CN107843621A - A kind of low-power consumption hydrogen temperature composite sensing core body and preparation method thereof - Google Patents
A kind of low-power consumption hydrogen temperature composite sensing core body and preparation method thereof Download PDFInfo
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- CN107843621A CN107843621A CN201711193133.5A CN201711193133A CN107843621A CN 107843621 A CN107843621 A CN 107843621A CN 201711193133 A CN201711193133 A CN 201711193133A CN 107843621 A CN107843621 A CN 107843621A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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- G—PHYSICS
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a kind of low-power consumption hydrogen temperature composite sensing core body; including substrate, above substrate the connection unit drawn is connected for the hydrogen measurement unit of monitoring hydrogen concentration, the temperature measurement unit for measurement temperature and for signal; the composite sensing core body includes a temperature measurement unit and a hydrogen measurement unit simultaneously on a substrate; and thermometric protective layer is provided with the temperature measurement unit surface, the hydrogen measurement cell surface has selectively penetrating protective layer.Present invention also offers the preparation method of foregoing low-power consumption hydrogen temperature composite sensing core body.The low-power consumption hydrogen temperature composite sensing core body of the present invention, can be while sensitivity and stability be ensured, while realizes the measurement of density of hydrogen in determination of the environment temperature and environment.In addition, the low-power consumption hydrogen temperature composite sensing core body that the present invention provides also has the characteristics of simple in construction, it can more made in small area, significantly reduce cost of manufacture.
Description
Technical field
The present invention relates to one kind sensing core body and preparation method thereof, and in particular to a kind of low-power consumption hydrogen temperature composite sensing
Core body and preparation method thereof, belong to sensor technical field.
Background technology
Hydrogen is a kind of important special industrial gas, and petrochemical industry, metallurgy, electronics, food etc. are widely used in as the raw material of industry
Industry, hydrogen is also a kind of green fuel in addition, for space flight, new-energy automobile etc..Hydrogen and air or other oxidations
Property gas mixing is easily exploded, and the blast of Hydrogen in Air is limited to (4%~75%vol), and the blast of hydrogen is with as phase
Close chemical plant, the main points of laboratory safety concern.Hydrogen is a kind of gas of colorless and odorless, and Hydrogen in Air concentration increase is people
Can not directly it perceive.Hydrogen gas sensor is a kind of sensor that can measure density of hydrogen, is monitored by hydrogen concentration, can be earlier
Discovery density of hydrogen abnormal increase.
Temperature is higher, and hydrogen diffusion velocity is faster, and catching fire needed for blast occurs for hydrogen can be lower, caused by hydrogen gas leakage
It is dangerous bigger.Therefore density of hydrogen and environment temperature are determined simultaneously for the early warning of hydrogen gas leakage security and hydrogen gas leakage source
Lookup plays an important roll.
The operation principle of hydrogen sensor based on palldium alloy resistance be palldium alloy in the presence of various concentrations hydrogen, its electricity
Different degrees of change can occur for resistance, so that according to the change of resistance come sensing hydrogen gas concentration.But the resistance of palldium alloy is simultaneously
It can be influenceed by variation of ambient temperature, in order to eliminate the influence of temperature, in Chinese patent CN1947007B and Chinese patent CN
Heated for controlling temperature unit is all devised in 204439589U, the temperature constant method for employing control hydrogen measurement unit eliminates
Influence of the temperature to measurement, but these sensors have the following disadvantages：
1) there is complicated heated for controlling temperature unit, complicated, processing and manufacturing difficulty is big, and cost is high on sensor.
2) need of work heats, and power consumption is big, is not suitable for wirelessly layouting, and have potential safety hazard.
3) sensor does not have ambient temperature measurement function.
The content of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide one kind not to need heated for controlling temperature, and can be simultaneously real
Existing thermometric and the low-power consumption hydrogen temperature composite sensing core body for surveying density of hydrogen.
The present invention adopts the following technical scheme that：
A kind of low-power consumption hydrogen temperature composite sensing core body, including substrate, above substrate be used for monitoring hydrogen it is dense
Hydrogen measurement unit, the temperature measurement unit for measurement temperature and the connection unit drawn for signal connection of degree, it is described
Composite sensing core body includes a temperature measurement unit and a hydrogen measurement unit simultaneously on a substrate, and in the temperature
Degree measuring unit surface is provided with thermometric protective layer, and the hydrogen measurement cell surface has selectively penetrating protective layer.
Further scheme is：
A layer insulating is provided with the substrate, insulating barrier is located at substrate and hydrogen measurement unit, temperature measurement unit
And between connection unit.
Further scheme is：
The hydrogen measurement unit includes surveying hydrogen sensitive layer, selectively penetrating protective layer, and selectively penetrating protective layer is located at
Survey above hydrogen sensitive layer, cover and survey hydrogen sensitive layer.
Further scheme is：
The temperature measurement unit includes thermometric protective layer and thermometric sensitive layer, and thermometric protective layer is located on thermometric sensitive layer
Side, covers thermometric sensitive layer.
Further scheme is：
The substrate is silicon or ceramics.
Further scheme is：
The insulating barrier is the complex of silica or silicon nitride or both.
Further scheme is：
The survey hydrogen sensitive layer is palladium-nickel, palladium-silver, palladium-gold or palladium-chromium alloy material；Selectively penetrating protective layer is two
Silica.
Further scheme is：
The thermometric sensitive layer is platinum, nickel or copper；Thermometric protective layer is silicon nitride or carborundum.
Present invention also offers the preparation method of foregoing low-power consumption hydrogen temperature composite sensing core body, comprise the following steps：
1) cleaning pretreatment is carried out to substrate surface；
2) in the deposition on substrate insulating barrier by step 1) processing, method for optimizing is chemical vapor deposition；
3) thermometric sensitive thin film pattern is formed on the insulating barrier 2) formed using photoetching-film plating process；
4) use to be deposited on thermometric sensitive thin film and form protective layer
5) formed using photoetching-film plating process on the insulating barrier 2) formed and survey hytrogen sensitive film pattern；
6) connection unit Thinfilm pattern is formed using photoetching-film plating process；
7) permselective layer is formed on hytrogen sensitive film is surveyed using chemical vapor deposition.
Further scheme is：
In step 2), by chemical vapour deposition technique in deposition on substrate insulating barrier.
The low-power consumption hydrogen temperature composite sensing core body of the present invention, can be while sensitivity and stability be ensured, together
The measurement of density of hydrogen in Shi Shixian determination of the environment temperature and environment.In addition, the low-power consumption hydrogen temperature that the present invention provides is compound
Sensing core body also has the characteristics of simple in construction, can more made in small area, significantly reduce cost of manufacture.
Brief description of the drawings
Fig. 1 is the plan of hydrogen temperature composite sensing core body of the present invention；
Fig. 2 is the schematic cross-section of film hydrogen temperature composite sensing core body of the present invention
Fig. 3 is Fig. 1 B-B faces schematic diagram.
In figure：1. substrate；2. temperature measurement unit；2a. thermometric sensitive layers；2b. thermometric protective layers；3. hydrogen measurement list
Member；3a. surveys hydrogen sensitive layer；3b. selectively penetrating protective layers
Embodiment
The present invention is described further below by specific embodiment.
As shown in Figures 1 to 3, a kind of hydrogen temperature composite sensing core body, including substrate 1, measurement hydrogen on the base 1 is set
The hydrogen measurement unit 3 of gas concentration, the temperature measurement unit 2 for temperature survey and the connection unit 4 drawn for signal.
In this example, substrate, which has substrate 1 and is located at the insulating barrier 5 of substrate surface, to be formed,.
In this example, temperature measurement unit has thermometric layer 2a and the protective layer 2b for physical isolation protection thermometric layer to form.
In this example, hydrogen measurement unit by hydrogen sensitive layer 3a and can selectively saturating hydrogen and and can protect the selection of hydrogen sensitive layer
Property saturating hydrogen protective layer 3b form.
In this example, the material for making substrate 1 is silicon, and the material of insulating barrier 5 in substrate is silicon nitride.
This example is used, and thermometric layer 2a material is Pt, and under thermometric layer 2a, the protective layer 2b materials of thermometric layer are silicon nitride.
In this example, hydrogen sensitive layer 3a material is Pd-Ni alloys, Pd and Ni ratios are 90:10, the saturating hydrogen protective layer of selectivity
Material is SiO2.
The technical scheme of patent of the present invention is：One kind uses low-power consumption hydrogen temperature composite sensing core body measurement density of hydrogen
Method, the described method comprises the following steps：
1) cleaning pretreatment is carried out to substrate surface, removes the pollutant of substrate surface；
2) silicon nitride dielectric layer is made in the substrate surface handled well using chemical gaseous phase depositing process；
3) graphic structure of temperature measurement unit is made using photoetching process, forms photoresist mask；
4) transition zone Ti and thermometric layer Pt are sequentially depositing using magnetron sputtering technique, clean stripping forms thermometric layer 2a；
5) graphic structure of thermometric protective layer is made using photoetching process, forms photoresist mask；
6) chemical vapor deposition thermometric protective layer 2b is used；
7) graphic structure of hydrogen measurement unit is made using photoetching process, forms photoresist mask；
8) deposition of transition zone Ti and hydrogen sensitive layer Pt-Ni, Pt-NI layer is sequentially depositing using conjunction using magnetron sputtering technique
Gold target material, clean stripping form thermometric layer 3a；
9) graphic structure of the hydrogen sensitive layer protective layer of the saturating hydrogen of selectivity is made using photoetching process, photoresist is formed and covers
Film；
10) hydrogen protective layer 3b is surveyed using chemical vapor deposition；
11) graphic structure of connection unit is made using photoetching process, forms photoresist mask；
12) connection unit 4 is formed using electron beam evaporation process deposition connection unit layer, clean stripping；
13) glue-line is protected in surface spin coating；
14) single hydrogen temperature composite sensing core body is made as by scribing sliver.
The present invention realizes the measurement of density of hydrogen in determination of the environment temperature and environment simultaneously, can subsequently repaiied by temperature
Normal operation method eliminates influence of the temperature to survey hydrogen loop resistance so that measurement result is accurately and reliably.
Although reference be made herein to invention has been described for explanatory embodiment of the invention, and above-described embodiment is only this hair
Bright preferable embodiment, embodiments of the present invention are simultaneously not restricted to the described embodiments, it should be appreciated that people in the art
Member can be designed that a lot of other modifications and embodiment, and these modifications and embodiment will fall in principle disclosed in the present application
Within scope and spirit.
Claims (10)
- A kind of 1. low-power consumption hydrogen temperature composite sensing core body, it is characterised in that：It is used to supervise including substrate, above substrate Survey the hydrogen measurement unit, the temperature measurement unit for measurement temperature and the connection list drawn for signal connection of density of hydrogen Member, the composite sensing core body include a temperature measurement unit and a hydrogen measurement unit simultaneously on a substrate, and Thermometric protective layer is provided with the temperature measurement unit surface, the hydrogen measurement cell surface has selectively penetrating protection Layer.
- 2. low-power consumption hydrogen temperature composite sensing core body according to claim 1, it is characterised in that：A layer insulating is provided with the substrate, insulating barrier is located at substrate and hydrogen measurement unit, temperature measurement unit and company Between order member.
- 3. low-power consumption hydrogen temperature composite sensing core body according to claim 1, it is characterised in that：The hydrogen measurement unit includes surveying hydrogen sensitive layer, selectively penetrating protective layer, and selectively penetrating protective layer is positioned at survey hydrogen Above sensitive layer, cover and survey hydrogen sensitive layer.
- 4. low-power consumption hydrogen temperature composite sensing core body according to claim 1, it is characterised in that：The temperature measurement unit includes thermometric protective layer and thermometric sensitive layer, and thermometric protective layer is located above thermometric sensitive layer, Cover thermometric sensitive layer.
- 5. the low-power consumption hydrogen temperature composite sensing core body according to claim 1 refers to 4 any claims, it is characterised in that：The substrate is silicon or ceramics.
- 6. low-power consumption hydrogen temperature composite sensing core body according to claim 2, it is characterised in that：The insulating barrier is the complex of silica or silicon nitride or both.
- 7. low-power consumption hydrogen temperature composite sensing core body according to claim 3, it is characterised in that：The survey hydrogen sensitive layer is palladium-nickel, palladium-silver, palladium-gold or palladium-chromium alloy material；Selectively penetrating protective layer is titanium dioxide Silicon.
- 8. low-power consumption hydrogen temperature composite sensing core body according to claim 4, it is characterised in that：The thermometric sensitive layer is platinum, nickel or copper；Thermometric protective layer is silicon nitride or carborundum.
- 9. the preparation method of low-power consumption hydrogen temperature composite sensing core body, its feature described in claim 1 to 8 any claim It is to comprise the following steps：1) cleaning pretreatment is carried out to substrate surface；2) in the deposition on substrate insulating barrier by step 1) processing, method for optimizing is chemical vapor deposition；3) thermometric sensitive thin film pattern is formed on the insulating barrier 2) formed using photoetching-film plating process；4) use to be deposited on thermometric sensitive thin film and form protective layer5) formed using photoetching-film plating process on the insulating barrier 2) formed and survey hytrogen sensitive film pattern；6) connection unit Thinfilm pattern is formed using photoetching-film plating process；7) permselective layer is formed on hytrogen sensitive film is surveyed using chemical vapor deposition.
- 10. the preparation method of low-power consumption hydrogen temperature composite sensing core body according to claim 9, it is characterised in that：Step 2) in, by chemical vapour deposition technique in deposition on substrate insulating barrier.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109211984A (en) * | 2018-07-05 | 2019-01-15 | 兰州空间技术物理研究所 | A kind of miniature space hydrogen detection microsensor and preparation method thereof |
| CN111044582A (en) * | 2019-12-04 | 2020-04-21 | 中国工程物理研究院化工材料研究所 | Fluorocarbon film/metal oxide gas-sensitive film composite laminated device and preparation method thereof |
| CN112748090A (en) * | 2020-12-25 | 2021-05-04 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
| CN116773616A (en) * | 2023-08-25 | 2023-09-19 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
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| CN103760195A (en) * | 2014-02-13 | 2014-04-30 | 中国电子科技集团公司第四十九研究所 | Manufacturing method of palladium-gold alloy hydrogen sensor core body |
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| CN101122523A (en) * | 2007-06-26 | 2008-02-13 | 中国铝业股份有限公司 | On-line detection method for transformer insulation oil temperature and characteristic gas in oil and oil chromatography |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109211984A (en) * | 2018-07-05 | 2019-01-15 | 兰州空间技术物理研究所 | A kind of miniature space hydrogen detection microsensor and preparation method thereof |
| CN111044582A (en) * | 2019-12-04 | 2020-04-21 | 中国工程物理研究院化工材料研究所 | Fluorocarbon film/metal oxide gas-sensitive film composite laminated device and preparation method thereof |
| CN112748090A (en) * | 2020-12-25 | 2021-05-04 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
| CN112748090B (en) * | 2020-12-25 | 2024-03-26 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
| CN116773616A (en) * | 2023-08-25 | 2023-09-19 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
| CN116773616B (en) * | 2023-08-25 | 2024-02-20 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
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