CN112379131A - Hybrid waveguide, preparation method of optical microscope probe and optical microscope probe - Google Patents
Hybrid waveguide, preparation method of optical microscope probe and optical microscope probe Download PDFInfo
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- CN112379131A CN112379131A CN202011207958.XA CN202011207958A CN112379131A CN 112379131 A CN112379131 A CN 112379131A CN 202011207958 A CN202011207958 A CN 202011207958A CN 112379131 A CN112379131 A CN 112379131A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
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Abstract
The present disclosure provides an optical microscope probe comprising: the optical fiber taper and the silver nanowire are coupled to form a hybrid waveguide, the quartz tuning fork is welded and fixed on the circuit board, and the hybrid waveguide is fixed on the quartz tuning fork and the circuit board through ultraviolet glue. The overall coupling efficiency of the optical microscope probe is over 20 percent through experiments, scanning imaging is carried out on different samples in a mode of collecting the objective lens excitation probe and collecting the probe excitation objective lens, and the experimental results prove the high efficiency of the optical microscope probe and the feasibility of using the optical microscope probe for super-resolution optical imaging. The disclosure also provides a hybrid waveguide and a method of making an optical microscope probe.
Description
Technical Field
The disclosure relates to the field of surface plasmons and near-field optics, in particular to a hybrid waveguide, a preparation method of an optical microscope probe and the optical microscope probe.
Background
The commercial scanning near-field microscope probe in the prior art is mostly in an aperture type, i.e. a tapered optical fiber is coated with a metal film on the surface and then the metal film is coated on the surfaceA light outlet with small aperture, generally 50-150 nm in diameter, for collecting and emitting is reserved on the end face of the tip. When the probe is moved to the near field range of the scanned sample, the probe can interact with the evanescent wave on the surface of the substance structure, thereby breaking through the optical diffraction limit. However, the optical transmittance of such a probe is extremely low, and the efficiency is about 10 when the aperture is about 100nm-4(ii) a Whereas when the pore size is about 50nm, the efficiency is only about 10-5The application of near field probes at weak signals is greatly limited.
In recent years, various other novel scanning near-field microscope probes are reported, such as an optical antenna probe, a far-field excitation plasmon probe with a grating structure, a pyramid-type probe, and the like, but these probes have extremely high requirements on processing technology and technology, or the used optical path of the probe is relatively complex, and all have certain self-defects.
Disclosure of Invention
In order to solve the above problems in the prior art, the present disclosure provides a hybrid waveguide, a method for manufacturing an optical microscope probe, and an optical microscope probe, in which an optical fiber taper-silver nanowire hybrid waveguide capable of realizing efficient conversion between an optical mode and a surface plasmon mode is assembled with a quartz tuning fork with a circuit board to form a novel optical microscope probe, which can be directly assembled into a commercial scanning near-field optical microscope for near-field optical scanning, and simultaneously obtain a high-precision topography map of a scanned sample and a high-efficiency optical intensity map breaking through a diffraction limit.
One aspect of the present disclosure provides a method of making a hybrid waveguide, comprising:
s1, preparing the optical fiber taper and the silver nanowire, and storing the silver nanowire in an ethanol solution to form a silver nanowire solution; s2, diluting the silver nanowire solution, dripping the diluted silver nanowire solution on a silicon dioxide substrate, and selecting a silver nanowire under a microscope; s3, pushing the silver nanowires to the edge of the silicon dioxide substrate by using a three-dimensional micro-nano translation stage to control a tungsten needle, so that the silver nanowires are perpendicular to the edge direction of the silicon dioxide substrate and half of the total length of the silver nanowires are suspended; s4, coating ultraviolet glue on the surface of the coating-removed optical fiber, and then approaching the optical fiber to an optical fiber cone through a three-dimensional micro-nano translation table to make the surface of the tip of the optical fiber cone be stained with the ultraviolet glue; s5, moving the optical fiber cone to the position right below the suspended part of the silver nanowire, and then moving the optical fiber cone to enable the silver nanowire to be lifted from the silicon dioxide substrate and to be in contact coupling with the optical fiber cone; s6, irradiating the contact coupling area of the optical fiber cone and the silver nanowire by using an ultraviolet lamp to solidify ultraviolet glue to form a hybrid waveguide; s7, welding and fixing the quartz tuning fork on the circuit board, and fixing the hybrid wave on the quartz tuning fork and the circuit board through ultraviolet glue to form the optical microscope probe.
Further, S1 includes: s11, preparing an optical fiber cone by adopting a fusion-draw method, wherein the cone angle of the optical fiber cone is 3-5 degrees, and the tip diameter is 150 nm; s12, preparing silver nanowires by a chemical method, wherein the diameter of the silver nanowires is 200 nm-300 nm, and the length of the silver nanowires is 8 mu m-12 mu m.
Further, the concentration of the diluted silver nanowire solution in the S2 is 20 to 200 mu g/ml.
Furthermore, the time of irradiating the coupling area by the ultraviolet lamp in S6 is 5-8 min.
Further, the step of fixing the hybrid waveguide on the quartz tuning fork and the circuit board by ultraviolet glue in S7 includes: s71, placing the hybrid waveguide, the quartz tuning fork and the circuit board which are fixed together on a six-dimensional micro-nano adjusting table, and adjusting the pitch angle and the azimuth angle of the hybrid waveguide through a microscope to enable the hybrid waveguide to be parallel to the upper arm of the quartz tuning fork; s72, adjusting the position of the hybrid waveguide in parallel to enable the hybrid waveguide to stretch out of the quartz tuning fork and enable the hybrid waveguide to descend to be close to the upper arm position of the quartz tuning fork; s73, respectively dripping low-refractive-index ultraviolet glue on the foremost end of the upper arm of the quartz tuning fork, the middle support handle and a gasket of the circuit board by using a glue dispenser or self-made glue dispensing equipment; and S74, irradiating the glue dripping area for several minutes by adopting a nitrogen generator and an ultraviolet light source to cure the ultraviolet glue with low refractive index, and fixing the hybrid waveguide, the quartz tuning fork and the circuit board together to form the optical microscope probe.
Further, the hybrid waveguide in S72 extends out of the quartz tuning fork by a length of 300-400 μm and descends to a position 8-10 μm away from the upper arm of the quartz tuning fork.
Further, in S74, a nitrogen generator and an ultraviolet light source are adopted to irradiate the glue dripping area for 5-8 min.
Another aspect of the present disclosure provides an optical microscope probe comprising: the optical fiber taper and the silver nanowire are coupled to form a hybrid waveguide, the quartz tuning fork is welded and fixed on the circuit board, and the hybrid waveguide is fixed on the quartz tuning fork and the circuit board through ultraviolet glue.
The optical microscope probe is formed by coupling the optical fiber cone and the silver nanowire to prepare the hybrid waveguide and then assembling the hybrid waveguide, the quartz tuning fork and the circuit board together, super-resolution imaging of a light field local area in a sub-wavelength size breaking through a diffraction limit is realized, the efficiency of the whole probe can reach more than 20% experimentally and is far higher than that of a commercial probe on the market, and the efficiency can be further improved by optimizing geometrical parameters such as an optical fiber cone angle and coupling length. Theoretically, the optimal efficiency after geometric parameters such as the taper angle of the optical fiber taper and the coupling length are optimized can reach about 80%. The optical microscope probe provided by the disclosure is simple in preparation method, can be directly adapted to various commercial scanning near-field optical microscope systems, does not need additional complex optical paths, and is simple in optical path and high in compatibility for realizing sample scanning in experiments.
Drawings
For a more complete understanding of the present disclosure and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
fig. 1A and 1B schematically illustrate a flow chart for optical microscope probe preparation according to an embodiment of the present disclosure.
Fig. 2 schematically illustrates a structural electron micrograph of a hybrid waveguide according to an embodiment of the disclosure.
Fig. 3 schematically shows a bright-field CCD map (a) and a dark-field clear-light CCD map (b) of a hybrid waveguide under a microscope according to an embodiment of the disclosure.
Fig. 4 schematically illustrates an optical microscope probe structure according to an embodiment of the disclosure.
Fig. 5 schematically illustrates a graph of transmission efficiency of an optical microscope probe as a function of polarization of incident light, according to an embodiment of the present disclosure.
Fig. 6 schematically illustrates an experimental setup diagram of an optical microscope probe according to an embodiment of the present disclosure.
Fig. 7 schematically shows a probe collection intensity map (a) and an objective collection intensity map (b) for quantum dot fluorescence imaging of an optical microscope probe according to an embodiment of the present disclosure.
Fig. 8 schematically shows a topography (a) and a super-resolution optical intensity map (b) of a scanned PMMA fringe of an optical microscope probe according to an embodiment of the present disclosure.
FIG. 8(c) schematically illustrates a corresponding partial topographic signal plot under the red line segment in the topographic map (a) of a scanned PMMA stripe of an optical microscope probe according to an embodiment of the present disclosure;
fig. 8(d) schematically shows a corresponding partial optical intensity signal plot under the red line segment in the super-resolved optical intensity plot (b) of a scanned PMMA fringe of an optical microscope probe according to an embodiment of the present disclosure.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It is to be understood that such description is merely illustrative and not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It is noted that the terms used herein should be interpreted as having a meaning that is consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense.
Fig. 1A and 1B schematically illustrate a flow chart for optical microscope probe preparation according to an embodiment of the present disclosure.
As shown in fig. 1A and 1B, embodiments of the present disclosure provide a method of making an optical microscope probe structure, comprising:
s1, preparing the optical fiber taper and the silver nanowire, and storing the silver nanowire in an ethanol solution to form a silver nanowire solution.
In an embodiment of the present disclosure, the preparing of the optical fiber taper and the silver nanowire in S1 includes:
s11, preparing the optical fiber taper by adopting a fusion-draw method, wherein the taper angle of the optical fiber taper is 3-5 degrees, and the diameter of the tip is 150 nm. The cone angle is gentle, so that the focusing of light in the optical fiber cone is a heat insulation process, a high overall coupling coefficient of the light and the silver nanowire is guaranteed under the geometrical parameters, the overall coupling efficiency is up to 20% or more, and the overall coupling efficiency comprises the coupling efficiency and the light transmission efficiency of the optical fiber cone and the silver nanowire.
S12, preparing silver nanowires by a chemical method, wherein the diameter of the silver nanowires is 200 nm-300 nm, and the length of the silver nanowires is 8 mu m-12 mu m. The silver nanowires with the diameter within the range ensure the stability of the silver nanowires after being coupled with the optical fiber cone and used as probes for near-field scanning, and the geometric parameters ensure the higher coupling coefficient with the optical fiber cone.
And S2, diluting the silver nanowire solution, dripping the diluted silver nanowire solution on a silicon dioxide substrate, and selecting one silver nanowire under a microscope.
In the embodiment of the disclosure, the concentration of the diluted silver nanowire solution is 20 μ g/ml to 200 μ g/ml, the silver nanowires under the concentration are convenient for single silver nanowire operation, the concentration is too high, so that the silver nanowires are gathered and stacked together and are not good for single operation, the concentration is too low, so that the silver nanowire density is too low, the silver nanowire suitable for a probe is not easy to find, and a silver nanowire with a clean surface and brighter under the irradiation of a white light source is preferably selected under a microscope.
And S3, pushing the silver nanowires to the edge of the silicon dioxide substrate by using the three-dimensional micro-nano translation stage to control the tungsten needle, so that the silver nanowires are perpendicular to the edge direction of the silicon dioxide substrate and half of the total length of the silver nanowires are suspended.
S4, coating ultraviolet glue on the surface of the coating-removed optical fiber, and then approaching the optical fiber to the optical fiber cone through the three-dimensional micro-nano translation table to enable the surface of the tip of the optical fiber cone to be stained with the ultraviolet glue.
In the embodiment of the disclosure, a small amount of ultraviolet glue is dipped on the tip surface of the optical fiber taper to prevent the light guide loss of the optical fiber taper from increasing due to excessive dipping of the ultraviolet glue.
And S5, moving the optical fiber cone to the position right below the suspended part of the silver nanowire, and then moving the optical fiber cone to enable the silver nanowire to be lifted from the silicon dioxide substrate and to be in contact coupling with the optical fiber cone.
S6, irradiating the contact coupling area of the optical fiber cone and the silver nanowire by using an ultraviolet lamp to solidify the ultraviolet glue to form a hybrid waveguide.
In the embodiment of the disclosure, the ultraviolet lamp irradiates the contact coupling area of the optical fiber cone and the silver nanowire for 5-8 min, and waits for the ultraviolet glue to be cured, so that the adhesive force between the optical fiber cone and the silver nanowire in the coupling area is increased. And finally, the translation table can be shaken by a small amplitude to confirm that the silver nanowires cannot fall off, so that the silver nanowires and the optical fiber cone are firmly adhered together.
And S7, welding and fixing the quartz tuning fork on the circuit board, and fixing the hybrid waveguide on the quartz tuning fork and the circuit board through ultraviolet glue to form the optical microscope probe.
In the embodiment of the disclosure, the step of fixing the hybrid waveguide on the quartz tuning fork and the circuit board through the ultraviolet glue in S7 includes the steps of: s71, placing the hybrid waveguide, the quartz tuning fork and the circuit board which are fixed together on a six-dimensional micro-nano adjusting table, and adjusting the pitch angle and the azimuth angle of the hybrid waveguide through a microscope to enable the hybrid waveguide to be parallel to the upper arm of the quartz tuning fork; s72, adjusting the position of the hybrid waveguide in parallel to enable the hybrid waveguide to extend out of the quartz tuning fork and enable the hybrid waveguide to descend to be close to the upper arm position of the quartz tuning fork; s73, respectively dripping low-refractive-index ultraviolet glue on the foremost end of the upper arm of the quartz tuning fork, the middle support handle and a gasket of the circuit board by using a glue dispenser or self-made glue dispensing equipment; and S74, irradiating the glue dripping area for several minutes by adopting a nitrogen generator and an ultraviolet light source to solidify the ultraviolet glue with low refractive index, and fixing the hybrid waveguide, the quartz tuning fork and the circuit board together to form the optical microscope probe.
In the embodiment of the disclosure, the hybrid waveguide in S72 extends out of the quartz tuning fork by a length of 300-400 μm and descends to a position 8-10 μm away from the upper arm of the quartz tuning fork. The extension length is to ensure that the mechanical jitter of the waveguide itself is within an acceptable range without affecting the resonance properties of the quartz tuning fork. The height is used for fixing the optical fiber cone on the upper arm of the quartz tuning fork by a small amount of glue on the premise of ensuring that the optical fiber cone does not directly contact with the tuning fork before glue dripping so as to avoid breaking.
In the embodiment of the disclosure, 0.05 μ l to 0.1 μ l of low-refractive-index ultraviolet glue is respectively dripped on the gasket of the circuit board in S73, and the amount of the low-refractive-index ultraviolet glue is properly controlled to reduce optical scattering caused by the glue and avoid influencing the resonance characteristic of the quartz tuning fork.
In the embodiment of the disclosure, the nitrogen generator and the ultraviolet light source are adopted to irradiate the glue dripping area for 5-8 min in S74, so that the adhesive force of the hybrid waveguide, the quartz tuning fork and the circuit board is increased, and the stability of the probe is ensured during near-field scanning.
As shown in fig. 2, which is an electron microscope image of the structure of the hybrid waveguide prepared according to the embodiment of the present disclosure, it can be seen that the optical fiber taper and the silver nanowire have a good contact coupling effect, which is a close contact coupling.
FIG. 3 shows the bright-field CCD image (a) and the dark-field clear CCD image (b) of the hybrid waveguide prepared by the present disclosure under a microscope. The laser is introduced into the hybrid waveguide fiber, so that the situation that the port of the silver nanowire is lightened can be observed, the coupling effect of the hybrid waveguide is better, and the laser can be smoothly transmitted in the hybrid waveguide.
Fig. 4 schematically illustrates an optical microscope probe structure according to an embodiment of the disclosure. As can be seen from the figure, the optical microscope probe prepared by the method disclosed by the invention has better structural integrity and stability.
Fig. 5 schematically illustrates a graph of transmission efficiency of an optical microscope probe as a function of polarization of incident light according to an embodiment of the present disclosure. Under the geometric design that the cone angle of the optical fiber cone is 3-5 degrees and the coupling length of the optical fiber cone and the silver nanowire is 5 micrometers, the graph shows that the transmission efficiency of the optical microscope probe can reach 20 percent or more along with the change of the polarization angle. The cone angle of the optical fiber cone and the transmission efficiency of the optical microscope probe prepared under the geometric design size of the silver nanowire can reach 20% or more, and the difference of the realized coupling efficiency is small.
Embodiments of the present disclosure also provide an optical microscope probe, comprising: the optical fiber taper and the silver nanowire are coupled to form a hybrid waveguide, the quartz tuning fork is welded and fixed on the circuit board, and the hybrid waveguide is fixed on the quartz tuning fork and the circuit board through ultraviolet glue.
FIG. 6 schematically shows an experimental setup diagram of an optical microscope probe according to an embodiment of the present disclosure. In the embodiment of the disclosure, the optical microscope probe is applied to the scanning near-field optical microscope 5, and the shearing force feedback control mode of the optical microscope probe is utilized, so that the optical microscope probe can be stably maintained at a height of about 20nm from a sample in the scanning process, and the optical microscope probe can be suitable for four modes of objective lens excitation objective lens collection, objective lens excitation probe collection, probe excitation objective lens collection and probe excitation probe collection.
As shown in FIG. 6, the experimental device can be used for scanning the fluorescence intensity of the CdSe quantum dot sample, and can simultaneously perform two modes of objective lens excitation objective lens collection and objective lens excitation probe collection or two modes of probe excitation probe collection and probe excitation objective lens collection.
In the embodiment of the disclosure, the experimental principle of objective lens excitation objective lens collection and objective lens excitation probe collection is as follows: the pumping light is input from the optical fiber 15, enters the bicolor sheet 3 through the objective lens end 16, is subjected to laser wavelength selection processing, reflects light smaller than 567nm, transmits light larger than or equal to 567nm, transmits the reflected light after passing through the bicolor sheet 3 to the reflector 14 for reflection, then is input to the objective lens 8 to be focused on the surface of a test sample 7, then excites quantum dots to radiate fluorescence signals of about 650nm in all directions, and the fluorescence signals can be collected into the optical fiber by the objective lens and a probe at the same time for subsequent signal processing. In the objective collection, the fluorescence signal is input to the reflector 14 through the objective 8 for reflection, is input to the confocal system 11 after being subjected to laser wavelength selection processing by the dichroic filter 3 to improve the signal-to-noise ratio of the spatial filtering signal of the fluorescence signal and output, then the fluorescence signal is filtered by the optical filter 2 and only the fluorescence signal is output, and finally the fluorescence signal is subjected to signal collection through the optical fiber connected with the objective collection end 17. In the probe collection, the fluorescence signal passes through an optical microscope probe 6, then passes through a polarization resonator 4, is input into a bicolor plate 3 for laser wavelength selection processing, is input into an optical filter 2 to filter out pump light and only outputs the fluorescence signal, and finally the fluorescence signal is subjected to signal collection through an optical fiber connected with a probe collection end 1. The turnable spectroscope 13 can be turned down before scanning, so that part of laser is reflected to the CCD camera 10, the CCD camera 10 can be used for carrying out primary observation and positioning on a sample, and the spectroscope 13 is turned up after the primary observation and positioning are carried out on the sample.
In the embodiments of the present disclosure, the principle of the probe excitation probe collection and the probe excitation objective collection mode is as follows: the pumping light is input from the optical fiber, enters the bicolor 3 through the probe end 18, is subjected to laser wavelength selection processing, reflects light smaller than 567nm, transmits light larger than or equal to 567nm, transmits the reflected light passing through the bicolor 3 to the polarization resonator 4 to adjust light polarization, then is input into the optical microscope probe 6 and is focused on the surface of a test sample 7 through the optical microscope probe 6, then the quantum dots are excited to radiate fluorescence signals of about 650nm in all directions, and the fluorescence signals can be collected into the optical fiber by the probe and the objective lens at the same time to be subjected to subsequent signal processing. In probe collection, the fluorescence signal passes through a scanning near-field optical microscope 5 through an optical microscope probe 6, then passes through a polarization resonator 4, is input into a dichroic filter 3 for laser wavelength selection processing, is input into an optical filter 2 for filtering out pump light and only outputs the fluorescence signal, and finally the fluorescence signal is subjected to signal collection through an optical fiber connected with a probe collection end 1. In the objective collection, the fluorescence signal is input to the reflector 14 through the objective 8 for reflection, is input to the confocal system 11 after being subjected to laser wavelength selection processing by the dichroic filter 3 to improve the signal-to-noise ratio of the spatial filtering signal of the fluorescence signal and output the signal, then the fluorescence signal filters the pump light through the optical filter 2 and only outputs the fluorescence signal, and finally the fluorescence signal is subjected to signal collection through the optical fiber connected with the objective collection end 17. The turnable spectroscope 13 can be turned down before scanning, so that part of laser is reflected to the CCD camera 10, the CCD camera 10 can be used for carrying out primary observation and positioning on a sample, and the spectroscope 13 is turned up after the primary observation and positioning are carried out on the sample.
Fig. 7 schematically shows a comparison graph of an objective lens excitation probe collection intensity graph (a) and an objective lens excitation objective lens collection intensity graph (b) of CdSe quantum dot fluorescence imaging of an optical microscope probe according to an embodiment of the present disclosure, and it can be seen from the graphs that the two collection modes in the objective lens excitation mode are well matched in effect, and the intensity of the position with the strongest signal is in the same order of magnitude, which proves that the collection efficiency of the optical microscope probe is in the same order of magnitude as that of the objective lens.
In the embodiment of the disclosure, the experimental device is applied to transmittance imaging of a passive PMMA stripe sample, the wavelength of 808nm is input from an optical fiber and passes through the probe end 1, scanning imaging is performed in a probe excitation objective lens collection mode, and a topography and an optical intensity distribution map of the passive PMMA stripe sample can be obtained simultaneously. In addition, the transmittance imaging of the passive PMMA stripe sample can also adopt an objective lens excitation probe collection mode.
As shown in FIG. 8, the topography (a) (b) and the super-resolution optical intensity (c) (d) of the sample of the passive PMMA stripe show that the probe collection effect is good, and the full width at half maximum of the stripe obtained by optical intensity scanning is about 295nm, which breaks through the optical diffraction limit at the wavelength and realizes super-resolution imaging.
The utility model provides an optical microscope probe, it is the novel near field optical microscope probe of a high efficiency breakthrough diffraction limit, has obtained this optical microscope probe through experimental verification and has exceeded 20% overall efficiency to scan the formation of image to different samples with the mode that objective arouses probe collection and probe arouses objective collection, the experimental result proves the high efficiency of this optical microscope probe and with the feasibility of super-resolution optical imaging. The optical microscope probe is simple to prepare, the coupling efficiency can be further improved by adjusting the geometric dimensions of the optical fiber cone and the silver nanowire, the optical microscope probe can be used for super-resolution imaging, locally regulating and controlling the particle luminescence of nanometer dimensions and the like, can replace the conventional commercial near-field optical probe at present, and particularly has wide application value in the fields of near-field optical imaging, quantum optics and the like under weak signals.
Those skilled in the art will appreciate that various combinations and/or combinations of features recited in the various embodiments and/or claims of the disclosure can be made to the extent not expressly recited in the disclosure. In particular, various combinations and/or combinations of the features recited in the various embodiments and/or claims of the present disclosure may be made without departing from the spirit or teaching of the present disclosure. All such combinations and/or associations are within the scope of the present disclosure.
While the disclosure has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the disclosure as defined by the appended claims and their equivalents. Accordingly, the scope of the present disclosure should not be limited to the above-described embodiments, but should be defined not only by the appended claims, but also by equivalents thereof.
Claims (8)
1. A method for preparing an optical microscope probe is characterized by comprising the following steps:
s1, preparing an optical fiber taper and a silver nanowire, and storing the silver nanowire in an ethanol solution to form a silver nanowire solution;
s2, diluting the silver nanowire solution, dripping the diluted silver nanowire solution on a silicon dioxide substrate, and selecting a silver nanowire under a microscope;
s3, pushing the silver nanowires to the edge of the silicon dioxide substrate by using a three-dimensional micro-nano translation stage to control a tungsten needle, so that the silver nanowires are perpendicular to the edge direction of the silicon dioxide substrate and one half of the total length of the silver nanowires is suspended;
s4, coating ultraviolet glue on the surface of the coating-removed optical fiber, and enabling the coating-removed optical fiber to be close to the optical fiber cone through the three-dimensional micro-nano translation table, so that the ultraviolet glue is adhered to the tip surface of the optical fiber cone;
s5, moving the optical fiber cone to a position right below the suspended part of the silver nanowire, and then moving the optical fiber cone to enable the silver nanowire to be lifted from the silicon dioxide substrate and to be in contact coupling with the optical fiber cone;
s6, irradiating the contact coupling area of the optical fiber taper and the silver nanowire by using an ultraviolet lamp to solidify the ultraviolet glue to form a hybrid waveguide;
s7, welding and fixing the quartz tuning fork on the circuit board, and fixing the hybrid waveguide on the quartz tuning fork and the circuit board through ultraviolet glue to form the optical microscope probe.
2. The method for preparing an optical microscope probe according to claim 1, wherein the S1 includes:
s11, preparing an optical fiber cone by adopting a fusion-draw method, wherein the cone angle of the optical fiber cone is 3-5 degrees, and the diameter of the tip is 150 nm;
s12, preparing silver nanowires by a chemical method, wherein the diameter of each silver nanowire is 200-300 nm, and the length of each silver nanowire is 8-12 microns.
3. The method for preparing an optical microscope probe according to claim 1, wherein the concentration of the diluted silver nanowire solution in S2 is 20 μ g/ml to 200 μ g/ml.
4. The method for preparing an optical microscope probe according to claim 1, wherein the time for irradiating the coupling region with the ultraviolet lamp in S6 is 5-8 min.
5. The method for preparing an optical microscope probe according to claim 1 or 2, wherein the step of fixing the hybrid waveguide on the quartz tuning fork and the circuit board by ultraviolet glue in S7 comprises:
s71, placing the hybrid waveguide, the quartz tuning fork and the circuit board which are fixed together on a six-dimensional micro-nano adjusting table, and adjusting the pitch angle and the azimuth angle of the hybrid waveguide to be parallel to the upper arm of the quartz tuning fork through a microscope;
s72, parallelly adjusting the position of the hybrid waveguide to enable the hybrid waveguide to extend out of the quartz tuning fork, and enabling the hybrid waveguide to descend to be close to the upper arm position of the quartz tuning fork;
s73, respectively dripping low-refractive-index ultraviolet glue on the foremost end of the upper arm of the quartz tuning fork, the middle support handle and the gasket of the circuit board by using a glue dispenser or self-made glue dispensing equipment;
and S74, irradiating the glue dripping area for a plurality of minutes by adopting a nitrogen generator and an ultraviolet light source, and curing the ultraviolet glue with low refractive index, so that the hybrid waveguide, the quartz tuning fork and the circuit board are fixed together to form the optical microscope probe.
6. The method for preparing a scanning near-field optical microscope probe according to claim 5, wherein the hybrid waveguide in S72 extends out of the quartz tuning fork by a length of 300 μm to 400 μm and falls to a position 8 μm to 10 μm away from the upper arm of the quartz tuning fork.
7. The method for preparing a scanning near-field optical microscope probe according to claim 5, wherein in S74, a nitrogen generator and an ultraviolet light source are adopted to irradiate the glue dripping area for 5-8 min.
8. An optical microscope probe, comprising: the optical fiber cone and the silver nanowire form a hybrid waveguide through coupling, the quartz tuning fork is fixed on the circuit board in a welded mode, and the hybrid waveguide is fixed on the quartz tuning fork and the circuit board through ultraviolet glue.
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