CN111272083B - Measuring device and measuring method for off-axis quantity of off-axis parabolic mirror - Google Patents
Measuring device and measuring method for off-axis quantity of off-axis parabolic mirror Download PDFInfo
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- CN111272083B CN111272083B CN202010211633.2A CN202010211633A CN111272083B CN 111272083 B CN111272083 B CN 111272083B CN 202010211633 A CN202010211633 A CN 202010211633A CN 111272083 B CN111272083 B CN 111272083B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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Abstract
The invention relates to a device and a method for measuring off-axis quantity of an off-axis parabolic mirror, belonging to the technical field of optical component measurement. The invention aims at the off-axis parabolic mirror with the back surface perpendicular to the optical axis, based on a laser interferometer and a laser, positions of the mechanical center of the off-axis parabolic mirror and the optical axis of the parabolic mirror are respectively positioned by utilizing the linear propagation principle of light, and the measurement of the off-axis amount of the off-axis parabolic mirror is realized by measuring the distance between the two positions. The invention can conveniently, effectively, efficiently and quickly complete off-axis measurement in a general optical laboratory, and simultaneously reduces the complexity of the measuring device.
Description
Technical Field
The invention relates to a device and a method for measuring off-axis quantity of an off-axis parabolic mirror, belonging to the technical field of optical component measurement.
Background
In the development process of the space optical technology, the traditional coaxial optical system can not meet the requirements in actual production and life. An off-axis optical system is an optical system in which the optical axis of the aperture does not coincide with the mechanical center of the aperture. The off-axis optical system has been more and more emphasized by people due to its simple structure, no chromatic aberration and large aperture application range, and is widely applied in the engineering fields of radiation calibration, broadband target simulation and measurement, etc.
The parabolic mirror is a mirror with a reflecting surface being a paraboloid, and if a point light source is placed at the focus of the parabolic mirror, light is reflected by the mirror surface and then is emitted out in parallel with the main shaft of the mirror; conversely, if light parallel to the principal axis is projected onto the mirror, it will be reflected back to its focus. The off-axis parabolic mirror, as one of typical representatives of off-axis optical systems, can play a role in specific application scenes such as a collimator, laser beam expansion and light beam focusing.
In the development process of the off-axis parabolic mirror, the processing and measurement are indispensable links. Different from the traditional coaxial optical system, the off-axis quantity of the off-axis parabolic mirror is a unique and important geometric parameter, and refers to the distance between the mechanical center of the off-axis parabolic mirror and the optical axis of the parabolic mirror. The measurement of this parameter is of great importance.
At present, most off-axis measurement methods for off-axis parabolic mirrors are complex, the process is complicated, the requirements on laboratory conditions are high, and theodolites are required in many cases. In the existing measurement method, after an off-axis parabolic mirror is usually calibrated by using a laser interferometer and a plane mirror, the position of a focal point of the off-axis parabolic mirror and the positions of other feature points (such as the edge of a parabolic mirror surface) are imaged by using one or more theodolites, the positions of the theodolites at the feature points are respectively recorded, and finally, the distance between the positions is measured so as to obtain the off-axis quantity. Such methods rely heavily on the use of theodolites and are complicated to operate with theodolites during the survey. For example, CN106932179A discloses a method and an apparatus for calibrating off-axis amount of an off-axis parabolic mirror based on a grating scale and a theodolite, in which a characteristic position of the off-axis parabolic mirror is determined by the theodolite, and then the off-axis amount of the off-axis parabolic mirror is measured by matching with the grating scale, although the off-axis amount can be accurately measured, the off-axis amount is not easy to operate in many optical laboratories, and may lack required theodolite equipment, and the feasibility is low on the whole.
Disclosure of Invention
The invention aims at an off-axis parabolic mirror with the back surface perpendicular to the optical axis, and aims to design a measuring device and a measuring method for the off-axis parabolic mirror off-axis quantity, which have simple structure and are easy to operate, so that the off-axis quantity can be conveniently, effectively, efficiently and quickly measured in a general optical laboratory, and meanwhile, the complexity of the measuring device is reduced.
The innovation points of the invention are as follows: based on a laser interferometer and a laser, the positions of the mechanical center of the off-axis parabolic mirror and the optical axis of the parabolic mirror are respectively positioned by utilizing the linear propagation principle of light, and the measurement of the off-axis amount of the off-axis parabolic mirror is realized by measuring the distance between the two positions.
The technical scheme adopted by the invention is as follows:
an off-axis parabolic mirror off-axis measurement device comprises a laser interferometer, a self-collimating plane mirror, a laser and an inclined translation lifting table.
The caliber of the autocollimation plane mirror is slightly larger than that of the off-axis parabolic mirror to be measured.
The oblique translation lifting platform has two-dimensional adjusting functions of horizontal one-dimensional translation, vertical one-dimensional lifting, pitching and deflection.
The laser emits parallel light, and the diameter of the light beam is not more than 3 mm.
The laser is fixed on the inclined translation lifting platform.
The method for measuring by the device is as follows:
the method comprises the following steps: and constructing a measuring light path of the off-axis paraboloid. The main section measuring optical path comprises a laser interferometer and a self-collimating plane mirror,
the main section is a plane formed by the sub-optical axis of the off-axis parabolic mirror and the main optical axis of the optical system. The secondary section is a plane passing through the sub-optical axis of the off-axis parabolic mirror and perpendicular to the main section.
When measuring, firstly, the off-axis parabolic mirror is placed in a measuring light path, and the main section of the off-axis parabolic mirror is in a horizontal position. The laser interferometer and the self-aligning plane mirror are both positioned on one side of the reflecting surface of the off-axis paraboloid mirror. The light beam is emitted by the laser interferometer, reflected by the off-axis paraboloid, reaches the self-collimating plane mirror, and returns to the laser interferometer through the reflection path of the self-collimating plane mirror. The system wavefront obtained by the laser interferometer meets the measurement requirement through light path adjustment;
step two: the parabolic focal position is determined. And placing a flat plate with a round small hole in front of the adjusted laser interferometer, so that a light beam convergence point just passes through the small hole, and the front surface and the rear surface of the flat plate have no light spot, wherein the position of the small hole is the position of a focal point of the paraboloid.
Step three: and a tilting translation lifting platform is arranged on the other side of the off-axis parabolic mirror. The translation guide rail of the oblique translation lifting platform is parallel to the plane where the back of the off-axis parabolic mirror to be measured is located.
And fixing the laser on the inclined translation lifting platform, and opening the laser to enable the laser to emit light beams to reach the self-collimating plane mirror. The pitching and the deflection of the laser are adjusted by adjusting the two-dimensional inclination of the inclination translation lifting platform, so that light beams emitted by the laser return to a light emitting point of the laser through a self-collimating plane mirror reflection original path. And then adjusting the translation and the lifting of the inclined translation lifting platform to enable the light beam emitted by the laser to just pass through the small hole in the flat plate in the step two, recording the position A of the laser at the moment, and indicating the direction of the optical axis of the measured off-axis parabolic mirror by the light beam emitted by the laser at the moment.
Step four: and making a cross mark at the geometric center of the back of the off-axis parabolic mirror to be detected, so that the horizontal direction line and the vertical direction line of the mark are respectively positioned in the main section and the auxiliary section of the off-axis parabolic mirror. Adjusting the translation of the inclined translation lifting platform, keeping the rest unchanged, enabling the laser to emit light beams to just reach the cross mark, and recording the position B of the laser at the moment;
step five: the linear distance between A and B is measured. The distance is the off-axis amount of the off-axis paraboloid.
Advantageous effects
Compared with the prior art, the invention has the following advantages:
the device adopts the structure that the inclined translation lifting platform is matched with the laser to replace a theodolite, utilizes the directional light-emitting characteristic of the laser to realize the determination of the position of each characteristic point of the parabolic mirror, and has simple structure and convenient operation. During measurement, the off-axis amount can be obtained only by determining the positions of two times, namely the focal position of the parabolic mirror and the mechanical center position, and the method has the advantages of simple operation process, high measurement speed and high efficiency. Meanwhile, because an imaging step is not needed, the device does not need to introduce an additional structure, and the complexity of the measuring device is reduced.
Drawings
FIG. 1 is a schematic view of the measurement of the present invention.
The system comprises a laser interferometer 1, a self-aligning plane mirror 2, a laser 3 and a tilting translation lifting table 4. The auxiliary equipment is a flat plate with a round small hole.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Examples
As shown in fig. 1, an off-axis measurement device for an off-axis parabolic mirror includes a laser interferometer 1, a self-collimating mirror 2 with a caliber slightly larger than that of the parabolic mirror to be measured, a laser 3, and a tilt-shift lifting table 4, wherein the laser 3 is mounted on the tilt-shift lifting table 4. The auxiliary equipment is a flat plate with a round small hole.
The measurement steps of the device are as follows:
the method comprises the following steps: and (3) an off-axis paraboloid measuring light path is built, the main section measuring light path comprises a laser interferometer 1, a self-collimating plane mirror 2 and other equipment, wherein the caliber of the self-collimating plane mirror 2 is required to be slightly larger than that of the paraboloid mirror to be measured. The measurement light path is as shown in fig. 1, firstly, a sample of the off-axis parabolic mirror to be measured is placed in the measurement light path, the main section of the off-axis parabolic mirror is in a horizontal position, the laser interferometer 1 and the self-collimating plane mirror 2 are both positioned at one side of the reflecting surface of the off-axis parabolic mirror, a light beam is emitted by the laser interferometer 1, reflected by the off-axis parabolic mirror and reaches the self-collimating plane mirror 2, then reflected by the self-collimating plane mirror 2 and returns to the laser interferometer 1, and the system wavefront obtained by the laser interferometer 1 meets the measurement requirement through light path adjustment.
Step two: a flat plate with a round small hole is placed in front of the adjusted laser interferometer 1, so that a light beam convergence point just passes through the small hole, no light spot exists on the front surface and the rear surface of the flat plate, and the position of the small hole is the position of a focal point of the paraboloid.
Step three: and a tilt translation lifting platform 4 is arranged on the other side of the off-axis parabolic mirror, so that a translation guide rail of the tilt translation lifting platform 4 is parallel to the plane of the back surface of the parabolic mirror to be measured, and the tilt translation lifting platform 4 has two-dimensional adjusting functions of horizontal one-dimensional translation, vertical one-dimensional lifting, pitching and yawing. The laser 3 is fixed on the lifting platform, and the laser 3 is opened, so that the laser 3 emits light beams to reach the autocollimation plane mirror 2. The pitching and the yawing of the laser 3 are adjusted by adjusting the two-dimensional inclination of the inclination translation lifting platform 4, so that the laser 3 emits a light beam which is reflected by the collimating plane mirror 2 and returns to the light emitting point of the laser 3 on the original path, and then the translation and the lifting of the inclination translation lifting platform 4 are adjusted, so that the laser 3 emits a light beam which just passes through the small hole on the flat plate in the step two, the position A of the laser 3 is recorded at the moment, and the light beam emitted by the laser indicates the direction of the optical axis of the off-axis parabolic mirror to be measured at the moment.
Step four: and (3) making a cross mark at the geometric center of the back of the off-axis parabolic mirror to be measured, respectively positioning a horizontal direction line and a vertical direction line of the mark in the main section and the auxiliary section of the off-axis parabolic mirror, adjusting the translation of the inclined translation lifting table 4, keeping the rest unchanged, enabling the light beam emitted by the laser 3 to just reach the cross mark, and recording the position B of the laser 3 at the moment.
Step five: and measuring the linear distance between the A and the B, namely the off-axis amount of the off-axis paraboloid.
Claims (2)
1. An off-axis parabolic mirror off-axis measurement device is defined as an off-axis parabolic mirror with the back perpendicular to an optical axis, and is characterized by comprising a laser interferometer (1), a self-collimating plane mirror (2), a laser (3) and an inclined translation lifting table (4);
the caliber of the autocollimation plane mirror (2) is slightly larger than that of the off-axis parabolic mirror to be measured;
the oblique translation lifting platform (4) has two-dimensional adjusting functions of horizontal one-dimensional translation, vertical one-dimensional lifting, pitching and deflection;
the laser (3) emits parallel light, and the diameter of the light beam is not more than 3 mm;
the laser (3) is fixed on the inclined translation lifting platform (4);
during measurement, the off-axis parabolic mirror is placed in a measurement light path, so that the main section of the off-axis parabolic mirror is in a horizontal position; the laser interferometer (1) and the self-collimating plane mirror (2) are both positioned on one side of the reflecting surface of the off-axis paraboloid mirror; and an inclined translation lifting platform (4) is arranged on the other side of the off-axis parabolic mirror, and a translation guide rail of the inclined translation lifting platform is parallel to the plane of the back of the off-axis parabolic mirror to be measured.
2. A method of measurement of the apparatus of claim 1, comprising the steps of:
the method comprises the following steps: building a measuring light path of the off-axis paraboloid;
the main section measuring optical path comprises a laser interferometer (1) and a self-collimating plane mirror (2); the main section is a plane formed by the sub-optical axis of the off-axis parabolic mirror and the main optical axis of the optical system; the auxiliary section is a plane passing through the sub-optical axis of the off-axis parabolic mirror and perpendicular to the main section;
during measurement, firstly, the off-axis parabolic mirror is placed in a measurement light path, and the main section of the off-axis parabolic mirror is in a horizontal position; the laser interferometer (1) and the self-collimating plane mirror (2) are both positioned on one side of the reflecting surface of the off-axis paraboloid mirror; the light beam is emitted by the laser interferometer (1), reflected by the off-axis paraboloid, reaches the self-collimating mirror (2), and is reflected by the self-collimating mirror (2) to return to the laser interferometer (1) in a primary path; through light path adjustment, the system wavefront obtained by the laser interferometer (1) meets the measurement requirement;
step two: determining the position of a focal point of the paraboloid; a flat plate with a round small hole is placed in front of the adjusted laser interferometer (1), so that a light beam convergence point just passes through the small hole, no light spot exists on the front surface and the rear surface of the flat plate, and the position of the small hole is the position of a focal point of a paraboloid;
step three: an inclined translation lifting platform (4) is arranged on the other side of the off-axis parabolic mirror; the translation guide rail of the inclined translation lifting platform (4) is parallel to the plane where the back of the off-axis parabolic mirror to be measured is located;
fixing a laser (3) on an inclined translation lifting table (4), and opening the laser (3) to enable a light beam emitted by the laser (3) to reach a self-collimating plane mirror (2); the pitching and the yawing of the laser (3) are adjusted by adjusting the two-dimensional inclination of the inclination translation lifting table (4), so that a light beam emitted by the laser (3) is reflected by the self-collimating plane mirror (2) and returns to a light emitting point of the laser (3); then, the translation and the lifting of the inclined translation lifting platform (4) are adjusted, so that the light beam emitted by the laser (3) just passes through the small hole in the flat plate in the step two, the position A of the laser (3) at the moment is recorded, and the light beam emitted by the laser indicates the direction of the optical axis of the measured off-axis parabolic mirror at the moment;
step four: making a cross mark at the geometric center of the back of the off-axis parabolic mirror to be detected, and respectively positioning a horizontal direction line and a vertical direction line of the mark in the main section and the auxiliary section of the off-axis parabolic mirror; adjusting the translation of the inclined translation lifting platform (4), keeping the rest unchanged, enabling the laser (3) to emit light beams to just reach the cross mark, and recording the position B of the laser (3) at the moment;
step five: and measuring the linear distance between the A and the B, wherein the distance is the off-axis amount of the off-axis paraboloid.
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| CN112254938B (en) * | 2020-10-29 | 2023-01-17 | 中国航空工业集团公司洛阳电光设备研究所 | Off-axis parabolic mirror optical axis detection device and detection method |
| CN113446936B (en) * | 2021-06-23 | 2022-09-20 | 同济大学 | Active visual range-based variable visual axis stereo vision measurement system and method |
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| CN104764410A (en) * | 2015-03-31 | 2015-07-08 | 中国科学院上海技术物理研究所 | Device and method for measuring off-axis amount of off-axis paraboloidal mirror |
| CN104964648A (en) * | 2015-06-30 | 2015-10-07 | 中国科学院西安光学精密机械研究所 | Off-axis parabolic mirror key parameter calibration system and method |
| CN106932179A (en) * | 2017-02-24 | 2017-07-07 | 湖北航天技术研究院总体设计所 | The method and device that off-axis paraboloidal mirror is measured off axis is demarcated based on grating scale and theodolite |
| CN108955537A (en) * | 2018-08-06 | 2018-12-07 | 中国科学院西安光学精密机械研究所 | System and method capable of realizing accurate measurement of high and low point positions of off-axis reflector |
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| JP3953309B2 (en) * | 2001-12-04 | 2007-08-08 | 株式会社トプコン | Scanning electron microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104764410A (en) * | 2015-03-31 | 2015-07-08 | 中国科学院上海技术物理研究所 | Device and method for measuring off-axis amount of off-axis paraboloidal mirror |
| CN105157570A (en) * | 2015-03-31 | 2015-12-16 | 中国科学院上海技术物理研究所 | Off-axis paraboloid off-axis amount measurement device and method |
| CN104964648A (en) * | 2015-06-30 | 2015-10-07 | 中国科学院西安光学精密机械研究所 | Off-axis parabolic mirror key parameter calibration system and method |
| CN106932179A (en) * | 2017-02-24 | 2017-07-07 | 湖北航天技术研究院总体设计所 | The method and device that off-axis paraboloidal mirror is measured off axis is demarcated based on grating scale and theodolite |
| CN108955537A (en) * | 2018-08-06 | 2018-12-07 | 中国科学院西安光学精密机械研究所 | System and method capable of realizing accurate measurement of high and low point positions of off-axis reflector |
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