CN108233759B - Mass spectrometer radio frequency power supply with temperature compensation system - Google Patents
Mass spectrometer radio frequency power supply with temperature compensation system Download PDFInfo
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- CN108233759B CN108233759B CN201711485178.XA CN201711485178A CN108233759B CN 108233759 B CN108233759 B CN 108233759B CN 201711485178 A CN201711485178 A CN 201711485178A CN 108233759 B CN108233759 B CN 108233759B
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Abstract
The invention discloses a mass spectrometer radio frequency power supply with a temperature compensation system, which comprises a radio frequency voltage V closed loop circuit, a direct current amplification module and a scanning signal, wherein the radio frequency voltage V closed loop circuit sequentially comprises a comparator, the radio frequency power supply comprises a frequency mixer, a power amplifier and an amplitude detection module, wherein the output end of a scanning signal and the output end of the amplitude detection module are respectively electrically connected with the input end of a comparator, the output end of the amplitude detection module is electrically connected with the input end of a direct current amplification module through a multiplier, a temperature compensation amplification circuit with positive and negative temperature compensation coefficients is further arranged in the radio frequency power supply, the temperature compensation amplification circuit comprises a temperature compensation module with a temperature-sensitive element, the temperature-sensitive element is used for detecting the working environment temperature T of the radio frequency power supply, a data model of the relation between the environment temperature T and the deviation value of the radio frequency power supply is further stored in the temperature compensation module, and the temperature compensation module dynamically adjusts the feedback quantity of the radio. The temperature compensation module based on the temperature-sensitive element is adopted, the temperature drift problem is actively solved, the compensation efficiency is high, and the voltage stability of the radio frequency power supply is well maintained.
Description
Technical Field
The invention relates to the technical field of analytical instruments, in particular to a mass spectrometer radio frequency power supply with a temperature compensation system.
Background
The radio frequency power supply is a circuit module used for driving a mass analyzer in a mass spectrometer, and the temperature stability of the radio frequency power supply directly determines the accuracy of an analysis result of the mass spectrometer. In order to overcome the problem of temperature drift of the rf power supply, the conventional measures mainly include: (1) the whole constant temperature is realized, a constant-temperature working environment is provided for the whole radio frequency power supply, the weight, the volume and the power consumption of the system are greatly increased, the complexity of the system is improved, and the system is not suitable for miniaturized instruments; (2) the components are preferably discrete components with very low temperature drift and modular components with high stability, which is costly but has limited performance gains.
The schematic block diagram of the radio frequency power supply is shown in fig. 1, and two small voltage signals are input: radio frequency signals and scanning signals. The frequency of the radio frequency signal determines the output frequency of the radio frequency power supply, and the radio frequency scanning signal is used for controlling the voltage output by the radio frequency power supply. The radio frequency power supply outputs two paths of radio frequency high voltage signals +/-U + Vcoswt, the phases are opposite, the amplitudes are equal, and the two paths of radio frequency high voltage signals are respectively connected with two pairs of electrodes of the mass analyzer.
During the scanning process, the dc voltage U and the rf voltage V are changed simultaneously, and the ions with each mass-to-charge ratio have their respective stable regions at this composite voltage, as shown in fig. 2.
In this region, the ions are able to pass through the mass analyser smoothly, the scan lines indicate that the ratio of U to V remains constant during the scan, and the value of U/V (the slope of the scan line) determines the peak width (resolution) and peak height (sensitivity) of each ion. And a DC voltage compensation is given to the scanning line, so that the scanning line a has an intercept relative to the original point, and the equal peak width and peak height can be obtained in the whole mass range. During tuning, the high-end compensation represents the value of U/V, the low-end compensation represents the value of DC voltage compensation, and during tuning, the two values are repeatedly adjusted to the optimal value to obtain proper resolution and sensitivity. When the parameters of the quadrupole mass filter and the working frequency of the radio frequency power supply are determined, the radio frequency voltage V and the ion mass-to-charge ratio (m/z) are in a direct proportion relation and are reflected on a mass spectrogram, a mass axis and the mass axis are linearly expanded, and ions (peak positions) with each mass number correspond to an exact V value.
Theoretically, parameters such as peak position, resolution, sensitivity and the like are determined values and do not change after the mass spectrometer is tuned. However, since the radio frequency power supply is a temperature sensitive component, when the working temperature of the radio frequency power supply is changed, U and V drift to different degrees, the mass axis and the scanning line are affected, the mass spectrum parameters are passively changed, and errors are caused to the analysis result of the mass spectrometer.
The schematic diagram of the internal structure of the radio frequency power supply is shown in fig. 3, a scanning signal and a radio frequency signal are modulated by a mixer, and then pass through a power amplifier to drive a booster coil, the secondary output of the coil is isolated by a capacitor and detected by amplitude to obtain a small voltage u corresponding to an actual amplitude value, the voltage is compared with a set radio frequency scanning signal, and the radio frequency voltage V is finely adjusted by using the difference value of the voltage and the set radio frequency scanning signal, so that the closed-loop control of the radio frequency voltage V is realized, the matching of the output voltage and a control signal is ensured, but when any link in the closed loop of V drifts, the deviation of V can be caused; and adding the product of the high-end compensation signal multiplied by U and the zero-bias voltage, and then amplifying to obtain the direct-current voltage U. During the process of V scanning, U also performs corresponding scanning, and if the scanning line is represented by y ═ kx + b, when U and V drift, U/V cannot be guaranteed to be constant, and the slope and intercept of the scanning line will change. As shown in fig. 4, when the operating temperature of the rf power supply changes by T1, the abscissa (mass axis) is elongated and the scan line moves from the a position to the d position. It should be noted that when the rf operating temperature is changed in the opposite direction, the mass axis and the scanning line have the opposite trend to that of fig. 4, which also affects the detection accuracy of the mass spectrometer.
Disclosure of Invention
The invention aims to solve the defects in the background technology, and provides a mass spectrometer radio frequency power supply with a temperature compensation system, so that the problem of scanning line drift of the radio frequency power supply caused by environmental temperature change is solved, the dynamic compensation of the temperature drift of the radio frequency power supply is realized in a wide temperature range, and the detection stability of the mass spectrometer is maintained.
In order to solve the technical problems, the invention adopts the following technical scheme:
a mass spectrometer radio frequency power supply with a temperature compensation system comprises a radio frequency voltage V closed loop circuit, a direct current amplification module and a scanning signal, wherein the radio frequency voltage V closed loop circuit sequentially comprises a comparator, a mixer, a power amplifier and an amplitude detection module, the output ends of the scanning signal and the amplitude detection module are respectively and electrically connected with the input end of the comparator, the output end of the amplitude detection module is electrically connected with the input end of the direct current amplification module through a multiplier, a temperature compensation amplification circuit with positive and negative temperature compensation coefficients is further arranged in the radio frequency power supply, the temperature compensation amplification circuit comprises a temperature compensation module with a temperature-sensitive element, the temperature-sensitive element is used for detecting the ambient temperature T of the work of the radio frequency power supply, and a data model of the relation between the ambient temperature T and the deviation value of the radio frequency power supply is stored in the temperature compensation module, and the temperature compensation module dynamically adjusts the feedback quantity of the radio frequency power supply according to the working environment temperature and the data model.
The temperature compensation module comprises a peak temperature compensation module, a distinguishing temperature compensation module and a low-end temperature compensation module; the peak position temperature compensation module is bridged in a radio frequency voltage V dynamic compensation feedback loop formed between the output end and the input end of the power amplifier and is used for dynamically compensating a radio frequency voltage V deviation value;
the resolution temperature compensation module is arranged at the input end of the multiplier and used for dynamically compensating a direct current voltage U deviation value of the radio frequency power supply;
the low-end temperature compensation module is arranged at the input end of the direct current amplification module and used for dynamically compensating the offset value of the zero bias voltage of the direct current amplification module.
The data model in the peak temperature compensation module is as follows: a. the1＝1/(1+k1T)，A1Amplification factor of the peak temperature compensation module to the radio frequency voltage V, wherein k1The peak temperature compensation coefficient is shown, and T is the ambient temperature detected by the temperature sensitive element.
The data model in the temperature discrimination module is as follows: a. the2＝1/(1+k2T)，A2For distinguishing the amplification factor of the temperature compensation module to the DC voltage U, where k2To distinguish the temperature compensation coefficient, T is the ambient temperature detected by the temperature sensitive element.
The data model in the low-end temperature compensation module is as follows: a. the3＝1+k3T，A3The low-end temperature compensation module amplifies the reference voltage of the DC amplification module, wherein k3The low-end temperature compensation coefficient is, and T is the ambient temperature detected by the temperature sensitive element.
The temperature compensation electrical parameters in the peak temperature compensation module, the distinguishing temperature compensation module and the low-end temperature compensation module are obtained by the following method: firstly, independently placing a radio frequency power supply in a high-low temperature test box, and observing and recording the change of a mass spectrum pattern of the radio frequency power supply at each environmental temperature; then, analyzing and calculating a temperature compensation coefficient of mass spectrum parameter drift according to the mass spectrum pattern; and finally, obtaining mass spectrum temperature compensation electric parameters on the established temperature compensation amplifying circuit by a reverse method.
The temperature compensation range of the obtained radio frequency power supply is-20-70 ℃.
The technical scheme of the invention has the following advantages:
A. according to the invention, the temperature compensation amplifying circuit is arranged in the radio frequency power supply, when the working temperature of the mass spectrometer changes, the temperature compensation amplifying circuit can compensate the radio frequency power supply V and the direct current voltage U, so that the stable voltage of the mass spectrometer is kept stable, the deviation is avoided, and the reliability of the analysis result of the mass spectrometer in a wide temperature range is improved; in addition, the whole constant temperature and the optimization of elements in the prior art belong to a scheme for passively solving the temperature drift, and the temperature compensation system based on the temperature-sensitive element provided by the invention belongs to a scheme for actively solving the temperature drift, so that the compensation efficiency is higher.
B. The invention adopts three temperature compensation modules, wherein the peak temperature compensation module compensates the drift of the radio frequency voltage V, and improves the temperature stability of the mass axis; the resolution temperature compensation module and the low-end temperature compensation module respectively compensate the temperature drift of the slope and intercept of the scanning line, the temperature stability of resolution and sensitivity is ensured, and the reliability of the analysis result of the mass spectrometer under a wide temperature range is improved under the combined action of three temperature compensations.
C. The temperature compensation amplifying circuit has a simple structure, does not need a digital control system, occupies a small area, and obviously reduces the volume, power consumption, weight and complexity of the radio frequency power supply compared with the integral constant temperature scheme; compared with the optimal scheme of elements, the method has the advantages of obvious cost advantage, wide applicable temperature range, good use effect at high temperature and low temperature, and the temperature compensation parameters determined in a high-temperature test can be applicable to the condition of reducing the environmental temperature without being adjusted again, so that the method is convenient to apply.
D. The invention is simple to realize, the temperature compensation module is inserted into the original circuit, the testability and the manufacturability have advantages, the volume, the power consumption and the weight of the original circuit are not influenced, the electrical indexes such as the output and the efficiency of the radio frequency power supply are not influenced, and the debugging steps of the temperature compensation module parameters are simple and clear, and the operation and the realization are easy.
Drawings
In order to more clearly illustrate the embodiments of the present invention, the drawings which are needed to be used in the embodiments will be briefly described below, and it is apparent that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained from the drawings without inventive labor to those skilled in the art.
FIG. 1 is a schematic block diagram of the input and output of a radio frequency power supply;
FIG. 2 is a schematic of voltage parameters versus mass peak width, peak height, and scan line;
FIG. 3 is a schematic diagram of the operation of the RF power supply;
FIG. 4 is a schematic view of the mass axis offset from the scan line;
FIG. 5 is a schematic diagram of a temperature compensation amplifying circuit provided by the present invention;
FIG. 6 is a schematic diagram of a peak temperature compensation module;
FIG. 7 is a schematic diagram of the combination of the discrimination temperature compensation module and the low-end temperature compensation module.
In the figure:
a' -inverter; a' -operational amplifier;
f-a feedback network with a temperature sensitive element; PA-power amplifier.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 3-7, the invention provides a mass spectrometer rf power supply with a temperature compensation system, which comprises an rf voltage V closed-loop circuit, a dc amplification module and a scanning signal, wherein the rf voltage V closed-loop circuit comprises a comparator in sequence, the output end of the scanning signal and amplitude detection module is respectively electrically connected with the input end of the comparator, the output end of the amplitude detection module is electrically connected with the input end of the direct current amplification module through a multiplier, a temperature compensation amplification circuit with a positive temperature compensation coefficient and a negative temperature compensation coefficient is arranged in the radio frequency power supply, the temperature compensation amplification circuit comprises a temperature compensation module with a temperature sensitive element, the temperature sensitive element is used for detecting the working environment temperature T of the radio frequency power supply, a data model of the relation between the environment temperature T and the radio frequency power supply deviation value is stored in the temperature compensation module, and the temperature compensation module dynamically adjusts the feedback quantity of the radio frequency power supply according to the working environment temperature and the data model. According to the invention, the temperature compensation amplifying circuit is arranged in the radio frequency power supply, when the working temperature of the mass spectrometer changes, the temperature compensation amplifying circuit can compensate the radio frequency power supply V and the direct current voltage U, so that the stable voltage of the mass spectrometer is kept stable, the deviation is avoided, and the reliability of the analysis result of the mass spectrometer in a wide temperature range is improved; in addition, the whole constant temperature and the optimization of elements in the prior art belong to a scheme for passively solving the temperature drift, and the temperature compensation system based on the temperature-sensitive element provided by the invention belongs to a scheme for actively solving the temperature drift, so that the compensation efficiency is higher.
The working principle of the temperature compensation module is shown in fig. 5. The amplifier A 'is a phase inverter, and a feedback network with a temperature sensitive element is bridged between the input end and the output end of the operational amplifier A'. The temperature-sensitive element detects the working environment temperature T of the radio frequency power supply, when the temperature T changes, the change of the temperature-sensitive element can adjust the feedback quantity of the operational amplifier A' so that the gain of each temperature compensation module changes according to the data model established by each temperature compensation module. And setting the electrical parameters of the operational amplifier A' to enable the compensation quantity of the temperature compensation module to dynamically offset the offset of the compensation object along with the temperature change. And determining the temperature characteristics of the peak temperature compensation module, the distinguishing temperature compensation module and the low-end temperature compensation module according to the temperature characteristics of the object compensated by the temperature compensation module.
Aiming at the problem of temperature drift of the radio frequency power supply, the temperature compensation module designed for the radio frequency power supply comprises the following three modules: a peak temperature compensation module, a resolution temperature compensation module and a low-end temperature compensation module. Each temperature compensation module is provided with a temperature sensitive element, and can be regarded as a two-port network with signal amplification property, and the characteristic is that the amplification factor has temperature characteristic. The signal at a specific position is dynamically compensated in a wide temperature range, so that the deviation of the radio frequency power supply control circuit caused by temperature change is restrained, and the stability of the output of the radio frequency power supply is maintained.
Wherein the peak temperature compensation module is bridged in a radio frequency voltage V dynamic compensation feedback loop formed between the output end and the input end of the power amplifier and used for dynamic compensationThe radio frequency voltage V deviant, the data model stored in the peak temperature compensation module is: a. the1＝1/(1+k1T)，A1Amplification factor of the peak temperature compensation module to the radio frequency voltage V, wherein k1The peak temperature compensation coefficient is obtained, and T is the environmental temperature detected by the temperature sensitive element; along with the change of the temperature of the working environment, the peak position compensation module continuously adjusts a feedback loop of the radio frequency voltage V so as to inhibit the deviation of the radio frequency voltage V generated along with the change of the temperature and maintain the stability of a mass axis. A schematic diagram of peak compensation is shown in fig. 6.
The distinguishing temperature compensation module is arranged at the input end of the multiplier and used for dynamically compensating a direct current voltage U deviant of the radio frequency power supply, and a data model stored in the distinguishing temperature compensation module is as follows: a. the2＝1/(1+k2T)，A2For distinguishing the amplification factor of the temperature compensation module to the DC voltage U, where k2In order to distinguish the temperature compensation coefficient, T is the environmental temperature detected by the temperature sensitive element; the distinguishing temperature compensation module has the following two functions in the invention: the first one is to offset the influence of the peak temperature compensation module on the DC voltage U, and the second one is to compensate the drift of the multiplier, and the two points ensure that the slope of the scanning line does not change with the temperature.
The low-end temperature compensation module is arranged at the input end of the direct current amplification module and used for dynamically compensating an intercept value of a U/V scanning line formed by a direct current voltage U and a radio frequency voltage V of the radio frequency power supply, and a data model in the low-end temperature compensation module is as follows: a. the3＝1+k3T，A3The low-end temperature compensation module amplifies the reference voltage of the DC amplification module, wherein k3The temperature compensation coefficient is a low-end temperature compensation coefficient, and T is the ambient temperature detected by the temperature sensitive element; the low-end temperature compensation module continuously changes the dc compensation value of the dc voltage U according to the change of the operating environment temperature, dynamically compensates the intercept of the scan line, and cooperates with the resolution temperature compensation module to ensure the temperature stability of the scan line, and the schematic diagram of the resolution temperature compensation and the low-end temperature compensation is shown in fig. 7.
Wherein the obtaining of the temperature compensated electrical parameter may be accomplished by:
a, independently placing a radio frequency power supply in a high-low temperature test box, and observing and recording mass spectrum patterns at different temperatures;
b, analyzing and calculating a temperature compensation coefficient K of mass spectrum parameter drift, and reversely deducing an electrical parameter of the temperature compensation circuit;
and C, carrying out high-low temperature test verification on the radio frequency power supply with the temperature compensation amplifying circuit to obtain a data model. The temperature compensation range of the radio frequency power supply obtained by the invention is-20-70 ℃.
The temperature compensation principle of the mass spectrometer radio frequency power supply is as follows:
the scanning signal and the radio frequency signal are modulated by a mixer, then pass through a power amplifier and drive a booster coil, the secondary output of the coil is isolated by a capacitor and detected by amplitude to obtain a small voltage u corresponding to the actual amplitude value, the voltage is compared with the set radio frequency scanning signal, the difference value of the voltage is used for finely adjusting the radio frequency voltage V, the closed-loop control of the radio frequency voltage V is realized, the matching of the output voltage and the control signal is ensured, meanwhile, the product of the multiplication of a high-end compensation signal and u is added with a zero-bias voltage and amplified to obtain a direct current voltage U, after the working temperature of the radio frequency power supply changes, temperature-sensitive elements in three temperature compensation modules can detect the change of the working environment temperature of the radio frequency power supply, the mass spectrometer is supposed to finish tuning, and after the working temperature of the radio frequency power supply changes △ T, the compensation process of the three temperature:
(1) peak position temperature compensation, wherein a target peak moves △ M mass numbers along with the change of temperature, the corresponding variation is △ V according to the mass spectrum theory, the variation is caused by the temperature drift of the radio-frequency voltage V, the variation rate of the radio-frequency voltage V is 1+ △ V/V, and a peak position temperature compensation module varies according to the temperature according to a formula A1＝1/(1+k1T) adjusting the gain A1So that A is1The value is equal to the reciprocal of the change rate of the radio frequency voltage, and the change of the radio frequency voltage V is counteracted by adding the temperature compensation module to the series feedback link, so that the radio frequency voltage V is kept unchanged. This compensates for the drift of the rf voltage V due to temperature.
(2) Resolution temperature compensation-the half-width of the peak at the high end varied △ m1 with temperature change and the slope of the scan line varied △ k according to mass spectrometry theory to a value equal to △U/V, the variation △ U is caused by the temperature drift of the DC voltage U, the variation rate of the DC voltage U is 1+ △ U/U, the distinguishing temperature compensation module is according to the formula of the temperature variation A2＝1/(1+k2T) adjusting the gain A2，A2The value is equal to the reciprocal of the change rate of the U, and the change of the direct current voltage U is counteracted by adding the temperature compensation module into a series link, so that the direct current voltage U is kept unchanged. This compensates for the drift of the dc voltage U due to temperature.
(3) Low-end temperature compensation, namely, the half-peak width of a low-end peak changes △ m2 along with the change of temperature, and the intercept of a scanning line changes △ b according to the mass spectrum theory, because the zero-bias voltage of the direct current amplification module has temperature drift, the corresponding direct current change amount is △ U', and the low-end temperature compensation module changes according to the temperature according to a formula A3＝1+k3T adjusting the gain A3So that the gain is converted by △ A3The product of the zero bias voltage and the reference voltage input by the direct current amplification module is equal to- △ U' (the reference voltage is 5V direct current voltage), the compensation circuit is added into a comparison link to offset the temperature drift of the zero bias voltage, and the drift of the zero bias voltage of the direct current amplification module caused by the temperature is compensated.
Finally, under the combined action of the three temperature compensation modules, the deviation value of the electrical parameter is corrected in time according to the data models respectively established by the three temperature compensation modules, the scanning line is pulled back to the scanning line a from the scanning line d in the figure 4, the mass axis is kept unchanged, and the accuracy of the analysis result of the mass spectrometer is ensured.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are intended to be within the scope of the invention.
Claims (6)
1. A mass spectrometer radio frequency power supply with a temperature compensation system comprises a radio frequency voltage V closed loop circuit, a direct current amplification module and a scanning signal, wherein the radio frequency voltage V closed loop circuit sequentially comprises a comparator, a mixer, a power amplifier and an amplitude detection module, the output ends of the scanning signal and the amplitude detection module are respectively and electrically connected with the input end of the comparator, and the output end of the amplitude detection module is electrically connected with the input end of the direct current amplification module through a multiplier, and the mass spectrometer radio frequency power supply is characterized in that the radio frequency power supply is also provided with a temperature compensation amplification circuit with a positive temperature compensation coefficient and a negative temperature compensation coefficient, the temperature compensation amplification circuit comprises a temperature compensation module with a temperature sensitive element, the temperature sensitive element is used for detecting the ambient temperature T of the work of the radio frequency power supply, and a data model of the relation between the ambient temperature T and the deviation value of the radio frequency power supply is also, the temperature compensation module dynamically adjusts the feedback quantity of the radio frequency power supply according to the working environment temperature and the data model;
the temperature compensation module comprises a peak temperature compensation module, a distinguishing temperature compensation module and a low-end temperature compensation module; the peak position temperature compensation module is bridged in a radio frequency voltage V dynamic compensation feedback loop formed between the output end and the input end of the power amplifier and is used for dynamically compensating a radio frequency voltage V deviation value;
the resolution temperature compensation module is arranged at the input end of the multiplier and used for dynamically compensating a direct current voltage U deviation value of the radio frequency power supply;
the low-end temperature compensation module is arranged at the input end of the direct current amplification module and used for dynamically compensating the offset value of the zero bias voltage of the direct current amplification module.
2. The mass spectrometer radio frequency power supply with the temperature compensation system of claim 1, wherein the data model in the peak temperature compensation module is: a. the1=1/(1+k1T)，A1Amplification factor of the peak temperature compensation module to the radio frequency voltage V, wherein k1The peak temperature compensation coefficient is shown, and T is the ambient temperature detected by the temperature sensitive element.
3. The mass spectrometer radio frequency power supply with the temperature compensation system of claim 1, wherein in the resolution temperature compensation moduleThe data model is: a. the2=1/（1+k2T），A2For distinguishing the amplification factor of the temperature compensation module to the DC voltage U, where k2To distinguish the temperature compensation coefficient, T is the ambient temperature detected by the temperature sensitive element.
4. The mass spectrometer rf power supply with temperature compensation system of claim 1, wherein the data model in the low end temperature compensation module is: a. the3=1+k3T，A3The low-end temperature compensation module amplifies the reference voltage of the DC amplification module, wherein k3The low-end temperature compensation coefficient is, and T is the ambient temperature detected by the temperature sensitive element.
5. The rf power supply according to any one of claims 1-4, wherein the temperature compensation parameters of the peak temperature compensation module, the resolution temperature compensation module and the low-end temperature compensation module are obtained by: firstly, independently placing a radio frequency power supply in a high-low temperature test box, and observing and recording the change of a mass spectrum pattern of the radio frequency power supply at each environmental temperature; then, analyzing and calculating a temperature compensation coefficient of mass spectrum parameter drift according to the mass spectrum pattern; and finally, obtaining mass spectrum temperature compensation electric parameters on the established temperature compensation amplifying circuit by a reverse method.
6. The mass spectrometer radio frequency power supply with the temperature compensation system according to claim 5, wherein the temperature compensation range of the radio frequency power supply is-20-70 ℃.
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| CN101656511A (en) * | 2009-09-04 | 2010-02-24 | 惠州市正源微电子有限公司 | Temperature compensating circuit of radio frequency power amplifier |
| CN105591528A (en) * | 2016-01-04 | 2016-05-18 | 钢研纳克检测技术有限公司 | Radio frequency power supply for quadrupole mass spectrometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101656511A (en) * | 2009-09-04 | 2010-02-24 | 惠州市正源微电子有限公司 | Temperature compensating circuit of radio frequency power amplifier |
| CN105591528A (en) * | 2016-01-04 | 2016-05-18 | 钢研纳克检测技术有限公司 | Radio frequency power supply for quadrupole mass spectrometer |
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