CN109374260A - Calibration system and calibration method for double-collimation zero included angle of optical transmission device - Google Patents
Calibration system and calibration method for double-collimation zero included angle of optical transmission device Download PDFInfo
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- CN109374260A CN109374260A CN201811365141.8A CN201811365141A CN109374260A CN 109374260 A CN109374260 A CN 109374260A CN 201811365141 A CN201811365141 A CN 201811365141A CN 109374260 A CN109374260 A CN 109374260A
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- 239000011521 glass Substances 0.000 claims description 11
- 238000002310 reflectometry Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 229920006335 epoxy glue Polymers 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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Abstract
The invention relates to a calibration system and a calibration method for a double-collimation zero included angle of an optical transmission device. The system is simple in structure and can calibrate the double-collimation zero included angle of the optical transmission device efficiently under the conditions of high temperature and low temperature. The system comprises an electric control rotary table, a double-faced reflector, a two-dimensional adjusting table, a first Proro prism device, a first multi-tooth dividing table, a second Proro prism device, a second multi-tooth dividing table, an auto-collimation theodolite and a plane reflector, wherein the electric control rotary table, the double-faced reflector and the two-dimensional adjusting table are arranged in a constant temperature test box, and the first Proro prism device, the first multi-tooth dividing table, the second Proro.
Description
Technical field
The invention belongs to optical fields, and in particular to a kind of calibration system and mark of the double-collimation zero-bit angle of optical delivery system
Determine method.
Background technique
Optical delivery system is now widely used for Spacecraft Launch field as a kind of optical instrument, is in the field
Automatic aiming platform important component.Optical delivery system, which has, carries out low-angle survey using auto-collimation optical principle
The function of amount, it can be achieved that azimuth information aiming and transmitting, and finally assist to complete the orientation for place of Spacecraft Launch.
Optical delivery system belongs to more optical axis systems, is mainly made of large and small two collimators.Large and small two collimators
Zero-bit angle, that is, double-collimation zero-bit angle be the most important performance indicator of optical delivery system, calibration can be direct whether accurate
Influence final orientation for place precision.
Since optical delivery system is applied to Spacecraft Launch field, use environment is at outdoor launching site, therefore to it
Environmental suitability also has higher requirement.Currently, the working temperature environment of optical delivery system is -40 DEG C~+50 DEG C.At this
Under the high/low temperature condition of sample, when the working condition of each component is compared with room temperature can difference, certainly will will lead under high/low temperature condition
Double-collimation zero-bit angle compared with room temperature when there are deviations.Obviously, it when optical delivery system dispatches from the factory, only provides under normal temperature condition
Double-collimation zero-bit angle calibration value has little significance.It can be seen that the accurate calibration of the double-collimation zero-bit angle under high/low temperature condition
It is vital.
The scaling method technology maturation of double-collimation zero-bit angle under normal temperature condition, but under high/low temperature condition, especially-
40 DEG C of low temperature and+50 DEG C of high temperature, can meet under the conditions of temperature extreme in this way without any test equipment now should
The testing requirement of angle calibration.In other words, at present the accurate calibration of the double-collimation zero-bit angle under high/low temperature condition be can not be real
Existing, technical solution or calibration system more without a kind of reasonable can solve this problem.Therefore, double under high/low temperature condition
The calibration for collimating zero-bit angle is a great problem.
For these reasons, the mark of the double-collimation zero-bit angle of optical delivery system under a kind of highly desirable high/low temperature condition
Determine system.
Summary of the invention
It is simple the present invention provides a kind of structure and can be efficiently in height in order to solve the problems, such as background technique
The calibration system and scaling method that the double-collimation zero-bit angle of optical delivery system is demarcated under cryogenic conditions.
The technical solution of the invention is as follows:
The present invention provides a kind of calibration systems of the double-collimation zero-bit angle of optical delivery system, are characterized in that
Including computer, Homothermal Proof Box, automatically controlled turntable, double mirror, two-dimension adjustment platform, first general sieve prism dress
It sets, the first multiteeth indexing table, second general sieve prism apparatus, the second multiteeth indexing table, autocollimation theodolite and plane mirror；
Homothermal Proof Box side wall is equipped with optical window；
Automatically controlled turntable is installed in the inside of Homothermal Proof Box, optical delivery system to be measured is placed on automatically controlled turntable, to photometry
Two-dimension adjustment platform is installed on transfer device top cover, biplane reflecting mirror is installed on two-dimension adjustment platform；
Computer is electrically connected with Homothermal Proof Box, optical delivery system to be measured respectively；
The outside of Homothermal Proof Box is equipped with autocollimation theodolite, and the side of autocollimation theodolite sets up plane mirror；It is flat
Face reflection aperture of mirror should cover the small autocollimator center by optical delivery system to be measured between the center of double mirror
Away from；
First general sieve prism apparatus be mounted on the first multiteeth indexing table and in first general sieve prism apparatus prism center
Height is consistent with the centre-height of small autocollimator in optical delivery system to be measured；First general sieve prism apparatus is located at auto-collimation warp
Between latitude instrument and the optical window；
Second general sieve prism apparatus be mounted on the second multiteeth indexing table and in second general sieve prism apparatus prism center
Height is consistent with the centre-height of autocollimator big in optical delivery system to be measured；Second general sieve prism apparatus is located at auto-collimation warp
Between latitude instrument and the optical window.
Further, above-mentioned optical window is not less than φ 200mm using quartz production, bore, and two sides is coated with anti-reflection film,
It can be seen that integral transmitance is 90% or more；Optical window outer ring is equipped with heating resistance wire, and resistance value is ± 10 Ω of 45 Ω.
Further, above-mentioned double mirror is by optical epoxy glue sticking on two-dimension adjustment platform.
In order to keep entire stated accuracy higher, the preferred parameter of all parts in system of the invention are as follows:
1, first general sieve prism apparatus and second general sieve prism apparatus are provided with the circle air level of triangular base and 6 ', rib
Mirror is all made of the glass material of model K9, and effective area is 45mm × 30mm, and two right-angle surfaces of prism are coated with internal reflection film,
It can be seen that integrated reflectivity is 96% or more；For prism under circle air level leveling state, rib ridge unevenness is not more than 30 ".
2, double mirror is the glass material using model K9, and bore is φ 30mm, two-sided to be coated with external reflectance film,
It can be seen that integrated reflectivity is 96% or more, the depth of parallelism < 2 " of two reflectings surface.
3, the first multiteeth indexing table and the second multiteeth indexing table have subdivision drum, and indexing accuracy is better than 0.2 ", carrying
Ability >=10kg；Autocollimation theodolite level survey time precision≤0.5 ".
4, plane mirror uses the glass material of model K9, and bore is φ 300mm, is coated with internal reflection film, it is seen that product
Dividing reflectivity is 96% or more, and surface figure accuracy RMS value is not less than λ/20.
5, the adjustable temperature range of Homothermal Proof Box is -55 DEG C~+80 DEG C, and temperature stability is ± 1 DEG C.
6, automatically controlled turntable is stepper motor turntable, and normal operation circumstances temperature range is -50 DEG C~+60 DEG C, bearing capacity
Not less than 10kg.
Further, in order to avoid installing the original top cover that will not destroy optical delivery system to be measured when two-dimension adjustment platform,
Therefore, which is replaced to be measured using a shape, size, material general top cover identical with optical delivery system top cover to be measured
Optical delivery system top cover covers connected two-dimension adjustment platform in General top.
Based on the above-mentioned description to calibration system structure, now it is situated between to using the calibration system to the method demarcated
It continues:
[1] tower for adjusting two reflectings surface of double mirror is poor；
[1.1] autocollimation theodolite levels, and autocollimation theodolite is adjusted into centre-height and double mirror
Heart position with equally height；
[1.2] collimation aiming is carried out to one reflecting surface of double mirror by autocollimation theodolite；
[1.3] automatically controlled turntable is controlled again to be rotated in diameter direction, is reused two-dimension adjustment platform and is adjusted auto-collimation longitude and latitude
Instrument carries out collimation aiming to another reflecting surface of double mirror, it is desirable that 2 ' or less tower difference to；
Fill the centre-height of first general sieve prism apparatus and second general sieve prism apparatus with optical delivery to be measured respectively
The small autocollimator and big autocollimator centre-height set are contour；Then first general sieve prism apparatus and second general sieve prism are filled
It sets and is leveled；
[3] calibrated and calculated；
Homothermal Proof Box is opened, starts high temperature or low-temperature test, reaches requirement to temperature and keep stable；
[3.1] by the small misalignment of the small autocollimator of computer acquisition optical delivery system to be measured, small misalignment is observed
Angle value, and the subdivision drum for rotating the first multiteeth indexing table makes small misalignment angle value zero, is denoted as small zero-bit；
[3.2] the first multiteeth indexing table is rotated 180 °, small zero-bit is drawn to the rib of first general sieve prism apparatus at this time
Mirror normal；The centre-height for changing autocollimation theodolite is extremely contour with the centre-height of first general sieve prism apparatus, levels autocollimatic
Straight theodolite；
[3.3] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, then turns
Dynamic autocollimation theodolite carries out collimation aiming to first general sieve prism apparatus and reads orientation values HA；
[3.4] centre-height for changing autocollimation theodolite is extremely contour with the centre-height of double mirror, levels autocollimatic
Straight theodolite；
[3.5] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, then turns
Dynamic autocollimation theodolite carries out collimation aiming to the reflecting surface of double mirror at this time and reads orientation values Hm1；
[3.6] the diameter direction that double mirror is turned to by controlling automatically controlled turntable, using autocollimation theodolite to double
Another reflecting surface of face reflecting mirror 6 carries out collimation aiming and reads orientation values Hm2；
[3.7] by the large misalignment angle of the big autocollimator 8 of computer acquisition optical delivery system to be measured, big misalignment is observed
Angle value, and the subdivision drum for rotating the second multiteeth indexing table makes large misalignment angle value zero, is denoted as big zero-bit；
[3.8] the second multiteeth indexing table is rotated 180 °, big zero-bit is drawn to the rib of second general sieve prism apparatus at this time
Mirror normal；The centre-height for changing autocollimation theodolite is extremely contour with the centre-height of second general sieve prism apparatus, levels autocollimatic
Straight theodolite；
[3.9] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, then turns
Dynamic autocollimation theodolite carries out collimation aiming to second general sieve prism apparatus and reads orientation values HB；
[3.10] according to formula Δ=HB-HA-(Hm1-Hm2) calculate and calibrate double-collimation the zero of optical delivery system to be measured
Position angle.
The invention has the advantages that
1, initiative.Present invention employs the technological means of mature and reliable, by providing the ring of calibration in Homothermal Proof Box
The mode of the test condition of calibration is provided outside border condition and Homothermal Proof Box to realize.Testing equipment and test equipment separate
It opens, it is non-interference, it is independent of each other；Connection between the two is established by autocollimatic straight light path again, environmental test and angle are demarcated into phase
In conjunction with providing initiative technical solution and calibration system, thoroughly solve the optical delivery dress under original high/low temperature condition
Set the problem that double-collimation zero-bit angle can not be demarcated.
2, structure is simple.The present invention is divided into test subsystem (including Homothermal Proof Box, automatically controlled turntable, optical delivery to be measured
Device, computer etc.) and test subsystem (including general sieve prism apparatus, autocollimation theodolite, multiteeth indexing table, plane reflection
Mirror etc.) two parts, and connection is established by autocollimatic straight light path, it is combined into a set of calibration system, is had the advantages of simple structure and easy realization.
3, high efficiency.Present invention employs Homothermal Proof Box, provide reliable experimental enviroment condition, while constant temperature test
Automatically controlled turntable is used in case, is realized under high/low temperature condition to the position control of tested optical delivery system；Homothermal Proof Box
Outside using the combination of general sieve prism apparatus and multiteeth indexing table of two sets of fixed stations, and using plane mirror as calibration
Benchmark.It can be seen that the instrument and equipment station that the present invention uses is fixed, the position of tested optical delivery system is rotated also by electricity
Control is completed, and the position for changing autocollimation theodolite is only needed in calibration process.Therefore, topology layout of the invention is reasonable, mark
Determine program clear and smooth, entire calibration process is no more than 15min, fundamentally realizes high efficiency.
4, high-precision.Present invention employs survey time precision better than 0.5 " autocollimation theodolite, indexing accuracy be better than 0.2 "
The test equipments such as multiteeth indexing table, and be arranged at outside Homothermal Proof Box, test ambient temperature without influence, protects test equipment
The high-precision advantage of test equipment is demonstrate,proved；The present invention additionally uses the plane reflection that surface figure accuracy RMS value is not less than λ/20 simultaneously
Mirror, the two sides depth of parallelism are not more than 2 " double mirror and a series of equipment such as can heat the optical window for preventing frosting and
Measure, the strong guarantee stability and precision of entire calibration process.The final composite calibration precision of the present invention is not more than 3 ", it is complete
The requirement for meeting the double-collimation zero-bit angle calibration of optical delivery system under high/low temperature condition entirely, fundamentally realizes high-precision
Degree.
Detailed description of the invention
Fig. 1 is the double test schematic diagrams for sighting poor calibration system of autocollimation theodolite provided by the present invention.
1- autocollimation theodolite；The general sieve prism apparatus of 2- second；The general sieve prism apparatus of 3- first；4- optical window；5- is logical
Use top cover；6- double mirror；7- two-dimension adjustment platform；The big autocollimator of 8-；9- plane mirror；The second multiteeth indexing table of 10-；
The first multiteeth indexing table of 11-；12- optical delivery system to be measured；The small autocollimator of 13-；The automatically controlled turntable of 14-；15- constant temperature test
Case；16- laptop；17- cable-through hole；18- cable.
Specific embodiment
Technical solution of the present invention is done further from the basic framework of system, system composition and scaling method below
It illustrates:
Basic framework
A kind of calibration system of the double-collimation zero-bit angle of optical delivery system, it is automatically controlled in Homothermal Proof Box including being arranged in
Turntable, optical delivery system to be measured, two-dimension adjustment platform and double mirror and first general sieve being arranged in outside Homothermal Proof Box
Prism apparatus, the first multiteeth indexing table, second general sieve prism apparatus, the second multiteeth indexing table, autocollimation theodolite and plane
Reflecting mirror；
Each component in Homothermal Proof Box is by establishing optics outside the optical window and Homothermal Proof Box on Homothermal Proof Box
Access, and be connected with computer and establish electric path, to constitute test subsystem；All parts outside Homothermal Proof Box
It combines and constitutes test subsystem；Two subsystems establish connection by autocollimatic straight light path, are combined into a set of calibration system.
System composition
The detailed composition of the system is referring to Fig. 1, including computer 16, Homothermal Proof Box 15, automatically controlled turntable 14, double-sided reflecting
Mirror 6, two-dimension adjustment platform 7, first general sieve prism apparatus 3, the first multiteeth indexing table 11, second general sieve prism apparatus 2, second are multiple tooth
Circular dividing table 10, autocollimation theodolite 1 and plane mirror 9；
15 side wall of Homothermal Proof Box is equipped with optical window 4 and cable-through hole；
Automatically controlled turntable 14 is installed in the inside of Homothermal Proof Box 15, places optical delivery system 12 to be measured on automatically controlled turntable 14,
Two-dimension adjustment platform 7 is installed on 12 top cover of optical delivery system to be measured, biplane reflecting mirror 6 is installed on two-dimension adjustment platform 7；
Computer 16 is electrically connected with Homothermal Proof Box 15, optical delivery system to be measured 12 respectively；
The outside of Homothermal Proof Box 15 is equipped with autocollimation theodolite 1, and the side of autocollimation theodolite 1 sets up plane mirror
9；9 bore of plane mirror should cover 13 center of small autocollimator by optical delivery system to be measured into double mirror 6
Spacing between the heart；
First general sieve prism apparatus 3 is mounted on the first multiteeth indexing table 11 and prism in first general sieve prism apparatus 3
Centre-height is consistent with the centre-height of autocollimator 13 small in optical delivery system to be measured；First general sieve prism apparatus 3 is located at
Between autocollimation theodolite 1 and the optical window 4；
Second general sieve prism apparatus 2 is mounted on the second multiteeth indexing table 10 and prism in second general sieve prism apparatus 2
Centre-height is consistent with the centre-height of autocollimator 8 big in optical delivery system to be measured；Second general sieve prism apparatus 2 is located at certainly
It collimates between theodolite and the optical window 4.
Wherein, optical delivery system 12 to be measured is Devices to test, and double-collimation zero-bit angle is item to be calibrated.To photometry
The big autocollimator 8 and small autocollimator 13 of transfer device are the internal components of optical delivery system 12 to be measured, zero-bit be to
Survey a part of item.
Autocollimation theodolite 1 is the I grade theodolite applied to primary triangulation and field of precise engineering survey, horizontal
Survey time precision is better than 0.5 ".
Optical window 4 is arranged on the side wall of Homothermal Proof Box 15, and glass material is quartz, and bore is not less than φ 200mm,
Two sides is coated with anti-reflection film, it is seen that integral transmitance is 90% or more；4 outer ring of optical window is equipped with heating resistance wire, resistance value
For ± 10 Ω of 45 Ω, and switch is provided on Homothermal Proof Box 15, to prevent the frosting under cryogenic of optical window 4.
In addition, using a shape, size, material General top identical with optical delivery system top cover to be measured in the system
Lid 5 replaces optical delivery system top cover to be measured, is fixed with two-dimension adjustment platform 7 thereon and is equipped with 6 (double-sided reflecting of double mirror
Mirror 6 is connected on two-dimension adjustment platform 7 by optical epoxy glue)；General top cover 5 is in test installation two-dimension adjustment platform 7 and double
Face reflecting mirror 6 provides platform, it is therefore an objective to will not destroy the structure and lacquer painting of 12 top cover of optical delivery system to be measured.
Parameter declaration
Circle air level of the second general sieve prism apparatus 2 with triangular base and 6 ', prism centers height are passed with to photometry
The centre-height of the big autocollimator 8 of delivery device 12 is consistent；Second general sieve prism apparatus 2 is the misalignment letter of big autocollimator 8
The cooperative target that breath acquisition and collimation zero-bit determine；The glass material of prism is K9, and effective area is 45mm × 30mm, two right angles
Face is coated with internal reflection film, it is seen that integrated reflectivity is 96% or more；Prism is under circle air level leveling state, and rib ridge is not
Pingdu is not more than 30 ".
Circle air level of the first general sieve prism apparatus 3 with triangular base and 6 ', prism centers height are passed with to photometry
The centre-height of the small autocollimator 13 of delivery device 12 is consistent；First general sieve prism apparatus 3 is the misalignment of small autocollimator 13
The cooperative target that information collection and collimation zero-bit determine；The glass material of prism is K9, and effective area is 45mm × 30mm, and two is straight
Edged surface is coated with internal reflection film, it is seen that integrated reflectivity is 96% or more；Prism is under circle air level leveling state, rib ridge
Unevenness is not more than 30 ".
The glass material of double mirror 6 is K9, and bore is φ 30mm, two-sided to be coated with external reflectance film, it is seen that integral is anti-
The rate of penetrating is 96% or more, and the two sides depth of parallelism is not more than 2 ".
The glass material of plane mirror 9 is K9, and bore is φ 300mm, is coated with internal reflection film, it is seen that integrated reflectivity is
96% or more, surface figure accuracy RMS value is not less than λ/20；Plane mirror 9 provides benchmark for entire test calibration process.
Second multiteeth indexing table 10 is better than 0.2 with subdivision drum, indexing accuracy ", bearing capacity is not less than 10kg.
First multiteeth indexing table 11 is better than 0.2 with subdivision drum, indexing accuracy ", bearing capacity is not less than 10kg.
Automatically controlled turntable 14 be stepper motor turntable, be connected in inside Homothermal Proof Box, normal operation circumstances temperature range be-
50 DEG C~+60 DEG C, bearing capacity is not less than 10kg；It is disposed on the table top of automatically controlled turntable 14 and is passed to photometry from the bottom to top
Delivery device 12, general top cover 5, two-dimension adjustment platform 7 and double mirror 6 realize the rotation in diameter direction in test.
High/low temperature condition needed for 15 analog of Homothermal Proof Box, controllable temperature range be -55 DEG C~+80 DEG C, meet to
- 40 DEG C and+50 DEG C of high temperature of device optical delivery system low temperature of condition requirement is surveyed, temperature stability is ± 1 DEG C.
Computer 16 is equipped with control software, and automatically controlled turntable can control to rotate, and it is large and small certainly to acquire optical delivery system to be measured
Collimator misalignment angle information simultaneously determines collimation zero-bit；Computer 16 passes through the cable-through hole 17 of Homothermal Proof Box 15 by cable 18,
It is connected with optical delivery system 12 to be measured and automatically controlled turntable 14.
Assembling process and calibration process
System assembly
Automatically controlled turntable 14 is connected in inside Homothermal Proof Box 15, then optical delivery system 12 to be measured is connected in automatically controlled turn
On the table top of platform 14, the light-emitting window direction of the small autocollimator 13 of optical delivery system to be measured should be directed at the light of Homothermal Proof Box 15
Learn window 4；By the cable-through hole 17 on 15 side wall of Homothermal Proof Box, automatically controlled turntable 14, optical delivery to be measured are filled with cable 18
12 are set to be connected with laptop 16；The top cover for dismantling optical delivery system 12 to be measured installs general top cover 5, and be connected two dimension
Platform 7 is adjusted on general top cover 5；Double mirror 6 is connected on two-dimension adjustment platform 7 by optical epoxy glue, it is two-sided anti-
The normal direction for penetrating mirror 6 should be with the big autocollimator 8 of optical delivery system to be measured or the small auto-collimation of optical delivery system to be measured
The optical axis direction of instrument 13 is substantially parallel.
In the outside of Homothermal Proof Box 15, i.e., between optical window 4 and autocollimation theodolite 1, the second multiple tooth indexing is set
Platform 10 and the first multiteeth indexing table 11, then second general sieve prism apparatus 2 and first general sieve prism apparatus 3 are respectively erected in second
On multiteeth indexing table 10 and the first multiteeth indexing table 11.
Calibration process
1, autocollimation theodolite 1 is set up in the outside of Homothermal Proof Box 15 and level, the centre-height of autocollimation theodolite 1
It is contour with the centre-height of double mirror 6；Collimation aiming is carried out to double mirror 6 by autocollimation theodolite 1, then by counting
Calculation machine 16 controls automatically controlled turntable 14 and is rotated in diameter direction, the autocollimatic picture of autocollimation theodolite 1 is observed, in conjunction with its pitching
Value, uses 2 ' or less 7 adjusting tower difference of two-dimension adjustment platform to；
2, make the center of the centre-height of second general sieve prism apparatus 2 and the big autocollimator 8 of optical delivery system to be measured
Highly contour, the center of the small autocollimator 13 of the centre-height and optical delivery system to be measured of first general sieve prism apparatus 3 is high
It spends contour, is leveled by the triangular base of general sieve prism apparatus and circle air level；
3, the power supply for opening Homothermal Proof Box 15 after setting test procedure, starts high temperature or low-temperature test, reaches to temperature
It to required value and keeps after stablizing, carries out the calibration of the double-collimation zero-bit angle of optical delivery system 12 to be measured；When progress low temperature examination
When testing, the whole heating for opening optical window 4 is answered, to prevent 4 frosting of optical window；
4, the small misalignment that the small autocollimator 13 of optical delivery system to be measured is acquired by computer 16, observes small misalignment
Angle value, and the subdivision drum for rotating multiteeth indexing table A11 makes small misalignment angle value zero, is denoted as small zero-bit；
5, the first multiteeth indexing table 11 is rotated 180 °, small zero-bit is drawn to the rib of first general sieve prism apparatus 3 at this time
Mirror normal；The centre-height for changing autocollimation theodolite 1 is extremely contour with the centre-height of first general sieve prism apparatus 3, and leveling is certainly
Collimate theodolite 1；
6, rotation autocollimation theodolite 1 makes it carry out collimation aiming to plane mirror 9 and resets orientation values, is rotated further by
Autocollimation theodolite 1 carries out collimation aiming to first general sieve prism apparatus 3 and reads orientation values HA；
7, the centre-height for changing autocollimation theodolite 1 is extremely contour with the centre-height of double mirror 6, levels auto-collimation
Theodolite 1；
8, rotation autocollimation theodolite 1 makes it carry out collimation aiming to plane mirror 9 and resets orientation values, is rotated further by
Autocollimation theodolite 1 carries out collimation aiming to a reflecting surface of double mirror 6 and reads orientation values Hm1；
9, the diameter direction that automatically controlled turntable 14 turns to double mirror 6 is controlled by computer 16, is passed through using auto-collimation
Latitude instrument 1 carries out collimation aiming to double mirror 6 another reflecting surface and reads orientation values Hm2；
10, the large misalignment angle that the big autocollimator 8 of optical delivery system to be measured is acquired by computer 16, observes big misalignment
Angle value, and the subdivision drum for rotating the second multiteeth indexing table 10 makes large misalignment angle value zero, is denoted as big zero-bit；
11, the second multiteeth indexing table 10 is rotated 180 °, big zero-bit is drawn to the rib of second general sieve prism apparatus 2 at this time
Mirror normal；The centre-height for changing autocollimation theodolite 1 is extremely contour with the centre-height of second general sieve prism apparatus 2, and leveling is certainly
Collimate theodolite 1；
12, rotation autocollimation theodolite 1 makes it carry out collimation aiming to plane mirror 9 and resets orientation values, then turns
Dynamic autocollimation theodolite 1 carries out collimation aiming to second general sieve prism apparatus 2 and reads orientation values HB；
13, according to formula Δ=HB-HA-(Hm1-Hm2) calculate and calibrate the double-collimation zero-bit of optical delivery system to be measured
Angle.
A kind of technical solution provided by the invention thoroughly solves the optical delivery system double-collimation zero under high/low temperature condition
The calibration problem of position angle, and entire calibration process is no more than 15min, composite calibration precision is not more than 3 ".
Claims (10)
1. a kind of calibration system of the double-collimation zero-bit angle of optical delivery system, it is characterised in that:
Including computer, Homothermal Proof Box, automatically controlled turntable, double mirror, two-dimension adjustment platform, first general sieve prism apparatus,
One multiteeth indexing table, second general sieve prism apparatus, the second multiteeth indexing table, autocollimation theodolite and plane mirror；
Homothermal Proof Box side wall is equipped with optical window；
Automatically controlled turntable is installed in the inside of Homothermal Proof Box, places optical delivery system to be measured, optical delivery to be measured on automatically controlled turntable
Two-dimension adjustment platform is installed on device top cover, biplane reflecting mirror is installed on two-dimension adjustment platform；
Computer is electrically connected with Homothermal Proof Box, optical delivery system to be measured respectively；
The outside of Homothermal Proof Box is equipped with autocollimation theodolite, and the side of autocollimation theodolite sets up plane mirror；Plane is anti-
Small autocollimator center by optical delivery system to be measured should be covered to spacing between the center of double mirror by penetrating aperture of mirror；
First general sieve prism apparatus be mounted on the first multiteeth indexing table and in first general sieve prism apparatus prism centre-height
It is consistent with the centre-height of autocollimator small in optical delivery system to be measured；First general sieve prism apparatus is located at autocollimation theodolite
Between the optical window；
Second general sieve prism apparatus be mounted on the second multiteeth indexing table and in second general sieve prism apparatus prism centre-height
It is consistent with the centre-height of autocollimator big in optical delivery system to be measured；Second general sieve prism apparatus is located at autocollimation theodolite
Between the optical window.
2. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 1, it is characterised in that: optics
Window is not less than Ф 200mm using quartz production, bore, and two sides is coated with anti-reflection film, it is seen that integral transmitance is 90% or more；
Optical window outer ring is equipped with heating resistance wire, and resistance value is ± 10 Ω of 45 Ω.
3. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 2, it is characterised in that: described
Double mirror is by optical epoxy glue sticking on two-dimension adjustment platform.
4. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 3, it is characterised in that: described
First general sieve prism apparatus and second general sieve prism apparatus are provided with the circle air level of triangular base and 6 ', and prism is all made of type
Number glass material for being K9, effective area is 45mm × 30mm, and two right-angle surfaces of prism are coated with internal reflection film, it is seen that integral is anti-
The rate of penetrating is 96% or more；For prism under circle air level leveling state, rib ridge unevenness is not more than 30 ".
5. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 4, it is characterised in that: described
Double mirror is the glass material using model K9, and bore is Ф 30mm, two-sided to be coated with external reflectance film, it is seen that integral is anti-
The rate of penetrating is 96% or more, the depth of parallelism < 2 " of two reflectings surface.
6. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 5, it is characterised in that: described
First multiteeth indexing table and the second multiteeth indexing table have subdivision drum, and indexing accuracy is better than 0.2 ", bearing capacity >=10kg；
Autocollimation theodolite level survey time precision≤0.5 ".
7. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 6, it is characterised in that: described
Plane mirror uses the glass material of model K9, and bore is Ф 300mm, is coated with internal reflection film, it is seen that integrated reflectivity is
96% or more, surface figure accuracy RMS value is not less than λ/20.
8. the calibration system of the double-collimation zero-bit angle of optical delivery system according to claim 7, it is characterised in that: described
The adjustable temperature range of Homothermal Proof Box is -55 DEG C~+80 DEG C, and temperature stability is ± 1 DEG C；The automatically controlled turntable is step
Into motor turntable, normal operation circumstances temperature range is -50 DEG C~+60 DEG C, and bearing capacity is not less than 10kg.
9. the calibration system of the double-collimation zero-bit angle of optical delivery system described in -8 any claims according to claim 1,
It is characterized by: being replaced using a shape, size, material general top cover identical with optical delivery system top cover to be measured to be measured
Optical delivery system top cover covers connected two-dimension adjustment platform in General top.
10. a kind of scaling method of the double-collimation zero-bit angle of optical delivery system, which is characterized in that using such as claim 9 institute
The calibration system stated, the specific step that executes is:
[1] tower for adjusting two reflectings surface of double mirror is poor；
[1.1] autocollimation theodolite levels, and autocollimation theodolite is adjusted to the center of centre-height and double mirror height
Spend contour position；
[1.2] collimation aiming is carried out to one reflecting surface of double mirror by autocollimation theodolite；
[1.3] automatically controlled turntable is controlled again to be rotated in diameter direction, is reused two-dimension adjustment platform and is adjusted autocollimation theodolite pair
Another reflecting surface of double mirror carries out collimation aiming, it is desirable that 2 ' or less tower difference to；
[2] make the centre-height of first general sieve prism apparatus and second general sieve prism apparatus respectively with optical delivery system to be measured
Small autocollimator and big autocollimator centre-height are contour；Then by first general sieve prism apparatus and second general sieve prism apparatus into
Row leveling；
[3] calibrated and calculated；
Homothermal Proof Box is opened, starts high temperature or low-temperature test, reaches requirement to temperature and keep stable；
[3.1] by the small misalignment of the small autocollimator of computer acquisition optical delivery system to be measured, small misalignment angle value is observed,
And the subdivision drum for rotating the first multiteeth indexing table makes small misalignment angle value zero, is denoted as small zero-bit；
[3.2] the first multiteeth indexing table is rotated 180 °, small zero-bit is drawn to the prism method of first general sieve prism apparatus at this time
Line；The centre-height for changing autocollimation theodolite is extremely contour with the centre-height of first general sieve prism apparatus, leveling auto-collimation warp
Latitude instrument；
[3.3] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, is rotated further by certainly
Collimation theodolite carries out collimation aiming to first general sieve prism apparatus and reads orientation values HA；
[3.4] centre-height for changing autocollimation theodolite is extremely contour with the centre-height of double mirror, leveling auto-collimation warp
Latitude instrument；
[3.5] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, is rotated further by certainly
Collimation theodolite carries out collimation aiming to the reflecting surface of double mirror at this time and reads orientation values Hm1；
[3.6] the diameter direction that double mirror is turned to by controlling automatically controlled turntable, using autocollimation theodolite to two-sided anti-
Another reflecting surface for penetrating mirror carries out collimation aiming and reads orientation values Hm2；
[3.7] by the large misalignment angle of the big autocollimator of computer acquisition optical delivery system to be measured, large misalignment angle value is observed,
And the subdivision drum for rotating the second multiteeth indexing table makes large misalignment angle value zero, is denoted as big zero-bit；
[3.8] the second multiteeth indexing table is rotated 180 °, big zero-bit is drawn to the prism method of second general sieve prism apparatus at this time
Line；The centre-height for changing autocollimation theodolite is extremely contour with the centre-height of second general sieve prism apparatus, leveling auto-collimation warp
Latitude instrument；
[3.9] rotation autocollimation theodolite makes it carry out collimation aiming to plane mirror and resets orientation values, is rotated further by certainly
Collimation theodolite carries out collimation aiming to second general sieve prism apparatus and reads orientation values HB；
[3.10] according to formula Δ=HB-HA-(Hm1-Hm2) calculate and calibrate optical delivery system to be measured double-collimation zero-bit folder
Angle.
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