CN109443219B - Novel displacement sensor with refractive mirror and measuring method thereof - Google Patents
Novel displacement sensor with refractive mirror and measuring method thereof Download PDFInfo
- Publication number
- CN109443219B CN109443219B CN201811308038.XA CN201811308038A CN109443219B CN 109443219 B CN109443219 B CN 109443219B CN 201811308038 A CN201811308038 A CN 201811308038A CN 109443219 B CN109443219 B CN 109443219B
- Authority
- CN
- China
- Prior art keywords
- laser beam
- reflecting surface
- incident
- mirror
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 103
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000005259 measurement Methods 0.000 claims description 33
- 230000001154 acute effect Effects 0.000 claims description 6
- 101001080825 Homo sapiens PH and SEC7 domain-containing protein 1 Proteins 0.000 description 13
- 101001080808 Homo sapiens PH and SEC7 domain-containing protein 2 Proteins 0.000 description 13
- 102100027472 PH and SEC7 domain-containing protein 1 Human genes 0.000 description 13
- 102100027455 PH and SEC7 domain-containing protein 2 Human genes 0.000 description 13
- 230000003321 amplification Effects 0.000 description 12
- 238000003199 nucleic acid amplification method Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a novel displacement sensor with a refractive mirror and a measuring method thereof, wherein the novel displacement sensor with the refractive mirror comprises the following components: the reflector is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflector and reflecting the laser beam to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface; the spectroscope group comprises a spectroscope and a reflecting mirror, the spectroscope and the reflecting mirror are arranged at a certain included angle, and the laser beams reflected by the second reflecting surface of the triangular wave reflecting mirror are made to enter the spectroscope, one part of the laser beams are reflected by the spectroscope and the reflecting mirror in sequence and then enter one of the refracting mirrors to be refracted and enter the photoelectric detector, and the other part of the laser beams are transmitted by the spectroscope and then enter the other refracting mirror to be refracted and enter the photoelectric detector. According to the displacement sensor, the measuring precision of the displacement sensor can be improved through the arrangement of the refractive mirror.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a novel displacement sensor with a refractive mirror and a measurement method thereof.
Background
The new displacement measurement principle based on the optical triangular amplification method is realized by combining a triangular wave optical device and a high-precision PSD (Position SENSITIVE DEVICE, position sensitive detector) on the basis of the optical triangular amplification method. The triangular wave optical device subdivides the linear displacement at equal intervals, reduces the processing precision and the size requirement of the optical device, simultaneously reduces the size requirement of the high-precision PSD, and realizes high-precision displacement measurement in a small range. However, in the displacement sensor in the prior art, for example, the application number is 201810481651.5, the displacement sensor is named as a novel displacement sensor and a measurement method thereof, the displacement measurement principle and structure are shown in fig. 1, and as can be seen from fig. 1, through the arrangement of two photoelectric detectors and a spectroscope set, the angle processing deviation of an optical element can be eliminated to influence the magnification factor, and the accuracy of length measurement can be greatly improved. However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is easily affected, that is, when the incident angle of the laser beam incident on the PSD increases, the measurement accuracy of the PSD itself decreases.
Disclosure of Invention
The invention aims to provide a novel displacement sensor with a refractive mirror and a measuring method thereof, wherein the measuring accuracy can be improved.
In order to achieve the above object, the present invention provides the following technical solutions:
a novel displacement sensor with a refractive mirror, comprising:
The triangular wave reflector comprises a first reflecting surface and a second reflecting surface;
A laser beam incident on a first reflecting surface of the triangular wave reflecting mirror;
the reflector is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflector and reflecting the laser beam to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface;
The beam splitter group comprises a beam splitter and a reflecting mirror, the beam splitter and the reflecting mirror are arranged at a certain included angle, the laser beams reflected by the second reflecting surface of the triangular wave reflecting mirror are made to enter the beam splitter, one part of the laser beams are reflected by the beam splitter and the reflecting mirror in sequence and then enter one of the refracting mirrors, and the other part of the laser beams are transmitted by the beam splitter and then enter the other refracting mirror;
The two refractors are used for receiving the laser beams transmitted or reflected by the spectroscope group and refracting the laser beams;
each photoelectric detector corresponds to one refraction mirror respectively and is used for receiving the laser beams refracted by the corresponding refraction mirror and measuring the incident position of the laser beams;
and the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the laser beam received by the photoelectric detector.
As an embodiment, the mirror is parallel to the first reflecting surface and is parallel to the second reflecting surface, and the acute angle between the laser beam and the first reflecting surface is equal to twice the angle between the first reflecting surface and the horizontal plane.
As an implementation manner, the incident surface and the emergent surface of the two refractors are both planes, and the incident surface and the emergent surface are parallel to each other.
As an embodiment, the refractor is attached to the photodetector.
As an embodiment, the laser beam is P polarized light.
As an embodiment, the arrangement positions between the two photodetectors and the spectroscope group satisfy the relationship: the incidence angles of the laser beams respectively entering the two photoelectric detectors after passing through the spectroscope group are the same.
As an implementation mode, the spectroscope and the reflecting mirror are arranged at an included angle of 90 degrees, and the two photoelectric detectors are arranged in parallel.
As an implementation mode, the device also comprises a shell, wherein the laser beam is emitted by the laser source, and the laser source, the reflecting mirror, the spectroscope group, the two photoelectric detectors and the two refracting mirrors are fixedly arranged in the shell to form a reading head.
As one embodiment, the number of the reading heads is at least two, and the positional relationship between the at least two reading heads satisfies: during the measurement, at least one reading head can read the variation of the incidence position of the laser beam on the photodetector.
On the other hand, the invention also provides a measuring method of the novel displacement sensor with the refractive mirror, which comprises the following steps:
fixing the measured object on a triangular wave reflector or a reading head;
The position relationship of the laser beam, the triangular wave reflector, the photoelectric detector, the reflector, the refractor and the spectroscope group is adjusted, so that the reflector receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface, the spectroscope and the reflector are arranged at a certain included angle, the laser beam reflected by the second reflecting surface of the triangular wave reflector is incident to the spectroscope, one part of the laser beam is reflected by the spectroscope and the reflector in sequence and then is incident to one of the refractors to be refracted and be incident to the corresponding photoelectric detector, and the other part of the laser beam is transmitted by the spectroscope and then is incident to the other refractor to be refracted and be incident to the corresponding photoelectric detector;
The method comprises the steps of emitting laser beams, wherein the laser beams respectively enter two refracting mirrors after passing through a first reflecting surface, a reflecting mirror, a second reflecting surface and a spectroscope group of the triangular wave reflecting mirror in sequence, and the initial positions of the laser beams are detected by corresponding photoelectric detectors after being refracted by the refracting mirrors;
The displacement of the detected object, and in the displacement process, the photoelectric detector detects the position change of the laser beam until the detected object stops displacement;
The processing system obtains a displacement value of the measured object by processing the position changes detected by the two photoelectric detectors.
Compared with the prior art, the invention has the following beneficial effects:
According to the novel displacement sensor with the refractive mirror, through the arrangement of the refractive mirror, the angle of incidence of laser to the photoelectric detector is reduced while the magnification of the displacement sensor is increased, so that the measurement stability of the photoelectric detector can be ensured while the magnification of the displacement sensor is improved, in other words, the measurement precision of the displacement sensor can be improved.
The incident surface and the emergent surface of the two refractors are planes, and the incident surface and the emergent surface are parallel to each other; the laser position variation quantity incident on the refracting mirror is the same as the laser position variation quantity incident on the photoelectric detector, so that a displacement measurement calculation formula is simplified.
By adopting polarized laser, the intensity of the laser incident to the photoelectric detector through refraction is increased, the proportion of incident light reflected by the refraction mirror is reduced, in other words, the requirement of the photoelectric detector on the laser incident intensity can be reduced.
And the refraction mirror is attached to the photoelectric detector, so that the laser beam refracted by the refraction mirror is prevented from being refracted again.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a displacement measurement principle of a displacement sensor in the prior art.
Fig. 2 is a schematic diagram showing the measurement principle of a novel displacement sensor (with angle processing error) with a refractive mirror with a structure provided in embodiment 1.
Fig. 3 is a schematic view of the optical path in the ideal state (without angle processing error) in the structure shown in fig. 2.
Fig. 4 is a schematic diagram showing the measurement principle of a novel displacement sensor with a refractive mirror of another structure provided in embodiment 1.
Fig. 5 is a schematic diagram showing the measurement principle of the novel displacement sensor with a refractive mirror of the structure provided in embodiment 2.
The reference numerals in the figures illustrate:
A laser source 1, a laser beam 2, a triangular wave reflector 3, a first reflecting surface 31, a second reflecting surface 32, a reflector 4, a beam splitter group 5, a beam splitter 51, a reflector 52, a refractor 6, a photodetector 7 and a housing 8.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be obtained by a person skilled in the art without creative efforts, are included in the protection scope of the present invention based on the embodiments of the present invention.
Example 1
Referring to fig. 2-3, a novel displacement sensor with a refractive mirror is provided in this embodiment, which includes a laser source 1, a triangular wave reflector 3, a reflector 4, a beam splitter group 5, two refractive mirrors 6, and two photodetectors 7, wherein the triangular wave reflector 3 includes a plurality of reflecting surfaces, and for convenience of understanding, the reflecting surface for receiving a laser beam emitted by the laser source is defined as a first reflecting surface. In addition, the reflector and the reflector are optical devices arranged at different positions, but are respectively named as a reflector and a reflector for convenience of distinguishing and avoiding confusion caused by excessive number limitation. The reflector and the reflecting mirror can be all-reflecting mirrors.
In this novel displacement sensor with refracting mirror:
the laser source is used for emitting a laser beam 2 and directing the laser beam to the first reflecting surface 31 of the triangular wave reflector 3;
The reflecting mirror 4 is used for receiving the laser beam 2 reflected by the first reflecting surface 31 of the triangular wave reflecting mirror 3, and reflecting the laser beam to the second reflecting surface 32 of the triangular wave reflecting mirror 3 along the same path in the measuring process that the laser beam 2 is incident on the same first reflecting surface 31;
the beam splitter group 5 comprises a beam splitter 51 and a reflecting mirror 52, the beam splitter 51 and the reflecting mirror 52 are arranged at a certain included angle, the laser beams reflected by the second reflecting surface 32 of the triangular wave reflecting mirror 3 are incident to the beam splitter 51, one part of the laser beams are reflected by the beam splitter 51 and the reflecting mirror 52 in sequence and then are incident to one of the refracting mirrors, and the other part of the laser beams are transmitted by the beam splitter 51 and then are incident to the other refracting mirror;
Two refraction mirrors 6 for receiving the laser beam transmitted or reflected by the beam splitter group and refracting the laser beam;
Two photodetectors 7, each of which corresponds to a refractive mirror, for receiving the laser beam refracted by the corresponding refractive mirror and measuring the incident position thereof; as shown in fig. 2, a part of the laser beams are reflected by the beam splitter 51 and the reflector 52, then are incident on one of the refractors 6, and are refracted, and finally are incident on the photodetector 7, such as the PSD2 in fig. 2, and another part of the laser beams are transmitted by the beam splitter 51, then are incident on the other refractor 6, and are refracted, and finally are incident on the photodetector 7, such as the PSD1 in fig. 2;
And the processing system is used for calculating the displacement change value of the measured object according to the incidence position change value of the laser beam 2 received by the photoelectric detector 7.
It is easy to understand that when the included angle between the incident light and the receiving surface of the photoelectric detector is too small, the light spot of the incident light can shift the center of gravity, and the measurement accuracy of the photoelectric detector is affected. Through the setting of refracting mirror for when increasing displacement sensor magnification, reduce the angle of laser incidence to photoelectric detector, consequently can improve the measurement accuracy of sensor. In the scheme, in order to avoid the influence on the measurement accuracy caused by the fact that the laser beam refracted by the refractor is refracted again, the refractor is attached to the photoelectric detector.
In a further scheme, the incident surface and the emergent surface of the two refracting mirrors are both planes, and the incident surface and the emergent surface are parallel to each other. The laser position variation quantity incident to the refracting mirror is the same as the laser position variation quantity incident to the photoelectric detector, so that a displacement measurement calculation formula is simplified.
As a preferred embodiment, the laser beam 2 is P polarized light. By adopting polarized light, the intensity of laser incident to the photoelectric detector through refraction is increased, the reflectivity of the laser beam when the laser beam is incident to the refraction mirror at a large incident angle is reduced, the proportion of incident light reflected by the refraction mirror is reduced, in other words, the requirement of the photoelectric detector on the laser incident intensity can be reduced.
As shown in fig. 2 to 3, the photosensor 7 employs a PSD, the laser beam 2 before displacement is indicated by a solid line, the laser beam 2 after displacement is indicated by a broken line, and the transmission path of the laser beam 2 is as follows:
Before displacement, the laser source 1 emits the laser beam 2 to the first reflecting surface 31 of the triangular wave reflector 3, the first reflecting surface 31 of the triangular wave reflector 3 reflects the laser beam 2 to the reflector 4, the reflector 4 reflects the laser beam reflected by the first reflecting surface 31 to the second reflecting surface 32, the second reflecting surface 32 reflects the incident laser beam to the spectroscope 51, a part of the laser beam is transmitted by the spectroscope 51 and then is incident to the refractor 6 to be refracted and incident to the PSD1, the PSD1 receives the laser beam transmitted by the spectroscope 51 and measures the incident position, and the incident position is recorded as a first incident position; the other part of the laser beams is reflected by the beam splitter 51 and then enters the reflector 52, and then enters the refractor 6 to be refracted and enter the PSD2 after being reflected by the reflector 52, and the PSD2 receives the laser beams reflected by the reflector 52 and measures the incidence position, which is the second incidence position.
After displacement (shown as displacement to the left in fig. 2, the laser source 1, the reflecting mirror 4, the beam splitter group 5 and the photodetector 7 are synchronously displaced during displacement), the laser source 1 emits the laser beam 2 to the first reflecting surface 31 of the triangular wave reflecting mirror 3, the first reflecting surface 31 of the triangular wave reflecting mirror 3 reflects the laser beam 2 to the reflecting mirror 4, the reflecting mirror 4 reflects the laser beam reflected by the first reflecting surface 31 to the second reflecting surface 32 along a path different from that before displacement due to the processing error of the first reflecting surface 31 and the second reflecting surface 32, the second reflecting surface 32 reflects the incident laser beam to the beam splitter 51, a part of the laser beam is transmitted by the beam splitter 51 and then is incident to the refractor 6 to be refracted and incident to the PSD1, the PSD1 receives the laser beam transmitted by the beam splitter 51 and measures the incident position, which is herein denoted as a third incident position; the other part of the laser beams is reflected by the beam splitter 51 and then enters the reflector 52, and then enters the refractor 6 to be refracted and enter the PSD2 after being reflected by the reflector 52, the PSD2 receives the laser beams reflected by the reflector 52 and measures the incidence position, and the incidence position is recorded as a fourth incidence position.
The amplification factor of the PSD1 can be calculated according to the first incidence position and the third incidence position, the amplification factor of the PSD2 can be calculated according to the second incidence position and the fourth incidence position, and the weighted average of the amplification factors of the PSD1 and the PSD2 is taken as the amplification factor of the displacement sensor.
When the displacement sensor is used for measurement, the displacement of the laser source 1, namely the displacement of the measured object, can be calculated according to the first incident position and the third incident position. The calculation process can be obtained according to the triangular relation.
As a preferred embodiment, as shown in fig. 2, the first reflecting surface 31 and the second reflecting surface 32 of the triangular wave reflecting mirror 3 have an angle of 150 degrees with respect to the horizontal plane (for example, only the horizontal direction is positive and the laser beam 2 emitted from the laser source 1 is rotated counterclockwise), the incident angle of the laser beam 2 to the first reflecting surface 31 is 30 degrees, and the reflecting mirror 4 is parallel to the first reflecting surface 31 and the second reflecting surface 32. In the case of the second reflecting surface 32 of the triangular wave reflecting mirror 3 being reflected along the same path in the measurement process of ensuring that the reflecting mirror 4 makes the laser beam 2 incident on the same first reflecting surface 31, there may be other different arrangements.
For example, in the measurement process in which the laser beam 2 is incident on the same first reflecting surface 31, the laser beam reflected by the reflecting mirror 4 is reflected to the second reflecting surface 32 of the triangular wave reflecting mirror 3 along the same path before and after displacement, by: the reflecting mirror 4 is parallel to the first reflecting surface 31 and also parallel to the second reflecting surface 32, and the acute angle between the laser beam 2 and the first reflecting surface 31 is equal to twice the angle between the first reflecting surface 31 and the horizontal plane, i.e. the acute angle between the first reflecting surface 31 and the horizontal plane is equal to the acute angle between the laser beam 2 and the first reflecting surface 31.
As can be seen from fig. 3, the specific structure of the triangular wave reflecting mirror 3 is not limited under the condition that the first reflecting surface 31 and the second reflecting surface 32 are parallel (i.e. the included angle with the horizontal plane is consistent), that is, the included angle between the two reflecting surfaces forming the triangular wave is not limited, for example, the included angle between the two reflecting surfaces is 120 degrees as shown in fig. 2; as another example, fig. 3 shows that the angle between the two reflecting surfaces is 90 degrees, etc. The triangular wave is not necessarily an isosceles triangular wave, that is, the acute angles of the two reflecting surfaces forming the triangular wave and the horizontal plane may be equal or unequal.
By the arrangement of the reflecting mirror 4, the laser beam 2 is made to be incident on the same first reflecting surface 31 in the measuring process (before and after displacement), the laser beam reflected by the reflecting mirror 4 is reflected to the second reflecting surface 32 of the triangular wave reflecting mirror 3 along the same path before and after displacement, and the laser beam before and after displacement is also made to be incident on the photodetector along the same path, that is, the magnification of displacement measurement is independent of the angle of the reflecting surface of the triangular wave, so that the magnification can be reduced without being limited by the angle of the reflecting surface, in other words, the magnification can be increased, and the measuring accuracy can be improved.
As shown in fig. 3, in an ideal state, the angles of each reflecting surface (on the same side) of the triangular wave reflecting mirror 3 are the same, and the laser beam 2 is made to be incident on the same first reflecting surface 31 (before and after displacement) by the arrangement of the reflecting mirror 4, and the laser beam reflected by the reflecting mirror 4 is reflected to the second reflecting surface 32 of the triangular wave reflecting mirror 3 along the same path before and after displacement, that is, the laser beam reflected by the triangular wave reflecting mirror 3 is made to be incident on the photodetector along the same path. However, it is difficult to ensure that each reflecting surface of the triangular wave reflecting mirror 3 maintains the same angle, that is, the angles of the first reflecting surface 31 and the second reflecting surface 32 may have a certain angle error, so that the laser beams reflected by the triangular wave reflecting mirror 3 before and after displacement cannot be incident to the photodetector along the same path, as shown in fig. 2, and thus the magnification of the displacement sensor cannot be ensured.
However, in the present embodiment, by arranging the two photodetectors 7 and the beam splitter group 5, when there is a processing error in the angle between the first reflecting surface 31 and the second reflecting surface 32, the magnification of one photodetector 7 (such as the PSD2 in FIG. 4) is reduced (still in an enlarged state), and the magnification of the other photodetector 7 (such as the PSD1 in FIG. 4) is increased, and the result is synthesized The amplification factor of the whole displacement sensor can be kept unchanged, so that the amplification factor can be influenced by the angle error of the second reflecting surface 32 and the first reflecting surface 31, in other words, the amplification factor of the displacement sensor can be ensured not to be influenced by the processing technology of the triangular wave reflector 3.
It should be noted that, in this embodiment, based on the consideration of convenient operation and assembly, as shown in fig. 2, the beam splitter and the reflecting mirror are disposed at an included angle of 90 degrees, and the two photodetectors are disposed in parallel. However, as an embodiment, the beam splitter group may have other arrangements, for example, as shown in fig. 4, so long as the following conditions are satisfied:
The spectroscope and the reflector are arranged at a certain included angle, and the laser beams reflected by the reflecting surface of the triangular wave reflector are incident to the spectroscope, one part of the laser beams are reflected by the spectroscope and the reflector in sequence and then are incident to one of the refracting mirrors 6 to be refracted and are incident to the corresponding photoelectric detector 7, and the other part of the laser beams are transmitted by the spectroscope and then are incident to the other refracting mirror 6 to be refracted and are incident to the corresponding photoelectric detector 7.
For example, when the beam splitter and the reflecting mirror are disposed at an included angle other than 90 degrees, the displacement measured by the PSD1 and the PSD2 is reduced (the displacement amount of the object to be measured is still an amplified state, that is, only the reduction of the amplification factor), and is increased, but the reduction is different from the increase, for example, the amplification factor after the displacement of the PSD1 is increased is d1 times, the amplification factor after the displacement of the PSD2 is reduced is d2 times, and then the displacement value of the novel displacement sensor with the refractive mirror (that is, the displacement value of the object to be measured) is:
In addition, when the beam splitter and the reflecting mirror are arranged at an included angle other than 90 degrees, the incident angles of the laser beams incident to the PSD1 and the PSD2 can be the same by setting the position relationship between the PSD1 and the PSD2, so that when the angle of the reflecting surface of the triangular wave reflecting mirror changes, the displacement changes measured by the PSD1 and the PSD2 are respectively reduced and increased by the same times, and the operation process is simplified.
As a preferred implementation mode, the displacement sensor can further comprise a shell 8, the laser source 1, the reflecting mirror 4, the spectroscope group 5, the refracting mirror 6 and the photoelectric detector 7 are fixedly arranged in the shell 8 to form a reading head, and the laser beam 2 emitted by the laser source 1 and the reflected light beam thereof can pass through the receiving and transmitting end face of the reading head. The laser source 1, the reflecting mirror 4, the spectroscope group 5, the refracting mirror 6 and the photoelectric detector 7 are fixedly arranged in the shell 8, so that the positions of the laser source, the reflecting mirror 4, the spectroscope group 5, the refracting mirror 6 and the photoelectric detector can be kept fixed, and synchronous displacement among all the components can be ensured.
During measurement, the triangular wave reflector 3 can be fixed on the measured object according to actual application conditions, the reading head is kept fixed, and when the measured object is displaced, the triangular wave reflector 3 and the reading head relatively move, and the reading head can measure and obtain the displacement value of the triangular wave reflector 3, namely the measured object; or the reading head can be fixed on the measured object, the triangular wave reflector 3 is kept motionless, the measured object is displaced to drive the reading head to move, the reading head and the triangular wave reflector 3 are relatively displaced, the reading head can measure the relative displacement between the reading head and the triangular wave reflector 3, and then the displacement value of the measured object is obtained; the triangular wave reflector 3 or the reading head is selected for fixing on the measured object, so that the measurement convenience is improved.
When the novel displacement sensor with the refractive mirror is used for measuring displacement, the steps are as follows:
step one, fixing an object to be measured on a triangular wave reflector or a reading head;
step two, adjusting the position relation of the laser beam, the triangular wave reflector, the photoelectric detector, the reflector, the refractor and the spectroscope group, so that the reflector receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface, the spectroscope and the reflector are arranged at a certain included angle, the laser beam reflected by the second reflecting surface of the triangular wave reflector is incident to the spectroscope, one part of the laser beam is reflected by the spectroscope and the reflector in sequence and then is incident to one of the refractors to be refracted and then is incident to the corresponding photoelectric detector, and the other part of the laser beam is transmitted by the spectroscope and then is incident to the other refractor to be refracted and then is incident to the corresponding photoelectric detector;
Emitting laser beams, wherein the laser beams respectively enter two refracting mirrors after passing through a first reflecting surface, a reflecting mirror, a second reflecting surface and a spectroscope group of the triangular wave reflecting mirror in sequence, and the initial positions of the laser beams are detected by corresponding photoelectric detectors after being refracted by the refracting mirrors;
Fourthly, the measured object is displaced, and in the displacement process, the photoelectric detector detects the position change of the laser beam until the measured object stops displacement;
And fifthly, the photoelectric detectors are communicated with a processing system, and the processing system obtains a displacement value of the detected object by processing the position changes detected by the two photoelectric detectors.
Example 2
Referring to fig. 5, the refractive displacement sensor in this embodiment is different from the refractive displacement sensor described in embodiment 1 in that: in the refraction type displacement sensor provided in this embodiment, the refraction type displacement sensor includes two reading heads, the two reading heads are identical in structure, and the positional relationship between the two reading heads satisfies: during the measurement, at least one reading head can read the variation of the incidence position of the laser beam on the photodetector.
The displacement sensor in this embodiment can realize continuous displacement measurement. Specifically, one of the two reading heads can be selected for measurement, when the laser beam reflection point in one reading head is located at some positions of the reflection surfaces, such as the top end of the reflection surface, the intersection line position of the two reflection surfaces, and the like, the length of the corresponding photoelectric detector is limited, so that the corresponding photoelectric detector cannot reflect the laser beam, the displacement value of the corresponding photoelectric detector cannot be calculated, the laser beam reflection point of the other reading head is located at other positions of the other reflection surface, the laser beam reflection point can reflect the corresponding photoelectric detector and can perform conversion measurement, at least one of the laser beams reflected by each reflection surface 31 on the triangular wave reflector 3 can reflect the corresponding photoelectric detector, and at the moment, the processing system can switch back and forth to calculate the reflected laser beam position change of the photoelectric detectors in the two different reading heads, so that the measurement of the displacement change of the measured object is realized.
It is easy to understand that in this embodiment, the purpose of setting the two reading heads is to avoid that when one group of photodetectors cannot receive the laser beam, the other group of photodetectors can receive the laser beam to implement displacement measurement, so other setting modes besides the setting mode shown in fig. 5 are also possible, as long as the two reading heads are set in a staggered manner, so that the initial incident point positions of the laser beam incident on the first reflecting surface of the triangular wave reflector are different. For example, the laser beam in the second readhead may be incident on another first reflecting surface (see fig. 5) on the same side as the first reflecting surface on which the laser beam of the first readhead is incident, or may be incident on another first reflecting surface on the opposite side of the first reflecting surface on which the laser beam of the first readhead is incident, or may be incident on the same reflecting surface on which the laser beam is incident, but the incident point positions are different.
The two sets of measuring systems can be arranged in one shell to form one reading head, or the two sets of measuring systems can be respectively arranged in one shell to form two reading heads. Meanwhile, under the condition that the incidence positions of the laser beams received by the photoelectric detectors of at least one group of reading heads are guaranteed, the number and the placement positions of the reading heads are not limited.
When the novel displacement sensor with the refractive mirror in the embodiment is used for measurement, the steps are as follows:
step one, fixing an object to be measured on a triangular wave reflector or a reading head;
step two, adjusting the position relation of the laser beam, the triangular wave reflector, the photoelectric detector, the reflector, the refractor and the spectroscope group, so that the reflector receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface, the spectroscope and the reflector are arranged at a certain included angle, the laser beam reflected by the second reflecting surface of the triangular wave reflector is incident to the spectroscope, one part of the laser beam is reflected by the spectroscope and the reflector in sequence and then is incident to one of the refractors to be refracted and then is incident to the corresponding photoelectric detector, and the other part of the laser beam is transmitted by the spectroscope and then is incident to the other refractor to be refracted and then is incident to the corresponding photoelectric detector;
Step three, emitting laser beams, wherein the laser beams pass through a first reflecting surface, a reflecting mirror, a second reflecting surface, a spectroscope group and a refracting mirror of the triangular wave reflecting mirror in sequence, and then the initial positions of the laser beams are detected by two photoelectric detectors;
Fourthly, the measured object is displaced, and in the displacement process, the photoelectric detector detects the change of the position of the laser beam until the measured object stops displacing; when the photoelectric detector cannot receive the reflected laser beam, switching to another reading head to repeat the operation process;
and fifthly, the processing system obtains a displacement value of the measured object by processing the position changes detected by the two photoelectric detectors.
As shown in fig. 2, a position sensitive detector PSD is used as the photodetector.
The spectroscope group can be a component formed by integrating the spectroscope and the reflecting mirror, is convenient to manufacture and ensures the vertical angle between the spectroscope and the reflecting mirror, and the spectroscope and the reflecting mirror are made of the same raw material at the moment; the spectroscope group can also be formed by connecting a spectroscope and a reflecting mirror.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that changes and substitutions are within the scope of the present invention.
Claims (8)
1. A novel displacement sensor with a refractive mirror, comprising:
The triangular wave reflector comprises a first reflecting surface and a second reflecting surface;
A laser beam incident on a first reflecting surface of the triangular wave reflecting mirror;
the reflector is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflector and reflecting the laser beam to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface;
The beam splitter group comprises a beam splitter and a reflecting mirror, the beam splitter and the reflecting mirror are arranged at a certain included angle, the laser beams reflected by the second reflecting surface of the triangular wave reflecting mirror are made to enter the beam splitter, one part of the laser beams are reflected by the beam splitter and the reflecting mirror in sequence and then enter one of the refracting mirrors, and the other part of the laser beams are transmitted by the beam splitter and then enter the other refracting mirror;
The two refractors are used for receiving the laser beams transmitted or reflected by the spectroscope group and refracting the laser beams;
each photoelectric detector corresponds to one refraction mirror respectively and is used for receiving the laser beams refracted by the corresponding refraction mirror and measuring the incident position of the laser beams;
the processing system is used for calculating a displacement change value of the measured object according to the incident position change value of the laser beam received by the photoelectric detector;
the incident surface and the emergent surface of the two refractors are planes, and the incident surface and the emergent surface are parallel to each other;
the refractor is attached to the photodetector.
2. The novel displacement sensor with refractor of claim 1, wherein the reflector is parallel to the first reflecting surface and is parallel to the second reflecting surface, and the acute angle of the laser beam to the first reflecting surface is equal to twice the angle of the first reflecting surface to the horizontal plane.
3. The novel displacement sensor with refractor of claim 1, wherein the laser beam is P polarized light.
4. The novel displacement sensor with refractor according to claim 1, wherein the arrangement positions between the two photodetectors and the spectroscope set satisfy the relationship: the incidence angles of the laser beams respectively entering the two photoelectric detectors after passing through the spectroscope group are the same.
5. The novel displacement sensor with refractor of claim 4, wherein the beam splitter and the reflector are disposed at an angle of 90 degrees and the two photodetectors are disposed in parallel.
6. The novel displacement sensor with a refractor according to any one of claims 1-5, further comprising a housing, wherein the laser beam is emitted by the laser source, and the laser source, the reflector, the spectroscope set, the two photodetectors and the two refractors are all fixedly arranged in the housing to form a reading head.
7. The novel displacement sensor with refractor according to claim 6, wherein the number of the reading heads is at least two, and the positional relationship between the at least two reading heads satisfies: during the measurement, at least one reading head can read the variation of the incidence position of the laser beam on the photodetector.
8. A method of measuring a novel displacement sensor with a refractive mirror according to any one of claims 6 to 7, comprising the steps of:
fixing the measured object on a triangular wave reflector or a reading head;
The position relationship of the laser beam, the triangular wave reflector, the photoelectric detector, the reflector, the refractor and the spectroscope group is adjusted, so that the reflector receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the laser beam incident to the same first reflecting surface, the spectroscope and the reflector are arranged at a certain included angle, the laser beam reflected by the second reflecting surface of the triangular wave reflector is incident to the spectroscope, one part of the laser beam is reflected by the spectroscope and the reflector in sequence and then is incident to one of the refractors to be refracted and be incident to the corresponding photoelectric detector, and the other part of the laser beam is transmitted by the spectroscope and then is incident to the other refractor to be refracted and be incident to the corresponding photoelectric detector;
the method comprises the steps of emitting laser beams, wherein the laser beams respectively enter two refracting mirrors after passing through a first reflecting surface, a reflecting mirror, a second reflecting surface and a spectroscope group of the triangular wave reflecting mirror in sequence, and the initial positions of the laser beams are detected by corresponding photoelectric detectors after being refracted by the refracting mirrors;
The displacement of the detected object, and in the displacement process, the photoelectric detector detects the position change of the laser beam until the detected object stops displacement;
The processing system obtains a displacement value of the measured object by processing the position changes detected by the two photoelectric detectors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308038.XA CN109443219B (en) | 2018-11-05 | 2018-11-05 | Novel displacement sensor with refractive mirror and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308038.XA CN109443219B (en) | 2018-11-05 | 2018-11-05 | Novel displacement sensor with refractive mirror and measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109443219A CN109443219A (en) | 2019-03-08 |
| CN109443219B true CN109443219B (en) | 2024-10-01 |
Family
ID=65550568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811308038.XA Active CN109443219B (en) | 2018-11-05 | 2018-11-05 | Novel displacement sensor with refractive mirror and measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109443219B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109084692B (en) * | 2018-11-05 | 2024-10-15 | 北方民族大学 | Differential displacement sensor with refractive mirror and measuring method thereof |
| CN109900225B (en) * | 2019-04-24 | 2021-01-22 | 吉林大学 | Ultrahigh-precision angle measuring system |
| CN109916296B (en) * | 2019-04-25 | 2024-02-09 | 北方民族大学 | Laser interference device |
| CN110553588B (en) * | 2019-10-15 | 2024-06-07 | 东莞市佳视精密科技有限公司 | Precise laser measuring head device of measuring instrument and use method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN108444397A (en) * | 2018-05-18 | 2018-08-24 | 北方民族大学 | New Displacement Transducer and its measurement method |
| CN208887576U (en) * | 2018-11-05 | 2019-05-21 | 北方民族大学 | New Displacement Transducer with refracting telescope |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003279308A (en) * | 2002-03-22 | 2003-10-02 | Fuji Photo Film Co Ltd | Position detecting apparatus and image exposure apparatus |
| JP2010032221A (en) * | 2008-07-24 | 2010-02-12 | Sanyo Electric Co Ltd | Beam irradiation apparatus |
| CN104897064B (en) * | 2015-06-09 | 2018-06-01 | 张白 | A kind of new smooth arm amplifying type high precision length sensor and measuring method |
| KR102416570B1 (en) * | 2016-06-08 | 2022-07-04 | 삼성디스플레이 주식회사 | Laser crystalling apparatus and laser crystalling method |
| CN105973170A (en) * | 2016-06-16 | 2016-09-28 | 中国科学院西安光学精密机械研究所 | Polarization beam combination auto-collimation optical path system based on birefringent element |
| CN106352801B (en) * | 2016-10-17 | 2018-03-02 | 海伯森技术（深圳）有限公司 | A kind of modification method of laser triangle displacement sensor and its nonlinearity erron |
| CN107063134A (en) * | 2016-11-02 | 2017-08-18 | 中北大学 | Deep Hole Straightness Test Device |
| US10101181B1 (en) * | 2017-03-30 | 2018-10-16 | Mitutoyo Corporation | Linear displacement sensor using a position sensitive detector |
| CN108716887B (en) * | 2018-05-18 | 2024-09-13 | 重庆天成集创科技有限公司 | Differential displacement sensor and measuring method thereof |
-
2018
- 2018-11-05 CN CN201811308038.XA patent/CN109443219B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN108444397A (en) * | 2018-05-18 | 2018-08-24 | 北方民族大学 | New Displacement Transducer and its measurement method |
| CN208887576U (en) * | 2018-11-05 | 2019-05-21 | 北方民族大学 | New Displacement Transducer with refracting telescope |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109443219A (en) | 2019-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109443219B (en) | Novel displacement sensor with refractive mirror and measuring method thereof | |
| CN108716887B (en) | Differential displacement sensor and measuring method thereof | |
| CN111721235B (en) | Photoelectric edge detection system and detection method thereof | |
| CN108444396B (en) | Light path consistent displacement sensor and measuring method thereof | |
| US20080137061A1 (en) | Displacement Measurement Sensor Using the Confocal Principle | |
| CN109084692B (en) | Differential displacement sensor with refractive mirror and measuring method thereof | |
| CN109342758B (en) | Speed measuring sensor | |
| CN109084691B (en) | Refractive displacement sensor and measuring method thereof | |
| CN109141257B (en) | Displacement sensor with refractive mirror capable of improving magnification and measuring method thereof | |
| CN110579284B (en) | Interference type laser wavelength measuring device and use method thereof | |
| JPH0345322B2 (en) | ||
| CN109696129B (en) | Precise displacement sensor and measuring method thereof | |
| CN108444397B (en) | Displacement sensor and measuring method thereof | |
| CN208887575U (en) | A kind of refraction type displacement sensor | |
| CN208833182U (en) | Differential type displacement sensor with refracting telescope | |
| US9719809B2 (en) | Optical unit and displacement measuring device | |
| CN208109024U (en) | A kind of New Displacement Transducer | |
| CN208887576U (en) | New Displacement Transducer with refracting telescope | |
| CN109141258B (en) | Light path consistent displacement sensor with refractive mirror and measuring method thereof | |
| CN109945788A (en) | New Displacement Transducer based on corner cube mirror | |
| CN209027459U (en) | The displacement sensor that amplification factor can be improved with refracting telescope | |
| CN112923848B (en) | Correlation type laser size measurement sensor | |
| CN208936970U (en) | The consistent formula displacement sensor of optical path with refracting telescope | |
| CN208206038U (en) | A kind of differential type displacement sensor | |
| US20080130014A1 (en) | Displacement Measurement Sensor Using the Confocal Principle with an Optical Fiber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |