CN108807418A - Display base plate and its manufacturing method and display device - Google Patents

Display base plate and its manufacturing method and display device Download PDF

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Publication number
CN108807418A
CN108807418A CN201710299861.8A CN201710299861A CN108807418A CN 108807418 A CN108807418 A CN 108807418A CN 201710299861 A CN201710299861 A CN 201710299861A CN 108807418 A CN108807418 A CN 108807418A
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China
Prior art keywords
layer
pattern
insulating layer
light shield
base plate
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Pending
Application number
CN201710299861.8A
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Chinese (zh)
Inventor
姚琪
曹占锋
张锋
王久石
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201710299861.8A priority Critical patent/CN108807418A/en
Priority to PCT/CN2017/116141 priority patent/WO2018196399A1/en
Priority to US16/070,271 priority patent/US11201120B2/en
Publication of CN108807418A publication Critical patent/CN108807418A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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    • H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
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    • H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
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    • H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
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Abstract

The embodiment of the present invention provides a kind of display base plate, including：Underlay substrate；The pattern of light shield layer on the underlay substrate is set；With the pattern for the active layer being arranged on the underlay substrate.The pattern of the light shield layer is corresponding with position of the pattern of the active layer on the underlay substrate, also, the pattern of the light shield layer is formed by the amorphous silicon layer through ion doping.The embodiment of the present invention also provides a kind of manufacturing method of display base plate and the display device including the display base plate.

Description

Display base plate and its manufacturing method and display device
Technical field
The present invention relates to a kind of display technology field more particularly to display base plate, the manufacturing method of display base plate and packets Include the display device of the display base plate.
Background technology
Currently, in the display base plate of various display devices, thin film transistor (TFT) (Thin Film Transistor, TFT) It is widely used.The general stability in use of active layer and the preferable non-crystalline silicon of processability (a-Si) material of TFT, still, due to The defect problem that non-crystalline silicon itself is had by oneself, such as ON state current is low, mobility is low, stability is poor, makes its answering in many fields With being restricted.In order to make up non-crystalline silicon defect itself, expand the application in related field, low temperature polycrystalline silicon (Low Temperature Poly-Silicon, LTPS) technology comes into being.Had using the liquid crystal display device of LTPS techniques higher Electron mobility, the area of TFT can be effectively reduced to promote the aperture opening ratio of pixel, and while enhancing display brightness Power consumption and production cost can be reduced, so, what it had become field of liquid crystal display grinds the hot spot that makes internal disorder or usurp.
Existing LTPS TFT generally use top gate structure, still, in the TFT of top gate structure, in order to avoid backlight Intense direct illumination the back of the body raceway groove generate leakage current, generally require before active layer formed one layer of light shield layer.Currently, usually Light shield layer is formed using metal materials such as metal Mo.When manufacturing this kind of LPTS TFT, generally passed through using mask plate individual Patterning processes form the pattern of light shield layer, and active layer for then forming TFT using other patterning processes etc. is other The pattern of layer, increases the number of patterning processes, the manufacturing process so as to cause current LTPS TFT is complex, and increases Production cost is added.Meanwhile in the manufacturing process of existing LPTS TFT, the pattern of light shield layer is in amorphous silicon at polycrystalline It has been formed before silicon (p-Si).Generally, due to the limitation of patterning processes, the pattern of the light shield layer of formation can shape in edge At certain angle of gradient, in this way, the angle of gradient at the thickness of light shield layer itself and its pattern edge can all influence follow-up polycrystalline The crystal effect of silicon.
Invention content
In order to overcome at least one aspect of the above problem, a kind of display base plate of offer of the embodiment of the present invention and its manufacturer Method and display device.
According to an aspect of the present invention, a kind of display base plate is provided, including：
Underlay substrate；
The pattern of light shield layer on the underlay substrate is set；With
The pattern of active layer on the underlay substrate is set；
Wherein, the pattern of the light shield layer is corresponding with position of the pattern of the active layer on the underlay substrate, and And the pattern of the light shield layer is formed by the amorphous silicon layer through ion doping.
According to some embodiments, further include：
Buffer layer, the buffer layer are arranged on underlay substrate；
The pattern of first insulating layer, the pattern setting of first insulating layer is on the buffer layer；With
The pattern of the pattern of second insulating layer, the second insulating layer is arranged on the pattern of light shield layer,
Wherein, the pattern of the light shield layer is arranged on the pattern of first insulating layer, and the figure of the active layer Case is arranged on the pattern of the second insulating layer.
According to some embodiments, the buffer layer, the pattern of the first insulating layer, the pattern of light shield layer, second insulating layer The pattern of pattern and active layer is stacked gradually from bottom to up on the underlay substrate.
According to some embodiments, the pattern of the active layer is in the underlay substrate upper edge perpendicular to the direction of underlay substrate Projection positioned at the light shield layer pattern in the underlay substrate upper edge in the projection in the direction of underlay substrate.
According to some embodiments, the thickness of the pattern of the light shield layer is
According to some embodiments, the thickness of the pattern of the light shield layer is
According to some embodiments, the pattern of the light shield layer is formed by the amorphous silicon layer of doping boron ion or phosphonium ion.
According to some embodiments, the pattern of the active layer includes polycrystalline silicon material.
According to some embodiments, the buffer layer includes silicon nitride material.
According to some embodiments, the thickness of the buffer layer is
According to some embodiments, the pattern of first insulating layer and the pattern of the second insulating layer are by etch rate phase Same material is constituted.
According to some embodiments, the pattern of first insulating layer and the pattern of the second insulating layer include silica material Material.
According to some embodiments, the thickness of the pattern of first insulating layer isThe second insulating layer The thickness of pattern be
According to another aspect of the present invention, a kind of display device is also provided, including according to any one of above-described embodiment institute The display base plate stated.
According to another aspect of the invention, a kind of manufacturing method of display base plate is also provided, including：
Underlay substrate is provided；
Light shield layer is formed on underlay substrate；With
Active layer is formed on underlay substrate,
Wherein, the light shield layer is corresponding with position of the active layer on the underlay substrate, also, the light shield layer It is formed by the amorphous silicon layer through ion doping.
According to some embodiments, the method further includes：
Buffer layer, the first insulating layer and second insulating layer are formed on the underlay substrate；With
By patterning processes formed the pattern of the first insulating layer, the pattern of light shield layer, second insulating layer pattern and The pattern of active layer.
According to some embodiments, the pattern of the first insulating layer, the pattern of light shield layer, second are formed by a patterning processes The step of pattern of the pattern of insulating layer and active layer includes：
Form the pattern of photoresist on the active layer by mask plate；
The first insulating layer, light shield layer, second insulating layer and active layer are performed etching simultaneously by etching technics, to be formed The pattern of the pattern of first insulating layer, the pattern of light shield layer, the pattern of second insulating layer and active layer；With
Stripping photoresist.
According to some embodiments, buffer layer, the first insulating layer, light shield layer, the second insulation are formed on the underlay substrate Layer and the step of active layer include：
Buffer layer is formed on underlay substrate；
The first insulating layer is formed on the buffer layer；
The first amorphous silicon layer is formed on the first insulating layer；
Second insulating layer is formed on light shield layer；
The second amorphous silicon layer is formed over the second dielectric；
Ion doping is carried out to the first amorphous silicon layer, to form light shield layer；With
Short annealing processing is carried out to first amorphous silicon layer.
According to some embodiments, include to the step of the first amorphous silicon layer progress ion doping：
Using voltage and 5E14~9E14 including 30KV ion implantation dosage ion implantation technology parameter by boron from Son or phosphonium ion inject in first amorphous silicon layer.
According to some embodiments, second amorphous silicon layer is made annealing treatment, second amorphous silicon layer is converted For polysilicon layer, using as the active layer.
According to some embodiments, the buffer layer is formed by silicon nitride.
According to some embodiments, first insulating layer and the second insulating layer are by the identical material shape of etch rate At.
According to some embodiments, first insulating layer and the second insulating layer are formed by silica.
In display base plate according to an embodiment of the invention and its manufacturing method, (can it be passed through by a mask Patterning processes) form active layer and corresponding light shield layer, compared with the existing technology under active layer using metal as base Material additionally forms the technical solution of light shield layer by a mask again, it is possible to reduce one of masking process, it is aobvious to simplify Show the manufacturing process of substrate and save manufacturing cost, at the same time it can also be ensured that when amorphous silicon is polysilicon in subsequent technique Crystal effect.Also, using light shield layer is formed by the amorphous silicon layer through ion doping, the screening of light shield layer can be further increased Light effect.
Description of the drawings
By the description made for the present invention of below with reference to attached drawing, other objects and advantages of the present invention will be aobvious and easy See, and can help that complete understanding of the invention will be obtained.
Fig. 1 is the partial schematic diagram of display base plate according to an embodiment of the invention；
Fig. 2 shows the shading characteristics of light shield layer with different thickness；
Fig. 3 shows influence of the ion doping to the shading characteristic of light shield layer；
Fig. 4 is the schematic diagram of display base plate according to an embodiment of the invention；
Fig. 5 is the flow chart of manufacturing method according to an embodiment of the invention；
Fig. 6 is the flow chart of manufacturing method according to another embodiment of the invention；
Fig. 7 is the structural schematic diagram of a step of the manufacturing method for showing display base plate according to the ... of the embodiment of the present invention； With
Fig. 8 is the structural representation of another step of the manufacturing method for showing display base plate according to the ... of the embodiment of the present invention Figure.
Specific implementation mode
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.Illustrating In book, same or analogous drawing reference numeral indicates same or analogous component.Following reference attached drawings are to embodiment of the present invention Illustrate to be intended to explain the present general inventive concept of the present invention, and is not construed as a kind of limitation to the present invention.
In addition, in the following detailed description, for ease of explaining, elaborating many concrete details to provide to present disclosure The comprehensive understanding of embodiment.It should be apparent, however, that one or more embodiments without these specific details can also It is carried out.In other cases, well known construction and device is diagrammatically embodied to simplify attached drawing.
It should be noted that when element or layer are referred to as in another element or layer "upper", it can be directly in other yuan On part, or there may be intermediate layers.Additionally, it is appreciated that when element or layer are referred to as in another element or layer "lower", It can be directly under other elements or layer, or there may be the layer of more than one centre or elements.Furthermore it is also possible to manage Solution, when layer or element be referred to as two layers or two elements " between " when, it can be only between two layers or two elements Layer, or there may also be more than one middle layer or elements.Moreover, herein, term " first ", " second " etc. are only used for Purpose is described, relative importance is not understood to indicate or imply.
It should be noted also that since each structure size involved by the embodiment of the present invention is very small, for the sake of clarity, The size of each structure and ratio do not represent actual size and ratio in the attached drawing of the embodiment of the present invention.
Fig. 1 shows the partial schematic diagram of display base plate according to an embodiment of the invention.For example, the display base plate It can be array substrate.The display base plate may include：The pattern of underlay substrate 10, the light shield layer being arranged on underlay substrate 10 6 and the pattern 12 of active layer that is arranged on underlay substrate 10.As shown in Figure 1, the pattern 12 of the pattern 6 of light shield layer and active layer Position on underlay substrate 10 corresponds to.In one example, the pattern 12 of active layer in 10 upper edge of underlay substrate perpendicular to lining The direction of substrate projects the pattern 6 for being located at light shield layer in 10 upper edge of underlay substrate perpendicular to the projection in the direction of underlay substrate It is interior.In another example, the pattern 12 of the pattern 6 of light shield layer and active layer in 10 upper edge of underlay substrate perpendicular to underlay substrate Direction projection it is completely overlapped.By this method, the pattern 6 of light shield layer can avoid the back of the body of the irradiation of the light from backlight TFT Channel region generates leakage current to avoid the intense direct illumination of backlight from carrying on the back raceway groove.
As shown in Figure 1, the display base plate can also include：Buffer layer 2, the buffer layer are arranged on underlay substrate 10； The pattern 4 of first insulating layer, the pattern setting of first insulating layer is on the buffer layer 2；With the pattern 8 of second insulating layer, this The pattern of two insulating layers is arranged on the pattern 6 of light shield layer.Also, the pattern 4 in the first insulating layer is arranged in the pattern 6 of light shield layer On, the pattern 12 of active layer is arranged on the pattern 8 of second insulating layer.That is, on underlay substrate 10 from bottom to up successively It is stacked with buffer layer 2, the pattern 4 of the first insulating layer, the pattern 6 of light shield layer, the pattern 8 of second insulating layer and the pattern of active layer 12。
According to one embodiment of present invention, light shield layer 6 is formed by non-crystalline silicon (a-Si).In this way, in the present embodiment, it can The pattern of the pattern and corresponding light shield layer of active layer, phase can be formed by a mask (passing through a patterning processes) For additionally forming light shield layer by a mask again using metal as base material under the pattern of active layer in the prior art The technical solution of pattern, it is possible to reduce one of masking process, to simplify the manufacturing process of display base plate.About by primary Patterning processes form the manufacturing process of the pattern of active layer and the pattern of light shield layer, will be described below.
For above-mentioned using amorphous silicon material layer as the scheme of the pattern of light shield layer, inventor is further by testing never The shading characteristic of amorphous silicon material layer is had studied with aspect.
Fig. 2 shows the shading characteristics of light shield layer with different thickness.As shown in Fig. 2, abscissa indicates the wavelength of light, Ordinate indicates light by the transmitance after light shield layer 6.In the embodiment illustrated in figure 2, respectively illustrating thickness is WithLight shield layer H103 resin.
Usually, it is seen that the spatial distribution of light is as shown in the table.Since the light that backlight is sent out is mainly visible light, so Fig. 2 shows embodiment basically illustrate transmission characteristic of the light shield layer to visible light of different-thickness.
The spatial distribution of 1 visible light of table
The spectral color of visible light Wave-length coverage (nanometer)
Red (R) About 625-740nm
It is orange About 590-625nm
Yellow About 565-590nm
Green (G) About 500-565nm
Cyan About 485-500nm
Blue (B) About 440-485nm
Purple About 380-440nm
In display base plate, usual blue light is exciting light, so, in an embodiment of the present invention, in design light shield layer 6 When thickness, transmission characteristic of the light shield layer to blue light (light i.e. in short wavelength range) of different-thickness is considered first.In this way, root According to H103 resin shown in Fig. 2, in an embodiment of the present invention, the thickness of light shield layer 6 can be arranged In the range of, it is highly preferred that the thickness of light shield layer 6 can be arrangedIn the range of, to ensure shading The low transmission for the light (especially blue light) that 6 pairs of backlight of layer are sent out.
According to further embodiment of the present invention, the pattern 6 of light shield layer can be formed by the amorphous silicon layer through ion doping. In one example, the pattern 6 of light shield layer can be formed by the amorphous silicon layer of doping boron ion (B+) or phosphonium ion (P+).Fig. 3 Show influence of the ion doping to the shading characteristic of the pattern of light shield layer.According to fig. 3 as can be seen that working as the pattern of light shield layer not When Doped ions, the transmitance of the visible light in the pattern centering long wavelength range of light shield layer is higher, that is, cannot preferably realize The effect of shading；When the pattern dope of light shield layer has the ion of various concentration (for example, doping 1 indicates to adulterate certain density boron Ion, doping 2 indicate to adulterate certain density phosphonium ions) when, visible light in the pattern centering long wavelength range of light shield layer Transmitance is reduced.Through experimental studies have found that, by sample 580nm~780nm medium-long wave band light transmittance reduce by 6%~ 10% or so.Itself main reason is that, non-crystalline silicon is doped by modes such as ion implantings, impurity is introduced in band gap Energy level is equivalent to the optical band gap for reducing non-crystalline silicon, that is, is more than 580nm light (the small light of energy) and is easy to be absorbed, therefore, warp Non-crystalline silicon after ion doping is enhanced to the absorption for the light that wavelength is 580nm or more, so as to cause under the transmitance of light Drop.That is, when forming the pattern of light shield layer by the amorphous silicon layer through ion doping, light shield layer can be further increased The shaded effect of pattern especially improves the shaded effect of the visible light in the pattern centering long wavelength range of light shield layer.
According to one embodiment of present invention, the pattern 12 of active layer can be by polycrystalline silicon material (p-Si, especially low temperature Polysilicon (LTPS) material) it is formed.Usually, the manufacturing process of LTPS thin film transistor (TFT)s is complex, generally requires and carries out 9- 11 patterning processes.Moreover, for LPTS thin film transistor (TFT)s (TFT), generally also there are two kinds of structures of bottom gate and top-gated, still, In some basic performances such as mobility, threshold voltage, S values, top gate structure is superior to bottom grating structure, so top gate structure is The mainstream structure of LTPS TFT.For the TFT of top gate structure, it usually needs the pattern of light shield layer is arranged to avoid the strong of backlight Light direct irradiation carries on the back raceway groove and generates leakage current.In this way, above structure according to the ... of the embodiment of the present invention is applied to LTPS TFT When, it can not only simplify the manufacturing process of LTPS TFT, can also preferably improve the working performance of LTPS TFT.Moreover, In the manufacturing process of existing LTPS TFT, it is initially formed the pattern of light shield layer generally by a patterning processes, then leads to again The pattern that another secondary patterning processes form active layer is crossed, in the edge meeting of the pattern for the light shield layer that a preceding patterning processes are formed Certain angle of gradient is formed, in this way, the angle of gradient at the thickness of pattern of light shield layer itself and its pattern edge can all influence The crystal effect of follow-up polysilicon.And in an embodiment of the present invention, the pattern of light shield layer and the pattern of active layer pass through primary Patterning processes are formed, and the situation of above-mentioned influence crystal effect is just not present, so, manufacturing method according to the ... of the embodiment of the present invention is also The crystal effect of the polysilicon in LTPS TFT can be improved.
According to an embodiment of the invention, buffer layer 2 can be formed by silicon nitride.By this method, it is formed by silicon nitride slow Rushing layer 2 can stop ion in underlay substrate 10 (for example, Na+Deng) enter in each layer of 2 top of buffer layer.In an example In, the pattern 4 of the first insulating layer and the pattern 8 of second insulating layer can or approximately uniform material structures identical by etch rate At.In one example, the pattern 4 of the first insulating layer and the pattern 8 of second insulating layer can be formed by silica.By making With etch rate is identical or approximately uniform material constitute the first insulating layer pattern and second insulating layer pattern, can control This two layers etch rate is identical or approximately the same, to adjust the angle of gradient once etched, to avoid the occurrence of " inverted trapezoidal " etc. Undesirable structure.In one example, the thickness of buffer layer 2 can beThe thickness of the pattern 4 of first insulating layer Spending to beThe thickness of the pattern 8 of second insulating layer can beBy match buffer layer, The material and thickness of the pattern of first insulating layer and the pattern of second insulating layer can make respectively minimizing the while of etching difficulty The etch rate of layer matches, and Poor structures such as " inverted trapezoidals " is avoided the occurrence of, to ensure to be changed into p-Si in subsequent a-Si The good crystal effects of Shi Shixian.In one example, buffer layer 2 can be formed by silicon nitride, 4 He of pattern of the first insulating layer The pattern 8 of second insulating layer can be formed by silica, combination of materials in this way, it is ensured that be changed in subsequent a-Si To realize good crystal effect when p-Si.
Fig. 4 shows the schematic diagram of display base plate according to an embodiment of the invention.As shown in figure 4, the display base Plate includes：Underlay substrate 10；The buffer layer 2 being arranged on underlay substrate 10；The figure of the first insulating layer on the buffer layer 2 is set Case 4；The pattern 6 of light shield layer on the pattern 4 of the first insulating layer is set；The second insulation being arranged on the pattern 6 of light shield layer The pattern 8 of layer；The pattern 12 of active layer on the pattern 8 of second insulating layer is set；It is arranged on the pattern 12 of active layer Gate insulation layer 14；The grid 18 and public electrode connection electrode 262 being arranged on gate insulation layer 14；Layer on grid 18 is set Between dielectric layer 16；The source-drain electrode 20 being arranged on interlayer dielectric layer 16, source-drain electrode 20 are connected by via 202 and active layer 12 respectively It connects；The planarization layer 24 being arranged on source-drain electrode 20 and interlayer dielectric layer 16；The public electrode 26 being arranged on planarization layer 24； The passivation layer 28 being arranged on public electrode 26；With the pixel electrode 30 being arranged on passivation layer 28.
In the embodiment show in figure 4, active layer 12 can be formed by low temperature polycrystalline silicon, and the one of the display base plate A TFT includes 2 grids 18, that is, forms double-grid structure.But Fig. 4 is only for showing display according to the ... of the embodiment of the present invention The overall structure of substrate, rather than for limiting the present invention.It is understood that display base plate according to the ... of the embodiment of the present invention is also There can be other structures.
According to an embodiment of the invention, a kind of manufacturing method of display base plate is also provided, as shown in Figure 5.In step S510 In, underlay substrate is provided, for example, the underlay substrate can be glass substrate.In step S520, is formed and hidden on underlay substrate Photosphere, as described above, the light shield layer can be formed by the amorphous silicon layer through ion doping.In step S530, in substrate base Active layer is formed on plate, the light shield layer is corresponding with position of the active layer on the underlay substrate, and the active layer can To be formed by polysilicon.
According to an embodiment of the invention, a kind of manufacturing method of display base plate is also provided, as shown in Figure 6.In step S610 In, underlay substrate is provided.In step S620, buffer layer is formed on underlay substrate.In step S630, shape on the buffer layer At the first insulating layer.In step S640, light shield layer is formed on the first insulating layer, and the light shield layer can be by non-crystalline silicon or warp The non-crystalline silicon of ion doping is formed.In step S650, second insulating layer is formed on light shield layer.In step S660, Active layer is formed on two insulating layers, the active layer can be formed by the polysilicon converted through non-crystalline silicon.In step S670, lead to Cross the pattern that a patterning processes form the first insulating layer, light shield layer, second insulating layer and active layer.Due to the reality in the present invention It applies in example, light shield layer can be formed by non-crystalline silicon (a-Si).In this way, a mask (passing through a patterning processes) can be passed through The pattern of active layer and light shield layer can be formed, compared with the existing technology in additionally lead to again using metal as base material under active layer A mask is crossed to form the technical solution of light shield layer, it is possible to reduce one of masking process, to simplify the system of display base plate Make flow.Moreover, in existing manufacturing process, it is initially formed light shield layer by a patterning processes, is then passed through another time again Patterning processes form active layer, and certain gradient can be formed in the edge of the pattern for the light shield layer that a preceding patterning processes are formed Angle, in this way, the angle of gradient at the thickness of light shield layer itself and its pattern edge can all influence the crystal effect of follow-up polysilicon. And in an embodiment of the present invention, as soon as light shield layer and active layer are formed by time patterning processes, above-mentioned influence crystallization is not present The situation of effect, so, manufacturing method according to the ... of the embodiment of the present invention can also improve the crystal effect of polysilicon.
In the following, the structural schematic diagram in conjunction with the display base plate that each step is formed is according to embodiments of the present invention to be described in detail Display base plate manufacturing method.
As shown in fig. 7, sequentially forming buffer layer 2, the first insulating layer 4 ', the first amorphous from top to bottom on underlay substrate 10 Silicon layer 6 ', second insulating layer 8 ' and the second amorphous silicon layer 12 '.Wherein, buffer layer 2 can be by silicon nitride (SiNx) formed, first Insulating layer 4 ' and second insulating layer 8 ' can be by silica (SiO2) formed.In one example, above layers can be by heavy Long-pending mode is formed on underlay substrate 10.
Then, ion implanting is carried out to the first amorphous silicon layer 6 ', to form light shield layer.In one example, can pass through Ion implantation device adjusts the parameters such as ion implantation concentration, energy by the first amorphous silicon layer of boron ion or phosphonium ion injection lower layer In or the first amorphous silicon layer and the first insulating layer 4 ' interface, then using quick anneal oven to ion implanted The substrate of first amorphous silicon layer is annealed.It is found through experiment, when the ion implantation technology parameter of ion implantation device is：Voltage It is 5E14~9E14 (that is, 5 × 10 for 30KV, implantation concentration/dosage14~9 × 1014) when, it is preferable can so that light shield layer has Ion (such as boron ion or phosphonium ion) doping concentration, to realize preferable shaded effect.It should be noted that this hair It is bright to be not limited to form light shield layer using ion implantation technology, in other embodiments, other techniques can also be used, such as CVD doping process, by ion doping into the first amorphous silicon layer, to form the light shield layer of the embodiment of the present invention.
Then, the second amorphous silicon layer 12 ' is made annealing treatment, converts the second amorphous silicon layer 12 ' to polysilicon layer, with As the active layer.
Finally, the pattern 4 of the first insulating layer shown in FIG. 1, the pattern 6 of light shield layer, are formed by a patterning processes The pattern of the pattern 8 and active layer 12 of two insulating layers.
Specifically, as shown in figure 8, forming the pattern of the first insulating layer, the pattern of light shield layer, the by patterning processes The step of pattern of the patterns of two insulating layers and active layer may include：
Form the pattern 40 of photoresist on the active layer by mask plate 50；
By etching technics simultaneously to the first insulating layer 4 ', the first amorphous silicon layer 6 ', second insulating layer 8 ' and the second amorphous Silicon layer 12 ' performs etching, to form the pattern and active layer of the pattern of the first insulating layer, the pattern of light shield layer, second insulating layer Pattern (as shown in Figure 1)；With
Stripping photoresist 40.
In the above-described embodiments, all due to the first insulating layer, light shield layer, second insulating layer and the active layer after etch process Retain on the basis of photoresist, therefore a mask corresponding with photoresist may be used to complete for first absolutely The patterning processes of edge layer, light shield layer, second insulating layer and active layer.
According to an embodiment of the invention, above-mentioned first insulating layer, light shield layer, second are being formed absolutely using a patterning processes After edge layer and active layer, grid shown in Fig. 4, interlayer dielectric layer, source-drain electrode, flat can also be sequentially formed using patterning processes Conventional structure may be used in the pattern of smoothization layer, public electrode, passivation layer and pixel electrode, the technique for forming the pattern of these layers Figure technique, details are not described herein.
It should be noted that, although in the embodiment of above-mentioned example, light shield layer is formed in below active layer, still, In certain embodiments, light shield layer can also be formed in above active layer or light shield layer can be formed simultaneously in active layer Above and below.
According to another embodiment of the present invention, it is also proposed that a kind of display device includes aobvious according to above-described embodiment Show substrate.The display device can be：Display panel, Electronic Paper, mobile phone, tablet computer, television set, laptop, number Any products or component with display function such as code photo frame, navigator.
Although some embodiments of present general inventive concept have been illustrated and have illustrated, those of ordinary skill in the art will manage Solution can make a change these embodiments in the case of the principle and spirit without departing substantially from this present general inventive concept, of the invention Range is limited with claim and their equivalent.

Claims (23)

1. a kind of display base plate, including：
Underlay substrate；
The pattern of light shield layer on the underlay substrate is set；With
The pattern of active layer on the underlay substrate is set；
Wherein, the pattern of the light shield layer is corresponding with position of the pattern of the active layer on the underlay substrate, also, institute The pattern for stating light shield layer is formed by the amorphous silicon layer through ion doping.
2. display base plate according to claim 1, further includes：
Buffer layer, the buffer layer are arranged on underlay substrate；
The pattern of first insulating layer, the pattern setting of first insulating layer is on the buffer layer；With
The pattern of the pattern of second insulating layer, the second insulating layer is arranged on the pattern of light shield layer,
Wherein, the pattern of the light shield layer is arranged on the pattern of first insulating layer, and the pattern of the active layer is set It sets on the pattern of the second insulating layer.
3. display base plate according to claim 2, wherein the buffer layer, the pattern of the first insulating layer, light shield layer figure The pattern of case, the pattern of second insulating layer and active layer is stacked gradually from bottom to up on the underlay substrate.
4. display base plate according to any one of claim 1-3, wherein the pattern of the active layer is in the substrate base Plate upper edge perpendicular to the direction of underlay substrate projection positioned at the light shield layer pattern the underlay substrate upper edge perpendicular to In the projection in the direction of underlay substrate.
5. display base plate according to claim 1, wherein the thickness of the pattern of the light shield layer is
6. display base plate according to claim 5, wherein the thickness of the pattern of the light shield layer is
7. display base plate according to claim 1, wherein the pattern of the light shield layer is by doping boron ion or phosphonium ion Amorphous silicon layer is formed.
8. display base plate according to claim 1, wherein the pattern of the active layer includes polycrystalline silicon material.
9. display base plate according to claim 2 or 3, wherein the buffer layer includes silicon nitride material.
10. display base plate according to claim 2 or 3, wherein the thickness of the buffer layer is
11. display base plate according to claim 2 or 3, wherein the pattern of first insulating layer and second insulation The pattern of layer is made of the identical material of etch rate.
12. display base plate according to claim 2 or 3, wherein the pattern of first insulating layer and second insulation The pattern of layer includes silica material.
13. display base plate according to claim 2 or 3, wherein the thickness of the pattern of first insulating layer isThe thickness of the pattern of the second insulating layer is
14. a kind of display device includes the display base plate according to any one of claim 1-13.
15. a kind of manufacturing method of display base plate, including：
Underlay substrate is provided；
Light shield layer is formed on underlay substrate；With
Active layer is formed on underlay substrate,
Wherein, the light shield layer is corresponding with position of the active layer on the underlay substrate, also, the light shield layer is by passing through The amorphous silicon layer of ion doping is formed.
16. according to the method for claim 15, further including：
Buffer layer, the first insulating layer and second insulating layer are formed on the underlay substrate；With
The pattern of the first insulating layer, the pattern of light shield layer, the pattern of second insulating layer and active are formed by patterning processes The pattern of layer.
17. according to the method for claim 16, wherein form the pattern of the first insulating layer by a patterning processes, hide The step of pattern of the pattern of photosphere, the pattern of second insulating layer and active layer includes：
Form the pattern of photoresist on the active layer by mask plate；
The first insulating layer, light shield layer, second insulating layer and active layer are performed etching simultaneously by etching technics, to form first The pattern of the pattern of insulating layer, the pattern of light shield layer, the pattern of second insulating layer and active layer；With
Stripping photoresist.
18. according to the method for claim 16, wherein form buffer layer on the underlay substrate, the first insulating layer, hide The step of photosphere, second insulating layer and active layer includes：
Buffer layer is formed on underlay substrate；
The first insulating layer is formed on the buffer layer；
The first amorphous silicon layer is formed on the first insulating layer；
Second insulating layer is formed on light shield layer；
The second amorphous silicon layer is formed over the second dielectric；
Ion doping is carried out to the first amorphous silicon layer, to form light shield layer；With
Short annealing processing is carried out to first amorphous silicon layer.
19. according to the method for claim 18, wherein include to the step of the first amorphous silicon layer progress ion doping：
Using voltage and 5E14~9E14 including 30KV ion implantation dosage ion implantation technology parameter by boron ion or Phosphonium ion injects in first amorphous silicon layer.
20. the method according to claim 18 or 19, further includes：
Second amorphous silicon layer is made annealing treatment, converts second amorphous silicon layer to polysilicon layer, using as institute State active layer.
21. according to the method for claim 16, wherein the buffer layer is formed by silicon nitride.
22. according to the method for claim 16, wherein first insulating layer and the second insulating layer are by etch rate Identical material is formed.
23. the method according to claim 16 or 22, wherein first insulating layer and the second insulating layer are by aoxidizing Silicon is formed.
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Application publication date: 20181113