CN110893306A - Adsorption equipment and have its clarifier suitable for high pure nitrogen production of PPB level - Google Patents

Adsorption equipment and have its clarifier suitable for high pure nitrogen production of PPB level Download PDF

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Publication number
CN110893306A
CN110893306A CN201911268227.3A CN201911268227A CN110893306A CN 110893306 A CN110893306 A CN 110893306A CN 201911268227 A CN201911268227 A CN 201911268227A CN 110893306 A CN110893306 A CN 110893306A
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adsorption
adsorption layer
ppb
layer
purity nitrogen
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CN201911268227.3A
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王开兵
王君
钟小禹
刘巍
全诗林
高生明
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Guangzhou Guangzhou Steel Gas Energy Co Ltd
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Guangzhou Guangzhou Steel Gas Energy Co Ltd
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Priority to CN201911268227.3A priority Critical patent/CN110893306A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/502—Carbon monoxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention relates to the technical field of high-purity nitrogen production, in particular to an adsorption device suitable for PPB-grade high-purity nitrogen production and a purifier with the same2A first adsorption layer for O, a second adsorption layer for adsorbing CO and a method for adsorbing CO2The first adsorption layer, the second adsorption layer and the third adsorption layer are arranged inside the adsorption barrel in a stacking mode from bottom to top, and a gas distributor is arranged between the gas inlet and the first adsorption layer. The raw material air flow passes through the first adsorption layer to remove H2O, removing CO by flowing through the second adsorption layer and removing CO by flowing through the third adsorption layer2The H in the raw material air can be effectively removed by one-time purification2O impurity, CO2Impurities ofThe purifier is not required to be installed for secondary purification, so that the purposes of saving investment cost, saving device energy consumption and increasing device reliability are achieved.

Description

Adsorption equipment and have its clarifier suitable for high pure nitrogen production of PPB level
Technical Field
The invention relates to the technical field of high-purity nitrogen production, in particular to an adsorption device suitable for PPB-grade high-purity nitrogen production and a purifier with the adsorption device.
Background
With the rapid development of Chinese economy, industrial gas is one of the basic industrial factors of national economy, and the important position and the function in national economy are increasingly highlighted. Particularly, with the coming of the internet era, industries such as electronics, polysilicon and the like are widely aroused, and the demand of high-purity gas is more and more. As a large amount of high-purity gas, high-purity nitrogen is more and more widely applied in the industries of electronics, polycrystalline silicon and the like, at present, the high-purity nitrogen is mainly obtained from a nitrogen production device by adopting a cryogenic rectification method, the obtained gas often contains impurity water, CO2 and CO, the requirement on the content of impurities in the gas is more and more strict along with the higher and more high purity requirement of the high-purity gas, and a purification device is often arranged on a raw material gas for purification before nitrogen production. However, the existing nitrogen generator purification device can only adsorb water and CO2 in the air, but cannot remove impurity CO, which needs to be removed in a high-purity purifier after the product gas. The addition of a post purifier to remove CO from the feed gas results in increased capital costs, increased plant energy consumption and reduced plant reliability.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide an adsorption device suitable for PPB-grade high-purity nitrogen production and a purifier with the adsorption device, wherein impurity water, CO2 and CO are removed from raw material gas, the purifier does not need to be installed for secondary purification, the investment cost is saved, the energy consumption of the device is saved, and the reliability of the device is improved.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides an adsorption equipment suitable for high pure nitrogen production of PPB level, including adsorbing the bucket, communicate in the gas inlet of adsorbing the bottom of the barrel portion and communicate in the gas outlet of adsorbing the bucket top, be equipped with between gas inlet and the gas outlet and be used for adsorbing desorption H2A first adsorption layer for O, a second adsorption layer for adsorbing CO and a method for adsorbing CO2The first adsorption layer, the second adsorption layer and the third adsorption layer are arranged inside the adsorption barrel in a stacking mode from bottom to top, and a gas distributor is arranged between the gas inlet and the first adsorption layer.
According to the adsorption device suitable for PPB-level high-purity nitrogen production, raw material air enters from the bottom of the adsorption barrel through the gas distributor, the initial kinetic energy of the airflow is eliminated, the airflow becomes gentle, the gas is distributed uniformly in the axial direction, and the uniform airflow flows through the first adsorption layer to remove H2O, removing CO by flowing through the second adsorption layer and removing CO by flowing through the third adsorption layer2Can effectively remove H in the raw material air by one-time purification2O impurity, CO2Impurities are not required to be purified again by a purifier after installation, and the purposes of saving investment cost, saving energy consumption of the device and increasing the reliability of the device are achieved.
Further, a silk screen is separated among the first adsorption layer, the second adsorption layer and the third adsorption layer. The adsorption layers are isolated by silk screens, so that the function independence and integrity of the adsorption layers can be kept.
Furthermore, the first adsorption layer is filled with active alumina, the second adsorption layer is filled with a manganese-copper catalyst, and the third adsorption layer is filled with a molecular sieve. Activated alumina for removing H in air2The O, manganin catalyst is used for removing CO in the air, and the molecular sieve is used for removing CO in the air2Wherein, the active alumina, the manganese copper catalyst and the molecular sieve can adopt the commercial materials.
Further, a particle filtering layer is connected between the third adsorption layer and the gas outlet. The particle filter layer can effectively prevent the particle filler in the adsorption barrel from entering a downstream working section along with airflow.
Further, adsorb the bucket and install in the skirt, it is equipped with first maintenance manhole to adsorb the bucket top, the skirt lateral part is equipped with the second and overhauls the manhole. The arrangement of the first inspection manhole and the second inspection manhole is convenient for an operator to enter the tank to carry out inspection work.
Furthermore, the side parts of the first adsorption layer, the second adsorption layer and the third adsorption layer are provided with material loading and unloading hand holes, and the material loading and unloading hand holes are arranged on the wall of the adsorption barrel. The arrangement of the loading and unloading hand holes facilitates the filling and replacement of the fillers in the first adsorption layer, the second adsorption layer and the third adsorption layer.
The invention also provides a purifier suitable for producing PPB-level high-purity nitrogen, which comprises the adsorption device, the desorption device and a valve switching system for switching the adsorption state and the desorption state, wherein the valve switching system is connected between the adsorption device and the desorption device.
The purifier suitable for PPB-level high-purity nitrogen production is provided with a valve switching system for realizing mutual switching between adsorption and desorption, and the adsorption device is used for adsorbing H in air2O, CO and CO2The desorption device is used for removing the adsorption effect of the active alumina, the manganin catalyst and the molecular sieve and keeping the adsorption activity of the adsorption materials of the active alumina, the manganin catalyst and the molecular sieve so as to ensure the adsorption effect.
Furthermore, the desorption device comprises a heater, a waste nitrogen inlet communicated with one end of the heater and a regeneration gas vent communicated with one end of the adsorption device, and the other end of the heater is communicated with the other end of the adsorption device. Dirty nitrogen gas flows into in the heater and heats the back and flow into and rise the purpose that the temperature reached desorption in the absorption bucket, and the gas that the desorption process produced flows out by regeneration gas drain.
Further, the heaters and the adsorption devices are at least two groups. The arrangement of the plurality of heaters and the plurality of sets of adsorption devices is convenient for at least one set of adsorption device not to interrupt the adsorption operation when one set of adsorption device is desorbed, and the pre-purification process is stably and continuously carried out.
Further, the valve switching system comprises a plurality of groups of safety valves, and the safety valves are connected with gas vent ports. The safety valve is arranged to facilitate the connection of the pipeline and ensure the safety of the pre-purification process.
Compared with the prior art, the invention has the beneficial effects that:
according to the adsorption device for producing the PPB-grade high-purity nitrogen and the purifier with the adsorption device, the raw air flow passes through the first adsorption layer to remove H2O, removing CO by flowing through the second adsorption layer and removing CO by flowing through the third adsorption layer2Can effectively remove H in the raw material air by one-time purification2O impurity, CO2Impurities are not required to be purified again by a purifier after installation, and the purposes of saving investment cost, saving energy consumption of the device and increasing the reliability of the device are achieved.
Drawings
FIG. 1 is a schematic structural diagram of an adsorption apparatus suitable for high-purity nitrogen production from a PPB stage in the first embodiment;
FIG. 2 is a schematic diagram of a purifier suitable for high-purity nitrogen production from PPB grade according to example II;
FIG. 3 is a schematic diagram of a purifier suitable for high-purity nitrogen production from PPB grade according to example II;
in the drawings: 100-an adsorption device; 101-an adsorption bucket; 102-a gas inlet; 103-gas outlet; 104-a first adsorption layer; 105-a second adsorption layer; 106-a third adsorption layer; 107-gas distributor; 108-a wire mesh; 109-a particle filtration layer; 110-a first service manhole; 111-a second service manhole; 112-loading and unloading hand holes; 113-a lifting lug; 200-a desorption unit; 201-a heater; 202-dirty nitrogen inlet; 203-regeneration gas vent; 300-a valve switching system; 301-a first valve; 302-a second valve; 303-a third valve; 304-a fourth valve; 305-a fifth valve; 306-a sixth valve; 307-a seventh valve; 308-an eighth valve; 309-ninth valve; 310-tenth valve; 311-eleventh valve; 312-a twelfth valve; 313-thirteenth valve.
Detailed Description
The present invention will be further described with reference to the following embodiments. Wherein the showings are for the purpose of illustration only and are shown by way of illustration only and not in actual form, and are not to be construed as limiting the present patent; to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms may be understood by those skilled in the art according to specific circumstances.
Example one
Fig. 1 shows an embodiment of an adsorption apparatus 100 suitable for high-purity nitrogen production from a PPB stage according to the present invention, which includes an adsorption barrel 101, a gas inlet 102 connected to the bottom of the adsorption barrel 101, and a gas outlet 103 connected to the top of the adsorption barrel 101, wherein a gas inlet 102 and a gas outlet 103 for adsorbing and removing H are disposed between the gas inlet 102 and the gas outlet 1032A first adsorption layer 104 for O, a second adsorption layer 105 for adsorbing CO, and a first adsorbent layer for adsorbing CO2The first adsorption layer 104, the second adsorption layer 105, and the third adsorption layer 106 are stacked from bottom to top in the adsorption barrel 101, and a gas distributor 107 is provided between the gas inlet 102 and the first adsorption layer 104. The gas distributor 107 of this example was a commercially available gas distributor 107.
In the embodiment, the raw material air enters from the bottom of the adsorption barrel 101 through the gas distributor 107, and the initial kinetic energy of the air flow passing through the gas distributor 107 is eliminatedThe gas flow becomes slow, the gas is distributed uniformly in the axial direction, and the uniform gas flow passes through the first adsorption layer 104 to remove H2O, CO removal by passing through the second adsorption layer 105, and CO removal by passing through the third adsorption layer 1062Can effectively remove H in the raw material air by one-time purification2O impurity, CO2Impurities without installing a post-purifier for further purification.
In this embodiment, the first absorbent layer 104, the second absorbent layer 105, and the third absorbent layer 106 are separated by a mesh 108 to maintain the functional independence and integrity of the absorbent layers. Wherein the first adsorption layer 104 is filled with active alumina, the second adsorption layer 105 is filled with manganese copper catalyst, and the third adsorption layer 106 is filled with molecular sieve. Wherein, the active alumina, the manganese copper catalyst and the molecular sieve can adopt commercial materials. However, when it is needed to be mentioned, the filler of the first adsorption layer 104 is not limited to activated alumina, the filler of the second adsorption layer 105 is not limited to manganin catalyst, the filler of the third adsorption layer 106 is not limited to molecular sieve, and the operator can change the filler to other materials capable of adsorbing H according to practical application2O、CO、CO2The filler of (3).
In addition, the quality of the packing material affects not only the service life of the packing material but also whether the adsorption apparatus 100 can be operated in a long cycle and under a high load. In this embodiment, when filling the filler into each adsorption layer, the following steps should be performed: firstly, filling the activated alumina of the first adsorption layer 104 positioned at the bottommost layer, raking the surface to avoid the concave-convex phenomenon after filling, and fixing the silk screen 108; when the weather is fine, the manganin catalyst is filled, and when the weather is fine, the total height of the manganin catalyst and the third adsorption layer 106 is controlled not to exceed 6 meters so as to ensure that the active alumina of the bottom layer filler is not crushed, after the filling is finished, the surface is raked to avoid the concave-convex phenomenon, and the silk screen 108 is fixed; and finally, filling the molecular sieve, and flattening after filling. When the silk screen 108 is fixed, the silk screen 108 is curled upwards by 5 cm-10 cm at the position contacted with the adsorption barrel 101; if the screen 108 is not a single piece of screen 108, at least 10cm of overlap should be formed between two adjacent screens 108, and the overlapping portions are stitched with iron wire.
In order to prevent the particle packing in the adsorption bucket 101 from entering a downstream process with the gas flow, a particle filtration layer 109 is connected between the third adsorption layer 106 and the gas outlet 103 in this embodiment.
In order to facilitate the maintenance of the tank by the operator, the adsorption barrel 101 is installed on the skirt in the embodiment, and the top of the adsorption barrel 101 is provided with a first maintenance manhole 110, and the side of the skirt is provided with a second maintenance manhole 111.
In order to increase the safety of the top-loading operation of the adsorption bucket 101, the present embodiment may install a fence on the top of the adsorption bucket 101.
In order to facilitate filling and replacing of the filling material in each adsorption layer, the loading and unloading hand holes 112 are formed on the side portions of the first adsorption layer 104, the second adsorption layer 105 and the third adsorption layer 106.
In order to facilitate the overall transportation and installation of the adsorption device 100, the lifting lugs 113 are installed on two sides of the sidewall of the adsorption bucket 101 in the embodiment, so as to lift and hoist the equipment.
Example two
Fig. 2 to 3 show an embodiment of a purifier suitable for producing high-purity nitrogen in a PPB stage according to the present invention, which includes an adsorption apparatus 100, a desorption apparatus 200, and a valve switching system 300 for switching between an adsorption state and a desorption state, wherein the valve switching system 300 is connected between the adsorption apparatus 100 and the desorption apparatus 200. In this embodiment, there are at least two sets of heaters 201 and adsorption devices 100, so that at least one set of adsorption device 100 does not interrupt the adsorption operation when one set of adsorption device 100 is desorbed, thereby ensuring that the pre-purification process is stably and continuously performed.
In the embodiment, the mutual switching between the adsorption and the desorption can be realized through the arrangement of the valve switching system 300, and the adsorption device 100 is used for adsorbing H in the air2O, CO and CO2The desorption device 200 is used for removing the adsorption effect of the active alumina, the manganin catalyst and the molecular sieve and keeping the adsorption activity of the adsorption materials of the active alumina, the manganin catalyst and the molecular sieve so as to ensure the adsorption effect.
The desorption device 200 comprises a heater 201, a waste nitrogen gas inlet 202 communicated with one end of the heater 201 and a regeneration gas vent 203 communicated with one end of the adsorption device 100, wherein the other end of the heater 201 is communicated with the other end of the adsorption device 100. So set up, dirty nitrogen gas flows into in heater 201 and heats the back and flow into to the absorption bucket 101 in the rising absorption bucket 101 the temperature reach the purpose of desorption, and the gas that the desorption process produced flows out by regeneration gas vent 203.
The heaters 201 of the present embodiment are two groups, shown as a first heater 201 and a second heater 201; the adsorption devices 100 are two groups, which are respectively represented as a first adsorption device 100 and a second adsorption device 100, and the valve switching system 300 in this embodiment includes a plurality of safety valves, each of which is connected to a gas vent. In this embodiment, the number and the positions of the valves can be set to control the plurality of sets of electric heaters 201 to share one dirty nitrogen gas inlet 202, the plurality of sets of adsorption buckets 101 to share one air inlet, and to share one purified air outlet, as shown in fig. 3.
Specifically, the internal circuit of the purifier of this embodiment includes an adsorption circuit and a desorption circuit, the adsorption circuit includes a first adsorption device 100 and a second adsorption device 100 connected in parallel, the desorption circuit includes a first heater 201 and a second heater 201 connected in parallel, the valve system includes a first valve 301, a second valve 302, a third valve 303, a fourth valve 304, a fifth valve 305, a sixth valve 306, a seventh valve 307, an eighth valve 308, a ninth valve 309, a tenth valve 310, an eleventh valve 311, a twelfth valve 312, and a thirteenth valve 313, and each set of valves is connected to a gas vent:
the first adsorption device 100, the second adsorption device 100, the first valve 301, the second valve 302, the third valve 303 and the fourth valve 304 form an adsorption loop, the first valve 301 and the second valve 302 are respectively connected to input pipelines of the first adsorption device 100 and the second adsorption device 100, the third valve 303 and the fourth valve 304 are respectively connected to output pipelines of the first adsorption device 100 and the second adsorption device 100, the input pipelines of the first adsorption device 100 and the second adsorption device 100 are commonly communicated with the gas inlet 102, and the output pipelines of the first adsorption device 100 and the second adsorption device 100 are commonly communicated with the gas outlet 103.
The first heater 201, the second heater 201, the fifth valve 305, the sixth valve 306, the seventh valve 307, the eighth valve 308, the ninth valve 309, the tenth valve 310, the eleventh valve 311, the twelfth valve 312, and the thirteenth valve 313 constitute a desorption circuit, the fifth valve 305 is disposed at the dirty nitrogen gas inlet 202, the sixth valve 306 and the seventh valve 307 are respectively connected to input pipes of the first heater 201 and the second heater 201, the eighth valve 308 and the ninth valve 309 are respectively connected to output pipes of the first heater 201 and the second heater 201, the tenth valve 310 connected between the first heater 201 and the first adsorption device 100, the eleventh valve 311 connected between the second heater 201 and the second adsorption device 100, the third valve 303 and the tenth valve 310 are connected in parallel, the fourth valve 304 and the eleventh valve 311 are connected in parallel, the twelfth valve 312 is connected between the first adsorption device 100 and the regeneration gas outlet 203, a thirteenth valve 313 is connected between the second adsorption device 100 and the regeneration gas vent 203, a twelfth valve 312 is connected in parallel with the first valve 301, and the thirteenth valve 313 is connected in parallel with the second valve 302.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. The utility model provides an adsorption equipment (100) suitable for production of PPB level high-purity nitrogen, its characterized in that, including adsorption bucket (101), communicate in gas inlet (102) of adsorption bucket (101) bottom and communicate in gas outlet (103) at adsorption bucket (101) top, be equipped with between gas inlet (102) and gas outlet (103) and be used for adsorbing desorption H2A first adsorption layer (104) of O, a second adsorption layer for adsorbing COCoating (105) and method for adsorbing CO2The first adsorption layer (104), the second adsorption layer (105) and the third adsorption layer (106) are stacked inside the adsorption barrel (101) from bottom to top, and a gas distributor (107) is arranged between the gas inlet (102) and the first adsorption layer (104).
2. The adsorption device (100) suitable for high-purity nitrogen production from a PPB grade according to claim 1, wherein the first adsorption layer (104), the second adsorption layer (105) and the third adsorption layer (106) are separated by a wire mesh (108).
3. The adsorption unit (100) for high-purity nitrogen production from a PPB stage according to claim 2, wherein said first adsorption layer (104) is filled with activated alumina, said second adsorption layer (105) is filled with manganin catalyst, and said third adsorption layer (106) is filled with molecular sieve.
4. The adsorption device (100) suitable for high-purity nitrogen production from a PPB stage according to claim 1, wherein a particle filtration layer (109) is connected between the third adsorption layer (106) and the gas outlet (103).
5. The adsorption device (100) suitable for production of PPB-grade high-purity nitrogen according to claim 1, wherein the adsorption barrel (101) is installed on a skirt, the top of the adsorption barrel (101) is provided with a first manhole (110), and the side of the skirt is provided with a second manhole (111).
6. The adsorption device (100) suitable for the production of high-purity nitrogen at the PPB level according to any one of claims 1 to 5, wherein the first adsorption layer (104), the second adsorption layer (105) and the third adsorption layer (106) are provided with material loading and unloading hand holes (112) at the side parts, and the material loading and unloading hand holes (112) are provided at the wall of the adsorption barrel (101).
7. A purifier adapted for production of high-purity nitrogen from a PPB stage, comprising an adsorption apparatus (100) according to any one of claims 1 to 6, a desorption apparatus (200), and a valve switching system (300) for switching between an adsorption state and a desorption state, the valve switching system (300) being connected between the adsorption apparatus (100) and the desorption apparatus (200).
8. The purifier suitable for production of PPB-grade high-purity nitrogen according to claim 7, wherein the desorption device (200) comprises a heater (201), a dirty nitrogen inlet (202) connected to one end of the heater (201), and a regeneration gas vent (203) connected to one end of the adsorption device (100), and the other end of the heater (201) is connected to the other end of the adsorption device (100).
9. The purifier suitable for high-purity nitrogen production from a PPB stage according to claim 8, wherein the heaters (201) and the adsorption device (100) are at least two groups.
10. The purifier adapted for high-purity nitrogen production from a PPB stage according to claim 7, wherein the valve switching system (300) comprises a plurality of sets of safety valves, each connected to a gas vent.
CN201911268227.3A 2019-12-11 2019-12-11 Adsorption equipment and have its clarifier suitable for high pure nitrogen production of PPB level Pending CN110893306A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117123024A (en) * 2023-08-31 2023-11-28 广州广钢气体能源股份有限公司 Helium purifying equipment and purifying method

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Publication number Priority date Publication date Assignee Title
CN1054402A (en) * 1990-01-19 1991-09-11 波克集团股份有限公司 The cryogenic purincation of gas
CN105772019A (en) * 2016-03-22 2016-07-20 广东工业大学 Perovskite type lanthanum-manganese-copper catalyst for CO catalytic oxidization and preparation method thereof
CN205495285U (en) * 2016-03-14 2016-08-24 西安华江环保科技股份有限公司 Pressure swing adsorption ware
CN208599432U (en) * 2018-05-04 2019-03-15 苏州新思气体系统有限公司 A kind of gas purification apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1054402A (en) * 1990-01-19 1991-09-11 波克集团股份有限公司 The cryogenic purincation of gas
CN205495285U (en) * 2016-03-14 2016-08-24 西安华江环保科技股份有限公司 Pressure swing adsorption ware
CN105772019A (en) * 2016-03-22 2016-07-20 广东工业大学 Perovskite type lanthanum-manganese-copper catalyst for CO catalytic oxidization and preparation method thereof
CN208599432U (en) * 2018-05-04 2019-03-15 苏州新思气体系统有限公司 A kind of gas purification apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117123024A (en) * 2023-08-31 2023-11-28 广州广钢气体能源股份有限公司 Helium purifying equipment and purifying method

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