CN109882671A - A kind of precision connection flange - Google Patents
A kind of precision connection flange Download PDFInfo
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- CN109882671A CN109882671A CN201910273824.9A CN201910273824A CN109882671A CN 109882671 A CN109882671 A CN 109882671A CN 201910273824 A CN201910273824 A CN 201910273824A CN 109882671 A CN109882671 A CN 109882671A
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- 239000002245 particle Substances 0.000 claims description 18
- 238000005498 polishing Methods 0.000 claims description 17
- 238000007517 polishing process Methods 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 239000004793 Polystyrene Substances 0.000 claims description 12
- 239000002270 dispersing agent Substances 0.000 claims description 12
- 229920002223 polystyrene Polymers 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 11
- RZJRJXONCZWCBN-UHFFFAOYSA-N alpha-octadecene Natural products CCCCCCCCCCCCCCCCCC RZJRJXONCZWCBN-UHFFFAOYSA-N 0.000 claims description 8
- 229920002367 Polyisobutene Polymers 0.000 claims description 7
- 229940038384 octadecane Drugs 0.000 claims description 7
- -1 octadecane tertiary amine Chemical class 0.000 claims description 6
- 239000005708 Sodium hypochlorite Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 5
- 238000005422 blasting Methods 0.000 claims description 5
- 239000003350 kerosene Substances 0.000 claims description 5
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 5
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 4
- 150000003949 imides Chemical class 0.000 claims 1
- 229960002635 potassium citrate Drugs 0.000 claims 1
- 239000001508 potassium citrate Substances 0.000 claims 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 claims 1
- 235000011082 potassium citrates Nutrition 0.000 claims 1
- 238000005336 cracking Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 6
- 229960002317 succinimide Drugs 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 244000248349 Citrus limon Species 0.000 description 4
- 235000005979 Citrus limon Nutrition 0.000 description 4
- 241000233855 Orchidaceae Species 0.000 description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- 208000029154 Narrow face Diseases 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
Abstract
The present invention relates to a kind of precision connection flanges, including first flange, second flange, seal washer, fastening bolt and nut, the seal washer is set between the first flange and second flange, the corresponding position of the first flange and second flange offers pipe receiving hole respectively, the corresponding position of the first flange and second flange also offers fastening through-hole respectively, and the fastening bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread.Precision connection flange of the invention has surface smooth, and cracking breakout is low, and the advantages such as good seal performance can adapt to the requirement of high-precision equipment.
Description
Technical field
The present invention relates to a kind of precision connection flanges.
Background technique
In chemical industry equipment operational process, flanged joint is ensuring to change convenient, should also meet while low in cost strong
Degree requires and sealing performance requirement.The close partition of the level of equipment is 5 grades: economical T1, standard type T2, tight type by PVRC
T3, tight mouth T4 and extremely close type T5.Its partitioning standards is unit mass leakage rate L value.
For flange connection when carrying out installation or pretensioning operation, ring flange will be in method under the action of bolt load
The gasket of blue seal face is squeezed, and when prefastening load suffered on gasket seal contact surface reaches a certain standard value, is borrowed
Help the deformation of gasket, the small not plane on ring flange contact surface is filled up by gasket seal material, and sealing medium is not at this time
It can reveal, flange connection reaches seal request.Under normal conditions, flange requires have certain degree of hardness to ensure that structure has
Enough rigidity.
The form of flange connection is influenced by many factors, such as operating pressure, connector shape, overall performance.
According to influence factor, classify to flange.1) it is divided by working medium pressure.It is broadly divided into two kinds: interior platen press
Blue, external pressure flange.2) it is divided by flange disk shape.Principal shape can be divided into four kinds: round, ellipse, squares and triangles.
And the type of connector determines the shape of ring flange.3) three kinds can be divided by the globality division of flange: integral flange, pine
Formula flange and any formula flange.Integral flange is that flange is carried out certain soldering with equipment effectively to be connected
It connects, synthesizes an entirety.Integral (type) flange segments two kinds again: slip-on welding flange, W.N flange.Slip-on welding flange is simple to manufacture but flange
Rigidity is poor, is easy that ring flange is made to generate excessive deflection distortion in equipment running process, leads to seal failure;W.N flange
Intensity and compactness it is preferable, for high-precision and the operating conditions action condition occasion such as high parameter.Loose type flange is ring flange and set
Standby or pipeline is directly assembled, but there is no conjunctions to be integral for the two, the intensity and sealability of the connection of this kind of flange seal
It is weaker.Because flange is not even integral with equipment after flange stress, so not generating additional bending moment, it to be used for pressure requirements journey
Spend relatively low occasion.Any formula flange is that the form being connected through a screw thread connects ring flange and equipment, any formula method
Blue overall performance is higher than loose type flange but is lower than integral flange, and ring flange can generate certain answer to equipment container wall
Power but stress value is little, is mainly used for the connection of pipeline.4) by flange contact facings width divide narrow face flange: ring flange with it is close
The contact surface of gasket is in bolt hole and surrounds in range.Full face flange: the sealing contact surface of flange is in centre hole in bolts or so
Two sides.
The form in joint seal of flanges face directly affects the sealing performance of flanged joint, which kind of is chosen in equipment installation
The flange sealing surface of form depends primarily on physicochemical properties, pressure medium and the medium temperature and gasket sheet material of medium
Expect characteristic and shape.The form in joint seal of flanges face directly affects the sealing performance of flanged joint, selects in equipment installation
The flange sealing surface of which kind of form is taken to depend primarily on physicochemical properties, pressure medium and the medium temperature and sealing of medium
Gasket material characteristic and shape.The surface of prominent face sealing surface is similar to the sealing surface of flat seal, can manufacture waterline on the whole, excellent
Point is that structure is simple and processing is relatively easy to, the disadvantage is that area in sealing contact is larger, compresses difficulty during tools for bolts ' pretension, is applicable in
In pressure medium and the not high occasion of temperature.Concave-convex type sealing surface is to be embedded in two flanges using the design feature of concave and convex to connect
It connects, since the structure is completely embedded, sealing contact surface is easy to compress and centering when preload, and it is recessed can be put into flange again for gasket when installation
In face, therefore the close structure degree is good, is suitable for the higher occasion of pressure.The interface width of tongue-and-groove type sealing surface is smaller, in advance
Gasket when tight or operation operating condition in slot is not easy to squeeze out, and required bolt load is small and sealing effect is good, is primarily adapted for use in
The occasion of inflammable and explosive, high pressure and poisonous medium.Ring seal face is mainly used for integral (type) flange connection and connects with neck W.N flange
In connecing, it is suitable for middle high-pressure occasion, pressure limit is 6~25MPa.
Therefore, to the research of flange seal connection structure, domestic scholars research start-up time is slightly later than foreign countries, but also obtains
Significant research achievement.In the Theoretical Design and research of flange, the GB150 in China and external Boiler and Pressure Vessel Code
It is all highly important bibliography and data.Earlier 1900s, Waters and two people of Hallhavvlor to pipe flange intensity into
Going research, they go deep into the intensity of the flange seal connection structure of different bulk property degree, careful analysis, and
A kind of method for calculating flange sealing structure stress is proposed according to result of study, and result of study is delivered.In ASME
The initial stage of Boiler and Pressure Vessel Code design, the design method of flanged joint are exactly the periodical content delivered using it as foundation.
When carrying out pretensioning operation, bolt load under pretension condition is squeezed the gasket seal in flange face by ring flange
Pressure, when the pressing force suffered by the gasket reaches a certain standard value, deformation occurs for gasket, small on the contact surface of flanged joint
Plane is not padded due to gasket deformation, and sealing medium flow pass is blocked at this time, to reach initial sealing.Influence flange
The influence factor of connection sealing energy is as follows: rigidity of flange and contact surface roughness.When carrying out pretensioning operation to flange, if method
Roughness on blue face is excessive, and pit number is bigger on contact surface, therefore the excessively high leakage face that will increase interface of roughness
Product, the increase for revealing area will lead to the rising of structure leakage rate, influence the intensity and sealing performance of flange.If selected simultaneously
Flange material rigidity does not reach requirement, and big deflection angle is easy to appear after ring flange stress, is carrying out flange material choosing
The flange material that select rigidity property good according to specific operating condition when selecting, reduces the deflection deformation of ring flange, is pre-tightening
When uniform load can be transmitted to gasket seal, to improve the compactness of flange sealing structure.
However, the measure of precision of flange can't reach the requirement of high-end precision instrument in the prior art, need further
The roughness of ground improvement flange contact facings.
Summary of the invention
It is asked to solve the technology for the requirement that the measure of precision of flange in the prior art can't reach high-end precision instrument
Topic, the present invention propose following technical solution from the angle for the roughness for improving flange contact facings:
A kind of precision connection flange, including first flange, second flange, seal washer, fastening bolt and nut, it is described close
Seal washer is set between the first flange and second flange, and the corresponding position of the first flange and second flange is opened respectively
Equipped with pipe receiving hole, the corresponding position of the first flange and second flange also offers fastening through-hole, the fastening spiral shell respectively
Bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread, and the fastening through-hole is waist type
The fastening through-hole of hole, the first flange and second flange is respectively four, and four fastening through-holes are symmetrical arranged two-by-two, institute
The corresponding position for stating first flange and second flange uniformly opens up that there are four pipe receiving holes respectively;The first flange and the second method
Orchid is steel flange;The first flange and second flange are handled by polishing process.
The polishing process includes being processed by shot blasting using polishing fluid to first flange and second flange.
The polishing fluid includes following parts by weight of component: 50~70 parts by weight Compostie abrasive particles, and compound point of 15~25 parts by weight
Powder, 5~10 parts by weight sodium hypochlorite, 1~3 parts by weight of lemon acid potassium, 1~3 parts by weight p-methyl benzenesulfonic acid, 1~3 parts by weight two
Molybdenum sulfide, 100 parts by weight kerosene, the Compostie abrasive particles are made of in mass ratio for 1:1 white fused alumina with polystyrene, described white rigid
Beautiful partial size is 10~20 μm, and the partial size of the polystyrene is 1~5 μm.
The composite dispersing agent is made of in mass ratio for 3:1 polyisobutene succinimide and octadecane tertiary amine.
Polish temperature is 45~55 DEG C in the polishing process.
Technical solution of the present invention has as follows by beneficial effect:
(1) abrasive grain of traditional flange polishing fluid is generally white fused alumina, but it is unfavorable for further improving flange contact facings
Roughness, the present invention uses white fused alumina and polystyrene to tie the characteristics of organic abrasive particles and inorganic polishing particles as Compostie abrasive particles
Altogether, it and realizes the combination of " soft " and " hard ", makes polishing fluid that can not only handle big recess and scratch, can also calm down small recessed
Sunken and scratch, utmostly improves the roughness of flange contact facings, and then the measure of precision of flange is made to get a promotion.
(2) as abrasive grain, partial size is smaller for white fused alumina and polystyrene, exists and is easy the phenomenon that reuniting, often occurs
The problem of " tubercle ", occurs once " tubercle " will lead to big recess and scratch, runs counter to desire.The present invention passes through optimization point
Dispersing agent is selected as the combination of polyisobutene succinimide and octadecane by the composition of powder, can make simultaneously organic abrasive particles and
Inorganic polishing particles Monodispersed comes, and realizes the mutual cooperation of organic abrasive particles and inorganic polishing particles, also realizes " big partial size " and " granule
The mutual cooperation of diameter " is conducive to the roughness for further improving flange contact facings, and then obtains the measure of precision of flange
It is promoted.
(3) existing flange polishing process carries out at room temperature, and the present invention is found through experiments that, properly increases throwing
Light temperature (such as 45~55 DEG C) can be such that each component in polishing fluid is suitably activated, and improve reaction effect and reaction rate, most
Limits play the effect of each component, are also beneficial to improve the roughness of flange contact facings to a certain extent, and then make method
Blue measure of precision gets a promotion.
(4) surface of precision connection flange of the invention is smooth, and cracking breakout is low, good seal performance, can adapt to high-accuracy
The requirement of equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of precision connection flange of the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of the first flange of precision connection flange of the embodiment of the present invention;
Wherein: 1- nut;2- first flange;3- seal washer;4- second flange;5- fastening bolt;6- pipe receiving hole;7-
Waist-shaped hole.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to embodiments and comparative example,
The present invention will be described in further detail.
Embodiment 1
A kind of precision connection flange, including first flange, second flange, seal washer, fastening bolt and nut, it is described close
Seal washer is set between the first flange and second flange, and the corresponding position of the first flange and second flange is opened respectively
Equipped with pipe receiving hole, the corresponding position of the first flange and second flange also offers fastening through-hole, the fastening spiral shell respectively
Bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread, and the fastening through-hole is waist type
The fastening through-hole of hole, the first flange and second flange is respectively four, and four fastening through-holes are symmetrical arranged two-by-two, institute
The corresponding position for stating first flange and second flange uniformly opens up that there are four pipe receiving holes respectively;The first flange and the second method
Orchid is steel flange;The first flange and second flange are handled by polishing process.
The polishing process includes being processed by shot blasting using polishing fluid to first flange and second flange.
The polishing fluid includes following parts by weight of component: 50 parts by weight Compostie abrasive particles, 15 parts by weight composite dispersing agents, 5 weights
Amount part sodium hypochlorite, 1 parts by weight of lemon acid potassium, 1 parts by weight p-methyl benzenesulfonic acid, 1 parts by weight molybdenum disulfide, 100 parts by weight kerosene,
The Compostie abrasive particles are made of in mass ratio for 1:1 white fused alumina with polystyrene, and the partial size of the white fused alumina is 10~20 μm, institute
The partial size for stating polystyrene is 1~5 μm.
The composite dispersing agent is made of in mass ratio for 3:1 polyisobutene succinimide and octadecane tertiary amine.
Polish temperature is 45 DEG C in the polishing process.
Embodiment 2
A kind of precision connection flange, including first flange, second flange, seal washer, fastening bolt and nut, it is described close
Seal washer is set between the first flange and second flange, and the corresponding position of the first flange and second flange is opened respectively
Equipped with pipe receiving hole, the corresponding position of the first flange and second flange also offers fastening through-hole, the fastening spiral shell respectively
Bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread, and the fastening through-hole is waist type
The fastening through-hole of hole, the first flange and second flange is respectively four, and four fastening through-holes are symmetrical arranged two-by-two, institute
The corresponding position for stating first flange and second flange uniformly opens up that there are four pipe receiving holes respectively;The first flange and the second method
Orchid is steel flange;The first flange and second flange are handled by polishing process.
The polishing process includes being processed by shot blasting using polishing fluid to first flange and second flange.
The polishing fluid includes following parts by weight of component: 60 parts by weight Compostie abrasive particles, 20 parts by weight composite dispersing agents, 8 weights
Amount part sodium hypochlorite, 2 parts by weight of lemon acid potassium, 2 parts by weight p-methyl benzenesulfonic acid, 2 parts by weight molybdenum disulfide, 100 parts by weight kerosene,
The Compostie abrasive particles are made of in mass ratio for 1:1 white fused alumina with polystyrene, and the partial size of the white fused alumina is 10~20 μm, institute
The partial size for stating polystyrene is 1~5 μm.
The composite dispersing agent is made of in mass ratio for 3:1 polyisobutene succinimide and octadecane tertiary amine.
Polish temperature is 50 DEG C in the polishing process.
Embodiment 3
A kind of precision connection flange, including first flange, second flange, seal washer, fastening bolt and nut, it is described close
Seal washer is set between the first flange and second flange, and the corresponding position of the first flange and second flange is opened respectively
Equipped with pipe receiving hole, the corresponding position of the first flange and second flange also offers fastening through-hole, the fastening spiral shell respectively
Bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread, and the fastening through-hole is waist type
The fastening through-hole of hole, the first flange and second flange is respectively four, and four fastening through-holes are symmetrical arranged two-by-two, institute
The corresponding position for stating first flange and second flange uniformly opens up that there are four pipe receiving holes respectively;The first flange and the second method
Orchid is steel flange;The first flange and second flange are handled by polishing process.
The polishing process includes being processed by shot blasting using polishing fluid to first flange and second flange.
The polishing fluid includes following parts by weight of component: 70 parts by weight Compostie abrasive particles, 25 parts by weight composite dispersing agents, 10 weights
Amount part sodium hypochlorite, 3 parts by weight of lemon acid potassium, 3 parts by weight p-methyl benzenesulfonic acid, 3 parts by weight molybdenum disulfide, 100 parts by weight kerosene,
The Compostie abrasive particles are made of in mass ratio for 1:1 white fused alumina with polystyrene, and the partial size of the white fused alumina is 10~20 μm, institute
The partial size for stating polystyrene is 1~5 μm.
The composite dispersing agent is made of in mass ratio for 3:1 polyisobutene succinimide and octadecane tertiary amine.
Polish temperature is 55 DEG C in the polishing process.
Comparative example 1
Compostie abrasive particles are only white fused alumina in comparative example 1, and other technological parameters and processing step are same as Example 2.
Comparative example 2
Composite dispersing agent is only polyisobutene succinimide in comparative example 2, other technological parameters and processing step and reality
It is identical to apply example 2.
Comparative example 3
Composite dispersing agent is only octadecane tertiary amine, other technological parameters and processing step and 2 phase of embodiment in comparative example 3
Together.
Comparative example 4
Polish temperature is 25 DEG C in comparative example 4, and other technological parameters and processing step are same as Example 2.
Characterization result: in order to verify embodiment 2 and comparative example 1-4 flange measure of precision, by embodiment 2 and comparative example
The flange of 1-4 carries out surface roughness Ra (μm) detection, as a result as follows:
Number | Surface roughness Ra (μm) |
Embodiment 2 | 0.015 |
Comparative example 1 | 0.074 |
Comparative example 2 | 0.043 |
Comparative example 3 | 0.059 |
Comparative example 4 | 0.029 |
Commercially available polishing fluid | >0.090 |
Claims (5)
1. a kind of precision connection flange, it is characterised in that: including first flange, second flange, seal washer, fastening bolt and spiral shell
Mother, the seal washer are set between the first flange and second flange, the correspondence of the first flange and second flange
Position offers pipe receiving hole respectively, and the corresponding position of the first flange and second flange also offers fastening through-hole respectively,
The fastening bolt sequentially passes through first flange and the fastening through-hole of second flange is connect with the nut thread, and the fastening is logical
Hole is waist-shaped hole, and the fastening through-hole of the first flange and second flange is respectively four, and four fastening through-holes are symmetrically set two-by-two
It sets, the corresponding position of the first flange and second flange is uniformly opened up respectively there are four pipe receiving hole;The first flange and
Second flange is steel flange;The first flange and second flange are handled by polishing process.
2. precision connection flange according to claim 1, it is characterised in that: the polishing process includes using polishing fluid pair
First flange and second flange are processed by shot blasting.
3. precision connection flange according to claim 2, it is characterised in that: the polishing fluid includes following parts by weight group
Point: 50~70 parts by weight Compostie abrasive particles, 15~25 parts by weight composite dispersing agents, 5~10 parts by weight sodium hypochlorite, 1~3 parts by weight
Potassium citrate, 1~3 parts by weight p-methyl benzenesulfonic acid, 1~3 parts by weight molybdenum disulfide, 100 parts by weight kerosene, the Compostie abrasive particles by
White fused alumina and polystyrene are that 1:1 is constituted in mass ratio, and the partial size of the white fused alumina is 10~20 μm, the grain of the polystyrene
Diameter is 1~5 μm.
4. precision connection flange according to claim 3, which is characterized in that the composite dispersing agent is by polyisobutene fourth two
Acid imide and octadecane tertiary amine are that 3:1 is constituted in mass ratio.
5. precision connection flange according to claim 4, it is characterised in that: in the polishing process polish temperature be 45~
55℃。
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---|---|---|---|---|
US6740590B1 (en) * | 1999-03-18 | 2004-05-25 | Kabushiki Kaisha Toshiba | Aqueous dispersion, aqueous dispersion for chemical mechanical polishing used for manufacture of semiconductor devices, method for manufacture of semiconductor devices, and method for formation of embedded writing |
CN101235255A (en) * | 2008-03-07 | 2008-08-06 | 大连理工大学 | Polishing liquid for chemo-mechanical polishing semiconductor wafer |
CN102140313A (en) * | 2011-01-06 | 2011-08-03 | 清华大学 | In-situ combination abrasive particle copper polishing composition |
CN103725256A (en) * | 2013-12-31 | 2014-04-16 | 上海集成电路研发中心有限公司 | Grinding particle system and polishing liquid for CMP (Chemical Mechanical Polishing) |
CN106247058A (en) * | 2016-07-29 | 2016-12-21 | 盐城丰工机械有限公司 | A kind of multi-pipeline adpting flange |
-
2019
- 2019-04-07 CN CN201910273824.9A patent/CN109882671B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6740590B1 (en) * | 1999-03-18 | 2004-05-25 | Kabushiki Kaisha Toshiba | Aqueous dispersion, aqueous dispersion for chemical mechanical polishing used for manufacture of semiconductor devices, method for manufacture of semiconductor devices, and method for formation of embedded writing |
CN101235255A (en) * | 2008-03-07 | 2008-08-06 | 大连理工大学 | Polishing liquid for chemo-mechanical polishing semiconductor wafer |
CN102140313A (en) * | 2011-01-06 | 2011-08-03 | 清华大学 | In-situ combination abrasive particle copper polishing composition |
CN103725256A (en) * | 2013-12-31 | 2014-04-16 | 上海集成电路研发中心有限公司 | Grinding particle system and polishing liquid for CMP (Chemical Mechanical Polishing) |
CN106247058A (en) * | 2016-07-29 | 2016-12-21 | 盐城丰工机械有限公司 | A kind of multi-pipeline adpting flange |
Also Published As
Publication number | Publication date |
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CN109882671B (en) | 2021-04-09 |
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Effective date of registration: 20210318 Address after: 035400 Niutai village, Hebian Town, Dingxiang County, Xinzhou City, Shanxi Province Applicant after: Shanxi Haokun flange Co.,Ltd. Address before: 618400 teachers' dormitory of Zaojiao primary school, 203 Guangming Road, Zaojiao street, Shifang City, Deyang City, Sichuan Province Applicant before: Han Fang |
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