0.02 MPa and (240 +/-15) deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolysis gas were analyzed separately and the results are detailed in table 3. As can be seen from the analysis results in Table 3, NF could be achieved at an intake air flow rate of (200 to 650) kg/h3N in electrolytic gas2F2Is completely decomposed, and NF3The amount of decomposition is relatively low.
TABLE 3
Figure BDA0003006702070000052
Figure BDA0003006702070000061
Example 4
Selecting a cracking tower with the diameter of 800mm and the height of 9000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as packing in cracking tower, packing filling height is 7000mm, packing specific surface area is 300m2/m3(ii) a 4 electromagnetic heating devices are selected to heat the cracking tower, 4The electromagnetic heating devices are uniformly distributed on the axial direction of the cracking tower.
The cracking tower is directly connected with the electrolytic cell to output NF to the electrolytic cell3The content is 48 vol% and N2F2NF with content of 8.0 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the interior of the cracking tower from the tower bottom at the gas inlet flow rates of 200kg/h, 300kg/h, 350kg/h, 400kg/h, 550kg/h and 650kg/h respectively, and NF is added3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing under-0.03 MPa and (170 +/-15) deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolysis gas were analyzed separately and the results are detailed in table 4. As can be seen from the analysis results in Table 4, NF could be achieved at an intake air flow rate of (200 to 650) kg/h3N in electrolytic gas2F2Is completely decomposed, and NF3The amount of decomposition is relatively low.
TABLE 4
Figure BDA0003006702070000062
Example 5
Selecting a cracking tower with the diameter of 800mm and the height of 9000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as packing in cracking tower, packing filling height is 7000mm, packing specific surface area is 300m2/m3(ii) a 4 electromagnetic heating devices are selected to heat the cracking tower, and the 4 electromagnetic heating devices are uniformly distributed on the axial direction of the cracking tower.
The cracking tower is directly connected with the electrolytic cell to output NF to the electrolytic cell3The content is 48 vol% and N2F2NF with content of 8.0 vol%3When the electrolytic gas is purified:
NF3200kg/h of electrolytic gas,300kg/h, 350kg/h, 400kg/h, 550kg/h and 650kg/h of inlet flow rate enter the cracking tower from the tower bottom, NF3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing at working pressure of 0MPa and working temperature of (330 +/-15) ° C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolysis gas were analyzed separately and the results are detailed in table 5. As can be seen from the analysis results in Table 5, NF could be achieved at an intake air flow rate of (200 to 650) kg/h3N in electrolytic gas2F2Is completely decomposed, and NF3The amount of decomposition is relatively low.
TABLE 5
Figure BDA0003006702070000071
Comparative example 1
Selecting a cracking tower with the diameter of 400mm and the height of 5200 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as the internal filler of the cracking tower, the filling height of the filler is 4000mm, and the specific surface area of the filler is 300m2/m3(ii) a And heating the outer wall of the cracking tower by using a resistance wire, and coating a layer of rock wool outside the resistance wire.
The cracking tower is not directly connected with the electrolytic cell and is used for discharging NF from the electrolytic cell3The content is 50 vol% and N2F2NF content of 5.4 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the cracking tower from the bottom of the tower at the inflow rates of 50kg/h, 100kg/h, 150kg/h and 180kg/h respectively, NF3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Decomposing and removing under 0.15MPa and 240 + -15 deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
By using gasPhase chromatograph to NF3The components before and after the purification of the electrolytic gas were analyzed, and the results are detailed in table 6. As can be seen from the analysis results in Table 6, the cracking tower can effectively decompose NF in the range of (50-100) kg/h of inlet air flow3N in electrolytic gas2F2When the feed flow is further increased, the capacity of the cracking tower is insufficient.
TABLE 6
Figure BDA0003006702070000081
Comparative example 2
Selecting a cracking tower with the diameter of 150mm and the height of 2000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as the internal filler of the cracking tower, the filling height of the filler is 1800mm, and the specific surface area of the filler is 300m2/m3(ii) a And heating the outer wall of the cracking tower by using a resistance wire, and coating a layer of rock wool outside the resistance wire.
The cracking tower is not directly connected with the electrolytic cell and is used for discharging NF from the electrolytic cell3The content is 50 vol% and N2F2NF content of 1.1 vol%3When the electrolytic gas is purified:
NF3the electrolytic gas enters the cracking tower from the bottom of the tower at the gas inlet flow rates of 10kg/h, 20kg/h, 30kg/h and 50kg/h respectively, NF3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Decomposing and removing under 0.15MPa and 240 + -15 deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Using gas chromatograph to NF3The components before and after the purification of the electrolytic gas were analyzed, and the results are detailed in table 7. As can be seen from the analysis results in Table 7, the cracking tower can effectively decompose NF in the range of (10 to 30) kg/h of inlet gas flow3N in electrolytic gas2F2When the feed flow is further increased, the capacity of the cracking tower is insufficient.
TABLE 7
Figure BDA0003006702070000082
Comparative example 3
Selecting a cracking tower with the diameter of 150mm and the height of 2000 mm; nickel pall ring (purity of nickel is 99.5 wt%) with specification or nominal size of 25mm is used as the internal filler of the cracking tower, the filling height of the filler is 1800mm, and the specific surface area of the filler is 300m2/m3(ii) a And heating the outer wall of the cracking tower by using a resistance wire, and coating a layer of rock wool outside the resistance wire.
The cracking tower is not directly connected with the electrolytic cell and is used for discharging NF from the electrolytic cell3The content is 50 vol% and N2F2Four kinds of NF with the contents of 0.1 vol%, 0.4 vol%, 0.8 vol% and 1.1 vol% respectively3When the electrolytic gas is purified:
four kinds of N2F2NF of different contents3Electrolytic gas respectively enters the cracking tower from the bottom of the tower at the inflow rate of 100kg/h, NF3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Decomposing and removing under 0.15MPa and 240 + -15 deg.C to remove N2F2NF of3The electrolysis gas is discharged from the top of the tower.
Four NF are subjected to gas chromatograph3The components before and after the purification of the electrolytic gas were analyzed, and the results are detailed in table 8. As is clear from the analysis results in Table 8, the content of N is (0.1 to 0.4)%2F2Within the range of impurity concentration, the cracking tower can effectively decompose NF3N in electrolytic gas2F2When N is present2F2After the impurity concentration is further increased, the treating capacity of the cracking tower is insufficient.
TABLE 8
Figure BDA0003006702070000091
Examples 1 to 5 and comparative examplesIn examples 1 to 3, on NF3The consumption of electrical energy for the purification of the electrolysis gas is detailed in table 9. According to the data of the table 9, the method of the invention has the advantages of low power consumption and capability of realizing high-flow NF3High concentration N in electrolytic gas2F2The treated air inflow rate reaches 650kg/h and the treated N is2F2The content of (A) reaches 8 vol%.
TABLE 9
Figure BDA0003006702070000092
Figure BDA0003006702070000101
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. High-flow NF for purification3High concentration N in electrolytic gas2F2The method of (2), characterized by: the purification method comprises the following steps of,
NF3the electrolytic gas enters the cracking tower with the diameter of 500-1500 mm and the height of 5000-15000 mm from the bottom of the tower, NF3NF during the process of flowing the electrolytic gas from the bottom to the top of the tower3N in electrolytic gas2F2Completely decomposing and removing at 150-350 deg.C to remove N2F2NF of3Discharging electrolytic gas from the top of the tower;
wherein, the NF3The inlet flow rate of the electrolytic gas is 100-650 kg/h, NF3N in electrolytic gas2F2Is less than or equal to 8% by volume, and NF3The residence time of the electrolytic gas in the cracking tower is not less than 0.5 min.
2. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: NF3N in electrolytic gas2F2The concentration of (A) is 1.5-8%.
3. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: NF3The residence time of the electrolytic gas in the cracking tower is 0.5-5 min.
4. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: the diameter of the cracking tower is (800-1200) mm, and the height of the cracking tower is (8000-13000) mm.
5. Purified high flow NF according to claim 43High concentration N in electrolytic gas2F2The method of (2), characterized by: the NF3The flow rate of the electrolytic gas is 300-500 kg/h.
6. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: the cracking tower is directly connected with an external electrolytic tank or is not directly connected with the external electrolytic tank;
when the cracking tower is directly connected with an external electrolytic cell, the working pressure inside the cracking tower is (-0.05-0.01) MPa; when the cracking tower is not directly connected with an external electrolytic cell, the working pressure inside the cracking tower is (0-0.25) MPa.
7. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: the specific surface area of the packing inside the cracking tower is (100-400) m2/m3。
8. Purified high flow NF according to claim 13High concentration N in electrolytic gas2F2The method of (2), characterized by: the cracking tower is heated by adopting electromagnetic heating equipment.
9. Purified high flow NF according to claim 83High concentration N in electrolytic gas2F2The method of (2), characterized by: the electromagnetic heating equipment comprises an alternating current power supply, an electromagnetic heater, a heating body and a heat insulation layer;
the electromagnetic heater is positioned between the heating body and the heat-insulating layer, the inner molded surface of the heating body is conformal with the outer molded surface of the cracking tower, the inner molded surface of the heating body is attached to the outer molded surface of the cracking tower, and the alternating current power supply supplies power to the electromagnetic heater.
10. A purified high flow NF according to claim 8 or 93High concentration N in electrolytic gas2F2The method of (2), characterized by: the number of the electromagnetic heating devices is 2-6, and the electromagnetic heating devices are uniformly distributed in the axial direction of the cracking tower.
CN202110364069.2A 2021-04-03 2021-04-03 High-flow NF for purification3High concentration N in electrolytic gas2F2Method (2) Pending CN113173564A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033460A (en) * 1998-04-29 2000-03-07 Millipore Corporation Reactive matrix for removing moisture from a fluorine containing gas and process
CN1459323A (en) * 2002-02-26 2003-12-03 皮姆－因维斯特科学生产食品股份公司 Process for purifying nitrogen trifuoride gas
CN1727279A (en) * 2005-07-27 2006-02-01 中国船舶重工集团公司第七一八研究所 Method for purifying gas of nitrogen trifluoride
US20080087166A1 (en) * 2004-07-08 2008-04-17 Hyosung Corporation Process For Refining Nitrogen Trifluoride Gas Using Alkali Earth Metal Exchanged And Impregnated Zeolite

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033460A (en) * 1998-04-29 2000-03-07 Millipore Corporation Reactive matrix for removing moisture from a fluorine containing gas and process
CN1459323A (en) * 2002-02-26 2003-12-03 皮姆－因维斯特科学生产食品股份公司 Process for purifying nitrogen trifuoride gas
US20080087166A1 (en) * 2004-07-08 2008-04-17 Hyosung Corporation Process For Refining Nitrogen Trifluoride Gas Using Alkali Earth Metal Exchanged And Impregnated Zeolite
CN1727279A (en) * 2005-07-27 2006-02-01 中国船舶重工集团公司第七一八研究所 Method for purifying gas of nitrogen trifluoride

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