CN106772793A - Integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials - Google Patents
Integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials Download PDFInfo
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- CN106772793A CN106772793A CN201710051851.2A CN201710051851A CN106772793A CN 106772793 A CN106772793 A CN 106772793A CN 201710051851 A CN201710051851 A CN 201710051851A CN 106772793 A CN106772793 A CN 106772793A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/1209—Multimode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12154—Power divider
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12159—Interferometer
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- Microelectronics & Electronic Packaging (AREA)
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- Optics & Photonics (AREA)
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Abstract
The invention discloses integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials, belong to integrated silicon photonic arts on piece；Including a rectangular silicon waveguide and N number of parallel conical silicon waveguide, both are cascaded in seamless connection；Rectangular silicon waveguide as light input port, N number of conical silicon waveguide is as output port and symmetrical on X-axis；The length and height all same of N number of passage, the ratio distribution of the width of each passage according to distribution of light intensity in cross section yz directions determine that two symmetrical channel sizes are identical respectively；With the increase of port number, only increase along the longitudinal size in silicon duct width direction；It is basically unchanged along the lateral dimension in silicon waveguide length direction；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.Compact conformation of the present invention, design is simple, and the insertion loss of device is reduced in smaller size, and realizes the light constant power distribution of any port number.
Description
Technical field
The invention belongs to integrated silicon photonic arts on piece, it is related to fiber waveguide device, refers specifically to a kind of based on silicon substrate
Integrated-type luminous power beam splitter on the piece of Meta Materials.
Background technology
In recent years, various Internet services are continued to bring out, especially with cloud storage, the new skill such as cloud computing and big data
The continuous rise of art, the information interchange in the whole world is presented volatile growth.While information interchange is increasingly facilitated, to communication
The requirement of system high-speed rate Large Copacity also more and more higher.In view of electron carrier bottleneck effect is increasingly highlighted, optical interconnection technology by
Gradually turn into the mainstream technology for overcoming communication network transmission bottleneck.
Integrated opto-electronic chip has attracted increasing concern as the core of optical interconnection technology, and silicon-based optical device
With Highgrade integration and energy and the compatible characteristic of CMOS platforms, integration field will have broad application prospects on piece.
Fiber waveguide device is one of essential elements device in integrated opto-electronic chip, using different integration modes, bag
Include single-chip integration and hybrid integrated；Various different active devices and passive device can be realized effective integration, because it has body
Small, the compact conformation of product, stable performance, loss is small with the advantages of being easily integrated, and is widely paid attention to and studied.
Waveguide type luminous power beam splitter as fiber waveguide device indispensable in integrated photon system, with realizing system
The function of effective integration, plays an important role in systems between middle optical power fluctuation and other various functions photonic devices.
At present, the structure type of waveguide type luminous power beam splitter mainly has the luminous power beam splitting based on y branch waveguide cascade
Device, luminous power beam splitter and directional coupler (DC) based on multimode interference effect (MMI) etc..
For the luminous power beam splitter of y branch waveguide cascade, device needs one section more long of mode expansion area, with
Fraction passage is doubled, constantly cascade, and the length of device, loss and heterogeneity constantly become big, and the integrated difficulty of technique is big, Er Qiewu
Method realizes the constant power distribution of any port number；
For the luminous power beam splitter based on multimode interference effect (MMI), in order to reduce device insertion loss, generally
Need to insert one section of waveguide in its input/output end port, this equivalent to increased device size, and MMI multimodes area width
Wider, length is more long, is not suitable for the design of big port number device；
For directional coupler (DC), due to its structure characteristic in itself, its size cannot accomplish very little, and
Wavelength is poor.
The content of the invention
Defect and Improvement requirement of the present invention for above-mentioned existing waveguide type luminous power beam splitter, there is provided one kind is based on silicon
Integrated-type luminous power beam splitter on the piece of base Meta Materials.
Concrete structure includes a rectangular silicon waveguide and 8 parallel conical silicon waveguides, and both are connected on one at seamless connection
Rise；The silicon that rectangular silicon waveguide and conical silicon waveguide are selected, refractive index is 3.46；The * long * wide sizes high of rectangular silicon waveguide are：
10um*12um*0.22um, as the input port of light；8 parallel conical silicon waveguides are used as output port.
Conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom determines according to distribution of light intensity,
The width at the right bottom is 500nm.Respectively 1~passage of passage 8 is numbered in 8 parallel conical silicon waveguides from top to bottom, whole cone
Shape part is symmetrical on X-axis, and X-direction is identical with the direction of propagation of light；
The length of 8 passages is identical, is 10um, and height is also identical, is 0.22um, and the width of each passage is according to light
Ratio distribution of the field intensity in cross section yz directions determines that two symmetrical channel sizes are identical, specially respectively：The He of passage 1
From 3.68um~0.5um transition, the width of passage 2 and passage 7 is from 0.92um~0.5um transition, the He of passage 3 for the width of passage 8
From 0.71um~0.5um transition, the width of passage 4 and passage 5 is from 0.69um~0.5um transition for the width of passage 6.
Light is propagated in integrated-type luminous power beam splitter on described piece, and realizes the mistake to the distribution of incident constant power
Journey is as follows：
In equally distributed light field, a branch of incident light is input into from the center of rectangular silicon waveguide, according to light in the waveguide
Transmission theory and the distribution map of the electric field of emulation, learn that intensity distribution of the light in rectangular silicon waveguide is：The distribution of light intensity at center
Maximum, is then gradually reduced to both sides；According to distribution map, the width range of each conical silicon waveguide channels is obtained；And by cone
The power output transmission spectrum of shape silicon waveguide, finely tunes the width dimensions of each passage, determines passage 1 to the width of the different proportion of passage 8
Degree, realizes the mean allocation of 8 channel optical powers.
The present invention can realize the light constant power distribution of N number of port number, and N is integer；With the increase of port number, only along silicon ripple
The longitudinal size for leading width increases；It is basically unchanged along the lateral dimension in silicon waveguide length direction, not with the increase of port number
And increase；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.
The advantage of the invention is that：
1) a kind of, integrated-type luminous power beam splitter on piece based on silicon substrate Meta Materials, closely, design is simple for structure,
The area size of the x/y plane of the super multichannel luminous power beam splitter of integrated-type is about~N × 20um × 0.5um on whole piece, is beneficial to
It is integrated on piece.
2) a kind of, integrated-type luminous power beam splitter on piece based on silicon substrate Meta Materials, cascades compared to existing y branch waveguide
Luminous power beam splitter, can only realize the beam splitting of number of active lanes even-multiple increases, and the lateral dimension and longitudinal size of device are at double
Several increases, the constant power beam splitter that the present invention is provided can realize the light constant power point of any port number in smaller size
Match somebody with somebody.
3), integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials, is input into by rectangular silicon waveguide,
Then output port is directly used as by conical silicon waveguide, the insertion loss of device is reduced in smaller size.
Brief description of the drawings
Fig. 1 is the structure chart of integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials of the present invention.
Fig. 2 is the light of the present invention schematic diagram that integrated-type luminous power beam splitter is propagated on the piece of 8 passages.
Fig. 3 is the power transmission spectrum of light of the present invention integrated-type luminous power splitter output port on the piece of 8 passages.
Specific embodiment
Below in conjunction with accompanying drawing and implementation example, the present invention is described in further detail.
Integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials of the present invention, for realize super multichannel light etc.
Power beam splitting.As shown in figure 1, including the parallel conical silicon waveguide of a rectangular silicon waveguide and 8, it is by whole section of square to implement
Shape silicon waveguide latter half cuts into 8 tapers of different in width by dimension scale, and the whole section of refractive index of silicon is 3.46；Do not cut
The * long * wide sizes high of rectangular silicon waveguide be：10um*12um*0.22um, as input port, 8 parallel cones of cutting
Shape silicon waveguide is used as output port.
Conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom determines according to distribution of light intensity,
The width at the right bottom is 500nm.8 parallel conical silicon waveguides are as shown in Fig. 2 numbering is respectively passage 1~logical from top to bottom
Road 8, whole conical section is symmetrical on X-axis, and X-direction is identical with the direction of propagation of light；
The length of 8 passages is identical, is 10um, and height is also identical, is 0.22um, and the width of each passage is according to light
Ratio distribution of the field intensity in cross section yz directions determines that two symmetrical channel sizes are identical, specially respectively：The He of passage 1
From 3.68um~0.5um transition, the width of passage 2 and passage 7 is from 0.92um~0.5um transition, the He of passage 3 for the width of passage 8
From 0.71um~0.5um transition, the width of passage 4 and passage 5 is from 0.69um~0.5um transition for the width of passage 6.
Light is propagated in integrated-type luminous power beam splitter on described piece, and realizes the mistake to the distribution of incident constant power
Journey is as follows：
As shown in Fig. 2 in equally distributed light field, a branch of incident light source is input into from the center of rectangular silicon waveguide, utilize
Three-D limited FD―TD method (3D-FDTD), by business software Lumerical analogue simulation optical field distributions, according to light in ripple
The optical field distribution figure of transmission theory and emulation in leading, learns that intensity distribution of the light in rectangular silicon waveguide is：The light at center
Field intensity is maximum, is then gradually reduced to both sides；After light transmits 10um or so in rectangular silicon waveguide, into 8 parallel cones
In shape silicon waveguide, according to simulated light field pattern, the width range of each conical silicon waveguide channels is obtained；And bored by 8 passages
The power transmission spectrum of the output port of shape silicon waveguide, so that it is determined that the width at trapezoidal left side bottom, as shown in figure 3, its abscissa is
Wavelength, ordinate is transmission spectrum；The width dimensions for finely tuning each passage determine suitable cutting ratio, and passage 8 is arrived according to passage 1
The width of different cutting ratios, realizes the luminous power beam splitting of 8 passages, the mean allocation of incident optical power is obtained from figure, then
From 8 conical silicon waveguide constant power outputs.
The present invention can realize the light constant power distribution of N number of symmetric channel number, and N is integer；With the increase of port number, only edge
The direction longitudinal size of Y direction i.e. silicon duct width increases；It is basically unchanged along the lateral dimension of X-direction,
Exactly N number of conical silicon waveguide length is fixed as 10um, and thickness is fixed as 220nm, does not increase with the increase of port number, only
The width at trapezoidal left side bottom is redefined according to optical field distribution, width increases with the increase of port number；According to optical field distribution,
The intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.
Claims (6)
1. integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials, it is characterised in that including a rectangular silicon ripple
The conical silicon waveguide parallel with 8 is led, both are cascaded in seamless connection；Rectangular silicon waveguide as light input port；8
Parallel conical silicon waveguide is used as output port；
Respectively 1~passage of passage 8 is numbered in 8 parallel conical silicon waveguides from top to bottom, and whole conical section is on X-axis pair
Claim, X-direction is identical with the direction of propagation of light；
The length of 8 passages is identical, is 10um, and height is also identical, is 0.22um, and the width of each passage is according to light field intensity
Spend the ratio distribution in cross section yz directions and determine that two symmetrical channel sizes are identical, specially respectively：Passage 1 and passage 8
Width from 3.68um~0.5um transition, the width of passage 2 and passage 7 is from 0.92um~0.5um transition, passage 3 and passage 6
Width from 0.71um~0.5um transition, the width of passage 4 and passage 5 is from 0.69um~0.5um transition.
2. integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials as claimed in claim 1, it is characterised in that
The silicon that described rectangular silicon waveguide and conical silicon waveguide are selected, refractive index is 3.46.
3. integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials as claimed in claim 1, it is characterised in that
The * long * wide sizes high of described rectangular silicon waveguide are：10um*12um*0.22um.
4. integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials as claimed in claim 1, it is characterised in that
Described conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom determines according to distribution of light intensity, right
The width at side bottom is fixed value.
Light is carried out using integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials described in claim 1 5. etc.
The process of power distribution is as follows：In equally distributed light field, a branch of incident light is input into from the center of rectangular silicon waveguide, according to light
Transmission theory in the waveguide and the distribution map of the electric field of emulation, learn that intensity distribution of the light in rectangular silicon waveguide is：Center
Distribution of light intensity it is maximum, be then gradually reduced to both sides；According to distribution map, the width model of each conical silicon waveguide channels is obtained
Enclose；And the power output transmission spectrum for passing through conical silicon waveguide, the width dimensions of each passage are finely tuned, determine passage 1 to passage 8 not
Width in proportion, realizes the mean allocation of 8 channel optical powers.
6. integrated-type luminous power beam splitter on a kind of piece based on silicon substrate Meta Materials as claimed in claim 1, it is characterised in that
Integrated-type luminous power beam splitter can realize the light constant power distribution of N number of port number on described piece, and N is integer；With port number
Increase, only along silicon duct width direction longitudinal size increase；It is basically unchanged along the lateral dimension in silicon waveguide length direction, no
Increase with the increase of port number；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio chi of N number of silicon waveguide
It is very little.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108941925A (en) * | 2018-07-27 | 2018-12-07 | 湖北工业大学 | Femtosecond laser processing device and its 1x8 ridge optical splitter of processing |
| CN109581586A (en) * | 2019-01-10 | 2019-04-05 | 上海理工大学 | A kind of sub- chip of compact type silicon nitride wavelength division multiplexed light |
| CN110646883A (en) * | 2019-09-30 | 2020-01-03 | 华东师范大学重庆研究院 | Three-way silicon-based beam splitter chip and manufacturing method thereof |
| CN111025469A (en) * | 2019-12-26 | 2020-04-17 | 华中科技大学 | Silicon-based multimode 3dB beam splitter based on multimode interference coupler |
| CN111679364A (en) * | 2020-06-02 | 2020-09-18 | 中国科学院上海微系统与信息技术研究所 | Suspended edge coupler applied to intermediate infrared band |
| CN112601994A (en) * | 2018-09-06 | 2021-04-02 | 三菱电机株式会社 | Photonic device for splitting light beam |
| CN113325514A (en) * | 2021-05-26 | 2021-08-31 | 中国科学院上海微系统与信息技术研究所 | Design method of tapered waveguide region of optical power beam splitter and optical power beam splitter |
| CN113555658A (en) * | 2021-07-16 | 2021-10-26 | 宁波大学 | Compact 1 XN MMI type optical power distributor |
| CN113709440A (en) * | 2021-08-24 | 2021-11-26 | 杭州瑞杰珑科技有限公司 | Visual impairment auxiliary device and image processing method thereof |
| CN114594545A (en) * | 2020-12-07 | 2022-06-07 | 格芯(美国)集成电路科技有限公司 | Optical power separator with side wall element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108941925A (en) * | 2018-07-27 | 2018-12-07 | 湖北工业大学 | Femtosecond laser processing device and its 1x8 ridge optical splitter of processing |
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| CN109581586A (en) * | 2019-01-10 | 2019-04-05 | 上海理工大学 | A kind of sub- chip of compact type silicon nitride wavelength division multiplexed light |
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| CN111025469A (en) * | 2019-12-26 | 2020-04-17 | 华中科技大学 | Silicon-based multimode 3dB beam splitter based on multimode interference coupler |
| CN111679364A (en) * | 2020-06-02 | 2020-09-18 | 中国科学院上海微系统与信息技术研究所 | Suspended edge coupler applied to intermediate infrared band |
| CN111679364B (en) * | 2020-06-02 | 2021-07-27 | 中国科学院上海微系统与信息技术研究所 | Suspended edge coupler applied to intermediate infrared band |
| CN114594545A (en) * | 2020-12-07 | 2022-06-07 | 格芯(美国)集成电路科技有限公司 | Optical power separator with side wall element |
| CN114594545B (en) * | 2020-12-07 | 2023-12-19 | 格芯(美国)集成电路科技有限公司 | Optical power splitter with side wall element |
| CN113325514A (en) * | 2021-05-26 | 2021-08-31 | 中国科学院上海微系统与信息技术研究所 | Design method of tapered waveguide region of optical power beam splitter and optical power beam splitter |
| CN113325514B (en) * | 2021-05-26 | 2022-06-24 | 中国科学院上海微系统与信息技术研究所 | Design method of tapered waveguide region of optical power beam splitter and optical power beam splitter |
| CN113555658B (en) * | 2021-07-16 | 2023-03-21 | 宁波大学 | Compact 1 XN MMI type optical power distributor |
| CN113555658A (en) * | 2021-07-16 | 2021-10-26 | 宁波大学 | Compact 1 XN MMI type optical power distributor |
| CN113709440A (en) * | 2021-08-24 | 2021-11-26 | 杭州瑞杰珑科技有限公司 | Visual impairment auxiliary device and image processing method thereof |
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| CN106772793B (en) | 2019-10-18 |
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