CN109911866A - A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment and process - Google Patents
A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment and process Download PDFInfo
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- CN109911866A CN109911866A CN201910274560.9A CN201910274560A CN109911866A CN 109911866 A CN109911866 A CN 109911866A CN 201910274560 A CN201910274560 A CN 201910274560A CN 109911866 A CN109911866 A CN 109911866A
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Abstract
The present invention relates to a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, the acid mist including setting gradually generates tank, condenser, aqueous sulfuric acid storage tank, distiller and filter, and the acid mist generates tank connection sulfur trioxide storage tank and pure water tank.Energy conservation and environmental protection of the present invention, on the basis of being the clean sulfuric acid obtained after washing, the method for removing moisture removal, to obtain the concentrated sulfuric acid, so only requiring heat to 100 DEG C or so, so that it may moisture evaporation be come out, so as to greatly reduce energy consumption.
Description
Technical field
The present invention relates to gas washing in SA production technical fields, and in particular to a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment
And technique.
Background technique
With the rapid development of semiconductor technology, the requirement to ultra-clean and high pure chemical reagent is higher and higher, at integrated circuit (IC)
Process in, ultra-clean and high pure chemical reagent is mainly used for the cleaning and etching of chip and wafer surface, purity and cleanliness pair
The yield rate of integrated circuit, electrical property and reliability have very great influence, and ultra-clean and high-purity sulphuric acid is as a kind of important
Micro-electronics chemicals have been widely used for semiconductor, the cleaning in the process of large scale integrated circuit, the side such as dry
Face.
Currently, ultra-clean and high-purity sulphuric acid usually using the sulfuric acid of technical grade as raw material carry out rectifying purifying and filter purification and
At rectifying is the main method of industry purification sulfuric acid.But the ultra-clean and high-purity sulphuric acid for micro-electronics chemicals industry is to wherein
Impurity content, particulate matter size and anion-content require relatively harsh.The limitation of PPT rank is arrived.To in product
Dust granules liquid clearly require, existing production technology can no longer meet requirement.Further, since the boiling of the concentrated sulfuric acid
O'clock at 300 DEG C or more, if traditional rectification method, heating needs to consume a large amount of energy.
Summary of the invention
The purpose of the present invention is to overcome the above shortcomings and to provide a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipments
And technique, on the basis of being the clean sulfuric acid obtained after washing, the method for removing moisture removal, to obtain the concentrated sulfuric acid, so only needing
It is heated to 100 DEG C or so, so that it may moisture evaporation be come out, so as to greatly reduce energy consumption.
The object of the present invention is achieved like this:
A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, the acid mist including setting gradually generate tank, condenser, aqueous sulphur
Acid storage tank, distiller and filter, the acid mist generate tank connection sulfur trioxide storage tank and pure water tank.
Preferably, the tank body that the acid mist generates tank is equipped with the first collet, is equipped with water in first collet, the water
Liquid level is lower than the top of the first collet.
Preferably, the distiller is equipped with the second collet, and second collet bottom is connect with the top of the first collet.
A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production process, above-mentioned production equipment, production stage are as follows:
After pure water is passed through acid mist generation tank, sulfur trioxide is continuously passed through acid mist and generates in the pure water of tank, and the sulfuric acid mist of generation passes through
Condenser condensation, obtains aqueous sulfuric acid；
Aqueous sulfuric acid is stored in aqueous sulfuric acid storage tank, and the sulfuric acid of various concentration is obtained after distiller distills；
Then it is filtered using filter, obtains ultra-clean and high-purity sulphuric acid；
After filtering, the sulfur trioxide tail gas of generation continues to be passed through in the pure water of acid mist generation tank.
Preferably, sulfur trioxide reacted with pure water generate heat transfer to the first collet water in, the vapor of generation
The second collet is flowed into, is distiller additional heat.
The beneficial effects of the present invention are:
Energy conservation and environmental protection of the present invention, on the basis of being the clean sulfuric acid obtained after washing, the method for removing moisture removal, to obtain dense sulphur
Acid, so only requiring heat to 100 DEG C or so, so that it may moisture evaporation be come out, so as to greatly reduce energy consumption.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment 1.
Fig. 2 is the structural schematic diagram of embodiment 2.
Wherein: acid mist generates tank 1；First collet 1.1；Condenser 2；Aqueous sulfuric acid storage tank 3；Distiller 4；Second collet
4.1；Filter 5；Sulfur trioxide storage tank 6；Pure water tank 7.
Specific embodiment
Embodiment 1:
Referring to Fig. 1, the present invention relates to a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, the acid mist including setting gradually is raw
At tank 1, condenser 2, aqueous sulfuric acid storage tank 3, distiller 4 and filter 5, the acid mist generates tank 1 and connects sulfur trioxide storage tank 6
With pure water tank 7.
The sulfur trioxide input port that the acid mist generates tank 1 is lower than the input port of pure water, guarantees that sulfur trioxide is passed through pure water
In.
It is passed through circulating water in the condenser 2, sulfuric acid mist is condensed.
A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production process, using above-mentioned production equipment, production stage is as follows:
After pure water is passed through acid mist generation tank, sulfur trioxide is continuously passed through acid mist and generates in the pure water of tank, removes impurity elimination by washing out
The sulfuric acid mist of matter, generation is condensed by condenser, obtains aqueous sulfuric acid；
Aqueous sulfuric acid is stored in aqueous sulfuric acid storage tank, and the sulfuric acid of various concentration, the distillation temperature are obtained after distiller distills
Degree is 100-110 DEG C；
Then it is filtered using filter, obtains ultra-clean and high-purity sulphuric acid；
After filtering, the sulfur trioxide tail gas of generation continues to be passed through in the pure water of acid mist generation tank.
Embodiment 2:
Referring to fig. 2, the present invention relates to a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, the acid mist including setting gradually is raw
At tank 1, condenser 2, aqueous sulfuric acid storage tank 3, distiller 4 and filter 5, the acid mist generates tank 1 and connects sulfur trioxide storage tank 6
With pure water tank 7.
The tank body that the acid mist generates tank 1 is equipped with the first collet 1.1, is equipped with water in first collet 1.1, the water
Liquid level is lower than the top of the first collet 1.1.
The distiller 4 is equipped with the second collet 4.1, and 4.1 bottom of the second collet and the top of the first collet 1.1 connect
It connects.
A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production process, using above-mentioned production equipment, production stage is as follows:
After pure water is passed through acid mist generation tank, sulfur trioxide is continuously passed through acid mist and generates in the pure water of tank, and the sulfuric acid mist of generation passes through
Condenser condensation, obtains aqueous sulfuric acid；
Aqueous sulfuric acid is stored in aqueous sulfuric acid storage tank, and the sulfuric acid of various concentration is obtained after distiller distills；
Then it is filtered using filter, obtains ultra-clean and high-purity sulphuric acid；
After filtering, the sulfur trioxide tail gas of generation continues to be passed through in the pure water of acid mist generation tank.
Sulfur trioxide reacts the heat transfer generated with pure water in the water of the first collet, and the vapor of generation flows into second
Collet is distiller additional heat.
In addition to the implementation, all to use equivalent transformation or equivalent replacement the invention also includes there is an other embodiments
The technical solution that mode is formed should all be fallen within the scope of the hereto appended claims.
Claims (5)
1. a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, it is characterised in that: the acid mist including setting gradually generates tank
(1), condenser (2), aqueous sulfuric acid storage tank (3), distiller (4) and filter (5), the acid mist generate tank (1) and connect three oxygen
Change sulphur storage tank (6) and pure water tank (7).
2. according to claim a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment, it is characterised in that: the acid mist
The tank body for generating tank (1) is equipped with the first collet (1.1), is equipped with water in first collet (1.1), and the liquid level of the water is lower than the
The top of one collet (1.1).
3. a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment according to claim 2, it is characterised in that: the steaming
Device (4) are evaporated equipped with the second collet (4.1), and the second collet (4.1) bottom is connect with the top of the first collet (1.1).
4. a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production process, it is characterised in that: using described in one of claim 1-3
Production equipment, production stage are as follows:
After pure water is passed through acid mist generation tank, sulfur trioxide is continuously passed through acid mist and generates in the pure water of tank, and the sulfuric acid mist of generation passes through
Condenser condensation, obtains aqueous sulfuric acid；
Aqueous sulfuric acid is stored in aqueous sulfuric acid storage tank, and the sulfuric acid of various concentration is obtained after distiller distills；
Then it is filtered using filter, obtains ultra-clean and high-purity sulphuric acid；
After filtering, the sulfur trioxide tail gas of generation continues to be passed through in the pure water of acid mist generation tank.
5. a kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production process according to claim 4, it is characterised in that: three oxidations
Sulphur reacts the heat transfer generated with pure water in the water of the first collet, and the vapor of generation flows into the second collet, is distiller
Additional heat.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910274560.9A CN109911866A (en) | 2019-04-08 | 2019-04-08 | A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment and process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910274560.9A CN109911866A (en) | 2019-04-08 | 2019-04-08 | A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment and process |
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| CN109911866A true CN109911866A (en) | 2019-06-21 |
Family
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| CN201910274560.9A Pending CN109911866A (en) | 2019-04-08 | 2019-04-08 | A kind of environment-friendly and energy-efficient ultra-clean and high-purity sulphuric acid production equipment and process |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113546437A (en) * | 2021-08-10 | 2021-10-26 | 联仕(昆山)化学材料有限公司 | Electronic-grade sulfuric acid production system and production process |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020192144A1 (en) * | 1999-12-28 | 2002-12-19 | Martin Hostalek | Method for producing high-purity sulphuric acid |
| CN1699146A (en) * | 2005-06-16 | 2005-11-23 | 武汉青江化工股份有限公司 | Analytical pure sulfuric acid production process |
| CN104925759A (en) * | 2015-04-29 | 2015-09-23 | 苏州晶瑞化学股份有限公司 | Continuous production method of sulfuric acid with ultrahigh purity |
| CN208120755U (en) * | 2016-12-12 | 2018-11-20 | 托普索公司 | For improving the sour recirculation circuit and free-standing sulphuric acid concentration device tower of sulfuric acid concentration |
| CN209872365U (en) * | 2019-04-08 | 2019-12-31 | 江苏中德电子材料科技有限公司 | Environment-friendly energy-saving type ultra-clean high-purity sulfuric acid production equipment |
-
2019
- 2019-04-08 CN CN201910274560.9A patent/CN109911866A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020192144A1 (en) * | 1999-12-28 | 2002-12-19 | Martin Hostalek | Method for producing high-purity sulphuric acid |
| CN1699146A (en) * | 2005-06-16 | 2005-11-23 | 武汉青江化工股份有限公司 | Analytical pure sulfuric acid production process |
| CN104925759A (en) * | 2015-04-29 | 2015-09-23 | 苏州晶瑞化学股份有限公司 | Continuous production method of sulfuric acid with ultrahigh purity |
| CN208120755U (en) * | 2016-12-12 | 2018-11-20 | 托普索公司 | For improving the sour recirculation circuit and free-standing sulphuric acid concentration device tower of sulfuric acid concentration |
| CN209872365U (en) * | 2019-04-08 | 2019-12-31 | 江苏中德电子材料科技有限公司 | Environment-friendly energy-saving type ultra-clean high-purity sulfuric acid production equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113546437A (en) * | 2021-08-10 | 2021-10-26 | 联仕(昆山)化学材料有限公司 | Electronic-grade sulfuric acid production system and production process |
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