CN111060044A - Method for measuring thickness of welding type target by adopting water immersion type C-scan equipment - Google Patents

Method for measuring thickness of welding type target by adopting water immersion type C-scan equipment Download PDF

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CN111060044A
CN111060044A CN201911233947.6A CN201911233947A CN111060044A CN 111060044 A CN111060044 A CN 111060044A CN 201911233947 A CN201911233947 A CN 201911233947A CN 111060044 A CN111060044 A CN 111060044A
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welding
target
thickness
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CN111060044B (en
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沈月
闻明
谭志龙
王传军
许彦亭
普志辉
毕珺
管伟明
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Yunnan Precious Metals Laboratory Co ltd
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Sino Platinum Metals Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609—Display arrangements, e.g. colour displays
    • G01N29/0645—Display representation or displayed parameters, e.g. A-, B- or C-Scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N2291/0234—Metals, e.g. steel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
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Abstract

The invention discloses a method for measuring the thickness of a welding type target by adopting water immersion type C-scan equipment, aiming at the problem that the thickness of the target part after the target is welded and formed with a back plate or after magnetron sputtering cannot be directly and accurately measured on the premise of not damaging the thickness. The method comprises the steps of soaking a welding type target material and a probe in ultrapure water, operating C-scan software, measuring the sound velocity of the target material by using an ultrasonic longitudinal wave pulse reflection technology and a measurement type with the wave peak position of an interface wave as an initial point through the known thickness of a target blank, and measuring the thickness of the target material part at the moment by using the measured sound velocity of the target material after subsequent combination with a back plate and machining forming or magnetron sputtering. The error between the partial thickness of the welding type target obtained by the method and the partial thickness of the target directly measured after the welding combination is removed (namely after the target is damaged) is less than or equal to +/-5 percent, the accuracy can be ensured, the problem of thickness control of the welding type target during processing is effectively solved, the service life of the target can be effectively guided to be monitored, and the utilization rate of the welding type target is improved.

Description

Method for measuring thickness of welding type target by adopting water immersion type C-scan equipment
Technical Field
The invention relates to the technical field of welding type target material thickness measurement, in particular to an ultrasonic thickness measurement method for a welding type target material, which can be applied to target material production and process adjustment and optimization of a downstream industrial chain.
Background
The sputtering target material is used as a raw material for coating, is a special electronic material with high added value, is widely applied to the main fields of national economy such as semiconductors, magnetic recording, flat panel display, solar cells and the like, and becomes a strategic new material for supporting the manufacture of advanced components such as integrated circuits, storage and display devices, micro-electro-mechanical system sensors and the like. At present, most sputtering targets need to be welded, and the targets are cooled by a back plate; meanwhile, the thickness uniformity of the target directly influences the magnetic flux formed by the target during magnetron sputtering, so that the quality of a sputtered film is indirectly influenced, and how to effectively control the thickness uniformity of the welding type target is the key point solved by the patent. Secondly, the service life of the target sputtering is completely determined by experience values of different sputtering machines, and in most cases, the target still has a margin for continuous use, so that the important point of the patent is to determine the thickness of the lowest point of the target sputtering track and effectively improve the service life of the target, and to guide the improvement of the target sputtering service times. The ultrasonic detection technology is the first nondestructive detection technology, and has inherent advantages in measuring the thickness of the welding type target under the nondestructive condition. How to accurately and efficiently measure the thickness of the welding type target material is the key of the ultrasonic ranging technology.
Document 1 (patent document 1: 2019-CN 110006996A) discloses a method for ultrasonic thickness measurement of a metal composite material, which includes using interface substances included between adjacent materials of the composite material as an interlayer interface of two metal materials, recording propagation time of ultrasonic waves by using reflected waves of the interlayer interface as interface reflected waves during measurement, calculating thicknesses of the materials according to echo time of the interlayer interface, and summing the thicknesses of the materials to obtain the total thickness of the metal composite material. In the specific example, the sound velocity of the composite material is directly found out through a manual. The method is limited in its applicability by the type of material given in the manual.
Document 2 (national standard 1: GB/T37361-2019) discloses an ultrasonic thickness meter for measuring the thickness of a paint film, which specifically comprises the steps of determining the thickness of a single coating by using the propagation time of an ultrasonic pulse reflected at the interface part of a coating system, and combining different coating base materials related to actual application to obtain data. The contact probe is adopted during the measurement of the standard film thickness, the sensitivity of the contact probe is very high, but the test result is influenced by coupling agent factors such as different pressure degrees of the probe, whether air bubbles exist in the coupling agent and the like, and the oscillogram is not accurate so as to influence the test result.
Document 3 (patent document 3: CN 101639461A) discloses a method for detecting a target, which comprises performing ultrasonic detection on a copper and copper alloy target after diffusion welding, wherein the ultrasonic frequency is 2-8MHz, and directly measuring the internal defects of the target without damaging the target. The method mainly aims at copper and copper alloy target materials for diffusion welding, and the target material range is narrow; the distance between the ultrasonic probe frame and the top surface of the target is directly regulated to be 95mm by the water distance, and if different probes are selected, the water distance is possibly not in a probe focusing area, so that the measurement result and the precision are influenced; secondly, the measuring range is the internal defect of the target, and the measuring range of the invention is the target thickness monitoring.
Disclosure of Invention
The invention aims to provide a method for measuring the thickness of a welding target by adopting water immersion type C-scan equipment aiming at the problem that the thickness of a target part after being welded and combined with a back plate is processed and molded or after magnetron sputtering cannot be directly and accurately measured on the premise of not damaging the thickness, wherein the error range of the thickness of the welding target part obtained by the method and the thickness of the target part directly measured after welding and combining (namely after being damaged) is less than or equal to +/-5 percent, and the accuracy and the repeatability of the thickness measurement of the target part can be ensured on the basis of ensuring the integrity or continuous use of the welding target.
Another objective of the present invention is to provide a method for effectively managing and controlling the thickness of a welding-type target, and also effectively guiding the monitoring of the target service life and improving the utilization rate thereof, so as to guide the target production and the application of the process adjustment and optimization in the downstream industrial chain.
The above object of the present invention is achieved by a method for measuring the thickness of a welding type target by using a water immersion type C-scan apparatus, which comprises the following steps:
1. a method for measuring the thickness of a welding type target by adopting water immersion type C-scan equipment is characterized by comprising the following steps:
(1) soaking the welding target material and the probe in ultrapure water to ensure that the surface of the welding target material and the surface of the probe have no bubble interference, adjusting the probe to be vertical to the position to be measured of the thickness of the target material, and adjusting the water distance HWater (W)Said H isWater (W)The specific calculation formula of (2) is as follows:
Figure BDA0002304365780000021
in the formula, HWater (W)- -water distance, F- -probe focal length, CWood material-sonic velocity of welding type target material, CWater (W)Taking sound velocity at 25 ℃ as 1500s/m and thickness of the L-welding type target material;
(2) running ultrasonic C scanning flaw detection system software in a computer terminal and selecting A-type waves: by utilizing an ultrasonic longitudinal wave pulse reflection technology, taking the wave crest position of an interface wave as a starting point, and taking the bottom wave crest of a target material before welding or the first peak wave crest position of two peaks of a welding combination interface of the target material and a back plate after welding as an end point;
(3) measuring the propagation time t of ultrasonic waves in the target material1Thickness L of target material directly measured before welding1Accurately deducing the target sound velocity CWood material(ii) a The specific calculation formula is as follows:
Figure BDA0002304365780000022
wherein, CWood material-sonic velocity of welding type target material, t1Propagation time in the thickness direction of the target material before welding, L1-target portion thickness before welding;
(4) the welding type target material sound velocity C obtained in the step (3)Wood materialAnd (2) measuring the propagation time t of the ultrasonic wave in the target material part of the welding type target material by the selection principle of the A-type wave2Accurately calculating the thickness L of the welding type target material2The specific calculation formula is as follows:
Figure BDA0002304365780000031
wherein, CWood material-sonic velocity of welding type target material, t2Target thickness direction propagation time after welding, L2-the thickness of the target portion after welding.
The specific operation method for measuring the thickness of the welding type target comprises the following steps:
both the welding type target and the probe need to be soaked in ultrapure water;
the acquisition of A-type waves adopts a water immersion focusing probe (namely an ultrasonic transducer);
the probe parameters were set as: the excitation voltage is 400V; the detection mode is full wave; the impedance is low; the pulse width is matched with the probe frequency, for example, the 25M probe is selected to have a pulse width of 20ns, and the 10M probe is selected to have a pulse width of 50 ns.
Adjusting the probe to be vertical to the position to be measured of the thickness of the target (aiming at all shapes);
adjusting the optimal distance between the bottom end of the probe and the surface of the target, i.e. the water distance HWater (W)The specific calculation formula is as follows:
Figure BDA0002304365780000032
wherein HWater (W)- -water distance, F- -probe focal length, CWood material-sonic velocity of welding type target material, CWater (W)-1500 s/m (at 25 ℃) and the thickness of the L-welding type target material.
Selecting A-type waves and setting a gate: 1, the gate frames the interfacial waves, namely the waves on the surface of the target material; 2, the gate frame holds the concerned wave, namely the bottom wave of the target material before welding or the first peak of the double peaks of the welding and combining interface of the target material and the back plate after welding;
eigenvalue selection MP _ Mtime, maximum peak time: the maximum peak-to-peak time point in the gate;
adjusting the gain: the interfacial wave peak values of the A-type waves are equivalent and are all adjusted within the range of 85-95%;
according to the gate selection of the ultrasonic C scanning flaw detection system software, the propagation time t of the sound velocity in the target material can be automatically calculatedn(n＝1、 2)；
Thickness L of target portion before welding1Accurately measuring by adopting a screw micrometer to serve as a basis for deducing the sound velocity of the target by using C-scan equipment;
method for measuring sound velocity C of welding type target material by utilizing ultrasonic longitudinal wave pulse reflection technology of water immersion type C-scan equipmentWood materialAnd the thickness L of the target material formed after welding or the target material part after magnetron sputtering2；
The thickness L of the target part after the welding bonding (namely after the damage) is released is processed and formed after welding or is the target after magnetron sputtering2' precision measurement by means of micrometer screw as thickness measurement L of C-scan equipment2And (4) comparing the data to confirm the accuracy of the thickness measurement of the water immersion type C-Scan equipment.
The invention has the beneficial effects that:
the sound velocity of the material related to the method is directly and reversely deduced according to the thickness of the material to be measured, and the method can be applied to a wider range.
Compared with GB/T37361-.
The invention can measure the target thickness of the welding type target with various welding combination modes and various target materials, and the specific water distance can be specifically calculated according to the material sound velocity, the couplant sound velocity, the material thickness and the probe focal length multi-parameter to adjust the water distance so as to obtain the optimal distance between the bottom end of the probe and the surface of the target.
In a word, the method for measuring the thickness of the welding type target by the water immersion type C-scan equipment deduces the real target sound velocity (the target can be made of any material) by adopting the water immersion type C-scan equipment on the basis of directly measuring the thickness of a target blank by a micrometer caliper; and then the thickness of the target part can be accurately and indirectly measured according to the target sound velocity and the propagation time of the sound velocity in the target. The method can directly measure the thickness of the target part on the premise that the welding combination mode of the welding type target is not removed (namely, the welding type target is not damaged), and is simple and easy to operate. The method can be widely applied to measuring the thickness of the target part of the welding type target with different shapes and different welding modes, and has strong practicability.
Drawings
FIG. 1 is a simplified schematic diagram of the steps of the method of the present invention for measuring the thickness of a welding-type target using a water immersion C-scan apparatus;
FIG. 2 is a schematic view of the A scan display of the target before welding in the method of measuring the thickness of the welding-type target by the water immersion C-scan apparatus of the present invention;
FIG. 3 is a schematic view of the A-scan display of the target after welding by the method of measuring the thickness of the welded target by the water immersion type C-scan apparatus of the present invention;
fig. 4 is a schematic diagram of a target thickness measurement position selected by the embodiment of the method for measuring the thickness of the welding-type target by using the water immersion type C-scan apparatus of the present invention.
Detailed Description
The invention is further described with reference to the accompanying drawings, but the invention is not limited in any way, and any variations or modifications based on the teachings of the invention are within the scope of the invention.
The invention relates to a welding type target material, which comprises the following components:
the welding type target material comprises a plane welding part, a curved surface welding part, a special-shaped welding part and the like;
the welding and combining mode of the welding type target material comprises soft soldering, brazing, explosion welding, diffusion welding, electron beam welding, epoxy resin bonding and the like;
the target material of the welding type target comprises a metal sputtering target, an alloy sputtering target and a ceramic sputtering target;
the back plate material of the welding type target material comprises copper and copper alloy, aluminum and aluminum alloy, titanium and titanium alloy, molybdenum and molybdenum alloy, stainless steel and the like.
The specific operation method for measuring the thickness of the welding type target comprises the following steps:
the welding type target and the probe are both required to be soaked in ultrapure water, so that the surface of the welding type target and the surface of the probe are ensured to be free of bubble interference;
the acquisition of A-type waves adopts a water immersion focusing probe (namely an ultrasonic transducer);
the probe parameters were set as: the excitation voltage is 400V; the detection mode is full wave; the impedance is low; the pulse width is matched with the probe frequency, for example, the 25M probe is selected to have a pulse width of 20ns, and the 10M probe is selected to have a pulse width of 50 ns.
Adjusting the probe to be vertical to the position to be measured of the thickness of the target (aiming at all shapes);
adjusting the optimal distance between the bottom end of the probe and the surface of the target, i.e. the water distance HWater (W)The specific calculation formula is as follows:
Figure BDA0002304365780000051
wherein HWater (W)- -water distance, F- -probe focal length, CWood material-sonic velocity of welding type target material, CWater (W)-1500 s/m (at 25 ℃) and the thickness of the L-welding type target material.
Selecting A-type waves and setting a gate: 1, the gate frames the interfacial waves, namely the waves on the surface of the target material; the 2-gate frame holds the concerned wave, namely the bottom wave of the target material before welding or the first peak of the double peaks of the welding and combining interface of the target material and the back plate after welding.
Eigenvalue selection MP _ Mtime, maximum peak time: inside the gate, the maximum peak-to-peak time point.
Adjusting the gain: the interfacial wave peak values of the A-type waves are equivalent and are all adjusted within the range of 80-90%;
according to the gate selection of the ultrasonic C scanning flaw detection system software, the propagation time t of the sound velocity in the target material can be automatically calculatedn(n＝1、 2)；
Thickness L of target portion before welding1Accurately measuring by adopting a screw micrometer to serve as a basis for deducing the sound velocity of the target by using C-scan equipment;
determining the sound velocity of the target material: according to the target thickness L directly measured before welding1Measuring the propagation time t of the ultrasonic wave in the target material by the distance difference of the starting point and the ending point of the A-type wave1Specifically, as shown in fig. 2, the sound velocity C of the target is accurately calculatedWood material(ii) a The specific calculation formula is as follows:
Figure BDA0002304365780000052
wherein, CWood material-sonic velocity of welding type target material, t1Propagation time in the thickness direction of the target material before welding, L1-target thickness before welding.
Measuring the thickness of the welding type target: speed of sound C derived from preceding stepsWood materialMeasuring the propagation time t of the ultrasonic wave in the target material by the distance difference between the starting point and the ending point of the A-type wave of the target material after welding and combination2Specifically, as shown in fig. 3, the thickness L of the welding type target is accurately calculated2The specific calculation formula is as follows:
Figure BDA0002304365780000061
wherein, CWood material-sonic velocity of welding type target material, t2Target thickness direction propagation time after welding, L2-target portion thickness after welding.
The thickness L of the target part after the welding bonding (namely after the damage) is released is processed and formed after welding or is the target after magnetron sputtering2' precision measurement by means of micrometer screw as thickness measurement L of C-scan equipment2And (4) comparing the data to confirm the accuracy of the thickness measurement of the water immersion type C-Scan equipment.
The following describes a method for measuring the thickness of a target portion after the target is formed by welding with a backing plate or after magnetron sputtering according to an embodiment of the present invention.
Example 1
The invention relates to a method for measuring the thickness of a target part after the target welded and combined with a back plate is machined and molded, which comprises the following steps:
(1) c-scan equipment start-up preparation: starting a power supply, connecting a motion controller, connecting an ultrasonic instrument, starting a program, resetting the motion controller, and filling in the emission frequency of a probe;
(2) measuring the size of the target before welding: measuring the position of the 3 point (S respectively) by a micrometer0、S1、S4Three points), the specific measurement positions are shown in fig. 4.
(3) Scanning parameter setting: selecting a 15MHz probe according to the target thickness measured in the step (2), and setting the excitation voltage to be 400V; the detection mode is set to full wave; the impedance is set to low impedance; the pulse width is set to 33 ns; selecting MP _ Mtime as the characteristic value;
(4) probe adjustment: ensuring that the probe is soaked in water, adjusting the probe to be vertical to the position to be measured of the thickness of the target, and calculating the water distance HWater (W)And adjusted to that position height.
(5) Gate arrangement, A-type wave selection and propagation time t of ultrasonic waves in target material1Obtaining: 1 gate frame against the target interface wave, 2 gate frame against the target before weldingA bottom wave; adjusting the gain to enable the 1 gate interface wave peak value of the A-type wave to be 90%; and automatically calculating the propagation time t of the sound velocity in the target material1；
(6) Target sound velocity CWood materialDetermination of (1): according to the formula, when the probe is moved to the target thickness measuring position S0The target sound velocity C at the moment can be adjustedWood materialAnd respectively moving the probe to S1Dot sum S4Point-by-point target acoustic velocity CWood materialCalibrating, and finally determining the sound velocity C of the target materialWood material；
(7) Gate arrangement, A-type wave selection and propagation time t of ultrasonic waves in target material2Obtaining: 1, the gate frames target interface waves, and 2, the gate frames the first peak of the dual peaks of the welding and combining interface waves of the target and the back plate after welding; adjusting the gain to enable the 1 gate interface wave peak value of the A-type wave to be 90%; and automatically calculating the propagation time t of the sound velocity in the target material2；
(8) Measuring the thickness of the welding type target: speed of sound C derived from preceding stepsWood materialPropagation time t of ultrasonic wave in target material after welding and combination2Accurately calculating the thickness L of the welding type target material2And data acquisition is performed according to the position shown in fig. 4;
(9) the thickness of the target part is measured by a direct measurement method: removing the welding of the welding type target measured by the C-scan equipment, and removing the welding flux on the welding surface of the target; the target thickness was measured using a micrometer screw with the data acquisition position shown in figure 4.
(10) C-scan equipment thickness measurement accuracy evaluation: the data of thickness measurement by the C-scan equipment and the data of thickness measurement by the screw micrometer are compared, the directly measured data are used as standard values, and the errors of 9 positions of thickness measurement by the C-scan equipment are calculated and shown in Table 1. 3 same welding type targets are selected, the thickness of the target part is measured, and the error can be controlled within a range of +/-3%.
TABLE 1C-scan apparatus thickness measurement accuracy evaluation table
Figure BDA0002304365780000071
Note: the thickness measurements are reported in mm.
Example 2
The method for measuring the thickness of the target part after magnetron sputtering comprises the following steps:
the difference from the embodiment 1 is that,
(1) the thicknesses of different areas of the target after magnetron sputtering are different, and the thicknesses of some areas are even almost 0 after being consumed;
(2) c-scan equipment thickness measurement accuracy evaluation: 3 magnetron sputtered targets of the same welding type are selected, the thickness of the target part is measured, the data acquisition position is the same as that of the embodiment 1 (see the detailed figure 4), and the error can be controlled within the range of +/-5%.
And (3) evaluating the accuracy of the thickness measurement of the C-scan equipment by comparing the direct thickness measurement data with the thickness measurement data of the C-scan equipment: along with the reduction of the thickness, the error value is relatively larger, but the data error range is less than or equal to +/-5%, which indicates that the accuracy of the thickness measuring method can be ensured.
In summary, the invention provides a method for measuring the thickness of a welding type target by adopting water immersion type C-scan equipment, aiming at the problem that the thickness of a target part after being welded and combined with a back plate is processed and molded or after magnetron sputtering can not be directly and accurately measured under the condition of not damaging, the error range of the thickness of the welding type target part obtained by the method and the thickness of the target part directly measured after the welding and the combination is released (namely after being damaged) is less than or equal to +/-5%, and the accuracy can be ensured.
The method effectively solves the problem of thickness control of the processed welding type target material, can also effectively guide the monitoring of the service life of the target material, and improves the utilization rate of the welding type target material.
The method disclosed by the invention can be practically applied to target production and process adjustment and optimization of a downstream industrial chain.

Claims (8)

1. A method for measuring the thickness of a welding type target by adopting water immersion type C-scan equipment is characterized by comprising the following steps:
(1) soaking the welding type target material and the probe in ultrapure water to ensure thatThe surface of the welding type target material and the surface of the probe have no bubble interference, the probe is adjusted to be vertical to the position to be measured of the thickness of the target material and adjusted to the water distance HWater (W)Said H isWater (W)The specific calculation formula of (2) is as follows:
Figure FDA0002304365770000011
in the formula, HWater (W)- -water distance, F- -probe focal length, CWood material-sonic velocity of welding type target material, CWater (W)Taking sound velocity at 25 ℃ as 1500s/m and thickness of the L-welding type target material;
(2) running ultrasonic C scanning flaw detection system software in a computer terminal and selecting A-type waves: by utilizing an ultrasonic longitudinal wave pulse reflection technology, taking the wave crest position of an interface wave as a starting point, and taking the bottom wave crest of a target material before welding or the first peak wave crest position of two peaks of a welding combination interface of the target material and a back plate after welding as an end point;
(3) measuring the propagation time t of ultrasonic waves in the target material1Thickness L of target material directly measured before welding1Accurately deducing the target sound velocity CWood material(ii) a The specific calculation formula is as follows:
Figure FDA0002304365770000012
wherein, CWood material-sonic velocity of welding type target material, t1Propagation time in the thickness direction of the target material before welding, L1-target portion thickness before welding;
(4) the welding type target material sound velocity C obtained in the step (3)Wood materialAnd (2) measuring the propagation time t of the ultrasonic wave in the target material part of the welding type target material by the selection principle of the A-type wave2Accurately calculating the thickness L of the welding type target material2The specific calculation formula is as follows:
Figure FDA0002304365770000013
wherein, CWood material-sonic velocity of welding type target material, t2Target thickness direction propagation time after welding, L2-the thickness of the target portion after welding.
2. The method for measuring the thickness of a welding type target material by adopting the water immersion type C-scan equipment as claimed in claim 1, wherein the method comprises the following steps:
the thickness measured by the welding type target specifically refers to the thickness of the target part after the target is processed and molded and is welded with the back plate and the thickness of the target part after magnetron sputtering of the welding type target.
3. The method for measuring the thickness of a welding type target material by adopting the water immersion type C-scan equipment as claimed in claim 1, wherein the method comprises the following steps:
when the thickness of the welding type target material is 0-6mm, a 15MHz probe is adopted; when the diameter is 6-15mm, a 10MHz probe is adopted; when the diameter is 15-45mm, a 2.5MHz probe is adopted.
4. The method for measuring the thickness of a welding type target material by adopting the water immersion type C-scan equipment as claimed in claim 1, wherein the method comprises the following steps:
50/100/200/400V can be selected when the ultrasonic C scanning flaw detection system software is operated and the excitation voltage is selected in the computer terminal; the detection mode can select positive half-wave/negative half-wave/full-wave/radio frequency; the impedance can be selected to be low impedance or high impedance; the pulse width is matched to the probe frequency.
5. The method for measuring the thickness of a welding type target material by using a water immersion type C-scan apparatus according to any one of claims 1 to 4, wherein:
the welding type target is in a shape of a plane welding piece, a curved surface welding piece or a special-shaped welding piece.
6. The method for measuring the thickness of a welding type target material by using a water immersion type C-scan apparatus as claimed in any one of claims 1 to 4, wherein:
the welding mode of the welding type target material is soldering/brazing/explosion welding/diffusion welding/electron beam welding/epoxy resin bonding.
7. The method for measuring the thickness of a welding type target material by using a water immersion type C-scan apparatus according to any one of claims 1 to 4, wherein:
the target material of the welding type target is metal sputtering target/alloy sputtering target/ceramic sputtering target.
8. The method for measuring the thickness of a welding type target material by using a water immersion type C-scan apparatus according to any one of claims 1 to 4, wherein:
the back plate material of the welding type target material can be copper/copper alloy/aluminum alloy/titanium alloy/molybdenum alloy/stainless steel.
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