CN109633668A - Laser ranging system - Google Patents

Laser ranging system Download PDF

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Publication number
CN109633668A
CN109633668A CN201811598184.0A CN201811598184A CN109633668A CN 109633668 A CN109633668 A CN 109633668A CN 201811598184 A CN201811598184 A CN 201811598184A CN 109633668 A CN109633668 A CN 109633668A
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CN
China
Prior art keywords
prism
amici prism
laser
microlens
amici
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CN201811598184.0A
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Chinese (zh)
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CN109633668B (en
Inventor
韩冰
马洪涛
许洪刚
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Beam Processing (AREA)

Abstract

A kind of laser ranging system, including laser beam emitting device, the first microlens, the second microlens, first turn back prism, second turn back prism, motor, the first energy-probe and the second energy-probe;Laser beam emitting device includes first laser device, second laser and Amici prism combination;First laser device, second laser combine opposite with Amici prism and are used to combine throw light to Amici prism respectively;First laser device is incident upon Amici prism combination light and moves on to and be incident upon the first microlens by the first prism of turning back, then is projected to the first detection faces by the first microlens;Second laser is incident upon Amici prism combination light and moves on to and be incident upon the second microlens by the second prism of turning back, then is projected to the second detection faces by the second microlens;Motor is connect with the first microlens.Adjustment precision of the present invention is high, and optical path replicated structures are compact to design.

Description

Laser ranging system
Technical field
The present invention relates to laser ranging technique fields, more particularly to a kind of laser ranging system.
Background technique
In recent years, with the continuous development of China's high and advanced industry, fine measuring instrument demand is stepped up.Laser Measuring Distance meter the advantages such as does not damage object to be measured because it is with non-contact measurement, is widely used in measuring industry, but current state Inside and outside high precision laser range finder generallys use reflective laser distance measuring method, irradiates testee by beam of laser, utilizes Energy of the optical system from laser beam direction side acquisition hot spot, projection to ccd image sensor target surface, calculating facula position Conversion obtains distance value, and measurement accuracy is distributed between 0.001mm~0.1mm, it is difficult to meet the needs of high-acruracy survey, it is high Precision laser measurement will be following one of the developing direction.In view of this, how to design a kind of new high-precision laser range-finding Device is the project that related technical personnel are urgently to be resolved in the industry to eliminate defect and deficiency in the prior art.
Summary of the invention
Based on this, it is necessary in view of the above-mentioned problems, providing a kind of laser ranging system with higher precision.
A kind of laser ranging system, which is characterized in that including laser beam emitting device, the first microlens, the second microscope Head, first turn back prism, second turn back prism, motor, the first energy-probe and the second energy-probe;The Laser emission Device includes first laser device, second laser and Amici prism combination;The first laser device, second laser and light splitting rib Microscope group is closed opposite for combining throw light to Amici prism respectively;Described first prism of turning back is located at Amici prism combination and the It moves on to for first laser device to be incident upon Amici prism combination light in the optical path of one microlens and is incident upon first microscope Head, then the first detection faces are projected to by first microlens, the light of the first detection faces reflection is successively through the first microscope The first energy-probe is projected to after head, the first deflecting prism and Amici prism combination;Described second turns back prism positioned at light splitting Prism arrangement is incident upon institute with combining light in the optical path of the second microlens and move on to for second laser to be incident upon Amici prism The second microlens are stated, then are projected to the second detection faces by second microlens, the light of the second detection faces reflection is successively The second energy-probe is projected to after the combination of the second microlens, the second deflecting prism and Amici prism;The motor and The connection of one microlens is for driving the first microlens mobile.
The beneficial effects of the present invention are can be complete in the position by adjusting laser ranging system and the first microlens After the focusing of pairs of first, second detection faces aims at work, the first microlens distance is adjusted according to by motor, passes through control the The resolution ratio of one energy-probe and the second energy-probe, further calculates to obtain tested apart from size, can make measurement accuracy Up to 0.1um, meet high-precision adjustment and measurement demand, Adjustment precision is high, and optical path replicated structures are compact to design, reduce Laser Measuring Volume away from device.
Detailed description of the invention
Fig. 1 is the structure chart of laser ranging system provided by the invention;
Fig. 2 is that laser ranging system shown in FIG. 1 is divided schematic diagram;
Fig. 3 is the structure of the Amici prism combination of laser ranging system shown in Fig. 1.
Specific embodiment
Below in conjunction with the attached drawing in embodiment of the present invention, the technical solution in embodiment of the present invention is carried out clear Chu is fully described by, it is clear that described embodiment is only some embodiments of the invention, rather than whole realities Apply mode.Based on the embodiment in the present invention, ordinary skill personage institute without making creative work The every other embodiment obtained, shall fall within the protection scope of the present invention.
1 to attached drawing 3 with reference to the accompanying drawing, the technical solution for the optical range finding apparatus that the present invention will be described in detail provides.
A kind of laser ranging system provided by the invention, including laser beam emitting device 1, the first microlens 3, second are micro- Camera lens 8, first turn back prism 6, second turn back prism 7, motor 5, the first energy-probe 9 and the second energy-probe 10;Institute Stating laser beam emitting device 1 includes first laser device 15, second laser 14 and Amici prism combination 11;The first laser device 15, it is opposite for combining 11 throw lights to Amici prism respectively to combine 11 with Amici prism for second laser 14;Described first Prism 6 of turning back, which is located in Amici prism combination 11 and the optical path of the first microlens 3, to be used to for first laser device 15 being projected to point The light of light prism arrangement 11, which is moved on to, is incident upon first microlens 3, then is projected to the first inspection by first microlens 3 The light in survey face 12, the reflection of the first detection faces 12 is successively combined through the first microlens 3, the first deflecting prism 6 and Amici prism The first energy-probe 9 is projected to after 11;Described second prism 7 of turning back is located at Amici prism combination 11 and second microlens 8 Optical path on move on to for second laser to be penetrated the light that 14 are projected to Amici prism combination 11 and be incident upon second microscope First 8, then the second detection faces 13 are projected to by second microlens 8, the light of the second detection faces 13 reflection is successively through second The second energy-probe 10 is projected to after microlens 8, the second deflecting prism 7 and Amici prism combination 11;The motor 5 and The connection of one microlens 3 is for driving the first microlens 3 mobile.
The laser ranging system that the present invention relates to, can be in the position by adjusting laser ranging system and the first microlens After completing the focusing aiming work to the first, second detection faces, the first microlens distance is adjusted according to by motor, passes through control The resolution ratio of first energy-probe and the second energy-probe, further calculates to obtain tested apart from size, can make measurement essence Degree reaches 0.1um, meets high-precision adjustment and measurement demand, Adjustment precision is high, and optical path replicated structures are compact to design, reduce laser The volume of range unit.
Further, the range unit further includes installation base plate 2, the laser beam emitting device 1, the motor 5, described Second microlens 8, described first turn back prism 6, described second turn back prism 7, first energy-probe 9 and described Two energy-probes 10 are installed on the installation base plate 2;First microlens 3 and second microlens 8 are located at The two sides of the laser beam emitting device 1, one end of the motor 5 are connected with a fixed plate 4, and first microlens 3 are installed In in the fixed plate 4.
As shown in Figure 1, in embodiments, the installation base plate 2 is rectangle, the laser beam emitting device 1 is close to peace The one of short side for filling substrate 2 is fixedly mounted, and first energy-probe 9 and second energy-probe 10 are located at institute State the two sides of laser beam emitting device 1.The motor 5, described first turn back prism 6, described second turn back prism 7 close to installation base Another short side of plate 2 is fixedly mounted;The fixed plate 4 is the short side and and motor that L shape and one end are parallel to installation base plate 2 5 are connected, and the other end is parallel to the long side of installation base plate 2 and is connected with the first microlens 3.First microlens 3 And second microlens 8 be located at the installation base plate 2 a pair of of long side two sides, and first microlens 3 are close to described First turn back prism 6, second microlens 8 are turned back prism 7 close to described second, and such setting can make Laser Measuring Optical path replicated structures away from device are compact to design, reduce the volume of laser ranging system.Motor described in present embodiment is Linear motor, for driving the first microlens to move along central shaft.
Referring to Fig. 3, Amici prism combination 11 include successively against size it is cube-shaped first point identical Light prism 11-1, the second Amici prism 11-2, third Amici prism 11-3, the 4th Amici prism 11-4 and the 5th Amici prism 11-5;The normal of the light splitting surface of the first Amici prism 11-1 and the light splitting surface of the second Amici prism 11-2 are in 45 degree of settings; The light splitting surface of the light splitting surface and third Amici prism 11-3 of the first Amici prism 11-1 is perpendicular;Three Amici prism The light splitting surface of 11-3 is parallel with the light splitting surface of the 5th Amici prism 11-5;The light splitting surface of the third Amici prism 11-3 Normal and the 4th Amici prism 11-4 light splitting surface in 45 degree be arranged;The light splitting surface of the second Amici prism 11-2 with The light splitting surface of 4th Amici prism 11-4 is perpendicular.Specifically, the first Amici prism 11-1, the second Amici prism 11-2, third Amici prism 11-3, the 4th Amici prism 11-4 and the 5th Amici prism 11-5 are in one article of short side for being parallel to installation base plate 2 Arranged in a straight line and third Amici prism 11-3 is located at centre on installation base plate 2, and the second Amici prism 11-2 is located at the first light splitting Between prism 11-1 and third Amici prism 11-3, the 4th Amici prism 11-4 is located at the light splitting of third Amici prism 11-3 and the 5th Between prism 11-5.First Amici prism 11-1, the second Amici prism 11-2, third Amici prism 11-3, the 4th Amici prism The light splitting surface of 11-4 and the 5th Amici prism 11-5 are respectively the diagonal plane of square.Wherein the first Amici prism 11-1, the 5th The light splitting surface of Amici prism 11-5 is single side reflecting surface, and the light splitting surface of third Amici prism 11-3 is double-sided reflecting face;Second point The light splitting surface of light prism 11-2 and the 4th Amici prism 11-4 are Transflective face.
In the present embodiment, the first laser device 15 is opposite with the incidence surface of the second Amici prism 11-2, and The light splitting surface of the central axis of first laser device 15 and the second Amici prism 11-2 are arranged in 45 degree of angles.
In the present embodiment, the second laser 14 is opposite with the incidence surface of the 4th Amici prism 11-4, and The light splitting surface of the central axis of second laser 14 and the 4th Amici prism 11-4 are arranged in 45 degree of angles;The second light splitting rib The incidence surface of mirror 11-2 and the 4th Amici prism 11-4 are coplanar.It is understood that the second Amici prism 11-2 and The incidence surface of the 4th Amici prism 11-4 namely a side of above-mentioned square.
In the present embodiment, first energy-probe 9 and the second energy-probe 10 divide with the third respectively Two light prism 11-3 opposite light-emitting surfaces are opposite, and the center of first energy-probe 9 and the second energy-probe 10 The light splitting surface of axis and the third spectroscope 11-3 are arranged in 45 degree of angles;Opposite two of the third Amici prism 11-3 go out light Face is vertical with the incidence surface of the second Amici prism 11-2 and the 4th Amici prism 11-4.It is understood that described A pair of of light-emitting surface of third Amici prism 11-3 namely a pair of parallel side of above-mentioned square.
In the present embodiment, described first turn back prism 6 be pentaprism, described first turn back prism 6 cross section be Pentagon and including perpendicular and opposite two discrepancy parallel with the first Amici prism 11-1 and the first microlens 3 respectively Smooth surface and sequentially connected three reflective surfaces.In other embodiments, it described first turns back prism 6 or trigone Mirror.
In the present embodiment, first turn back prism 6 cross section pentagon include a right angle interior angle and four angles The interior angle that degree is 112.5 degree.
In the present embodiment, described second prism 7 is turned back as prism, the described second cross section for turning back prism is straight Angle isosceles triangle and including the reflecting surface opposite with the 5th Amici prism 11-5, the 5th Amici prism 11-5 opposite reflecting surface For the plane where the bevel edge of right angled isosceles triangle.
In the present embodiment, first microlens 3, center overlapping of axles of the second microlens 8 and perpendicular to institute State the central axis of first laser device 9 Yu second laser 10, and with the first Amici prism 11-1, the second Amici prism 11- 2, third Amici prism 11-3, the 4th Amici prism 11-4 and the straight line of the 5th Amici prism 11-5 arrangement are parallel, so may be used So that optical path replicated structures are compact to design, the volume of laser ranging system is reduced.In other embodiments, described first Microlens 3, the second microlens 8 central axis can also be parallel.
Further, it is additionally provided with grating scale (not shown) on the motor 5, for feeding back 3 position of the first microlens Information improves measurement accuracy.
When work, first laser device 15 and second laser 14 are opened, 14 outgoing beam of second laser is successively through the 4th Four 11-4 of Amici prism, five 11-5 of the 5th Amici prism and second turn back after prism 7 turns back, and are incident in the second microlens 8, Light beam is projected to down the second detection faces 13 after the focusing of the second microlens 8 again, and (the second detection faces 13 are said by taking plane as an example It is bright), be projected to by the light of the second detection faces 13 through the second detection faces 13 reflection after optical path successively through the second microlens 8, second Turn back prism 7, the 5th Amici prism 11-5, the 4th Amici prism 11-4 is transmitted to third Amici prism 11-3, is divided third point After a wherein lateral reflection for the light splitting surface of light prism 11-3, light beam carries out detection reception by the second energy-probe 10, so far complete It is received at the transmitting of 14 outgoing beam of second laser, transmission, detection, it is then anti-according to 10 energy information of the second energy-probe Feedback is to adjust 100 position of laser ranging system, when location point is located at energy curve peak value, i.e. 8 focus point of the second microlens The second detection faces 13 are placed exactly in, complete the aiming to lower second detection faces 13 at this time, at this time fixed laser range unit position; 15 outgoing beam of first laser device is successively turned back 6 folding of prism through the second Amici prism 11-2, the first Amici prism 11-1 and first It after turning, is incident in the first microlens 3, light beam is projected to the first detection faces 12 (first after the focusing of upper first microlens 3 Detection faces 12 are explained by taking plane as an example), the light for being projected to the first detection faces 12 is successively turned back through the first microlens 3, first Prism 6, the first Amici prism 11-1, the second Amici prism 11-2 are transmitted to a point third light prism 11-3, through third Amici prism After another lateral reflection of the light splitting surface of 11-3, light beam carries out detection reception by the first detector of energy 9, so far completes first laser Transmitting, transmission, the detection of 15 outgoing beam of device receive, and then fed back through linear motor 5 according to 9 information of the first energy-probe The position of upper first microlens 3 is adjusted, when location point is located at energy curve peak value, i.e., upper first microlens 3 focus Point is located at the first detection faces 12, completes the aiming to the first detection faces 12 at this time.It completes to the first, second detection faces 12,13 After aiming at work, distance is adjusted according to motor 5, can be calculated by computer tested apart from size.By controlling energy The resolution ratio of first detector 9 and the second energy-probe 10 can make measurement accuracy up to 0.1um, meet high-precision adjustment and survey Amount demand, while structure of the invention is compact, adjustment is convenient.
The upper embodiment only expresses one or more of embodiments of the invention, and description is more specific and detailed Carefully, but it cannot be understood as the limitations to patent of invention range.It should be pointed out that for the ordinary skill of this field For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the present invention Protection scope.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.

Claims (10)

1. a kind of laser ranging system, which is characterized in that including laser beam emitting device, the first microlens, the second microlens, First turn back prism, second turn back prism, motor, the first energy-probe and the second energy-probe;The Laser emission dress It sets and is combined including first laser device, second laser and Amici prism;The first laser device, second laser and Amici prism Combination is opposite and for combining throw light to Amici prism respectively;Described first prism of turning back is located at Amici prism combination and the Light in the optical path of one microlens for first laser device to be incident upon Amici prism combination moves on to that be incident upon described first micro- Camera lens, then the first detection faces are projected to by first microlens, the light of the first detection faces reflection is successively micro- through first The first energy-probe is projected to after camera lens, the first deflecting prism and Amici prism combination;Described second turn back prism be located at point Light prism arrangement is penetrated with moving on in the optical path of the second microlens for second laser to be incident upon the light that Amici prism combines Extremely second microlens, then the second detection faces, the light of the second detection faces reflection are projected to by second microlens Successively the second energy-probe is projected to after the combination of the second microlens, the second deflecting prism and Amici prism;The motor It is connect with the first microlens for driving the first microlens mobile.
2. laser ranging system according to claim 1, which is characterized in that it further include installation base plate, the Laser emission Device, the motor, second microlens, described first turn back prism, described second turn back prism, first energy Detector and second energy-probe are installed on the installation base plate;First microlens and described second micro- Camera lens is located at the two sides of the laser beam emitting device, and described motor one end is connected with a fixed plate, the first microlens peace Loaded in the fixed plate.
3. laser ranging system according to claim 2, which is characterized in that Amici prism combination include successively against Identical the first cube-shaped Amici prism of size, the second Amici prism, third Amici prism, the 4th Amici prism and Five Amici prisms;The light splitting surface of the second Amici prism of normal of the light splitting surface of first Amici prism is in 45 degree of settings;It is described The light splitting surface of first Amici prism and the light splitting surface of third Amici prism are perpendicular;The light splitting surface of three Amici prism with it is described The light splitting surface of 5th Amici prism is parallel;The normal of the light splitting surface of the third Amici prism and the 4th Amici prism Light splitting surface is in 45 degree of settings;The light splitting surface of the light splitting surface and the 4th Amici prism of second Amici prism is perpendicular.
4. laser ranging system according to claim 3, which is characterized in that the first laser device and second light splitting The incidence surface of prism is opposite, and the light splitting surface of the central axis of first laser device and second Amici prism is arranged in 45 degree of angles.
5. laser ranging system according to claim 4, which is characterized in that the second laser and the 4th light splitting The incidence surface of prism is opposite, and the light splitting surface of the central axis of second laser and the 4th Amici prism is arranged in 45 degree of angles; The incidence surface of second Amici prism and the 4th Amici prism is coplanar.
6. laser ranging system according to claim 5, which is characterized in that first energy-probe and the second energy Opposite with the third Amici prism two light-emitting surfaces are opposite respectively for detector, and first energy-probe and the second energy The central axis and the spectroscopical light splitting surface of the third for measuring detector are arranged in 45 degree of angles;The third Amici prism it is opposite two A light-emitting surface is vertical with the incidence surface of second Amici prism and the 4th Amici prism.
7. laser ranging system according to claim 4, which is characterized in that described first turn back prism be pentaprism, institute State first turn back prism cross section be pentagon and including it is perpendicular and respectively with the first Amici prism and the first microscope Parallel opposite two, head go out incidence surface and sequentially connected three reflective surfaces.
8. laser ranging system according to claim 7, which is characterized in that first turn back prism cross section pentagon The interior angle for being 112.5 degree including a right angle interior angle and four angles.
9. laser ranging system according to claim 4, which is characterized in that described second turn back prism be prism, institute Stating the cross section that second turns back prism is right angled isosceles triangle and including the reflecting surface opposite with the 5th Amici prism.
10. laser ranging system according to claim 4, which is characterized in that first microlens, the second microscope Head center overlapping of axles and perpendicular to the central axis of the first laser device and second laser.
CN201811598184.0A 2018-12-26 2018-12-26 Laser distance measuring device Active CN109633668B (en)

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