CN109141696A - A kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane - Google Patents
A kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane Download PDFInfo
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- CN109141696A CN109141696A CN201810856921.6A CN201810856921A CN109141696A CN 109141696 A CN109141696 A CN 109141696A CN 201810856921 A CN201810856921 A CN 201810856921A CN 109141696 A CN109141696 A CN 109141696A
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- 239000012528 membrane Substances 0.000 title claims abstract description 58
- 230000009975 flexible effect Effects 0.000 title claims abstract description 55
- 230000035807 sensation Effects 0.000 title claims abstract description 26
- 238000012545 processing Methods 0.000 title claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 59
- 229910052751 metal Inorganic materials 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000010410 layer Substances 0.000 claims abstract description 27
- 239000011241 protective layer Substances 0.000 claims abstract description 9
- 230000003321 amplification Effects 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 5
- 238000007405 data analysis Methods 0.000 claims description 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 1
- 230000002463 transducing effect Effects 0.000 abstract description 6
- 230000003993 interaction Effects 0.000 abstract description 4
- 230000006870 function Effects 0.000 abstract description 3
- 230000009471 action Effects 0.000 abstract description 2
- 238000011160 research Methods 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 230000005611 electricity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 241000283725 Bos Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011551 heat transfer agent Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 238000009304 pastoral farming Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The present invention relates to a kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane, the flexible touch sensation sensor includes metal substrate and the piezoelectric membrane, flexible body and protective layer that are set in turn in metal substrate two sides from inside to outside, the two sides of metal substrate is provided with metal electrode and protrusion, and flexible body is equipped with dentalation layer.Compared with prior art, the present invention makes piezoelectric membrane constantly generate vibration by protrusion under the action of elasticity, transducing signal is repeated, piezoelectric membrane is set to touch transducing signal at the first time by the toothing layer of flexible body, reduce the hysteresis quality of signal, perceptional function is improved simultaneously, it can accurately identify pressure size and orientation, range 0-1800kpa, cover the entire scope of human-computer interaction, signal processing system is with good stability and sensitivity, it can be provided for intelligent robot in time, accurately external world's tactile and pressure sensation information, it is of great significance for the research of intelligent robot.
Description
Technical field
The present invention relates to piezoelectric type tactile sensor technology fields, more particularly, to a kind of flexible touching based on piezoelectric membrane
Feel sensor and its signal processing system.
Background technique
Piezoelectric material is to realize the important functional material converted between mechanical energy and electric energy.
Common piezoceramic material has many advantages, such as that piezoelectric property is excellent, dielectric loss is low and electromechanical lotus root collaboration number is big,
It is widely used in PZT (piezoelectric transducer), sensor etc..
Piezoelectric membrane based on piezoelectric ceramics possesses unique characteristic, as a kind of type of dynamic strain sensor, very
It is suitably applied human skin surface or is implanted into the vital signs monitor of inside of human body.Some thin-film components it is sensitive to be enough across
Housing detects human pulse.
When stretching or be bent a piece of piezoelectric polyvinylidene fluoride PVDF polymeric membrane (piezoelectric membrane), film upper/lower electrode surface
Between will generate an electric signal (charge or voltage), and with stretch or curved deformation it is proportional.General piezoresistive material
Material can generate very big all to presser sensor, but for piezoelectric membrane when being longitudinally applied to the power of a very little, in transverse direction
Stress, and if the stress of generation can be much smaller when applying same power to film large area.Therefore, piezoelectric membrane is to dynamic
Stress is very sensitive.
Piezoelectric membrane is very thin, light, very soft, can be with non-active operation, therefore can be widely applied to medical energy converter,
When especially needing to detect subtle signal.Obviously, the characteristics of material, is especially prominent in the case where power supply is limited, and presses
Conductive film is extremely durable, can be subjected to millions of bendings and vibration.
Why piezoelectric membrane can detect very small physical signal again can experience it is significantly movable, be because
The piezoelectric response of pvdf membrane be all in sizable dynamic range it is linear in most cases, as long as can obviously distinguish target letter
Number and noise bandwidth, tiny echo signal can be collected by filter.
Though current existing touch sensor resolution ratio is higher but range is generally smaller, it is only capable of measuring more than ten Ns even only
The pressure of several oxen, killing fluid additive can measure the pressure of several megapascal, but insufficient in small-range section measurement accuracy.
Touch sensor helps to detect quality of materials and rebuilds tactilely-perceptible.To which it can be essence in circumstances not known
Thin manipulation, path planning and barrier avoid providing authentic data.As human-computer interaction is using more and more, touch sensor
Need to have preferable flexibility.
The flexible sensor developed at present is mainly based upon flexible substrates preparation, can't be completely as human skin one
Sample bending and high resilience.
It is badly in need of designing a kind of efficient, reliable transducing signal extraction according to touch-pressure sensation sensing arrangement feature on the market at present
System eliminates the cross jamming between each sensing unit, improves the extraction rate and stability of transducing signal.
It is finally cost problem, sensor inexpensive, wear-resistant, with high duplication and low hysteresis can succeed
Into market.
Therefore, in view of the foregoing drawbacks, there is an urgent need to find a kind of new touch sensor and its signal processing system, to obtain
Range height, high, flexible, inexpensive, wear-resistant, with high duplication and low hysteresis the touch sensor of precision.
Summary of the invention
High, precision that it is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of ranges
Flexible touch sensation sensor high, flexible, inexpensive, wear-resistant, with high duplication and low hysteresis based on piezoelectric membrane
And there is efficient, reliable signal processing system.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of flexible touch sensation sensor based on piezoelectric membrane, including metal substrate and it is set in turn in gold from inside to outside
Belong to piezoelectric membrane, flexible body and the protective layer on substrate two sides, the two sides of metal substrate is provided with metal electrode and protrusion.
Preferably, which further includes gasket, and the gasket is set between the flexible body on metal substrate two sides, and
Positioned at the outside of metal substrate and piezoelectric membrane, for providing space for metal electrode and protrusion.
Preferably, there are two the gasket is set, it is set to the outer of two opposite sides of metal substrate and piezoelectric membrane
Side.
Preferably, the flexible body is equipped with dentalation layer, and the dentalation layer is arranged in flexible body and piezoelectricity
The contact position of film.
Preferably, the dentalation layer is made of the protrusion for the taper being arranged in array, the height of dentalation layer
Less than the height of flexible body, the spacing of the tapered protrusion of dentalation layer is less than a quarter of dentalation layer length, is greater than
/ 20th of dentalation layer length.
Preferably, the protrusion is elastic bumps, is equipped with multiple.
It since protrusion is the object with certain elasticity, deformation and vibrates and provides mechanical energy for piezoelectric membrane, therefore want
Retain certain oscillation space for metal electrode and protrusion, gasket provides support in the surrounding of protrusion, makes protrusion and piezoelectric membrane
Between have certain space.
Preferably, multiple protrusions are regularly distributed at the center on metal substrate two sides.
Protrusion is centrally disposed, there is biggish deformation in operation, is conducive to provide stronger mechanical vibration to piezoelectric membrane
It is dynamic.
Preferably, the every face of metal substrate is set there are four protrusion, is evenly distributed along the periphery around metal substrate core point.
Preferably, the two sides of the metal substrate is all provided with there are four metal electrode, and four metal electrodes are lived apart Metal Substrates
At four angles of plate.
Preferably, the protective layer is silastic-layer.With preferable flexible, bendability, lesser touching can be differentiated
Feel power.
The signal processing system of the flexible touch sensation sensor based on piezoelectric membrane, including processor module；
The processor module passes sequentially through signal conversion module, signal amplification module, piezoelectric sensing module, metal electricity
Pole and piezoelectric membrane are electrically connected, to obtain the electric signal generated under vibration by piezoelectric membrane；
It is electrical that the processor module passes sequentially through data inputting module, data analysis processor and information acquisition module
Connection, the electric signal to generate to vibration are converted into digital signal and are collected and store；
The processor module passes sequentially through slave computer, core switch, ZigBee communication network, terminal, coordinator
It is electrically connected with host computer and LabView platform, the digital signal collected and stored is identified and be handled.
Preferably, the processor module is based on CC2530 processor.
Preferably, the terminal and coordinator are based on CC2530F256 master controller.
Preferably, the slave computer 16 is based on 8051 Integrated Development software of IAR Embedded Workbench for.
Preferably, data are uploaded to host computer by serial ports by the coordinator.
The signal processing system, improve the acquisition rate of sensor array column information, reliability, data transmission it is flexible
Property.
Compared with prior art, the invention has the following advantages:
It is convex when flexible contact pressing based on piezoelectric membrane of the invention feels that the protrusion of sensor experiences the pressure of flexible body
Play a part of constantly generate vibration in natural resiliency, vibrates piezoelectric membrane constantly by the vibration of protrusion, make transducing signal
It is repeated, so that piezoelectric membrane is touched transducing signal at the first time by the toothing layer of flexible body, reduce letter
Number hysteresis quality, while improving perceptional function, can accurately identify pressure size and orientation, the range of the sensing device is
0-1800kpa covers the entire scope of human-computer interaction.
The present invention, which is used, has preferable flexible and bendability by prepared by silicon rubber, can differentiate lesser haptic force
Protective layer, two have flexible body, the protrusion etc. of toothing layer, the touch sensor of Grazing condition have been substantially achieved, with people
Machine interaction using more and more, the present invention can be finely to manipulate in circumstances not known, and path planning and barrier avoid providing
Authentic data.
Signal processing system of the present invention can in time, accurately acquire sensor array information, and will by ZigBee-network
Information is sent to coordinator, and information is uploaded to host computer again and is shown by LabView platform real time graphical, is based on by coordinator
ZigBee technology realizes the wireless real-time information transmission and simultaneous display of tactile sensing information and host computer, and the present invention is based on piezoelectricity
The flexible touch sensation sensor and its signal processing system of film be with good stability and sensitivity, can be intelligent robot
Timely, accurate extraneous tactile and pressure sensation information are provided.Robot can accurately be perceived by contactant by touch sensor
The information of body, design have the touch sensor of high flexibility feature, are of great significance for the research of intelligent robot.
Detailed description of the invention
Fig. 1 is that the present invention is based on the flexible touch sensation sensors of piezoelectric membrane；
Fig. 2 is the structural schematic diagram of metal electrode of the present invention and protrusion；
Fig. 3 is the structural schematic diagram of flexible body dentalation layer of the present invention；
Fig. 4 is touch sensor signal acquisition circuit figure of the present invention.
In figure, 1 is metal substrate, and 2 be piezoelectric membrane, and 3 be gasket, and 4 be flexible body, and 5 be protective layer, and 6 be metal electrode,
7 be protrusion, and 8 be piezoelectric sensing module, and 9 be signal amplification module, and 10 be signal conversion module, and 11 be information acquisition module, 12
It is data inputting module for data analysis processor, 13,14 be data memory module, and 15 be processor module, and 16 be slave computer,
17 be core switch, and 18 be ZigBee communication network, and 19 be terminal, and 20 be coordinator, and 21 be host computer, and 22 be LabView
Platform, 23 be dentalation layer.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
A kind of flexible touch sensation sensor based on piezoelectric membrane, as shown in Figures 1 to 3, including metal substrate 1 and from it is interior to
It is set in turn in the piezoelectric membrane 2, flexible body 4 and protective layer 5 on metal substrate two sides outside, the two sides of metal substrate 1 is provided with
Metal electrode 6 and protrusion 7.
In the present embodiment, which further includes gasket 8, and gasket 8 is set between the flexible body 4 on 1 two sides of metal substrate,
And it is located at the outside of metal substrate 1 and piezoelectric membrane 2, for providing space for metal electrode 6 and protrusion 7.Further preferably pad
There are two piece 3 is set, it is set to the outside on two opposite sides of metal substrate 1 and piezoelectric membrane 2, two pads in the present embodiment
Outside elongated setting of the piece 3 along two opposite sides of metal substrate 1 and piezoelectric membrane 2.
Flexible body 4 in the present embodiment is equipped with dentalation layer 23, and the setting of dentalation layer 23 is thin in flexible body 4 and piezoelectricity
The contact position of film 2.Dentalation layer 23 is made of the protrusion for the taper being arranged in array, and the height of dentalation layer 23 is less than soft
Property body 4 height, the spacing of the tapered protrusion of dentalation layer 23 is less than a quarter of 23 length of dentalation layer, is greater than tooth
/ 20th of 23 length of shape structure sheaf.
The protrusion 7 of the metal substrate of the present embodiment is elastic bumps, is equipped with multiple, and is regularly distributed in Metal Substrate
At the center on 1 two sides of plate.It is preferred that the every face of metal substrate 1 is set there are four protrusion, circumferentially uniformly arranged around 1 central point of metal substrate
Cloth.And the two sides of metal substrate 1 is all provided with there are four metal electrode 6, and four metal electrodes 6 are lived apart four angles of metal substrate 1
Place.
Protective layer 5 in the present embodiment selects silastic-layer.
The signal processing system of flexible touch sensation sensor based on piezoelectric membrane, as shown in figure 4, including processor module
15；
Processor module 15 passes sequentially through signal conversion module 10, signal amplification module 9, piezoelectric sensing module 8, metal electricity
Pole 6 and piezoelectric membrane 2 are electrically connected, to obtain the electric signal generated under vibration by piezoelectric membrane 2；
Processor module 15 passes sequentially through 11 electricity of data inputting module 13, data analysis processor 12 and information acquisition module
Property connection, the digital signal that is converted into of electric signal to generate to vibration is collected and stores；
Processor module 15 passes sequentially through slave computer 16, core switch 17, ZigBee communication network 18, terminal 19, association
Adjust device 20 and host computer 21 and LabView platform 22 to be electrically connected, to collect and the digital signal of storage carry out identification and
Processing.
Wherein, processor module is based on CC2530 processor.Terminal and coordinator are based on CC2530F256 master controller.
Slave computer 16 is based on 8051 Integrated Development software of IAR Embedded Workbench for.Coordinator passes through serial ports for data
It is uploaded to host computer.
Upper and lower surface of the present invention includes the protective layer 5 prepared by silicon rubber, has preferable flexible, bendability, Neng Goufen
Distinguish lesser haptic force, while gasket 3 is that protrusion 7 and metal electrode 6 provide space, flexible touch sensation sensor is by external force
When effect, flexible body 4 is bent, and by the toothing layer 23 of flexible body 4, piezoelectric membrane 2 is allow to touch sensing at the first time
Signal, reduces the hysteresis quality of signal, while improving perceptional function, can accurately identify pressure size and orientation, protrusion 7
When experiencing the pressure of piezoelectric membrane 2, vibration can be constantly generated under the action of elastic force, believe sensing by the vibration of protrusion 7
It number is repeated, after piezoelectric membrane 2 deforms and constantly vibrates, the electric signal of generation is passed through into metal substrate 1
On metal electrode 6 be transmitted to piezoelectric sensing module 8, by signal amplification module 9 by signal amplify and then by signal conversion
Module 10 converts electrical signals to digital signal, is handled signal by processor module 16, and processor module 15 passes through
After information acquisition module 11 is converted to digital signal by Data Analysis Services module 12 after being acquired signal, pass through data
13 typing processor module 15 of recording module, then stored by data memory module 14, processor module 15 will collect
Information be transmitted to slave computer 16, slave computer 16 selects the IAR Embedded Workbench for 8051 with power
Integrated Development software, the C/C++ cross-compiler and debugger that IAR Embedded Workbench for 8051 is internally integrated
It is professional Embedded Application developing instrument that is most complete and being easiest to introduction in current all C/C++ compiling debugging softwares,
User interface is succinct, friendly, intuitive, and slave computer 16 will pass to core switch 17 after the touch-pressure sensation information package of acquisition, so
Core switch 17 is wirelessly transmitted to the terminal 19 using CC2530 as microcontroller, terminal 19 by zigBee communication network 18 again
Information is acquired, handles, transmits wirelessly programming, receives terminal 19 as the coordinator 20 of microcontroller using CC2530 and transmits
Information, coordinator 20 parses data, data is uploaded to by serial ports the programming of host computer 21 again, and host computer 21 leads to
LabView platform 22 is crossed to parse data and shown, it is different to create application program from traditional use line of text,
LabView creates application program by using icon and figure, then constructs user interface with one group of tool and object, with
LabView platform 22 realizes the heat transfer agent that real-time reception is uploaded by slave computer 16 and the journey for passing through virtual instrument graphic software platform
Sequence design.
The above-mentioned description to embodiment is for ease of ordinary skill in the art to understand and use the invention.It is ripe
The personnel for knowing art technology obviously easily can make various modifications to these embodiments, and general original described herein
It ought to use in other embodiments without having to go through creative labor.Therefore, the present invention is not limited to the above embodiments, this field
Technical staff's announcement according to the present invention, improvement and modification made without departing from the scope of the present invention all should be in guarantors of the invention
Within the scope of shield.
Claims (10)
1. a kind of flexible touch sensation sensor based on piezoelectric membrane, which is characterized in that including metal substrate (1) and from inside to outside
It is set in turn in the piezoelectric membrane (2), flexible body (4) and protective layer (5) on metal substrate two sides, the two sides of metal substrate (1) is equal
It is provided with metal electrode (6) and protrusion (7).
2. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that the sensor
It further include gasket (8), the gasket (8) is set between the flexible body (4) on metal substrate (1) two sides, and is located at Metal Substrate
The outside of plate (1) and piezoelectric membrane (2), for providing space for metal electrode (6) and raised (7).
3. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 2, which is characterized in that the pad
There are two piece (3) is set, it is set to the outside on two opposite sides of metal substrate (1) and piezoelectric membrane (2).
4. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that described is soft
Property body (4) be equipped with dentalation layer (23), described dentalation layer (23) setting is in flexible body (4) and piezoelectric membrane (2)
Contact position.
5. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 4, which is characterized in that the tooth
Shape structure sheaf (23) is made of the protrusion for the taper being arranged in array, and the height of dentalation layer (23) is less than flexible body (4)
Highly, the spacing of the tapered protrusion of dentalation layer (23) is less than a quarter of dentalation layer (23) length, is greater than dentation
/ 20th of structure sheaf (23) length.
6. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that described is convex
Playing (7) is elastic bumps, is equipped with multiple.
7. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 6, which is characterized in that described is more
A protrusion (7) is regularly distributed at the center on metal substrate (1) two sides.
8. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 7, which is characterized in that metal substrate
(1) every face is set there are four raised (7), is evenly distributed along the periphery around metal substrate (1) central point.
9. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that the gold
The two sides for belonging to substrate (1) is all provided with there are four metal electrode (6), four angles of four metal electrodes (6) separations metal substrate (1)
Place.
10. the signal processing system of the flexible touch sensation sensor based on piezoelectric membrane, feature exist as described in claim 1
In, including processor module (15)；
The processor module (15) passes sequentially through signal conversion module (10), signal amplification module (9), piezoelectric sensing module
(8), metal electrode (6) and piezoelectric membrane (2) are electrically connected, to obtain the telecommunications generated under vibration by piezoelectric membrane (2)
Number；
The processor module (15) passes sequentially through data inputting module (13), data analysis processor (12) and information collection
Module (11) is electrically connected, and the electric signal to generate to vibration is converted into digital signal and is collected and stores；
The processor module (15) pass sequentially through slave computer (16), core switch (17), ZigBee communication network (18),
Terminal (19), coordinator (20) and host computer (21) and LabView platform (22) are electrically connected, to the number collected and stored
Word signal is identified and is handled.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708810A (en) * | 2019-02-21 | 2019-05-03 | 钛深科技(深圳)有限公司 | A kind of apparatus and system for film tactile sensing chip testing |
| CN111513693A (en) * | 2020-04-28 | 2020-08-11 | 汕头大学医学院 | Miniature comprehensive monitor for human vital signs |
| CN112415178A (en) * | 2020-11-30 | 2021-02-26 | 上海应用技术大学 | Concrete stress detection device |
| CN112807139A (en) * | 2019-11-18 | 2021-05-18 | 盐木医疗科技(北京)有限公司 | Human body deformation signal processor and use method thereof |
| CN114324034A (en) * | 2021-12-13 | 2022-04-12 | 华南农业大学 | Prawn shelling qualification rate detection device based on multi-touch identification |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796955A (en) * | 2004-12-28 | 2006-07-05 | 中国科学院合肥智能机械研究所 | Flexible touch sensor |
| CN102163687A (en) * | 2010-12-10 | 2011-08-24 | 清华大学 | High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof |
| WO2013041911A1 (en) * | 2011-09-22 | 2013-03-28 | Honeywell Romania Srl | Iii-nitride strain sensor |
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN203965077U (en) * | 2013-10-22 | 2014-11-26 | 中国石油大学(华东) | A kind of fexible film touch sensor |
| CN105067161A (en) * | 2015-08-15 | 2015-11-18 | 福州大学 | Uniform electric field type robot tactile sensor and detection method thereof |
| CN205157086U (en) * | 2015-11-20 | 2016-04-13 | 浙江大学 | Flexible three -dimensional touch sensing array of piezoelectric type |
| CN105651429A (en) * | 2016-01-04 | 2016-06-08 | 京东方科技集团股份有限公司 | Piezoelectric element, manufacturing method thereof, and piezoelectric sensor |
| CN106293290A (en) * | 2015-06-10 | 2017-01-04 | 宸鸿科技(厦门)有限公司 | Contactor control device |
| CN106840476A (en) * | 2017-01-25 | 2017-06-13 | 东南大学 | The three-dimensional quick sensing element of carbon nanomaterial field-effect flexible force and preparation method |
| WO2017111004A1 (en) * | 2015-12-25 | 2017-06-29 | 国立研究開発法人産業技術総合研究所 | Deformation sensor |
| CN107101752A (en) * | 2017-03-24 | 2017-08-29 | 中山大学 | It is a kind of based on high sensitivity pressure sensor with pointed cone structure graphite alkene and preparation method thereof |
| CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| CN107551323A (en) * | 2017-08-29 | 2018-01-09 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric and thermistor material |
| CN207148588U (en) * | 2017-08-10 | 2018-03-27 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| JP6324566B2 (en) * | 2017-03-13 | 2018-05-16 | 国立大学法人信州大学 | Sensor using polymer gel |
-
2018
- 2018-07-31 CN CN201810856921.6A patent/CN109141696B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796955A (en) * | 2004-12-28 | 2006-07-05 | 中国科学院合肥智能机械研究所 | Flexible touch sensor |
| CN102163687A (en) * | 2010-12-10 | 2011-08-24 | 清华大学 | High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof |
| WO2013041911A1 (en) * | 2011-09-22 | 2013-03-28 | Honeywell Romania Srl | Iii-nitride strain sensor |
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN203965077U (en) * | 2013-10-22 | 2014-11-26 | 中国石油大学(华东) | A kind of fexible film touch sensor |
| CN106293290A (en) * | 2015-06-10 | 2017-01-04 | 宸鸿科技(厦门)有限公司 | Contactor control device |
| CN105067161A (en) * | 2015-08-15 | 2015-11-18 | 福州大学 | Uniform electric field type robot tactile sensor and detection method thereof |
| CN205157086U (en) * | 2015-11-20 | 2016-04-13 | 浙江大学 | Flexible three -dimensional touch sensing array of piezoelectric type |
| WO2017111004A1 (en) * | 2015-12-25 | 2017-06-29 | 国立研究開発法人産業技術総合研究所 | Deformation sensor |
| CN105651429A (en) * | 2016-01-04 | 2016-06-08 | 京东方科技集团股份有限公司 | Piezoelectric element, manufacturing method thereof, and piezoelectric sensor |
| CN106840476A (en) * | 2017-01-25 | 2017-06-13 | 东南大学 | The three-dimensional quick sensing element of carbon nanomaterial field-effect flexible force and preparation method |
| JP6324566B2 (en) * | 2017-03-13 | 2018-05-16 | 国立大学法人信州大学 | Sensor using polymer gel |
| CN107101752A (en) * | 2017-03-24 | 2017-08-29 | 中山大学 | It is a kind of based on high sensitivity pressure sensor with pointed cone structure graphite alkene and preparation method thereof |
| CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| CN207148588U (en) * | 2017-08-10 | 2018-03-27 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| CN107551323A (en) * | 2017-08-29 | 2018-01-09 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric and thermistor material |
Non-Patent Citations (3)
| Title |
|---|
| 于成林 等: "压电能力收集技术的研究及应用", 《中国水运》 * |
| 李莎莎 等: "高压下光电材料结构相变及物料性能的研究进展", 《机械工程材料》 * |
| 蔡振杰 等: "压电陶瓷粉含量及表面附着微粒对0-3型压电复合材料性能的影响", 《机械工程材料》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708810A (en) * | 2019-02-21 | 2019-05-03 | 钛深科技(深圳)有限公司 | A kind of apparatus and system for film tactile sensing chip testing |
| CN112807139A (en) * | 2019-11-18 | 2021-05-18 | 盐木医疗科技(北京)有限公司 | Human body deformation signal processor and use method thereof |
| CN111513693A (en) * | 2020-04-28 | 2020-08-11 | 汕头大学医学院 | Miniature comprehensive monitor for human vital signs |
| CN112415178A (en) * | 2020-11-30 | 2021-02-26 | 上海应用技术大学 | Concrete stress detection device |
| CN114324034A (en) * | 2021-12-13 | 2022-04-12 | 华南农业大学 | Prawn shelling qualification rate detection device based on multi-touch identification |
| CN114324034B (en) * | 2021-12-13 | 2023-09-26 | 华南农业大学 | Shrimp peeling qualification rate detection device based on multi-touch recognition |
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