CN107026066B - Feeding device, ion source device and method of feeding - Google Patents
Feeding device, ion source device and method of feeding Download PDFInfo
- Publication number
- CN107026066B CN107026066B CN201510351381.2A CN201510351381A CN107026066B CN 107026066 B CN107026066 B CN 107026066B CN 201510351381 A CN201510351381 A CN 201510351381A CN 107026066 B CN107026066 B CN 107026066B
- Authority
- CN
- China
- Prior art keywords
- hollow
- container
- rod
- feeding device
- turncap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of feeding device, ion source device and method of feeding, which includes container, hollow turncap and hollow stem, which includes a container body and a neck；The hollow turncap includes side wall, end face and hollow portion, and the hollow portion is for making the hollow stem pass through；The hollow stem include be hollow first body of rod, second body of rod and the protruding portion between first body of rod and second body of rod, when second body of rod that the hollow stem is inserted into the container and the hollow stem stretches out the first through hole and when the hollow turncap is tightened in the neck, first body of rod is supported set on the bottom of the container, and one end of the protruding portion, which is supported, is set to the end face.Pass through being applied in combination for container, hollow turncap and hollow stem so that feeding port and gas outlet are combined into one and are possibly realized in the case where being inverted use；Container is also ensured simultaneously in inversion in use, solid material will not block bottleneck or enter in hollow rod body the pollution for causing vacuum chamber.
Description
Technical field
The present invention relates to a kind of feeding device, ion source device and methods of feeding, make more particularly to a kind of inversion of needs
Feeding device, ion source device and method of feeding.
Background technology
The ion source of ion implantation apparatus is for generating plasma and educt beaming flow, and (such as red using solid material
Phosphorus) ion source in, need to be passed through vacuum chamber after solid material gasifies with ionized gas, solid material is blocky sometimes
, there is larger volume, in this case, the evaporative flask for the solid material that gasifies is usually provided with two openings, and one
Solid material is fitted into evaporative flask by a larger opening as feeding port, by the feeding port；Another opening usually has
Smaller aperture, for gas to be passed through in vacuum chamber.However, under the relatively high occasion of vacuum level requirements this structure steaming
It is less than optimal to send out bottle, because the opening holdings for allowing for vacuum degree more difficult more, the sealing difficulty of larger open is aobvious
It is so bigger, once evaporative flask has opening gas leakage, just influences whether vacuum chamber.
For this purpose, research staff attempts feeding port and gas vent being combined into one, i.e., using the evaporation of only one opening
Bottle, the bottleneck aperture of the evaporative flask is smaller, can use the solid material of fritter or use powdered solid material.It is above-mentioned
This evaporative flask is feasible in the upward placement situation of bottleneck, but be inverted use when there is a problem again (in order to make from
The overall structure of sub- implanter is more compact, according to position of the ion source in entire ion implantation apparatus, it is sometimes necessary to will steam
Hair bottle is upside down in the top of ion source, i.e. the bottleneck of evaporative flask is placed downwards).With reference to figure 1, the bottleneck 11 of evaporative flask 1 is downward, bottle
Mouthful 11 not only outlets as feeding port but also as gas, it is this need inversion evaporative flask in the case of, solid material 2 can block
Bottle upside-down gas be difficult to it is unobstructed be transmitted to vacuum chamber, and in this case, it is clear that powdered solid material is can not
It is used.
Invention content
The technical problem to be solved by the present invention is in order to overcome in the prior art gasify solid material evaporative flask feeding port
Bottleneck when detaching inversion evaporative flask when the increase of vacuum sealing difficulty, feeding port and gas vent being caused to be combined into one with gas vent
The defect easily blocked by solid material provides a kind of feeding device, ion source device and method of feeding, and it is suitable for blocks of solid
Raw material and pulverulent solids raw material, especially suitable for the occasion used need to be inverted.
The present invention is to solve above-mentioned technical problem by following technical proposals：
A kind of feeding device, feature are comprising a container, a hollow turncap and a hollow stem, wherein
The container includes a container body and the neck that is connected with the container body, which has for containing
The accommodating space of solid material is put, external screw thread is provided on the neck；
The hollow turncap includes side wall, the end face being connected with side wall one end and the hollow portion limited by the side wall, the end
Be provided with the first through hole being connected with the hollow portion on face, the hollow portion for making the hollow stem pass through, the side wall it is interior
Internal thread compatible with the external screw thread is provided on wall；
The hollow stem include be hollow first body of rod, second body of rod and positioned at first body of rod and second body of rod it
Between a protruding portion, the outer diameter of the protruding portion is more than the aperture of the first through hole, the outer diameter of first body of rod and second body of rod
The respectively less than aperture of the first through hole,
The length of the hollow stem is arranged to：When the hollow stem is inserted into the container and second body of rod of the hollow stem
It stretches out the first through hole and when the hollow turncap is tightened in the neck, which supports set on the bottom of the container, this is prominent
The one end for going out portion is supported set on the end face.
Preferably, first body of rod, second body of rod and the protruding portion are integrally formed.
Preferably, which further includes a housing, the housing include a hollow cylinder and with the hollow cylinder
The connected end in one end is provided with the second through-hole to connect with the hollow cylinder on the end,
The other end of the hollow cylinder is connected with the shoulder of the container body, which is arranged in the hollow cylinder.
Preferably, the aperture of second through-hole is more than the outer diameter of the hollow turncap.
Preferably, the container and the housing are integrally formed.
Preferably, which is made of insulating materials.In the ion source device using solid material, need solid original
Material heating and gasifying is used for the generation of plasma to introduce a gas into vacuum chamber.If gasification temperature is relatively high, it is used for
The heating device of gasification solid material just needs higher power, it usually needs works at higher voltages.And use insulation
Housing can play good buffer action, only heating device works under high pressure, and ion source device still can be with
It works on ground potential, is very favorable in this way for the design of other component in ion source device, it is also ensured that
The safety of operating personnel.
Preferably, the outer diameter of the end is 5cm-50cm.The section of the end can be designed according to actual needs, especially
The end of larger cross-section, such as the end of 30cm-50cm outer diameters may be used when the gasification temperature of solid material is relatively high in ground
Portion.The gradient distribution that can radially form temperature in end so that the outer edge of end is not easily susceptible to the shadow of higher temperature
It rings, so that the close of vacuum chamber will not be influenced by the influence of high temperature by being set to the sealing device of the outer edge of end
Feng Xing.
Preferably, gap is formed between the hollow cylinder and the neck.The gap is formed in the inner wall of the hollow cylinder
Between the outer wall of the neck.
Preferably, which is 1mm-20mm.When the feeding device is matched in the vacuum chamber of ion source, in vacuum chamber
After being evacuated, gap location is also vacuum state, and the presence of this vacuum layer plays preferable thermal isolation, the temperature at neck
Degree is not easily susceptible to the influence of heating device and overheats, and is also not readily susceptible to the influence of the cooling device of vacuum chamber and (vacuum is subcooled
The cooling device of chamber such as cooling pipe, there are commonly water or oil, cooling temperature is more than 0 DEG C, is less than the cooling medium in pipeline
Equal to 60 DEG C, the gasification temperature of in general cooling temperature and solid material differs greatly, and thus gas may be caused to flow to
Device is cooled at neck to be influenced and sublimates, but the presence of vacuum layer to sublimate, phenomenon is relieved).
Preferably, which is made from heat-resisting material, and wherein high temperature resistant is that tolerable temperature reaches 800 DEG C -1000
℃；
Alternatively, the solid material is block stock or dusty raw materials.
The present invention also provides a kind of ion source devices comprising a vacuum chamber, feature are that the vacuum chamber passes through cooling
Device cools down, which includes a top surface, offers a feed inlet on the top surface, which further includes as described above
Feeding device, when the container and the hollow stem are fixed by the turncap, it is true which by the feed inlet stretches into this
In cavity, the shoulder of the container body is sealed with the top surface by sealing device.
Preferably, it is arranged fluted on the top surface, sealing ring is equipped in the groove, which passes through the sealing with the top surface
Circle makes the feed inlet seal.
The present invention also provides a kind of ion source devices comprising a vacuum chamber, feature are that the vacuum chamber passes through cooling
Device cools down, which includes a top surface, offers a feed inlet on the top surface, which further includes as described above
Feeding device, when the container and the hollow stem are fixed by the turncap, it is true which by the feed inlet stretches into this
In cavity, the end of the housing is sealed with the top surface by sealing device.
Preferably, it is arranged fluted on the top surface, sealing ring is equipped in the groove, which passes through the sealing with the top surface
Circle makes the feed inlet seal, outer edge 5mm-5cm of the sealing ring apart from the end, preferably, the sealing ring is apart from the end
Outer edge 5mm -20mm.
The present invention also provides a kind of method of feeding, feature is, uses feeding device as described above, the feed side
Method includes the following steps：
Solid material is fitted into the container, which is inserted into the container, and make the turncap pass through this second
The body of rod；
Turncap is screwed in the neck, so that first body of rod is supported set on the bottom of the container, and first body of rod is not solid with this
Body raw material contacts；
It is inverted the container, unscrews the turncap so that the end of first body of rod is apart from one pre-determined distance of the bottom of the container.
By being applied in combination for container, hollow turncap and hollow stem, in the case where being inverted use, solid material both will not
It blocks bottleneck and will not fall into be formed in vacuum chamber and pollute.
On the basis of common knowledge of the art, above-mentioned each optimum condition can be combined arbitrarily to get each preferable reality of the present invention
Example.
The positive effect of the present invention is that：
1, being applied in combination by container, hollow turncap and hollow stem so that in the case where being inverted use feeding port and
Gas outlet, which is combined into one, to be possibly realized；Simultaneously also ensure container be inverted in use, solid material will not block bottleneck or
Solid material will not enter the pollution that vacuum chamber is caused in hollow rod body.Certain feeding device also can bottleneck be used up,
I.e. feeding device of the invention is not limited by bottleneck direction, therefore its installation position can both be placed on the true of ion source device
The top of cavity can also be placed on the lower section of vacuum chamber, thus when being used cooperatively with ion source device flexibility more preferably, for from
The design of other component provides facility in source arrangement and ion implantation apparatus.
2, higher in gasification temperature, the feeding device with housing can be used, since the end of housing is cut
Face is larger, can form the gradient distribution of the radially temperature (perpendicular to the direction of hollow stem length direction), higher temperature
It is not easy to influence the sealing device (such as O-ring) between feeding device and vacuum chamber, thereby ensures that the sealing of vacuum chamber
Property.
3, the presence in gap can form vacuum layer after vacuum chamber is evacuated between hollow cylinder and neck, thus neck
The influence that the temperature in portion had not only been not easy the heating of receptor main body is not susceptible to the influence that vacuum chamber cools down again, and thus the temperature of neck had been both
Will not it is excessively high will not be too low, can ensure that gas is not easy to sublimate substantially while ensureing vacuum chamber leakproofness and be deposited on neck
Place.
Description of the drawings
Fig. 1 is that the evaporative flask of the prior art is inverted the schematic diagram used.
Fig. 2 is the schematic diagram of container in the embodiment of the present invention 1.
Fig. 3 is the stereogram of hollow turncap in the embodiment of the present invention 1.
Fig. 4 is the sectional view of hollow turncap in the embodiment of the present invention 1.
Fig. 5 is the stereogram of hollow stem in the embodiment of the present invention 1.
Fig. 6 is the stereogram of another angle of hollow stem in the embodiment of the present invention 1.
Fig. 7 is the assembling schematic diagram of the feeding device of the embodiment of the present invention 1.
Fig. 8 is the inversion state schematic diagram of the feeding device of the embodiment of the present invention 1.
Fig. 9 is the use state diagram of the feeding device of the embodiment of the present invention 1.
Figure 10 is the schematic diagram of container in the embodiment of the present invention 2.
Figure 11 is the assembling schematic diagram of the feeding device of the embodiment of the present invention 2.
Figure 12 is the use state diagram of the feeding device of the embodiment of the present invention 2.
Figure 13 is the feeding device of the embodiment of the present invention 3 and the schematic diagram that ion source device is used cooperatively.
Figure 14 is the partial schematic diagram of the top surface of vacuum chamber and feeding device assembly in the embodiment of the present invention 3.
Figure 15 is the partial enlarged view in the portions A in Figure 13.
Specific implementation mode
It is further illustrated the present invention below by the mode of embodiment, but does not therefore limit the present invention to the reality
It applies among a range.
Embodiment 1
With reference to figure 2- Fig. 9, feeding device described in the present embodiment, including a container 1, a hollow turncap 2 and a hollow stem 3,
Wherein,
The container 1 includes a container body 11 and the neck 12 being connected with the container body 11, the container body 11
With the accommodating space 111 for holding solid material, external screw thread 121 is provided on the neck 12；
The hollow turncap 2 includes side wall 21, the end face 22 being connected with 21 one end of side wall and is limited by the side wall hollow
Portion is provided with the first through hole 221 being connected with the hollow portion on the end face 22, and the hollow portion is for making the hollow stem 3 wear
It crosses, internal thread compatible with the external screw thread 121 211 is provided on the inner wall of the side wall 21；
The hollow stem 3 include be hollow first body of rod 31, second body of rod 32 and positioned at first body of rod 31 and the
A protruding portion 33 between bipole body 32, the outer diameter of the protruding portion 33 are more than the aperture of the first through hole 221, first body of rod 31
The aperture of the first through hole 221 is respectively less than with the outer diameter of second body of rod 32,
The length of the hollow stem 3 is arranged to：When the hollow stem 3 is inserted into the container and the second bar of the hollow stem
When body 32 stretches out the first through hole and the hollow turncap 2 and is tightened in the neck 12, which supports set on the container
Bottom, one end of the protruding portion 33 is supported (close to one end of second body of rod) is set to the end face.
Specifically, first body of rod, second body of rod and the protruding portion are integrally formed.
The application method of the feeding device of the present embodiment is such：
With particular reference to Fig. 7-Fig. 9, first solid material 4 is placed in container 1, container is positive placement during filler
, i.e. the bottleneck of container is upward.Hollow stem 3 is inserted into container later, which is passed through to the second bar of hollow stem 3
Body and hollow turncap is made out to be tightened in the neck 12, and ensures that the end of first body of rod of hollow stem is supported with container bottom
If without being contacted with solid material.That is, accommodating space 111 is divided into two by hollow stem 3 (respectively with 111a and 111b
It indicates).Then overturning entire feeding device keeps bottleneck downward, and solid material 4 is concentrated in accommodating space close to the position of neck
Place.
Then the hollow turncap 2 is unscrewed, hollow turncap 2 can move down, while hollow stem 3 can also be made in gravity
Being moved down with moving for hollow turncap 2 under makes first body of rod no longer support the bottom for being set to container, thus the first bar
It is separated by a distance between body and the bottom of container, form gap 111c.At this point, heating the feeding device makes solid material quilt
The gas of gasification, the gained that gasifies can be flowed by gap 111c in hollow stem 3, and ion source is passed into eventually by the hollow stem
Vacuum chamber in (not shown).
It, can in not high and not high to the vacuum level requirements of the vacuum chamber occasion of gasification temperature (heating temperature of solid material)
To use the feeding device described in the present embodiment, the state of the feeding device under use state is as shown in figure 9, hollow turncap 2
End face form between vacuum chamber sealed connection by sealing device (such as O-ring) (vacuum chamber include a top surface, the top surface
On be provided with feed inlet), second body of rod of hollow stem is stretched by feed inlet in vacuum chamber, so that gas is passed into the vacuum chamber
In.
Embodiment 2
The basic principle of embodiment 2 is consistent with embodiment 1, the structural reference embodiment 1 of hollow stem and hollow turncap, different
Place is：
With reference to figure 10- Figure 12, which further includes a housing 5, the housing 5 include a hollow cylinder 51 and with this
The connected end 52 in one end of hollow cylinder 51 is provided with the second through-hole to connect with the hollow cylinder 51 on the end 52
521,
The other end of the hollow cylinder 51 is connected with the shoulder 13 of the container body, which is arranged in the hollow cylinder
In 51.
Wherein, the aperture of second through-hole 521 is more than the outer diameter of the hollow turncap 2, and the container and the housing are one
Body formed.
The application method of feeding device described in the present embodiment is identical with embodiment 1, is filled out when container forward direction is placed
Enter solid material, hollow stem is inserted into the bottom that container is touched in the end in container up to first body of rod later, then this is hollow
Turncap is tightened in the neck, and the end of first body of rod of hollow stem is tightly supported set on the bottom of the container at this time.Then it turns over
Turning the container keeps bottleneck downward, and solid material (succinct for diagram, to be not shown in the relevant drawings of the present embodiment) is assembled
In at position of the accommodating space close to neck.
Then hollow turncap is unscrewed, thus hollow stem can be moved down with hollow moving for turncap, in this way, first
The end of the body of rod will be detached from the contact with container bottom, form gap 111c, the gas that solid material gasifies after being heated is just
It can be entered in hollow stem by gap 111c, to be passed into the vacuum chamber of ion source.
In the relatively high occasion of gasification temperature (heating temperature of solid material), the feed described in the present embodiment may be used
The state of device, the feeding device under use state is as shown in figure 12, and vacuum chamber passes through sealing device (such as O-ring) at this time
It is connected with the end of the housing, second body of rod of the hollow stem stretches into the vacuum chamber, and gas is thus passed through vacuum chamber.By
There is larger area in the end, also can guarantee that sealing device will not overheat at a higher temperature, to ensure vacuum chamber
By preferable vacuum sealing.
Embodiment 3
With reference to figure 13- Figure 15, the general structure of feeding device is same as Example 2 in the present embodiment, the top surface of vacuum chamber
Fluted 611 (a part of top surfaces for only showing vacuum chamber) are set on 61, and the groove 611 is (such as O-shaped for placing sealing ring
Circle), from the direction of plane where top surface (the radial L of end), groove 611 is disposed in proximity to the outer edge of end 52
Place, such as outer edge 2cm of the groove 611 apart from end 52.The end 52 of the housing has larger area, such as the end 52
Outer diameter be 50cm,
When the gasification temperature of solid material is relatively high, the container body of feeding device will be arrived by heating devices heat
Quite high temperature, heat will necessarily some to housing conduct.And general sealing ring is difficult to bear high temperature, once sealing
Circle, which cannot withstand excessively high temperature just, can not ensure the leakproofness of vacuum chamber.And in the present embodiment, due to the area of end 52
Larger, sealing ring is set to the position far from neck, the outer edge of relatively close end, since end is formed radially again
The temperature of temperature gradient distribution, the outer edge of end will not be very high, then sealing ring will not be influenced by excessive temperature, no
Deformation is easy tod produce, also ensures that the leakproofness of vacuum chamber in the case of higher heating and gasifying temperature.
And the end is made of insulating materials, even if if the gasification installation of gasification solid material works under high pressure not
Influence whether feeding device and vacuum chamber, feeding device and vacuum chamber are still on ground potential.
Furthermore in the feeding device in the present embodiment so that form the gap 8 of 5mm between neck 12 and hollow cylinder 51.
Usual vacuum chamber is required for cooling so that its control is in a relatively low temperature, then the cavity wall of vacuum chamber is opposite
It is colder, and the solid material that gasifies needs to heat, if the temperature of heating container body is excessively high so to influence whether neck so that neck
Portion also has higher temperature, can inevitably conduct to end, may be impacted to sealing ring if the temperature of neck is excessively high；
If the temperature of vacuum chamber is too low also to influence whether neck so that jugular temperature is too low, then gas from hotter container body into
Enter colder neck and be easy to happen the neck for sublimating and being deposited on feeding device, this is obviously also unfavorable.
For this purpose, the presence in the gap 8 can balance the temperature of neck, when feeding device is assemblied on vacuum chamber and is completed
It is also vacuum state as vacuum chamber is evacuated, at gap 8 when sealing, the presence of this vacuum layer limits the biography of heat
It leads so that sublimating for gas at neck, the temperature of neck will not be caused while feeding device heated, vacuum chamber is cooled substantially
Degree will not be excessively high so that the temperature of end is excessively high.
Although specific embodiments of the present invention have been described above, it will be appreciated by those of skill in the art that these
It is merely illustrative of, protection scope of the present invention is defined by the appended claims.Those skilled in the art is not carrying on the back
Under the premise of from the principle and substance of the present invention, many changes and modifications may be made, but these are changed
Protection scope of the present invention is each fallen with modification.
Claims (14)
1. a kind of feeding device, which is characterized in that it includes a container, a hollow turncap and a hollow stem, wherein
The container includes a container body and the neck that is connected with the container body, which has solid for holding
The accommodating space of body raw material is provided with external screw thread on the neck；
The hollow turncap includes side wall, the end face being connected with side wall one end and the hollow portion limited by the side wall, on the end face
It is provided with the first through hole being connected with the hollow portion, the hollow portion is for making the hollow stem pass through, on the inner wall of the side wall
It is provided with internal thread compatible with the external screw thread；
The hollow stem include be hollow first body of rod, second body of rod and between first body of rod and second body of rod
One protruding portion, the outer diameter of the protruding portion are more than the aperture of the first through hole, and the outer diameter of first body of rod and second body of rod is small
In the aperture of the first through hole,
The length of the hollow stem is arranged to：When second body of rod that the hollow stem is inserted into the container and the hollow stem stretches out
The first through hole and when the hollow turncap is tightened in the neck, which supports set on the bottom of the container, the protruding portion
One end support be set to the end face.
2. feeding device as described in claim 1, which is characterized in that first body of rod, second body of rod and the protruding portion one
It is body formed.
3. feeding device as described in claim 1, which is characterized in that the feeding device further includes a housing, which includes
One hollow cylinder and the end being connected with one end of the hollow cylinder are provided on the end and to connect with the hollow cylinder
Second through-hole,
The other end of the hollow cylinder is connected with the shoulder of the container body, which is arranged in the hollow cylinder.
4. feeding device as claimed in claim 3, which is characterized in that the aperture of second through-hole is more than the outer of the hollow turncap
Diameter.
5. feeding device as claimed in claim 3, which is characterized in that the container and the housing are integrally formed, and/or,
The housing is made of insulating materials.
6. feeding device as claimed in claim 3, which is characterized in that the outer diameter of the end is 5cm-50cm.
7. feeding device as claimed in claim 3, which is characterized in that form gap between the hollow cylinder and the neck.
8. feeding device as claimed in claim 7, which is characterized in that the gap is 1mm-20mm.
9. the feeding device as described in any one of claim 1-8, which is characterized in that the container is by heat-resisting material system
, wherein high temperature resistant is that tolerable temperature reaches 800 DEG C -1000 DEG C；
Alternatively, the solid material is block stock or dusty raw materials.
10. a kind of ion source device comprising a vacuum chamber, which is characterized in that the vacuum chamber is cooled down by cooling device, this is true
Cavity includes a top surface, offers a feed inlet on the top surface, which further includes as claimed in claim 1 or 2
Feeding device, when which is fixed with the hollow stem by the turncap, which stretches into the vacuum by the feed inlet
In chamber, the shoulder of the container body is sealed with the top surface by sealing device.
11. ion source device as claimed in claim 10, which is characterized in that be arranged fluted on the top surface, set in the groove
There is sealing ring, which makes the feed inlet seal with the top surface by the sealing ring.
12. a kind of ion source device comprising a vacuum chamber, which is characterized in that the vacuum chamber is cooled down by cooling device, this is true
Cavity includes a top surface, offers a feed inlet on the top surface, which further includes as any one in claim 3-8
Feeding device described in, when which is fixed with the hollow stem by the turncap, which is stretched by the feed inlet
Enter in the vacuum chamber, the end of the housing is sealed with the top surface by sealing device.
13. ion source device as claimed in claim 12, which is characterized in that be arranged fluted on the top surface, set in the groove
There is sealing ring, which makes the feed inlet seal with the top surface by the sealing ring, outer edge of the sealing ring apart from the end
5mm-5cm。
14. a kind of method of feeding, which is characterized in that it uses the feeding device as described in any one of claim 1-8, should
Method of feeding includes the following steps：
Solid material is fitted into the container, which is inserted into the container, and the turncap is made to pass through second body of rod；
Turncap is screwed in the neck, so that first body of rod is supported set on the bottom of the container, and first body of rod is not former with the solid
Material contact；
It is inverted the container, unscrews the turncap so that the end of first body of rod is apart from one pre-determined distance of the bottom of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510351381.2A CN107026066B (en) | 2015-06-23 | 2015-06-23 | Feeding device, ion source device and method of feeding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510351381.2A CN107026066B (en) | 2015-06-23 | 2015-06-23 | Feeding device, ion source device and method of feeding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107026066A CN107026066A (en) | 2017-08-08 |
| CN107026066B true CN107026066B (en) | 2018-10-23 |
Family
ID=59523882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510351381.2A Active CN107026066B (en) | 2015-06-23 | 2015-06-23 | Feeding device, ion source device and method of feeding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107026066B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0095887A1 (en) * | 1982-05-28 | 1983-12-07 | Fujitsu Limited | Apparatus for plasma chemical vapour deposition |
| CN101245445A (en) * | 2006-10-19 | 2008-08-20 | 气体产品与化学公司 | Solid source container with inlet plenum |
| CN101646803A (en) * | 2007-03-28 | 2010-02-10 | 东京毅力科创株式会社 | Gas supply method and gas supply device |
| CN201512580U (en) * | 2009-09-17 | 2010-06-23 | 江苏南大光电材料股份有限公司 | Novel container for encapsulating solid high-pure metal organic compounds |
| CN101905126A (en) * | 2002-07-23 | 2010-12-08 | 高级技术材料公司 | Help to promote the method and apparatus that gas contacts with evaporation of materials |
| CN102418084A (en) * | 2011-12-14 | 2012-04-18 | 无锡迈纳德微纳技术有限公司 | Source gas isolated solid source atomic layer deposition device and method |
| CN102577629A (en) * | 2009-09-15 | 2012-07-11 | 三菱电机株式会社 | Plasma generation device |
| CN204668275U (en) * | 2015-06-23 | 2015-09-23 | 上海凯世通半导体有限公司 | Feeding device and ion source device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6887337B2 (en) * | 2000-09-19 | 2005-05-03 | Xactix, Inc. | Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto |
-
2015
- 2015-06-23 CN CN201510351381.2A patent/CN107026066B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0095887A1 (en) * | 1982-05-28 | 1983-12-07 | Fujitsu Limited | Apparatus for plasma chemical vapour deposition |
| CN101905126A (en) * | 2002-07-23 | 2010-12-08 | 高级技术材料公司 | Help to promote the method and apparatus that gas contacts with evaporation of materials |
| CN101245445A (en) * | 2006-10-19 | 2008-08-20 | 气体产品与化学公司 | Solid source container with inlet plenum |
| CN101646803A (en) * | 2007-03-28 | 2010-02-10 | 东京毅力科创株式会社 | Gas supply method and gas supply device |
| CN102577629A (en) * | 2009-09-15 | 2012-07-11 | 三菱电机株式会社 | Plasma generation device |
| CN201512580U (en) * | 2009-09-17 | 2010-06-23 | 江苏南大光电材料股份有限公司 | Novel container for encapsulating solid high-pure metal organic compounds |
| CN102418084A (en) * | 2011-12-14 | 2012-04-18 | 无锡迈纳德微纳技术有限公司 | Source gas isolated solid source atomic layer deposition device and method |
| CN204668275U (en) * | 2015-06-23 | 2015-09-23 | 上海凯世通半导体有限公司 | Feeding device and ion source device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107026066A (en) | 2017-08-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101312953B1 (en) | Sealing apparatus for rotary ice machine | |
| TWI805287B (en) | Semiconductor heat treatment device | |
| CN105223122A (en) | A kind of bolt-type core holding unit | |
| CN107026066B (en) | Feeding device, ion source device and method of feeding | |
| US20160305610A1 (en) | Low heat loss cryogenic liquid container | |
| US20140224176A1 (en) | Mocvd apparatus | |
| KR950703080A (en) | A NOZZLE PLATE HOLDING DEVICE FOR SPINNING OF CONTINUOUS FILAMENTS | |
| CN104913068A (en) | High-low-temperature box penetrating shaft gas sealing device and application | |
| CN105134305A (en) | Brush seal assembly | |
| CN204668275U (en) | Feeding device and ion source device | |
| CN204345142U (en) | A kind of heat conducting oil type swivel joint | |
| CN205207740U (en) | Manual electrical heating ball valve | |
| TW201437453A (en) | Detachable thermal sleeve | |
| CN203176587U (en) | Rotary joint device for water passing and air passing of inner circulation of vacuum equipment | |
| CN105318026A (en) | Combined water-cooling high-temperature wedge type single-disc gate valve | |
| CN103623962A (en) | Spraying nozzle unit | |
| KR20110066994A (en) | Hot water tank method and hot water tank for water cooler-heater | |
| CN208619931U (en) | A kind of fire protection flame retarding PE pipe fitting | |
| CN207406906U (en) | A kind of butterfly valve axle end sealing device | |
| CN104018121A (en) | Heating container for preventing leakage of high-temperature metal material and manufacturing method thereof | |
| CN203163582U (en) | Improved tube type heat exchanger tube box | |
| CN205732807U (en) | A kind of wax liquid attemperator | |
| CN105351559A (en) | Manual electric heating ball valve | |
| CN206018698U (en) | A kind of Industrial Boiler of self-closed | |
| KR100943922B1 (en) | A vacuum structure for heat pipe |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |